JP2006298629A - Material supply device and material supply method - Google Patents

Material supply device and material supply method Download PDF

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JP2006298629A
JP2006298629A JP2005126034A JP2005126034A JP2006298629A JP 2006298629 A JP2006298629 A JP 2006298629A JP 2005126034 A JP2005126034 A JP 2005126034A JP 2005126034 A JP2005126034 A JP 2005126034A JP 2006298629 A JP2006298629 A JP 2006298629A
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powder
material supply
deformable plate
plate
deformed
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Yoshiyuki Nakano
喜之 中野
Hideo Haraguchi
秀夫 原口
Kentaro Shingo
健太郎 新郷
Yoichiro Yashiro
陽一郎 矢代
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a material supply device and a material supply method for supplying powder stably without forming a bridge of powder held in a powder vessel. <P>SOLUTION: In this powder material supply device composed of the conical powder vessel 11 and a conveyance screw 12 provided at a lower end of the powder vessel, a wall on at least one face of the powder vessel is constituted by a plate 14 deformable by external pressure, and a sealed space 15 is formed on an outer side of the deformable plate 14 to supply or discharge pressure fluid into or from the space and deform the deformable plate appropriately so that powder is stably supplied without forming a bridge of powder. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、容器内の粉体をブリッジなく安定に供給する粉体供給装置および材料供給方法にするものであり、特に真空中・真空薄膜成膜設備など極度に異物混入を嫌うクリーンな粉体材料供給装置に関するものである。   The present invention provides a powder supply apparatus and a material supply method for stably supplying powder in a container without bridging, and in particular, clean powder that is extremely hated from foreign matter contamination such as in vacuum and vacuum thin film deposition equipment. The present invention relates to a material supply apparatus.

従来の材料供給装置としては、図９のように、ゴム弾性体で作られた粉体容器９１の下方に搬送スクリュー９２が設けられており、そのスクリュー９２に起因する粉体のブリッジの形成を破壊する揺動可能な板９４ａ，９４ｂを設け、搬送スクリュー９２の上側の粉体容器９１を押し変形させ、粉体材料９３のブリッジを破壊して安定して粉体材料９３を供給する方法がある。   As a conventional material supply apparatus, as shown in FIG. 9, a conveying screw 92 is provided below a powder container 91 made of a rubber elastic body, and a powder bridge caused by the screw 92 is formed. There is a method in which the rocking plates 94a and 94b to be broken are provided, the powder container 91 on the upper side of the conveying screw 92 is pushed and deformed, the bridge of the powder material 93 is broken, and the powder material 93 is stably supplied. is there.

また、図７に示すような、粉体のブリッジを防ぎ、安定して粉体を供給することが可能とされる粉体用ホッパー（特許文献１）や、図８に示すような粉体定量供給装置（特許文献２）というものがある。   In addition, a powder hopper (Patent Document 1) that can prevent powder bridging and supply powder stably as shown in FIG. 7, and a powder quantification as shown in FIG. There is a supply device (Patent Document 2).

前者の特許文献１に記載の発明の場合、コーン状の剛性容器内に、同じくコーン状で軟質材製の軟性容器を設けて剛性容器と軟性容器との間に気密空隙部を形成すると共に、剛性容器に通気管を連通し、この通気管から気密空隙部に圧縮流体を供給して軟性容器を内方に自在に膨出させて閉塞状態にある粉流体を崩し、その粉粒体Ｐの流れを円滑にするとされている。   In the case of the invention described in the former Patent Document 1, a corn-like soft container made of a soft material is provided in a corn-like rigid container, and an airtight gap is formed between the rigid container and the soft container. A vent pipe is connected to the rigid container, a compressed fluid is supplied from the vent pipe to the airtight gap, and the soft container is freely expanded inward to break up the powder fluid in the closed state. The flow is supposed to be smooth.

また、後者の特許文献２に記載の発明の場合、貯蔵手段としてのホッパーの排出口である搬送手段としてのスクリューコンベア真上に振動手段としての振動体を設け、その上部に制圧板を設ける事により、制圧板により粉体の増減による自重圧変化がスクリューコンベアへの排出量に与える影響を抑制すると共に、振動体によりスクリューコンベアの搬送に起因するブリッジを破壊すると同時に粉体の流動性を良好にして搬送手段内の粉体充満率を常に高安定させることにより、搬送手段から定量供給を可能とするものとされる。
特開２００１−３９４８９号公報（第４頁，図５） 特開２００１−３２１６５８公報（第４頁，図１及び図４） In the case of the latter invention described in Patent Document 2, a vibrating body as a vibrating means is provided directly above a screw conveyor as a conveying means, which is a discharge port of a hopper as a storing means, and a pressure control plate is provided above the vibrating body. This suppresses the influence of the self-pressure change due to the increase and decrease of the powder due to the pressure control plate on the discharge amount to the screw conveyor, and at the same time destroys the bridge caused by the conveyance of the screw conveyor by the vibrator and at the same time improves the fluidity of the powder Thus, by constantly stabilizing the powder filling rate in the conveying means, a fixed amount can be supplied from the conveying means.
JP 2001-39489 A (Page 4, FIG. 5) JP 2001-321658 A (Page 4, FIGS. 1 and 4)

しかしながら、最近ではクリーンな環境、特に真空中で薄膜形成する半導体や精密電子機器やデバイスの製造にも粉体材料を使ったプロセスが必要になってきており、よりクリーンに粉体を安定して供給する粉体材料供給装置の必要性が高まりつつある。そのため、上記特許文献１及び２に記載の発明などでは、真空中で使用する真空薄膜成膜設備においては真空を汚染し、成膜基板や成膜プロセスをも汚染する可能性があるという問題を有することになる。   Recently, however, processes using powder materials have become necessary for the production of semiconductors, precision electronic devices and devices that form thin films in a vacuum, especially in a vacuum environment. There is a growing need for powder material supply devices to be supplied. For this reason, in the inventions described in Patent Documents 1 and 2 above, there is a problem that the vacuum thin film deposition equipment used in a vacuum may contaminate the vacuum and may contaminate the deposition substrate and the deposition process. Will have.

具体的には、まず、図９に示す材料供給装置では、ゴム弾性体で作られた粉体容器９１と揺動可能な板９４ａ，９４ｂとの擦れや衝撃、或いは、ゴム弾性体で作られた粉体容器９１の変形などにより、それらの部材からのダストやコンタミの発生が懸念され、クリーンな環境においては導入が難しい。特にコンタミを嫌う真空中の薄膜プロセス設備内に導入する場合は、ゴム弾性体からの出ガスの影響なども懸念され、より導入は難しい。   Specifically, first, in the material supply apparatus shown in FIG. 9, the powder container 91 made of a rubber elastic body and the swingable plates 94a and 94b are rubbed or shocked, or made of a rubber elastic body. Due to the deformation of the powder container 91 and the like, there is a concern about the generation of dust and contamination from these members, and it is difficult to introduce in a clean environment. In particular, when it is introduced into a thin-film process facility in a vacuum that does not contend with contamination, the influence of the outgas from the rubber elastic body is concerned, and the introduction is more difficult.

また、特許文献１に記載の発明は、コーン状のゴム弾性体を用いるために、真空薄膜成膜プロセスなどクリーンな状態が欲しい場合には、コンタミや不純ガスの発生が考えられることから現実的には使用できず、更に、金属などの材料を選択した場合、コーン（円錐）という形状から変形はせず、万が一変形させたとしても元に戻すことは極めて難しいことから材料として使えない。   In addition, the invention described in Patent Document 1 is realistic because it uses a cone-shaped rubber elastic body, and when a clean state such as a vacuum thin film deposition process is desired, generation of contamination and impure gas can be considered. In addition, when a material such as metal is selected, it is not deformed from the shape of a cone (cone), and even if it is deformed, it cannot be used as a material because it is extremely difficult to return to its original state.

更に、特許文献２に記載の発明は、４角錐状の粉体容器ホッパーを用いて振動体を内部に入れ振動で粉体を安定に落とそうとするものであるが、クリーンを要求する環境で粉体の中に振動体などの複雑な構成の構造物を入れると粉体を汚染してしまい、かつ、振動体による粉体舞い上げの危険性もあることから導入は非常に困難であると考える。   Furthermore, the invention described in Patent Document 2 is intended to stably drop powder by vibration by placing a vibrating body inside using a quadrangular pyramid-shaped powder container hopper, but in an environment requiring cleanliness. If a complicated structure such as a vibrating body is put in the powder, it will contaminate the powder, and there is also a risk of the powder rising up by the vibrating body. Think.

本発明は、上記従来の問題に鑑み、粉体容器に保持された粉体のブリッジの形成無く粉体を安定に供給することが可能な材料供給装置および材料供給方法を提供することを目的とする。   In view of the above-described conventional problems, an object of the present invention is to provide a material supply apparatus and a material supply method capable of stably supplying powder without forming a powder bridge held in a powder container. To do.

上記目的を達成するために、本発明の材料供給装置は、粉体を保持する錐体状の粉体容器と、前記粉体容器の下方に設けられ前記粉体を攪拌しながら吐出口に供給するスクリューと、前記粉体を吐出する吐出口からなる材料供給装置であって、前記粉体容器の少なくとも一つの壁面を外圧で変形可能な板で構成するとともに、前記変形可能な板の外側に密閉された空間を形成し、この形成に圧力流体を供給または／かつ排出することで前記変形可能な板を変形させることで粉体を吐出口から供給することで解決できる。   In order to achieve the above object, a material supply device of the present invention includes a cone-shaped powder container that holds powder, and a powder container that is provided below the powder container and supplies the powder to a discharge port while stirring the powder. A material supply device comprising a screw and a discharge port for discharging the powder, wherein at least one wall surface of the powder container is configured by a plate that can be deformed by an external pressure, and on the outside of the deformable plate This can be solved by forming a sealed space and supplying the powder from the discharge port by deforming the deformable plate by supplying and / or discharging a pressure fluid to the formation.

以上のように、本発明の粉体供給装置および方法によれば、クリーンが求められる環境で安定した粉体供給ができ、特に真空中でプロセスを行なう設備などでも、ダストやコンタミの発生無く、プロセスなどに影響無く安定に粉体を供給できることができる。   As described above, according to the powder supply apparatus and method of the present invention, stable powder supply can be performed in an environment where cleanliness is required, and in particular, in facilities that perform processes in a vacuum, there is no generation of dust and contamination. The powder can be stably supplied without affecting the process.

（実施の形態１）
図１は本発明の一実施例に係る材料供給装置の断面図を示すものであり、図２は、図１に対して垂直な方向の断面図である。図２において、図１と同じ構成要素に関しては、同じ符号を用い、説明を省略する。 (Embodiment 1)
FIG. 1 is a sectional view of a material supply apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view in a direction perpendicular to FIG. In FIG. 2, the same components as those in FIG.

以下、図１及び図２を参照しながら、本実施の形態に係る材料供給装置および材料供給方法を説明する。図１において、材料供給装置は粉体１３を入れておく錐体状の粉体容器１１の下側に搬送スクリュー１２を持ち、その真上の粉体容器１１内の壁に少なくとも一つの面を保有し、その面の壁を外圧で変形可能な板（壁）１４を設け、変形可能な板１４の外側に密閉された空間１５を形成し、空間１５の圧力の増減による板１４の変形により、搬送スクリュー１２に起因する粉体のブリッジを破壊することで、搬送スクリュー１２による安定した粉体供給を可能としたものである。   Hereinafter, the material supply apparatus and the material supply method according to the present embodiment will be described with reference to FIGS. 1 and 2. In FIG. 1, the material supply apparatus has a conveying screw 12 below the cone-shaped powder container 11 in which the powder 13 is put, and at least one surface is provided on the wall inside the powder container 11 directly above the conveying screw 12. By holding a plate (wall) 14 whose wall can be deformed by external pressure, a sealed space 15 is formed outside the deformable plate 14, and the plate 14 is deformed by increasing or decreasing the pressure in the space 15. By breaking the powder bridge caused by the conveying screw 12, stable powder supply by the conveying screw 12 is made possible.

この変形可能な板１４の外側に密閉された空間１５の圧力の変化のさせ方の一例について、図６を基に説明する。   An example of how the pressure in the space 15 sealed outside the deformable plate 14 is changed will be described with reference to FIG.

図６（１）に示すように、例えば、密閉された空間１５内を真空ポンプ２０を使用して、バルブ１７の開閉により、絶対圧０Ｐａから１００００Ｐａ（大気圧）の変動をさせれば、材料供給装置が真空の中であれば、変形可能な板１４はフラットな状態と粉体側に膨らんだ状態とを繰り返すことになり、搬送スクリュー１２に起因する粉体のブリッジを破壊することが可能となる。材料供給装置が通常の大気の中であれば、変形可能な板１４は粉体側から見て凹んだ状態とフラットな状態とを繰り返すことにより、これもまた搬送スクリュー１２に起因する粉体のブリッジを破壊することが可能となる。   As shown in FIG. 6 (1), for example, if the inside of the sealed space 15 is changed from an absolute pressure of 0 Pa to 10,000 Pa (atmospheric pressure) by opening and closing the valve 17 using the vacuum pump 20, the material If the supply device is in a vacuum, the deformable plate 14 repeats a flat state and a swelled state on the powder side, and it is possible to break the powder bridge caused by the conveying screw 12. It becomes. If the material supply device is in a normal atmosphere, the deformable plate 14 repeats a concave state and a flat state when viewed from the powder side. The bridge can be destroyed.

絞り弁１６の調整とバルブ１７の開閉のタイミングにより、例えば図６（２）のように圧力の変化の周期を変えることができ、また、エアーや窒素などの圧力源１９を圧力調整弁１８により圧力調整することで、図６（３）のように、大気圧よりも高い圧力（この場合絶対圧２００００Ｐａ）を密閉された空間１５へ送り込むことができ、バルブ１７の開閉により、絶対圧０Ｐａから２００００Ｐａの変動をさせれば、材料供給装置が真空の中であれば、変形可能な板１４はフラットな状態とより粉体側に膨らんだ状態とを繰り返すことになり、搬送スクリュー１２に起因する粉体のブリッジを破壊する効果がさらに得られる。   By adjusting the throttle valve 16 and the opening / closing timing of the valve 17, for example, the period of change in pressure can be changed as shown in FIG. 6 (2), and the pressure source 19 such as air or nitrogen is controlled by the pressure adjustment valve 18. By adjusting the pressure, a pressure higher than the atmospheric pressure (in this case, absolute pressure 20000 Pa) can be fed into the sealed space 15 as shown in FIG. 6 (3). If the material supply device is in a vacuum, if the material supply device is in a vacuum, the deformable plate 14 repeats a flat state and a state where it swells to the powder side, resulting from the conveying screw 12. The effect of breaking the powder bridge is further obtained.

材料供給装置が通常の大気の中であれば、変形可能な板１４は粉体側から見て凹んだ状態と粉体側に膨らんだ状態とを繰り返すことにより、これもまた搬送スクリュー１２に起因する粉体のブリッジを破壊する効果がさらに得られる。これにより、安定した粉体の供給が可能となる。また、変形可能な板１４に関しては、塑性変形領域にならないよう注意が必要である。変形可能な板１４と空間１５は一面だけに限られないものとする。また、図３のように粉体を接する面のみ変形可能な板を使用し、その他は剛性の高い部材で空間を作り丈夫にしてもよい。この場合もまた、変形可能な板（壁）と空間は一面だけに限られないものとする。   If the material supply device is in the normal atmosphere, the deformable plate 14 repeats a state of being recessed when viewed from the powder side and a state of swelling to the powder side, which is also caused by the conveying screw 12. The effect of destroying the powder bridge is further obtained. Thereby, stable powder supply is possible. In addition, with respect to the deformable plate 14, care must be taken not to enter the plastic deformation region. The deformable plate 14 and the space 15 are not limited to one surface. Further, as shown in FIG. 3, a plate that can be deformed only on the surface in contact with the powder may be used, and others may be made strong by making a space with a highly rigid member. Also in this case, the deformable plate (wall) and the space are not limited to one surface.

（実施の形態２）
図４は実施の形態１に係る材料供給装置において、変形可能な板の外側に密閉された空間が複数個で構成される点で異なる。従って、以下、図１と同じ構成要素に関しては、同じ符号を用い説明を省略する。 (Embodiment 2)
FIG. 4 is different from the material supply apparatus according to Embodiment 1 in that a plurality of spaces sealed outside the deformable plate are configured. Therefore, hereinafter, the same components as those in FIG.

図４において、材料供給装置は、粉体容器１１内の壁に少なくとも一つの面に変形可能な板４４ａ，４４ｂと２個以上を保持し、それに対し、変形可能な板の外側の空間４５ａ，４５ｂを形成し、この各々の空間（４５ａ，４５ｂ）に圧力を送り込み、各部で個々に変形可能とする。これにより、上下の比較的長い粉体容器などにも対応することが可能となる。このように、粉体容器１１内の壁に少なくとも一つの面に変形可能な板と空間を複数個作り各部で変形可能とする。このとき、変形可能な板と空間は上下、左右の配列に限定されるものではない。   In FIG. 4, the material supply device holds at least one plate 44a, 44b deformable on at least one surface on the wall in the powder container 11 and two or more spaces 45a, 45b is formed, pressure is sent to each space (45a, 45b), and each part can be individually deformed. Thereby, it becomes possible to deal with a relatively long powder container on the upper and lower sides. In this way, a plurality of plates and spaces that can be deformed to at least one surface are formed on the wall in the powder container 11 so that each portion can be deformed. At this time, the deformable plate and space are not limited to the vertical and horizontal arrangements.

また、複数個の変形可能な板に関しては、大きさも変えて良いし、同時，交互，互いに独立に動作させても良い。更に、複数個の変形可能な板それぞれに圧力を変え変形量を変えても良い。また、粉体が少なくなった場合には、下側だけ変形させて不要な部分を動かさなくても良い。   Further, the plurality of deformable plates may be changed in size, and may be operated simultaneously, alternately, or independently of each other. Furthermore, the amount of deformation may be changed by changing the pressure for each of a plurality of deformable plates. Further, when the amount of powder is reduced, it is not necessary to deform only the lower side and move unnecessary portions.

（実施の形態３）
粉体の材料に関して、特に供給する粉が数百μｍ以下の大きさの微細なものや誘電体など静電気を帯びやすい粉体材料に関しては、特にブリッジを形成しやすい。上記より本発明の該変形可能な板の材質は、帯電し難い金属製のものが望ましく、クリーンな環境・特に真空で使用することも考慮すると、耐食性のあるステンレス、チタン、インコネル、ハステロイなどを使用すると好適である。 (Embodiment 3)
Regarding the powder material, in particular, a fine powder having a size of several hundred μm or less or a powder material that is easily charged with static electricity, such as a dielectric, easily forms a bridge. From the above, the material of the deformable plate of the present invention is preferably made of a metal that is difficult to be charged. It is preferable to use it.

また、図５（１）（２）に粉体５３を載せた板５１を少しずつ傾斜させていき所定の角度で停止した後、板５１上の滑り状態・粉体の残存状態を示す。更に、その板５１を約２ｍｍ変形させてこれを粉体５３がこれ以上落ちない状態まで繰り返す動作を行ない、その後の板５１上の粉体５３の滑り状態・粉体の残存状態を示す。   5 (1) and 5 (2) show the sliding state on the plate 51 and the remaining state of the powder after the plate 51 on which the powder 53 is placed is gradually inclined and stopped at a predetermined angle. Further, the plate 51 is deformed by about 2 mm, and this operation is repeated until the powder 53 does not fall any further, and the sliding state of the powder 53 on the plate 51 and the remaining state of the powder are shown.

前提条件として、粉体は金属酸化物の約数μｍの粉体を使用、板５１の材質はステンレス、板５１の表面粗度はＲａ＝０．８ａとした。上記結果を踏まえ、板５１上は緩やかな傾斜であればあるほどスクリュー径に対し、タンク幅が大きくなり、スクリューが小さくてもタンク容量が大きくすることができるが、前述した実施の形態１〜３の構成を取ったとしても、粉体は変形可能な板１４上をすべりにくくなるため、変形可能な板１４の傾斜角度に関しては、３０度以上は最低限必要である。なお、９０度以上傾けると粉体５３の流動性が悪化することになるので好適ではない。ゆえに、変形可能な板１４は３０度以上９０度未満の範囲で傾けると好適である。   As preconditions, the powder used was a metal oxide powder of about several μm, the material of the plate 51 was stainless steel, and the surface roughness of the plate 51 was Ra = 0.8a. Based on the above results, the more gently the plate 51 is inclined, the larger the tank width with respect to the screw diameter, and the tank capacity can be increased even if the screw is small. Even if the configuration 3 is adopted, the powder hardly slides on the deformable plate 14, and therefore the inclination angle of the deformable plate 14 is at least 30 degrees. Note that tilting by 90 degrees or more is not preferable because the fluidity of the powder 53 deteriorates. Therefore, it is preferable that the deformable plate 14 is tilted within a range of 30 degrees or more and less than 90 degrees.

更に、板５１の面粗度を何種類か変化させ、粉体５３を２０ｇ載せた板５１を少しずつ傾斜させて行き、所定の角度６０度で停止した後、板５１上の粉体の残存重量を測定する。Ｒａ＝６．３ａの板５１上に残った粉体の量を１００％として評価した結果を図５（３）に示す。   Further, the surface roughness of the plate 51 is changed in several kinds, the plate 51 on which 20 g of the powder 53 is placed is gradually inclined, stopped at a predetermined angle of 60 degrees, and then the powder on the plate 51 remains. Measure the weight. FIG. 5 (3) shows the results of evaluation assuming that the amount of powder remaining on the plate 51 with Ra = 6.3a is 100%.

このときの前提条件として、粉体は金属酸化物の約数μｍの粉体を使用、板５１の材質はステンレスとした。上記結果より、板５１の粉体に接する面は最大高さＲａ＝０．８ａ以下の面粗度が望ましく、更にバフ研磨・電解研磨などの表面処理を板５１に施せば、なお一層良い効果が得られる。   As preconditions at this time, the powder was a metal oxide powder of about several μm, and the plate 51 was made of stainless steel. From the above results, it is desirable that the surface of the plate 51 in contact with the powder has a maximum surface roughness Ra = 0.8a or less, and if the plate 51 is subjected to a surface treatment such as buffing or electropolishing, even better effects are obtained. Is obtained.

以上説明したように、本発明の材料供給装置および材料供給方法によれば、クリーンな環境で汚染も無く安定に粉体を供給できる方法であり、錐体状の粉体容器と該粉体容器の下端に設けられた搬送スクリューからなる粉体材料供給装置において、粉体容器の少なくとも一つの面の壁を外圧で変形可能な板で構成し、該変形可能な板の外側に密閉された空間を作り、この空間に圧力流体を供給したり排出したりすることで該変形可能な板を適宜変形させて粉体を供給する限り本発明から逸脱するものではない。   As described above, according to the material supply apparatus and the material supply method of the present invention, it is a method capable of stably supplying powder in a clean environment without contamination, and a cone-shaped powder container and the powder container In a powder material supply apparatus comprising a conveying screw provided at the lower end of the container, a wall formed on a plate that can be deformed by an external pressure on a wall of at least one surface of the powder container and sealed outside the deformable plate As long as the deformable plate is appropriately deformed to supply the powder by supplying or discharging the pressure fluid to and from this space, it does not depart from the present invention.

本発明の材料供給装置および材料供給方法によれば、ダスト・コンタミの発生無く、安定した粉体の供給が可能となるため、クリーンが求められる環境である食品・製薬の製造・実験などや、特に粉体を真空中で供給し真空での成膜プロセスなどを行なう用途またそれらの製造設備の用途にも適用できる。   According to the material supply apparatus and the material supply method of the present invention, it becomes possible to supply a stable powder without generation of dust and contamination, and therefore, food and pharmaceutical manufacturing and experiments, which are environments where cleanliness is required, In particular, the present invention can also be applied to applications in which powder is supplied in a vacuum and a vacuum film-forming process or the like is performed, or manufacturing facilities thereof.

本発明の実施の形態１に係る材料供給装置の断面を示す図The figure which shows the cross section of the material supply apparatus which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係る材料供給装置の断面を示す図The figure which shows the cross section of the material supply apparatus which concerns on Embodiment 1 of this invention. 本発明の実施の形態２に係る材料供給装置の断面を示す図The figure which shows the cross section of the material supply apparatus which concerns on Embodiment 2 of this invention. 本発明の実施の形態３に係る材料供給装置の断面を示す図The figure which shows the cross section of the material supply apparatus which concerns on Embodiment 3 of this invention. （１）（２）本発明の実施の形態３に係る傾斜角度を示す図、（３）本発明の実施の形態３に係る表面荒さと滑りやすさを示す図(1) (2) The figure which shows the inclination-angle which concerns on Embodiment 3 of this invention, (3) The figure which shows the surface roughness and slipperiness which concern on Embodiment 3 of this invention 本発明の実施の形態１に係る絶対圧力と時間との関係を示す図The figure which shows the relationship between the absolute pressure which concerns on Embodiment 1 of this invention, and time. 従来の技術（特許文献１に記載の発明）の概略を示す図The figure which shows the outline of the prior art (invention of patent document 1) 従来の技術（特許文献２に記載の発明）の概略を示す図The figure which shows the outline of the prior art (invention of patent document 2) 従来の技術の概略を示す図Diagram showing the outline of conventional technology

符号の説明Explanation of symbols

１１ 粉体容器
１２ 搬送スクリュー
１３ 粉体材料
１４ 変形可能な板
１５ 変形可能な板１４の外側に密閉された空間
１５ａ 変形可能な板１４の外側に密閉された空間１５への圧力流体経路
１６ 絞り弁
１７ バルブ
１８ 圧力調整弁
１９ エアー（窒素などの圧力源）
２０ 真空排気ポンプ
２１ 粉体用シール
２２ ベアリング
２３ 吐出口 DESCRIPTION OF SYMBOLS 11 Powder container 12 Conveying screw 13 Powder material 14 Deformable plate 15 Space sealed outside deformable plate 14 15a Pressure fluid path to space 15 sealed outside deformable plate 14 16 Restriction Valve 17 Valve 18 Pressure adjusting valve 19 Air (pressure source such as nitrogen)
20 Vacuum pump 21 Powder seal 22 Bearing 23 Discharge port

Claims (8)

粉体を保持する錐体状の粉体容器と、前記粉体容器の下方に設けられ前記粉体を攪拌しながら吐出口に供給するスクリューと、前記粉体を吐出する吐出口からなる材料供給装置であって、前記粉体容器の少なくとも一つの壁面を外圧で変形可能な板で構成するとともに、前記変形可能な板の外側に密閉された空間を形成し、この形成に圧力流体を供給または／かつ排出することで前記変形可能な板を変形させることで粉体を吐出口から供給することを特徴とする材料供給装置。 A material supply comprising a cone-shaped powder container for holding powder, a screw provided below the powder container and supplying the discharge port while stirring the powder, and a discharge port for discharging the powder The apparatus is configured such that at least one wall surface of the powder container is formed of a plate that can be deformed by an external pressure, and a sealed space is formed outside the deformable plate, and pressure fluid is supplied to the formation. / And a material supply device, wherein the deformable plate is deformed by discharging to supply powder from a discharge port. 前記変形可能な板の外側にこの板よりも剛性の高い容器を設けて空間を形成したことを特徴とする請求項１に記載の材料供給装置。 The material supply device according to claim 1, wherein a space is formed by providing a container having rigidity higher than that of the deformable plate on the outer side of the deformable plate. 前記空間は独立した複数個の空間に分割されて形成されたことを特徴とする請求項１または２に記載の材料供給装置。 The material supply apparatus according to claim 1, wherein the space is divided into a plurality of independent spaces. 前記独立した複数個の空間にそれぞれ異なる圧力の流体を供給排出し、変形可能な板が部分的に異なる変形をするようにしたことを特徴とする請求項３に記載の材料供給装置。 4. The material supply apparatus according to claim 3, wherein fluids having different pressures are supplied to and discharged from the plurality of independent spaces, and the deformable plate is partially deformed differently. 前記変形可能な板は、ステンレス、チタン、インコネル、ハステロイの何れかの材料であることを特徴とする請求項１〜４の何れか一項に記載の材料供給装置。 The material supply apparatus according to any one of claims 1 to 4, wherein the deformable plate is made of any material of stainless steel, titanium, inconel, or hastelloy. 前記変形可能な板の角度を水平面に対して３０度以上９０度未満傾けたことを特徴とする請求項１〜５の何れか一項に記載の材料供給装置。 The material supply apparatus according to claim 1, wherein an angle of the deformable plate is inclined by 30 degrees or more and less than 90 degrees with respect to a horizontal plane. 前記変形可能な板のうち、少なくとも粉体と面する側の一面の面粗度を最大高さＲａ＝０．８ａ以下にしたことを特徴とする請求項１〜６の何れか一項に記載の材料供給装置。 7. The surface roughness of at least one surface of the deformable plate facing the powder is set to a maximum height Ra = 0.8a or less. 7. Material supply equipment. 錐体状の粉体容器内に保持された粉体をスクリューによって攪拌しながら吐出口まで供給し、前記粉体を吐出口から吐出する材料供給方法であって、前記粉体容器の少なくとも一つの壁面を外圧で変形可能な板で構成するとともに、前記変形可能な板の外側に密閉された空間を形成し、この形成に圧力流体を供給または／かつ排出することで前記変形可能な板を変形させることで粉体を吐出口から供給することを特徴とする材料供給方法。 A material supply method for supplying powder held in a cone-shaped powder container to a discharge port while stirring with a screw, and discharging the powder from the discharge port, the material supply method comprising: The wall is formed of a plate that can be deformed by external pressure, and a sealed space is formed outside the deformable plate, and the deformable plate is deformed by supplying or / and discharging a pressure fluid in this formation. To supply the powder from the discharge port.
JP2005126034A 2005-04-25 2005-04-25 Material supply device and material supply method Pending JP2006298629A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011032100A (en) * 2009-07-31 2011-02-17 Wacker Chemie Ag Method for conveying granular silicon
JP2017048434A (en) * 2015-09-03 2017-03-09 住友電工焼結合金株式会社 Powder container
JP2018515322A (en) * 2015-02-13 2018-06-14 ノードソン コーポレーションＮｏｒｄｓｏｎ Ｃｏｒｐｏｒａｔｉｏｎ Hot melt adhesive supply and related methods
CN115057237A (en) * 2022-07-18 2022-09-16 长沙盛谷绿色供应链管理有限公司 Pneumatic conveying device and method for powder materials
CN116395286A (en) * 2023-04-14 2023-07-07 丰顺县瑞丰粮油食品有限公司 Flour storage equipment and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011032100A (en) * 2009-07-31 2011-02-17 Wacker Chemie Ag Method for conveying granular silicon
JP2018515322A (en) * 2015-02-13 2018-06-14 ノードソン コーポレーションＮｏｒｄｓｏｎ Ｃｏｒｐｏｒａｔｉｏｎ Hot melt adhesive supply and related methods
JP2017048434A (en) * 2015-09-03 2017-03-09 住友電工焼結合金株式会社 Powder container
CN115057237A (en) * 2022-07-18 2022-09-16 长沙盛谷绿色供应链管理有限公司 Pneumatic conveying device and method for powder materials
CN116395286A (en) * 2023-04-14 2023-07-07 丰顺县瑞丰粮油食品有限公司 Flour storage equipment and method
CN116395286B (en) * 2023-04-14 2024-02-09 丰顺县瑞丰粮油食品有限公司 Flour storage equipment and method

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