JP2006195020A - Polarization reversal type nonlinear optical element - Google Patents

Polarization reversal type nonlinear optical element Download PDF

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JP2006195020A
JP2006195020A JP2005004655A JP2005004655A JP2006195020A JP 2006195020 A JP2006195020 A JP 2006195020A JP 2005004655 A JP2005004655 A JP 2005004655A JP 2005004655 A JP2005004655 A JP 2005004655A JP 2006195020 A JP2006195020 A JP 2006195020A
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optical element
nonlinear optical
polarization
crystal
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JP4457894B2 (en
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Katsuhiko Tokuda
勝彦 徳田
Mamoru Hisamitsu
守 久光
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To prevent surrounding dust etc. from being attracted to a base even when a polarization electric field is produced on the base. <P>SOLUTION: A conductive film 2 is formed on the base 1a comprising a lithium tantalate crystal or a lithium niobate crystal as a main component, and a wavelength conversion element 4, forming a periodical polarization reversal structure and comprising the lithium tantalate crystal or the lithium niobate crystal as the main component, is adhered to the conductive film 2. When the conductive film 2 and a casing C are short-circuited to each other via a conductive wire W, the polarization electric field is canceled even when it is produced on the base 1a due to sudden temperature change in the case the casing C is put on a hot plate so as to remove any gaseous substance from an adhesive A. Also, because the periodical polarization reversal structure has been formed on the base 1a, the polarization electric fields in mutually neighboring reversal regions come to have polarities reversed between each other and canceling each other. Consequently the surrounding dust etc. is not attracted to the base, and deterioration of the characteristics is prevented. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、分極反転型非線形光学素子に関し、さらに詳しくは、土台に分極電場を生じても周囲のゴミ等を吸い寄せることがないように改良した分極反転型非線形光学素子に関する。   The present invention relates to a domain-inverted nonlinear optical element, and more particularly to a domain-inverted nonlinear optical element improved so as not to attract surrounding dust even when a polarization electric field is generated on a base.

従来、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台（固定用基板）に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子が知られている（例えば、特許文献１参照。）。   Conventionally, a structure in which a wavelength conversion element mainly composed of lithium tantalate crystal or lithium niobate crystal in which a periodically poled structure is formed on a base (fixing substrate) mainly composed of lithium tantalate crystal or lithium niobate crystal is fixed A polarization inversion type nonlinear optical element is known (for example, see Patent Document 1).

特開２００３−２７０６８８（［００４１］〜［００４７］）JP 2003-270688 ([0041] to [0047])

タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子の温度が急変した場合（例えば製造時に分極反転型非線形光学素子を筐体に接着した接着剤からガス抜きする目的で筐体を１００℃のホットプレート上に置いた場合など）、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に焦電効果による分極電場を生じる。
しかし、土台に分極電場を生じると、分極電場により周囲のゴミ等が吸い寄せられて素子の端面に付着し、特性劣化を生じる問題点があった。
そこで、本発明の目的は、土台に分極電場を生じても周囲のゴミ等を吸い寄せることがないように改良した分極反転型非線形光学素子を提供することにある。 Polarization-inverted nonlinear optical element having a structure in which a wavelength conversion element mainly composed of lithium tantalate crystal or lithium niobate crystal having a periodic domain-inverted structure formed on a base mainly composed of lithium tantalate crystal or lithium niobate crystal When the temperature of the material changes suddenly (for example, when the case is placed on a hot plate at 100 ° C. for the purpose of degassing the adhesive in which the polarization inversion type nonlinear optical element is bonded to the case during manufacture), the lithium tantalate crystal Alternatively, a polarization electric field is generated by a pyroelectric effect on a base mainly composed of lithium niobate crystals.
However, when a polarization electric field is generated in the base, there is a problem that surrounding dust or the like is attracted by the polarization electric field and adheres to the end face of the element, resulting in characteristic deterioration.
Accordingly, an object of the present invention is to provide a polarization inversion type nonlinear optical element which is improved so that surrounding dust or the like is not attracted even if a polarization electric field is generated on a base.

第１の観点では、本発明は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記波長変換素子を固着する側の前記土台の面に導電性膜を形成すると共に前記土台に周期的分極反転構造を形成したことを特徴とする分極反転型非線形光学素子を提供する。
上記第１の観点による分極反転型非線形光学素子では、導電性膜を形成した面と反対側に導体を設置してその導体と導電性膜とで土台を挟み、導電性膜を導体に電気的に接続すれば、土台に分極電場が生じてもキャンセルされ、分極電場が周囲のゴミ等を吸い寄せることがなくなる。さらに、土台に周期的分極反転構造を形成しているため、隣接する反転領域で分極電場が逆極性となって互いにキャンセルしあい、分極電場が周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。 In a first aspect, the present invention provides a wavelength conversion element mainly composed of a lithium tantalate crystal or a lithium niobate crystal in which a periodically poled structure is formed on a base mainly composed of a lithium tantalate crystal or a lithium niobate crystal. A polarization inversion type nonlinear optical element having a fixed structure, characterized in that a conductive film is formed on a surface of the base on the side to which the wavelength conversion element is fixed, and a periodic polarization inversion structure is formed on the base. An inversion type nonlinear optical element is provided.
In the domain-inverted nonlinear optical element according to the first aspect, a conductor is placed on the opposite side of the surface on which the conductive film is formed, the base is sandwiched between the conductor and the conductive film, and the conductive film is electrically connected to the conductor. By connecting to, even if a polarization electric field is generated in the base, it is canceled and the polarization electric field does not attract surrounding dust. In addition, since the periodically domain-inverted structure is formed on the base, the polarization electric fields are reversed in the adjacent inversion regions and cancel each other, so that the polarization electric field does not attract surrounding dust and the like. Therefore, it is possible to prevent the characteristic deterioration.

第２の観点では、本発明は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記波長変換素子を固着する側の前記土台の面に導電性膜を形成したことを特徴とする分極反転型非線形光学素子を提供する。
上記第２の観点による分極反転型非線形光学素子では、導電性膜を形成した面と反対側に導体を設置してその導体と導電性膜とで土台を挟み、導電性膜を導体に電気的に接続すれば、土台に分極電場が生じてもキャンセルされ、分極電場が周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。 In a second aspect, the present invention provides a wavelength conversion element mainly composed of a lithium tantalate crystal or a lithium niobate crystal in which a periodically poled structure is formed on a base mainly composed of a lithium tantalate crystal or a lithium niobate crystal. In a polarization inversion type nonlinear optical element having a fixed structure, a polarization inversion type nonlinear optical element is provided, wherein a conductive film is formed on the surface of the base on the side where the wavelength conversion element is fixed.
In the domain-inverted nonlinear optical element according to the second aspect, a conductor is placed on the opposite side of the surface on which the conductive film is formed, the base is sandwiched between the conductor and the conductive film, and the conductive film is electrically connected to the conductor. By connecting to, even if a polarization electric field is generated in the base, it is canceled and the polarization electric field does not attract surrounding dust. Therefore, it is possible to prevent the characteristic deterioration.

第３の観点では、本発明は、上記第１または上記第２の観点による分極反転型非線形光学素子において、前記導電性膜が、紫外線を透過することを特徴とする分極反転型非線形光学素子を提供する。
上記第３の観点による分極反転型非線形光学素子では、土台と波長変換素子の間に紫外線硬化接着剤を挟み、土台および導電性膜を透して紫外線を照射することで、紫外線硬化接着剤を硬化させ、土台に波長変換素子を固着することが出来る。 In a third aspect, the present invention provides a domain-inverted nonlinear optical element according to the first or second aspect, wherein the conductive film transmits ultraviolet light. provide.
In the polarization reversal type nonlinear optical element according to the third aspect, the ultraviolet curable adhesive is sandwiched between the base and the wavelength conversion element and irradiated with ultraviolet rays through the base and the conductive film. It is possible to cure and fix the wavelength conversion element to the base.

第４の観点では、本発明は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記土台に周期的分極反転構造を形成したことを特徴とする分極反転型非線形光学素子を提供する。
上記第４の観点による分極反転型非線形光学素子では、土台に周期的分極反転構造を形成しているため、隣接する反転領域で分極電場が逆極性となって互いにキャンセルしあい、分極電場が周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。 In a fourth aspect, the present invention relates to a wavelength conversion element mainly composed of a lithium tantalate crystal or a lithium niobate crystal having a periodically poled structure formed on a base mainly composed of a lithium tantalate crystal or a lithium niobate crystal. A polarization-reversed nonlinear optical element having a fixed structure, wherein a periodic polarization-reversed structure is formed on the base.
In the domain-inverted nonlinear optical element according to the fourth aspect, since the periodically domain-inverted structure is formed on the base, the polarization electric field is reversed in the adjacent inversion region and cancels each other. It will not suck up garbage. Therefore, it is possible to prevent the characteristic deterioration.

第５の観点では、本発明は、上記第１から上記第４のいずれかの観点による分極反転型非線形光学素子において、前記波長変換素子のタンタル酸リチウム結晶またはニオブ酸リチウム結晶に、ＭｇまたはＺｎのうちの少なくとも１種類がドープされていることを特徴とする分極反転型非線形光学素子を提供する。
上記第５の観点による分極反転型非線形光学素子では、タンタル酸リチウム結晶またはニオブ酸リチウム結晶にＭｇまたはＺｎのうちの少なくとも１種類をドープすることにより、分極反転構造を形成するのに必要な電界強度を下げることが出来る。 In a fifth aspect, the present invention relates to the polarization inversion nonlinear optical element according to any one of the first to fourth aspects described above, wherein the lithium tantalate crystal or the lithium niobate crystal of the wavelength conversion element is Mg or Zn. There is provided a polarization inversion type nonlinear optical element characterized in that at least one of them is doped.
In the domain-inverted nonlinear optical element according to the fifth aspect, an electric field necessary for forming a domain-inverted structure by doping at least one of Mg or Zn into a lithium tantalate crystal or a lithium niobate crystal. The strength can be lowered.

第６の観点では、本発明は、上記第１から上記第５のいずれかの観点による分極反転型非線形光学素子において、前記土台のタンタル酸リチウム結晶またはニオブ酸リチウム結晶に、ＭｇまたはＺｎのうちの少なくとも１種類がドープされていることを特徴とする分極反転型非線形光学素子を提供する。
上記第６の観点による分極反転型非線形光学素子では、タンタル酸リチウム結晶またはニオブ酸リチウム結晶にＭｇまたはＺｎのうちの少なくとも１種類をドープすることにより、分極反転構造を形成するのに必要な電界強度を下げることが出来る。 In a sixth aspect, the present invention provides the domain-inverted nonlinear optical element according to any one of the first to fifth aspects, wherein the base lithium tantalate crystal or lithium niobate crystal is made of Mg or Zn. There is provided a polarization inversion type nonlinear optical element characterized in that at least one of the above is doped.
In the domain-inverted nonlinear optical element according to the sixth aspect, an electric field required to form a domain-inverted structure by doping at least one of Mg or Zn into a lithium tantalate crystal or a lithium niobate crystal. The strength can be lowered.

本発明の分極反転型非線形光学素子によれば、土台に分極電場を生じても周囲のゴミ等を吸い寄せることがないため、ゴミ等が素子の端面に付着して特性劣化を生じることを防止できる。   According to the polarization reversal type nonlinear optical element of the present invention, even if a polarization electric field is generated on the base, the surrounding dust and the like are not attracted, so that the dust and the like are prevented from adhering to the end face of the element and causing the characteristic deterioration. it can.

以下、図に示す実施例により本発明をさらに詳細に説明する。なお、これにより本発明が限定されるものではない。   Hereinafter, the present invention will be described in more detail with reference to the embodiments shown in the drawings. Note that the present invention is not limited thereby.

図１は、実施例１に係る分極反転型非線形光学素子１０を示す断面図である。
この分極反転型非線形光学素子１０は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台１ａに導電性膜２を形成し、その導電性膜２上に、接着剤３により、周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子４を固着した構造である。 FIG. 1 is a cross-sectional view illustrating a polarization inversion type nonlinear optical element 10 according to the first embodiment.
In this polarization inversion type nonlinear optical element 10, a conductive film 2 is formed on a base 1 a mainly composed of a lithium tantalate crystal or a lithium niobate crystal, and periodically polarized by an adhesive 3 on the conductive film 2. In this structure, a wavelength conversion element 4 mainly composed of a lithium tantalate crystal or a lithium niobate crystal having an inverted structure is fixed.

接着剤３は、紫外線硬化接着剤であり、土台１ａおよび導電性膜２を透して紫外線を照射することで、硬化させる。このため、導電性膜２は、紫外線を透過させる厚さ及び／又は材料とする。例えば、導電性膜２は、厚さ２０ｎｍのタンタル金属膜である。   The adhesive 3 is an ultraviolet curable adhesive, and is cured by irradiating ultraviolet rays through the base 1 a and the conductive film 2. Therefore, the conductive film 2 has a thickness and / or material that transmits ultraviolet rays. For example, the conductive film 2 is a tantalum metal film having a thickness of 20 nm.

土台１ａは、波長変換素子４と同様にして、周期的分極反転構造を形成したものである。   The base 1 a is formed with a periodic domain-inverted structure in the same manner as the wavelength conversion element 4.

レーザ共振器の組み立て時には、金属製の筐体Ｃに接着剤Ａで分極反転型非線形光学素子１０を接着する。次に、導電性膜２と筐体Ｃとを導線Ｗで電気的に接続する。その後、筐体Ｃを１００℃のホットプレート上に置き、接着剤Ａのガス抜きを行う。   At the time of assembling the laser resonator, the domain-inverted nonlinear optical element 10 is bonded to the metal casing C with the adhesive A. Next, the conductive film 2 and the housing C are electrically connected by the conductive wire W. Thereafter, the housing C is placed on a hot plate at 100 ° C., and the adhesive A is degassed.

実施例１の分極反転型非線形光学素子１０によれば、導電性膜２と筐体Ｃの底面とで土台１ａを挟み、導電性膜２と筐体Ｃとを電気的に接続しているので、接着剤Ａのガス抜きのために１００℃のホットプレート上に筐体Ｃを置いた時の分極反転型非線形光学素子１０の温度の急変により土台１ａに分極電場が生じても、分極電場がキャンセルされて、周囲のゴミ等を吸い寄せることがなくなる。また、土台１ａに周期的分極反転構造を形成しているため、隣接する反転領域で分極電場が逆極性となって互いにキャンセルしあい、周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。   According to the polarization inversion nonlinear optical element 10 of the first embodiment, the base 1a is sandwiched between the conductive film 2 and the bottom surface of the casing C, and the conductive film 2 and the casing C are electrically connected. Even if a polarization electric field is generated in the base 1a due to a sudden change in temperature of the polarization inversion type nonlinear optical element 10 when the casing C is placed on a hot plate at 100 ° C. for degassing the adhesive A, the polarization electric field is generated. Canceled, it will not suck up the surrounding garbage. In addition, since the periodic polarization reversal structure is formed on the base 1a, the polarization electric field becomes opposite in the adjacent reversal region and cancels each other, so that surrounding dust or the like is not sucked. Therefore, it is possible to prevent the characteristic deterioration.

なお、接着剤Ａは、絶縁性であっても効果があったが、導電性とすればさらに効果が上がった。   The adhesive A was effective even if it was insulative, but the effect was further improved if it was made conductive.

図２は、実施例２に係る分極反転型非線形光学素子２０を示す断面図である。
この分極反転型非線形光学素子２０は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台１ｂに導電性膜２を形成し、その導電性膜２上に、接着剤３により、周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子４を固着した構造である。 FIG. 2 is a cross-sectional view illustrating the polarization inversion nonlinear optical element 20 according to the second embodiment.
In this polarization inversion type nonlinear optical element 20, a conductive film 2 is formed on a base 1b mainly composed of a lithium tantalate crystal or a lithium niobate crystal, and periodically polarized by an adhesive 3 on the conductive film 2. In this structure, a wavelength conversion element 4 mainly composed of a lithium tantalate crystal or a lithium niobate crystal having an inverted structure is fixed.

接着剤３は、紫外線硬化接着剤であり、土台１ｂおよび導電性膜２を透して紫外線を照射することで、硬化させる。このため、導電性膜２は、紫外線を透過させる厚さ及び／又は材料とする。例えば、導電性膜２は、厚さ２０ｎｍのタンタル金属膜である。   The adhesive 3 is an ultraviolet curable adhesive, and is cured by irradiating ultraviolet rays through the base 1b and the conductive film 2. Therefore, the conductive film 2 has a thickness and / or material that transmits ultraviolet rays. For example, the conductive film 2 is a tantalum metal film having a thickness of 20 nm.

レーザ共振器の組み立て時には、金属製の筐体Ｃに接着剤Ａで分極反転型非線形光学素子２０を接着する。次に、導電性膜２と筐体Ｃとを導線Ｗで電気的に接続する。その後、筐体Ｃを１００℃のホットプレート上に置き、接着剤Ａのガス抜きを行う。   When the laser resonator is assembled, the domain-inverted nonlinear optical element 20 is bonded to the metal casing C with the adhesive A. Next, the conductive film 2 and the housing C are electrically connected by the conductive wire W. Thereafter, the housing C is placed on a hot plate at 100 ° C., and the adhesive A is degassed.

実施例２の分極反転型非線形光学素子２０によれば、導電性膜２と筐体Ｃの底面とで土台１ｂを挟み、導電性膜２と筐体Ｃとを電気的に接続しているので、接着剤Ａのガス抜きのために１００℃のホットプレート上に筐体Ｃを置いた時の分極反転型非線形光学素子２０の温度の急変により土台１ｂに分極電場が生じても、分極電場がキャンセルされて、周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。   According to the polarization inversion type nonlinear optical element 20 of Example 2, the base 1b is sandwiched between the conductive film 2 and the bottom surface of the casing C, and the conductive film 2 and the casing C are electrically connected. Even if a polarization electric field is generated in the base 1b due to a sudden change in temperature of the polarization inversion type nonlinear optical element 20 when the casing C is placed on a hot plate at 100 ° C. for degassing the adhesive A, the polarization electric field is not generated. Canceled, it will not suck up the surrounding garbage. Therefore, it is possible to prevent the characteristic deterioration.

なお、接着剤Ａは、絶縁性であっても効果があったが、導電性とすればさらに効果が上がった。   The adhesive A was effective even if it was insulative, but the effect was further improved if it was made conductive.

図３は、実施例３に係る分極反転型非線形光学素子３０を示す断面図である。
この分極反転型非線形光学素子３０は、タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台１ｂに、接着剤３により、周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子４を固着した構造である。 FIG. 3 is a cross-sectional view illustrating the polarization inversion nonlinear optical element 30 according to the third embodiment.
This domain-inverted nonlinear optical element 30 includes a lithium tantalate crystal or a lithium niobate crystal in which a periodically domain-inverted structure is formed by an adhesive 3 on a base 1b mainly composed of a lithium tantalate crystal or a lithium niobate crystal. This is a structure in which the main wavelength conversion element 4 is fixed.

接着剤３は、紫外線硬化接着剤であり、土台１ｂおよび導電性膜２を透して紫外線を照射することで、硬化させる。このため、導電性膜２は、紫外線を透過させる厚さ及び／又は材料とする。例えば、導電性膜２は、厚さ２０ｎｍのタンタル金属膜である。   The adhesive 3 is an ultraviolet curable adhesive, and is cured by irradiating ultraviolet rays through the base 1b and the conductive film 2. Therefore, the conductive film 2 has a thickness and / or material that transmits ultraviolet rays. For example, the conductive film 2 is a tantalum metal film having a thickness of 20 nm.

土台１ｂは、波長変換素子４と同様にして、周期的分極反転構造を形成したものである。   The base 1b is formed with a periodic domain-inverted structure in the same manner as the wavelength conversion element 4.

レーザ共振器の組み立て時には、金属製の筐体Ｃに接着剤Ａで分極反転型非線形光学素子３０を接着する。その後、筐体Ｃを１００℃のホットプレート上に置き、接着剤Ａのガス抜きを行う。   When assembling the laser resonator, the domain-inverted nonlinear optical element 30 is bonded to the metal casing C with the adhesive A. Thereafter, the housing C is placed on a hot plate at 100 ° C., and the adhesive A is degassed.

実施例３の分極反転型非線形光学素子３０によれば、土台１ｂに周期的分極反転構造を形成しているため、接着剤Ａのガス抜きのために１００℃のホットプレート上に筐体Ｃを置いた時の分極反転型非線形光学素子３０の温度の急変により土台１ｂに分極電場が生じても、隣接する反転領域で分極電場が逆極性となって互いにキャンセルしあい、周囲のゴミ等を吸い寄せることがなくなる。よって、特性劣化を生じることを防止できる。   According to the domain-inverted nonlinear optical element 30 of Example 3, since the periodically domain-inverted structure is formed on the base 1b, the casing C is placed on a hot plate at 100 ° C. for degassing the adhesive A. Even if a polarization electric field is generated in the base 1b due to a sudden change in temperature of the polarization inversion type nonlinear optical element 30 when it is placed, the polarization electric field is reversed in the adjacent inversion region, cancels each other, and sucks up surrounding dust and the like Nothing will happen. Therefore, it is possible to prevent the characteristic deterioration.

実施例１および実施例２において、導電性膜２と反対側の土台１ａ，１ｂの面に導電性膜を形成し、その導電性膜と導電性膜２とを電気的に接続してもよい。   In Example 1 and Example 2, a conductive film may be formed on the surfaces of the bases 1a and 1b opposite to the conductive film 2, and the conductive film and the conductive film 2 may be electrically connected. .

本発明の分極反転型非線形光学素子は、例えばＳＨＧ（第２高調波発生）波長変換技術を用いた半導体励起固体レーザ等で光機能素子として利用できる。また、擬似位相整合（QPM; Quasi-Phase Maching）デバイスとして広範囲な波長シフトを行い、波長多重通信（WDM; Wavelength Division Multiplexing）などの光通信分野で利用できる。   The domain-inverted nonlinear optical element of the present invention can be used as an optical functional element in, for example, a semiconductor excitation solid-state laser using SHG (second harmonic generation) wavelength conversion technology. In addition, as a quasi-phase matching (QPM) device, a wide wavelength shift is performed, and the device can be used in an optical communication field such as wavelength division multiplexing (WDM).

実施例１に係る分極反転型非線形光学素子を示す断面図である。1 is a cross-sectional view illustrating a polarization inversion type nonlinear optical element according to Example 1. FIG. 実施例２に係る分極反転型非線形光学素子を示す断面図である。7 is a cross-sectional view illustrating a polarization inversion type nonlinear optical element according to Example 2. FIG. 実施例３に係る分極反転型非線形光学素子を示す断面図である。6 is a cross-sectional view illustrating a polarization inversion type nonlinear optical element according to Example 3. FIG.

符号の説明Explanation of symbols

１ａ，１ｂ 土台
２ 導電性膜
３ 接着剤
４ 波長変換素子
１０，２０，３０ 分極反転型非線形光学素子 DESCRIPTION OF SYMBOLS 1a, 1b Base 2 Conductive film 3 Adhesive 4 Wavelength conversion element 10, 20, 30 Polarization inversion type nonlinear optical element

Claims (6)

タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記波長変換素子を固着する側の前記土台の面に導電性膜を形成すると共に前記土台に周期的分極反転構造を形成したことを特徴とする分極反転型非線形光学素子。   Polarization-inverted nonlinear optical element having a structure in which a wavelength conversion element mainly composed of lithium tantalate crystal or lithium niobate crystal in which a periodic domain-inverted structure is formed on a base mainly composed of lithium tantalate crystal or lithium niobate crystal The polarization inversion type nonlinear optical element according to claim 1, wherein a conductive film is formed on a surface of the base on which the wavelength conversion element is fixed, and a periodic polarization inversion structure is formed on the base. タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記波長変換素子を固着する側の前記土台の面に導電性膜を形成したことを特徴とする分極反転型非線形光学素子。   Polarization-inverted nonlinear optical element having a structure in which a wavelength conversion element mainly composed of lithium tantalate crystal or lithium niobate crystal in which a periodic domain-inverted structure is formed on a base mainly composed of lithium tantalate crystal or lithium niobate crystal 2. A polarization inversion type nonlinear optical element according to claim 1, wherein a conductive film is formed on the surface of the base on the side to which the wavelength conversion element is fixed. 請求項１または請求項２に記載の分極反転型非線形光学素子において、前記導電性膜が、紫外線を透過することを特徴とする分極反転型非線形光学素子。   3. The domain-inverted nonlinear optical element according to claim 1, wherein the conductive film transmits ultraviolet rays. タンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする土台に周期的分極反転構造を形成したタンタル酸リチウム結晶またはニオブ酸リチウム結晶を主体とする波長変換素子を固着した構造の分極反転型非線形光学素子において、前記土台に周期的分極反転構造を形成したことを特徴とする分極反転型非線形光学素子。   Polarization-inverted nonlinear optical element having a structure in which a wavelength conversion element mainly composed of lithium tantalate crystal or lithium niobate crystal in which a periodic domain-inverted structure is formed on a base mainly composed of lithium tantalate crystal or lithium niobate crystal A domain-inverted nonlinear optical element characterized in that a periodic domain-inverted structure is formed on the base. 請求項１から請求項４のいずれかに記載の分極反転型非線形光学素子において、前記波長変換素子のタンタル酸リチウム結晶またはニオブ酸リチウム結晶に、ＭｇまたはＺｎのうちの少なくとも１種類がドープされていることを特徴とする分極反転型非線形光学素子。   5. The polarization inversion nonlinear optical element according to claim 1, wherein at least one of Mg or Zn is doped in the lithium tantalate crystal or the lithium niobate crystal of the wavelength conversion element. A domain-inverted nonlinear optical element characterized by comprising: 請求項１から請求項５のいずれかに記載の分極反転型非線形光学素子において、前記土台のタンタル酸リチウム結晶またはニオブ酸リチウム結晶に、ＭｇまたはＺｎのうちの少なくとも１種類がドープされていることを特徴とする分極反転型非線形光学素子。   6. The polarization reversal type nonlinear optical element according to claim 1, wherein the base lithium tantalate crystal or lithium niobate crystal is doped with at least one of Mg or Zn. A polarization inversion type nonlinear optical element characterized by the above.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284963A (en) * 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd Optical modulator
JP2007316541A (en) * 2006-05-29 2007-12-06 Ntt Electornics Corp Method of manufacturing optical element and optical element
JP2008102228A (en) * 2006-10-18 2008-05-01 Shimadzu Corp Optical element and manufacturing method of optical element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284963A (en) * 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd Optical modulator
JP4667932B2 (en) * 2005-03-31 2011-04-13 住友大阪セメント株式会社 Light modulator
JP2007316541A (en) * 2006-05-29 2007-12-06 Ntt Electornics Corp Method of manufacturing optical element and optical element
JP2008102228A (en) * 2006-10-18 2008-05-01 Shimadzu Corp Optical element and manufacturing method of optical element

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