JP2006169092A - 接合剤、窒化アルミニウム接合体及びその製造方法 - Google Patents
接合剤、窒化アルミニウム接合体及びその製造方法 Download PDFInfo
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Abstract
【解決手段】複数の窒化アルミニウム焼結体間に、酸化カルシウムアルミニウム、又は、酸化カルシウム及び酸化アルミニウムを含み、希土類元素が5重量%未満である融材と、窒化アルミニウム粉末とを含む接合剤を介在させ、1500℃以下の接合温度で加熱する。
【選択図】なし
Description
接合剤は、窒化アルミニウム焼結体の接合に用いられる。本実施形態の接合剤を用いた接合は、1500℃以下という低い接合温度で行われる。接合剤は、融材と窒化アルミニウム(AlN)粉末とを含む。融材は、接合温度での加熱により溶融する。
本実施形態に係る窒化アルミニウム接合体10は、図1に示すように、複数の窒化アルミニウム焼結体1,2と、複数の窒化アルミニウム焼結体1,2間に形成された接合層3とを備える。接合層3は、窒素(N)、酸素(O)、アルミニウム(Al)、カルシウム(Ca)を含み、希土類元素が15重量%未満である。このような窒化アルミニウム接合体10は、1500℃以下の低い接合温度によって得ることができるため、窒化アルミニウム焼結体1,2の変形が小さく、接合状態も良好である。
(接合剤)
まず、少なくとも酸化カルシウムアルミニウムを生成する化合物(酸化カルシウムアルミニウム源)を秤量し、混合する。酸化カルシウムアルミニウム源の化合物としては、酸化カルシウム、炭酸カルシウム(CaCO3)、水酸化カルシウム(Ca(OH)2)等のカルシウム化合物と、酸化アルミニウム、水酸化アルミニウム(Al(OH)3)等のアルミニウム化合物とを用いることができる。このようなカルシウム化合物やアルミニウム化合物は、酸化カルシウム源、酸化アルミニウム源にもなる。融材は、化合物を、酸化カルシウム換算量で酸化カルシウム30〜70重量%、酸化アルミニウム換算量で酸化アルミニウム30〜70重量%の配合比となるように混合し、溶融して作製することが好ましい。
窒化アルミニウム粉末、必要に応じて焼結助剤を秤量し、バインダを加えて混合する。得られた混合物をCIP(Cold Isostatic Pressing)、スリップキャスト、金型成形法等の成形方法により成形する。尚、図2に示した加熱装置20を製造する場合には、成形体中に発熱体24を埋設しておく。例えば、混合物を用いて予備成形体を製造し、予備成形体の上面に発熱体24を載せ、発熱体24の上面に混合物を充填させることにより、発熱体24を含む成形体を得ることができる。
複数の窒化アルミニウム焼結体間に、酸化カルシウムアルミニウム、又は、酸化カルシウム及び酸化アルミニウムを含み、希土類元素が5重量%未満である融材と、窒化アルミニウム粉末とを含む接合剤を介在させ、1500℃以下の接合温度で加熱する。
(窒化アルミニウム焼結体)
窒化アルミニウム粉末95重量%に、焼結助剤として酸化イットリウム5重量%を加え、ボールミルを用いて混合した。得られた混合粉末に、バインダを添加し、噴霧造粒法により造粒した。得られた造粒粉を金型成形及びCIPにより板状と管状に成形した。得られた板状の成形体を窒素ガス中でホットプレス法により、管状の成形体を窒素ガス中で常圧焼成により1860℃で6時間焼成した。
表1,2に示す接合剤を、窒化アルミニウム焼結体の接合面に、接合剤の量が14g/cm2となるように均一に塗布した。窒化アルミニウム焼結体の接合面同士を貼り合わせ、窒素ガス中で、接合温度1450℃で2時間保持した。昇温速度は3.3℃/分とし、窒素ガス(N21.5atm)は1200℃から導入した。又、接合面と垂直な方向から窒化アルミニウム焼結体同士を押しつけるように加圧した。加圧は、圧力40kg/cm2で行い、1200℃から開始し、接合温度1450℃で保持している間続け、700℃に冷却した時点で終了した。
得られた窒化アルミニウム接合体の接合部分について、強度、耐食性、気密性、欠陥の有無を評価した。強度は、JIS R1601に従い、室温で4点曲げ強度を測定した。強度は、耐久性試験及び耐食性試験前(以下「初期状態」という)、耐久性試験後、耐食性試験後にそれぞれ測定した。耐久性試験は、大気中において、窒化アルミニウム接合体を700℃まで加熱し、室温まで冷却する処理を100回繰り返して行った。
図2に示した加熱装置20を製造した。実施例1〜11と同様にして得られた造粒粉を金型成形により成形した円盤状部材21用の成形体と、CIPにより成形した管状部材22用の成形体に成形した。尚、円盤状部材21用の成形体には、コイル状のモリブデンの発熱体24を埋設させた。得られた成形体を、窒素ガス中でホットプレス法により1860℃で6時間焼成した。得られた窒化アルミニウム焼結体の大きさは、円盤状部材21が、直径340mm、厚さ20mmであり、管状部材22が外径70mm、内径60mm、長さ180mmであった。円盤状部材21の載置面21aの平面度が10μm以下となるように加工した。
3,23,33…接合層
10…窒化アルミニウム接合体
20…加熱装置
21…円盤状部材
22…管状部材
24…発熱体
25…給電部材
30…静電チャック
31…誘電体層
32…基体
34…電極
35…端子
Claims (12)
- 酸化カルシウムアルミニウム、又は、酸化カルシウム及び酸化アルミニウムを含み、希土類元素が5重量%未満である融材と、窒化アルミニウム粉末とを含むことを特徴とする接合剤。
- 前記酸化カルシウムアルミニウムは、Ca12Al14O33、又は、Ca3Al2O6の少なくとも1つを含むことを特徴とする請求項1に記載の接合剤。
- 前記融材は、カルシウムを30〜80重量%、アルミニウムを20〜70重量%含むことを特徴とする請求項1又は2に記載の接合剤。
- 前記融材は、シリカを0.01〜5重量%含むことを特徴とする請求項1乃至3のいずれか1項に記載の接合剤。
- 前記融材を10〜90重量%、前記窒化アルミニウム粉末を10〜90重量%含むことを特徴とする請求項1乃至4のいずれか1項に記載の接合剤。
- 前記融材及び前記窒化アルミニウム粉末の最大粒子径が45μm以下であることを特徴とする請求項1乃至5のいずれか1項に記載の接合剤。
- 複数の窒化アルミニウム焼結体と、
該複数の窒化アルミニウム焼結体間に形成され、窒素、酸素、アルミニウム、カルシウムを含み、希土類元素が15重量%未満である接合層と
を備えることを特徴とする窒化アルミニウム接合体。 - 前記接合層は、窒素を15〜30重量%、酸素を10〜35重量%、アルミニウムを20〜55重量%、カルシウムを5〜20重量%含むことを特徴とする請求項7に記載の窒化アルミニウム接合体。
- 前記窒化アルミニウム接合体は、発熱体を含む加熱装置、又は、電極を含む静電チャックであることを特徴とする請求項7又は8に記載の窒化アルミニウム接合体。
- 複数の窒化アルミニウム焼結体間に、酸化カルシウムアルミニウム、又は、酸化カルシウム及び酸化アルミニウムを含み、希土類元素が5重量%未満である融材と、窒化アルミニウム粉末とを含む接合剤を介在させ、1500℃以下の接合温度で加熱することを特徴とする窒化アルミニウム接合体の製造方法。
- 昇温速度0.5〜10.0℃/分により前記接合温度まで昇温することを特徴とする請求項10に記載の窒化アルミニウム接合体の製造方法。
- 前記窒化アルミニウム焼結体の接合面の平均表面粗さが0.1〜2.0μmであることを特徴とする請求項10又は11に記載の窒化アルミニウム接合体の製造方法。
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TW094131286A TWI305224B (en) | 2004-11-16 | 2005-09-12 | Bonding agent, aluminum nitride composite body, and manufacturing method of the same |
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WO2008065980A1 (fr) * | 2006-11-27 | 2008-06-05 | Tokuyama Corporation | Procédé de fabrication d'un produit de jonction de nitrure d'aluminium |
CN104744046A (zh) * | 2013-12-27 | 2015-07-01 | 日本碍子株式会社 | 接合材组合物、氮化铝接合体及其制造方法 |
WO2017146222A1 (ja) * | 2016-02-26 | 2017-08-31 | 京セラ株式会社 | セラミック接合体 |
JP2019026511A (ja) * | 2017-07-31 | 2019-02-21 | 日本特殊陶業株式会社 | セラミックス接合体およびセラミックス接合体の製造方法 |
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US20090242101A1 (en) | 2009-10-01 |
US20060110624A1 (en) | 2006-05-25 |
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JP4787568B2 (ja) | 2011-10-05 |
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