JP2006217448A - Ultrasonic vibrator and ultrasonic flowmeter having the same - Google Patents
Ultrasonic vibrator and ultrasonic flowmeter having the same Download PDFInfo
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Abstract
Description
本発明は耐食性に優れた金属ケースと前記金属ケースを用いた超音波振動子、およびそれを用いて発生させた超音波により、気体や液体等の流体の流速を計測する超音波流速計や流量の計測を行う超音波流量計に関するものである。 The present invention relates to a metal case having excellent corrosion resistance, an ultrasonic vibrator using the metal case, and an ultrasonic velocimeter and flow rate for measuring the flow velocity of a fluid such as a gas or a liquid by using an ultrasonic wave generated by the metal case. The present invention relates to an ultrasonic flowmeter for measuring
従来、この種の超音波流量計に用いる超音波振動子には、圧電体と圧電体を収容する金属ケースで構成されており、この金属ケースはＦｅを主成分とし、Ｃｒ、Ｎｉからなる材料を含有し、Ｃｕ、Ｍｏ、Ｔｉ、Ｓｉ、Ｎｂ等のいずれかの添加物を含む合金からなる（例えば、特許文献１参照）。 Conventionally, an ultrasonic transducer used in this type of ultrasonic flowmeter is composed of a piezoelectric body and a metal case that accommodates the piezoelectric body, and the metal case is made of Fe, the main component of which is Cr and Ni. And an alloy containing any additive such as Cu, Mo, Ti, Si, Nb, etc. (see, for example, Patent Document 1).
図５は、特許文献１に記載された従来の超音波振動子を示すものである。図５に示すように超音波振動子２０と、金属ケース２１と、金属ケース２１の天部２２と、音響整合層２３とから構成されている。
しかしながら、前記従来の構成では、平板より加工した金属ケース２１はＦｅを主成分とし、Ｃｒ、Ｎｉからなる材料を含有し、Ｃｕ、Ｍｏ、Ｔｉ、Ｓｉ、Ｎｂ等のいずれかの添加物を含む合金からなるため、塩化物イオンや硫化物イオンなどの腐食性物質を含有する気体や液体の流速および流量の計測を行う場合、金属ケース２１の腐食が進行して貫通穴ができ、超音波振動子２０の電気的接点部分の腐食による接点不良、ガス漏による動作不良などの課題を有していた。 However, in the conventional configuration, the metal case 21 processed from a flat plate contains Fe as a main component, contains a material composed of Cr and Ni, and includes any additive such as Cu, Mo, Ti, Si, and Nb. Since it is made of an alloy, when measuring the flow rate and flow rate of a gas or liquid containing corrosive substances such as chloride ions or sulfide ions, the corrosion of the metal case 21 proceeds to form a through hole, and ultrasonic vibration There are problems such as contact failure due to corrosion of the electrical contact portion of the child 20 and malfunction due to gas leakage.
本発明は、前記従来の課題を解決するもので、超音波振動子に用いる金属ケースの耐食性を向上する構成とし、塩化物イオンや硫化物イオンなどの腐食性物質を含有する気体や液体の流速および流量の計測を長期間継続可能な超音波振動子およびこの超音波振動子を有する超音波流量計を提供することを目的とする。 The present invention solves the above-described conventional problems, and is configured to improve the corrosion resistance of a metal case used for an ultrasonic vibrator, and the flow velocity of a gas or liquid containing a corrosive substance such as chloride ion or sulfide ion. It is another object of the present invention to provide an ultrasonic vibrator capable of continuing measurement of a flow rate for a long period of time and an ultrasonic flowmeter having the ultrasonic vibrator.
前記従来の課題を解決するために、本発明の超音波振動子は、天部と側壁部を有する有天筒状金属ケースと、前記有天筒状金属ケースの天部内壁面に、圧電体を固定した超音波振動子において、前記有天筒状金属ケースは耐食性被覆層を備えることを特徴とする超音波振動子としたものである。 In order to solve the above-described conventional problems, an ultrasonic transducer according to the present invention includes a celestial cylindrical metal case having a celestial part and a side wall part, and a piezoelectric body on the celestial inner wall surface of the celestial cylindrical metal case. In the fixed ultrasonic vibrator, the cylindrical metal case is provided with a corrosion-resistant coating layer, and is an ultrasonic vibrator characterized in that it has a corrosion-resistant coating layer.
これによって、塩化物イオンや硫化物イオンなどの腐食性物質を含有する気体や液体の流速および流量の計測を行う場合、有天筒状金属ケースは耐食性被覆層によって保護され、耐食性が向上する。 Accordingly, when measuring the flow rate and flow rate of a gas or liquid containing a corrosive substance such as chloride ion or sulfide ion, the celestial cylindrical metal case is protected by the corrosion-resistant coating layer, and the corrosion resistance is improved.
本発明の超音波振動子は、塩化物イオンや硫化物イオンなどの腐食性物質を含有する気体や液体の流速および流量の計測を長期継続することができる。 The ultrasonic transducer of the present invention can continue to measure the flow rate and flow rate of a gas or liquid containing corrosive substances such as chloride ions and sulfide ions for a long period of time.
第１の発明は、天部と側壁部を有する有天筒状金属ケースと、前記有天筒状金属ケースの天部内壁面に、圧電体を固定した超音波振動子において、前記有天筒状金属ケースは耐食性被覆層を備えることを特徴とする超音波振動子とすることにより、有天筒状金属ケースの腐食が抑制され、腐食性物質を含有する気体や液体の流速および流量の計測を長期継続することができる。 A first aspect of the present invention relates to a ceiling-like metal case having a top and a side wall, and an ultrasonic transducer in which a piezoelectric body is fixed to the top wall of the top of the ceiling-like metal case, By using an ultrasonic vibrator characterized by having a corrosion-resistant coating layer on the metal case, corrosion of the celestial cylindrical metal case is suppressed, and the flow rate and flow rate of gases and liquids containing corrosive substances can be measured. Can last for a long time.
第２の発明は、天部と、側壁部と、前記側壁部の外側に設けた支持部とを備えた有天筒状金属ケースと、外部電極端子を有する端子板とで閉空間を構成し、一対の電極面を有する圧電体の一方の電極を前記閉空間内壁面に固定し、他方の電極面と前記端子板とを導電手段で電気的に接続した超音波振動子において、前記有天筒状金属ケースは耐食性被覆層を備えることを特徴とする超音波振動子とすることにより、有天筒状金属ケースの腐食が抑制され、腐食性物質を含有する気体や液体の流速および流量の計測を長期継続することができる。 According to a second aspect of the present invention, a closed space is constituted by a ceiling-shaped metal case provided with a top portion, a side wall portion, and a support portion provided outside the side wall portion, and a terminal plate having external electrode terminals. An ultrasonic transducer in which one electrode of a piezoelectric body having a pair of electrode surfaces is fixed to the inner wall surface of the closed space, and the other electrode surface and the terminal plate are electrically connected by a conductive means. The cylindrical metal case has an ultrasonic vibrator characterized by having a corrosion-resistant coating layer, so that the corrosion of the cylindrical metal case is suppressed, and the flow rate and flow rate of gas or liquid containing corrosive substances are suppressed. Measurement can be continued for a long time.
第３の発明は、耐食性被覆層は、少なくとも有天筒状金属ケース天部、側壁部外壁面に備えることを特徴とする請求項１および２に記載の超音波振動子とすることにより、腐食性生物を気体や液体などの測定流体に触れる部分の耐食性を選択的に向上することができる。 According to a third aspect of the invention, the corrosion-resistant coating layer is provided at least on the top of the celestial cylindrical metal case and on the outer wall surface of the side wall portion. It is possible to selectively improve the corrosion resistance of the part where the living organism comes into contact with a measurement fluid such as gas or liquid.
第４の発明は、耐食性被覆層は、母材とは異なる金属層からなることを特徴とする請求項１および２に記載の有天筒状金属ケースとすることにより、耐食性を付与するための金属層を設けることによって母材の耐食性が向上する。 According to a fourth aspect of the present invention, the corrosion-resistant coating layer is made of a metal layer different from the base material, and the rusted cylindrical metal case according to claim 1 or 2 is used to provide corrosion resistance. By providing the metal layer, the corrosion resistance of the base material is improved.
第５の発明は、耐食性被覆層は、犠牲層を備えることを特徴とする請求項１および２に記載の有天筒状金属ケースとすることにより、有天筒状金属ケースの母材より腐食しやすい犠牲層が先に腐食することで母材の耐食性を向上することができる。 According to a fifth aspect of the present invention, the corrosion-resistant coating layer includes a sacrificial layer, and the rusted cylindrical metal case according to claim 1 or 2 is corroded from the base material of the heavenly cylindrical metal case. The corrosion resistance of the base material can be improved by corroding the sacrificial layer which is easy to perform first.
第６の発明は、耐食性被覆層は少なくとも二層よりなることを特徴とする請求項１および２に記載の有天筒状金属ケースとすることにより、第一の耐食性被覆層の欠陥部分を第二層で被覆することで耐食性を向上する。 According to a sixth aspect of the present invention, the corrosion-resistant coating layer comprises at least two layers. Corrosion resistance is improved by coating with two layers.
第７の発明は、耐食性被覆層は、めっき層と化成処理層とを備えてなることを特徴とする第６の発明の有天筒状金属ケースとすることにより、化成処理層の欠陥部分をめっき層で覆い、母材の耐食性を向上する。 According to a seventh aspect of the present invention, the corrosion-resistant coating layer includes a plating layer and a chemical conversion treatment layer. Cover with a plating layer to improve the corrosion resistance of the base material.
第８の発明は、耐食性被覆層は、化成処理層と前記化成処理層の上に樹脂層を備えてなることを特徴とする請求項６に記載の有天筒状金属ケースとすることにより、化成処理層の欠陥部分を樹脂層で覆い母材の耐食性を向上する。 According to an eighth aspect of the present invention, the corrosion-resistant coating layer comprises a chemical conversion treatment layer and a resin layer on the chemical conversion treatment layer. The defective portion of the chemical conversion treatment layer is covered with a resin layer to improve the corrosion resistance of the base material.
第９の発明は、めっき層は、主に亜鉛−アルミニウム系合金（Ｚｎ−Ａｌ合金）、亜鉛−モリブデン−コバルト系合金、亜鉛−コバルト−クロム系合金、亜鉛−ニッケル系合金、亜鉛−鉄系合金の群から選択された合金とすることにより、母材の耐食性を向上する。 In the ninth invention, the plating layer is mainly composed of a zinc-aluminum alloy (Zn-Al alloy), a zinc-molybdenum-cobalt alloy, a zinc-cobalt-chromium alloy, a zinc-nickel alloy, and a zinc-iron alloy. By using an alloy selected from the group of alloys, the corrosion resistance of the base material is improved.
第１０の発明は、樹脂層は、主にアルキド樹脂、メラミン樹脂、アクリル樹脂、ポリエステル樹脂、フェノール樹脂、ポリウレタン樹脂、シリコーン樹脂、フッ素樹脂、ナイロン樹脂、塩化ビニル系樹脂、塩化ゴム、ポリカーボネイトの群から選択された樹脂とすることにより、母材の耐食性を向上することができる。 In the tenth invention, the resin layer is mainly composed of alkyd resin, melamine resin, acrylic resin, polyester resin, phenol resin, polyurethane resin, silicone resin, fluorine resin, nylon resin, vinyl chloride resin, chlorinated rubber, polycarbonate. By using the resin selected from the above, the corrosion resistance of the base material can be improved.
第１１の発明は、化成処理層は、三価クロム錯体、リン酸化合物及び亜鉛化合物を主体とするクロメート層とすることにより、耐食性を向上することができる。 In the eleventh aspect of the invention, the chemical conversion treatment layer can be improved in corrosion resistance by being a chromate layer mainly composed of a trivalent chromium complex, a phosphate compound and a zinc compound.
第１２の発明は、被測定流体が流れる流量測定部と上記流量測定部に設けられて超音波を送受信する一対の第１または第２の発明の超音波振動子と、上記超音波振動子間の伝播時間を計測する計測回路と上記計測回路から信号に基づいて流量を算出する流量演算手段とを備えた超音波流量計とすることにより、腐食性物質を含有する気体や液体の流速および流量の計測を長期継続することができ、計測の耐久信頼性を向上することができる。 According to a twelfth aspect of the present invention, there is provided a flow rate measurement unit through which a fluid to be measured flows, a pair of the ultrasonic transducers of the first or second invention provided in the flow rate measurement unit and transmitting / receiving ultrasonic waves, and the ultrasonic transducers The flow rate and flow rate of a gas or liquid containing a corrosive substance by using an ultrasonic flow meter provided with a measurement circuit for measuring the propagation time of the gas and a flow rate calculation means for calculating a flow rate based on a signal from the measurement circuit. Measurement can be continued for a long time, and the durability and reliability of measurement can be improved.
以下、本発明の実施の形態について、図面を参照しながら説明する。なお、本実施の形態によって本発明が限定されるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiment.
（実施の形態１）
図１は、本発明実施の形態における超音波振動子の断面図を示すものである。
(Embodiment 1)
FIG. 1 shows a cross-sectional view of an ultrasonic transducer according to an embodiment of the present invention.
図１において、有天筒状金属ケース７は、鉄を主成分とする鋼板の表面を被覆する耐食性被覆層で覆われた平板の耐食性鋼板を、深絞り加工によって天部４、側壁部８、支持部９を有しており、耐食性被覆層６で被覆されている。圧電体２は、対向する電極面３、３を備え、電極面３、３に接合手段５であるエポキシ接着剤をスクリーン印刷法で印刷し、有天筒状金属ケース７の天部内壁面に貼り合わせ、加圧した状態で加熱硬化炉に投入し接着剤を硬化し有天筒状金属ケース７と圧電体２とが接合される。接合手段５である接着剤の厚さは５〜５０μｍの厚さに調整することによって有天筒状金属ケース７と圧電体２とが電気的に接合する構成としている。 In FIG. 1, the cylindrical metal case 7 has a top plate 4, a side wall unit 8, and a flat plate corrosion-resistant steel plate covered with a corrosion-resistant coating layer that covers the surface of a steel plate mainly composed of iron by deep drawing. It has a support part 9 and is covered with a corrosion-resistant coating layer 6. The piezoelectric body 2 includes opposing electrode surfaces 3 and 3, and an epoxy adhesive as a bonding means 5 is printed on the electrode surfaces 3 and 3 by a screen printing method and is attached to the inner wall surface of the ceiling-shaped metal case 7. In addition, in a pressurized state, it is put into a heat curing furnace to cure the adhesive, and the cylindrical metal case 7 and the piezoelectric body 2 are joined. The thickness of the adhesive which is the joining means 5 is adjusted to a thickness of 5 to 50 μm so that the dome-shaped cylindrical metal case 7 and the piezoelectric body 2 are electrically joined.
圧電体２への電気的信号は、圧電体２の電極面および有天筒状金属ケース７の支持部にはんだで固定した電極端子１０を介して伝えられる。 An electrical signal to the piezoelectric body 2 is transmitted through the electrode terminal 10 fixed to the electrode surface of the piezoelectric body 2 and the support portion of the dome-shaped cylindrical metal case 7 with solder.
以上のように構成された超音波振動子において、有天筒状金属ケース７は、腐食性物質が含まれる測定流体に触れる部分に耐食性被覆層６を備えるため、腐食性物質が有天筒状金属ケース７の母材と接触することを防ぎ、母材が腐食することを防ぐことができる。 In the ultrasonic vibrator configured as described above, the celestial cylindrical metal case 7 includes the corrosion-resistant coating layer 6 on the portion that comes into contact with the measurement fluid containing the corrosive substance. Contact with the base material of the metal case 7 can be prevented, and corrosion of the base material can be prevented.
なお、具体的には有天筒状金属ケース７は、Ｆｅを主成分とする鋼板に、母材とは異なる金属層であり、犠牲層となる亜鉛めっき鋼板を使用する。犠牲層とは、母材より卑なる金属のめっき層であり、電気化学的に耐食性を向上するものである。 Specifically, the celestial cylindrical metal case 7 uses a galvanized steel sheet that is a metal layer different from the base material and serves as a sacrificial layer for a steel sheet mainly composed of Fe. The sacrificial layer is a metal plating layer that is lower than the base material, and electrochemically improves the corrosion resistance.
また、本実施の形態では亜鉛めっき鋼板上に塩化ビニルを被覆した鋼板を使用することによりさらに耐食性を向上することができる。 In the present embodiment, the corrosion resistance can be further improved by using a steel sheet coated with vinyl chloride on a galvanized steel sheet.
また、図３に示すように、耐食性被覆層６を第一の耐食性被覆層１４の上に、第二の耐食性被覆層１５を形成するように、少なくとも二層より形成することにより耐食性を向上することができる。 Further, as shown in FIG. 3, the corrosion resistance is improved by forming the corrosion resistance coating layer 6 on at least two layers so as to form the second corrosion resistance coating layer 15 on the first corrosion resistance coating layer 14. be able to.
また、有天筒状金属ケース７の耐食性被覆層６は、めっき層と化成処理層とを備えてなるものである。 Moreover, the corrosion-resistant coating layer 6 of the dome-shaped cylindrical metal case 7 includes a plating layer and a chemical conversion treatment layer.
また、有天筒状金属ケース７の耐食性被覆層６は、化成処理層とこの化成処理層の上に樹脂層を備えてなるものである。 Moreover, the corrosion-resistant coating layer 6 of the dome-shaped cylindrical metal case 7 includes a chemical conversion treatment layer and a resin layer on the chemical conversion treatment layer.
また、有天筒状金属ケース７のめっき層は、主に亜鉛−アルミニウム系合金（Ｚｎ−Ａｌ合金）、亜鉛−モリブデン−コバルト系合金、亜鉛−コバルト−クロム系合金、亜鉛−ニッケル系合金、亜鉛−鉄系合金の群から選択された合金である。 Moreover, the plating layer of the dome-shaped cylindrical metal case 7 is mainly made of zinc-aluminum alloy (Zn-Al alloy), zinc-molybdenum-cobalt alloy, zinc-cobalt-chromium alloy, zinc-nickel alloy, It is an alloy selected from the group of zinc-iron alloys.
また、有天筒状金属ケース７の樹脂層は、主にアルキド樹脂、メラミン樹脂、アクリル樹脂、ポリエステル樹脂、フェノール樹脂、ポリウレタン樹脂、シリコーン樹脂、フッ素樹脂、ナイロン樹脂、塩化ビニル系樹脂、塩化ゴム、ポリカーボネイトの群から選択された樹脂である。 In addition, the resin layer of the celestial tubular metal case 7 is mainly composed of alkyd resin, melamine resin, acrylic resin, polyester resin, phenol resin, polyurethane resin, silicone resin, fluorine resin, nylon resin, vinyl chloride resin, chlorinated rubber. A resin selected from the group of polycarbonates.
また、有天筒状金属ケース７の化成処理層は、三価クロム錯体、リン酸化合物及び亜鉛化合物を主体とするクロメート層である。 Moreover, the chemical conversion treatment layer of the heavenly cylindrical metal case 7 is a chromate layer mainly composed of a trivalent chromium complex, a phosphate compound, and a zinc compound.
（実施の形態２）
図２は、本発明第２の実施の形態の超音波振動子の断面図である。
(Embodiment 2)
FIG. 2 is a sectional view of an ultrasonic transducer according to the second embodiment of the present invention.
図２において、有天筒状金属ケース７は、鉄を主成分とする鋼板の表面を被覆する耐食性被覆層６で覆われた平板の耐食性鋼板を、深絞り加工によって、天部４、側壁部８、支持部９を有するケース状に加工する。この天部４の内壁面に接合手段５である接着剤で一対の電極面３、３を有する圧電体２の一方の電極面３を固定し、ケース支持部９に、電極端子１０を有する端子板１３と溶接によって接合し閉空間を構成する。端子板１３と、他方の電極面３を導電手段１１で固定する。導電手段１１は、導電部と絶縁部とから構成され、導電部はニッケル球状粒子に金メッキを施し、絶縁部はシリコンゴムで構成されている。 In FIG. 2, a cylindrical metal case 7 has a top portion 4 and a side wall portion formed by deep drawing a flat corrosion-resistant steel plate covered with a corrosion-resistant coating layer 6 that covers the surface of a steel plate mainly composed of iron. 8. Process into a case with support 9. One electrode surface 3 of the piezoelectric body 2 having a pair of electrode surfaces 3 and 3 is fixed to the inner wall surface of the top portion 4 with an adhesive as a bonding means 5, and a terminal having an electrode terminal 10 on the case support portion 9. The plate 13 is joined by welding to form a closed space. The terminal plate 13 and the other electrode surface 3 are fixed by the conductive means 11. The conductive means 11 is composed of a conductive portion and an insulating portion, the conductive portion is gold-plated on nickel spherical particles, and the insulating portion is composed of silicon rubber.
以上のように、本実施の形態においては、有天筒状金属ケース７を耐食性被覆層６で覆うことによって、有天筒状金属ケース７の母材が流速および流量を計測する流体に含まれる腐食性物質による腐食を防ぐことになり、有天筒状金属ケース７の耐食性を向上し、超音波振動子１を長期にわたって動作させることが可能となる。また、有天筒状金属ケース７と端子板１３とで閉空間を構成することによって、圧電体２を大気中に存在する腐食性物質に接触することを防ぐことができ、超音波振動子１を長期にわたって動作させることが可能となる。 As described above, in the present embodiment, the base metal of the ceiling-like cylindrical metal case 7 is included in the fluid for measuring the flow velocity and the flow rate by covering the ceiling-like cylindrical metal case 7 with the corrosion-resistant coating layer 6. Corrosion caused by a corrosive substance is prevented, the corrosion resistance of the dome-shaped cylindrical metal case 7 is improved, and the ultrasonic vibrator 1 can be operated for a long period of time. In addition, by forming a closed space with the cylindrical metal case 7 and the terminal plate 13, it is possible to prevent the piezoelectric body 2 from coming into contact with a corrosive substance present in the atmosphere. Can be operated over a long period of time.
（実施の形態３）
図４は、本発明の第３の実施の形態の超音波振動子を用いた超音波流量計の一部断面図を含む構成図を示すものである。
(Embodiment 3)
FIG. 4 is a block diagram including a partial cross-sectional view of an ultrasonic flowmeter using the ultrasonic transducer of the third embodiment of the present invention.
図４において、本発明の一対の超音波振動子１９、１９は、対向するように振動子取り付け穴１６に測定流体の流れる流路１８に対して所定の角度で配置する。超音波振動子１９と流路１８は、計測流体としてガスや水、灯油、石油などの液体の流量および流速を計測することを想定しているため、超音波振動子１９と振動子取り付け穴１６の間に、計測流体が漏れるのを防止するシール材１７を用いる。シール材１７はＬＰガスに耐性を有するニトリルブチル（ＮＢＲ）ゴム等のＯリングを用いる。 In FIG. 4, the pair of ultrasonic transducers 19, 19 of the present invention is disposed at a predetermined angle with respect to the flow path 18 through which the measurement fluid flows in the transducer mounting hole 16 so as to face each other. Since the ultrasonic transducer 19 and the flow path 18 are assumed to measure the flow rate and flow velocity of a liquid such as gas, water, kerosene, or petroleum as a measurement fluid, the ultrasonic transducer 19 and the transducer mounting hole 16 are used. In the meantime, a sealing material 17 for preventing the measurement fluid from leaking is used. The sealing material 17 uses an O-ring such as nitrile butyl (NBR) rubber that is resistant to LP gas.
以上のように構成された、超音波流量計につて以下その動作、作用を説明する。 The operation and action of the ultrasonic flowmeter configured as described above will be described below.
まず、計測手段としては、例えば既知のシングアラウンド方を用いて、超音波振動子１９の伝搬時間を計測回路で計測することにより、流量演算手段で流量を算出することができる。 First, as a measuring means, for example, by using a known sing-around method, the flow rate can be calculated by the flow rate calculating means by measuring the propagation time of the ultrasonic transducer 19 with a measuring circuit.
以上のように構成された超音波流量計の動作、作用に関して説明する。 The operation and action of the ultrasonic flowmeter configured as described above will be described.
一対の超音波振動子１９、１９の中心を結ぶ距離をＬとし、この直線と流れの方向である流路１８の長手方向となす角度をθとする。また流体の無風状態での音速をＣ、流路１８内での流体の流速をＶとする。流れる流体の上流側に配置された超音波振動子１９から送信された超音波は流路１８を斜めに横断し、下流側に配置された超音波振動子１９で受信する。このときの伝播時間ｔ１は、 A distance connecting the centers of the pair of ultrasonic transducers 19 and 19 is L, and an angle between the straight line and the longitudinal direction of the flow path 18 which is a flow direction is θ. Also, C is the speed of sound in a windless state of the fluid, and V is the flow velocity of the fluid in the flow path 18. The ultrasonic wave transmitted from the ultrasonic transducer 19 arranged on the upstream side of the flowing fluid crosses the flow path 18 obliquely and is received by the ultrasonic transducer 19 arranged on the downstream side. The propagation time t1 at this time is
で示される。次に、下流側に配置された超音波振動子１９から超音波を送信して上流側に配置された超音波振動子１９で受信する。このときの伝播時間ｔ２は、 Indicated by Next, an ultrasonic wave is transmitted from the ultrasonic transducer 19 arranged on the downstream side and received by the ultrasonic transducer 19 arranged on the upstream side. The propagation time t2 at this time is
で示される。そして（数１）のｔ１と（数２）のｔ２から流体の音速Ｃを消去すると、 Indicated by Then, if the sound velocity C of the fluid is deleted from t1 in (Equation 1) and t2 in (Equation 2),
の（数３）が得られる。Ｌとθが既知なら、計測回路にてｔ１とｔ２を測定すれば流速Ｖが求められる。この流速Ｖから流量Ｑは、流路１８の断面積をＳ、補正係数をＫとすれば、流量演算手段で。Ｑ＝ＫＳＶを演算して流量を求めることができる。 (Equation 3) is obtained. If L and θ are known, the flow velocity V can be obtained by measuring t1 and t2 with a measuring circuit. From the flow velocity V to the flow rate Q, if the cross-sectional area of the flow path 18 is S and the correction coefficient is K, the flow rate calculation means. Q = KSV can be calculated to determine the flow rate.
以上のように、本発明の第３実施の形態においては、耐食性被覆層６を備える有天筒状金属ケース７を構成部品とする超音波振動子１９を使用することにより、塩化物イオンや硫化物イオンなどの腐食性物質を含有する気体や液体の流速および流量の計測を行う場合であっても、有天筒状金属ケース７は耐食性被覆層６によって保護され、計測を長期継続することができる。 As described above, in the third embodiment of the present invention, chloride ions or sulfides are obtained by using the ultrasonic vibrator 19 that includes the cylindrical metal case 7 having the corrosion-resistant coating layer 6 as a component. Even when measuring the flow rate and flow rate of a gas or liquid containing corrosive substances such as product ions, the celestial cylindrical metal case 7 is protected by the corrosion-resistant covering layer 6, and the measurement can be continued for a long time. it can.
なお、超音波振動子１９を超音波流量計に用いているとしたが、距離センサ等の超音波センサとして用いてもよい。 In addition, although the ultrasonic transducer | vibrator 19 was used for the ultrasonic flowmeter, you may use as ultrasonic sensors, such as a distance sensor.
以上のように、本発明にかかる有天筒状金属ケースと、有天筒状ケースを用いた超音波振動子と、超音波振動子を有する超音波流量計は、有天筒状金属ケース母材の腐食を抑制することが可能となるので耐食性に優れた金属ケースと前記金属ケースを用いた超音波振動子およびそれを用いて発生させた超音波により、気体や液体の流量や流速の計測を行う超音波流量計、および距離センサ等の用途にも適用できる。 As described above, the celestial cylindrical metal case according to the present invention, the ultrasonic transducer using the celestial cylindrical case, and the ultrasonic flowmeter including the ultrasonic transducer are the celestial cylindrical metal case mother Corrosion of the material can be suppressed, and measurement of the flow rate and flow velocity of gas and liquid using a metal case with excellent corrosion resistance, an ultrasonic vibrator using the metal case, and ultrasonic waves generated using the same The present invention can also be applied to uses such as an ultrasonic flow meter and a distance sensor.
１ 超音波振動子
２ 圧電体
３ 電極面
４ 天部
５ 接合手段
６ 耐食性被覆層
７ 有天筒状金属ケース
８ 側壁部
９ 支持部
１０ 電極端子
１１ 導電手段
１２ 絶縁部
１３ 端子板
１４ 第一の耐食性被覆層
１５ 第二の耐食性被覆
１６ 振動子取り付け穴
１７ シール材
１８ 流路
１９ 超音波振動子
２０ 超音波振動子
２１ ケース
２２ 天部
２３ 音響整合層
２４ 支持部
DESCRIPTION OF SYMBOLS 1 Ultrasonic vibrator 2 Piezoelectric body 3 Electrode surface 4 Top part 5 Joining means 6 Corrosion-resistant coating layer 7 Covered cylindrical metal case 8 Side wall part 9 Support part 10 Electrode terminal 11 Conductive means 12 Insulating part 13 Terminal board 14 1st Corrosion-resistant coating layer 15 Second corrosion-resistant coating 16 Vibrator mounting hole 17 Seal material 18 Flow path 19 Ultrasonic transducer 20 Ultrasonic transducer 21 Case 22 Top portion 23 Acoustic matching layer 24 Support portion
Claims (12)
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008311736A (en) * | 2007-06-12 | 2008-12-25 | Mitsumi Electric Co Ltd | Ultrasonic sensor |
| KR101218780B1 (en) * | 2010-12-07 | 2013-01-04 | (주)씨엠엔텍 | Corrosion-resistant sensor and Ultrasonic flowmeter using the same |
| EP2844964A4 (en) * | 2012-05-04 | 2015-07-29 | Cameron Int Corp | Ultrasonic flowmeter with internal surface coating and method |
| KR101865226B1 (en) * | 2016-12-12 | 2018-06-08 | (주)에이치더블유엘 | Ultrasonic humidifier |
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| JPS55125794A (en) * | 1979-03-22 | 1980-09-27 | Hitachi Ltd | Corrosion proof transmitter and receiver and its manufacture |
| JPS63281909A (en) * | 1987-05-11 | 1988-11-18 | Showa Alum Corp | Container covering apparatus |
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| JP2002086613A (en) * | 2000-07-14 | 2002-03-26 | Nippon Steel Corp | Surface coated metal material |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2008311736A (en) * | 2007-06-12 | 2008-12-25 | Mitsumi Electric Co Ltd | Ultrasonic sensor |
| KR101218780B1 (en) * | 2010-12-07 | 2013-01-04 | (주)씨엠엔텍 | Corrosion-resistant sensor and Ultrasonic flowmeter using the same |
| EP2844964A4 (en) * | 2012-05-04 | 2015-07-29 | Cameron Int Corp | Ultrasonic flowmeter with internal surface coating and method |
| KR101865226B1 (en) * | 2016-12-12 | 2018-06-08 | (주)에이치더블유엘 | Ultrasonic humidifier |
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