JP2007088819A5 - - Google Patents
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- Publication number
- JP2007088819A5 JP2007088819A5 JP2005275190A JP2005275190A JP2007088819A5 JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5 JP 2005275190 A JP2005275190 A JP 2005275190A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- thin film
- piezoelectric
- piezoelectric thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010408 film Substances 0.000 claims 8
- 239000010409 thin film Substances 0.000 claims 5
- 229910003460 diamond Inorganic materials 0.000 claims 4
- 239000010432 diamond Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005275190A JP2007088819A (ja) | 2005-09-22 | 2005-09-22 | 圧電薄膜振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005275190A JP2007088819A (ja) | 2005-09-22 | 2005-09-22 | 圧電薄膜振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007088819A JP2007088819A (ja) | 2007-04-05 |
JP2007088819A5 true JP2007088819A5 (fr) | 2008-10-16 |
Family
ID=37975359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005275190A Withdrawn JP2007088819A (ja) | 2005-09-22 | 2005-09-22 | 圧電薄膜振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2007088819A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7982363B2 (en) * | 2007-05-14 | 2011-07-19 | Cree, Inc. | Bulk acoustic device and method for fabricating |
JP5790226B2 (ja) * | 2011-07-15 | 2015-10-07 | 株式会社村田製作所 | 圧電薄膜素子の製造方法 |
US20200021270A1 (en) * | 2018-07-11 | 2020-01-16 | Gregory Walker Johnson | Diamond nano resonator semi conductor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10209794A (ja) * | 1997-01-21 | 1998-08-07 | Mitsubishi Materials Corp | 圧電薄膜共振子 |
JP2001102902A (ja) * | 1999-09-29 | 2001-04-13 | Kyocera Corp | 圧電共振子 |
JP3860698B2 (ja) * | 1999-12-27 | 2006-12-20 | 京セラ株式会社 | 圧電共振子 |
JP4513169B2 (ja) * | 2000-05-17 | 2010-07-28 | 株式会社村田製作所 | 圧電フィルタ、通信装置および圧電フィルタの製造方法 |
JP3953921B2 (ja) * | 2002-09-10 | 2007-08-08 | 日本プレーテック株式会社 | ダイヤモンドqcmの作製方法及びそのダイヤモンドqcm |
KR20060009811A (ko) * | 2003-05-26 | 2006-02-01 | 스미토모덴키고교가부시키가이샤 | 다이아몬드 피복 전극 및 그의 제조 방법 |
-
2005
- 2005-09-22 JP JP2005275190A patent/JP2007088819A/ja not_active Withdrawn
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