JP2007088819A5 - - Google Patents

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Publication number
JP2007088819A5
JP2007088819A5 JP2005275190A JP2005275190A JP2007088819A5 JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5 JP 2005275190 A JP2005275190 A JP 2005275190A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5
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JP
Japan
Prior art keywords
electrode
film
thin film
piezoelectric
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005275190A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007088819A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005275190A priority Critical patent/JP2007088819A/ja
Priority claimed from JP2005275190A external-priority patent/JP2007088819A/ja
Publication of JP2007088819A publication Critical patent/JP2007088819A/ja
Publication of JP2007088819A5 publication Critical patent/JP2007088819A5/ja
Withdrawn legal-status Critical Current

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JP2005275190A 2005-09-22 2005-09-22 圧電薄膜振動子 Withdrawn JP2007088819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Publications (2)

Publication Number Publication Date
JP2007088819A JP2007088819A (ja) 2007-04-05
JP2007088819A5 true JP2007088819A5 (fr) 2008-10-16

Family

ID=37975359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005275190A Withdrawn JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Country Status (1)

Country Link
JP (1) JP2007088819A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7982363B2 (en) * 2007-05-14 2011-07-19 Cree, Inc. Bulk acoustic device and method for fabricating
JP5790226B2 (ja) * 2011-07-15 2015-10-07 株式会社村田製作所 圧電薄膜素子の製造方法
US20200021270A1 (en) * 2018-07-11 2020-01-16 Gregory Walker Johnson Diamond nano resonator semi conductor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209794A (ja) * 1997-01-21 1998-08-07 Mitsubishi Materials Corp 圧電薄膜共振子
JP2001102902A (ja) * 1999-09-29 2001-04-13 Kyocera Corp 圧電共振子
JP3860698B2 (ja) * 1999-12-27 2006-12-20 京セラ株式会社 圧電共振子
JP4513169B2 (ja) * 2000-05-17 2010-07-28 株式会社村田製作所 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP3953921B2 (ja) * 2002-09-10 2007-08-08 日本プレーテック株式会社 ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ
KR20060009811A (ko) * 2003-05-26 2006-02-01 스미토모덴키고교가부시키가이샤 다이아몬드 피복 전극 및 그의 제조 방법

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