JP2007109894A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 78
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 230000004888 barrier function Effects 0.000 claims abstract description 202
- 239000011229 interlayer Substances 0.000 claims abstract description 56
- 239000002184 metal Substances 0.000 claims description 163
- 229910052751 metal Inorganic materials 0.000 claims description 163
- 238000000034 method Methods 0.000 claims description 34
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- 238000001312 dry etching Methods 0.000 description 10
- 230000005012 migration Effects 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】層間絶縁膜101及びCu膜104を有する配線105上に層間絶縁膜107を形成し、層間絶縁膜107にビア109及びトレンチ108を形成し、Cu膜104を露出させる。次に、Cu膜104にビア109よりも内径の大きい凹部110を形成した後、バリア金属膜111を形成する。次いで、バリア金属膜111をリスパッタすることで凹部110にバリアメタル金属膜111を埋め込むとともに、角に丸みを帯びた下凸な形状を有するビア112を形成する。次に、ビア112及びトレンチ108にバリア金属膜113、Cu膜114を順次形成する。次いで、Cu膜114、バリア金属膜113及びバリア金属膜111を除去する。
【選択図】図2
Description
本発明の第2の実施形態に係る半導体装置の製造装置及びその製造方法について説明する。
101、201 第1の層間絶縁膜
103、203 第1のバリア金属膜
104、204 第1のCu膜
105、205 第1の配線
106、206 ライナー絶縁膜
107、207 第2の層間絶縁膜
108、208 第2のトレンチ
109、209 第1のビア
112、212 第2のビア
110、210 凹部
111、211 第2のバリア金属膜
113、213 第3のバリア金属膜
114、214 第2のCu膜
115、215 プラグ
116、216 第2の配線
Claims (19)
- 半導体基板上に形成された第1の絶縁膜と、
前記第1の絶縁膜に形成された第1の配線と、
前記第1の絶縁膜上に形成された第2の絶縁膜と、
前記第2の絶縁膜に形成されたプラグとを備え、
前記プラグは前記第1の配線に突き刺さるように形成され、第1のバリア膜、第2のバリア膜及び金属膜からなり、
前記第1の絶縁膜は前記第2の絶縁膜の下の部分に前記プラグよりも径の大きい凹部を有しており、
前記第1のバリア膜は、前記プラグの側面を覆い、且つ、前記凹部を埋め込むように形成されており、
前記第2のバリア膜は、前記第1のバリア膜の上から前記プラグの側面を覆い、且つ、前記第1の配線と前記プラグとが接触する部分を覆うように形成されていることを特徴とする半導体装置。 - 前記凹部を埋め込むように形成された前記第1のバリア膜の膜厚は、前記プラグの側面に形成された前記第1のバリア膜の膜厚よりも厚くなっていることを特徴とする請求項1に記載の半導体装置。
- 前記第2の絶縁膜の前記プラグの上に設けられた第2の配線をさらに有することを特徴とする請求項1に記載の半導体装置。
- 前記第2の絶縁膜は、ライナー膜と、前記ライナー膜の上に形成された層間絶縁膜とを含むことを特徴とする請求項1に記載の半導体装置。
- 半導体基板上に形成された第1の絶縁膜と、
前記第1の絶縁膜に形成された第1の配線と、
前記第1の絶縁膜上に形成された第2の絶縁膜と、
前記第2の絶縁膜上に形成された第3の絶縁膜と、
前記第2の絶縁膜及び前記第3の絶縁膜に形成されたプラグとを備え、
前記プラグは前記第1の配線に突き刺さるように形成され、第1のバリア膜、第2のバリア膜及び金属膜からなり、
前記第2の絶縁膜は前記プラグの径よりも大きく後退しており、
前記第1のバリア膜は、前記プラグの側面を覆い、且つ、前記第2の絶縁膜の後退した部分を埋め込むように形成されており、
前記第2のバリア膜は、前記第1のバリア膜の上から前記プラグの側面を覆い、且つ、前記第1の配線と前記プラグとが接触する部分を覆うように形成されていることを特徴とする半導体装置。 - 前記凹部を埋め込むように形成された前記第1のバリア膜の膜厚は、前記プラグの側面に形成された前記第1のバリア膜の膜厚よりも厚くなっていることを特徴とする請求項5に記載の半導体装置。
- 前記第2の絶縁膜の前記プラグの上に設けられた第2の配線をさらに有することを特徴とする請求項5に記載の半導体装置。
- 前記第2の絶縁膜は、前記第1の絶縁膜及び前記第3の絶縁膜に対してエッチングにおける選択性を有する材料からなることを特徴とする請求項5に記載の半導体装置。
- 半導体基板上に形成された第1の絶縁膜に第1の溝を形成し、前記第1の溝にバリア膜及び第1の金属膜からなる第1の配線を形成する工程(a)と、
前記第1の絶縁膜の上に第2の絶縁膜を形成する工程(b)と、
前記第2の絶縁膜を除去して前記第1の金属膜を露出させて第2の溝を形成する工程(c)と、
前記第2の溝に露出した前記第1の金属膜の上部を除去して前記第2の溝の径よりも大きい凹部を形成する工程(d)と、
前記凹部の底面及び前記第2の溝の側面を覆うように第1のバリア膜を形成する工程(e)と、
前記凹部の底面に形成された前記第1のバリア膜を除去し、前記凹部の側面に堆積させる工程(f)と、
前記第1のバリア膜の上から前記凹部及び前記第2の溝を覆うように第2のバリア膜を形成する工程(g)と、
前記第2のバリア膜の上から前記凹部及び前記第2の溝を埋めるように第2の金属膜を形成する工程(h)と、
前記第1のバリア膜、第2のバリア膜及び前記第2の金属膜を除去して前記第2の絶縁膜を露出させてプラグを形成する工程(i)とを有することを特徴とする半導体装置の製造方法。 - 半導体基板上に形成された第1の絶縁膜に第1の溝を形成し、前記第1の溝にバリア膜及び第1の金属膜からなる第1の配線を形成する工程(a)と、
前記第1の絶縁膜の上に第2の絶縁膜及び第3の絶縁膜を順次形成する工程(b)と、
前記第2の絶縁膜及び第3の絶縁膜を除去して前記第1の金属膜を露出させて第2の溝を形成する工程(c)と、
前記第2の絶縁膜を後退させて前記第2の溝の径よりも大きい凹部を形成する工程(d)と、
前記凹部の底面及び前記第2の溝の側面を覆うように第1のバリア膜を形成する工程(e)と、
前記凹部の底面に形成された前記第1のバリア膜を除去し、前記凹部の側面に堆積させる工程(f)と、
前記第1のバリア膜の上から前記凹部及び前記第2の溝を覆うように第2のバリア膜を形成する工程(g)と、
前記第2のバリア膜の上から前記凹部及び前記第2の溝を埋めるように第2の金属膜を形成する工程(h)と、
前記第1のバリア膜、第2のバリア膜及び前記第2の金属膜を除去して前記第2の絶縁膜を露出させてプラグを形成する工程(i)とを有することを特徴とする半導体装置の製造方法。 - 前記工程(c)の前に、前記第2の絶縁膜における前記第1の配線の上部に第3の溝を形成する工程(x)をさらに有し、
前記工程(c)では、前記第3の溝の下部に前記第2の溝を形成し、
前記工程(e)では、前記第3の溝の側面及び底面をも覆うように第1のバリア膜を形成し、
前記工程(g)では、前記第3の溝をも覆うように第2のバリア膜を形成し、
前記工程(h)では、前記第3の溝をも埋めるように第2の金属膜を形成し、
前記工程(i)では、第2の配線を形成することを特徴とする請求項9又は10に記載の半導体装置の製造方法。 - 前記工程(d)では、前記第2の溝に露出した前記第1の金属膜の上部を酸化した後に、酸化された部分を洗浄により除去することによって前記凹部を形成することを特徴とする請求項9又は10に記載の半導体装置の製造方法。
- 前記工程(d)では、前記第2の溝に露出した前記第1の金属膜の上部を熱酸化した後に、酸化された部分を洗浄により除去することによって前記凹部を形成することを特徴とする請求項9又は10に記載の半導体装置の製造方法。
- 前記工程(d)では、前記第2の溝に露出した前記第1の金属膜の上部をアッシングによって酸化した後に、酸化された部分を洗浄により除去することによって前記凹部を形成することを特徴とする請求項9又は10に記載の半導体装置の製造方法。
- 前記工程(d)では、前記第2の溝に露出した前記第1の金属膜の上部を酸性溶液またはアルカリ溶液を用いたウエットエッチングを用いて除去することによって前記凹部を形成することを特徴とする請求項9又は10に記載の半導体装置の製造方法。
- 前記工程(e)において、前記凹部の底面に形成された第1のバリア膜の膜厚は、前記凹部の深さよりも浅くなるように形成されていることを特徴とする請求項9に記載の半導体装置の製造方法。
- 前記工程(e)において、前記凹部の底面に形成された第1のバリア膜の膜厚は、前記第2の絶縁膜の膜厚よりも薄くなることを特徴とする請求項10に記載の半導体装置の製造方法。
- 前記工程(f)において、前記凹部の側面に堆積された前記第1のバリア膜の膜厚は、前記第2の溝の側面に形成された第1のバリア膜の膜厚よりも厚くなっていることを特徴とする請求項9又は10に記載の半導体装置の製造方法。
- 前記工程(f)において、前記凹部の内径が前記2の溝の内径と等しくなっていることを特徴とする請求項9又は10に記載の半導体装置の製造方法。
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