JP2006177281A - High speed rotation equipment - Google Patents

High speed rotation equipment Download PDF

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Publication number
JP2006177281A
JP2006177281A JP2004372690A JP2004372690A JP2006177281A JP 2006177281 A JP2006177281 A JP 2006177281A JP 2004372690 A JP2004372690 A JP 2004372690A JP 2004372690 A JP2004372690 A JP 2004372690A JP 2006177281 A JP2006177281 A JP 2006177281A
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oil
motor
lubricating oil
gas
motor chamber
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Koji Horikawa
浩司 堀川
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Shimadzu Corp
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Shimadzu Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide high speed rotation equipment capable of facilitating control of amount of lubricating oil, preventing gas containing oil mist from intruding into a gas compression chamber because amount of evacuation in a motor chamber is stabilized, and preventing reduction of amount of gas circulation by a turbo vane due to exhausting gas in the gas compression chamber beyond necessity. <P>SOLUTION: This high speed rotation equipment is provided with the turbo vane 7 for compressing gas, a motor 2 for rotating and driving the turbo vane 7 at high speed, a rotary shaft 4 connecting both of them and arranged vertically, bearings 5, 6 for holding the rotary shaft 4 rotatably, and a partitioning wall 1D for partitioning the gas compression chamber C in which the turbo vane 7 is arranged and a motor chamber M in which the bearings 5, 6 and the motor 2 are arranged. The partition wall 1D is provided with a through hole to pass through the rotary shaft 4. Between the through hole and the rotary shaft 4, a lubricating oil supply mechanism sucking oil L by a hollow hole 4H provided in the inside of a central shaft of the rotary shaft 4 from an oil tank 1Y at a lower position of the motor chamber M and supplying the oil L to the bearings 5, 6 is provided together with a sealing part S. A vacuum pump VP for evacuating the inside of the motor chamber M is connected with the oil tank 1Y through an exhaust pipe R and the inside parts of the oil tank 1Y and the motor chamber M are evacuated through a porous member 10 to prevent the oil L in the motor chamber M from being mixed into the gas compression chamber C. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、たとえば気体レーザ発振器装置におけるガス循環用の電動コンプレッサとしてのブロワ等に適用できるターボ形の高速回転機器に関する。   The present invention relates to a turbo-type high-speed rotating device that can be applied to, for example, a blower as an electric compressor for gas circulation in a gas laser oscillator device.

たとえばフロー型二酸化炭素ガスレーザ発振器装置の場合、炭酸ガスと他のガスの混合ガスを流しながら圧縮し、レーザ発振器に供給して共振させるようになっており、装置内にガス循環回路が構成されている。その循環回路の構成における一要素のブロワとしてターボ翼を高速で回転させてガスを圧縮し、レーザ発振器に供給するターボ形高速回転機器が使用されている。   For example, in the case of a flow type carbon dioxide gas laser oscillator device, it is compressed while flowing a mixed gas of carbon dioxide gas and other gas and supplied to the laser oscillator to resonate, and a gas circulation circuit is configured in the device. Yes. A turbo-type high-speed rotating device that compresses gas by rotating a turbo blade at high speed and supplies the gas to a laser oscillator is used as a blower as one element in the circuit configuration.

この種のターボ形高速回転機器は、図２に示すように、ハウジング１内の上方にターボ翼７が回転可能に配設され、ガスを圧縮して排出する機構を設けるとともに、下方にはこのターボ翼７を高速回転駆動させるモータ２が配設されている。そして、このモータ２の回転子２Ｍとターボ翼７ならびに回転軸４等からなる回転体は、機械的な軸受方式で軸受けされ、軸受５、６を潤滑するオイルＬを供給する機構が併設されている。そのため、オイルミストが発生するが、このオイルミストがガス圧縮室Ｃに流れ込み、ガス循環回路に流入するとレーザ発振器などに流入し、レーザの発振機能を低下させる。   As shown in FIG. 2, this type of turbo-type high-speed rotating device has a turbo blade 7 rotatably disposed in the upper portion of the housing 1, a mechanism for compressing and discharging gas, and a lower portion of the turbo-type rotating device. A motor 2 that drives the turbo blade 7 to rotate at high speed is disposed. The rotating body including the rotor 2M, the turbo blade 7 and the rotating shaft 4 of the motor 2 is supported by a mechanical bearing system and is provided with a mechanism for supplying oil L for lubricating the bearings 5 and 6. Yes. As a result, oil mist is generated, but when this oil mist flows into the gas compression chamber C and flows into the gas circulation circuit, it flows into a laser oscillator or the like, thereby degrading the laser oscillation function.

このことから、このオイルミストがガス圧縮室Ｃに侵入しないよう、ガス圧縮室Ｃとモータ室Ｍとをシール部Ｓで遮断すると共に、モータ室Ｍを真空ポンプＶＰで排気する方式が採用されている。
特開２００３−３２８９８７号公報 For this reason, the gas compression chamber C and the motor chamber M are shut off by the seal portion S so that the oil mist does not enter the gas compression chamber C, and the motor chamber M is evacuated by the vacuum pump VP. Yes.
JP 2003-328987 A

上記した方式では、モータ室Ｍから排気したガス中のオイルミストを回収するために、モータ室Ｍと真空ポンプＶＰとの間に多孔質材からなるオイルミストトラップ１０１を備えているが、オイル槽１ＹのオイルＬが所定量以下になったり、オイルミストトラップ１０１のオイルＬが所定量以上になったりしたとき、運転を停止して、オイルミストトラップ１０１にて回収したオイルＬをオイル槽１Ｙに戻す必要があり不便であった。   In the above system, in order to collect oil mist in the gas exhausted from the motor chamber M, the oil mist trap 101 made of a porous material is provided between the motor chamber M and the vacuum pump VP. When the oil L in 1Y falls below a predetermined amount or the oil L in the oil mist trap 101 exceeds a predetermined amount, the operation is stopped, and the oil L collected by the oil mist trap 101 is put into the oil tank 1Y. It was inconvenient to return.

また、多孔質材のオイルミストトラップ１０１は、オイルＬを吸収することにより、そこでの圧力損失が急激に大きく変化するので、モータ室Ｍからの真空排気量が低下し、ひいては、モータ室Ｍからガス圧縮室Ｃへガスが流れ込む。それを防止するため、オイルミストトラップ１０１が十分にオイルを吸収した状態を考慮して、真空ポンプＶＰの排気容量は大きめに設定される。しかしながら、逆に、運転開始初期の状態でオイルミストトラップ１０１に十分な量のオイルが吸収されていないと、ガス圧縮室Ｃから多量のガスを排気することとなり、ターボ翼７によるガス循環の効率が低下した。そこで、オイルミストトラップ１０１における圧力損失の変動を一定範囲内に抑制するため、予め使用者がオイルミストトラップ１０１の多孔質材にオイルをなじませる処置を行なう必要があった。   Further, the oil mist trap 101 made of a porous material absorbs the oil L, so that the pressure loss there changes abruptly and greatly, so that the amount of vacuum exhausted from the motor chamber M decreases, and as a result, from the motor chamber M Gas flows into the gas compression chamber C. In order to prevent this, the exhaust capacity of the vacuum pump VP is set to be large in consideration of a state where the oil mist trap 101 has sufficiently absorbed oil. On the other hand, if a sufficient amount of oil is not absorbed in the oil mist trap 101 in the initial stage of operation, a large amount of gas is exhausted from the gas compression chamber C, and the efficiency of gas circulation by the turbo blade 7 Decreased. Therefore, in order to suppress the fluctuation of the pressure loss in the oil mist trap 101 within a certain range, it is necessary for the user to take measures to make the porous material of the oil mist trap 101 familiar with the oil in advance.

本発明は、このような問題を解決する高速回転機器を提供することを目的とする。   An object of this invention is to provide the high-speed rotation apparatus which solves such a problem.

上記した課題を解決するため、本発明は、ガス圧縮を行なうターボ翼と、このターボ翼を高速回転駆動するモータと、この両者を連結する垂直に配設された回転軸と、この回転軸を回転自在に保持する軸受機構と、ターボ翼が配設されたガス圧縮室と軸受機構およびモータが配設されたモータ室を区画する区画壁を有し、この区画壁に回転軸を貫通させる貫通孔を穿設すると共にこの貫通孔と回転軸との間にシール機構と共に、モータ室の下方位の潤滑油貯留部から、潤滑油を前記回転軸の中心軸内方に穿設された供給孔により吸い上げて軸受機構に供給する潤滑油供給機構を具備した高速回転機器において、モータ室内の潤滑油がガス圧縮室に混入しないようにモータ室内を真空排気する排気手段が前記潤滑油貯留部に排気通路を介して接続されると共に、多孔質部材を介して潤滑油貯留部及びモータ室を排気するよう構成されたことを特徴とする。   In order to solve the above-described problems, the present invention provides a turbo blade that performs gas compression, a motor that drives the turbo blade to rotate at high speed, a rotary shaft that is vertically disposed to connect the two, and the rotary shaft. A bearing mechanism that is rotatably held, a gas compression chamber in which a turbo blade is disposed, a partition wall that partitions the motor chamber in which the bearing mechanism and the motor are disposed, and a through-hole that penetrates the rotating shaft through the partition wall A supply hole in which lubricating oil is drilled inwardly from the lubricating oil reservoir in the lower direction of the motor chamber together with a sealing mechanism between the through hole and the rotating shaft. In a high-speed rotating device equipped with a lubricating oil supply mechanism that sucks up and supplies the bearing mechanism to the bearing mechanism, exhaust means for evacuating the motor chamber exhausts the lubricating oil reservoir so that the lubricating oil in the motor chamber does not enter the gas compression chamber. Connected through the passage While being characterized in that it is configured to exhaust the lubricating oil reservoir and the motor chamber through the porous member.

また、（１）多孔質部材の少なくとも一部が潤滑油貯留部内の潤滑油に浸漬されるよう構成されること、（２）多孔質部材が筒状であること、（３）排気経路の途中に潤滑油の給油口を設けたことも、本発明に包含される特徴である。   Also, (1) at least a part of the porous member is configured to be immersed in the lubricating oil in the lubricating oil reservoir, (2) the porous member is cylindrical, and (3) in the middle of the exhaust path. It is also a feature included in the present invention that an oil supply port for lubricating oil is provided.

本発明が提供する高速回転機器は以上説明したとおりであるから、潤滑油の油量の管理が容易であると共に、モータ室の真空排気量が安定するので、オイルミストを含んだガスがガス圧縮室に侵入することを防止する一方、ガス圧縮室のガスを必要以上に排気してターボ翼によるガス循環量を低下することも防止できる。   Since the high-speed rotating device provided by the present invention is as described above, it is easy to manage the amount of lubricating oil and the evacuation amount of the motor chamber is stable, so that the gas containing oil mist is compressed by gas. While preventing intrusion into the chamber, it is also possible to prevent the gas in the gas compression chamber from being exhausted more than necessary and reducing the amount of gas circulation by the turbo blades.

本発明が提供する高速回転機器を、図１に示す実施例に従って説明する。ハウジング１の内方でその上方にターボ翼７が回転可能に配設され、同じく下方にはこのターボ翼７を高速回転駆動させるモータ２が配設され、両者が回転軸４にて連結されている。このモータ２はハウジング１の側に固設された電極コイル２Ｋと、この電極コイル２Ｋに対応して回転軸４に固設された回転子２Ｍで構成され、電極コイル２Ｋにインバータ３から電気エネルギーが供給される。   A high-speed rotating device provided by the present invention will be described according to the embodiment shown in FIG. Inside the housing 1, a turbo blade 7 is rotatably disposed above the motor 1, and a motor 2 that drives the turbo blade 7 to rotate at high speed is disposed below the housing 1. Yes. The motor 2 is composed of an electrode coil 2K fixed on the housing 1 side and a rotor 2M fixed to the rotary shaft 4 corresponding to the electrode coil 2K. Electric energy is supplied to the electrode coil 2K from the inverter 3. Is supplied.

回転軸４は上部軸受５と下部軸受６を介してハウジング１に対し、回転可能に保持されているが、この回転軸４の上方に形成された取付軸４Ｓにターボ翼７が固設されている。このモータ２と回転子２Ｍおよび回転軸４からなる回転体が軸受機構を構成する上部軸受５と下部軸受６に保持されている。なお、この上部軸受５と下部軸受６はモータ室Ｍ内に配設されている。ターボ翼７がモータ２によって高速回転駆動されると、ガスは吸気口１Ｋから吸入され、圧縮されて排気口１Ｈより排出される。この吸気口１Ｋから排気口１Ｈまでがガス圧縮室Ｃを形成する。この排気口１Ｈからのガスは上記したようにガス循環回路（図示せず）を経てレーザ発振器（図示せず）に供給される。そして、ガス圧縮室Ｃとモータ室とは区画壁１Ｄで区画されている。   The rotating shaft 4 is rotatably held with respect to the housing 1 via an upper bearing 5 and a lower bearing 6. A turbo blade 7 is fixed to an attachment shaft 4 </ b> S formed above the rotating shaft 4. Yes. A rotating body including the motor 2, the rotor 2M, and the rotating shaft 4 is held by an upper bearing 5 and a lower bearing 6 that constitute a bearing mechanism. The upper bearing 5 and the lower bearing 6 are disposed in the motor chamber M. When the turbo blade 7 is driven to rotate at high speed by the motor 2, the gas is sucked from the intake port 1K, compressed, and discharged from the exhaust port 1H. The gas compression chamber C is formed from the intake port 1K to the exhaust port 1H. The gas from the exhaust port 1H is supplied to a laser oscillator (not shown) through a gas circulation circuit (not shown) as described above. The gas compression chamber C and the motor chamber are partitioned by a partition wall 1D.

ところで、回転軸４には図１に示すとおり、軸芯上に中空孔４Ｈが形成されているが、この下方部位がオイル槽１Ｙ内にある潤滑用のオイルＬに浸漬されている。したがって、中空孔４Ｈの下方域に侵入している潤滑用のオイルＬは、回転軸４の回転による遠心力の作用を受けて中空孔４Ｈの内方を上方に移動し、この作用で中空孔４Ｈはポンプ機能を発揮する。こうして潤滑用のオイルＬは順次上方へ送り出され、射出孔４Ｔより外方に放出されてモータ２の冷却や上部軸受５と下部軸受６の潤滑を行なう。潤滑や冷却を終えた潤滑用のオイルＬは再び下方のオイル槽１Ｙに溜められ、再び吸い上げられて循環する。このように潤滑用のオイルＬは、循環して上部軸受５や下部軸受６の潤滑を行なう。   By the way, as shown in FIG. 1, the rotary shaft 4 has a hollow hole 4H formed on the shaft core, but this lower part is immersed in the lubricating oil L in the oil tank 1Y. Accordingly, the lubricating oil L entering the lower region of the hollow hole 4H moves upward in the hollow hole 4H under the action of the centrifugal force caused by the rotation of the rotary shaft 4, and this action causes the hollow hole 4H to move upward. 4H demonstrates the pump function. Thus, the lubricating oil L is sequentially sent upward and discharged outward from the injection hole 4T to cool the motor 2 and lubricate the upper bearing 5 and the lower bearing 6. The lubricating oil L that has been lubricated and cooled is again stored in the lower oil tank 1Y, sucked up again, and circulated. Thus, the lubricating oil L circulates and lubricates the upper bearing 5 and the lower bearing 6.

一方、モータ室Ｍのオイルミストがガス圧縮室Ｃに侵入しないように、ガス圧縮室Ｃとモータ室Ｍとはシール部Ｓで遮断される。すなわち、ハウジング１には上部軸受５の上方位置において回転軸４が非接触で貫通できる範囲の最小径の貫通孔１Ａが穿設され、回転軸４と協働してシール部Ｓが形成される。このシール部Ｓはたとえばラビリンスシール等が適用される。ラビリンスシール以外にも、単純隙間流路のガスシールも採用される。この場合、シール部Ｓは、回転軸４と貫通孔１Ａとの間隙は通常数１０ミクロンに設定されている。   On the other hand, the gas compression chamber C and the motor chamber M are blocked by the seal portion S so that oil mist in the motor chamber M does not enter the gas compression chamber C. That is, the housing 1 is provided with a through hole 1A having a minimum diameter within a range in which the rotary shaft 4 can pass through in a non-contact manner above the upper bearing 5, and a seal portion S is formed in cooperation with the rotary shaft 4. . For example, a labyrinth seal or the like is applied to the seal portion S. In addition to the labyrinth seal, a gas seal with a simple clearance channel is also employed. In this case, in the seal portion S, the gap between the rotating shaft 4 and the through hole 1A is usually set to several tens of microns.

一方、オイル槽１Ｙは排気パイプＲを介して外設した真空ポンプＶＰにて真空に排気されることで、連設されたモータ室Ｍも真空排気される。これは、上記したように、モータ室Ｍが潤滑用のオイルＬのミストが充満しており、シール部Ｓの小さい隙間からガス圧縮室Ｃに漏洩するのを防止するためである。   On the other hand, the oil tank 1Y is evacuated by a vacuum pump VP provided outside via an exhaust pipe R, so that the motor chamber M provided continuously is also evacuated. This is to prevent the motor chamber M from being filled with the mist of the lubricating oil L and leaking into the gas compression chamber C from the small gap of the seal portion S as described above.

さらに特徴的には、排気パイプＲは多孔質部材１０を介してこのオイル槽１Ｙを排気するよう構成されている。なお、多孔質部材として、例えば、焼結金属あるいは不織布が使用される。   More characteristically, the exhaust pipe R is configured to exhaust the oil tank 1Y through the porous member 10. In addition, as a porous member, a sintered metal or a nonwoven fabric is used, for example.

そして、多孔質部材１０には、オイル槽１Ｙにオイルを給油する際に給油口１１から注油したオイルの一部が多孔質部材１０に吸収されるので、使用開始の時点から多孔質部材１０にオイルが吸収されていることから、作動中の圧力損失の変動が抑制されるので、モータ室Ｍの真空排気量が安定し、オイルミストを含んだガスがガス圧縮室Ｃに侵入することを防止する一方、ガス圧縮室Ｃにおけるガスを必要以上に排気してターボ翼７によるガス循環量を低下することも防止される。   The porous member 10 absorbs a part of the oil injected from the oil supply port 11 when the oil is supplied to the oil tank 1Y. Therefore, the porous member 10 has the porous member 10 from the start of use. Since oil is absorbed, fluctuations in pressure loss during operation are suppressed, so that the amount of vacuum exhaust in the motor chamber M is stabilized and gas containing oil mist is prevented from entering the gas compression chamber C. On the other hand, it is also possible to prevent the gas in the gas compression chamber C from being exhausted more than necessary and reducing the amount of gas circulation by the turbo blades 7.

また、この多孔質部材１０をオイル槽１ＹのオイルＬに浸漬することにより、多孔質部材１０がオイル槽１ＹのオイルＬを吸い上げるので、停止中においても、多孔質部材１０はオイルＬを含んでおり、使用開始時点における圧力損失の変動が抑制される。   In addition, since the porous member 10 sucks up the oil L in the oil tank 1Y by immersing the porous member 10 in the oil L in the oil tank 1Y, the porous member 10 contains the oil L even during the stoppage. Therefore, fluctuations in pressure loss at the start of use are suppressed.

さらに、多孔質部材１０は中空状の筒状部材であってもよい。この形態の多孔質部材であってもオイルに浸漬することにより、真空ポンプにより排気されるガスは必ずオイルを含んだ多孔質部材１０を必ず透過するので、排気されるガスに含まれるオイルは多孔質部材１０にトラップされる。   Further, the porous member 10 may be a hollow cylindrical member. Even if the porous member of this form is immersed in oil, the gas exhausted by the vacuum pump always passes through the porous member 10 containing oil, so that the oil contained in the exhausted gas is porous. It is trapped in the mass member 10.

なお、排気パイプＲに給油口１１を設けることにより、オイル槽１Ｙへのオイル供給手段と多孔質部材１０へのオイル供給手段を別々に設ける必要がなく構造の簡素化や部品点数の削減に寄与する。   By providing the oil supply port 11 in the exhaust pipe R, it is not necessary to separately provide oil supply means to the oil tank 1Y and oil supply means to the porous member 10, which contributes to simplification of the structure and reduction of the number of parts. To do.

本発明による高速回転機器の基本的な構成を示す断面図である。It is sectional drawing which shows the basic composition of the high-speed rotation apparatus by this invention. 従来の高速回転機器の基本的な構成を示す断面図である。It is sectional drawing which shows the basic composition of the conventional high-speed rotation apparatus.

符号の説明Explanation of symbols

１Ｙ オイル槽
２ モータ
４ 回転軸
５、６ 軸受
７ ターボ翼
１０ 多孔質部材
Ｃ ガス圧縮室
Ｍ モータ室
ＶＰ 真空ポンプ
Ｒ 排気パイプ 1Y Oil tank 2 Motor 4 Rotating shaft 5, 6 Bearing 7 Turbo blade 10 Porous member C Gas compression chamber M Motor chamber VP Vacuum pump R Exhaust pipe

Claims (4)

ガス圧縮を行なうターボ翼と、このターボ翼を高速回転駆動するモータと、この両者を連結する垂直に配設された回転軸と、この回転軸を回転自在に保持する軸受機構と、前記ターボ翼が配設されたガス圧縮室と前記軸受機構およびモータが配設されたモータ室を区画する区画壁を有し、この区画壁に前記回転軸を貫通させる貫通孔を穿設すると共にこの貫通孔と回転軸との間にシール機構と共に、前記モータ室の下方位の潤滑油貯留部から、潤滑油を前記回転軸の中心軸内方に穿設された供給孔により吸い上げて前記軸受機構に供給する潤滑油供給機構を具備した高速回転機器において、前記モータ室内の潤滑油がガス圧縮室に混入しないようにモータ室内を真空排気する排気手段が前記潤滑油貯留部に排気通路を介して接続されると共に、多孔質部材を介して潤滑油貯留部及びモータ室を排気するよう構成されたことを特徴とする高速回転機器。 A turbo blade that performs gas compression, a motor that drives the turbo blade to rotate at high speed, a rotary shaft that is vertically disposed to couple the turbo blade, a bearing mechanism that rotatably holds the rotary shaft, and the turbo blade And a partition wall that partitions the motor chamber in which the bearing mechanism and the motor are disposed, and a through-hole that penetrates the rotating shaft is formed in the partition wall. Along with a seal mechanism between the rotating shaft and the rotating shaft, the lubricating oil is sucked up from a lubricating oil reservoir in the lower direction of the motor chamber through a supply hole drilled in the central axis of the rotating shaft and supplied to the bearing mechanism. In the high-speed rotating device equipped with the lubricating oil supply mechanism, exhaust means for evacuating the motor chamber is connected to the lubricating oil reservoir via an exhaust passage so that the lubricating oil in the motor chamber does not enter the gas compression chamber. As Fast rotating device, characterized in that it is configured to exhaust the lubricating oil reservoir and the motor chamber through the porous member. 前記多孔質部材の少なくとも一部が、前記潤滑油貯留部内の潤滑油に浸漬されるよう構成されたことを特徴とする請求項１に記載された高速回転機器。 2. The high-speed rotating device according to claim 1, wherein at least a part of the porous member is configured to be immersed in the lubricating oil in the lubricating oil reservoir. 前記多孔質部材は筒状であることを特徴とする請求項２に記載された高速回転機器。 The high-speed rotating device according to claim 2, wherein the porous member has a cylindrical shape. 前記排気経路の途中に、潤滑油の給油口を設けたことを特徴とする請求項１〜３に記載された高速回転機器。
The high-speed rotating device according to claim 1, wherein an oil supply port for lubricating oil is provided in the middle of the exhaust path.
JP2004372690A 2004-12-24 2004-12-24 High speed rotation equipment Pending JP2006177281A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024042684A1 (en) * 2022-08-25 2024-02-29 ファナック株式会社 Blower device, and gas laser oscillator in which same is applied

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101699A (en) * 1992-09-21 1994-04-12 Hitachi Ltd Vacuum pump
JPH09275234A (en) * 1996-04-02 1997-10-21 Fanuc Ltd Blower for gas laser
JPH11190295A (en) * 1997-12-25 1999-07-13 Hitachi Ltd Motor driven blower and electric cleaner using it
JP2003328987A (en) * 2002-05-16 2003-11-19 Shimadzu Corp High speed rotary equipment
JP2004183620A (en) * 2002-12-06 2004-07-02 Shimadzu Corp High-speed rotating apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101699A (en) * 1992-09-21 1994-04-12 Hitachi Ltd Vacuum pump
JPH09275234A (en) * 1996-04-02 1997-10-21 Fanuc Ltd Blower for gas laser
JPH11190295A (en) * 1997-12-25 1999-07-13 Hitachi Ltd Motor driven blower and electric cleaner using it
JP2003328987A (en) * 2002-05-16 2003-11-19 Shimadzu Corp High speed rotary equipment
JP2004183620A (en) * 2002-12-06 2004-07-02 Shimadzu Corp High-speed rotating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024042684A1 (en) * 2022-08-25 2024-02-29 ファナック株式会社 Blower device, and gas laser oscillator in which same is applied

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