JP2006319154A - Carrier system for suspended pattern hoisting/lowering carriage - Google Patents

Carrier system for suspended pattern hoisting/lowering carriage Download PDF

Info

Publication number
JP2006319154A
JP2006319154A JP2005140619A JP2005140619A JP2006319154A JP 2006319154 A JP2006319154 A JP 2006319154A JP 2005140619 A JP2005140619 A JP 2005140619A JP 2005140619 A JP2005140619 A JP 2005140619A JP 2006319154 A JP2006319154 A JP 2006319154A
Authority
JP
Japan
Prior art keywords
carriage
process annular
conveyor
lowering
annular track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005140619A
Other languages
Japanese (ja)
Other versions
JP4858673B2 (en
Inventor
Senzo Kyutoku
千三 久徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Shinko Inc
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Priority to JP2005140619A priority Critical patent/JP4858673B2/en
Publication of JP2006319154A publication Critical patent/JP2006319154A/en
Application granted granted Critical
Publication of JP4858673B2 publication Critical patent/JP4858673B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Platform Screen Doors And Railroad Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrier system for a suspended pattern hoisting/lowering carriage which comprises annular rails in a plurality of steps and annular rails between the steps associated with the respective in-step annular rails for various types of processing on the surface of a semiconductor substrate (wafer), and wherein the suspended pattern hoisting/lowering carriage running on the inter-step annular rails maintains its smooth running even when the carriage frequently runs between the specific in-step annular rails. <P>SOLUTION: A conveyor system 5 is provided between annular rails 1b and 1e in predetermined different processes, and makes the suspended hoisting/lowering carriage 2 frequently runs therebetween, so that an object (FOUP) 8 to be transported is transferred to and received from the carriage 2 of the in-step annular rails 1b and 1e at both ends of the conveyor system 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、例えば、半導体製造過程において、ストッカー及び異なる表面処理を行う複数の半導体処理装置（以下、ステーションという）に沿って敷設される工程内環状軌道を複数個備え、各工程内環状軌道にて走行する懸垂式昇降搬送台車（以下、ＯＨＴ台車という）にてウエハを挿脱自在に収納した容器（以下、ＦＯＵＰという）を移送させ、当該ＦＯＵＰに収納した半導体製造用基板（以下、ウエハという）は所定のステーションにて必要な表面処理を受ける装置であって、各工程内環状軌道との連係を有する工程間環状軌道を備えたＯＨＴ台車の搬送システムに関するものである。 The present invention includes, for example, a plurality of in-process annular tracks laid along a stocker and a plurality of semiconductor processing apparatuses (hereinafter referred to as stations) that perform different surface treatments in a semiconductor manufacturing process. A container (hereinafter referred to as FOUP) in which a wafer is detachably accommodated is transferred by a suspended lifting transport carriage (hereinafter referred to as an OHT carriage), and the semiconductor manufacturing substrate (hereinafter referred to as a wafer) accommodated in the FOUP is transferred. ) Is an apparatus for receiving a necessary surface treatment at a predetermined station, and relates to a transport system for an OHT carriage having an inter-process annular track that is linked to each in-process annular track.

近年、クリーンルーム内の工程内環状軌道に沿って配置されるウエハの各種表面処理（洗浄、成膜、レジスト、ＣＶＤ、検査ほか）を行う一連のステーションの中で必要な処理を行うために前記ウエハを収納したＦＯＵＰを、ＯＨＴ台車を用いて搬送することが多い。
この理由は、被搬送物の所定の経路（クリーンルームの天井部に敷設される）に沿う移送作用に加えて昇降作用を併せ有しているため、前記ＦＵＯＰ等の被搬送物を、ＦＯＵＰ内のウエハの特定処理を行っているステーションから、他の処理を行うステーションへの移行が容易であることによる。 In recent years, in order to perform the necessary processing in a series of stations for performing various surface treatments (cleaning, film formation, resist, CVD, inspection, etc.) of wafers arranged along an in-process annular track in a clean room. In many cases, the FOUP containing the FOUP is transported using an OHT cart.
The reason for this is that it has a lifting and lowering action in addition to a transporting action along a predetermined path of the transported object (laid on the ceiling of the clean room), so that the transported object such as the FUOP is placed in the FOUP. This is because it is easy to shift from a station that performs wafer specific processing to a station that performs other processing.

ところで、前記複数の工程内環状軌道は、特定の工程内環状軌道にあるステーションにて特定の表面処理（例えば、洗浄処理）後、他の工程内環状軌道にあるステーションにて前記特定の表面処理とは異なる表面処理（例えば、ＣＶＤ処理）が実施される。
これに対応するため、ウエハの表面処理は、特定の一つの工程内環状軌道のみにて所望の表面処理が困難で、異なる工程内環状軌道に対してＯＨＴ台車を移行させるために全ての工程内環状軌道に連係する工程間環状軌道を設けている。 By the way, the plurality of in-process annular tracks are subjected to a specific surface treatment (for example, a cleaning process) at a station in a specific in-process annular track, and then the specific surface treatment at a station in another in-process annular track. Different surface treatment (for example, CVD treatment) is performed.
In order to cope with this, the surface treatment of the wafer is difficult to achieve the desired surface treatment with only one specific in-process annular track, and in order to transfer the OHT carriage to different in-process annular tracks, An inter-process annular track that is linked to the annular track is provided.

このように、複数の工程内環状軌道に連係する工程間環状軌道を設け、異なる工程内環状軌道相互間をＯＨＴ台車が移行できるようにした先行技術として、下記特許文献１がある。
この特許文献１に開示の技術における、本願発明と係りのある構成は、図１を参照して複数の工程内搬送用短距離搬送路（工程内走行ループ２０〜２５）と、これ等走行ループ２０〜２５と被搬送物の搬送について連係をもつ工程間長距離搬送路（工程間走行ループ２、３）を主体とした構成である。 As a prior art in which an inter-process annular track linked to a plurality of in-process annular tracks is provided and an OHT carriage can move between different in-process annular tracks, there is Patent Document 1 below.
In the technology disclosed in this patent document 1, the configuration related to the present invention includes a plurality of short-distance conveyance paths for in-process conveyance (in-process traveling loops 20 to 25) and these traveling loops with reference to FIG. This is a configuration mainly composed of an inter-process long-distance conveyance path (inter-process travel loops 2 and 3) that is linked to conveyance of the objects to be conveyed 20 to 25.

即ち、工程内走行ループ２０〜２５を走行する台車（図３を参照）はストッカー及び各種処理（例えばウエハにおける洗浄、ＣＶＤほかの表面処理）のため被搬送物の授受に適した構成を有し、工程間走行ループ２、３を走行する台車（図２を参照）は高速搬送に適した構成としていることによる被搬送物の搬送効率の低下を改善することを要旨としている。
より具体的に述べると、例えば、工程内ループ２３で特定の工程を終えた搬送台車を、被搬送物を保持したままの状態で工程内ループ２２に移行させるようにしている。 That is, the carriage (see FIG. 3) that travels in the in-process travel loops 20 to 25 has a configuration suitable for receiving and transferring the object to be transferred for the stocker and various processes (for example, cleaning of wafers, CVD and other surface processes) The trolley (see FIG. 2) that travels between the inter-process travel loops 2 and 3 is intended to improve the decrease in the transport efficiency of the object to be transported due to the configuration suitable for high-speed transport.
More specifically, for example, a transport carriage that has finished a specific process in the in-process loop 23 is transferred to the in-process loop 22 while holding the object to be transported.

これによって、
（１）工程内走行ループ２３を走行する台車から第１のバッファとしてのストッカーへの移載
（２）ストッカーから工程間走行ループ２における搬送用台車への被搬送物の移載
（３）工程間走行ループ２における搬送用台車から第２のバッファとしてのストッカーへの移載
（４）この第２のバッファとしてのストッカーから工程内走行ループ２２を走行する台車への移載
の４工程を要した従来技術の効率の悪い欠点を改善するために、工程内走行ループ２０〜２５を走行する台車が工程間走行ループ２、３にも走行できるようにしている。
また、工程間走行ループ２、３には、台車の無駄な走行を減少させるようにショートカット４〜７を設けている。 by this,
(1) Transfer from a cart traveling in the in-process travel loop 23 to a stocker as a first buffer (2) Transfer of an object to be transported from the stocker to a transport cart in the inter-process travel loop 2 (3) (4) 4 steps of transfer from the stocker as the second buffer to the cart that travels in the in-process travel loop 22 are required. In order to improve the inefficient drawback of the prior art, the carriage traveling in the in-process travel loops 20 to 25 can also travel in the inter-process travel loops 2 and 3.
Further, the inter-process travel loops 2 and 3 are provided with shortcuts 4 to 7 so as to reduce unnecessary travel of the carriage.

特開２００２−９６７２５JP 2002-96725 A

クリーンルーム内での半導体製造工程においては、製品として完成させるまでには多数のウエハの表面処理（洗浄、ＣＶＤほか多種類の工程及び各種工程毎の仕様状況に応じた多種類の表面処理）工程が必要であり、通常、多数の工程内環状軌道の敷設された工場設備が必要となる。
そして、前記ウエハはＦＯＵＰに複数枚収納され、当該ＦＯＵＰはＯＨＴ台車にて順次所定のステーションに搬送され、各ステーションにてウエハは所望の表面処理を受ける。 In a semiconductor manufacturing process in a clean room, many wafer surface treatments (cleaning, CVD, and other types of processes and various types of surface treatment according to the specifications of each process) are required before the product is completed. Necessary and usually requires a factory facility with a large number of in-process annular tracks.
A plurality of the wafers are stored in a FOUP, and the FOUP is sequentially transferred to a predetermined station by an OHT carriage, and the wafer is subjected to a desired surface treatment at each station.

この際、複数の工程内環状軌道は、工程間環状軌道にて連係されているためウエハ収納用ＦＯＵＰを搬送するＯＨＴ台車は、特定の工程内環状軌道にあるステーションから、他の工程内環状軌道にあるステーションに工程間環状軌道を通じて移行する。
搬送面からは各ステーションが製造工程に従い、順次配置されるのが合理的であるが、設備はガス配管、機器の共用、給排水、給電、作業環境、安全面など生産工場全体の総合的観点から決定されるため、ＯＨＴ台車は必ずしも隣接する工程内環状軌道間における工程間環状軌道のみに移行するとは限らない。 At this time, since the plurality of in-process annular tracks are linked by the inter-process annular track, the OHT carriage for transporting the wafer storage FOUP is transferred from a station in a specific in-process annular track to another in-process annular track. It moves to the station which exists in through an annular track between processes.
From the transport side, it is reasonable to arrange each station sequentially according to the manufacturing process, but the facilities are from a comprehensive point of view of the entire production plant, such as gas piping, equipment sharing, water supply / drainage, power supply, work environment, and safety. Therefore, the OHT carriage does not necessarily move only to the inter-process annular track between the adjacent in-process annular tracks.

従って、工程間環状軌道に沿って隣接する工程内環状軌道相互間、あるいは工程間環状軌道を介して隣接する工程内環状軌道相互間であって、特にＯＨＴ台車の移動頻度が高い場合には、この間を結ぶ工程間環状軌道の分岐合流部において、ＯＨＴ台車が渋滞し、近接して走行中のＯＨＴ台車の一部が衝突防止手段を作動させて停止するなど、工程間環状軌道上をＯＨＴ台車が円滑に走行できず、工場全体の生産効率が低下する傾向があった。
この効率低下は、前記特許文献におけるショートカット４〜７によってある程度改善されると云えるが十分でない。 Accordingly, between the in-process annular tracks adjacent to each other along the inter-process annular track, or between the in-process annular tracks adjacent to each other via the inter-process annular track, and particularly when the movement frequency of the OHT carriage is high, At the branching junction of the inter-process annular track connecting between them, the OHT carriage is congested, and a part of the OHT carriage that is running nearby is stopped by operating the collision prevention means. However, there was a tendency that the production efficiency of the whole factory was lowered because the vehicle could not run smoothly.
This reduction in efficiency can be said to be improved to some extent by the shortcuts 4 to 7 in the patent document, but it is not sufficient.

そこで、本発明の目的は、工程間環状軌道に沿って隣接する工程内環状軌道相互間、あるいは工程間環状軌道を介して隣接する工程内環状軌道相互間であって、特にＯＨＴ台車の移動頻度が高い工程内環状軌道相互間において、ＯＨＴ台車によって搬送される被搬送物を移動させるコンベアを備える構成とし、工程間環状軌道を走行するＯＨＴ台車の搬送効率を向上させるＯＨＴ台車の搬送システムを提供することにある。 Accordingly, an object of the present invention is between the in-process annular tracks adjacent to each other along the inter-process annular track or between the in-process annular tracks adjacent to each other via the inter-process annular track, and in particular, the movement frequency of the OHT carriage. Provide a transport system for an OHT cart that improves the transport efficiency of the OHT cart that travels on the inter-process annular track with a conveyor that moves the object to be transported by the OHT cart between the intra-process annular tracks There is to do.

課題を解決するための手段及び効果Means and effects for solving the problems

上記課題を解決するため、請求項１に記載のＯＨＴ台車の搬送システムは、ＯＨＴ台車の工程内環状軌道に沿って、前記ＯＨＴ台車によって搬送される被搬送物に収納される基板に対し各種処理を施すステーションを複数箇所に設けられた前記工程内環状軌道を複数個配置し、これらの工程内環状軌道相互間と連係する工程間環状軌道を備えたＯＨＴ台車の搬送システムにおいて、前記被搬送物を、工程間環状軌道を経ずに所定の異なる工程内環状軌道相互間を移動させるコンベアを設けたことを特徴とする。 In order to solve the above-described problem, the OHT carriage transport system according to claim 1 performs various processes on the substrate stored in the transported object transported by the OHT carriage along the in-process annular track of the OHT carriage. In the transport system for an OHT carriage, wherein a plurality of the in-process annular raceways provided at a plurality of stations are arranged, and the inter-process annular raceways are linked to each other in the in-process annular raceways. Is provided with a conveyor for moving between predetermined different in-process annular tracks without passing through an inter-process annular track.

この請求項１に係る発明によれば、とりわけ０ＨＴ台車において被搬送物（例えば、ウエハ収納用ＦＯＵＰ）の搬送頻度の高い工程内環状軌道同士を結ぶ搬送手段が、OHT搬送用工程間環状軌道から、専用コンベアに替えることにより、工程間環状軌道は特定個所において発生するＯＨＴ台車の渋滞を大幅に解消できる。
従って、複数の工程内環状軌道と連係する工程間環状軌道におけるＯＨＴ台車の走行状況は殆ど停止することなく、ＯＨＴ台車の搬送システムにおける被搬送物の搬送効率の低下を来さない。 According to the first aspect of the present invention, the transfer means for connecting the in-process annular tracks having a high transfer frequency of the object to be transferred (for example, FOUP for wafer storage) particularly in the 0HT carriage is provided from the inter-process annular track for OHT transfer. By switching to a dedicated conveyor, the inter-process annular track can greatly eliminate the congestion of the OHT cart that occurs at a specific location.
Therefore, the running state of the OHT carriage on the inter-process annular raceway linked to the plurality of intra-process annular raceways hardly stops, and the transport efficiency of the transported object in the transport system of the OHT carriage does not decrease.

請求項２に記載のＯＨＴ台車の搬送システムは、請求項１に記載のＯＨＴ台車の搬送システムにおいて、前記基板が半導体製造用ウエハであり、前記被搬送物が前記ウエハを挿脱自在に収納した容器（ＦＯＵＰ）であることを特徴とする。
この請求項２に係る発明によれば、引用先の請求項１に係る発明の効果は元より、ＦＯＵＰに収納されるウエハの表面処理が、異なる工程間環状軌道にあるステーションにてなされる場合においてウエハの表面処理工程の効率向上を図ることができる。 The OHT carriage transfer system according to claim 2 is the OHT carriage transfer system according to claim 1, wherein the substrate is a semiconductor manufacturing wafer, and the transferred object stores the wafer in a removable manner. It is a container (FOUP).
According to the second aspect of the present invention, the effect of the invention according to the first aspect of the cited reference is based on the case where the surface treatment of the wafer stored in the FOUP is performed at a station in a different orbit between the processes. Thus, the efficiency of the wafer surface treatment process can be improved.

請求項３に記載のＯＨＴ台車の搬送システムは、請求項１又は２に記載のＯＨＴ台車の搬送システムにおいて、前記被搬送物を、工程間環状軌道を経ずに所定の異なる工程内環状軌道相互間を移動させるコンベアがローラコンベアであることを特徴とする
この請求項３に係る発明によれば、引用先の請求項１又は２に係る発明の効果は元より、所定の異なる工程間環状軌道相互間において、ＯＨＴ台車によって搬送される被搬送物のみをＯＨＴ台車に比べて簡単な構成にて効率よく搬送させることができる。 The transport system for an OHT cart according to claim 3 is the transport system for an OHT cart according to claim 1 or 2, wherein the object to be transported is passed through predetermined different in-process annular tracks without inter-process annular tracks. According to the invention according to claim 3, wherein the conveyor for moving between them is a roller conveyor, the effect of the invention according to claim 1 or 2 of the cited destination is based on an annular track between different predetermined steps. Only the objects to be transported by the OHT carriage can be efficiently transported between each other with a simpler configuration than the OHT carriage.

請求項４に記載のＯＨＴ台車の搬送システムは、請求項１乃至３の何れかに記載のＯＨＴ台車の搬送システムにおいて、前記ローラコンベアが、所定数のローラ、モータ及びモータの動力を各ローラに同期伝達する手段を単位モジュールとし、当該単位モジュールを複数個連接して設け、前記各単位モジュールを駆動させるモータの回転速度を各モジュール毎に制御させることを特長とする。
この請求項４に係る発明によれば、引用先の請求項１乃至３の何れかに係る発明の効果は元より、ローラコンベア上の被搬送物の搬送速度は単位モジュール毎に可変速でき、ローラコンベア上に複数の被搬送物が存在しても減速、一時停止等の制御によりこれら被搬送物同士を接触させることなく搬送させることができる。 The transport system for an OHT cart according to claim 4 is the transport system for an OHT cart according to any one of claims 1 to 3, wherein the roller conveyer supplies a predetermined number of rollers, a motor, and power of the motor to each roller. The unit for synchronous transmission is a unit module, and a plurality of unit modules are connected in series, and the rotational speed of the motor that drives each unit module is controlled for each module.
According to the invention according to claim 4, the effect of the invention according to any one of claims 1 to 3 of the cited reference can be originally made, and the conveyance speed of the object to be conveyed on the roller conveyor can be varied for each unit module. Even if there are a plurality of objects to be conveyed on the roller conveyor, the objects to be conveyed can be conveyed without being brought into contact with each other by control such as deceleration or temporary stop.

請求項５に記載のＯＨＴ台車の搬送システムは、請求項３又は４に記載のＯＨＴ台車の搬送システムにおいて、ローラコンベアが被搬送物の進行方向の両側に沿って配置される一連のローラからなり、少なくとも一方側に位置するローラに駆動力を与える手段を備え、各ローラには、被搬送物の搬送方向を規制する鍔部を有することを特徴とする。
この請求項５に係る発明によれば、引用先の請求項３又は４に係る発明の効果は元より、コンベアの被搬送物に接する面が当該搬送物の底部両側のごく僅かな帯状幅であり、塵埃の発生は殆ど無視されるように抑制され、とりわけ塵埃との接触を避けたいウエハを収納するＦＯＵＰの搬送に好適である。
また、駆動ローラと従動ローラを一体化したローラ方式に比較し、装置全体の軽量化の効果が大である。 The OHT cart transport system according to claim 5 is the OHT cart transport system according to claim 3 or 4, wherein the roller conveyor is composed of a series of rollers arranged along both sides in the traveling direction of the object to be transported. And a means for providing a driving force to at least one of the rollers located on one side, and each roller has a flange that regulates the conveyance direction of the object to be conveyed.
According to the invention according to claim 5, the effect of the invention according to claim 3 or 4 of the cited destination is the original, and the surface of the conveyor that contacts the object to be conveyed is a very small band width on both sides of the bottom of the object to be conveyed. The generation of dust is suppressed so as to be almost ignored, and is particularly suitable for transporting a FOUP that stores a wafer that is desired to avoid contact with dust.
Further, compared with a roller system in which a driving roller and a driven roller are integrated, the effect of reducing the weight of the entire apparatus is great.

請求項６に記載のＯＨＴ台車の搬送システムは、請求項１乃至５の何れかに記載のＯＨＴ台車の搬送システムにおいて、工程内環状軌道相互間を移動させるコンベアが、工程間環状軌道と直交する方向に隣接する一対の工程内環状軌道相互間において被搬送物を移動させるようにしたことを特徴とする。
この請求項６に係る発明によれば、引用先の請求項１乃至５の何れかに係る発明の効果は元より、被搬送物のＯＨＴ台車による工程間環状軌道を通じての搬送における搬送距離に比べてその距離を著しく短縮でき、被搬送物の搬送効率の向上が図れる。 The OHT cart transport system according to claim 6 is the OHT cart transport system according to any one of claims 1 to 5, wherein the conveyor for moving between the in-process annular tracks is orthogonal to the in-process annular track. The transported object is moved between a pair of in-process annular tracks adjacent in the direction.
According to the invention according to claim 6, the effect of the invention according to any one of claims 1 to 5 is cited as compared with the conveyance distance in the conveyance through the inter-process annular track by the OHT carriage of the object to be conveyed. The distance can be remarkably shortened, and the conveyance efficiency of the object to be conveyed can be improved.

請求項７に記載のＯＨＴ台車の搬送システムは、請求項１乃至４の何れかに記載のＯＨＴ台車の搬送システムにおいて、工程間環状軌道を挟み対向配置された１対の工程内環状軌道相互間を結ぶコンベアが、前記工程間環状軌道と４箇所で直交し、当該直交４箇所にはターンテーブルを配置し、且つ前記１対の工程内環状軌道の夫々に各２箇所で直交する平面視長方形状の環状軌道を形成することを特徴とする。
この請求項７に係る発明によれば、引用先の請求項１乃至４の何れかに係る発明の効果は元より、ローラコンベア上に被搬送物を放置しても、放置された被搬送物はエンドレスにローラコンベア上を周回し、他の被搬送物に対し受け渡しの障害になることはない。
従って、この環状ループを形成するコンベアシステムは被搬送物を一時的に滞留させる保管場所としての機能も有する。 The transport system for an OHT cart according to claim 7 is the OHT cart transport system according to any one of claims 1 to 4, wherein a pair of in-process annular tracks arranged between each other with the inter-process annular track interposed therebetween. Is a rectangular shape in plan view orthogonal to the inter-process annular track at four locations, a turntable disposed at the four orthogonal locations, and orthogonal to each of the pair of in-process annular tracks at two locations. It is characterized by forming a circular ring-shaped track.
According to the seventh aspect of the present invention, the effect of the invention according to any one of the first to fourth aspects of the present invention is based on the fact that, even if the conveyed object is left on the roller conveyor, Circulates endlessly on a roller conveyor and does not become an obstacle to delivery to other objects to be conveyed.
Therefore, the conveyor system forming the annular loop also has a function as a storage place for temporarily retaining the object to be conveyed.

請求項８に記載のＯＨＴ台車の搬送システムは、請求項１乃至５の何れかに記載のＯＨＴ台車の搬送システムにおいて、工程内環状軌道相互間を結ぶコンベアが４箇所に於いて工程間環状軌道に交差し、且つ隣接する工程内環状軌道との間において被搬送物を移動させるようにしたことを特徴とする The transport system for an OHT cart according to claim 8 is the OHT cart transport system according to any one of claims 1 to 5, wherein there are four conveyors connecting the in-process annular tracks to each other. It is characterized in that the object to be transported is moved between the adjacent in-process annular track and

この請求項８に係る発明によれば、引用先の請求項１乃至５の何れかに係る発明の効果は元より、特に工程間環状軌道に沿って隣接し、とりわけ被搬送物の流通が多い工程内環状軌道相互間はＯＨＴ台車による被搬送物の搬送を不用とすることができる。
従って、所定の工程内環状軌道相互間における被搬送物の移送は、ＯＨＴ台車による工程間環状軌道を通じての搬送における搬送距離に比べて搬送距離はほぼ同一であるにしても工程間環状軌道に沿って互いに隣接する工程内環状軌道であって特に両者間において被搬送物の流通頻度が多くても、工程間環状軌道を通過する被搬送物搬送用ＯＨＴ台車の密度の上昇を招くことはなく、衝突防止装置の作動に伴い、ＯＨＴ台車が停止し、システム全体における被搬送物の搬送効率の低下を招くことはない。 According to the invention according to claim 8, the effect of the invention according to any one of claims 1 to 5, which is cited, is adjoined along the inter-process annular track, and in particular, there is much circulation of the conveyed object. It is possible to eliminate the conveyance of the object to be conveyed by the OHT carriage between the annular tracks in the process.
Therefore, the transfer of the object to be transported between the predetermined intra-process annular tracks follows the inter-process annular track even though the transport distance is substantially the same as the transport distance in the transport through the inter-process annular track by the OHT carriage. Even if there is a large circulation frequency of the conveyed objects between the two annular raceways adjacent to each other, in particular, the density of the OHT carriage for transporting the object to be conveyed that passes through the annular track between the processes is not increased. Along with the operation of the collision prevention device, the OHT carriage stops, and the conveyance efficiency of the object to be conveyed in the entire system is not reduced.

請求項９に記載のＯＨＴ台車の搬送システムは、請求項１乃至８の何れかに記載のＯＨＴ台車の搬送システムにおいて、コンベアの両端部に置かれた被搬送物は、当該被搬送物固有の識別コードが付与されており、当該識別コードをＭＣＳ（搬送制御システム）が集集し、前記被搬送物が位置するコンベアの端部が属する工程内環状軌道の所定のステーションに移動させる指令を与える制御手段を備えたことを特徴とする。
この請求項９に係る発明によれば、引用先の請求項１乃至８の何れかに係る発明の効果は元より、異なる工程内環状軌道を結ぶコンベアにより第一の工程内環状軌道から第二の工程内環状軌道に搬送された被搬送物は、当該被搬送物を特定する識別コード（バーコード等）を基にＯＨＴ台車によって所定のステーションに自動的に搬送されることができる。 The transport system for an OHT cart according to claim 9 is the transport system for an OHT cart according to any one of claims 1 to 8, wherein the transported objects placed at both ends of the conveyor are unique to the transported object. An identification code is assigned, and the MCS (conveyance control system) collects the identification code and gives a command to move it to a predetermined station on the in-process annular track to which the end of the conveyor where the object to be conveyed belongs. Control means is provided.
According to the ninth aspect of the present invention, the effect of the invention according to any one of the first to eighth aspects of the invention is based on the fact that the second in-process annular track is second from the first in-process annular track by the conveyor connecting the different in-process annular tracks. The object to be transported on the in-process annular track can be automatically transported to a predetermined station by the OHT cart based on an identification code (bar code or the like) that identifies the object to be transported.

以下、本発明の好適な実施の形態について図面を参照しつつ説明する。
先ず、図面の概要を述べると、図１は本発明が適用されるＯＨＴ台車の搬送システムにおける全体構成の概要を示す平面図、図２は図１において本願発明に係りのある要部を示す斜視図、図３は工程内環状軌道及び工程間環状軌道を走行するＯＨＴ台車の側面図、図４は所定の工程内環状軌道相互間と連係するローラコンベアの正面図、図５はローラコンベアの駆動機構を示す要部構成図、図６はＯＨＴ台車の搬送システムの機能ブロック図、図７、図８は夫々他の実施例を示す斜視図及び平面図である。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
First, the outline of the drawing will be described. FIG. 1 is a plan view showing the outline of the overall configuration of the transport system of the OHT cart to which the present invention is applied. FIG. 2 is a perspective view showing the main part related to the present invention in FIG. FIG. 3, FIG. 3 is a side view of an OHT carriage traveling on the in-process annular track and the inter-process annular track, FIG. 4 is a front view of a roller conveyor linked to a predetermined in-process annular track, and FIG. FIG. 6 is a functional block diagram of a transport system for an OHT cart, and FIGS. 7 and 8 are a perspective view and a plan view showing another embodiment, respectively.

さて、本願各発明が適用されるＯＨＴ台車の搬送システムにおけるレイアウトの概要は図１に示される。図１において、１ａ〜１ｆはＯＨＴ台車２の走行用工程内環状軌道で、工程内環状軌道１ａにて説明すると、当該工程内環状軌道１ａに沿って複数のステーション３が配置される。これらのステーション３は、他の工程内環状軌道１ｂ〜１ｆについてもほぼ均等に配置され、ウエハを収納したＦＯＵＰ搬入ポート３ａ及び同ＦＯＵＰ搬出ポート３ｂを備えている。 Now, the outline of the layout in the transport system of the OHT carriage to which the inventions of the present application are applied is shown in FIG. In FIG. 1, reference numerals 1a to 1f denote in-process annular tracks for travel of the OHT carriage 2, which will be described in the in-process annular track 1a. A plurality of stations 3 are arranged along the in-process annular track 1a. These stations 3 are also arranged substantially equally with respect to the other in-process annular tracks 1b to 1f, and are provided with a FOUP carry-in port 3a and a FOUP carry-out port 3b in which wafers are stored.

そして、これらのステーション３は、ストッカーの他ウエハの各種表面処理の種類（洗浄、成膜、レジスト、ＣＶＤ、検査等）と、これら各種の表面処理毎に、表面処理の工程の差違（例えば、洗浄工程であれば、被処理ウエハに対応する所望の洗浄液の使用による異なる表面処理工程）に伴って多数必要で、幾つかの工程内環状軌道に分散される。
４は工程間環状軌道で、前記工程内環状軌道１ａ〜１ｆを連結し、ＯＨＴ台車２は工程間環状軌道4を経由して異なる工程内環状軌道に進入する。
工程内環状軌道１ａ〜１ｆ、工程間環状軌道４の分岐、合流部では、接近して走行するＯＨＴ台車が存在すると、衝突の恐れがあり、これを防止するための安全装置として各ＯＨＴ台車には衝突防止手段が装備されている。
また、ＯＨＴ台車２の走行方向は一定方向のみに規制され衝突回避と搬送効率の確保が図られている。 Then, these stations 3 are different from the stocker in various types of surface treatment of the wafer (cleaning, film formation, resist, CVD, inspection, etc.) and the difference in surface treatment process for each of these various surface treatments (for example, In the case of a cleaning process, a large number of processes are required with different surface treatment processes by using a desired cleaning liquid corresponding to the wafer to be processed, and the wafers are distributed over several in-process annular tracks.
An inter-process annular track 4 connects the in-process annular tracks 1a to 1f, and the OHT carriage 2 enters a different intra-process annular track via the inter-process annular track 4.
If there is an OHT cart that runs close to the in-process annular track 1a to 1f and the inter-process annular track 4 at the branching and merging portion, there is a risk of collision, and each OHT cart is used as a safety device to prevent this. Is equipped with anti-collision means.
In addition, the traveling direction of the OHT carriage 2 is restricted to a certain direction, so that collision avoidance and transport efficiency are ensured.

５、６は一対のコンベアシステムで、特に被搬送物（ウエハを収納したＦＯＵＰ）の流通の多い工程内環状軌道１ｂ、１ｅ相互間においてＯＨＴ台車２により、幾つかの所定のステーション３において所定の表面処理を受けるウエハを収納したＦＯＵＰのみの流通を図る。
このコンベアシステム５、６において、コンベアシステム５は、被搬送物（ウエハを収納したＦＯＵＰ）を工程内環状軌道１ｂから工程内環状軌道１ｅへの搬送を、コンベアシステム６は、被搬送物（ウエハを収納したＦＯＵＰ）を工程内環状軌道１ｅから工程内環状軌道１ｂへの搬送を夫々担う。 Reference numerals 5 and 6 denote a pair of conveyor systems. In particular, a predetermined number of predetermined stations 3 are provided by an OHT carriage 2 between the annular raceways 1b and 1e in the process where there is a large distribution of objects to be transferred (FOUP containing wafers). Distribute only FOUPs that contain wafers that undergo surface treatment.
In the conveyor systems 5 and 6, the conveyor system 5 conveys an object to be conveyed (FOUP containing a wafer) from the in-process annular track 1 b to the in-process annular track 1 e, and the conveyor system 6 FOUP) storing the FOUP) is transported from the in-process annular track 1e to the in-process annular track 1b.

本願発明が適用されるＯＨＴ台車の搬送システムの概要は、前記図１の通りであるが、次に各構成要素のうち本願各発明に係りのある構成について図面を参照して説明する。
図３において、ＯＨＴ台車２と、工程内環状軌道１ａ〜１ｆ及び工程間環状軌道４との関係について図２を参照して説明する。図２、図３において、ＯＨＴ台車２は天井における所定の軌道（工程内環状軌道１ａ〜１ｅ又は工程間軌道４）に沿って敷設された走行レール７に吊り下げられている。そして、このＯＨＴ台車２は、その案内・駆動部２ａにおいて図示しない走行輪と案内輪とで走行レール７に規制されて走行する。 The outline of the transport system for the OHT cart to which the present invention is applied is as shown in FIG. 1, and the configuration related to each invention of the present invention will be described next with reference to the drawings.
In FIG. 3, the relationship between the OHT carriage 2, the in-process annular tracks 1a to 1f and the inter-process annular track 4 will be described with reference to FIG. 2 and 3, the OHT carriage 2 is suspended from a traveling rail 7 laid along a predetermined track on the ceiling (in-process annular tracks 1a to 1e or inter-process track 4). The OHT cart 2 travels while being restricted by the travel rail 7 by a travel wheel and a guide wheel (not shown) in the guide / drive unit 2a.

この際、必要とされる動力は、走行輪に駆動モータを備えること、或いはレール７側とＯＨＴ台車２側に夫々二次側、一次側を設ける直流リニアモータを備えること等周知の手段によって得られる。２ｂは位置合せ機構で、後述する被搬送物（ＦＯＵＰ）の前記走行レール７におけるＯＨＴ台車の走行方向と直交する方向及び回転方向の変位調整を図る。２ｃは帯状ベルトで、ＯＨＴ台車２の走行方向の前後左右に４本設けられ、ＯＨＴ台車２内に備えられる昇降機構２ｄにより伸縮自在に制御され、昇降体２ｅを昇降させるように構成される。そして、この帯状ベルト２ｃは、内部に昇降体２ｅへの電力供給及び制御信号を授受する電線（図示せず）を埋設している。 At this time, the required power is obtained by well-known means such as a driving motor provided on the traveling wheels, or a DC linear motor provided with a secondary side and a primary side on the rail 7 side and the OHT carriage 2 side, respectively. It is done. Reference numeral 2b denotes an alignment mechanism that adjusts the displacement of a transported object (FOUP), which will be described later, in the direction perpendicular to the traveling direction of the OHT carriage and the rotational direction in the traveling rail 7. Two belt belts 2c are provided on the front, rear, left and right in the traveling direction of the OHT carriage 2, and are controlled to be extended and contracted by an elevating mechanism 2d provided in the OHT carriage 2 so as to elevate and lower the elevating body 2e. And this belt | belt-shaped belt 2c has embed | buried the electric wire (not shown) which transmits / receives the electric power supply and control signal to the raising / lowering body 2e inside.

２ｆはグリッパ部材で、昇降体２ｅの構成要素の一つであって、図示の左右方向に変位可能に支持されている。８は被搬送物としてのＦＯＵＰで、具体例として、洗浄、ＣＶＤほかの各種処理において未処理或いは処理済みのウエハを収納したＦＯＵＰ本体８ａと前記グリッパ部材２ｆによって把持又はその解除を受けるフランジ部８ｂから構成される。 Reference numeral 2f denotes a gripper member, which is one of the components of the elevating body 2e, and is supported so as to be displaceable in the illustrated left-right direction. Reference numeral 8 denotes a FOUP as an object to be conveyed. As a specific example, a FOUP main body 8a storing a wafer that has not been processed or processed in various processes such as cleaning, CVD, and a flange portion 8b that is gripped or released by the gripper member 2f. Consists of

なお、ＯＨＴ台車２への給電は、本願各発明との直接の係りがないため詳細な説明は省略し、概要を述べると、工程内軌道１ａ〜１ｆ及び工程間軌道４に沿って敷設される給電線（図示せず）からＯＨＴ台車２に備えられたコイルに対して電磁誘導作用により非接触にて行われる。
また、ＯＨＴ台車２が分岐路において何れの方向に進むかの制御機構は例えば「特開２００３−１６００４７号」の図１及び図２に開示の機構が用いられる。 The power supply to the OHT carriage 2 is not directly related to the inventions of the present application, and thus detailed description thereof is omitted. In summary, the OHT carriage 2 is laid along the intra-process tracks 1a to 1f and the inter-process tracks 4. This is performed in a non-contact manner by an electromagnetic induction action on a coil provided in the OHT carriage 2 from a power supply line (not shown).
Further, for example, the mechanism disclosed in FIGS. 1 and 2 of “Japanese Patent Laid-Open No. 2003-160047” is used as a control mechanism for which direction the OHT carriage 2 travels in the branch path.

次に、本願各発明の要旨をなす同一機能の一対のコンベアシステム５、６のうち、代表として、コンベアシステム５の周辺機構を示す図２を参照しつつ説明する。図２において、コンベアシステム５は、工程内環状軌道１ｂ、１ｅの所定の個所相互間に直線状に配置され、吊部材５１（コンベア全長に応じて複数個所に配置）にて天井に保持される。
そして、このコンベアシステム５は、直線搬送部５２及び当該直線搬送部５２の両端部に配置され直線搬送部５２と均等な搬送機構を備え、所定の範囲において９０度方向を変化させるターンテーブル５３、５４、各ターンテーブル５３、５４に載置されるＦＯＵＰ８の背面に付され、このＦＯＵＰ８の特定表示を行うタグ（バーコード、非接触ＩＣカードなど）を読取るリーダー／ライター（以下「Ｒ／Ｗ」という）５５、５６、及びコンベア駆動制御装置５７から構成される。 Next, as a representative of the pair of conveyor systems 5 and 6 having the same function forming the gist of each invention of the present application, a description will be given with reference to FIG. 2 showing peripheral mechanisms of the conveyor system 5. In FIG. 2, the conveyor system 5 is linearly arranged between predetermined portions of the in-process annular tracks 1b and 1e, and is held on the ceiling by suspension members 51 (arranged at a plurality of locations according to the overall length of the conveyor). .
And this conveyor system 5 is equipped with the linear conveyance part 52 and the turntable 53 which is arrange | positioned at the both ends of the said linear conveyance part 52, is equipped with a conveyance mechanism equal to the linear conveyance part 52, and changes a 90 degree direction in a predetermined range, 54, a reader / writer (hereinafter referred to as “R / W”) that reads a tag (bar code, non-contact IC card, etc.) attached to the back of the FOUP 8 placed on each turntable 53, 54 and that performs a specific display of the FOUP 8. 55) and 56, and a conveyor drive control device 57.

このコンベアシステム５を構成する直線搬送部５２及びターンテーブル５３、５４は均等なＦＯＵＰ８用搬送手段を有している。この搬送手段の直線搬送部５２への適用例を、図４及び図５を基に説明する。
図４において、５２ａ、５２ｂはローラ支持部材で、直線搬送部５２の経路に沿って等間隔を維持して並行に敷設されている。５２ｃ、５２ｄは支持軸で、夫々ローラ支持部材５２ａ、５２ｂに沿って一定間隔にて連続的に配置され、当該各ローラ支持部材５２ａ、５２ｂに固定される。５２ｅ、５２ｆはローラで、夫々ＦＯＵＰ８の底面両側部を支持する円筒状保持部５２ｇ、５２ｈと、前記ＦＯＵＰ２の左右方向の位置を規制する鍔部５２ｉ、５２ｊを有し、夫々ローラ支持部材５２ａ、５２ｂに回動自在に支持されている。 The linear conveyance unit 52 and the turntables 53 and 54 constituting the conveyor system 5 have uniform FOUP 8 conveyance means. An example of application of this transport means to the linear transport section 52 will be described with reference to FIGS.
In FIG. 4, 52 a and 52 b are roller support members, and are laid in parallel along the path of the linear conveyance unit 52 while maintaining equal intervals. Reference numerals 52c and 52d denote support shafts which are continuously arranged at regular intervals along the roller support members 52a and 52b, respectively, and fixed to the roller support members 52a and 52b. 52e and 52f are rollers each having cylindrical holding portions 52g and 52h for supporting both sides of the bottom surface of the FOUP 8, and flange portions 52i and 52j for regulating the position of the FOUP 2 in the left-right direction. 52b is rotatably supported.

そして、前記円筒状保持部５２ｇ、５２ｈの各周面には、ウレタンゴム被覆部５２ｇｘ、５２ｈｘが被覆され、前記ＦＯＵＰ２との接触摩擦力を増し、ＦＯＵＰ２の搬送過程にて、ＦＯＵＰ８と、ローラ５２ｅ、５２ｆにおける円筒状保持部５２ｇ、５２ｈとのスリップを防止している。 The circumferential surfaces of the cylindrical holding portions 52g and 52h are covered with urethane rubber coating portions 52gx and 52hx, and the contact friction force with the FOUP 2 is increased, and the FOUP 8 and the roller 52e are conveyed during the FOUP 2 conveyance process. , 52f prevents slipping with the cylindrical holding portions 52g and 52h.

なお、ＯＨＴ台車２にてＦＯＵＰ８を搬送する際、ＦＯＵＰ８のウエハ挿脱用扉（図示せず）は、各種表面処理を行うステーション３が各工程内環状軌道１ａ〜１ｆの外側に配置されていることに伴い、工程内環状軌道１ａ〜１ｆの外方で、工程間環状軌道４の内方に該当する方向に向けられる。
また、ＦＯＵＰ８がコンベアシステム５の直線走行部５２及びターンテーブル５３、５４上を移動するに際しては、ＦＯＵＰ８の前記扉を有する前面とタグを有する背面とは機構上重量が相違するため、進行方向において左右均等に重量が加わるようにＦＯＵＰ８の前面が進行方向に対して直交するように方向が規制される。 When the FOUP 8 is transported by the OHT carriage 2, the wafer insertion / removal door (not shown) of the FOUP 8 has a station 3 for performing various surface treatments arranged outside the in-process annular tracks 1a to 1f. Along with this, the direction is directed outside the in-process annular tracks 1a to 1f in the direction corresponding to the inside of the inter-process annular track 4.
In addition, when the FOUP 8 moves on the straight traveling unit 52 and the turntables 53 and 54 of the conveyor system 5, the front surface of the FOUP 8 having the door and the rear surface having the tag have different mechanical weights. The direction is regulated so that the front surface of the FOUP 8 is orthogonal to the traveling direction so that weight is equally applied to the left and right.

次に、コンベアシステム５の駆動機構について述べる。先ず、前記ローラ５２ｅ、５２ｆは、一方（この例ではローラ５２ｅ）のみに駆動手段を設け、他方（この例では、ローラ５２ｆ）は支持軸５２ｄに回動自在に支持され、駆動手段を有しない従動ローラである。 Next, the drive mechanism of the conveyor system 5 will be described. First, the rollers 52e and 52f are provided with driving means only on one side (in this example, the roller 52e), and the other (in this example, the roller 52f) is rotatably supported on the support shaft 52d, and has no driving means. It is a driven roller.

そして、１ブロックを構成する５個のローラ１２ｅの駆動手段は図５のように構成され、ローラ式コンベア１全体において複数ブロックが連続的に配置される。
先ず、図５において、コンベアシステム５のローラ支持部材５２ａに対して敷設されている支持軸５２ｃに回動自在に支持されたローラ５２ｅにおける円筒状保持部５２ｇの鍔部５２ｉとは反対側に歯付プーリ５２ｋが備えられる。５２ｍはモータで、その駆動軸５２ｍｘには、歯付プーリ５２ｍｙが固定され、当該歯付プーリ５２ｍｙは、一連のローラ５２ｅに固定された歯付プーリ５２ｋと同一垂直平面に配置されている。 And the drive means of the five rollers 12e which comprise 1 block is comprised like FIG. 5, and several blocks are arrange | positioned continuously in the roller type conveyor 1 whole.
First, in FIG. 5, the teeth on the opposite side to the flange portion 52 i of the cylindrical holding portion 52 g in the roller 52 e rotatably supported by the support shaft 52 c laid on the roller support member 52 a of the conveyor system 5. An attached pulley 52k is provided. A motor 52m has a toothed pulley 52my fixed to the drive shaft 52mx, and the toothed pulley 52my is arranged on the same vertical plane as the toothed pulley 52k fixed to a series of rollers 52e.

５２ｎはタイミングベルトで、ローラ５２ｅの駆動源となる歯付プーリ５２ｋ及び直線状に並ぶ一連のローラ５２ｅ夫々に設けた複数個（図５に示す例では５個）の歯付プーリ５２ｋに対して順次歯部５２ｎｘ側（内周面）を係合し、１ループを形成している。
また、前記タイミングベルト５２ｎの歯部５２ｎｘを有しない側（外周面）の適所（図５に示す例では２箇所）には、テンションローラ５２ｐが配置されている。
なお、このテンションローラ５２ｐの支持軸５２ｐｘは、タイミングベルト５２ｎに張力を与える方向に復帰力を有するよう移動できる周知の手段（図示せず）によって支持されている。 Reference numeral 52n denotes a timing belt for a plurality of (5 in the example shown in FIG. 5) toothed pulleys 52k provided on each of the toothed pulley 52k serving as a driving source of the roller 52e and the series of rollers 52e arranged linearly. The tooth portions 52nx side (inner peripheral surface) are sequentially engaged to form one loop.
Further, tension rollers 52p are arranged at appropriate positions (two positions in the example shown in FIG. 5) on the side (outer peripheral surface) of the timing belt 52n that does not have the tooth portions 52nx.
The support shaft 52px of the tension roller 52p is supported by well-known means (not shown) that can move so as to have a restoring force in the direction of applying tension to the timing belt 52n.

また、直線状に並ぶ一連のローラ５２ｅは１グループを形成する複数個のローラを単位モジュールとして複数個のモジュールを直線状に配置することで構成され、各単位モジュールの搬送速度はモータ５２ｍの回転速度で制御される。モータ５２ｍの回転速度はモジュール毎に制御され、各モジュールを同期させ一定速度で搬送することも、コンベア上のＦＯＵＰ同士の接触を回避するため非同期に搬送制御することも可能である。 The series of rollers 52e arranged in a straight line is configured by arranging a plurality of modules in a straight line with a plurality of rollers forming one group as unit modules, and the conveyance speed of each unit module is the rotation of the motor 52m. Controlled by speed. The rotation speed of the motor 52m is controlled for each module, and each module can be synchronized and transported at a constant speed, or transport control can be performed asynchronously to avoid contact between FOUPs on the conveyor.

次に、前記図１〜図５に示す構成の制御システムについて、機能ブロック図（図６）を参照しつつ説明する。図６において、ＭＥＳ１０１（Manufacturing Execution System）は半導体製造管理システムであり、ＭＣＳ１０２（Material Control System）は搬送システムコントローラである。また、ＯＨＶＣ１０４（Over head Hoist Vehicle Controller）はＯＨＴ搬送台車の制御装置であり、ＣＲＶＣ１０３（Conveyor Roller Vehicle Controller）はローラコンベア方式による搬送装置のコントローラである。ＭＥＳ１０１は多数のステーション３に対して所定の半導体表面処理の命令を送信することに加え、ＭＣＳ１０２にＦＯＵＰ８の各種搬送命令を送信する。また、ＭＣＳ１０２はＯＨＶＣ１０４とＣＲＶＣ１０３に制御命令を与えることによりＯＨＴ台車２とコンベアシステム５を制御する。 Next, the control system having the configuration shown in FIGS. 1 to 5 will be described with reference to a functional block diagram (FIG. 6). In FIG. 6, MES101 (Manufacturing Execution System) is a semiconductor manufacturing management system, and MCS102 (Material Control System) is a transport system controller. Moreover, OHVC104 (Over head Hoist Vehicle Controller) is a control apparatus of an OHT conveyance carriage, and CRVC103 (Conveyor Roller Vehicle Controller) is a controller of the conveyance apparatus by a roller conveyor system. In addition to transmitting a predetermined semiconductor surface treatment command to a large number of stations 3, the MES 101 transmits various transport commands for FOUP 8 to the MCS 102. The MCS 102 controls the OHT carriage 2 and the conveyor system 5 by giving control commands to the OHVC 104 and the CRVC 103.

即ち、搬送制御システムのＭＣＳ１０２は、ＭＥＳ１０１からの命令信号に基づいてＯＨＴ台車制御装置１０３を用いてＯＨＴ台車２に指令を与え、この指令を受けたＯＨＴ台車２は自車の制御部を構成する案内・駆動部２ａ、位置合せ機構２ｂ、昇降機構２ｄ、及びグリッパ部材２ｆを作動させる。
更に、ＭＣＳ１０２は、コンベアシステム制御装置１０４を用いてＭＥＳ１０１からの命令信号に基づいて直線搬送部５２及びターンテーブル５３、５４、Ｒ／Ｗ５５、５６を含むコンベアシステム５におけるローラ駆動制御装置５７に対してＦＯＵＰ８の適切な搬送命令信号を送信する。 That is, the MCS 102 of the transfer control system gives a command to the OHT cart 2 using the OHT cart control device 103 based on the command signal from the MES 101, and the OHT cart 2 that has received this command constitutes the control unit of the own vehicle. The guide / drive unit 2a, the alignment mechanism 2b, the lifting mechanism 2d, and the gripper member 2f are operated.
Further, the MCS 102 uses the conveyor system control device 104 to control the roller drive control device 57 in the conveyor system 5 including the linear conveyance unit 52 and the turntables 53 and 54 and R / W 55 and 56 based on a command signal from the MES 101. Then, an appropriate transport command signal of FOUP 8 is transmitted.

前述した構成において、その作用を説明すると次の通りである。
先ず、工程内循環軌道１ａ〜１ｆ及び工程間循環軌道４において、
（１）所定のＦＯＵＰ８が存する所定のステーション３に所定のＯＨＴ台車２がＦＯＵＰ８を保持しない状態で移行し、ＦＯＵＰ８を把持する。
（２）所定のＦＯＵＰ８を把持したＯＨＴ台車２は所定の表面処理を行うステーション３にＦＯＵＰ８を移送する。
ＯＨＴ台車２のこれら、一連の動作はＭＥＳ１０１からの命令を受けたＭＣＳ１０２からの指令を、ＯＨＴ制御装置を介し受けてＯＨＴ台車２により実行される。 The operation of the above-described configuration will be described as follows.
First, in the in-process circulation orbits 1a to 1f and the inter-process circulation orbit 4,
(1) The predetermined OHT carriage 2 shifts to a predetermined station 3 where the predetermined FOUP 8 exists without holding the FOUP 8, and holds the FOUP 8.
(2) The OHT carriage 2 that holds the predetermined FOUP 8 transfers the FOUP 8 to the station 3 that performs the predetermined surface treatment.
These series of operations of the OHT carriage 2 are executed by the OHT carriage 2 in response to an instruction from the MCS 102 that has received an instruction from the MES 101 via the OHT control device.

このようにして、ＯＨＴ台車２によって、所定のステーション３に搬送されたＦＯＵＰ８は、当該所定のステーション３において、内部に保有されているウエハが取り出され、所定の表面処理が行われる。この際の表面処理工程は、ＭＥＳ１０１から送出される命令に従って実行される。
前記ＯＨＴ台車２によるＦＯＵＰ８の搬送工程及び各ステーション３におけるＦＯＵＰ８内に保有されるウエハの表面処理工程は、本願発明の基礎となるもので、従来採用されている技術である。 In this manner, the FOUP 8 transported to the predetermined station 3 by the OHT carriage 2 takes out the wafer held in the predetermined station 3 and performs a predetermined surface treatment. The surface treatment process at this time is executed according to a command sent from the MES 101.
The transport process of the FOUP 8 by the OHT carriage 2 and the surface treatment process of the wafer held in the FOUP 8 at each station 3 are the basis of the present invention and are conventionally used techniques.

さて、本願各発明に係りのあるコンベアシステム５についての作用の詳細を説明すると、次の各ステップに示す通りである。
ステップ１：
工程内環状軌道１ｂに沿って走行するＯＨＴ台車２が保有しているＦＯＵＰ８がＭＣＳ１０２からのコンベアシステム制御装置を経由した命令信号により図２に示す状態のターンテーブル５３上に載置（図２においてはＦＯＵＰ８が既にターンテーブル５３から搬送後の状態につき図示されていない）される。この際、ターンテーブル５３のコンベアローラは回転を停止させた状態で、当該ターンテーブル５３のコンベアとしての推進方向にＦＯＵＰ８においてウエハを挿脱する前面が配置される。 The details of the operation of the conveyor system 5 related to the inventions of the present application will be described as shown in the following steps.
Step 1:
The FOUP 8 possessed by the OHT carriage 2 traveling along the in-process annular track 1b is placed on the turntable 53 in the state shown in FIG. 2 by a command signal from the MCS 102 via the conveyor system controller (in FIG. 2). Is not shown in the state after the FOUP 8 has already been transported from the turntable 53). At this time, with the conveyor roller of the turntable 53 stopped rotating, the front surface for inserting / removing the wafer in the FOUP 8 is disposed in the propulsion direction of the turntable 53 as the conveyor.

ステップ２：
Ｒ／Ｗ５５がターンテーブル５３上のＦＯＵＰ８（図２には表示されていない）を特定するタグを読取り、この信号をローラ駆動制御装置５７に送信する。
ステップ３：
ローラ駆動制御装置５７からの命令信号によりターンテーブル５３はＦＯＵＰ８の前面が、直線搬送部５２の進行方向に向くように９０度回転し、直線搬送部５２の搬送路とターンテーブル５３上の搬送路とが連続する。この際、直線搬送部５２の搬送路終端部に位置するターンテーブル５４は図２に示す方向と９０度変位しており、直線搬送部５２の搬送路とターンテーブル５４上の搬送路とが連続している。 Step 2:
The R / W 55 reads a tag identifying the FOUP 8 (not shown in FIG. 2) on the turntable 53 and transmits this signal to the roller drive control device 57.
Step 3:
In response to a command signal from the roller drive control device 57, the turntable 53 rotates 90 degrees so that the front surface of the FOUP 8 faces the traveling direction of the linear transport unit 52, and the transport path of the linear transport unit 52 and the transport path on the turntable 53 And continue. At this time, the turntable 54 located at the end of the conveyance path of the linear conveyance unit 52 is displaced 90 degrees from the direction shown in FIG. 2, and the conveyance path of the linear conveyance unit 52 and the conveyance path on the turntable 54 are continuous. is doing.

ステップ４：
ターンテーブル５３のコンベアローラを回転駆動させ、ターンテーブル５３から直線走行路５２を通じてＦＯＵＰ８が搬送され、当該ＦＯＵＰ８はその前面を進行方向に向け、ターンテーブル５４上に進入する。
ステップ５：
このＦＯＵＰ８がターンテーブル５４上に位置すると、図示しないセンサ（例えば、フォトセンサ）にてこの状況を、ローラ駆動制御装置５７が把握し、ターンテーブル５４を図示の状態に９０度回転させる。 Step 4:
The conveyor roller of the turntable 53 is driven to rotate, and the FOUP 8 is conveyed from the turntable 53 through the straight traveling path 52, and the FOUP 8 enters the turntable 54 with its front face in the traveling direction.
Step 5:
When the FOUP 8 is positioned on the turntable 54, the roller drive control device 57 grasps this situation with a sensor (for example, a photo sensor) (not shown), and rotates the turntable 54 90 degrees to the state shown in the figure.

ステップ６：
ＦＯＵＰ８の背面のタグをＲ／Ｗ５６にて読取り、これによってターンテーブル５４上にあるＦＯＵＰ８の特定情報がＭＣＳ１０２に伝達され、当該ＭＣＳ１０２からの命令信号によってＯＨＴ台車２がターンテーブル５４上に到達する。
ステップ７：
ＯＨＴ台車２がターンテーブル５４上のＦＯＵＰ８を保持し、ＭＳＣ１０２からの命令信号によって工程内環状軌道１ｅに沿って所定のステーション３に移行する。 Step 6:
The tag on the back of the FOUP 8 is read by the R / W 56, whereby specific information of the FOUP 8 on the turntable 54 is transmitted to the MCS 102, and the OHT carriage 2 reaches the turntable 54 by a command signal from the MCS 102.
Step 7:
The OHT carriage 2 holds the FOUP 8 on the turntable 54, and moves to a predetermined station 3 along the in-process annular track 1e by a command signal from the MSC 102.

なお、コンベアシステム６については、コンベアシステム５が工程内環状軌道１ｂから
工程内環状軌道１ｅへのＦＯＵＰ８の移動させる機能であるのに対し、工程内環状軌道１ｅから工程内環状軌道１ｂへのＦＯＵＰ８の移動である点のみ相違し均等な構成であるため詳細の説明は省略する。 Regarding the conveyor system 6, the conveyor system 5 has a function of moving the FOUP 8 from the in-process annular track 1b to the in-process annular track 1e, whereas the FOUP 8 from the in-process annular track 1e to the in-process annular track 1b. The detailed description will be omitted because only the movement is different and the configuration is equivalent.

前述の構成において、コンベアシステム５、６は夫々工程内環状軌道１ｂから工程内環状軌道１ｅへのＦＯＵＰ８の移動、及び工程内環状軌道１ｅから工程内環状軌道１ｂへのＦＯＵＰ８の移動に対して専用に設ける構成を示しているが何れか一方のみとし、兼用する構成とすることもできる。
即ち、ＯＨＴ台車の搬送システムの構成上、例えば、工程内環状軌道１ｂから工程内環状軌道１ｅへのＦＯＵＰ８の移動量が工程内環状軌道１ｅから工程内環状軌道１ｂへのＦＯＵＰ８の移動量に比べて１０倍程度に及ぶ場合はコンベアシステム６を設けることなくコンベアシステム５のＦＯＵＰ８の搬送方向を変更することによって実質的に同様な効果が得られる。 In the above-described configuration, the conveyor systems 5 and 6 are dedicated to the movement of the FOUP 8 from the in-process annular track 1b to the in-process annular track 1e and the movement of the FOUP 8 from the in-process annular track 1e to the in-process annular track 1b, respectively. However, only one of them may be used, and a configuration may also be used.
That is, due to the configuration of the transport system of the OHT carriage, for example, the movement amount of the FOUP 8 from the in-process annular track 1b to the in-process annular track 1e is compared with the movement amount of the FOUP 8 from the in-process annular track 1e to the in-process annular track 1b. In the case of about 10 times, substantially the same effect can be obtained by changing the conveying direction of the FOUP 8 of the conveyor system 5 without providing the conveyor system 6.

一対のコンベアシステム５、６或いは搬送方向を切り替えることによってこれらを兼用するコンベアシステム５は、工程間環状軌道４を横切って工程内環状軌道１ｂから工程内環状軌道１ｅへのＦＯＵＰ８を移送させる構成に加えて、あるいはこれに代えて、例えば、工程間環状軌道４に沿って隣接する２つの工程内環状軌道１ｂ、１ａ間移動頻度が高い場合、２つの工程内環状軌道１ｂ、１ａ間にコンベアシステムを敷設させることもできる。 The pair of conveyor systems 5 and 6 or the conveyor system 5 that combines these by switching the conveying direction is configured to transfer the FOUP 8 from the in-process annular track 1b to the in-process annular track 1e across the inter-process annular track 4b. In addition, or instead of this, for example, when the frequency of movement between two in-process annular tracks 1b, 1a adjacent to each other along the inter-process annular track 4 is high, a conveyor system is provided between the two in-process annular tracks 1b, 1a. Can also be laid.

図８に示すように一対のコンベアシステム５、６に新たに４つのターンテーブル２５，２６，２７，２８と、工程間環状軌道４と平行で相互に逆方向に搬送する２つのローラコンベア２１、２２を加え、全体として環状の搬送ループを形成するコンベアシステムとすることも可能である。
環状の搬送ループを形成するコンベアシステムでは、ターンテーブル５３、５４部でＯＨＴ台車がＦＯＵＰ８を取り込まずローラコンベア上に放置しても、放置されたＦＯＵＰ８はエンドレスにローラコンベア上を周回し、他のＦＯＵＰ８の受け渡しに対する障害になることはない。この環状ループを形成するコンベアシステムはＦＯＵＰ８をこの場所に一時的に保管させ得るバファーとしての機能を持つ。 As shown in FIG. 8, four turntables 25, 26, 27, and 28 are newly added to the pair of conveyor systems 5 and 6, and two roller conveyors 21 that are parallel to the inter-process annular track 4 and are transported in opposite directions. It is also possible to add a 22 to form a conveyor system that forms an annular conveying loop as a whole.
In the conveyor system that forms an annular conveyance loop, even if the OHT carriage does not take in the FOUP 8 at the turntables 53 and 54, and is left on the roller conveyor, the left FOUP 8 circulates on the roller conveyor in an endless manner. There is no obstacle to delivery of FOUP8. The conveyor system forming the annular loop has a function as a buffer that can temporarily store the FOUP 8 in this place.

図７は図２の変形例で、直線搬送部５２の両端部に各２つのターンテーブル５３ａ、５３ｂ、５４ａ、５４ｂと４つのコンベア５８ａ、５８ｂ、５９ａ、５９ｂを配置させた構成を有する。コンベア５８ａ、５８ｂ、５９ａ、５９ｂはＯＨＴ台車がＦＯＵＰを積載或いは降載するポートで、工程内環状軌道１ｂ、１ｅ間のＦＯＵＰ８搬送頻度の高い場合に好適な構成としている。基本動作は図２に類似するが、ＯＨＴ台車がＦＯＵＰ８を積載又は降載するポートが直線コンベアで、これと直交する直線搬送部５２への輸送或いは、直線搬送部５２からこれと前記直線コンベアへの輸送は、２対の各ターンテーブル５３ａ、５３ｂ、５４ａ、５４ｂ部にてＦＯＵＰ８の載置方向を９０度回転させて輸送させている。 FIG. 7 is a modification of FIG. 2 and has a configuration in which two turntables 53 a, 53 b, 54 a, 54 b and four conveyors 58 a, 58 b, 59 a, 59 b are arranged at both ends of the linear transport unit 52. The conveyors 58a, 58b, 59a and 59b are ports on which the OHT carriages load or unload FOUPs, and are suitable for cases where the FOUP 8 is frequently conveyed between the in-process annular tracks 1b and 1e. The basic operation is similar to that of FIG. 2, but the port on which the OHT carriage loads or unloads the FOUP 8 is a linear conveyor, and is transported to the linear conveyance unit 52 orthogonal thereto, or from the linear conveyance unit 52 to the linear conveyor. The two pairs of turntables 53a, 53b, 54a, 54b are transported by rotating the mounting direction of the FOUP 8 by 90 degrees.

図１及び図２においてのＯＨＴ台車２の走行路としての工程間環状軌道４とこれに連係する工程内環状軌道１ａ〜１ｆとにおいて、一部重複個所があるが、工程間環状軌道４と工程内環状軌道１ａ〜１ｆを夫々独立した環状軌道とするために、工程間環状軌道４から工程内環状軌道１ａ〜１ｆに移行する分岐路及び工程内環状軌道１ａ〜１ｆから工程間環状軌道４に移行する分岐路を設ける。
これによって、工程間環状軌道４を通過するＯＨＴ台車２が増加しても、ＯＨＴ台車２の走行状況が阻害（衝突防止装置の作用による一時停止）されることは殆ど生じない。
なお、工程間環状軌道４中の随所にショートカット軌道を設けることによって、工程間環状軌道４におけるＯＨＴ台車の円滑な走行状態を得ることができる。 1 and 2, the inter-process annular track 4 serving as the traveling path of the OHT carriage 2 and the in-process annular tracks 1 a to 1 f linked to this are partially overlapped. In order to make the inner ring-shaped tracks 1a to 1f independent ring tracks, the branch paths that transition from the inter-process ring tracks 1a to 1f to the inter-process ring tracks 1a to 1f and the intra-process ring tracks 1a to 1f to the inter-process ring tracks 4 are used. Provide a branching branch.
As a result, even if the number of OHT carriages 2 passing through the inter-process annular track 4 increases, the traveling state of the OHT carriage 2 is hardly inhibited (temporarily stopped by the action of the collision prevention device).
It should be noted that a smooth running state of the OHT carriage on the inter-process annular track 4 can be obtained by providing the shortcut track everywhere in the inter-process annular track 4.

図４に示すローラコンベアの構成はＦＯＵＰ８の搬送に当り最適機構であるが、汎用されているローラコンベア（例えば、特開平１１−２３６１１７号に開示のコンベア）を採用することもできる。 The configuration of the roller conveyor shown in FIG. 4 is an optimum mechanism for transporting the FOUP 8, but a widely used roller conveyor (for example, a conveyor disclosed in Japanese Patent Laid-Open No. 11-236117) can also be adopted.

本発明が適用されるＯＨＴ台車の搬送システムにおける全体構成の概要を表示する平面図である。It is a top view which displays the outline | summary of the whole structure in the conveyance system of the OHT cart to which this invention is applied. 図１において本願発明に係りのある要部を示す斜視図である。It is a perspective view which shows the principal part which concerns on this invention in FIG. 工程内環状軌道及び工程間環状軌道を走行するＯＨＴ台車の側面図である。It is a side view of the OHT cart which travels in an in-process annular track and an inter-process annular track. 所定の工程内環状軌道相互間と連係するローラコンベアの正面図である。It is a front view of the roller conveyor linked | related with between cyclic | annular tracks in a predetermined process. ローラコンベアの駆動機構を示す要部構成図である。It is a principal part block diagram which shows the drive mechanism of a roller conveyor. ＯＨＴ台車の搬送システムの機能ブロック図である。It is a functional block diagram of the conveyance system of an OHT cart. 本願発明の他の実施例を示す斜視図である。It is a perspective view which shows the other Example of this invention. 本発明が適用されるＯＨＴ台車の搬送システムにおける全体構成の他の実施例を示す平面図である。It is a top view which shows the other Example of the whole structure in the conveyance system of the OHT cart to which this invention is applied.

符号の説明Explanation of symbols

１ａ〜１ｆ・・・・・・工程内環状軌道
２・・・・・・・・・・懸垂式昇降搬送台車
２１、２２・・・・・・ローラコンベア
２５〜２８・・・・・・ターンテーブル
３・・・・・・・・・・ステーション
４・・・・・・・・・・工程間環状軌道
５・・・・・・・・・・コンベアシステム
５２ｅ・・・・・・・・駆動ローラ
５２ｆ・・・・・・・・従動ローラ
５２ｉ、５２ｊ・・・・鍔部
５５、５６・・・・・・Ｒ／Ｗ
５７・・・・・・・・・ローラ駆動制御装置
８・・・・・・・・・・被搬送物（ＦＯＵＰ）
１０１・・・・・・・・半導体製造管理システム
１０２・・・・・・・・搬送制御システム


1a to 1f ··· In-process circular track 2 ··· Hanging suspension carriages 21 and 22 ··· Roller conveyors 25 to 28 ··· Turn Table 3 ... Station 4 ... Inter-process annular track 5 ... Conveyor system 52e ... Drive roller 52f ..... driven rollers 52i, 52j... Collar 55, 56... R / W
57 ············ Roller drive control device 8 ·······················
101 ... Semiconductor manufacturing management system 102 ... Transfer control system


Claims (9)

懸垂式昇降搬送装置用台車の工程内環状軌道に沿って、前記懸垂式昇降搬送装置用台車によって搬送される被搬送物に収納される基板に対し各種処理を施すステーションが複数箇所に設けられた前記工程内環状軌道を複数個配置し、これらの工程内環状軌道相互間と連係する工程間環状軌道を備えた懸垂式昇降搬送用台車の搬送システムにおいて、
前記被搬送物を、工程間環状軌道を経ずに所定の異なる工程内環状軌道相互間を移動させるコンベアを設けたことを特徴とする懸垂式昇降搬送装置用台車の搬送システム。 A plurality of stations for performing various processes on the substrate stored in the object to be conveyed that is conveyed by the suspension type lifting and lowering conveyance device carriage are provided along the in-process annular track of the suspension type lifting and lowering conveyance device carriage. In the transportation system of the suspension type lifting and lowering transportation carriage provided with a plurality of the in-process annular tracks, and provided with the in-process annular tracks linked to each other in the in-process annular tracks,
A conveyor system for a carriage for a suspended lifting and lowering conveying apparatus, wherein a conveyor for moving the object to be transferred between predetermined different in-process annular tracks without passing through an inter-process annular track is provided. 前記基板が半導体製造用ウエハであり、前記被搬送物が前記ウエハを挿脱自在に収納した容器である請求項１に記載の懸垂式昇降搬送装置用台車の搬送システム。 2. The transportation system for a carriage for a suspension type lifting and lowering transportation apparatus according to claim 1, wherein the substrate is a semiconductor manufacturing wafer, and the object to be transported is a container in which the wafer is removably accommodated. 前記被搬送物を、工程間環状軌道を経ずに所定の異なる工程内循環経路相互間を移動させるコンベアがローラコンベアであることを特徴とする請求項１又は２に記載の懸垂式昇降搬送装置用台車の搬送システム。 The suspension type lifting / lowering conveying apparatus according to claim 1 or 2, wherein a conveyor for moving the object to be conveyed between predetermined different in-process circulation paths without passing through an inter-process annular track is a roller conveyor. Cart transport system. 前記ローラコンベアが、所定数のローラ、モータ及びモータの動力を各ローラに同期伝達する手段を単位モジュールとし、当該単位モジュールを複数個連接して設け、前記各単位モジュールを駆動させるモータの回転速度を各モジュール毎に制御させることを特長とする請求項１乃至３の何れかに記載の懸垂式昇降搬送装置用台車の搬送システム。 The roller conveyor has a predetermined number of rollers, a motor, and a means for synchronously transmitting the power of the motor to each roller as a unit module. 4. The transport system for a carriage for a suspension type lifting and lowering transport apparatus according to any one of claims 1 to 3, wherein each of the modules is controlled. 前記ローラコンベアが被搬送物の進行方向の両側に沿って配置される一連のローラからなり、少なくとも一方側に位置するローラに駆動力を与える手段を備え、各ローラには、被搬送物の搬送方向を規制する鍔部を有することを特徴とする請求項３又は４に記載の懸垂式昇降搬送装置用台車の搬送システム。 The roller conveyor is composed of a series of rollers arranged along both sides in the traveling direction of the object to be conveyed, and includes means for applying a driving force to at least one of the rollers, and each roller conveys the object to be conveyed. 5. The carriage system for a cart for a suspended lifting and lowering conveyance apparatus according to claim 3 or 4, further comprising a flange portion for regulating a direction. 工程内環状軌道相互間を移動させるコンベアが、工程間環状軌道と直交する方向に隣接する一対の工程内環状軌道相互間において被搬送物を移動させるようにしたことを特徴とする請求項１乃至５の何れかに記載の懸垂式昇降搬送装置用台車の搬送システム。 The conveyor for moving between the in-process annular raceways moves the object to be transported between a pair of in-process annular raceways adjacent to each other in a direction orthogonal to the in-process annular raceway. 6. The transportation system for a cart for a suspended lifting / lowering transportation apparatus according to any one of the above. 工程間環状軌道を挟み対向配置された１対の工程内環状軌道相互間を結ぶコンベアが、前記工程間環状軌道と４箇所で直交し、当該直交４箇所にはターンテーブルを配置し、且つ前記１対の工程内環状軌道の夫々に各２箇所で直交する平面視長形状の環状軌道を形成することを特徴とする請求項１乃至４の何れかに記載の懸垂式昇降搬送装置用台車の搬送システム。   A conveyor that connects a pair of in-process annular tracks arranged opposite to each other with an inter-process annular track interposed therebetween is orthogonal to the inter-process annular track at four locations, a turntable is disposed at the four orthogonal locations, and 5. The suspension type lifting and lowering conveyance device carriage according to claim 1, wherein an annular track having a shape in plan view that is orthogonal to each other at two locations is formed in each of the pair of in-process annular tracks. Conveying system. 工程内環状軌道相互間を結ぶコンベアが４箇所に於いて工程間環状軌道に交差し、且つ隣接する工程内環状軌道との間において被搬送物を移動させるようにしたことを特徴とする請求項１乃至５の何れかに記載の懸垂式昇降搬送装置用台車の搬送システム。 The conveyer that connects the in-process annular tracks intersects the in-process annular track at four locations, and moves the object to be transferred between the adjacent in-process annular tracks. A carriage system for a carriage for a suspended lifting and lowering conveyance apparatus according to any one of 1 to 5. コンベアの両端部に置かれた被搬送物は、当該被搬送物固有の識別コードが付与されており、当該識別コードをＭＣＳ（搬送制御システム）が収集し、前記被搬送物が位置するコンベアの端部が属する工程内循環経路の所定のステーションに移動させる指令を与える制御手段を備えたことを特徴とする請求項１乃至８の何れかに記載の懸垂式昇降搬送装置用台車の搬送システム。

The objects to be conveyed placed at both ends of the conveyor are given identification codes unique to the objects to be conveyed, the identification codes are collected by the MCS (conveyance control system), and the objects to be conveyed are located on the conveyor. 9. The transportation system for a carriage for a suspended lifting / lowering transportation apparatus according to claim 1, further comprising control means for giving a command to move to a predetermined station in the in-process circulation path to which the end belongs.

JP2005140619A 2005-05-13 2005-05-13 Carrying system for suspended lift carriage Expired - Fee Related JP4858673B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005140619A JP4858673B2 (en) 2005-05-13 2005-05-13 Carrying system for suspended lift carriage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005140619A JP4858673B2 (en) 2005-05-13 2005-05-13 Carrying system for suspended lift carriage

Publications (2)

Publication Number Publication Date
JP2006319154A true JP2006319154A (en) 2006-11-24
JP4858673B2 JP4858673B2 (en) 2012-01-18

Family

ID=37539549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005140619A Expired - Fee Related JP4858673B2 (en) 2005-05-13 2005-05-13 Carrying system for suspended lift carriage

Country Status (1)

Country Link
JP (1) JP4858673B2 (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010165710A (en) * 2009-01-13 2010-07-29 Murata Machinery Ltd Overhead carrier
CN101844672A (en) * 2009-03-27 2010-09-29 株式会社大福 Article transport device
US20100242784A1 (en) * 2009-03-27 2010-09-30 Daifuku Co., Ltd. Switching Facility for Crossed Paths
JP2011223008A (en) * 2010-04-06 2011-11-04 Murata Mach Ltd Material handling system
CN102807097A (en) * 2011-05-31 2012-12-05 株式会社大福 Article transport facility
CN103025629A (en) * 2010-08-04 2013-04-03 株式会社大福 Goods transport facility
US9045147B2 (en) 2010-09-27 2015-06-02 Daifuku Co., Ltd. Article transport facility
CN108001979A (en) * 2016-10-28 2018-05-08 株式会社大福 Article carrying equipment
KR20190131195A (en) * 2018-05-16 2019-11-26 세메스 주식회사 Stocker and substrate transfer system comprising the same
KR20210041345A (en) * 2019-10-07 2021-04-15 세메스 주식회사 Apparatus for transferring articles
CN115123775A (en) * 2022-07-12 2022-09-30 浙江衣拿智能科技股份有限公司 Heavy clothing transportation route selection method and device and electronic equipment
US11984338B2 (en) 2021-10-25 2024-05-14 Samsung Electronics Co., Ltd. Substrate transfer system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6620707B2 (en) * 2016-09-09 2019-12-18 株式会社ダイフク Goods transport equipment

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154751A (en) * 1989-11-08 1991-07-02 Hitachi Ltd Multiple kind conveying method and device therefor
JPH0683450A (en) * 1992-09-04 1994-03-25 Daifuku Co Ltd Conveyance facility utilizing moving car
JPH06168025A (en) * 1992-12-01 1994-06-14 Hitachi Ltd Unmanned carrier system, and allocation processing method for unmanned carrier in unmanned carrier system
JPH0885032A (en) * 1994-09-14 1996-04-02 Hitachi Ltd Flexible production system
JPH08258965A (en) * 1995-03-20 1996-10-08 Fuji Xerox Co Ltd Workpiece transferring device
JPH09283413A (en) * 1996-04-17 1997-10-31 Hitachi Ltd Exposure method and aligner
JPH1111860A (en) * 1997-06-17 1999-01-19 Shinko Electric Co Ltd Overhead conveying device and overhead conveying vehicle
JPH1167870A (en) * 1997-08-22 1999-03-09 Hitachi Ltd Semiconductor wafer carrying device
JP2000188316A (en) * 1998-12-24 2000-07-04 Hitachi Ltd Method and device for conveyance and manufacture of semiconductor device using the same
JP2003081402A (en) * 2001-09-14 2003-03-19 Daifuku Co Ltd Physical distribution equipment
JP2003197708A (en) * 2001-12-25 2003-07-11 Sony Corp Article transfer system and transfer system for semiconductor manufacturing line
JP2004010250A (en) * 2002-06-06 2004-01-15 Murata Mach Ltd Unmanned transporting vehicle system
JP2004095748A (en) * 2002-08-30 2004-03-25 Fasl Japan Ltd Product conveying device, product storing device, product conveyance controller, product conveying system and product conveying method
JP2004103761A (en) * 2002-09-09 2004-04-02 Renesas Technology Corp Semiconductor device manufacturing line
JP2004303833A (en) * 2003-03-28 2004-10-28 Fujitsu Display Technologies Corp Configuration for manufacturing facility and method of transporting product
JP2005119798A (en) * 2003-10-16 2005-05-12 Daifuku Co Ltd Conveying device

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154751A (en) * 1989-11-08 1991-07-02 Hitachi Ltd Multiple kind conveying method and device therefor
JPH0683450A (en) * 1992-09-04 1994-03-25 Daifuku Co Ltd Conveyance facility utilizing moving car
JPH06168025A (en) * 1992-12-01 1994-06-14 Hitachi Ltd Unmanned carrier system, and allocation processing method for unmanned carrier in unmanned carrier system
JPH0885032A (en) * 1994-09-14 1996-04-02 Hitachi Ltd Flexible production system
JPH08258965A (en) * 1995-03-20 1996-10-08 Fuji Xerox Co Ltd Workpiece transferring device
JPH09283413A (en) * 1996-04-17 1997-10-31 Hitachi Ltd Exposure method and aligner
JPH1111860A (en) * 1997-06-17 1999-01-19 Shinko Electric Co Ltd Overhead conveying device and overhead conveying vehicle
JPH1167870A (en) * 1997-08-22 1999-03-09 Hitachi Ltd Semiconductor wafer carrying device
JP2000188316A (en) * 1998-12-24 2000-07-04 Hitachi Ltd Method and device for conveyance and manufacture of semiconductor device using the same
JP2003081402A (en) * 2001-09-14 2003-03-19 Daifuku Co Ltd Physical distribution equipment
JP2003197708A (en) * 2001-12-25 2003-07-11 Sony Corp Article transfer system and transfer system for semiconductor manufacturing line
JP2004010250A (en) * 2002-06-06 2004-01-15 Murata Mach Ltd Unmanned transporting vehicle system
JP2004095748A (en) * 2002-08-30 2004-03-25 Fasl Japan Ltd Product conveying device, product storing device, product conveyance controller, product conveying system and product conveying method
JP2004103761A (en) * 2002-09-09 2004-04-02 Renesas Technology Corp Semiconductor device manufacturing line
JP2004303833A (en) * 2003-03-28 2004-10-28 Fujitsu Display Technologies Corp Configuration for manufacturing facility and method of transporting product
JP2005119798A (en) * 2003-10-16 2005-05-12 Daifuku Co Ltd Conveying device

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010165710A (en) * 2009-01-13 2010-07-29 Murata Machinery Ltd Overhead carrier
US8322287B2 (en) 2009-03-27 2012-12-04 Daifuku Co., Ltd. Article Transport facility
US20100242784A1 (en) * 2009-03-27 2010-09-30 Daifuku Co., Ltd. Switching Facility for Crossed Paths
JP2010228673A (en) * 2009-03-27 2010-10-14 Daifuku Co Ltd Article transport facility
US8245647B2 (en) * 2009-03-27 2012-08-21 Daifuku Co., Ltd. Switching facility for crossed paths
CN101844672A (en) * 2009-03-27 2010-09-29 株式会社大福 Article transport device
KR101244268B1 (en) 2009-03-27 2013-03-18 가부시키가이샤 다이후쿠 Article transport facility
JP2011223008A (en) * 2010-04-06 2011-11-04 Murata Mach Ltd Material handling system
US9199826B2 (en) 2010-08-04 2015-12-01 Daifuku Co., Ltd. Article transport facility
CN103025629A (en) * 2010-08-04 2013-04-03 株式会社大福 Goods transport facility
TWI496728B (en) * 2010-08-04 2015-08-21 Daifuku Kk Article transport facility
US9045147B2 (en) 2010-09-27 2015-06-02 Daifuku Co., Ltd. Article transport facility
TWI498264B (en) * 2010-09-27 2015-09-01 Daifuku Kk Article transport facility
CN102807097A (en) * 2011-05-31 2012-12-05 株式会社大福 Article transport facility
KR101943928B1 (en) 2011-05-31 2019-01-30 가부시키가이샤 다이후쿠 Article transport facility
JP2012253070A (en) * 2011-05-31 2012-12-20 Daifuku Co Ltd Article conveyance device
KR20120134034A (en) 2011-05-31 2012-12-11 가부시키가이샤 다이후쿠 Article transport facility
US8459442B2 (en) 2011-05-31 2013-06-11 Daifuku Co., Ltd. Article transport facility
US10600666B2 (en) 2016-10-28 2020-03-24 Daifuku Co., Ltd. Article transport facility
JP2018070327A (en) * 2016-10-28 2018-05-10 株式会社ダイフク Article conveyance facility
KR20180046872A (en) * 2016-10-28 2018-05-09 가부시키가이샤 다이후쿠 Article transport facility
CN108001979A (en) * 2016-10-28 2018-05-08 株式会社大福 Article carrying equipment
CN108001979B (en) * 2016-10-28 2021-06-01 株式会社大福 Article carrying apparatus
KR102405911B1 (en) * 2016-10-28 2022-06-03 가부시키가이샤 다이후쿠 Article transport facility
KR20190131195A (en) * 2018-05-16 2019-11-26 세메스 주식회사 Stocker and substrate transfer system comprising the same
KR102495681B1 (en) * 2018-05-16 2023-02-02 세메스 주식회사 Stocker and substrate transfer system comprising the same
KR20210041345A (en) * 2019-10-07 2021-04-15 세메스 주식회사 Apparatus for transferring articles
KR102294887B1 (en) * 2019-10-07 2021-08-27 세메스 주식회사 Apparatus for transferring articles
US11984338B2 (en) 2021-10-25 2024-05-14 Samsung Electronics Co., Ltd. Substrate transfer system
CN115123775A (en) * 2022-07-12 2022-09-30 浙江衣拿智能科技股份有限公司 Heavy clothing transportation route selection method and device and electronic equipment
CN115123775B (en) * 2022-07-12 2023-07-11 浙江衣拿智能科技股份有限公司 Transportation route selection method and device for heavy clothing and electronic equipment

Also Published As

Publication number Publication date
JP4858673B2 (en) 2012-01-18

Similar Documents

Publication Publication Date Title
JP4858673B2 (en) Carrying system for suspended lift carriage
US6435330B1 (en) In/out load port transfer mechanism
US6308818B1 (en) Transport system with integrated transport carrier and directors
JP5316907B2 (en) Goods transport equipment
US6494308B2 (en) Integrated roller transport pod and asynchronous conveyor
US6533101B2 (en) Integrated transport carrier and conveyor system
JP4848862B2 (en) Conveyor truck trajectory
JPWO2015174181A1 (en) Transport system and transport method
TWI473194B (en) Overhead hoist transmission system
KR101869813B1 (en) Conveyor device
JP2011173673A (en) Carrier system
JP2005029319A (en) Conveying system
JP5344366B2 (en) Transport system
JP7323059B2 (en) carrier system
JP2000124284A (en) Transfer apparatus
JP2005223031A (en) Manufacturing method for semiconductor ic device
JP2004304085A (en) Method for manufacturing semiconductor device
JPH04186652A (en) Carry system for clean room
JP5224199B2 (en) Transfer device and transfer method between conveyor transport systems
KR20220144046A (en) Substrate transfer device and substrate transfer method
TWI258449B (en) Material handling system
JP2001284432A (en) Conveying system for production line
JP2000109212A (en) On-rail traveling type inter-process conveyor
JPH06224094A (en) Conveying system between steps of manufacturing process of semiconductor substrate
KR20000001916A (en) Automatic sending equipment

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080326

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20091023

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100114

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100127

RD07 Notification of extinguishment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7427

Effective date: 20100215

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110208

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110411

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111005

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111018

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4858673

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141111

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141111

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141111

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees