JP2006239796A5 - - Google Patents

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JP2006239796A5
JP2006239796A5 JP2005057231A JP2005057231A JP2006239796A5 JP 2006239796 A5 JP2006239796 A5 JP 2006239796A5 JP 2005057231 A JP2005057231 A JP 2005057231A JP 2005057231 A JP2005057231 A JP 2005057231A JP 2006239796 A5 JP2006239796 A5 JP 2006239796A5
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Prior art keywords
workpiece
glassy carbon
voltage
tool electrode
processing
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JP2005057231A
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JP2006239796A (en
JP4196123B2 (en
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Description

本願第１の発明のガラス状カーボンの加工方法は、電解質性溶液をガラス状カーボンの加工物の加工付近に供給しながら、前記加工物に対向して設けられた工具電極との間に電圧を印加することで、前記工具電極を前記加工物に対して送り込むことにより前記加工物を電気化学的に加工することを特徴とするものである。 In the glassy carbon processing method according to the first aspect of the present invention , a voltage is applied between the electrode electrode and the tool electrode provided facing the workpiece while supplying the electrolyte solution in the vicinity of the processing of the glassy carbon workpiece. By applying, the work piece is electrochemically processed by feeding the tool electrode to the work piece.

Claims (5)

電解質性溶液をガラス状カーボンの加工物の加工付近に供給しながら、前記加工物に対向して設けられた工具電極との間に電圧を印加することで、前記工具電極を前記加工物に対して送り込むことにより前記加工物を電気化学的に加工することを特徴とするガラス状カーボンの加工方法。 While supplying the electrolyte solution to the vicinity of the processing of the glassy carbon workpiece, a voltage is applied between the tool electrode provided opposite to the workpiece, and the tool electrode is applied to the workpiece. A method for processing glassy carbon, wherein the workpiece is electrochemically processed by feeding the workpiece. 前記工具電極はタングステンまたはチタンであることを特徴とする請求項１に記載のガラス状カーボンの加工方法。 2. The glassy carbon processing method according to claim 1, wherein the tool electrode is tungsten or titanium. 電解質性溶液は脱イオン水であることを特徴とする請求項１または２に記載のガラス状カーボンの加工方法。 3. The glassy carbon processing method according to claim 1, wherein the electrolytic solution is deionized water. 任意のパルス幅の電圧を印加することを特徴とする請求項１〜３の何れかに記載のガラス状カーボンの加工方法。 The glassy carbon processing method according to claim 1, wherein a voltage having an arbitrary pulse width is applied. 電解質性溶液をガラス状カーボンの加工物の加工付近に供給する供給手段と、工具電極をその軸芯回りに回転駆動可能に保持するマンドレルと、前記加工物を保持する保持手段と、前記工具電極に対して被加工物を移動及び位置決めするステージと、前記工具電極と前記被加工物との間に電圧を印加することが可能な電気回路とを備えたガラス状カーボンの加工装置であって、
前記電気回路に流れる電流をモニタリングしながら印加する電圧を直流電圧と任意の時間幅のパルス電圧に任意に切り替える制御手段を有すること
特徴とするガラス状カーボンの加工装置。 Supply means for supplying an electrolytic solution to the vicinity of the processing of the glassy carbon workpiece, a mandrel for holding the tool electrode so as to be rotatable about its axis, a holding means for holding the workpiece, and the tool electrode A glassy carbon processing device comprising a stage for moving and positioning a workpiece relative to the workpiece, and an electric circuit capable of applying a voltage between the tool electrode and the workpiece,
An apparatus for processing glassy carbon, comprising control means for arbitrarily switching a voltage to be applied to a DC voltage and a pulse voltage having an arbitrary time width while monitoring a current flowing through the electric circuit.
JP2005057231A 2005-03-02 2005-03-02 Glassy carbon processing method and apparatus Expired - Fee Related JP4196123B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005057231A JP4196123B2 (en) 2005-03-02 2005-03-02 Glassy carbon processing method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005057231A JP4196123B2 (en) 2005-03-02 2005-03-02 Glassy carbon processing method and apparatus

Publications (3)

Publication Number Publication Date
JP2006239796A JP2006239796A (en) 2006-09-14
JP2006239796A5 true JP2006239796A5 (en) 2008-01-31
JP4196123B2 JP4196123B2 (en) 2008-12-17

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JP2005057231A Expired - Fee Related JP4196123B2 (en) 2005-03-02 2005-03-02 Glassy carbon processing method and apparatus

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JP (1) JP4196123B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101361485B1 (en) * 2011-12-30 2014-02-13 연세대학교 산학협력단 Electrochemical oxidation assisted mechanical machining apparatus and process
CN111546135A (en) * 2020-04-08 2020-08-18 上海现代先进超精密制造中心有限公司 Off-axis aspheric mirror milling model establishing method
KR102653368B1 (en) * 2022-01-26 2024-04-02 (주)코멕스카본 Jig for Glassy Carbon Processing

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