JP2005524848A - 気圧センサ - Google Patents
気圧センサ Download PDFInfo
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- JP2005524848A JP2005524848A JP2004503910A JP2004503910A JP2005524848A JP 2005524848 A JP2005524848 A JP 2005524848A JP 2004503910 A JP2004503910 A JP 2004503910A JP 2004503910 A JP2004503910 A JP 2004503910A JP 2005524848 A JP2005524848 A JP 2005524848A
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- 239000003990 capacitor Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 29
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 8
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- 239000010703 silicon Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 239000005297 pyrex Substances 0.000 claims description 3
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- 239000012530 fluid Substances 0.000 description 5
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- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- PMRMTSSYYVAROU-UHFFFAOYSA-N [Ti].[Ni].[Au] Chemical compound [Ti].[Ni].[Au] PMRMTSSYYVAROU-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
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- 239000013590 bulk material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
- G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Description
102……基層
104……通路
106……入口
108……取付面
110……センサ層
111……棚部分
112……第1面
114……絶縁ボンド(フリット)
116……導電性ダイアフラム
120……基準層
121……メサ
122……基準真空キャビティ
123……第2メサ
124……導電性表面
126……第1絶縁層
128……第2面
130……第2絶縁層
132……第1電気的ボンディング・パッド
133……ボンド線
134……第2電気的ボンディング・パッド
136……第2通路
Claims (25)
- 圧力を受けるように適合化された導入口と基層上の取付面との通路を取り囲む基層と、
前記取付面に絶縁ボンドで接合された第1面を有し、通路に整列された導電性ダイアフラムを含んでいるセンサ層と、
前記センサ層上に取り付けられて導電性ダイアフラムの直線上にある基準真空キャビティを形成し、基準真空コンデンサを横切って導電性ダイアフラムと向き合って圧力検出コンデンサを形成する導電性表面を含む基準層とからなる圧力センサ。 - 前記絶縁ボンドがガラスフリット層を備えていることを特徴とする請求項1の圧力センサ。
- 前記導電性ダイアフラムが酸化層を備えていることを特徴とする請求項1の圧力センサ。
- 過圧力条件に於いて導電性表面が前記酸化層を支持することを特徴とする請求項3の圧力センサ。
- 前記センサ層がさらに前記導電性ダイアフラムを取り囲む第2面上の第1絶縁層を含んでおり、前記基準層がさらに前記第1絶縁層に接着された第2絶縁層を含んでいることを特徴とする請求項1の圧力センサ。
- 前記第2絶縁層がマスクされた形状を形成するようにマスクされており且つ前記基準層もまた前記第2絶縁層に対向した第3絶縁層をも含んでおり、この第3絶縁層は前記第2絶縁層と実質的に同じマスク形状にマスクされることを特徴とする請求項5の圧力センサ。
- 前記基準層と前記センサ層が珪素を含んでおり且つ前記第1および第2絶縁層がニ酸化珪素を含んでいて互いに融解接着されていることを特徴とする請求項5の圧力センサ。
- 前記基準層がパイレックス(登録商標)ガラスを備えており且つセンサ層に陽極接着されていることを特徴とする請求項1の圧力センサ。
- 前記センサ層上に配置され且つ圧力検出コンデンサに接続された第1電気的ボンディング・パッドをさらに備えていることを特徴とする請求項1の圧力センサ。
- 圧力検出コンデンサに接続された第2電気的ボンディング・パッドをさらに備えていることを特徴とする請求項9の圧力センサ。
- 前記第1電気的ボンディング・パッドがセンサ層と電気的に接触しており、また前記第2電気的ボンディング・パッドが前記センサ層上の熱分解酸化絶縁チャネル上に配置され且つ前記導電性表面と電気的に接触していることを特徴とする請求項10の圧力センサ。
- 前記センサ層がさらに前記基準真空キャビティから前記絶縁ボンドまで伸びた第2の通路を備えていることを特徴とする請求項1の圧力センサ。
- 前記第2通路がレーザードリル穴であることを特徴とする請求項12の圧力センサ。
- 前記基準真空キャビティが前記レーザードリル穴に至る袋小路を含んだ形状であることを特徴とする請求項13の圧力センサ。
- 前記袋小路が少なくとも90度の回転角を含んでいることを特徴とする請求項14の圧力センサ。
- 前記基準層が前記センサ層と向き合う溝を少なくとも一つ含んでいることを特徴とする請求項1の圧力センサ。
- 前記基準層が前記導電性ダイアフラムと向き合うメサを含んでいることを特徴とする請求項1の圧力センサ。
- 前記センサ層が前記基準層を超えて伸びる棚部分を含んでおり、少なくとも1個の電気的ボンディング・パッドがその棚部分上に配置されていることを特徴とする請求項1の圧力センサ。
- 前記圧力センサが少なくとも0.9から1.1気圧の動作範囲を持つ気圧センサであることを特徴とする請求項1の圧力センサ。
- 気圧センサを含んでいるゲージ圧伝送器であって、前記気圧センサが、
圧力を受けるように適合化された入口とその基層上の取付面との間の通路を取り囲む基層と、
通路に整列された導電性ダイアフラムを含んでいるセンサ層で、絶縁ボンドにより前記取付面に接着された第1面を有するセンサ層と、
前記導電性ダイアフラムに整列された基準真空キャビティを形成するよう前記センサ層上に取付けられ、圧力検出コンデンサを形成するよう前記基準真空キャビティを横切る前記導電性ダイアフラムと向き合う導電性表面を含んでいる基準層とを備えていることを特徴とするゲージ圧伝送器。 - 前記入口に接着された気圧ポートを有する伝送器筐体をさらに備えていることを特徴とする請求項20のゲージ圧伝送器。
- 前記気圧ポート内に配置された多孔テフロン(登録商標)栓をさらに備えていることを特徴とする請求項21のゲージ圧伝送器。
- プロセス圧センサと、
前記プロセス圧センサおよび気圧センサに結合され、プロセス圧と気圧の差を計算する変換回路をさらに備えていることを特徴とする請求項20のゲージ圧伝送器。 - 前記変換回路がシグマ・デルタのアナログからデジタルへの変換器を備えていることを特徴とする請求項23のゲージ圧伝送器。
- 前記変換回路が前記プロセス圧センサからの読み取り値を補償し、また前記気圧センサからの読み取り値を補償し、且つプロセス圧の読み取り値から補償済みの気圧の読み取り値を差し引くことにより差を計算することを特徴とする請求項23のゲージ圧伝送器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/139,892 US6647794B1 (en) | 2002-05-06 | 2002-05-06 | Absolute pressure sensor |
US10/139,892 | 2002-05-06 | ||
PCT/US2003/013295 WO2003095963A2 (en) | 2002-05-06 | 2003-04-29 | Barometric pressure sensor |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005524848A true JP2005524848A (ja) | 2005-08-18 |
JP2005524848A5 JP2005524848A5 (ja) | 2006-01-05 |
JP4726481B2 JP4726481B2 (ja) | 2011-07-20 |
Family
ID=29269613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004503910A Expired - Lifetime JP4726481B2 (ja) | 2002-05-06 | 2003-04-29 | 気圧センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US6647794B1 (ja) |
JP (1) | JP4726481B2 (ja) |
CN (1) | CN100401032C (ja) |
AU (1) | AU2003243175A1 (ja) |
DE (1) | DE10392622T5 (ja) |
WO (1) | WO2003095963A2 (ja) |
Cited By (1)
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JP2009543093A (ja) * | 2006-07-10 | 2009-12-03 | ローズマウント インコーポレイテッド | 複数の参照圧力センサを有する圧力トランスミッタ |
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US7121145B2 (en) * | 2004-10-18 | 2006-10-17 | Silverbrook Research Pty Ltd | Capacitative pressure sensor |
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- 2003-04-29 AU AU2003243175A patent/AU2003243175A1/en not_active Abandoned
- 2003-04-29 CN CNB038100673A patent/CN100401032C/zh not_active Expired - Fee Related
- 2003-04-29 JP JP2004503910A patent/JP4726481B2/ja not_active Expired - Lifetime
- 2003-04-29 DE DE10392622T patent/DE10392622T5/de not_active Withdrawn
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JP2009543093A (ja) * | 2006-07-10 | 2009-12-03 | ローズマウント インコーポレイテッド | 複数の参照圧力センサを有する圧力トランスミッタ |
Also Published As
Publication number | Publication date |
---|---|
AU2003243175A1 (en) | 2003-11-11 |
US20030205089A1 (en) | 2003-11-06 |
JP4726481B2 (ja) | 2011-07-20 |
US6647794B1 (en) | 2003-11-18 |
WO2003095963A3 (en) | 2004-04-01 |
DE10392622T5 (de) | 2005-05-25 |
CN1650155A (zh) | 2005-08-03 |
WO2003095963A2 (en) | 2003-11-20 |
CN100401032C (zh) | 2008-07-09 |
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