JP2006075761A - Washing jig and washing method - Google Patents

Washing jig and washing method Download PDF

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JP2006075761A
JP2006075761A JP2004263743A JP2004263743A JP2006075761A JP 2006075761 A JP2006075761 A JP 2006075761A JP 2004263743 A JP2004263743 A JP 2004263743A JP 2004263743 A JP2004263743 A JP 2004263743A JP 2006075761 A JP2006075761 A JP 2006075761A
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hole
cleaning
cleaned
ball lens
holes
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Koichi Ohara
孝一 大原
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Olympus Corp
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Olympus Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing tool and a washing method for a sphere capable of evenly washing a sphere in a short time by preferably applying ultrasonic wave to the entire body of a spherical object to be washed. <P>SOLUTION: The washing tool 1 is connected to an elevating apparatus (not illustrated) and joined to the tip end of a rod that can swing up and down, and the tool 1 is provided with a holding plate part 10 having a plurality of through-holes 8 formed to insert ball lenses 6 into, rectangularly formed and made of a rectangular resin or the like and a round rod member (a supporting part and an axial member) 11 for preventing the ball lenses 6 inserted into the respective through-holes 8 from dropping down to a washing tank. The through-holes 8 are formed to have a radius smaller than the diameter of the ball lenses 6 and an inner diameter with a circular cross-sectional shape larger than the diameter of the ball lenses 6 and extended linearly in the thickness direction of the holding plate part 10. The through-holes 8 are arranged in a manner that six other through-holes 8 adjacently surround one through-hole 8 and the straight lines connecting the centers of the respective through-holes 8 are crossed at about 60 degree inclination. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、球体用洗浄治具と洗浄方法に関する。   The present invention relates to a spherical cleaning jig and a cleaning method.

洗浄液中に浸漬させた球体の被洗浄物の洗浄には、洗浄槽の底面に装着した振動子から発生させた超音波による超音波洗浄が広く行われている。この際に被洗浄物を保持するための超音波洗浄用治具が種々提案されている（例えば、特許文献１参照。）。   For cleaning a spherical object to be cleaned immersed in a cleaning liquid, ultrasonic cleaning using ultrasonic waves generated from a vibrator mounted on the bottom surface of a cleaning tank is widely performed. Various ultrasonic cleaning jigs for holding an object to be cleaned at this time have been proposed (see, for example, Patent Document 1).

しかしながら、上記従来の技術では、保持部内に被洗浄物を載置した場合、洗浄槽の下方から上方に向かって発生させた超音波を被洗浄物自身と保持板部とが遮断してしまい、液面で下方に反射される超音波が不十分となって洗浄物の上面側の洗浄を十分に行うことができないという問題がある。一方、超音波を貫通させる貫通孔の面積を増大させた場合には、保持板部における一つの保持凹部が占有する領域が増大して、被洗浄物を一度に多量に洗浄することができない。
また、洗浄後に治具を液面から洗浄槽上方に引き上げる際、洗浄液が保持板部の上面平面部や被洗浄物を保持する段差平面部、被洗浄物と段差平面部との接触部分に溜まりやすく、液切りしにくいという課題がある。 However, in the conventional technique, when the object to be cleaned is placed in the holding part, the object to be cleaned and the holding plate part block the ultrasonic wave generated from the lower side to the upper side of the cleaning tank, There is a problem that the ultrasonic wave reflected downward on the liquid surface is insufficient and the upper surface side of the cleaning object cannot be sufficiently cleaned. On the other hand, when the area of the through-hole through which the ultrasonic wave penetrates is increased, the area occupied by one holding recess in the holding plate increases, and the object to be cleaned cannot be cleaned in large quantities at a time.
In addition, when the jig is lifted from the liquid surface to the upper side of the cleaning tank after cleaning, the cleaning liquid accumulates on the upper surface flat part of the holding plate part, the step flat part holding the object to be cleaned, and the contact part between the object to be cleaned and the step flat part. There is a problem that it is easy and difficult to drain.

さらに、被洗浄物の収納時、被洗浄物が治具の上面よりも上方に突出してしまうので、被洗浄物を収容した状態で搬送する場合や揺動する場合に発生する振動によって被洗浄物が治具から飛び出してしまう恐れがある。また、治具を上下方向に重ねた状態で洗浄することができず、生産性の向上を図ることが困難であった。
特開２００４−６６１１０号公報（第１、４、５、及び、８図） Further, when the object to be cleaned is stored, the object to be cleaned protrudes above the upper surface of the jig, so that the object to be cleaned is caused by vibration generated when the object to be cleaned is transported or swung. May jump out of the jig. Moreover, it was difficult to clean the jigs stacked in the vertical direction, and it was difficult to improve productivity.
Japanese Patent Laying-Open No. 2004-66110 (FIGS. 1, 4, 5, and 8)

本発明は上記事情に鑑みて成されたものであり、球体の被洗浄物の全体に超音波を好適に作用して、短時間で一様に洗浄可能な球体用洗浄治具と洗浄方法とを提供することを目的とする。   The present invention has been made in view of the above circumstances, and a sphere cleaning jig and a cleaning method capable of uniformly cleaning in a short time by suitably applying ultrasonic waves to the entire object to be cleaned. The purpose is to provide.

本発明は、上記課題を解決するため、以下の手段を採用する。
本発明に係る洗浄治具は、球体の被洗浄物を流体で洗浄する際に、被洗浄物を保持する洗浄治具であって、前記被洗浄物が挿入可能に設けられた貫通孔を有する保持板部と、前記貫通孔の何れか一方の開口部に係る周端部から中心部に向けて配されて、前記貫通孔内に挿入された前記被洗浄物の脱落を阻止する支持部とを備え、前記貫通孔の内周面の一点と、前記支持部の一点との二点で前記被洗浄物と接してこれを保持することを特徴とする。 The present invention employs the following means in order to solve the above problems.
A cleaning jig according to the present invention is a cleaning jig for holding an object to be cleaned when a spherical object to be cleaned is cleaned with a fluid, and has a through hole in which the object to be cleaned can be inserted. A holding plate portion, and a support portion that is arranged from the peripheral end portion of the through hole to the center portion and that prevents the object to be cleaned inserted into the through hole from dropping off. And is in contact with the object to be cleaned at two points, one point on the inner peripheral surface of the through hole and one point on the support part.

また、本発明に係る洗浄方法は、球体の被洗浄物を流体で洗浄する洗浄方法であって、前記被洗浄物を挿入可能に保持板部に設けられた貫通孔に前記被洗浄物を挿入し、前記貫通孔の内周面の一点と、前記貫通孔の何れか一方の開口部に係る周端部から中心部に向けて配されて、前記貫通孔内に挿入された前記被洗浄物の脱落を阻止する支持部の一点との二点で前記被洗浄物と接してこれを保持しながら前記流体を流動させることを特徴とする。   The cleaning method according to the present invention is a cleaning method for cleaning a spherical object to be cleaned with a fluid, and the object to be cleaned is inserted into a through-hole provided in a holding plate portion so that the object can be inserted. And the said to-be-cleaned object distribute | arranged toward the center part from one point of the internal peripheral surface of the said through-hole, and the peripheral edge part which concerns on any one opening part of the said through-hole, and was inserted in the said through-hole The fluid is caused to flow while being in contact with and holding the object to be cleaned at two points with one point of the support part for preventing the drop-off of the liquid.

この洗浄治具は、球体の被洗浄物を流体で洗浄する際に、被洗浄物を貫通孔の内周面の一点と支持部の一点との二点で支持するので、流体流動下の貫通孔内で支持部との接触点回りに内周面に沿って被洗浄物を容易に転動させることができる。この際、被洗浄物と貫通孔の内周面とが一点でのみ接触しているので、洗浄槽の下方から伝達した超音波を貫通孔と被洗浄物との隙間から減衰を抑えて上面側に伝達させることができ、被洗浄物の上面側を好適に洗浄することができる。
また、洗浄終了時に保持板部を液体から引き上げる際、貫通孔を通して保持板部及び被洗浄物に付着した流体を好適に流し去ることができ、かつ、被洗浄物を容易に転動させることができ、保持板部からの液切れを短時間で行うことができる。
さらに、保持板部の板厚を被洗浄物の直径よりも大きいものとしたとき、被洗浄物を保持板部から突出することなく収容することができ、被洗浄物を収容した状態で洗浄治具を重ねることができる。 This cleaning jig supports the object to be cleaned at two points, that is, one point of the inner peripheral surface of the through hole and one point of the support portion when cleaning the object to be cleaned with a fluid. The object to be cleaned can be easily rolled along the inner peripheral surface around the contact point with the support portion in the hole. At this time, since the object to be cleaned and the inner peripheral surface of the through hole are in contact with each other only at one point, the ultrasonic wave transmitted from below the cleaning tank is suppressed from being attenuated from the gap between the through hole and the object to be cleaned. Therefore, the upper surface side of the object to be cleaned can be suitably cleaned.
Further, when the holding plate portion is pulled up from the liquid at the end of cleaning, the fluid adhering to the holding plate portion and the object to be cleaned can be suitably washed out through the through hole, and the object to be cleaned can be easily rolled. The liquid from the holding plate can be drained in a short time.
Further, when the thickness of the holding plate portion is larger than the diameter of the object to be cleaned, the object to be cleaned can be stored without protruding from the holding plate portion, and the cleaning treatment can be performed in a state where the object to be cleaned is stored. You can stack ingredients.

また、本発明に係る洗浄治具は、前記洗浄治具であって、前記支持部と前記貫通孔の内周面との最大距離が、前記被洗浄物の直径よりも小さく、かつ、前記貫通孔の内径が前記被洗浄物の直径よりも大きく形成されていることを特徴とする。
この洗浄治具は、被洗浄物を貫通孔内に収容した場合、貫通孔の内周面の一点と、支持部の一点との二点で被洗浄物と接してこれを保持することができる。 The cleaning jig according to the present invention is the cleaning jig, wherein a maximum distance between the support portion and the inner peripheral surface of the through hole is smaller than a diameter of the object to be cleaned, and the penetration The inner diameter of the hole is larger than the diameter of the object to be cleaned.
When the object to be cleaned is accommodated in the through hole, the cleaning jig can contact and hold the object to be cleaned at two points, one point on the inner peripheral surface of the through hole and one point on the support portion. .

また、本発明に係る洗浄治具は、前記洗浄治具であって、前記支持部が、軸部材を備えていることを特徴とする。
この洗浄治具は、軸部材を貫通孔の開口部の中心部を横断するように配することによって、容易に支持部を設けることができ、被洗浄物と軸部材とを容易に一点で接触させることができる。 The cleaning jig according to the present invention is the cleaning jig, wherein the support portion includes a shaft member.
In this cleaning jig, the shaft member is arranged so as to cross the central portion of the opening of the through hole, so that the support portion can be easily provided, and the object to be cleaned and the shaft member can be easily contacted at one point. Can be made.

また、本発明に係る洗浄治具は、前記洗浄治具であって、前記支持部が、前記貫通孔の中心軸方向に沿って前記軸部材から立設する突出部を備えていることを特徴とする。
この洗浄治具は、突出部に被洗浄物を当接させることによって、軸部材の延びる方向にかかわらず任意の方向に被洗浄物を容易に傾けて、貫通孔の内周面に当接させることができる。 Further, the cleaning jig according to the present invention is the cleaning jig, wherein the support portion includes a protruding portion standing from the shaft member along a central axis direction of the through hole. And
In this cleaning jig, the object to be cleaned is brought into contact with the projecting portion, so that the object to be cleaned can be easily tilted in any direction regardless of the extending direction of the shaft member and brought into contact with the inner peripheral surface of the through hole. be able to.

また、本発明に係る洗浄治具は、前記洗浄治具であって、前記流体を通過可能な液切り孔が、前記貫通孔に沿って配されていることを特徴とする。
この洗浄治具は、保持板部を流体から取り出す際に、貫通孔からのみならず液切り孔からも流体を容易に通過させることができ、被洗浄物からの洗浄液等の液体の除去を容易に、かつ、短時間に行うことができる。 Further, the cleaning jig according to the present invention is the cleaning jig, wherein a liquid draining hole capable of passing the fluid is arranged along the through hole.
This cleaning jig allows the fluid to easily pass through not only the through hole but also the liquid draining hole when removing the holding plate part from the fluid, so that it is easy to remove liquid such as cleaning liquid from the object to be cleaned. Moreover, it can be performed in a short time.

また、本発明に係る洗浄治具は、前記洗浄治具であって、複数の前記貫通孔が、互いに隣接して列状に配されていることを特徴とする。
この洗浄治具は、限られた保持板部の面積内に多数の貫通孔を配することができ、より多くの被洗浄物を配して洗浄効率を向上することができる。 The cleaning jig according to the present invention is the cleaning jig, wherein the plurality of through holes are arranged in a row adjacent to each other.
In this cleaning jig, a large number of through holes can be arranged within a limited area of the holding plate portion, and more cleaning objects can be arranged to improve the cleaning efficiency.

本発明に係る洗浄方法は、前記洗浄方法であって、前記流動が超音波によって行われるものであることを特徴とする。
この洗浄方法は、貫通孔を貫通して超音波振動を伝達することができ、また、超音波振動によって、被洗浄物を支持部回りに容易に転動させることができ、被洗浄物の表面を一様に効率よく洗浄することができる。 The cleaning method according to the present invention is the cleaning method described above, wherein the flow is performed by ultrasonic waves.
In this cleaning method, ultrasonic vibration can be transmitted through the through hole, and the object to be cleaned can be easily rolled around the support portion by the ultrasonic vibration. Can be cleaned uniformly and efficiently.

本発明によれば、球状の被洗浄物の表面を短時間で、かつ、一様に洗浄することができ、被洗浄物に良好な洗浄力を付与することができる。   ADVANTAGE OF THE INVENTION According to this invention, the surface of a spherical to-be-washed | cleaned object can be wash | cleaned uniformly for a short time, and favorable cleaning power can be provided to a to-be-washed | cleaned object.

本発明に係る第１の実施形態について、図１及び図２を参照して説明する。
本実施形態に係る洗浄治具１は、図１に示すように、洗浄液（流体）２が貯留された洗浄槽３内で超音波振動子５から超音波を印加して球体のボールレンズ（被洗浄物）６を洗浄する際に、ボールレンズ６を保持するものとされている。 A first embodiment according to the present invention will be described with reference to FIGS. 1 and 2.
As shown in FIG. 1, the cleaning jig 1 according to the present embodiment applies a ultrasonic wave from an ultrasonic vibrator 5 in a cleaning tank 3 in which a cleaning liquid (fluid) 2 is stored, so When the cleaning object 6 is cleaned, the ball lens 6 is held.

この洗浄治具１は、図示しない昇降装置と接続されて上下方向に揺動可能なロッド７の先端に連結されており、図２（ａ）（ｂ）に示すように、ボールレンズ６が挿入可能に設けられた複数の貫通孔８を有して矩形状で樹脂等からなる保持板部１０と、各貫通孔８内に挿入されたボールレンズ６が洗浄槽３の下方へ脱落するのを阻止する丸棒部材（支持部、軸部材）１１とを備えている。   This cleaning jig 1 is connected to the tip of a rod 7 that is connected to a lifting device (not shown) and can swing in the vertical direction, and a ball lens 6 is inserted as shown in FIGS. A rectangular holding plate 10 made of resin or the like having a plurality of through holes 8 that can be provided, and the ball lens 6 inserted into each through hole 8 are dropped below the cleaning tank 3. A round bar member (supporting part, shaft member) 11 for blocking is provided.

貫通孔８は、半径がボールレンズ６の直径よりも小さく、かつ、内径がボールレンズ６の直径よりも大きい円形断面とされ、下方側開口部８Ａから上方側開口部８Ｂに向けて保持板部１０の板厚方向に直線状に延びて形成されている。これらの貫通孔８は、一つの貫通孔８の周りに６つの他の貫通孔８が隣接し、それぞれの貫通孔８の中心同士を結ぶ直線が略６０度の傾きで交差するように配されている。   The through-hole 8 has a circular cross section with a radius smaller than the diameter of the ball lens 6 and an inner diameter larger than the diameter of the ball lens 6, and the holding plate portion is directed from the lower opening 8 </ b> A toward the upper opening 8 </ b> B. 10 are formed extending linearly in the plate thickness direction. These through-holes 8 are arranged such that six other through-holes 8 are adjacent to each other around one through-hole 8 and a straight line connecting the centers of the respective through-holes 8 intersects with an inclination of approximately 60 degrees. ing.

丸棒部材１１は、例えば、保持板部１０の横方向に並ぶ貫通孔８同士を一つの貫通孔列１２としたときに、貫通孔列１２毎に、各貫通孔８の下方側開口部８Ａの周端部から中心部を通過するように保持板部１０に圧入されて配されている。
保持板部１０の板厚、及び、丸棒部材１１の直径は、貫通孔８内にボールレンズ６を挿入して丸棒部材１１に当接させた際に、貫通孔の上方側開口部８Ｂからボールレンズ６が突出しないように調整されている。
従って、ボールレンズ６を貫通孔８に挿入した際、貫通孔８の内周面８Ｃの一点と、丸棒部材１１の一点との二点でボールレンズ６と接してこれを保持することとなる。 For example, when the through-holes 8 arranged in the lateral direction of the holding plate portion 10 form one through-hole row 12, the round bar member 11 has a lower opening 8 </ b> A of each through-hole 8 for each through-hole row 12. It is press-fitted into the holding plate portion 10 so as to pass through the central portion from the peripheral end portion.
The thickness of the holding plate portion 10 and the diameter of the round bar member 11 are such that when the ball lens 6 is inserted into the through hole 8 and brought into contact with the round bar member 11, the upper opening 8B of the through hole is formed. The ball lens 6 is adjusted so as not to protrude.
Therefore, when the ball lens 6 is inserted into the through hole 8, the ball lens 6 is brought into contact with and held at two points, that is, one point of the inner peripheral surface 8C of the through hole 8 and one point of the round bar member 11. .

次に、本実施形態に係る洗浄治具１による洗浄方法について説明する。
まず、ボールレンズ６を保持板部１０の各貫通孔８内に上方側開口部８Ｂから挿入する。
このとき、図２（ａ）（ｂ）に示すように、ボールレンズ６は、貫通孔８の内周面８Ｃの一点と、丸棒部材１１の一点との二点で洗浄治具１と接して保持される。 Next, a cleaning method using the cleaning jig 1 according to the present embodiment will be described.
First, the ball lens 6 is inserted into each through hole 8 of the holding plate part 10 from the upper opening 8B.
At this time, as shown in FIGS. 2A and 2B, the ball lens 6 is in contact with the cleaning jig 1 at two points, one point of the inner peripheral surface 8C of the through hole 8 and one point of the round bar member 11. Held.

この状態の洗浄治具１をロッド７の先端に連結し、図示しない昇降装置を駆動して洗浄液２が貯留された洗浄槽３内に浸漬させた後、超音波振動子５によって洗浄液２に超音波を印加する。
この超音波によって振動状態とされた洗浄液２がボールレンズ６の表面に当たってボールレンズ６を洗浄する。
この際、ボールレンズ６と丸棒部材１１によって塞がれた部分以外の貫通孔８を超音波が下方側から上方側に通過していく。そして、超音波が洗浄液２の液面に到達して下方に反射する。 The cleaning jig 1 in this state is connected to the tip of the rod 7, and a lifting device (not shown) is driven to immerse the cleaning jig 2 in the cleaning tank 3 in which the cleaning liquid 2 is stored. Apply sound waves.
The cleaning liquid 2 that has been vibrated by the ultrasonic waves hits the surface of the ball lens 6 to clean the ball lens 6.
At this time, the ultrasonic wave passes from the lower side to the upper side through the through hole 8 other than the portion blocked by the ball lens 6 and the round bar member 11. Then, the ultrasonic waves reach the liquid surface of the cleaning liquid 2 and are reflected downward.

このとき、ボールレンズ６が貫通孔８内で保持されつつ、洗浄治具１とは二点でのみ接しているので、ボールレンズ６が貫通孔８内で不安定な状態とされている。従って、洗浄液２の上下方向からの流動によってボールレンズ６が貫通孔８内で転動してボールレンズ６に洗浄液２が満遍なく接して洗浄される。   At this time, since the ball lens 6 is held in the through hole 8 and is in contact with the cleaning jig 1 only at two points, the ball lens 6 is in an unstable state in the through hole 8. Accordingly, the ball lens 6 rolls in the through-hole 8 due to the flow of the cleaning liquid 2 from above and below, and the cleaning liquid 2 contacts the ball lens 6 evenly and is cleaned.

ボールレンズ６の洗浄を終了する際には、図示しない昇降装置を駆動してロッド７を引き上げて、ボールレンズ６を収容した状態の洗浄治具１を洗浄槽３から取り出す。
このとき、保持板部１０の上面に滞留した洗浄液２は、貫通孔８から下方に流れ落ちていくため、洗浄液２が保持板部１０上に残留することがない。また、ボールレンズ６が貫通孔８内で容易に転動するため、表面に付着した洗浄液２も容易に下方に流れ落ちる。
一方、洗浄治具１を引き上げた状態でもボールレンズ６は各貫通孔８内に収容されているので、保持板部１０が多少傾いても、ボールレンズ６同士が接触したりボールレンズ６が貫通孔８から落下するようなこともない。 When finishing the cleaning of the ball lens 6, the lifting device (not shown) is driven to pull up the rod 7, and the cleaning jig 1 containing the ball lens 6 is taken out from the cleaning tank 3.
At this time, the cleaning liquid 2 staying on the upper surface of the holding plate portion 10 flows downward from the through hole 8, so that the cleaning liquid 2 does not remain on the holding plate portion 10. Further, since the ball lens 6 easily rolls in the through hole 8, the cleaning liquid 2 adhering to the surface easily flows downward.
On the other hand, since the ball lens 6 is accommodated in each through-hole 8 even when the cleaning jig 1 is pulled up, the ball lenses 6 come into contact with each other or the ball lens 6 penetrates even if the holding plate portion 10 is slightly inclined. It does not fall from the hole 8.

この洗浄治具１及び洗浄方法によれば、ボールレンズ６を二点でのみ支持しているので、僅かな外力によって貫通孔８内で容易に転動させることができる。また、洗浄槽３の下方から伝達した超音波を貫通孔８とボールレンズ６との隙間から減衰を抑えて上面側に伝達させることができる。従って、流動する洗浄液２内でボールレンズ６を一様に洗浄することができる。   According to the cleaning jig 1 and the cleaning method, since the ball lens 6 is supported only at two points, the ball lens 6 can be easily rolled in the through hole 8 with a slight external force. In addition, the ultrasonic wave transmitted from below the cleaning tank 3 can be transmitted to the upper surface side while suppressing attenuation from the gap between the through hole 8 and the ball lens 6. Therefore, the ball lens 6 can be uniformly cleaned in the flowing cleaning liquid 2.

また、洗浄終了時に洗浄治具１を洗浄液２から引き上げる際、貫通孔８を通して保持板部１０及びボールレンズ６に付着した洗浄液２を好適に流し去ることができ、かつ、ボールレンズ６を容易に転動させることができ、ボールレンズ６や保持板部１０からの液切れを短時間で行うことができる。
さらに、ボールレンズ６を保持板部１０の貫通孔８内に挿入した際、保持板部１０の上方から突出することなく収容することができる。従って、ボールレンズ６を収容した状態で他の洗浄治具を上下に重ねることができる。 Further, when the cleaning jig 1 is pulled up from the cleaning liquid 2 at the end of cleaning, the cleaning liquid 2 attached to the holding plate portion 10 and the ball lens 6 can be suitably washed out through the through-hole 8, and the ball lens 6 can be easily removed. The liquid can be moved from the ball lens 6 and the holding plate portion 10 in a short time.
Furthermore, when the ball lens 6 is inserted into the through hole 8 of the holding plate portion 10, it can be accommodated without protruding from above the holding plate portion 10. Therefore, another cleaning jig can be stacked up and down while the ball lens 6 is accommodated.

また、支持部を丸棒部材１１としているので、保持板部１０に容易に組み付けることができボールレンズ６と丸棒部材１１とを容易に一点で接触させることができる。
また、貫通孔８が互いに隣接して複数配されているので、限られた保持板部１０の上面側面積内に多数の貫通孔８を配することができ、より多くの被洗浄物を配して洗浄効率を向上することができる。 Moreover, since the support part is the round bar member 11, it can be easily assembled to the holding plate part 10, and the ball lens 6 and the round bar member 11 can be easily brought into contact at one point.
In addition, since a plurality of through holes 8 are arranged adjacent to each other, a large number of through holes 8 can be arranged within the limited area of the upper surface of the holding plate portion 10, and more objects to be cleaned can be arranged. Thus, the cleaning efficiency can be improved.

次に、第２の実施形態について図３を参照しながら説明する。
なお、上述した第１の実施形態と同様の構成要素には同一符号を付すとともに説明を省略する。
第２の実施形態と第１の実施形態との異なる点は、本実施形態に係る洗浄治具１５の貫通孔１６が長孔形状とされている点である。 Next, a second embodiment will be described with reference to FIG.
In addition, the same code | symbol is attached | subjected to the component similar to 1st Embodiment mentioned above, and description is abbreviate | omitted.
The difference between the second embodiment and the first embodiment is that the through hole 16 of the cleaning jig 15 according to the present embodiment has a long hole shape.

貫通孔１６は、図３（ａ）（ｂ）に示すように、内周面の曲率半径が、ボールレンズ６の半径よりも大きいものとされている。
丸棒部材１１は、貫通孔１６の長径方向に延びるように保持板部１７に配されている。
この洗浄治具１５によれば、上記第１の実施形態と同様の作用・効果を奏することができる上、貫通孔１６内でのボールレンズ６の移動距離を長くすることができ、ボールレンズ６をより容易に反転させて洗浄効率を向上することができる。 As shown in FIGS. 3A and 3B, the through hole 16 has a radius of curvature of the inner peripheral surface larger than the radius of the ball lens 6.
The round bar member 11 is arranged on the holding plate portion 17 so as to extend in the major axis direction of the through hole 16.
According to the cleaning jig 15, the same operation and effect as the first embodiment can be obtained, and the moving distance of the ball lens 6 in the through hole 16 can be increased. Can be more easily inverted to improve the cleaning efficiency.

次に、第３の実施形態について図４から図６を参照しながら説明する。
なお、上述した他の実施形態と同様の構成要素には同一符号を付すとともに説明を省略する。
第３の実施形態と第１の実施形態との異なる点は、本実施形態に係る洗浄治具３０の貫通孔８が、図４（ａ）（ｂ）に示すように、保持板部３１に対して格子状に複数の貫通孔列３２を構成して配され、支持部３３が、図５（ａ）（ｂ）に示すように、各貫通孔８の下方側開口部８Ａの中心部で互いに交差するように格子状に配された角棒部材（軸部材）３５と、角棒部材３５の各交点から貫通孔８の中心軸Ｃに沿って立設する突出部３６とを備えているとした点である。 Next, a third embodiment will be described with reference to FIGS.
In addition, the same code | symbol is attached | subjected to the component similar to other embodiment mentioned above, and description is abbreviate | omitted.
The difference between the third embodiment and the first embodiment is that the through hole 8 of the cleaning jig 30 according to this embodiment is formed in the holding plate portion 31 as shown in FIGS. On the other hand, the plurality of through-hole rows 32 are arranged in a lattice pattern, and the support portion 33 is formed at the center of the lower opening 8A of each through-hole 8 as shown in FIGS. A square bar member (shaft member) 35 arranged in a lattice pattern so as to intersect with each other, and a protrusion 36 standing from the respective intersections of the square bar member 35 along the central axis C of the through hole 8 are provided. This is the point.

保持板部３１の板厚、角棒部材３５の厚さ、及び、突出部３６の貫通孔８内への突出高さは、貫通孔８内にボールレンズ６を挿入して突出部３６の先端に当接させた際に、貫通孔８の上方側開口部８Ｂからボールレンズ６が突出しないようにそれぞれ調整されている。
貫通孔８を除いた保持板部３１の残りの部分には、貫通孔８に沿って洗浄液２が上下方向に通過可能な円形断面を有する液切り孔３７がさらに配されている。 The thickness of the holding plate 31, the thickness of the square bar member 35, and the protrusion height of the protrusion 36 into the through hole 8 are determined by inserting the ball lens 6 into the through hole 8 and the tip of the protrusion 36. The ball lens 6 is adjusted so that it does not protrude from the upper opening 8B of the through hole 8 when being brought into contact with each other.
A liquid draining hole 37 having a circular cross section through which the cleaning liquid 2 can pass in the vertical direction is further provided along the through hole 8 in the remaining portion of the holding plate portion 31 excluding the through hole 8.

突出部３６の先端は半球状に形成されており、ボールレンズ６を貫通孔８に挿入した際、ボールレンズ６と一点で接触可能とされている。従って、洗浄治具３０が、貫通孔８の内周面８Ｃの一点と、突出部３６の一点との二点でボールレンズ６と接してこれを保持することとなる。なお、突出部３６の先端形状は、半球状だけに限られず、円錐状とされていても構わない。   The tip of the projecting portion 36 is formed in a hemispherical shape, and can be brought into contact with the ball lens 6 at a single point when the ball lens 6 is inserted into the through hole 8. Therefore, the cleaning jig 30 comes into contact with and holds the ball lens 6 at two points, that is, one point of the inner peripheral surface 8C of the through hole 8 and one point of the protruding portion 36. Note that the tip shape of the protrusion 36 is not limited to a hemispherical shape, and may be a conical shape.

次に、本実施形態に係る洗浄治具３０による洗浄方法について説明する。
まず、保持板部３１の各貫通孔８内に上方側開口部８Ｂからボールレンズ６を挿入する。
このとき、ボールレンズ６は、図６（ａ）（ｂ）に示すように、貫通孔８の内周面８Ｃの一点と、突出部３６の一点との二点で洗浄治具３０と接する。すなわち、図６（ｃ）に示すように、貫通孔８の中心軸Ｃと、ボールレンズ６の中心と突出部３６との接点とを結ぶ直線Ｌとが一定の角度で傾斜した状態でボールレンズ６が貫通孔８内に収容される。 Next, a cleaning method using the cleaning jig 30 according to the present embodiment will be described.
First, the ball lens 6 is inserted into each through hole 8 of the holding plate portion 31 from the upper opening 8B.
At this time, as shown in FIGS. 6A and 6B, the ball lens 6 is in contact with the cleaning jig 30 at two points, that is, one point on the inner peripheral surface 8 </ b> C of the through hole 8 and one point on the protruding portion 36. That is, as shown in FIG. 6C, the ball lens is in a state where the central axis C of the through hole 8 and the straight line L connecting the center of the ball lens 6 and the contact point of the protruding portion 36 are inclined at a certain angle. 6 is accommodated in the through hole 8.

この状態の洗浄治具３０を洗浄槽３内に浸漬させて超音波振動子５によって洗浄液２に超音波を印加する。
この超音波によって振動状態とされた洗浄液２がボールレンズ６の表面に当たってボールレンズ６を洗浄する。 The cleaning jig 30 in this state is immersed in the cleaning tank 3 and ultrasonic waves are applied to the cleaning liquid 2 by the ultrasonic vibrator 5.
The cleaning liquid 2 that has been vibrated by the ultrasonic waves hits the surface of the ball lens 6 to clean the ball lens 6.

ここで、貫通孔８のみならず、液切り孔３７が下方側開口部８Ａから上方側開口部８Ｂに向けて直線状に延びているので、貫通孔８からだけでなく、液切り孔３７からも超音波が通過する。そのため、超音波が減衰することなく洗浄液２の液面に到達して下方に反射して洗浄液２を上下方向に流動させ、ボールレンズ６を貫通孔８内で転動させて洗浄する。   Here, not only the through hole 8 but also the liquid cutting hole 37 extends linearly from the lower opening 8A toward the upper opening 8B, so that not only from the through hole 8 but also from the liquid cutting hole 37. Even ultrasonic waves pass through. Therefore, the ultrasonic wave reaches the liquid surface of the cleaning liquid 2 without being attenuated, reflects downward, causes the cleaning liquid 2 to flow in the vertical direction, and rolls the ball lens 6 in the through hole 8 for cleaning.

ボールレンズ６の洗浄を終了する際には、図示しない昇降装置によってロッド７を駆動して洗浄治具３０を引き上げて、ボールレンズ６を収容したままで洗浄治具３０を取り出す。
このとき、保持板部３１の上面に滞留した洗浄液２は、貫通孔８と液切り孔３７との両方から下方に流れ落ちていく。 When the cleaning of the ball lens 6 is finished, the rod 7 is driven by a lifting device (not shown) to pull up the cleaning jig 30, and the cleaning jig 30 is taken out while the ball lens 6 is accommodated.
At this time, the cleaning liquid 2 staying on the upper surface of the holding plate portion 31 flows down from both the through hole 8 and the liquid cutting hole 37.

この洗浄治具３０及び洗浄方法によれば、ボールレンズ６と接触する突出部３６が角棒部材３５から立設しているので、角棒部材３５の配設方向に拘わらず、ボールレンズ６を貫通孔８の中心軸Ｃに対して一定の角度で傾けて配することができ、第１の実施形態の場合よりもボールレンズ６を貫通孔８内で不安定な状態とすることができ、より容易にボールレンズ６を貫通孔８内で転動させてボールレンズ６を満遍なく洗浄することができる。
また、液切り孔３７が配されているので、貫通孔８のみの場合よりもより容易に、かつ、短時間で保持板部３１及びボールレンズ６から洗浄液を除去することができる。 According to the cleaning jig 30 and the cleaning method, since the protruding portion 36 that comes into contact with the ball lens 6 is erected from the square bar member 35, the ball lens 6 is mounted regardless of the arrangement direction of the square bar member 35. The ball lens 6 can be inclined at a certain angle with respect to the central axis C of the through hole 8, and the ball lens 6 can be made more unstable in the through hole 8 than in the first embodiment, The ball lens 6 can be more easily rolled in the through-hole 8 to clean the ball lens 6 evenly.
Further, since the liquid cutting hole 37 is provided, the cleaning liquid can be removed from the holding plate portion 31 and the ball lens 6 more easily and in a shorter time than the case of only the through hole 8.

次に、第４の実施形態について図７及び図８を参照しながら説明する。
なお、上述した他の実施形態と同様の構成要素には同一符号を付すとともに説明を省略する。
第４の実施形態と第３の実施形態との異なる点は、図７に示すように、本実施形態に係る洗浄治具４０の貫通孔８が第１の実施形態と同様に配されているとともに、角棒部材４１が、ハニカム断面状に配されているとした点である。
突出部３６は、角棒部材４１の全ての交点ではなく、一つおきに貫通孔８に合わせて配されている。
液切り孔４２は断面三角形状とされて、貫通孔８に沿って配されている。 Next, a fourth embodiment will be described with reference to FIGS.
In addition, the same code | symbol is attached | subjected to the component similar to other embodiment mentioned above, and description is abbreviate | omitted.
The difference between the fourth embodiment and the third embodiment is that, as shown in FIG. 7, the through holes 8 of the cleaning jig 40 according to this embodiment are arranged in the same manner as in the first embodiment. At the same time, the square bar members 41 are arranged in a honeycomb cross section.
The protruding portions 36 are arranged in accordance with the through-holes 8 every other one, not all the intersections of the square bar members 41.
The liquid cut hole 42 has a triangular cross section and is disposed along the through hole 8.

この洗浄治具４０の貫通孔８にボールレンズ６を挿入した場合、図８（ａ）（ｂ）に示すように、貫通孔８の内周面８Ｃの一点と、突出部３６の一点との二点で洗浄治具４０と接する状態となる。すなわち、上記第３の実施形態と同様、図８（ｃ）に示すように、貫通孔８の中心軸Ｃと、ボールレンズ６の中心と突出部３６との接点とを結ぶ直線Ｌとが一定の角度で傾斜した状態でボールレンズ６が貫通孔８内に収容される。   When the ball lens 6 is inserted into the through hole 8 of the cleaning jig 40, as shown in FIGS. 8 (a) and 8 (b), one point of the inner peripheral surface 8C of the through hole 8 and one point of the protrusion 36 are formed. At two points, the cleaning jig 40 is brought into contact. That is, as in the third embodiment, as shown in FIG. 8C, the central axis C of the through hole 8 and the straight line L connecting the center of the ball lens 6 and the contact point of the protruding portion 36 are constant. The ball lens 6 is accommodated in the through hole 8 in a state inclined at an angle of.

この洗浄治具４０によれば、上記他の実施形態と同様の作用・効果を奏することができる。さらに、角棒部材４１がハニカム断面状となるように配設されているので、貫通孔８の配列数を増やしてボールレンズ６の収容数を増加しても、ボールレンズ６を上記実施形態と同様に保持して洗浄することができ、ボールレンズ６の生産性をより高めることができる。   According to this cleaning jig 40, the same operation and effect as in the other embodiments can be obtained. Furthermore, since the square bar member 41 is disposed so as to have a honeycomb cross-sectional shape, even if the number of through-holes 8 is increased and the accommodation number of the ball lenses 6 is increased, the ball lens 6 is the same as the above embodiment. Similarly, it can be held and washed, and the productivity of the ball lens 6 can be further increased.

なお、本発明の技術範囲は上記実施の形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば、図９に示すように、保持板部５０の貫通孔８を第４の実施形態と同様に配するとともに、図１０に示すように、角棒部材５１を格子状に配して突出部３６を貫通孔８の中心部に合わせて一つおきの交点に配したものとしても構わない。
この場合、第４の実施形態と同様に液切り孔５２が断面三角形状で配されている。
このような洗浄治具５３であっても、上記他の実施形態と同様の作用・効果を奏することができる。 The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, as shown in FIG. 9, the through holes 8 of the holding plate portion 50 are arranged in the same manner as in the fourth embodiment, and as shown in FIG. 36 may be arranged at every other intersection in accordance with the center of the through hole 8.
In this case, as in the fourth embodiment, the liquid drain holes 52 are arranged in a triangular cross section.
Even with such a cleaning jig 53, the same operations and effects as those of the other embodiments can be obtained.

また、支持部が、第１の実施形態における洗浄治具１の丸棒部材１１だけでなく、各貫通孔８の中心位置に丸棒部材１１から立設する突出部３６をさらに備えているとしてもよい。さらに、軸部材が貫通孔の下方側開口部を横断するようなものだけでなく、各貫通孔の開口部毎に個別にその周端部から中心部に向けて突出する軸部材を配し、その先端に突出部を配したものとしても構わない。
また、保持板部と支持部とを一体に形成させても構わない。この場合、貫通孔と支持部とを一度に位置決めすることができ、より正確に洗浄治具とボールレンズとを二点接触させることができる。 In addition, the support portion includes not only the round bar member 11 of the cleaning jig 1 in the first embodiment but also a protrusion 36 standing from the round bar member 11 at the center position of each through hole 8. Also good. Furthermore, not only the shaft member crosses the lower side opening of the through hole, but also arranges the shaft member protruding from the peripheral end portion toward the central portion individually for each opening of each through hole, You may make it the thing which has arrange | positioned the protrusion part to the front-end | tip.
Further, the holding plate portion and the support portion may be formed integrally. In this case, the through hole and the support portion can be positioned at a time, and the cleaning jig and the ball lens can be brought into two-point contact more accurately.

また、ボールレンズを洗浄する際、図１１に示すように、揺動装置６０と接続されたロッド６１に、例えば、第１の実施形態に係る洗浄治具１を連結し、洗浄治具１に対して超音波振動子６２を通過させた洗浄液２を、超音波振動子６２と連通されて水平方向に移動可能なノズル６３から噴出させて洗浄する超音波流水洗浄を行ってもよい。
揺動装置６０は、洗浄治具１をロッド６１先端で水平状態から略４５度の角度まで傾けながら、かつ、ロッド６１を介して洗浄治具１を上下運動させるものとされている。なお、洗浄液２は、洗浄槽６５の底部から回収して繰り返し超音波振動子６２を通過するように供給される。 Further, when cleaning the ball lens, for example, the cleaning jig 1 according to the first embodiment is connected to the rod 61 connected to the swing device 60 as shown in FIG. On the other hand, the cleaning liquid 2 that has passed through the ultrasonic vibrator 62 may be ejected from a nozzle 63 that communicates with the ultrasonic vibrator 62 and can move in the horizontal direction to perform ultrasonic running water cleaning.
The swinging device 60 is configured to move the cleaning jig 1 up and down through the rod 61 while tilting the cleaning jig 1 from the horizontal state at the tip of the rod 61 to an angle of about 45 degrees. The cleaning liquid 2 is supplied from the bottom of the cleaning tank 65 so as to pass through the ultrasonic vibrator 62 repeatedly.

この洗浄方法によれば、ノズル６３の移動と洗浄治具１の揺動とを組み合わせることによって、洗浄液２をノズル６３からすべてのボールレンズに向けて均等に噴出させることができる。この際、ボールレンズが貫通孔に対して二点で接触していることから、貫通孔内でボールレンズを十分に転動させることができる。
また、洗浄治具１を通過する洗浄液２を、貫通孔を介して容易に、かつ、短時間に洗浄槽６５に貯留させて回収することができる。 According to this cleaning method, by combining the movement of the nozzle 63 and the swing of the cleaning jig 1, the cleaning liquid 2 can be evenly ejected from the nozzle 63 toward all the ball lenses. At this time, since the ball lens is in contact with the through hole at two points, the ball lens can be sufficiently rolled in the through hole.
In addition, the cleaning liquid 2 passing through the cleaning jig 1 can be easily collected through the through-hole and stored in the cleaning tank 65 in a short time and recovered.

本発明の第１の実施形態に係る洗浄治具と洗浄方法を示す説明図である。It is explanatory drawing which shows the cleaning jig | tool and cleaning method which concern on the 1st Embodiment of this invention. 本発明の第１の実施形態に係る洗浄治具にボールレンズを収容した状態を示す（ａ）上部斜視図、（ｂ）下部斜視図である。It is the (a) top perspective view and the (b) bottom perspective view which show the state where the ball lens was stored in the washing jig concerning a 1st embodiment of the present invention. 本発明の第２の実施形態に係る洗浄治具にボールレンズを収容した状態を示す（ａ）上部斜視図、（ｂ）下部斜視図である。It is (a) upper part perspective view and (b) lower part perspective view which show the state which accommodated the ball lens in the washing | cleaning jig | tool which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施形態に係る洗浄治具を示す（ａ）平面図、（ｂ）側面図である。It is the (a) top view and (b) side view which show the washing jig concerning a 3rd embodiment of the present invention. 本発明の第３の実施形態に係る洗浄治具の支持部を示す（ａ）平面図、（ｂ）側面図である。It is (a) top view and (b) side view which show the support part of the washing jig which concerns on the 3rd Embodiment of this invention. 本発明の第３の実施形態に係る洗浄治具にボールレンズを収容した状態を示す（ａ）上部斜視図、（ｂ）下部斜視図、（ｃ）側面断面図である。It is (a) upper part perspective view, (b) lower part perspective view, and (c) side sectional view which show the state where the ball lens was stored in the washing jig concerning a 3rd embodiment of the present invention. 本発明の第４の実施形態に係る洗浄治具を示す平面図である。It is a top view which shows the cleaning jig which concerns on the 4th Embodiment of this invention. 本発明の第４の実施形態に係る洗浄治具にボールレンズを収容した状態を示す（ａ）上部斜視図、（ｂ）下部斜視図、（ｃ）側面断面図である。It is the (a) upper part perspective view, (b) lower part perspective view, and (c) side sectional view which show the state where the ball lens was stored in the washing jig concerning a 4th embodiment of the present invention. 本発明の他の実施形態に係る洗浄治具を示す（ａ）平面図、（ｂ）側面図である。It is (a) top view and (b) side view which show the cleaning jig concerning other embodiments of the present invention. 本発明の他の実施形態に係る洗浄治具の支持部を示す（ａ）平面図、（ｂ）側面図である。It is (a) top view and (b) side view which show the support part of the washing jig which concerns on other embodiment of this invention. 本発明の他の実施形態に係る洗浄方法を示す説明図である。It is explanatory drawing which shows the washing | cleaning method which concerns on other embodiment of this invention.

符号の説明Explanation of symbols

１、１５、３０、４０、５３ 洗浄治具
２ 洗浄液（流体）
６ ボールレンズ（被洗浄物）
８、１６ 貫通孔
１０、１７、３１、５０ 保持板部
１１ 丸棒部材（支持部、軸部材）
３３ 支持部
３５、４１、５１ 角棒部材（軸部材）
３６ 突出部
３７、４２ 液切り孔

1, 15, 30, 40, 53 Cleaning jig 2 Cleaning liquid (fluid)
6 Ball lens (object to be cleaned)
8, 16 Through holes 10, 17, 31, 50 Holding plate portion 11 Round bar member (support portion, shaft member)
33 Supporting portions 35, 41, 51 Square bar member (shaft member)
36 Protruding part 37, 42 Liquid cutting hole

Claims (8)

球体の被洗浄物を流体で洗浄する際に、被洗浄物を保持する洗浄治具であって、
前記被洗浄物が挿入可能に設けられた貫通孔を有する保持板部と、
前記貫通孔の何れか一方の開口部に係る周端部から中心部に向けて配されて、前記貫通孔内に挿入された前記被洗浄物の脱落を阻止する支持部とを備え、
前記貫通孔の内周面の一点と、前記支持部の一点との二点で前記被洗浄物と接してこれを保持することを特徴とする洗浄治具。 A cleaning jig for holding an object to be cleaned when cleaning the object to be cleaned with a fluid,
A holding plate portion having a through hole provided so that the object to be cleaned can be inserted;
A support portion that is arranged from the peripheral end portion of the through-hole to the center portion and that is inserted into the through-hole and prevents the object to be cleaned from dropping off;
A cleaning jig, wherein the cleaning object contacts and holds the object to be cleaned at two points, one point on the inner peripheral surface of the through hole and one point on the support part. 前記支持部と前記貫通孔の内周面との最大距離が、前記被洗浄物の直径よりも小さく、かつ、前記貫通孔の内径が前記被洗浄物の直径よりも大きく形成されていることを特徴とする請求項１に記載の洗浄治具。   The maximum distance between the support portion and the inner peripheral surface of the through hole is smaller than the diameter of the object to be cleaned, and the inner diameter of the through hole is larger than the diameter of the object to be cleaned. The cleaning jig according to claim 1, wherein 前記支持部が、軸部材を備えていることを特徴とする請求項１又は２に記載の洗浄治具。   The cleaning jig according to claim 1, wherein the support portion includes a shaft member. 前記支持部が、前記貫通孔の中心軸方向に沿って前記軸部材から立設する突出部を備えていることを特徴とする請求項３に記載の洗浄治具。   4. The cleaning jig according to claim 3, wherein the support portion includes a protruding portion erected from the shaft member along a central axis direction of the through hole. 前記流体を通過可能な液切り孔が、前記貫通孔に沿って配されていることを特徴とする請求項１から４の何れか一つに記載の洗浄治具。   The cleaning jig according to any one of claims 1 to 4, wherein a liquid draining hole capable of passing the fluid is disposed along the through hole. 複数の前記貫通孔が、互いに隣接して列状に配されていることを特徴とする請求項１から５の何れか一つに記載の洗浄治具。   The cleaning jig according to claim 1, wherein the plurality of through holes are arranged adjacent to each other in a row. 球体の被洗浄物を流体で洗浄する洗浄方法であって、
前記被洗浄物を挿入可能に保持板部に設けられた貫通孔に前記被洗浄物を挿入し、
前記貫通孔の内周面の一点と、
前記貫通孔の何れか一方の開口部に係る周端部から中心部に向けて配されて、前記貫通孔内に挿入された前記被洗浄物の脱落を阻止する支持部の一点との二点で前記被洗浄物と接してこれを保持しながら前記流体を流動させることを特徴とする洗浄方法。 A cleaning method for cleaning a spherical object to be cleaned with a fluid,
Insert the object to be cleaned into a through-hole provided in the holding plate so that the object can be inserted;
A point on the inner peripheral surface of the through hole;
Two points of a support portion that is arranged from the peripheral end portion to the center portion of any one opening portion of the through-hole and that prevents the object to be cleaned inserted into the through-hole from dropping off. A cleaning method, wherein the fluid is caused to flow while contacting and holding the object to be cleaned. 前記流動が超音波によって行われるものであることを特徴とする請求項７に記載の洗浄方法。

The cleaning method according to claim 7, wherein the flow is performed by ultrasonic waves.

JP2004263743A 2004-09-10 2004-09-10 Washing jig and washing method Pending JP2006075761A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100300547A1 (en) * 2009-05-29 2010-12-02 Canon Kabushiki Kaisha Object-holding sheet, test method and object-treating equipment
JP2010276559A (en) * 2009-05-29 2010-12-09 Canon Inc System and method for observing sample
CN102366752A (en) * 2011-10-20 2012-03-07 广东中烟工业有限责任公司 Chromatographic bottle cleaning device
CN108114960A (en) * 2017-12-21 2018-06-05 安泰科技股份有限公司 Circular product is surface-treated device for cleaning
JP2018094498A (en) * 2016-12-12 2018-06-21 日本電気硝子株式会社 Production method of glass article
CN113926791A (en) * 2021-10-08 2022-01-14 陕西华经微电子股份有限公司 Adjustable cleaning clamp

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100300547A1 (en) * 2009-05-29 2010-12-02 Canon Kabushiki Kaisha Object-holding sheet, test method and object-treating equipment
JP2010276559A (en) * 2009-05-29 2010-12-09 Canon Inc System and method for observing sample
JP2010273654A (en) * 2009-05-29 2010-12-09 Canon Inc Object-holding sheet, test method, and object treatment apparatus
US9340318B2 (en) * 2009-05-29 2016-05-17 Canon Kabushiki Kaisha Object-holding sheet, test method and object-treating equipment
CN102366752A (en) * 2011-10-20 2012-03-07 广东中烟工业有限责任公司 Chromatographic bottle cleaning device
CN102366752B (en) * 2011-10-20 2013-09-11 广东中烟工业有限责任公司 Chromatographic bottle cleaning device
JP2018094498A (en) * 2016-12-12 2018-06-21 日本電気硝子株式会社 Production method of glass article
CN108114960A (en) * 2017-12-21 2018-06-05 安泰科技股份有限公司 Circular product is surface-treated device for cleaning
CN113926791A (en) * 2021-10-08 2022-01-14 陕西华经微电子股份有限公司 Adjustable cleaning clamp

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