JP2006114905A - 不揮発性の半導体メモリ素子 - Google Patents
不揮発性の半導体メモリ素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 98
- 238000003860 storage Methods 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 230000006870 function Effects 0.000 claims description 60
- 239000000463 material Substances 0.000 claims description 52
- 230000000903 blocking effect Effects 0.000 claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 229920006385 Geon Polymers 0.000 claims description 4
- 229910004129 HfSiO Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 229910004541 SiN Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910010037 TiAlN Inorganic materials 0.000 claims description 4
- 229910006501 ZrSiO Inorganic materials 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910021332 silicide Inorganic materials 0.000 claims description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 230000005641 tunneling Effects 0.000 abstract description 18
- 239000000126 substance Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 11
- 230000004888 barrier function Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 4
- 229910000510 noble metal Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0416—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Abstract
【解決手段】半導体基板21と、基板に形成されたソース領域22a及びドレイン領域22b、及びソース及びドレイン領域と接触して半導体基板上に形成されたゲート構造体24とを備える半導体メモリ素子において、ゲート構造体は、4.4eV以上の高い仕事関数を有する物質を含んで形成されたゲート電極層28を備える。
【選択図】図2
Description
図3Bに示すように、高い仕事関数を有する物質をゲート電極層として使用して、エネルギー障壁層を高くしたため、バックトンネリング現象ではなくダイレクトトンネリング現象のみによってトンネリングが発生する。一般的にダイレクトトンネリング現象は、バックトンネリング現象に比べて発生確率が非常に低い。したがって、不揮発性の半導体メモリ素子の場合、ゲート電極層を4.4eV以上の仕事関数を有する物質から形成させることにより、バックトンネリング現象を防止できる。但し、量子障壁の低いhigh−k物質からブロッキング層を形成させた場合には、ゲート電極層を4.9eV以上の物質から形成させることが好ましい。
12a、22a ソース
12b、22b ドレイン
13、23 チャンネル領域
14、24 ゲート構造体
15、25 トンネル層
16、26a 電荷蓄積層
26b トラップサイト
17、27 ブロッキング層
18、28 ゲート電極層
Claims (16)
- ソース領域、ドレイン領域及び前記ソース領域と前記ドレイン領域との間に形成されたチャンネル領域を備える半導体基板と、前記チャンネル領域上に順次に形成されたトンネル層、電荷蓄積層、ブロッキング層及びゲート電極層を有するゲート構造体と、を備える不揮発性メモリ素子において、
前記ゲート電極層は、4.4eV以上の仕事関数を有する物質を含んで形成されたことを特徴とする不揮発性の半導体メモリ素子。 - 前記不揮発性メモリ素子は、フローティングゲート型のメモリ素子であり、
前記電荷蓄積層は、フローティングゲートである
ことを特徴とする請求項1に記載の不揮発性の半導体メモリ素子。 - 前記不揮発性メモリ素子は、電荷トラップ型のフラッシュメモリ素子であり、
前記電荷蓄積層は、電荷トラップ型の誘電体から形成された
ことを特徴とする請求項1に記載の不揮発性の半導体メモリ素子。 - 前記トンネル層は、SiO2、Al2O3、MgO、SrO、SiN、BaO、TiO、Si3N4、Ta2O5、BaTiO3、BaZrO、ZrO2、HfO2、Al2O3、Y2O3、ZrSiO、HfSiOまたはLaAlO3のうち、少なくとも何れか一つを含んで形成されたことを特徴とする請求項1に記載の不揮発性の半導体メモリ素子。
- 前記フローティングゲートは、ポリシリコン、Pt、Au、TiAlN、Pd、金属窒化物、金属ボロン窒化物、金属シリコン窒化物、金属アルミニウム窒化物または金属シリサイドのうち、少なくとも何れか一つを含んで形成されたことを特徴とする請求項2に記載の不揮発性の半導体メモリ素子。
- 前記電荷トラップ型の誘電体は、SiN、SiON、SiOx、GeON、GeN、GeOのうち、少なくとも何れか一つの物質を含んで形成されたことを特徴とする請求項3に記載の不揮発性の半導体メモリ素子。
- 前記基板は、Si基板であることを特徴とする請求項1に記載の不揮発性の半導体メモリ素子。
- ソース領域、ドレイン領域及び前記ソース領域と前記ドレイン領域との間に形成されたチャンネル領域を備える半導体基板と、前記チャンネル領域上に順次に形成されたトンネル層、電荷蓄積層、ブロッキング層及びゲート電極層を有するゲート構造体と、を備える不揮発性メモリ素子において、
前記ブロッキング層は、4.2以上の誘電定数を有するhigh−k物質から形成されたものであり、
前記ゲート電極層は、4.9〜5.5eVの仕事関数を有する
ことを特徴とする不揮発性の半導体メモリ素子。 - 前記不揮発性メモリ素子は、フローティングゲート型のメモリ素子であり、
前記電荷蓄積層は、フローティングゲートである
ことを特徴とする請求項8に記載の不揮発性の半導体メモリ素子。 - 前記不揮発性メモリ素子は、電荷トラップ型のフラッシュメモリ素子であり、
前記電荷蓄積層は、電荷トラップ型の誘電体から形成された
ことを特徴とする請求項8に記載の不揮発性の半導体メモリ素子。 - 前記トンネル層は、SiO2、Al2O3、MgO、SrO、SiN、BaO、TiO、Si3N4、Ta2O5、BaTiO3、BaZrO、ZrO2、HfO2、Al2O3、Y2O3、ZrSiO、HfSiOまたはLaAlO3のうち、少なくとも何れか一つを含んで形成されたことを特徴とする請求項8に記載の不揮発性の半導体メモリ素子。
- 前記フローティングゲートは、ポリシリコン、Pt、Au、TiAlN、Pd、金属窒化物、金属ボロン窒化物、金属シリコン窒化物、金属アルミニウム窒化物または金属シリサイドのうち、少なくとも何れか一つを含んで形成されたことを特徴とする請求項9に記載の不揮発性の半導体メモリ素子。
- 前記電荷トラップ型の誘電体は、SiN、SiON、SiOx、GeON、GeN、GeOのうち、少なくとも何れか一つの物質を含んで形成されたことを特徴とする請求項10に記載の不揮発性の半導体メモリ素子。
- 前記基板は、Si基板であることを特徴とする請求項8に記載の不揮発性の半導体メモリ素子。
- 前記トンネル層がhigh−k物質から形成されたものであり、前記フローティングゲートは4.9eV以上の仕事関数を有する金属で形成されることを特徴とする請求項2に記載の不揮発性のメモリ素子。
- 前記トンネル層がhigh−k物質から形成されたものであり、前記フローティングゲートは4.9eV以上の仕事関数を有する金属で形成されることを特徴とする請求項9に記載の不揮発性のメモリ素子。
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US (2) | US7391075B2 (ja) |
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KR (1) | KR100688575B1 (ja) |
CN (1) | CN100533742C (ja) |
Cited By (16)
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JP2007288178A (ja) * | 2006-03-21 | 2007-11-01 | Semiconductor Energy Lab Co Ltd | 不揮発性半導体記憶装置 |
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Also Published As
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US7391075B2 (en) | 2008-06-24 |
US20080217677A1 (en) | 2008-09-11 |
US20060118858A1 (en) | 2006-06-08 |
KR100688575B1 (ko) | 2007-03-02 |
CN100533742C (zh) | 2009-08-26 |
KR20060052126A (ko) | 2006-05-19 |
CN1790718A (zh) | 2006-06-21 |
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