JP2006273671A - Crucible washing device - Google Patents

Crucible washing device Download PDF

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JP2006273671A
JP2006273671A JP2005096824A JP2005096824A JP2006273671A JP 2006273671 A JP2006273671 A JP 2006273671A JP 2005096824 A JP2005096824 A JP 2005096824A JP 2005096824 A JP2005096824 A JP 2005096824A JP 2006273671 A JP2006273671 A JP 2006273671A
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crucible
cleaning
cleaning liquid
nozzle
rotary table
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Nobuyuki Kaneko
信幸 金子
Naoyuki Obata
直之 小畑
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Coorstek KK
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Toshiba Ceramics Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a crucible washing device capable of uniformly washing with a little use amount of a washing liquid. <P>SOLUTION: The crucible washing device is equipped with a rotary table 4 to mount a crucible R to be washed with the bottom upside, a spray nozzle 5 disposed near the center of the rotation table 4 to spray a washing liquid in a conical form to the inner surface of the crucible R, and one effluent nozzle 6 disposed above the rotation table 4 to pour the washing liquid to the outer surface of the crucible R. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明はルツボ洗浄装置に係り、特に洗浄液の噴射構造を改良したルツボ洗浄装置に関する。   The present invention relates to a crucible cleaning apparatus, and more particularly to a crucible cleaning apparatus having an improved cleaning liquid injection structure.

一般にシリコン単結晶の引上げはチョクラルスキー法を用いて行われているが、単結晶引上げ時、石英ルツボに内面に発生するブラウンモールドは、単結晶の成長に悪影響を与えるため、ブラウンモールドの発生を抑える必要がある。   In general, the pulling of silicon single crystals is performed using the Czochralski method, but when pulling a single crystal, the brown mold generated on the inner surface of the quartz crucible has an adverse effect on the growth of the single crystal. It is necessary to suppress.

このブラウンモールド発生の要因は、石英ルツボ内面の最終洗浄の清浄度が大きな要因であると考えられている。   This brown mold is considered to be caused mainly by the final cleanliness of the inner surface of the quartz crucible.

そこで、従来石英ルツボ内面の洗浄には種々の提案がなされている。   Therefore, various proposals have been made for cleaning the inner surface of the quartz crucible.

例えば、特許文献１には、ルツボ開口面を下向きに設置して、そのルツボの内表面と外表面を複数の噴射口を備えた内ノズルから洗浄液を噴射しルツボ内面を洗浄し、複数個の外ノズルによりルツボ外表面を洗浄する石英ルツボの洗浄装置が提案されているが、この洗浄装置では内表面に複数の噴射口から洗浄液を噴射するため、薬液が重畳して、不均一な洗浄となり、まだらなエッチングとなり好ましくなく、外表面に複数個の外ノズルから洗浄液を噴射するので洗浄液を多く必要とし好ましくない。   For example, in Patent Document 1, the crucible opening surface is installed downward, and the inner surface and the outer surface of the crucible are sprayed from an inner nozzle having a plurality of injection ports to clean the inner surface of the crucible. A quartz crucible cleaning device that cleans the outer surface of the crucible with an outer nozzle has been proposed. In this cleaning device, cleaning liquid is sprayed from the multiple injection ports onto the inner surface, resulting in non-uniform cleaning due to the overlapping of chemicals. This is undesirable because it results in mottled etching, and a large amount of cleaning liquid is required because the cleaning liquid is sprayed from a plurality of external nozzles onto the outer surface.

さらに、特許文献２には、ルツボの内表面と外表面を複数の噴射口を備えた内ノズルから洗浄液を噴射しルツボ内表面を洗浄し、複数の噴射口を備えルツボの半周に渡るようにＣ字形状の外ノズルから洗浄液を噴射してルツボ外表面を洗浄する石英ルツボの洗浄装置が提案されているが、この洗浄装置では内面に複数の噴射口から洗浄液を噴射するため、薬液が重畳して、不均一な洗浄となり、まだらなエッチングとなり好ましくなく、外表面に複数の噴射口を備え外ノズルから噴射させるので、大量の洗浄液を使用し、また、装置部材（例えば、チャンバ内壁構成部材）に噴射洗浄液がルツボから強く反射し、部材を変形もしくは触媒させるおそれがある。   Furthermore, in Patent Document 2, the inner surface and the outer surface of the crucible are sprayed with a cleaning liquid from an inner nozzle having a plurality of injection ports, the inner surface of the crucible is cleaned, and the crucible is provided with a plurality of injection ports so as to cover a half circumference of the crucible. A quartz crucible cleaning device that cleans the outer surface of the crucible by spraying a cleaning solution from a C-shaped outer nozzle has been proposed. In this cleaning device, the cleaning solution is sprayed from a plurality of injection ports on the inner surface. As a result, uneven cleaning and mottled etching are undesirable, and since a plurality of injection ports are provided on the outer surface and sprayed from the outer nozzle, a large amount of cleaning liquid is used, and apparatus members (for example, chamber inner wall constituent members) are used. ), The jet cleaning liquid is strongly reflected from the crucible and may deform or catalyze the member.

さらに、特許文献３には、特許文献２におけるＣ字形状の外ノズルに換えて複数の外ノズルを設けた石英ルツボの洗浄装置が提案されているが、特許文献２と同様に大量の洗浄液を使用し、好ましくない。
特開平５−１４８０７５号公報 特開２０００−１４３３８６号公報 特開２００１−１０６１１号公報 Further, Patent Document 3 proposes a quartz crucible cleaning device provided with a plurality of outer nozzles in place of the C-shaped outer nozzle in Patent Document 2, but a large amount of cleaning liquid is applied as in Patent Document 2. Use is not preferred.
Japanese Patent Laid-Open No. 5-148075 JP 2000-143386 A JP 2001-10611 A

本発明は上述した事情を考慮してなされたもので、均一な洗浄が可能で洗浄液の使用量が少ないルツボ洗浄装置を提供することを目的とする。   The present invention has been made in consideration of the above-described circumstances, and an object thereof is to provide a crucible cleaning apparatus that can perform uniform cleaning and uses a small amount of cleaning liquid.

上述した目的を達成するため、本発明に係るルツボ洗浄装置は、洗浄されるルツボが底部を上にして載置される回転テーブルと、この回転テーブルの中心近傍に設けられ洗浄液をコーン状に噴射して前記ルツボの内表面に噴きつける噴射ノズルと、前記回転テーブルの上方に設けられ、前記底部の外表面に洗浄液を流出させる１個の流出ノズルを備えたことを特徴とする。   In order to achieve the above-described object, a crucible cleaning apparatus according to the present invention includes a rotary table on which a crucible to be cleaned is placed with the bottom facing up, and a cleaning liquid provided near the center of the rotary table in a cone shape. And an injection nozzle that sprays on the inner surface of the crucible, and a single outflow nozzle that is provided above the rotary table and that causes the cleaning liquid to flow out to the outer surface of the bottom.

好適には、前記ノズルは前記底部の外表面の中央近傍に洗浄液を流出させる。   Preferably, the nozzle causes the cleaning liquid to flow out in the vicinity of the center of the outer surface of the bottom portion.

本発明に係るルツボ洗浄装置によれば、均一な洗浄が可能で洗浄液の使用量が少ないルツボ洗浄装置を提供することを目的とする。   According to the crucible cleaning apparatus of the present invention, an object is to provide a crucible cleaning apparatus that can perform uniform cleaning and uses a small amount of cleaning liquid.

以下、本発明に係るルツボ洗浄装置の一実施形態について添付図面を参照して説明する。   Hereinafter, an embodiment of a crucible cleaning apparatus according to the present invention will be described with reference to the accompanying drawings.

図１は本発明の一実施形態に係るルツボ洗浄装置の側面を示す概念図、図２はその平面を示す概念図である。   FIG. 1 is a conceptual diagram showing a side surface of a crucible cleaning apparatus according to an embodiment of the present invention, and FIG. 2 is a conceptual diagram showing a plane thereof.

図１及び図２に示すように、本発明に係るルツボ洗浄装置１は、装置本体２を備え、この装置筐体２には、装置基台３に回転自在に取付けられ、洗浄される石英ルツボＲが底部を上にして載置される回転テーブル４が内装され、この回転テーブル４の中心近傍に設けられ洗浄液をルツボの内面に噴射する噴射ノズル５が設けられている。さらに、装置筐体２の上部で回転テーブル４の上方には、石英ルツボＲの底部の外表面に洗浄液を流出させる１個の流出ノズル６が設けられている。   As shown in FIGS. 1 and 2, a crucible cleaning apparatus 1 according to the present invention includes an apparatus body 2, and a quartz crucible that is rotatably attached to an apparatus base 3 and cleaned in the apparatus housing 2. A rotary table 4 on which R is placed with the bottom facing up is provided, and an injection nozzle 5 is provided near the center of the rotary table 4 to inject cleaning liquid onto the inner surface of the crucible. Furthermore, one outflow nozzle 6 for allowing the cleaning liquid to flow out to the outer surface of the bottom of the quartz crucible R is provided above the rotary table 4 above the apparatus housing 2.

噴射ノズル５は低圧高流量タイプのノズルで複数個の噴射口を備え、図３に示すように、フルコーン状に洗浄液を噴霧することが可能なフルコーンノズルが好ましく、１７０°フルコーン状に噴霧され、常に洗浄液が全ルツボ内表面に当るタイプのものが好ましい。   The injection nozzle 5 is a low-pressure, high-flow-rate type nozzle having a plurality of injection ports, and as shown in FIG. 3, a full cone nozzle capable of spraying a cleaning liquid in a full cone shape is preferable, and is sprayed in a 170 ° full cone shape. A type in which the cleaning liquid always hits the entire inner surface of the crucible is preferable.

流出ノズル６は噴射ノズル５と対向する位置すなわち、回転テーブル４に載置されるルツボＲの底部中央近傍に対向するように配置され、噴射ノズル５とは異なり洗浄液を噴射するタイプのものではなく、緩やかに洗浄液を流出させるタイプのものである。   The outflow nozzle 6 is arranged to face the injection nozzle 5, that is, to face the vicinity of the center of the bottom of the crucible R placed on the rotary table 4. Unlike the injection nozzle 5, the outflow nozzle 6 is not of the type that injects the cleaning liquid. This is a type that gently causes the cleaning liquid to flow out.

回転テーブル４は装置基台３に取付けられたモータ７により回転され、さらに、回転テーブル４にはその表面のルツボＲが載置される２本の装置側レール８が取付けられており、石英ルツボＲの回転テーブル４への載置時及び取出し時、ルツボ搬送用の台車９に設けられた台車側レール１０を接続させることにより、ルツボ洗浄装置１と台車９間の石英ルツボＲの受渡が容易に行えるようになっている。   The turntable 4 is rotated by a motor 7 attached to the device base 3, and two device-side rails 8 on which the crucible R on the surface is placed are attached to the turntable 4. The quartz crucible R can be easily delivered between the crucible cleaning device 1 and the carriage 9 by connecting the carriage side rail 10 provided on the carriage 9 for carrying the crucible when the R is placed on the rotary table 4 and taken out. Can be done.

次に本発明に係るルツボ洗浄装置を用いたルツボの洗浄方法について説明する。   Next, a crucible cleaning method using the crucible cleaning apparatus according to the present invention will be described.

図１に示すように、石英ルツボＲを台車９の台車側レール１０に乗せて、ルツボＲを台車９に載置する。台車９をルツボ洗浄装置１に近接させて、装置側レール８と台車側レール１０が接続するようにし、石英ルツボＲを台車側レール１０及び装置側レール８上で滑らせて、回転テーブル４に載置する。   As shown in FIG. 1, the quartz crucible R is placed on the carriage-side rail 10 of the carriage 9, and the crucible R is placed on the carriage 9. The carriage 9 is brought close to the crucible cleaning apparatus 1 so that the apparatus-side rail 8 and the carriage-side rail 10 are connected, and the quartz crucible R is slid on the carriage-side rail 10 and the apparatus-side rail 8 so that the rotary table 4 is moved. Place.

台車９をルツボ洗浄装置１から遠ざけ、装置筐体２を密閉状態にし、回転テーブル４を回転させて石英ルツボＲを回転させる。   The cart 9 is moved away from the crucible cleaning apparatus 1, the apparatus housing 2 is sealed, the rotating table 4 is rotated, and the quartz crucible R is rotated.

しかる後、図４に示すように、噴射ノズル５から洗浄液をコーン状に噴射させて、石英ルツボＲの内表面に噴きつける。このとき、洗浄液はコーン状に噴射されて石英ルツボＲの内表面に噴きつけられるので、内表面全体が均一に洗浄され、特に円弧部ｒ１から直胴部ｒ２にかけても、効果的に洗浄される。 Thereafter, as shown in FIG. 4, the cleaning liquid is sprayed in a cone shape from the spray nozzle 5 and sprayed onto the inner surface of the quartz crucible R. At this time, since the cleaning liquid is sprayed in the shape of a cone and sprayed onto the inner surface of the quartz crucible R, the entire inner surface is cleaned evenly, and in particular, the cleaning is effectively performed even from the arc portion r 1 to the straight barrel portion r 2. Is done.

一方、石英ルツボＲの外表面は流出ノズル６から石英ルツボＲの底部中央近傍に洗浄液が流出されるので、この洗浄液は石英ルツボの回転に伴って、底部を渦巻き状かつ薄膜状、均一に流れ、さらに、直胴部分を均一に流れ、洗浄する。   On the other hand, the cleaning liquid flows out from the outflow nozzle 6 to the vicinity of the center of the bottom of the quartz crucible R from the outer surface of the quartz crucible R. As the quartz crucible rotates, the cleaning liquid flows uniformly in a spiral and thin film shape at the bottom. Further, the straight body portion is uniformly flowed and cleaned.

石英ルツボの洗浄は、噴射ノズル５及び流出ノズル６を用いて、例えば３５℃の洗浄液で５分間薬液シャワーを行い、さらに、１分間の液抜きを行い、再び６０℃の温水で３分間温純水シャワーを行い、さらに、１分間エアブローを行い乾燥させる。   The quartz crucible is cleaned using a spray nozzle 5 and an outflow nozzle 6, for example, a chemical liquid shower is performed for 5 minutes with a cleaning liquid at 35 ° C., a liquid is drained for 1 minute, and a warm pure water shower is performed again with warm water at 60 ° C. for 3 minutes. And air blow for 1 minute to dry.

上記洗浄過程において、洗浄液はフルコーン状に内表面に噴きつけられるので、内表面全体の均一洗浄が可能となり、特に円弧部から直胴部にかけても、効果的に洗浄され、一方、外表面は石英ルツボの底部中央近傍に洗浄液が流出され、底部を渦巻き状かつ薄膜状、均一に流れ、均一に洗浄される。外表面は１個の流出ノズルから緩やかに流出する洗浄液によって洗浄されるので、洗浄液の使用量を減少させることができ、さらに、洗浄液圧によって装置部材を変形させることもない。   In the above cleaning process, the cleaning liquid is sprayed onto the inner surface in the form of a full cone, so that the entire inner surface can be uniformly cleaned, and in particular, even from the arc part to the straight body part, it is effectively cleaned, while the outer surface is made of quartz. The cleaning liquid flows out in the vicinity of the center of the bottom of the crucible, and the bottom is swirled and thinly and uniformly flows to be cleaned uniformly. Since the outer surface is cleaned by the cleaning liquid that gently flows out from one outflow nozzle, the amount of the cleaning liquid used can be reduced, and further, the apparatus member is not deformed by the cleaning liquid pressure.

上記実施形態にルツボ洗浄装置によれば、洗浄液をコーン状に噴射してルツボ内表面に噴きつける噴射ノズルと洗浄液を外表面に流出させる流出ノズルを設けることにより、均一な洗浄が可能で洗浄液の使用量が少ないルツボ洗浄装置が実現される。   According to the crucible cleaning apparatus of the above embodiment, by providing the spray nozzle for spraying the cleaning liquid in a cone shape and spraying the inner surface of the crucible and the outflow nozzle for flowing the cleaning liquid to the outer surface, uniform cleaning is possible. A crucible cleaning device with a small amount of use is realized.

本発明に係る上記ルツボ洗浄装置を用いて洗浄を行った石英ルツボを用いて、シリコン単結晶の引上げを行い、ＤＦ率と使用後の内表面のブラウンモード発生状況を調べ、ルツボの内表面と外表面を複数の噴射口を備えた内ノズルと複数の外ノズルで洗浄する従来例と比較した。   Using the quartz crucible cleaned using the crucible cleaning apparatus according to the present invention, the silicon single crystal is pulled up, the DF rate and the brown mode occurrence state of the inner surface after use are examined, the inner surface of the crucible and This was compared with a conventional example in which the outer surface was cleaned with an inner nozzle having a plurality of injection ports and a plurality of outer nozzles.

２２インチルツボ、１００個について実施した。   The test was conducted on 100 22-inch crucibles.

結果を表１に示す。

Figure 2006273671
The results are shown in Table 1.
Figure 2006273671

本発明の一実施形態に係るルツボ洗浄装置の側面を示す概念図。The conceptual diagram which shows the side of the crucible washing | cleaning apparatus which concerns on one Embodiment of this invention. 本発明の一実施形態に係るルツボ洗浄装置の平面を示す概念図。The conceptual diagram which shows the plane of the crucible washing | cleaning apparatus which concerns on one Embodiment of this invention. 本発明の一実施形態に係るルツボ洗浄装置の噴射ノズルの洗浄液噴射状態を示す概念図。The conceptual diagram which shows the washing | cleaning liquid injection state of the injection nozzle of the crucible cleaning apparatus which concerns on one Embodiment of this invention. 本発明の一実施形態に係るルツボ洗浄装置の噴射ノズルの洗浄液噴射状態を示す概念図。The conceptual diagram which shows the washing | cleaning liquid injection state of the injection nozzle of the crucible cleaning apparatus which concerns on one Embodiment of this invention.

符号の説明Explanation of symbols

１ ルツボ洗浄装置
２ 装置筐体
３ 装置基台
４ 回転テーブル
５ 噴射ノズル
６ 流出ノズル DESCRIPTION OF SYMBOLS 1 Crucible washing | cleaning apparatus 2 Apparatus housing 3 Apparatus base 4 Rotary table 5 Injection nozzle 6 Outflow nozzle

Claims (2)

洗浄されるルツボが底部を上にして載置される回転テーブルと、この回転テーブルの中心近傍に設けられ洗浄液をコーン状に噴射して前記ルツボの内表面に噴きつける噴射ノズルと、前記回転テーブルの上方に設けられ、前記底部の外表面に洗浄液を流出させる１個の流出ノズルを備えたことを特徴とするルツボ洗浄装置。 A rotary table on which a crucible to be cleaned is placed with the bottom facing up, an injection nozzle that is provided near the center of the rotary table and sprays cleaning liquid in a cone shape to spray the inner surface of the crucible, and the rotary table A crucible cleaning device comprising a single outflow nozzle that is provided above the outer surface of the bottom portion and allows the cleaning liquid to flow out to the outer surface of the bottom portion. 前記ノズルは前記底部の外表面の中央近傍に洗浄液を流出させることを特徴とする請求項１に記載のルツボ洗浄装置。 The crucible cleaning apparatus according to claim 1, wherein the nozzle causes the cleaning liquid to flow out in the vicinity of the center of the outer surface of the bottom portion.
JP2005096824A 2005-03-30 2005-03-30 Crucible washing device Pending JP2006273671A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
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JP2013107037A (en) * 2011-11-21 2013-06-06 Komine Kikai Kk Method for washing dewatering basket for washing food and washing apparatus
CN103480619A (en) * 2012-06-14 2014-01-01 浙江五环钛业股份有限公司 Cleaning device
CN104353625A (en) * 2014-10-28 2015-02-18 常州大学 Cleaning equipment special for crucible
CN104785478A (en) * 2015-04-01 2015-07-22 常州大学 Crucible cleaning robot in water spraying mode
CN105151828A (en) * 2015-09-30 2015-12-16 湖南三德科技股份有限公司 Crucible unloading and sweeping device
CN110373677A (en) * 2019-07-23 2019-10-25 长沙中瓷资源循环利用有限公司 A kind of microturbulence saggar cleaning device and cleaning method
CN112197586A (en) * 2020-08-28 2021-01-08 芜湖良仕机械科技有限公司 Electric heating crucible furnace
CN110373677B (en) * 2019-07-23 2024-05-14 长沙中瓷资源循环利用有限公司 Micro-turbulence sagger cleaning device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013107037A (en) * 2011-11-21 2013-06-06 Komine Kikai Kk Method for washing dewatering basket for washing food and washing apparatus
CN103480619A (en) * 2012-06-14 2014-01-01 浙江五环钛业股份有限公司 Cleaning device
CN104353625A (en) * 2014-10-28 2015-02-18 常州大学 Cleaning equipment special for crucible
CN104353625B (en) * 2014-10-28 2016-08-17 常州大学 A kind of crucible special cleaning equipment
CN104785478A (en) * 2015-04-01 2015-07-22 常州大学 Crucible cleaning robot in water spraying mode
CN105151828A (en) * 2015-09-30 2015-12-16 湖南三德科技股份有限公司 Crucible unloading and sweeping device
CN110373677A (en) * 2019-07-23 2019-10-25 长沙中瓷资源循环利用有限公司 A kind of microturbulence saggar cleaning device and cleaning method
CN110373677B (en) * 2019-07-23 2024-05-14 长沙中瓷资源循环利用有限公司 Micro-turbulence sagger cleaning device
CN112197586A (en) * 2020-08-28 2021-01-08 芜湖良仕机械科技有限公司 Electric heating crucible furnace

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