JP2006293353A - 平板表示装置及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 131
- 230000001678 irradiating effect Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 238000003491 array Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 58
- 239000010408 film Substances 0.000 description 33
- 230000003287 optical effect Effects 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 229920006268 silicone film Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- COOGPNLGKIHLSK-UHFFFAOYSA-N aluminium sulfide Chemical compound [Al+3].[Al+3].[S-2].[S-2].[S-2] COOGPNLGKIHLSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C9/00—Impression cups, i.e. impression trays; Impression methods
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
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Abstract
【解決手段】平板表示装置及びその製造方法を提供する。平板表示装置は,画素領域Pとアラインマーク領域AMを有する基板100を具備する。アラインマーク領域AMは,画素領域Pの相互に対応する両側部に画素領域Pに沿って位置する。画素領域P上に単位画素アレイが列Pcと行を有するように配列される。アラインマーク領域AM上に少なくとも一つのアラインマーク対133が相互に対応して位置する。アラインマーク対133は単位画素アレイの列Pcに対応して位置する。
【選択図】図4A
Description
30 レーザー照射装置
51,52 カメラ
100 素子基板
133 アラインマーク対
AM アラインマーク領域
P 画素領域
Pc 単位画素アレイの列
Claims (15)
- 画素領域と,前記画素領域の相互に対応する両側部に前記画素領域に沿って位置するアラインマーク領域とを具備する基板と;
前記画素領域上に列と行を有するように配列された単位画素アレイと;
前記アラインマーク領域上に相互に対応して位置する少なくとも一つのアラインマーク対と;
を含み,
前記アラインマーク対は,前記単位画素アレイの列に対応して位置することを特徴とする,平板表示装置。 - 前記アラインマーク領域上に,前記単位画素アレイのすべての列にそれぞれ対応するアラインマーク対が位置することを特徴とする,請求項1に記載の平板表示装置。
- 前記各アラインマーク対は,前記単位画素アレイの各列の延長線上に位置することを特徴とする,請求項2に記載の平板表示装置。
- 前記アラインマーク領域上に,前記単位画素アレイの一部の列にそれぞれ対応するアラインマーク対が位置し,前記アラインマーク対間の間隔は,前記単位画素アレイの列間の間隔の整数倍であることを特徴とする,請求項1に記載の平板表示装置。
- 前記単位画素アレイの各列には,同一色単位画素が位置することを特徴とする,請求項1〜4のいずれかに記載の平板表示装置。
- 前記各単位画素は,画素電極,対向電極及び前記画素電極と前記対向電極との間に位置する有機発光層を具備することを特徴とする,請求項1〜5のいずれかに記載の平板表示装置。
- 前記有機発光層は,レーザー熱転写法を用いて形成されたことを特徴とする,請求項6に記載の平板表示装置。
- 画素領域と,前記画素領域の相互に対応する両側部に前記画素領域に沿って位置するアラインマーク領域と,前記画素領域上に列と行を有するように配列された単位画素アレイと,前記アラインマーク領域上に相互に対応して位置する少なくとも一つのアラインマーク対とを備える平板表示装置を製造する方法において,
前記アラインマーク対は前記単位画素アレイの列に対応して位置する素子基板をチャック上に配置する段階と,
カメラを用いて前記アラインマーク対の位置を測定する段階と,
前記測定されたアラインマーク対の位置に基づいて,前記測定されたアラインマーク対に対応する前記単位画素アレイの列の位置を計算する段階と,
前記計算された位置に沿ってレーザービームを照射する段階と,
を含むことを特徴とする,平板表示装置の製造方法。 - 前記計算された位置に沿ってレーザービームを照射する段階は,レーザー照射装置を移動させる段階と,前記レーザー照射装置に連動して前記チャックを移動させながら前記基板上に前記レーザービームを照射する段階とを含むことを特徴とする,請求項8に記載の平板表示装置の製造方法。
- 前記アラインマーク対の位置を測定する前に,前記素子基板上にドナーベース基板と,前記ドナーベース基板上に位置する光熱変換層及び前記光熱変換層上に位置する転写層を具備するドナー基板とを,前記転写層が前記素子基板に対向するように配置する段階をさらに含むことを特徴とする,請求項8または9のいずれかに記載の平板表示装置の製造方法。
- 前記各単位画素は画素電極を具備し,前記レーザービームの照射により前記画素電極上に転写層パターンを形成することを特徴とする,請求項10に記載の平板表示装置の製造方法。
- 前記アラインマーク領域上に,前記単位画素アレイのすべての列にそれぞれ対応するアラインマーク対が位置することを特徴とする,請求項8〜11のいずれかに記載の平板表示装置の製造方法。
- 前記各アラインマーク対は,前記単位画素アレイの各列の延長線上に位置することを特徴とする,請求項12に記載の平板表示装置の製造方法。
- 前記アラインマーク領域上に,前記単位画素アレイの一部列にそれぞれ対応するアラインマーク対が位置し,前記アラインマーク対間の間隔は前記単位画素アレイの列間の間隔の整数倍であることを特徴とする,請求項8〜11のいずれかに記載の平板表示装置の製造方法。
- 前記単位画素アレイの各列には同一色の単位画素が位置することを特徴とする,請求項8〜14のいずれかに記載の平板表示装置の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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KR10-2005-0029189 | 2005-04-07 | ||
KR1020050029189A KR100712289B1 (ko) | 2005-04-07 | 2005-04-07 | 평판표시장치 및 그의 제조방법 |
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JP2006293353A true JP2006293353A (ja) | 2006-10-26 |
JP4989912B2 JP4989912B2 (ja) | 2012-08-01 |
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JP2006103457A Active JP4989912B2 (ja) | 2005-04-07 | 2006-04-04 | 平板表示装置の製造方法およびレーザー熱転写装置 |
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US (1) | US8953138B2 (ja) |
EP (1) | EP1710839A3 (ja) |
JP (1) | JP4989912B2 (ja) |
KR (1) | KR100712289B1 (ja) |
CN (1) | CN100501995C (ja) |
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US9737537B2 (en) | 2006-12-28 | 2017-08-22 | Cymabay Therapeutics, Inc. | Heterocyclic receptor agonists for the treatment of diabetes and metabolic disorders |
US10292983B2 (en) | 2016-08-03 | 2019-05-21 | Cymabay Therapeutics, Inc. | Oxymethylene aryl compounds for treating inflammatory gastrointestinal diseases or gastrointestinal conditions |
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KR100660893B1 (ko) * | 2005-11-22 | 2006-12-26 | 삼성전자주식회사 | 정렬 마크막을 구비하는 반도체 소자 및 그 제조 방법 |
KR20070101618A (ko) * | 2006-04-11 | 2007-10-17 | 주식회사 에이디피엔지니어링 | 기판 처리 장치 |
KR100788551B1 (ko) * | 2006-12-29 | 2007-12-26 | 삼성에스디아이 주식회사 | 유기 전계 발광 표시 장치 및 그 제조 방법 |
CN101738767B (zh) | 2008-11-14 | 2012-11-07 | 群康科技(深圳)有限公司 | 液晶显示面板和其制造方法 |
KR101813548B1 (ko) * | 2011-06-30 | 2018-01-02 | 삼성디스플레이 주식회사 | 레이저 열전사 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
KR102001226B1 (ko) * | 2012-11-12 | 2019-07-25 | 삼성디스플레이 주식회사 | 레이저 열전사 장치 및 레이저 열전사 방법 |
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KR100539623B1 (ko) * | 2003-06-25 | 2005-12-28 | 엘지.필립스 엘시디 주식회사 | 버텀 게이트형 폴리 실리콘 박막트랜지스터 소자의 제조방법 |
KR100954332B1 (ko) * | 2003-06-30 | 2010-04-21 | 엘지디스플레이 주식회사 | 액정표시소자와 그 제조방법 |
KR101026935B1 (ko) * | 2003-12-10 | 2011-04-04 | 엘지디스플레이 주식회사 | 디스펜서 정렬장치 및 그 방법 |
JP4239890B2 (ja) * | 2004-04-26 | 2009-03-18 | セイコーエプソン株式会社 | 有機el装置、電子機器 |
-
2005
- 2005-04-07 KR KR1020050029189A patent/KR100712289B1/ko active IP Right Grant
-
2006
- 2006-04-04 JP JP2006103457A patent/JP4989912B2/ja active Active
- 2006-04-05 EP EP06112234A patent/EP1710839A3/en not_active Ceased
- 2006-04-06 US US11/398,606 patent/US8953138B2/en not_active Expired - Fee Related
- 2006-04-07 CN CNB2006100732787A patent/CN100501995C/zh active Active
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JP2002344028A (ja) * | 2001-05-16 | 2002-11-29 | Sony Corp | 素子の転写方法及び画像表示装置の製造方法 |
JP2005502987A (ja) * | 2001-09-10 | 2005-01-27 | セイコーエプソン株式会社 | 可溶性材料の堆積 |
JP2003318372A (ja) * | 2002-04-25 | 2003-11-07 | Seiko Epson Corp | 電子装置の製造方法及び製造装置 |
JP2004095555A (ja) * | 2002-08-29 | 2004-03-25 | Eastman Kodak Co | 有機発光表示装置製造用の基板を整合する方法 |
JP2005017333A (ja) * | 2003-06-23 | 2005-01-20 | Sony Corp | 表示装置の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US9737537B2 (en) | 2006-12-28 | 2017-08-22 | Cymabay Therapeutics, Inc. | Heterocyclic receptor agonists for the treatment of diabetes and metabolic disorders |
US9925189B2 (en) | 2006-12-28 | 2018-03-27 | Cymabay Therapeutics, Inc. | Heterocyclic receptor agonists for the treatment of diabetes and metabolic disorders |
US9150567B2 (en) | 2009-10-01 | 2015-10-06 | Cymabay Therapeutics, Inc. | Substituted tetrazol-1-yl-phenoxymethyl-thiazol-2-yl-piperidinyl-pyrimidine salts |
US10292983B2 (en) | 2016-08-03 | 2019-05-21 | Cymabay Therapeutics, Inc. | Oxymethylene aryl compounds for treating inflammatory gastrointestinal diseases or gastrointestinal conditions |
Also Published As
Publication number | Publication date |
---|---|
US20060227281A1 (en) | 2006-10-12 |
KR100712289B1 (ko) | 2007-04-27 |
EP1710839A2 (en) | 2006-10-11 |
CN1845326A (zh) | 2006-10-11 |
US8953138B2 (en) | 2015-02-10 |
CN100501995C (zh) | 2009-06-17 |
EP1710839A3 (en) | 2007-05-09 |
JP4989912B2 (ja) | 2012-08-01 |
KR20060107155A (ko) | 2006-10-13 |
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