JP2006278516A - Tray and its suction structure - Google Patents

Tray and its suction structure Download PDF

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JP2006278516A
JP2006278516A JP2005092569A JP2005092569A JP2006278516A JP 2006278516 A JP2006278516 A JP 2006278516A JP 2005092569 A JP2005092569 A JP 2005092569A JP 2005092569 A JP2005092569 A JP 2005092569A JP 2006278516 A JP2006278516 A JP 2006278516A
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tray
suction
pocket
holding surface
suction portion
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JP4734993B2 (en
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Masaharu Sasaki
正治 佐々木
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Yamaha Corp
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Yamaha Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To smoothly perform the transportation or the like of a tray by further stably holding the tray by a suction device. <P>SOLUTION: The tray 10 comprises a planar tray body 11, and a plurality of pockets 12 formed on the surface of the tray body 11 at predetermined intervals along the longitudinal direction and the lateral direction. The tray 10 is provided to be suction-held through a the suction device 20. The the suction device 20 has a holding surface 21 on which a suction portion 25 is formed. The tray body 11 is formed with an air conduction portion 16. The air conduction portion 16 connects the pocket 12 located to overlap the suction portion 25 and at least one pocket 12 not overlapped with the suction portion 25 in the region of the holding surface 21 in a plan view in a suction state. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、トレイ及びその吸着構造に係り、更に詳しくは、吸着装置による吸着保持の安定化を図ることができるトレイ及びその吸着構造に関する。   The present invention relates to a tray and an adsorption structure thereof, and more particularly, to a tray and an adsorption structure thereof capable of stabilizing adsorption holding by an adsorption device.

従来より、複数枚のチップを搬送するためのトレイが利用されており、このトレイとしては、図５〜図７に示されるタイプのものがある。同図において、トレイ５０は、板状をなすトレイ本体５１と、このトレイ本体５１の上面側に凹状に形成された複数のポケット５２とを備えている。各ポケット５１は、図５中縦方向及び横方向に所定間隔毎に形成されるとともに、内部にチップＣ（図７参照）をそれぞれ収容可能に設けられている。ここで、前記トレイ５０を搬送する場合には、図７に示されるような吸着装置５５が用いられる。この吸着装置５５は、トレイ本体５１の図７中上面に接する保持面５６を備え、この保持面５６に形成された穴状の吸引部５７から吸気してポケット５２の内部を負圧化することによりトレイ５０を吸着保持するようになっている。   Conventionally, a tray for transporting a plurality of chips has been used, and there are types of trays shown in FIGS. In the drawing, a tray 50 includes a tray main body 51 having a plate shape and a plurality of pockets 52 formed in a concave shape on the upper surface side of the tray main body 51. Each pocket 51 is formed at predetermined intervals in the vertical direction and the horizontal direction in FIG. 5, and is provided so as to accommodate a chip C (see FIG. 7) therein. Here, when the tray 50 is transported, a suction device 55 as shown in FIG. 7 is used. The suction device 55 includes a holding surface 56 that is in contact with the upper surface of the tray main body 51 in FIG. 7, and sucks air from a hole-like suction portion 57 formed on the holding surface 56 to make the inside of the pocket 52 negative pressure. Thus, the tray 50 is sucked and held.

しかしながら、このような構成にあっては、トレイ５０を吸着した状態において、吸引部５７と重なって位置するポケット５２（図６中網点で示すポケット５２）内の空気だけが吸引されることとなる。このため、トレイ５０において吸着力が付与される面積が小さくなり、トレイ５０を安定的に保持することが困難になるという不都合を生じる。この結果、吸着装置５５による搬送中にトレイ５０の位置ずれが生じ、当該トレイ５０の位置を修正或いは調整する作業が必要となったり、トレイ５０が不用意に落下し、ひいては、チップＣを損傷させる可能性が高くなるという不都合を招来する。   However, in such a configuration, only the air in the pocket 52 (pocket 52 indicated by a halftone dot in FIG. 6) positioned so as to overlap with the suction portion 57 is sucked in the state where the tray 50 is sucked. Become. For this reason, the area to which the suction force is applied in the tray 50 is reduced, which causes a disadvantage that it is difficult to stably hold the tray 50. As a result, the position of the tray 50 is shifted during the conveyance by the suction device 55, and it becomes necessary to correct or adjust the position of the tray 50, or the tray 50 falls carelessly and eventually damages the chip C. This causes the inconvenience that the possibility of making it high.

［発明の目的］
本発明は、このような不都合に着目して案出されたものであり、その目的は、吸着装置により安定して保持され、搬送等をスムースに行うことができるトレイ及びその吸着構造を提供することにある。 [Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to provide a tray that can be stably held by a suction device and that can be smoothly transported, and a suction structure thereof. There is.

前記目的を達成するため、本発明は、所定の吸着装置の保持面に形成された吸引部により空気を吸引したときに、当該保持面側に吸着保持可能に設けられたトレイであって、
前記保持面に沿って配置可能に設けられたトレイ本体と、このトレイ本体に所定間隔毎に複数設けられるとともに、内部にチップをそれぞれ収容可能なポケットとを備え、
前記吸着状態を平面視したときに、前記吸引部に重なって位置するポケットと、保持面の領域内であって吸引部に重ならない少なくとも一つのポケットとの間を連通する空気流通路を設ける、という構成が採用されている。 In order to achieve the above object, the present invention is a tray provided so as to be capable of being suction-held on the holding surface side when air is sucked by a suction portion formed on the holding surface of a predetermined suction device,
A tray body provided so as to be arranged along the holding surface, and a plurality of the tray body provided at predetermined intervals in the tray body, and a pocket capable of accommodating each chip therein,
When the suction state is viewed in plan, an air flow passage is provided that communicates between a pocket that overlaps the suction portion and at least one pocket that is in the region of the holding surface and does not overlap the suction portion; The configuration is adopted.

本発明において、前記空気流通路は、溝により形成されることが好ましい。   In the present invention, the air flow passage is preferably formed by a groove.

また、前記空気流通路に連通するポケットは、平面視でトレイ本体の中央領域に設けられる、という構成も好ましくは採用される。   In addition, a configuration in which the pocket communicating with the air flow passage is provided in the central region of the tray main body in a plan view is preferably employed.

更に、本発明のトレイの吸着構造は、所定の吸着装置を介してトレイを吸着保持するトレイの吸着構造において、
前記吸着装置は、吸引部が形成された保持面を含み、この吸引部から空気を吸引することで保持面側にトレイを吸着保持可能に設けられ、
前記トレイは、保持面に沿って位置可能に設けられたトレイ本体と、このトレイ本体に所定間隔毎に複数設けられるとともに、内部にチップをそれぞれ収容可能なポケットとを備え、
前記吸着状態を平面視したときに、前記吸引部に重なって位置するポケットと、保持面の領域内であって吸引部に重ならない少なくとも一つのポケットとの間を連通する空気流通路を設ける、という構成が採用される。 Furthermore, the tray suction structure of the present invention is a tray suction structure that holds and holds the tray via a predetermined suction device.
The suction device includes a holding surface on which a suction portion is formed, and is provided so as to suck and hold the tray on the holding surface side by sucking air from the suction portion,
The tray includes a tray main body that can be positioned along the holding surface, a plurality of tray main bodies provided at predetermined intervals in the tray main body, and pockets that can accommodate chips therein.
When the suction state is viewed in plan, an air flow passage is provided that communicates between a pocket that overlaps the suction portion and at least one pocket that is in the region of the holding surface and does not overlap the suction portion; The configuration is adopted.

本発明によれば、吸引部に重なるポケットだけでなく、空気流通路によって吸引部に重ならないポケット内の空気も吸引させることが可能となる。すなわち、前述の従来構造に比べ、吸引部に重ならないポケット分吸着力が付与される面積を拡大でき、吸着装置によるトレイの吸着保持を安定して行うことが可能となる。これにより、トレイの搬送中における位置ずれを抑制して当該搬送を迅速且つスムースに行えるようになる。   According to the present invention, not only the pocket overlapping the suction part but also the air in the pocket not overlapping the suction part can be sucked by the air flow passage. That is, compared to the above-described conventional structure, the area to which the suction force for pockets that do not overlap the suction portion can be increased, and the suction and holding of the tray by the suction device can be performed stably. Thereby, the positional deviation during the conveyance of the tray is suppressed, and the conveyance can be performed quickly and smoothly.

また、空気流通路を溝としたので、極めて簡単な構成により空気流通路を形成することが可能となる。   Further, since the air flow passage is a groove, the air flow passage can be formed with a very simple configuration.

更に、トレイ本体の中央領域に空気流通路に連通するポケットを設けたから、当該中央領域一箇所だけを吸着した場合であっても、吸着装置の保持面にトレイを安定して保持させることができる。   Further, since the pocket communicating with the air flow passage is provided in the central region of the tray body, the tray can be stably held on the holding surface of the suction device even when only one portion of the central region is sucked. .

以下、本発明の好ましい実施の形態について図面を参照しながら説明する。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

図１には、実施形態に係るトレイの平面図が示され、図２には、その部分拡大図が示されている。これらの図において、トレイ１０は、樹脂材料を用いた一体成形品により構成され、複数枚のチップＣ（図３参照）を同時に収納可能に設けられている。トレイ１０は、平面視略長方形状をなす板状のトレイ本体１１と、このトレイ本体１１の面に図１中縦方向及び横方向に沿って所定間隔毎に複数設けられたポケット１２とを備えて構成されている。   FIG. 1 shows a plan view of a tray according to the embodiment, and FIG. 2 shows a partially enlarged view thereof. In these drawings, the tray 10 is constituted by an integrally molded product using a resin material, and is provided so that a plurality of chips C (see FIG. 3) can be stored simultaneously. The tray 10 includes a plate-like tray main body 11 having a substantially rectangular shape in plan view, and a plurality of pockets 12 provided on the surface of the tray main body 11 at predetermined intervals along the vertical and horizontal directions in FIG. Configured.

前記トレイ１０は、図３に示されるように、吸着装置２０により吸着保持可能に設けられている。この吸着装置２０は、トレイ本体１１の上面に沿って位置可能な保持面２１を下面に備えた板状若しくはシート状をなすクッション材２２と、このクッション材２２を上側から支持する支持部材２４とを備え、図示しない駆動装置を介して所定方向に移動可能に設けられている。保持面２１は、図２中縦２列及び横３列に並ぶ各ポケット１２の上部領域を閉塞可能な大きさの平面視方形状に設けられている。保持面２１の面内中央部には、丸穴からなる吸引部２５が形成されている一方、支持部材２４の上部には、前記吸引部２５に連通する吸気管２６が設けられている。吸気管２６は、図示しないポンプに接続されており、このポンプを作動させることにより、吸気管２６を介して吸引部２５から空気が吸引されるようになっている。   As shown in FIG. 3, the tray 10 is provided so as to be sucked and held by a suction device 20. The suction device 20 includes a cushion material 22 having a plate shape or a sheet shape having a holding surface 21 that can be positioned along the upper surface of the tray body 11 on the lower surface, and a support member 24 that supports the cushion material 22 from above. And provided so as to be movable in a predetermined direction via a driving device (not shown). The holding surface 21 is provided in a planar view shape having a size capable of closing the upper regions of the pockets 12 arranged in two vertical rows and three horizontal rows in FIG. A suction part 25 made of a round hole is formed in the central portion of the holding surface 21, and an intake pipe 26 communicating with the suction part 25 is provided on the support member 24. The intake pipe 26 is connected to a pump (not shown), and air is sucked from the suction portion 25 through the intake pipe 26 by operating this pump.

前記各ポケット１２は、略方形の平面形状に設けられるとともに、トレイ本体１１の図３中上面を凹状に窪ませることによりそれぞれ形成されている。各ポケット１２は、内部に前記チップＣをそれぞれ収容可能に設けられており、当該チップＣとしては、特に限定されるものでないが、ＢＧＡ型若しくはＣＳＰ型等の面実装型が例示できる。各ポケット１２の下方には、トレイ本体１１の下面より突出する膨出部１４がそれぞれ設けられ、各膨出部１４は、ポケット１２より若干小さい平面サイズに形成されている。従って、複数のトレイ１０を重ねたときに、上段のトレイ１０の膨出部１４が、下段のトレイ１０のポケット１２に嵌り合うようになっている。ここで、図１及び図２に示されるように、平面視でトレイ本体１１の中央領域に位置するポケット１２の間には、空気流通路１６が設けられている。   Each of the pockets 12 is provided in a substantially square planar shape, and is formed by recessing the upper surface of the tray body 11 in FIG. Each pocket 12 is provided so as to be able to accommodate the chip C therein, and the chip C is not particularly limited, but a surface mount type such as a BGA type or a CSP type can be exemplified. Below each pocket 12 is provided a bulging portion 14 that protrudes from the lower surface of the tray body 11, and each bulging portion 14 is formed in a slightly smaller planar size than the pocket 12. Therefore, when the plurality of trays 10 are stacked, the bulging portion 14 of the upper tray 10 fits into the pocket 12 of the lower tray 10. Here, as shown in FIGS. 1 and 2, an air flow passage 16 is provided between the pockets 12 located in the central region of the tray body 11 in plan view.

前記空気流通路１６は、トレイ本体１１の面内中央部１１Ａ上に吸着装置２０の吸引部２５を配置して吸着状態としたときに、平面視で前記保持面２１の領域内に収まる各ポケット１２間を連通する溝により形成されている。これを更に詳述すると、空気流通路１６は、上下方向に延びる４本の縦溝１７と、左右方向に延びる３本の横溝１８とを備え、縦溝１７は、平面視で吸引部２５に重なって位置する２つのポケット１２，１２と、当該ポケット１２，１２の図２中上下両側に隣接して吸引部２５に重ならないように位置する４つのポケット１２とを相互に連通するようにそれぞれ設けられている。また、横溝１８は、前記縦溝１７が形成された６つのポケット１２において図２中左右に相互に隣り合うポケット１２，１２同士を連通するようにそれぞれ形成されている。各縦溝１７及び横溝１８は、トレイ本体１１の図３中上面を凹ませるように形成されており、本実施形態では、ポケット１２より小さい深さとしたが、これらの深さを略同一に設定してもよい。   The air flow passage 16 is a pocket that fits in the region of the holding surface 21 in a plan view when the suction portion 25 of the suction device 20 is placed on the in-plane center portion 11A of the tray body 11 to be in the suction state. It is formed by a groove communicating between 12. More specifically, the air flow passage 16 includes four vertical grooves 17 extending in the vertical direction and three horizontal grooves 18 extending in the left-right direction. The vertical grooves 17 are formed in the suction portion 25 in a plan view. The two pockets 12 and 12 positioned so as to overlap each other and the four pockets 12 positioned so as not to overlap the suction portion 25 adjacent to both upper and lower sides in FIG. Is provided. Further, the lateral grooves 18 are formed so that the pockets 12, 12 adjacent to each other on the left and right in FIG. 2 communicate with each other in the six pockets 12 in which the longitudinal grooves 17 are formed. The vertical grooves 17 and the horizontal grooves 18 are formed so as to be recessed in the upper surface in FIG. 3 of the tray main body 11. In this embodiment, the depth is smaller than the pocket 12, but these depths are set to be substantially the same. May be.

以上の構成において、吸着装置２０を介してトレイ１０を吸着保持する場合、先ず、吸着装置２０を移動し、平面視でトレイ本体１１の面内中央部１１Ａと吸引部２５とが一致するように保持面２１をトレイ本体１１の上面に載置する。このとき、図２中網点で示した６つのポケット１２が保持面２１により閉塞されて略密閉された状態となる。その後、前記ポンプ（図示省略）を作動させて吸引部２５より空気を吸引する。これにより、吸引部２５に重なる二つのポケット１２，１２、縦溝１７及び横溝１８を通じて網点で示した６つのポケット１２内の空気が吸引部２５により吸引され、各ポケット１２内の空気が負圧化されて保持面２１側に吸着保持される。   In the above configuration, when the tray 10 is sucked and held via the suction device 20, first, the suction device 20 is moved so that the in-plane center portion 11A of the tray body 11 and the suction portion 25 coincide with each other in plan view. The holding surface 21 is placed on the upper surface of the tray body 11. At this time, the six pockets 12 indicated by halftone dots in FIG. 2 are closed by the holding surface 21 and are substantially sealed. Thereafter, the pump (not shown) is operated to suck air from the suction part 25. As a result, the air in the six pockets 12 indicated by halftone dots is sucked by the suction part 25 through the two pockets 12, 12 overlapping the suction part 25, the vertical groove 17 and the horizontal groove 18, and the air in each pocket 12 is negative. Compressed and held by suction on the holding surface 21 side.

従って、このような実施形態によれば、吸引部２５に重ならないポケット１２内も吸気して当該ポケット１２の領域に吸着力を作用させることができる。つまり、トレイ１０における吸着力が付与される領域を広く確保することができ、トレイ１０を安定的に保持させて吸着装置２０を用いた搬送等をスムースに行うことが可能となる。   Therefore, according to such an embodiment, the inside of the pocket 12 that does not overlap the suction portion 25 can also be sucked to cause an adsorption force to act on the region of the pocket 12. That is, it is possible to secure a wide area to which the suction force is applied in the tray 10, and it is possible to stably carry the tray 10 and the like using the suction device 20 while holding the tray 10 stably.

本発明を実施するための最良の構成、方法などは、以上の記載で開示されているが、本発明は、これに限定されるものではない。
すなわち、本発明は、特定の実施の形態に関して特に図示し、且つ、説明されているが、本発明の技術的思想及び目的の範囲から逸脱することなく、以上に述べた実施形態に対し、形状、位置若しくは方向、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。
従って、上記に開示した形状などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状などの限定の一部若しくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。 Although the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, the present invention is not limited to this.
That is, the present invention has been particularly shown and described with respect to particular embodiments, but is not limited to the embodiments described above without departing from the scope and spirit of the present invention. Various modifications may be made by those skilled in the art in terms of position, orientation, and other detailed configurations.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description in the name of the member excluding a part or all of the limitation is included in the present invention.

例えば、前記吸引部２５は、図示構成例に限られず、複数箇所に散点的に***を設けたり、吸気を行う領域をポーラス体で形成したりしてもよい。   For example, the suction unit 25 is not limited to the illustrated configuration example, and small holes may be provided at a plurality of points in a scattered manner, or a region for performing intake may be formed with a porous body.

また、空気流通路１６を構成する溝の形成位置は、種々の設計変更が可能であり、例えば、図４に示される構成に代替することが可能である。同図において、縦溝１７及び横溝１８は、各ポケット１２のコーナー領域に連通されている。また、吸引部２５に重なる二つのポケット１２，１２に対して斜め方向に隣り合うポケット１２との間に溝１９を設けてもよい。   Further, the design position of the groove constituting the air flow passage 16 can be changed in various ways, and for example, the configuration shown in FIG. 4 can be substituted. In the figure, the vertical groove 17 and the horizontal groove 18 are communicated with the corner region of each pocket 12. Further, a groove 19 may be provided between the pockets 12 adjacent to each other in the oblique direction with respect to the two pockets 12, 12 overlapping the suction part 25.

実施形態に係る収納容器の概略平面図。The schematic plan view of the storage container which concerns on embodiment. 図１のＡ部拡大図。The A section enlarged view of FIG. 図２のＢ−Ｂ線に沿う断面図。Sectional drawing which follows the BB line of FIG. 変形例に係る図２と同様の拡大図。The enlarged view similar to FIG. 2 which concerns on a modification. 従来例に係る収納容器の図１と同様の平面図。The top view similar to FIG. 1 of the storage container which concerns on a prior art example. 図５のＣ部拡大図。The C section enlarged view of FIG. 図６のＤ−Ｄ線に沿う断面図。Sectional drawing which follows the DD line | wire of FIG.

符号の説明Explanation of symbols

１０・・・トレイ、１１・・・トレイ本体、１２・・・ポケット、１６・・・空気流通部、１７・・・縦溝、１８・・・横溝、２０・・・吸着装置、２１・・・保持面、２５・・・吸引部、Ｃ・・・チップ   DESCRIPTION OF SYMBOLS 10 ... Tray, 11 ... Tray main body, 12 ... Pocket, 16 ... Air distribution part, 17 ... Vertical groove, 18 ... Horizontal groove, 20 ... Adsorption device, 21 ... -Holding surface, 25 ... suction part, C ... tip

Claims (4)

所定の吸着装置の保持面に形成された吸引部により空気を吸引したときに、当該保持面側に吸着保持可能に設けられたトレイであって、
前記保持面に沿って配置可能に設けられたトレイ本体と、このトレイ本体に所定間隔毎に複数設けられるとともに、内部にチップをそれぞれ収容可能なポケットとを備え、
前記吸着状態を平面視したときに、前記吸引部に重なって位置するポケットと、保持面の領域内であって吸引部に重ならない少なくとも一つのポケットとの間を連通する空気流通路を設けたことを特徴とするトレイ。 When air is sucked by a suction portion formed on a holding surface of a predetermined suction device, the tray is provided on the holding surface side so as to be sucked and held,
A tray body provided so as to be arranged along the holding surface, and a plurality of the tray body provided at predetermined intervals in the tray body, and a pocket capable of accommodating each chip therein,
When the suction state is viewed in plan, an air flow passage is provided that communicates between a pocket that overlaps the suction portion and at least one pocket that is in the holding surface area and does not overlap the suction portion. Tray characterized by that. 前記空気流通路は、溝により形成されていることを特徴とする請求項１記載のトレイ。   The tray according to claim 1, wherein the air flow passage is formed by a groove. 前記空気流通路に連通するポケットは、平面視でトレイ本体の中央領域に設けられていることを特徴とする請求項１記載のトレイ。   The tray according to claim 1, wherein the pocket communicating with the air flow passage is provided in a central region of the tray main body in a plan view. 所定の吸着装置を介してトレイを吸着保持するトレイの吸着構造において、
前記吸着装置は、吸引部が形成された保持面を含み、この吸引部から空気を吸引することで保持面側にトレイを吸着保持可能に設けられ、
前記トレイは、保持面に沿って位置可能に設けられたトレイ本体と、このトレイ本体に所定間隔毎に複数設けられるとともに、内部にチップをそれぞれ収容可能なポケットとを備え、
前記吸着状態を平面視したときに、前記吸引部に重なって位置するポケットと、保持面の領域内であって吸引部に重ならない少なくとも一つのポケットとの間を連通する空気流通路を設けたことを特徴とするトレイの吸着構造。 In the tray suction structure that holds the tray by suction through a predetermined suction device,
The suction device includes a holding surface on which a suction portion is formed, and is provided so as to suck and hold the tray on the holding surface side by sucking air from the suction portion,
The tray includes a tray main body that can be positioned along the holding surface, a plurality of tray main bodies provided at predetermined intervals in the tray main body, and pockets that can accommodate chips therein.
When the suction state is viewed in plan, an air flow passage is provided that communicates between a pocket that overlaps the suction portion and at least one pocket that is in the holding surface area and does not overlap the suction portion. A tray adsorption structure characterized by that.
JP2005092569A 2005-03-28 2005-03-28 Tray and its adsorption structure Expired - Fee Related JP4734993B2 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002001686A (en) * 2001-06-25 2002-01-08 Seiko Epson Corp Semiconductor storage container carrying device and method, and suction pad used for it
JP2002002871A (en) * 2000-04-20 2002-01-09 Hitachi Ltd Method for manufacturing semiconductor device and tray used therein

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002002871A (en) * 2000-04-20 2002-01-09 Hitachi Ltd Method for manufacturing semiconductor device and tray used therein
JP2002001686A (en) * 2001-06-25 2002-01-08 Seiko Epson Corp Semiconductor storage container carrying device and method, and suction pad used for it

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