JP2006113967A - Guided vehicle system - Google Patents

Guided vehicle system Download PDF

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JP2006113967A
JP2006113967A JP2004303083A JP2004303083A JP2006113967A JP 2006113967 A JP2006113967 A JP 2006113967A JP 2004303083 A JP2004303083 A JP 2004303083A JP 2004303083 A JP2004303083 A JP 2004303083A JP 2006113967 A JP2006113967 A JP 2006113967A
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specific area
overhead traveling
traveling vehicle
transport vehicle
vehicle
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JP4281065B2 (en
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Tadayuki Yasumoto
格之 安本
Yoichi Mototsugu
陽一 本告
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Murata Machinery Ltd
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Murata Machinery Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a guided vehicle system capable of reducing a section where a guided vehicle on a ceiling runs unloaded, and effectively utilizing a dead space by a wall. <P>SOLUTION: Areas near load ports 12 and 14 are defined to be specific areas 26 and 28, and a ceiling guided vehicle 6 is permitted to perform going back at the specific areas. When a ceiling guided vehicle following the vehicle 6 needs to go into the specific area 26 or 28, it is allowed after confirming that the specific area 26 or 28 is empty at a confirmation area 27 or 29. A dead-end section 24 is established at a curved part 22 to enable the set-up of a load port 12d, and managed as a specific area. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は天井走行車や有軌道台車などの搬送車のシステムに関する。   The present invention relates to a transport vehicle system such as an overhead traveling vehicle or a tracked vehicle.

搬送車システムでは、搬送車が周回軌道に沿って走行し、後退を認めないのが原則である。そして搬送車は、障害物センサにより先行の搬送車などの障害物を検出し、衝突を防止する。発明者は、搬送車の後退を認めないことが、搬送車システムの効率を様々な面で低下させていることに着目した。しかしながら搬送車に無制限に後退走行を認めると、衝突などの危険性が増す。そこで発明者は、搬送車に後退を認める必要があるのはどのような区間かを検討し、かつ搬送車に後退を認めた際の衝突回避策として実際的であるのは同様なものかを検討して、この発明に到った。   In principle, in the transport vehicle system, the transport vehicle travels along a circular track and does not allow a backward movement. And a conveyance vehicle detects obstructions, such as a preceding conveyance vehicle, by an obstacle sensor, and prevents a collision. The inventor has noted that not allowing the carriage to move backward reduces the efficiency of the carriage system in various ways. However, if the carriage is allowed to travel backward without limitation, the risk of collision and the like increases. Therefore, the inventor examines which section needs to allow the carriage to move backward, and whether it is the same practical as a collision avoidance measure when the carriage moves backward. The present invention has been studied.

この発明の基本的課題は、搬送車システムの効率を改善することにある。
請求項２の発明での追加の課題は、ポートへの物品の搬出入効率を改善することにある。
請求項３の発明での追加の課題は、壁際の曲線部の付近にもポートを設置できるようにして、搬送車システムのレイアウトの自由度を増すことにある。 A basic object of the present invention is to improve the efficiency of a transport vehicle system.
An additional problem in the invention of claim 2 is to improve the efficiency of carrying articles into and out of the port.
An additional problem in the invention of claim 3 is to increase the degree of freedom in the layout of the transport vehicle system by allowing a port to be installed in the vicinity of the curved portion at the wall.

この発明は、搬送車を軌道に沿って周回走行させて物品を搬送し、搬送車とポートとの間で物品を移載する搬送車システムにおいて、搬送車の後退が認められかつポートを含むエリアを、搬送車の軌道の一部に特定エリアとして設けると共に、前記特定エリアで搬送車が後退する際に、後続の搬送車が待機するための確認エリアを、前記特定エリアの上流側に設けたことを特徴とする。   The present invention relates to a transport vehicle system in which a transport vehicle circulates along a track to transport an article, and the article is transferred between the transport vehicle and a port. Is provided as a specific area in a part of the track of the transport vehicle, and a confirmation area is provided on the upstream side of the specific area for the subsequent transport vehicle to wait when the transport vehicle moves backward in the specific area. It is characterized by that.

好ましくは、ポートの下流側にバッファを設けたエリアを前記特定エリアとし、かつポートの下流側のバッファに搬送車が搬送してきた物品を荷下ろしし、搬送車が前記ポートへ後退して、該ポートの物品を荷積みして搬送するように搬送車を制御するための制御手段、を設ける。制御手段の設置位置は任意で、例えば搬送車システムのコントローラに設けても、あるいは搬送車に設けても良い。   Preferably, an area provided with a buffer on the downstream side of the port is set as the specific area, and the article conveyed by the transport vehicle is unloaded to the buffer on the downstream side of the port. Control means for controlling the transport vehicle so as to load and transport the article in the port is provided. The installation position of the control means is arbitrary, and may be provided, for example, in the controller of the transport vehicle system or in the transport vehicle.

また好ましくは、軌道の曲線部から分岐する直線状の袋小路区間を設けて、該袋小路区間にポートを設け、前記曲線部と袋小路区間を前記特定エリアとする。   Further preferably, a linear bag path section that branches off from a curved portion of the track is provided, a port is provided in the bag path section, and the curve section and the bag path section are defined as the specific area.

搬送車に後退を認める必要があるのは、ポートを含む区間である。例えば複数のポートが近接して存在し、それらの間で物品を移し替える、あるいはポートの下流側にバッファがあり、ポートとバッファとの間で物品を移し替えるなどの場合に、搬送車が後退する必要がある。そしてこれらの区間を特定エリアとして搬送車の後退を認め、下流側で物品の移載を行った後に、特定エリア内の上流側で移載を行う場合、軌道を１周せずに、短い区間を後退するようにする。また曲線部と並行に袋小路区間を設けると、曲線部近傍の袋小路区間にポートを設けることができ、壁際のデッドスペースにも処理装置のポートなどを設置できる。   It is the section including the port that requires the carriage to move backward. For example, when there are multiple ports in close proximity and goods are transferred between them, or there is a buffer on the downstream side of the port and goods are transferred between the ports, the transport vehicle moves backward. There is a need to. When these sections are used as specific areas, the carriage is allowed to move backward, and after transferring goods on the downstream side, when transferring on the upstream side in the specific area, a short section without going around the track. To reverse. Further, when the narrow path section is provided in parallel with the curved portion, a port can be provided in the narrow path section in the vicinity of the curved section, and the port of the processing apparatus can be installed in the dead space near the wall.

次に搬送車間の衝突を避けるため、特定エリアの上流側に確認エリアを設け、特定エリア内に進入しても衝突などが生じないかを確認するようにして、衝突を回避するのが実際的である。例えば特定エリアのはるか上流側で、特定エリアに進入した際の衝突の危険性を評価するのは実際的でないし、また後続の搬送車に特定エリアへの進入を無制限に認めて、進入後に例えば自律的に衝突を回避するのも、実際的ではない。そこで、特定エリアの上流側に確認エリアを設け、後続の搬送車が特定エリアに進入しても危険性がないかを、搬送車あるいはそのコントローラなどが判断するのが実際的である。   Next, in order to avoid collision between transport vehicles, it is practical to avoid the collision by providing a confirmation area upstream of the specific area and confirming that no collision will occur even if it enters the specific area. It is. For example, it is not practical to evaluate the risk of collision when entering a specific area far upstream of the specific area, and allow the following vehicles to enter the specific area without restriction, It is not practical to avoid collisions autonomously. Therefore, it is practical that a confirmation area is provided on the upstream side of the specific area, and the transport vehicle or its controller determines whether there is any danger even if the subsequent transport vehicle enters the specific area.

確認エリアでは、後行の搬送車に対して、特定エリア内に先行の搬送車が存在するか、あるいは先行の搬送車が特定エリア内で後退する、もしくは後退する可能性があるかを判別し、これによって特定エリアへの進入を可あるいは不可として、衝突を回避する。   In the confirmation area, it is determined whether there is a preceding transport vehicle in the specific area with respect to the subsequent transport vehicle, or whether or not the preceding transport vehicle moves backward in the specific area. , Thereby allowing or not allowing entry into a specific area and avoiding a collision.

請求項２の発明では、ポートの下流側のバッファに物品を荷下ろしして、同じ搬送車でポートから物品を荷積みして搬送することができる。バッファに残った物品は例えば後続の空きの搬送車が荷積みして、特定エリア内を後退してポートに荷下ろしすればよい。   According to the second aspect of the present invention, the article can be unloaded in the buffer on the downstream side of the port, and the article can be loaded and conveyed from the port by the same conveyance vehicle. The articles remaining in the buffer may be loaded, for example, by a subsequent empty transport vehicle, moved backward in a specific area, and unloaded to a port.

請求項３の発明では、曲線部と並行に袋小路区間があり、ここにポートを設置できるので、従来であればデッドスペースとなっていたエリアにも処理装置などを配置できる。また分岐部の上流側が確認エリアとなり、袋小路区間から分岐部へ後退する先行車があれば、曲線部へ後行車が進入しないので、後行車と先行車との衝突を防止できる。   In the invention of claim 3, since there is a dead end section in parallel with the curved portion, and a port can be installed here, a processing device or the like can be arranged in an area that has conventionally been a dead space. In addition, if there is a preceding vehicle that is the confirmation area on the upstream side of the branch portion and moves backward from the narrow alley section to the branch portion, the subsequent vehicle does not enter the curved portion, so that the collision between the subsequent vehicle and the preceding vehicle can be prevented.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図１０に、実施例とその変形とを示す。図において、２は天井走行車システムで、周回軌道４に沿って天井走行車６が周回走行し、搬送車コントローラ８は天井走行車６に搬送指令を送出する。天井走行車システム２は例えばクリーンルーム内に設けられ、１０，１１は半導体や液晶などの処理装置で、１２，１４はそのロードポートで、例えば各４物品分の、個別のロードポート１２ａ〜１２ｄと、ロードポート１４ａ〜１４ｄとを備えている。ロードポート１２の近傍にバッファ１６を設け、ロードポート１４の近傍にバッファ１８を設け、バッファ１６，１８はそれぞれ４物品分のスペースを備え、１６ａ〜１６ｄと１８ａ〜１８ｄは個々のバッファで、各１物品分のスペースを備えている。   1 to 10 show an embodiment and its modifications. In the figure, reference numeral 2 denotes an overhead traveling vehicle system in which an overhead traveling vehicle 6 travels along a circular track 4 and a transport vehicle controller 8 sends a transport command to the overhead traveling vehicle 6. The overhead traveling vehicle system 2 is provided in a clean room, for example, 10 and 11 are processing devices such as semiconductors and liquid crystals, and 12 and 14 are load ports thereof, for example, individual load ports 12a to 12d for four articles each. And load ports 14a to 14d. A buffer 16 is provided in the vicinity of the load port 12, a buffer 18 is provided in the vicinity of the load port 14, the buffers 16 and 18 each have a space for four articles, and 16a to 16d and 18a to 18d are individual buffers. A space for one article is provided.

天井走行車６の後退が認められている区間を特定エリアとし、他の区間では天井走行車６は１方向に周回走行し、例えば複数のロードポートと複数のバッファとを備えた区間を特定エリアとする。ロードポート１２とバッファ１６の場合、４つのロードポート１２ａ〜１２ｄと４つのバッファ１６ａ〜１６ｄが含まれ、この区間が特定エリア２６である。なお特定エリア２６は、曲線部２２と袋小路区間２４とを含んでいる。またロードポート１４とバッファ１８の場合、４つのロードポート１４ａ〜１４ｄと４つのバッファ１８ａ〜１８ｄが含まれ、この区間が特定エリア２８である。   The section in which the backward traveling of the overhead traveling vehicle 6 is permitted is set as the specific area, and in the other sections, the overhead traveling vehicle 6 travels around in one direction. For example, the section having a plurality of load ports and a plurality of buffers is defined in the specific area. And In the case of the load port 12 and the buffer 16, four load ports 12 a to 12 d and four buffers 16 a to 16 d are included, and this section is the specific area 26. The specific area 26 includes a curved portion 22 and a block path section 24. In the case of the load port 14 and the buffer 18, four load ports 14 a to 14 d and four buffers 18 a to 18 d are included, and this section is the specific area 28.

２０はクリーンルームの壁で、その手前側に曲線部があり、その入口側から分岐して袋小路区間２４が設けられ、曲線部と袋小路区間２４とこれらの間の分岐とを含む区間を曲線エリア２２とし、ロードポート１２ｄが袋小路区間２４に設けられている。曲線エリア２２は単独で特定エリアとなり得るエリアであるが、ロードポート１２ｄ，１２ｃを含んでいるので、ここでは特定エリア２６の一部とし、袋小路区間２４の前後で天井走行車６が後退することに対応する。   Reference numeral 20 denotes a clean room wall having a curved portion on the front side thereof, branched from the entrance side, and provided with a narrow path section 24. A section including the curved section, the narrow path section 24 and a branch between them is a curved area 22 The load port 12d is provided in the dead end section 24. The curved area 22 is an area that can be a specific area by itself, but includes the load ports 12d and 12c. Therefore, the curved area 22 is a part of the specific area 26, and the overhead traveling vehicle 6 moves back and forth before and after the narrow path section 24. Corresponding to

なお特定エリアは、少なくとも１物品分のロードポートと複数物品分のバッファとを含むか、少なくとも１物品分のロードポートと袋小路区間とを含むものである。特定エリア２６，２８の上流側には確認エリア２７，２９を設け、例えば特定エリア２６，２８への進入を、天井走行車６が自律制御する場合、確認エリア２７，２９で先行の天井走行車が特定エリア２６，２８に存在するかどうかを判別するが、特定エリア２６，２８で後退する可能性のある先行の天井走行車が存在するかどうかを判別しても良い。また搬送車コントローラ８の許可により特定エリア２６，２８へ進入する場合、確認エリア２７，２９で搬送車コントローラ８からの許可を待つ。   The specific area includes a load port for at least one article and a buffer for a plurality of articles, or includes a load port for at least one article and a bag path section. Confirmation areas 27 and 29 are provided on the upstream side of the specific areas 26 and 28. For example, when the overhead traveling vehicle 6 autonomously controls the entry into the specific areas 26 and 28, the preceding overhead traveling vehicle in the confirmation areas 27 and 29. However, it may be determined whether there is a preceding overhead traveling vehicle that may move backward in the specific areas 26, 28. When entering the specific areas 26 and 28 with permission from the transport vehicle controller 8, the confirmation areas 27 and 29 wait for permission from the transport vehicle controller 8.

特定エリア２６，２８の幅は、ロードポート１２，１４やバッファ１６，１８で、天井走行車６が後退する範囲で定まる。また特定エリア２６では、袋小路区間２４からの脱出のために、天井走行車６が後退する範囲を含める必要がある。特定エリア２６，２８の先端（出口側の端部）は、ロードポート１２，１４やバッファ１６，１８との間で移載する際に、天井走行車が最も前進する位置で定まる。袋小路区間２４の場合、曲線部を通過する天井走行車と干渉する範囲を特定エリアに含め、袋小路区間２４が長く曲線部の通過と干渉しない範囲があれば、その範囲は特定エリア２６に含めなくても良い。また曲線部側では、袋小路区間２４内の天井走行車と干渉する範囲を特定エリアに含める。   The width of the specific areas 26 and 28 is determined by the range in which the overhead traveling vehicle 6 moves backward by the load ports 12 and 14 and the buffers 16 and 18. Further, in the specific area 26, it is necessary to include a range in which the overhead traveling vehicle 6 moves backward in order to escape from the dead end section 24. The tip ends (end portions on the exit side) of the specific areas 26 and 28 are determined at the position where the overhead traveling vehicle moves most forward when transferring between the load ports 12 and 14 and the buffers 16 and 18. In the case of the narrow alley section 24, the specific area includes a range that interferes with the overhead traveling vehicle passing through the curved portion, and if there is a long range that does not interfere with the passing of the curved section, the range is not included in the specific area 26. May be. On the curved portion side, the specific area includes a range that interferes with the overhead traveling vehicle in the narrow alley section 24.

搬送車コントローラ８には、天井走行車６へ割り付けた、あるいは割り付ける予定の搬送指令を記憶するための搬送指令ファイル３２と、天井走行車６が搬送中の物品を在庫として管理するための搬送車在庫ファイル３４、並びにバッファ１６，１８などでの在庫を管理するためのバッファ在庫ファイル３６を設ける。天井走行車６の前側には障害物センサ３８を設けて、先行の天井走行車などとの車間距離を監視し、後側には好ましくは障害物信号送出部４０を設けて、特定エリア２６，２８へ進入した際に、障害物信号を後方へ送出する。そして後続の天井走行車が障害物信号を受信すると、特定エリア２６，２８へ進入しないようにする。   The transport vehicle controller 8 includes a transport command file 32 for storing a transport command assigned to or scheduled to be assigned to the overhead traveling vehicle 6, and a transport vehicle for managing articles being transported by the overhead traveling vehicle 6 as inventory. A stock file 34 and a buffer stock file 36 for managing stock in the buffers 16 and 18 are provided. An obstacle sensor 38 is provided on the front side of the overhead traveling vehicle 6 to monitor a distance between the preceding overhead traveling vehicle and the like, and an obstacle signal transmission unit 40 is preferably provided on the rear side, so that the specific area 26, When entering 28, an obstacle signal is sent backward. When the subsequent overhead traveling vehicle receives the obstacle signal, it is prevented from entering the specific areas 26 and 28.

障害物信号としては例えば、障害物センサ３８が監視用に用いている光や超音波などと同じ波長の光や超音波を用い、通常の監視距離よりも遠方から、後続の天井走行車が障害物センサ３８により先行の天井走行車を検出できるようにする。なお特定エリア２６，２８への進入制御を搬送車コントローラ８に委ねる場合、障害物信号送出部４０は不要である。また天井走行車６間の自律制御を行う場合でも、天井走行車間での他の直接通信により、特定エリア２６，２８に先行の天井走行車が存在することを検出しても良い。   As the obstacle signal, for example, light or ultrasonic wave having the same wavelength as the light or ultrasonic wave used by the obstacle sensor 38 for monitoring is used, and the following overhead traveling vehicle is obstructed from a distance farther than the normal monitoring distance. The preceding overhead traveling vehicle can be detected by the object sensor 38. In addition, when the approach control to the specific areas 26 and 28 is entrusted to the transport vehicle controller 8, the obstacle signal sending unit 40 is unnecessary. Even when autonomous control between the overhead traveling vehicles 6 is performed, the presence of the preceding overhead traveling vehicle in the specific areas 26 and 28 may be detected by other direct communication between the overhead traveling vehicles.

図２は、処理装置４２に４物品分のロードポート４４を設け、ロードポート４４の近傍に４物品分のバッファ４６を設けた例を示す。４４ａ〜４４ｄはそれぞれ１物品分のロードポート、４６ａ〜４６ｄはそれぞれ１物品分のバッファで、４８は特定エリア、４９は確認エリアである。   FIG. 2 shows an example in which a load port 44 for four articles is provided in the processing device 42 and a buffer 46 for four articles is provided in the vicinity of the load port 44. 44a to 44d are load ports for one article, 46a to 46d are buffers for one article, 48 is a specific area, and 49 is a confirmation area.

図２の場合を例に、天井走行車６とロードポート４４，バッファ４６の配置を図３に示すと、天井走行車６は走行台車５０を備えて、周回軌道４に沿って走行し、横送り装置５２により昇降駆動部５４を横送りし、昇降台５６でカセット５８などの物品をチャックして昇降させる。そして周回軌道４の例えば直下にロードポート４４があり、周回軌道４の側方にバッファ４６を設けて、向き合ったロードポートとバッファとの間では、天井走行車６が走行せずに物品を移載できるようにする。なお天井走行車の構造やバッファの位置は任意で、バッファへの移載に横送りを用いるかどうかも任意である。   2, the arrangement of the overhead traveling vehicle 6, the load port 44, and the buffer 46 is shown in FIG. 3. The overhead traveling vehicle 6 includes a traveling carriage 50, travels along the circular track 4, and moves horizontally. The elevating drive unit 54 is laterally fed by the feeding device 52, and an article such as a cassette 58 is chucked and raised by the elevating table 56. A load port 44 is provided, for example, directly below the orbit 4, and a buffer 46 is provided on the side of the orbit 4 so that the overhead traveling vehicle 6 does not travel between the facing load port and the buffer. To be able to be posted. It should be noted that the structure of the overhead traveling vehicle and the position of the buffer are arbitrary, and whether or not the lateral feed is used for transfer to the buffer is also arbitrary.

図４に、ロードポート４４ｂへ天井走行車６が物品Ａを搬入し、ロードポート４４ｂの物品Ｂを搬出する例を示す。従来であればこのような場合、ロードポート４４ｂからの物品Ｂの搬出用と、ロードポート４４ｂへの物品Ａの搬入用に、合計２台の天井走行車が必要で、しかも物品Ｂの搬出が物品Ａの到着よりも先に行われるようにする必要がある。実施例ではこれを１台の天井走行車で行い、ロードポート４４ｂへの走行も、ロードポート４４ｂからの走行も、天井走行車６は物品を保持しながら走行するようにする。   FIG. 4 shows an example in which the overhead traveling vehicle 6 carries the article A into the load port 44b and carries the article B out of the load port 44b. Conventionally, in such a case, a total of two overhead traveling vehicles are required for carrying out the article B from the load port 44b and carrying the article A into the load port 44b. It is necessary to perform the process before the arrival of the article A. In the embodiment, this is performed by a single overhead traveling vehicle, and the overhead traveling vehicle 6 travels while holding an article, whether traveling to the load port 44b or traveling from the load port 44b.

例えばここでロードポート４４ｂの下流側のバッファ４６ｃ，４６ｄが空きであるとする。すると天井走行車６は例えばバッファ４６ｄに物品Ａを荷下ろしし、特定エリア４８を後退して、ロードポート４４ｂから物品Ｂを荷積みし、これをバッファ４６ｃへ荷下ろしする。次いでバッファ４６ｄの物品Ａを荷積みし、後退してロードポート４４ｂへ荷下ろしする。その後バッファ４６ｃの物品Ｂを荷積みして走行すると、１台の天井走行車でロードポート４４ｂへの搬入と、ロードポート４４ｂからの搬出とを行うことができ、空荷で走行する区間はごく僅かで、しかも何れの天井走行車が先に到着するかのスケジュール管理を行う必要がない。   For example, it is assumed here that the buffers 46c and 46d on the downstream side of the load port 44b are empty. Then, the overhead traveling vehicle 6 unloads the article A to, for example, the buffer 46d, moves backward in the specific area 48, loads the article B from the load port 44b, and unloads the article B to the buffer 46c. Next, the article A in the buffer 46d is loaded, moved backward, and unloaded to the load port 44b. Thereafter, when the article B in the buffer 46c is loaded and traveled, a single overhead traveling vehicle can carry in and out of the load port 44b. There is only a small amount, and it is not necessary to manage the schedule of which overhead traveling vehicle arrives first.

図５は、物品Ａをロードポート４４ａへ搬入し、ロードポート４４ａの物品Ｂを搬出する例であるが、バッファ４６ｄのみが空きであるとする。この場合、先行の台車Ａでバッファ４６ｄに物品Ａを荷下ろしし、後退して物品Ｂを荷積みして走行する。後続の台車Ｂはバッファ４６ｄで物品Ａを荷積みし、ロードポート４４ａに荷下ろしする。   FIG. 5 shows an example in which the article A is carried into the load port 44a and the article B in the load port 44a is carried out. It is assumed that only the buffer 46d is empty. In this case, the article A is unloaded onto the buffer 46d by the preceding carriage A, and the article B moves backward to load and carry the article B. Subsequent carriage B loads article A in buffer 46d and unloads it to load port 44a.

ロードポートと複数のバッファとを備えた特定エリアでの搬送を、搬送車コントローラにより制御する例を図６に示す。搬送車コントローラはバッファとロードポートの状況をチェックし、これによって物品を移載する手順を作成する。この手順は例えば図４や図５などのものである。そしてこの手順を搬送指令として天井走行車に割り付ける。搬送指令を割り付けられた天井走行車は確認エリアに到着すると、確認エリアに到着した旨を搬送車コントローラに報告する。搬送車コントローラは特定エリアが空きか、先行の天井走行車によりブロックされているか（先行の天井走行車が所在するか）を判別し、空きの場合、特定エリアへの進入を許可し、以降の後続車に対して特定エリアへの進入をブロックする。そして天井走行車は、特定エリア内で前進と後退を繰り返しながら、移載手順を実行する。天井走行車が特定エリアから脱出すると、その旨を搬送車コントローラに報告し、搬送車コントローラは特定エリアのブロックを解除する。   FIG. 6 shows an example in which conveyance in a specific area having a load port and a plurality of buffers is controlled by a conveyance vehicle controller. The carrier controller checks the status of the buffer and the load port, and thereby creates a procedure for transferring the article. This procedure is, for example, that of FIG. 4 or FIG. This procedure is assigned to the overhead traveling vehicle as a conveyance command. When the overhead traveling vehicle to which the conveyance command is assigned arrives at the confirmation area, it reports to the conveyance vehicle controller that it has arrived at the confirmation area. The carrier controller determines whether the specific area is empty or blocked by the preceding overhead traveling vehicle (whether the preceding overhead traveling vehicle is located), and if it is empty, permits entry into the specific area, Block entry into specific areas for subsequent vehicles. Then, the overhead traveling vehicle executes the transfer procedure while repeating the forward and backward movements within the specific area. When the overhead traveling vehicle escapes from the specific area, the fact is reported to the transport vehicle controller, and the transport vehicle controller releases the block in the specific area.

なおここでは特定エリアに天井走行車が存在することをブロックの条件としたが、天井走行車が単に特定エリアを通過するのみで、後退しない場合は、ブロックは不要である。さらに特定エリアを複数のサブブロックなどに分割し、サブブロック毎にブロッキングの制御を行って、ブロッキングする幅を狭くしても良い。   Here, the block condition is that the overhead traveling vehicle exists in the specific area. However, if the overhead traveling vehicle simply passes through the specific area and does not move backward, the block is unnecessary. Further, the specific area may be divided into a plurality of sub-blocks, and blocking control may be performed for each sub-block to narrow the blocking width.

図７に、天井走行車の自律制御により、特定エリアへの進入を制御する例を示す。天井走行車はバッファやロードポートの状況と搬送指令とを、搬送車コントローラから受信し、これに基づいて移載手順を作成する。天井走行車が確認エリア内に進入すると、例えば障害物センサのレンジをアップし、通常の例えば２倍程度の区間内に存在する先行の天井走行車を検出する。そして障害物センサが先行の天井走行車を検出しなければ、特定エリア内に障害となる天井走行車は存在しないものとして進入する。ここで例えば、特定エリア内では、先行の天井走行車から後続の天井走行車へ向けて障害物信号を送出し、先行の天井走行車を検出しやすくしても良い。特定エリア内で移載手順を実行し、これが終了すると特定エリアから脱出する。   FIG. 7 shows an example of controlling entry into a specific area by autonomous control of an overhead traveling vehicle. The overhead traveling vehicle receives the status of the buffer and the load port and the transport command from the transport vehicle controller, and creates a transfer procedure based on the received command. When the overhead traveling vehicle enters the confirmation area, for example, the range of the obstacle sensor is increased, and the preceding overhead traveling vehicle existing in a section that is, for example, about twice that of the normal traveling vehicle is detected. If the obstacle sensor does not detect the preceding overhead traveling vehicle, the overhead vehicle traveling as an obstacle does not exist in the specific area. Here, for example, in a specific area, an obstacle signal may be sent from the preceding overhead traveling vehicle to the subsequent overhead traveling vehicle to facilitate detection of the preceding overhead traveling vehicle. The transfer procedure is executed in the specific area, and when this is completed, the user exits the specific area.

図８は、曲線部を特定エリア６６とし、この区間にロードポート６２と袋小路区間６４とを設けた例を示す。なお６７は特定エリア６６の上流側の確認エリアである。一般に曲線部にはロードポートを設けることができないので、壁２０の付近に、処理装置６０を配置できないデッドスペースが生じる。このデッドスペースは、クリーンルームのコストの点からすると、かなりの無駄となる。そこで曲線部の入口側から分岐するように、袋小路区間６４を設け、直線状の袋小路区間６４に沿ってロードポート６２を設けると、壁２０のすぐ近傍にもロードポート６２を設けることができる。ロードポート６２との間で物品を移載する天井走行車６は、曲線部の入口側へ後退して脱出するので、曲線部の入口側までの範囲に渡って、後続の天井走行車と干渉する。そこで曲線部の入口から始めて、袋小路区間６４と曲線部自体を含むように特定エリア６６を設けて、壁２０のすぐ近傍にロードポート６２を設けることができるようにする。   FIG. 8 shows an example in which a curved portion is a specific area 66 and a load port 62 and a cover alley section 64 are provided in this section. Reference numeral 67 denotes a confirmation area upstream of the specific area 66. In general, since a load port cannot be provided in the curved portion, a dead space in which the processing device 60 cannot be disposed is generated in the vicinity of the wall 20. This dead space is very wasteful in terms of clean room costs. Therefore, if the bag path section 64 is provided so as to branch from the inlet side of the curved portion, and the load port 62 is provided along the straight path path 64, the load port 62 can be provided in the immediate vicinity of the wall 20. Since the overhead traveling vehicle 6 that transfers the article to and from the load port 62 moves backward to the entrance side of the curved portion and escapes, it interferes with the subsequent overhead traveling vehicle over the range up to the entrance side of the curved portion. To do. Therefore, starting from the entrance of the curved portion, the specific area 66 is provided so as to include the dead end section 64 and the curved portion itself so that the load port 62 can be provided in the immediate vicinity of the wall 20.

図９に、搬送車コントローラの制御により、特定エリア６６への走行を制御する例を示す。確認エリア６７に天井走行車が達すると、搬送車コントローラにブロックを要求する。搬送車コントローラはブロックが可能な場合、進入を許可し、特定エリアをブロックする。そして天井走行車が特定エリアから脱出すると、ブロックを解除する。なお袋小路区間６４へ進入することも、単に曲線部を走行することも、共に特定エリア６６への進入に含めるものとする。   FIG. 9 shows an example in which traveling to the specific area 66 is controlled by the control of the transport vehicle controller. When the overhead traveling vehicle reaches the confirmation area 67, the block is requested to the transport vehicle controller. If the carrier controller can block, it allows entry and blocks a specific area. When the overhead traveling vehicle escapes from the specific area, the block is released. It should be noted that both entering into the narrow path section 64 and simply traveling along the curved portion are included in the entry into the specific area 66.

図１０は、天井走行車の自律制御により特定エリアへの進入を制御する例である。天井走行車が確認エリアに進入すると、先行の天井走行車からのブロック信号の有無を検出し、特定エリアへ進入しても良いかどうかを判断する。ブロック信号としては前記のように、ダミーの障害物信号を用いても良く、あるいは天井走行車間の直接通信等を用いても良く、また自車の障害物センサのレンジを伸ばして、自車の障害物センサの信号を用いても良い。   FIG. 10 is an example of controlling entry into a specific area by autonomous control of an overhead traveling vehicle. When the overhead traveling vehicle enters the confirmation area, the presence / absence of a block signal from the preceding overhead traveling vehicle is detected to determine whether or not the overhead traveling vehicle may enter the specific area. As described above, a dummy obstacle signal may be used as the block signal, or direct communication between overhead traveling vehicles may be used, and the range of the obstacle sensor of the own vehicle is extended to You may use the signal of an obstruction sensor.

天井走行車が特定エリアに進入すると、後続の天井走行車に対してブロック信号を送出する。なおこのような信号に代えて、障害物センサのレンジを延長する場合、ブロック信号は不要である。そして特定エリアから脱出するとブロックを解除する。   When the overhead traveling vehicle enters the specific area, a block signal is transmitted to the subsequent overhead traveling vehicle. Instead of such a signal, a block signal is not necessary when extending the range of the obstacle sensor. And when you escape from the specific area, the block is released.

図１１に、ステーション７２ａ〜７２ｃに対して待機区間７４，７５を設け、確認エリア７６等を用いて、衝突を回避するようにした変形例を示す。図において、７０はカセットなどの搬送物品のストッカで、例えば３つのステーション７２ａ〜７２ｃが直列に設けられている。本線となる周回軌道４から引き込み線８０を介して、ステーション区間７３が分岐し、その両側もしくは片側に待機区間７４，７５が設けられ、ステーション区間７３は引き込み線８１を介して周回軌道４へ接続されている。７８は分岐ポイント、７９は合流ポイントで、これらのポイントの走行は、従来例と同様に搬送車コントローラ８により天井走行車に許可される。７６は確認エリアで、引き込み線８０へ進入する前に天井走行車は、待機区間７４からステーション区間７３へ進入しようとする天井走行車の有無と、ステーション区間７３での天井走行車の有無、及び待機区間７５からステーション区間７３へ後退しようとする天井走行車の有無を確認する。これ以外の点では、図１〜図１０の実施例や変形例と同様で、図１１での前進方向を矢印で示す。   FIG. 11 shows a modification in which standby sections 74 and 75 are provided for the stations 72a to 72c, and a collision is avoided by using the confirmation area 76 or the like. In the figure, reference numeral 70 denotes a stocker of a transported article such as a cassette, and for example, three stations 72a to 72c are provided in series. The station section 73 branches from the circuit track 4 serving as the main line through the lead-in line 80, and standby sections 74 and 75 are provided on both sides or one side thereof. The station section 73 is connected to the circuit track 4 through the service line 81. Has been. 78 is a branch point, 79 is a junction point, and the traveling of these points is permitted to the overhead traveling vehicle by the carrier controller 8 as in the conventional example. 76 is a confirmation area, and before entering the lead-in line 80, the overhead traveling vehicle has an overhead traveling vehicle that attempts to enter the station section 73 from the standby section 74, the presence or absence of the overhead traveling vehicle in the station section 73, and The presence or absence of an overhead traveling vehicle that is about to retreat from the standby section 75 to the station section 73 is confirmed. Except this point, it is the same as that of the Example and modification of FIGS. 1-10, and the advance direction in FIG. 11 is shown by the arrow.

図１１の変形例では、確認エリア７６で、ステーション区間７３での天井走行車の有無や、待機区間７４からステーション区間７３へ前進しようとする天井走行車の有無、及び待機区間７５からステーション区間７３へ後退しようとする天井走行車の有無を確認し、これらが存在する場合、引き込み線８０側へは走行しない。次にステーション区間７３の天井走行車６ｂは、待機区間７４へ後退する前に、待機区間７４での天井走行車６ａの有無を確認する。同様に待機区間７５の天井走行車は、ステーション区間７３へ後退する前に、ステーション区間７３での天井走行車６ｂの有無を確認する。このようにしてストッカ７０へカセットを荷下ろしして搬送予定のない天井走行車を、待機区間７４，７５で待機させることができ、ステーション７２ａ〜７２ｃにカセットが出庫されると、直ちに搬送を開始できる。   In the modification of FIG. 11, in the confirmation area 76, the presence or absence of an overhead traveling vehicle in the station section 73, the presence or absence of an overhead traveling vehicle trying to advance from the standby section 74 to the station section 73, and the standby section 75 to the station section 73. The presence or absence of an overhead traveling vehicle that is about to move backward is confirmed, and if these vehicles exist, the vehicle does not travel to the lead-in line 80 side. Next, before the overhead traveling vehicle 6 b in the station section 73 moves back to the standby section 74, the presence or absence of the overhead traveling vehicle 6 a in the standby section 74 is confirmed. Similarly, before the overhead traveling vehicle in the standby section 75 moves backward to the station section 73, the presence or absence of the overhead traveling vehicle 6b in the station section 73 is confirmed. In this way, the overhead traveling vehicle which is not scheduled to be transported by unloading the cassette to the stocker 70 can be made to stand by in the standby sections 74 and 75, and when the cassette is delivered to the stations 72a to 72c, the transport is immediately started. it can.

実施例ではポートとして、処理装置のロードポートを示したが、ポートの種類自体は任意である。また実施例では天井走行車を例としたが、地上走行の有軌道台車などでも同様である。
In the embodiment, the load port of the processing apparatus is shown as the port, but the type of the port itself is arbitrary. Moreover, although the overhead traveling vehicle is taken as an example in the embodiment, the same applies to a track vehicle with ground traveling.

実施例の搬送車システムのレイアウトを模式的に示す図The figure which shows the layout of the carrier system of an Example typically ロードポート付近の特定エリアとその上流側の確認エリアとを示す平面図Plan view showing a specific area near the load port and a confirmation area upstream. 天井走行車と、ロードポートとバッファとの配置を示す正面図Front view showing the arrangement of overhead traveling vehicles, load ports and buffers 特定エリアでの実施例の移載手順を示す図The figure which shows the transfer procedure of the execution example in the specific area 変形例での移載手順を示す図The figure which shows the transfer procedure in a modification コントローラの制御による搬送アルゴリズムを示すフローチャートFlow chart showing the transfer algorithm under the control of the controller 搬送車の自律制御による搬送アルゴリズムを示すフローチャートFlow chart showing transport algorithm by autonomous control of transport vehicle 曲線部付近の特定エリアとその上流側の確認エリアとを示す平面図A plan view showing a specific area near the curved portion and a confirmation area upstream thereof コントローラの制御による特定エリアのブロックアルゴリズムを示すフローチャートFlow chart showing block algorithm for specific area under controller control 搬送車の自律制御による搬送アルゴリズムを示すフローチャートFlow chart showing transport algorithm by autonomous control of transport vehicle 他の変形例のレイアウトを示す要部平面図The principal part top view which shows the layout of another modification

符号の説明Explanation of symbols

２ 天井走行車システム
４ 周回軌道
６ 天井走行車
８ 搬送車コントローラ
１０，１１ 処理装置
１２，１４ ロードポート
１６，１８ バッファ
２０ 壁
２２ 曲線エリア
２４ 袋小路区間
２６，２８ 特定エリア
２７，２９ 確認エリア
３２，３４，３６ ファイル
３８ 障害物センサ
４０ 障害物信号送出部
４２ 処理装置
４４ ロードポート
４６ バッファ
４８ 特定エリア
４９ 確認エリア
５０ 走行台車
５２ 横送り装置
５４ 昇降駆動部
５６ 昇降台
５８ カセット
６２ ロードポート
６４ 袋小路区間
６６ 特定エリア
６７ 確認エリア
７０ ストッカ
７２ａ〜７２ｃ ステーション
７３ ステーション区間
７４，７５ 待機区間
７６ 確認エリア
７８ 分岐ポイント
７９ 合流ポイント
８０，８１ 引き込み線 2 Overhead traveling vehicle system 4 Circulating track 6 Overhead traveling vehicle 8 Transport vehicle controller 10, 11 Processing device 12, 14 Load port 16, 18 Buffer 20 Wall 22 Curved area 24 Bag path section 26, 28 Specific area 27, 29 Confirmation area 32, 34, 36 File 38 Obstacle sensor 40 Obstacle signal sending unit 42 Processing device 44 Load port 46 Buffer 48 Specific area 49 Confirmation area 50 Traveling carriage 52 Transverse feeding device 54 Lifting drive unit 56 Lifting table 58 Cassette 62 Load port 64 Bag path section 66 Specific area 67 Confirmation area 70 Stocker 72a-72c Station 73 Station section 74, 75 Standby section 76 Confirmation area 78 Branch point 79 Junction point 80, 81 Lead-in line

Claims (3)

搬送車を軌道に沿って周回走行させて物品を搬送し、搬送車とポートとの間で物品を移載するシステムにおいて、
搬送車の後退が認められかつポートを含むエリアを、搬送車の軌道の一部に特定エリアとして設けると共に、
前記特定エリアで搬送車が後退する際に、後続の搬送車が待機するための確認エリアを、前記特定エリアの上流側に設けたことを特徴とする、搬送車システム。 In a system for transporting articles by moving the transport vehicle around the track and transferring the articles between the transport vehicle and the port,
An area where the carriage is allowed to move backward and includes a port is provided as a specific area in a part of the carriage's track,
A transport vehicle system, wherein a confirmation area for a subsequent transport vehicle to wait when the transport vehicle moves backward in the specific area is provided on the upstream side of the specific area. ポートの下流側にバッファを設けたエリアを前記特定エリアとし、かつポートの下流側のバッファに搬送車が搬送してきた物品を荷下ろしし、搬送車が前記ポートへ後退して、該ポートの物品を荷積みして搬送するように搬送車を制御するための制御手段、を設けたことを特徴とする、請求項１の搬送車システム。 An area provided with a buffer on the downstream side of the port is defined as the specific area, and the article transported by the transport vehicle is unloaded to the buffer on the downstream side of the port. 2. The transport vehicle system according to claim 1, further comprising control means for controlling the transport vehicle so that the transport vehicle is loaded and transported. 軌道の曲線部分岐する直線状の袋小路区間を設けて、該袋小路区間にポートを設け、前記曲線部と袋小路区間を前記特定エリアとしたことを特徴とする、請求項１の搬送車システム。
The transport vehicle system according to claim 1, wherein a linear bag path section that branches a curved section of the track is provided, a port is provided in the bag path section, and the curved section and the bag path section are defined as the specific area.
JP2004303083A 2004-10-18 2004-10-18 Transport vehicle system Expired - Fee Related JP4281065B2 (en)

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