JP2005313245A - Surface coated cermet cutting tool with hard coating layer exerting excellent chipping resistance - Google Patents
Surface coated cermet cutting tool with hard coating layer exerting excellent chipping resistance Download PDFInfo
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この発明は、特に各種の鋼や鋳鉄などの高速断続切削で、硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance with a hard coating layer, particularly in high-speed intermittent cutting of various types of steel and cast iron.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層として、いずれも蒸着形成されたＴｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、酸化物（以下、ＴｉＯで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ０．５〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、化学蒸着形成した状態でα型の結晶構造を有し、かつ１〜３０μｍの平均層厚を有する酸化アルミニウム層（以下、α型Ａｌ2Ｏ3層で示す）、
（ｃ）表面層として、蒸着形成され、かつ０．５〜３μｍの平均層厚を有する窒化クロム（以下、ＣｒＮで示す）層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) made of tungsten carbide (hereinafter referred to as WC) based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) based cermet. ,
(A) As a lower layer, all deposited Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer, oxidation 1 layer or two or more of a material (hereinafter referred to as TiO) layer, a carbon oxide (hereinafter referred to as TiCO) layer, and a carbonitride oxide (hereinafter referred to as TiCNO) layer, and 0.5 A Ti compound layer having an overall average layer thickness of ˜20 μm,
(B) As an upper layer, an aluminum oxide layer (hereinafter, referred to as an α-type Al 2 O 3 layer) having an α-type crystal structure in a state of chemical vapor deposition and having an average layer thickness of 1 to 30 μm,
(C) As a surface layer, a chromium nitride (hereinafter referred to as CrN) layer formed by vapor deposition and having an average layer thickness of 0.5 to 3 μm,
A coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) to (c) is known, and this coated cermet tool is used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is well known to be used.
また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するＴｉ化合物層やα型Ａｌ2Ｏ3層、さらにＣｒＮ層が粒状結晶組織を有し、また、前記Ｔｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物、例えばＣＨ3ＣＮを含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化の傾向にあるほか、高切り込みや高送りなどの重切削条件での切削加工を余儀なくされる状況にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを切削条件の最も厳しい高速断続切削、すなわち切刃部にきわめて短いピッチで繰り返し熱衝撃が付加される高速断続切削に用いた場合、硬質被覆層を構成するα型Ａｌ2Ｏ3層は、硬質で耐熱性にすぐれるものの、十分な強度を具備するものでないために、これが原因で硬質被覆層にはチッピング（微小欠け）が発生し易くなり、この結果比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting equipment has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. When cutting with heavy cutting conditions such as high feed is inevitable, the above-mentioned conventional coated cermet tools are used for continuous cutting and interrupted cutting under normal conditions such as steel and cast iron. Although there is no problem with this, especially when this is used for high-speed intermittent cutting with the severest cutting conditions, that is, high-speed intermittent cutting in which repeated thermal shock is applied to the cutting edge portion at a very short pitch, α constituting the hard coating layer Although the type Al 2 O 3 layer is hard and has excellent heat resistance, it does not have sufficient strength, so that the hard coating layer is likely to cause chipping (micro chipping) due to this, As a result, the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記のα型Ａｌ2Ｏ3層が硬質被覆層を構成する被覆サーメット工具に着目し、これの耐チッピング性向上を図るべく研究を行った結果、
（ａ）工具基体の表面に、硬質被覆層としてのα型Ａｌ2Ｏ3層を蒸着形成するに際して、例えばこれの蒸着形成に先だって、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：３〜１０％、ＣＯ2：０．５〜３％、Ｃ2Ｈ4：０．０１〜０．３％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の低温条件で、下部層であるＴｉ化合物層の表面に核Ａｌ2Ｏ3を形成し、この場合前記核Ａｌ2Ｏ3は２０〜２００ｎｍの平均層厚を有する核Ａｌ2Ｏ3薄膜であるのが望ましく（以下、核Ａｌ2Ｏ3薄膜という）、引き続いて、反応雰囲気を圧力：３〜１３ｋＰａの水素雰囲気に変え、反応雰囲気温度を１１００〜１２００℃に昇温した条件で前記核Ａｌ2Ｏ3薄膜に加熱処理を施した状態で、硬質被覆層としてのα型Ａｌ2Ｏ3層を通常の条件で形成すると、この結果の前記加熱処理核Ａｌ2Ｏ3薄膜上に蒸着形成されたα型Ａｌ2Ｏ3層は、電界放出型走査電子顕微鏡を用い、図１に概略図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有するα型Ａｌ2Ｏ3結晶粒個々に電子線を照射して、前記結晶粒の結晶面である（０００１）面の前記表面研磨面の法線に対する傾斜角を測定し、前記個々の結晶粒が示す０〜４５度の範囲内の測定傾斜角を０．２５度のピッチ毎に区分し、各区分内に存在する測定傾斜角を区分毎に集計してなるポールプロットグラフを作成した場合、図２に例示される通り、０〜１０度の範囲内の狭い範囲に傾斜角区分の最高ピークが現れるポールプロットグラフを示し、一方上記の従来α型Ａｌ2Ｏ3層は、図３に例示される通り、２５〜３５度の広い範囲内に傾斜角区分のなだらかな最高ピークが現れるポールプロットグラフを示すこと。
（ｂ）上記の加熱処理核Ａｌ2Ｏ3薄膜上に蒸着形成されたα型Ａｌ2Ｏ3層は上記従来α型Ａｌ2Ｏ3層に比して著しく高温強度の向上したものとなるので、これを硬質被覆層の上部層として蒸着形成した被覆サーメット工具は、同じく前記従来α型Ａｌ2Ｏ3層を蒸着形成した従来被覆サーメット工具に比して、一段とすぐれた耐チッピング性を発揮するようになること。
以上（ａ）および（ｂ）に示される研究結果を得たのである。
In view of the above, the present inventors focused on the coated cermet tool in which the α-type Al 2 O 3 layer constitutes a hard coating layer, and conducted research to improve the chipping resistance. As a result,
(A) When the α-type Al 2 O 3 layer as the hard coating layer is vapor-deposited on the surface of the tool base, for example, prior to the vapor-deposition formation,
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
The core Al 2 O 3 is formed on the surface of the lower Ti compound layer under the low temperature condition, and in this case, the core Al 2 O 3 is a core Al 2 O 3 thin film having an average layer thickness of 20 to 200 nm. desirably is (hereinafter, referred to as nuclear Al 2 O 3 thin film), subsequently, the reaction atmosphere pressure: changed to a hydrogen atmosphere of 3～13KPa, said at conditions by elevating the temperature of the reaction atmosphere temperature to 1100 to 1200 ° C. nuclear Al 2 When an α-type Al 2 O 3 layer as a hard coating layer was formed under normal conditions in a state where the O 3 thin film was subjected to heat treatment, it was deposited on the resulting heat-treated core Al 2 O 3 thin film. The α-type Al 2 O 3 layer is formed using an α-type Al 2 O 3 having a hexagonal crystal lattice existing within the measurement range of the surface polished surface, as schematically shown in FIG. 1, using a field emission scanning electron microscope. Each crystal grain is irradiated with an electron beam, The inclination angle of the (0001) plane with respect to the normal line of the surface-polished surface is measured, and the measurement inclination angle within the range of 0 to 45 degrees indicated by the individual crystal grains is divided for each pitch of 0.25 degrees, When a pole plot graph is created by summing up the measured tilt angles in each section for each section, as shown in FIG. 2, the highest peak of the tilt section is in a narrow range of 0 to 10 degrees. The above-mentioned conventional α-type Al 2 O 3 layer shows a pole plot graph that appears, and the pole plot graph in which the gentle peak of the tilt angle section appears in a wide range of 25 to 35 degrees as illustrated in FIG. Showing.
(B) The α-type Al 2 O 3 layer deposited on the heat-treated nucleus Al 2 O 3 thin film has a significantly improved high-temperature strength as compared with the conventional α-type Al 2 O 3 layer. The coated cermet tool formed by vapor deposition using this as the upper layer of the hard coating layer exhibits a much better chipping resistance than the conventional coated cermet tool formed by vapor deposition of the conventional α-type Al 2 O 3 layer. To be like that.
The research results shown in (a) and (b) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）下部層として、いずれも蒸着形成されたＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＯ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ０．５〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、化学蒸着形成した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記結晶粒の結晶面である（０００１）面の前記表面研磨面の法線に対する傾斜角を測定し、前記個々の結晶粒が示す０〜４５度の範囲内の測定傾斜角を０．２５度のピッチ毎に区分し、各区分内に存在する測定傾斜角を区分毎に集計してなるポールプロットグラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが現れ、かつ１〜３０μｍの平均層厚を有するα型Ａｌ2Ｏ3層、
（ｃ）表面層として、蒸着形成され、かつ０．５〜３μｍの平均層厚を有するＣｒＮ層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を蒸着形成してなる、硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) As a lower layer, each consists of one or more of TiC layer, TiN layer, TiCN layer, TiO layer, TiCO layer, and TiCNO layer formed by vapor deposition, and 0.5 to 20 μm A Ti compound layer having an overall average layer thickness,
(B) As an upper layer, each crystal grain having a hexagonal crystal lattice which has an α-type crystal structure in a state where chemical vapor deposition is formed, and which exists within the measurement range of the surface polished surface using a field emission scanning electron microscope Is irradiated with an electron beam, the inclination angle of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the surface-polished surface is measured, and is within a range of 0 to 45 degrees indicated by the individual crystal grains. In the pole plot graph in which the measured tilt angle is divided into 0.25 degree pitches and the measured tilt angles existing in each section are tabulated for each section, it is the highest in the tilt angle section within the range of 0 to 10 degrees. Α-type Al 2 O 3 layer in which a peak appears and has an average layer thickness of 1 to 30 μm,
(C) As a surface layer, a CrN layer formed by vapor deposition and having an average layer thickness of 0.5 to 3 μm,
The coated cermet tool that exhibits excellent chipping resistance, which is formed by vapor-depositing the hard coating layer composed of the above (a) to (c), is characterized.
なお、上記のこの発明の被覆サーメット工具の硬質被覆層の構成層である下部層のＴｉ化合物層は、化学蒸着形成しても、あるいは、上記の縦長成長結晶組織を有するＴｉＣＮ層（以下、ｌ−ＴｉＣＮ層で示す）を除いて、例えば物理蒸着装置の１種であるアークイオンプレーティング装置にて、カソード電極（蒸発源）として金属Ｔｉを用い、反応雰囲気を、例えばメタン分解ガス、窒素ガス、あるいはメタン分解ガスと窒素ガスの混合ガス、さらにメタン分解ガスと酸素ガスの混合ガスや、メタン分解ガスと窒素ガスと酸素ガスの混合ガスの雰囲気として蒸着形成してもよく、また、同じく表面層ＣｒＮ層についても、その形成を化学蒸着によっても、あるいは、例えば上記のアークイオンプレーティング装置にて、カソード電極（蒸発源）として金属Ｃｒを用い、反応雰囲気を窒素ガス雰囲気とすることにより形成してもよい。 The lower Ti compound layer, which is a constituent layer of the hard coating layer of the coated cermet tool of the present invention, may be formed by chemical vapor deposition, or may be a TiCN layer (hereinafter referred to as l In the arc ion plating apparatus which is a kind of physical vapor deposition apparatus, for example, metal Ti is used as the cathode electrode (evaporation source), and the reaction atmosphere is changed to, for example, methane decomposition gas, nitrogen gas Alternatively, it may be formed by vapor deposition as an atmosphere of a mixed gas of methane decomposition gas and nitrogen gas, a mixed gas of methane decomposition gas and oxygen gas, or a mixed gas of methane decomposition gas, nitrogen gas and oxygen gas. As for the CrN layer, the cathode electrode (evaporation) can be formed by chemical vapor deposition or by, for example, the arc ion plating apparatus described above. ) Metal Cr is used as the reaction atmosphere may be formed by a nitrogen gas atmosphere.
つぎに、この発明の被覆サーメット工具の硬質被覆層の構成層の平均層厚を上記の通りに限定した理由を説明する。
（ａ）Ｔｉ化合物層
Ｔｉ化合物層は、α型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた強度によって硬質被覆層が強度をもつようになるほか、工具基体とα型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その平均層厚が０．５μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速断続切削で熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を０．５〜２０μｍと定めた。
Next, the reason why the average layer thickness of the constituent layers of the hard coating layer of the coated cermet tool of the present invention is limited as described above will be described.
(A) Ti compound layer The Ti compound layer exists as a lower layer of the α-type Al 2 O 3 layer, and the hard coating layer has strength due to its excellent strength. It adheres firmly to any Al 2 O 3 layer, and thus has the effect of contributing to improved adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 0.5 μm, the above effect is sufficiently exhibited. On the other hand, if the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation especially at high-speed intermittent cutting with high heat generation, which causes uneven wear. Was determined to be 0.5 to 20 μm.
（ｂ）α型Ａｌ2Ｏ3層
上記の通り加熱処理核Ａｌ2Ｏ3薄膜上に形成されたα型Ａｌ2Ｏ3層には、Ａｌ2Ｏ3自体のもつ高硬度とすぐれた耐熱性によって硬質被覆層の耐摩耗性を向上させるとともに、従来α型Ａｌ2Ｏ3層に比して、すぐれた高温強度を有するので、硬質被覆層の耐チッピング性を一段と向上させる作用があるが、その平均層厚が１μｍ未満では前記作用を十分に発揮させることができず、一方その平均層厚が３０μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１〜３０μｍと定めた。
また、この発明の被覆サーメット工具の硬質被覆層であるα型Ａｌ2Ｏ3層が、ポールプロットグラフで最高ピークを示す傾斜角区分と加熱処理核Ａｌ2Ｏ3薄膜の割合との間には密接な関係があり、前記加熱処理核Ａｌ2Ｏ3薄膜の割合が少な過ぎると、最高ピークの現れる傾斜角区分を０〜１０度の範囲内にすることが困難となり、この場合上記の通り、これの上に蒸着形成されるα型Ａｌ2Ｏ3層に所望のすぐれた高温強度を確保することができないことから、耐チッピング性の向上効果も不十分なものとなるのが避けられず、望ましくは平均層厚で２０ｎｍ以上、さらに望ましくは同３０ｎｍ以上存在するのが良く、一方その割合が多くなり過ぎると最高ピークの現れる傾斜角区分を０〜１０度の範囲内にすることが困難となり、望ましくは平均層厚で２００ｎｍ以下、さらに望ましくは同１５０ｎｍ以下存在するのが良く、したがって、前記α型Ａｌ2Ｏ3層の蒸着形成に先だって、同じく硬質被覆層を構成するＴｉ化合物層上に形成される前記核Ａｌ2Ｏ3薄膜は、望ましくは平均層厚で２０〜２００ｎｍ、さらに望ましくは同３０〜１５０ｎｍとするのがよい。
(B) The α-type the Al 2 O 3 layer above α-type Al 2 O 3 layer formed as heating nucleus Al 2 O 3 thin film of, Al 2 O 3 high hardness and excellent heat resistance possessed by itself In addition to improving the wear resistance of the hard coating layer, and having an excellent high-temperature strength compared to the conventional α-type Al 2 O 3 layer, there is an action to further improve the chipping resistance of the hard coating layer, If the average layer thickness is less than 1 μm, the above-mentioned effect cannot be sufficiently exhibited. On the other hand, if the average layer thickness exceeds 30 μm, the chipping tends to occur. It was defined as ˜30 μm.
In addition, the α-type Al 2 O 3 layer, which is a hard coating layer of the coated cermet tool of the present invention, is between the inclination angle segment showing the highest peak in the pole plot graph and the ratio of the heat-treated core Al 2 O 3 thin film. If the proportion of the heat-treated nuclei Al 2 O 3 thin film is too small, it becomes difficult to make the inclination angle section where the highest peak appears within the range of 0 to 10 degrees, in this case, as described above, Since the desired excellent high-temperature strength cannot be ensured for the α-type Al 2 O 3 layer formed by vapor deposition on this, it is inevitable that the effect of improving chipping resistance will be insufficient, Desirably, the average layer thickness should be 20 nm or more, and more desirably 30 nm or more. On the other hand, if the ratio is too large, it becomes difficult to set the inclination angle section where the highest peak appears within the range of 0 to 10 degrees. Desired Is 200nm or less in average thickness, more preferably may be present below the 150 nm, therefore, prior to the deposition formation of the α-type the Al 2 O 3 layer, is also formed on the Ti compound layer constituting the hard coating layer The core Al 2 O 3 thin film preferably has an average layer thickness of 20 to 200 nm, more preferably 30 to 150 nm.
（ｃ）ＣｒＮ層
ＣｒＮ層には、被削材と切刃面との間に介在して、これら両者間の潤滑性を向上させ、もって耐チッピング性向上に寄与する作用を有するが、その平均層厚が０．５μｍ未満では、前記作用に所望の向上効果が得られず、一方前記作用は３μｍまでの平均層厚で十分であることから、その平均層厚を０．５〜３μｍと定めた。
(C) CrN layer The CrN layer is interposed between the work material and the cutting edge surface, and improves the lubricity between them, thereby contributing to the improvement of chipping resistance. If the layer thickness is less than 0.5 μm, a desired improvement effect cannot be obtained in the above action, while an average layer thickness of up to 3 μm is sufficient for the action. Therefore, the average layer thickness is set to 0.5 to 3 μm. It was.
なお、被覆サーメット工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、硬質被覆層の最表面層として必要に応じて蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 For the purpose of identification before and after the use of the coated cermet tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer, but the average layer thickness in this case 0.1-1 μm may be sufficient, because if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm. .
この発明の被覆サーメット工具は、機械的熱的衝撃がきわめて高く、かつ高い発熱を伴なう各種の鋼や鋳鉄の高速断続切削でも、硬質被覆層を構成するα型Ａｌ2Ｏ3層が、図２に示される通り０〜１０度の範囲内の傾斜角区分に最高ピークが現れるポールプロットグラフを示し、すぐれた耐チッピング性を発揮することから、すぐれた耐摩耗性を長期に亘ってすぐれた切削性能を示すものである。 The coated cermet tool of the present invention has an α-type Al 2 O 3 layer that constitutes a hard coating layer even in high-speed intermittent cutting of various steels and cast irons with extremely high mechanical and thermal shock and high heat generation. As shown in FIG. 2, a pole plot graph in which the highest peak appears in the inclination angle range within the range of 0 to 10 degrees, which exhibits excellent chipping resistance, has excellent wear resistance over a long period of time. This shows the cutting performance.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By performing the processing, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆの表面に、通常の化学蒸着装置を用い、まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４に示される目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、ついで、
反応ガス組成：容量％で、ＡｌＣｌ3：６．５％、ＣＯ2：１．６％、Ｃ2Ｈ4：０．１３％、Ｈ2：残り、
反応雰囲気温度：８２０℃、
反応雰囲気圧力：８ｋＰａ、
時間：５〜８０分、
の低温条件で表４に示される目標層厚の核Ａｌ2Ｏ3薄膜を形成した後（前記核Ａｌ2Ｏ3薄膜の層厚と処理時間の関係は上記Ｔｉ化合物層の場合と同様に実験により予め調査されている）、反応雰囲気を圧力：８ｋＰａの水素雰囲気に変え、反応雰囲気温度を１１３５℃に昇温した条件で前記核Ａｌ2Ｏ3薄膜に加熱処理を施し、引続いて、同じく表３に示される条件で、同じく表４に示される目標層厚のα型Ａｌ2Ｏ3層を硬質被覆層の上部層として蒸着形成し、さらに同じく表３に示される条件にて、同表面層として、ＣｒＮ層を表４に示される目標層厚で蒸着形成することにより本発明被覆サーメット工具１〜１３をそれぞれ製造した。
Next, a normal chemical vapor deposition apparatus was used on the surfaces of these tool bases A to F and tool bases a to f. First, Table 3 (l-TiCN in Table 3 is described in JP-A-6-8010). The target layer thickness shown in Table 4 under the conditions shown in Table 4 is a condition for forming a TiCN layer having a vertically grown crystal structure. The Ti compound layer is deposited as a lower layer of the hard coating layer, and then,
Reaction gas composition: volume%, AlCl 3 : 6.5%, CO 2 : 1.6%, C 2 H 4 : 0.13%, H 2 : remaining,
Reaction atmosphere temperature: 820 ° C.
Reaction atmosphere pressure: 8 kPa,
Time: 5-80 minutes
After forming the core Al 2 O 3 thin film having the target layer thickness shown in Table 4 under the low temperature condition (the relation between the layer thickness of the core Al 2 O 3 thin film and the processing time is the same as in the case of the Ti compound layer) The reaction atmosphere was changed to a hydrogen atmosphere with a pressure of 8 kPa and the reaction atmosphere temperature was raised to 1135 ° C., and the core Al 2 O 3 thin film was subjected to heat treatment. Under the conditions shown in Table 3, an α-type Al 2 O 3 layer having the target layer thickness shown in Table 4 is formed by vapor deposition as the upper layer of the hard coating layer. As the layers, CrN layers of the present invention coated cermet tools 1 to 13 were manufactured by vapor deposition with a target layer thickness shown in Table 4, respectively.
また、比較の目的で、表５に示される通り、硬質被覆層のα型Ａｌ2Ｏ3層を形成するに先だって、上記の核Ａｌ2Ｏ3薄膜の形成およびこれの加熱処理を行なわない以外は同一の条件で従来被覆サーメット工具１〜１３をそれぞれ製造した。 For the purpose of comparison, as shown in Table 5, prior to the formation of the α-type Al 2 O 3 layer of the hard coating layer, the above-described formation of the core Al 2 O 3 thin film and the heat treatment thereof are not performed. Produced the conventional coated cermet tools 1 to 13 under the same conditions.
さらに、上記の本発明被覆サーメット工具１〜１３と従来被覆サーメット工具１〜１３の硬質被覆層を構成するα型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、ポールプロットグラフをそれぞれ作成した。
すなわち、上記ポールプロットグラフは、上記のα型Ａｌ2Ｏ3層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記結晶粒の結晶面である（０００１）面の前記表面研磨面の法線に対する傾斜角を測定し、この測定結果に基づいて、前記個々の結晶粒が示す０〜４５度の範囲内の測定傾斜角を０．２５度のピッチ毎に区分し、各区分内に存在する測定傾斜角を区分毎に集計することにより作成した。
この結果得られた各種のα型Ａｌ2Ｏ3層のポールプロットグラフにおいて、（０００１）面が最高ピークを示す傾斜角区分をそれぞれ表４，５に示した。
なお、図２は、本発明被覆サーメット工具１０のα型Ａｌ2Ｏ3層のポールプロットグラフ、図３は、従来被覆サーメット工具１０のα型Ａｌ2Ｏ3層のポールプロットグラフをそれぞれ示すものである。
Furthermore, a pole plot graph is obtained for the α-type Al 2 O 3 layer constituting the hard coating layer of the above-described coated cermet tool 1 to 13 of the present invention and the conventional coated cermet tool 1 to 13 using a field emission scanning electron microscope. Each was created.
That is, the pole plot graph is set in a lens barrel of a field emission scanning electron microscope with the surface of the α-type Al 2 O 3 layer as a polished surface, and an incident angle of 70 degrees on the polished surface. Then, an electron beam with an acceleration voltage of 15 kV is irradiated at an irradiation current of 1 nA on each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface, and an electron backscatter diffraction image apparatus is used. The inclination angle of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the surface-polished surface is measured in a region of × 50 μm at an interval of 0.1 μm / step. The measurement inclination angle within the range of 0 to 45 degrees indicated by the crystal grains is divided for each pitch of 0.25 degrees, and the measurement inclination angles existing in each division are aggregated for each division.
In the pole plot graphs of the various α-type Al 2 O 3 layers obtained as a result, the inclination angle segments where the (0001) plane shows the highest peak are shown in Tables 4 and 5, respectively.
Incidentally, FIG. 2, the pole plot graph of the α type the Al 2 O 3 layer of the present invention coated
また、この結果得られた本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。
なお、上記本発明被覆サーメット工具１〜１３の硬質被覆層における加熱処理核Ａｌ2Ｏ3薄膜の層厚測定はきわめて困難であった。
Moreover, when the thickness of the constituent layer of the hard coating layer of the present coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement). , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
In addition, it was very difficult to measure the thickness of the heat-treated core Al 2 O 3 thin film in the hard coating layer of the coated cermet tools 1 to 13 of the present invention.
つぎに、上記の本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３の各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＮＣＭ４３９の長さ方向等間隔４本縦溝入り丸棒、
切削速度：３００ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：６分、
の条件（切削条件Ａという）での合金鋼の乾式高速断続切削試験（通常の切削速度は２００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣＤ７００の長さ方向等間隔４本縦溝入り丸棒、
切削速度：２５０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．２ｍｍ／ｒｅｖ、
切削時間：４分、
の条件（切削条件Ｂという）でのダクタイル鋳鉄の乾式高速断続切削試験（通常の切削速度は１５０ｍ／ｍｉｎ）、さらに、
被削材：ＪＩＳ・Ｓ５５Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：３００ｍ／ｍｉｎ、
切り込み：１．０ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｃという）での炭素鋼の乾式高速断続切削試験（通常の切削速度は２００ｍ／ｍｉｎ）、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表６に示した。
Next, for the various coated cermet tools of the present invention coated cermet tool 1-13 and the conventional coated cermet tool 1-13, all are screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SNCM439 round direction bar with 4 equal intervals in the length direction,
Cutting speed: 300 m / min,
Incision: 1.5mm,
Feed: 0.3mm / rev,
Cutting time: 6 minutes
Dry high-speed intermittent cutting test (normal cutting speed is 200 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS / FCD700 lengthwise equal length 4 round bar with round groove,
Cutting speed: 250 m / min,
Incision: 1.5mm,
Feed: 0.2mm / rev,
Cutting time: 4 minutes
Dry high-speed intermittent cutting test (normal cutting speed is 150 m / min) of ductile cast iron under the conditions (cutting condition B),
Work material: JIS / S55C lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 300 m / min,
Cutting depth: 1.0 mm,
Feed: 0.3mm / rev,
Cutting time: 5 minutes
A dry high-speed intermittent cutting test of carbon steel under the conditions (referred to as cutting condition C) (normal cutting speed is 200 m / min),
In each cutting test, the flank wear width of the cutting edge was measured. The measurement results are shown in Table 6.
表４〜６に示される結果から、本発明被覆サーメット工具１〜１３は、いずれもα型Ａｌ2Ｏ3層の（０００１）面がポールプロットグラフで０〜１０度の範囲内の傾斜角区分で最高ピークを示し、機械的熱的衝撃がきわめて高く、かつ高い発熱を伴なう鋼や鋳鉄の高速断続切削でも、硬質被覆層の上部層を構成する前記α型Ａｌ2Ｏ3層がすぐれた耐チッピング性を発揮することから、切刃部のチッピング発生が著しく抑制され、すぐれた耐摩耗性を示すのに対して、硬質被覆層の上部層が、前記ポールプロットグラフでは２５〜３５度の範囲内の傾斜角区分で最高ピークを示すα型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具１〜１３においては、高速断続切削では前記α型Ａｌ2Ｏ3層が激しい機械的熱的衝撃に耐えられず、切刃部にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, all of the coated cermet tools 1 to 13 of the present invention are classified into inclination angles within the range of 0 to 10 degrees in the (0001) plane of the α-type Al 2 O 3 layer in the pole plot graph. The α-type Al 2 O 3 layer that constitutes the upper layer of the hard coating layer is excellent even in high-speed intermittent cutting of steel and cast iron with the highest peak, high mechanical thermal shock, and high heat generation. In addition, the chipping generation of the cutting edge portion is remarkably suppressed and excellent wear resistance is exhibited, whereas the upper layer of the hard coating layer is 25 to 35 degrees in the pole plot graph. In the conventional coated cermet tools 1 to 13 composed of the α-type Al 2 O 3 layer having the highest peak in the inclination angle range within the range of the above, the α-type Al 2 O 3 layer has a severe mechanical heat in high-speed intermittent cutting. Cannot withstand mechanical shock, It is clear that chipping occurs and the service life is reached in a relatively short time.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に機械的熱的衝撃がきわめて高く、かつ高い発熱を伴なう切削条件の最も厳しい高速断続切削でもすぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool according to the present invention has extremely high mechanical thermal shock and high heat generation, as well as continuous cutting and intermittent cutting under normal conditions such as various steels and cast iron. Because it exhibits excellent chipping resistance even in the high-speed intermittent cutting with the most severe cutting conditions and exhibits excellent cutting performance over a long period of time, it has improved the performance of cutting equipment, labor saving and energy saving of cutting, Furthermore, it can cope with cost reduction sufficiently satisfactorily.
Claims (1)
（ａ）下部層として、いずれも蒸着形成されたＴｉの炭化物層、窒化物層、炭窒化物層、酸化物、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ０．５〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、化学蒸着形成された状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記結晶粒の結晶面である（０００１）面の前記表面研磨面の法線に対する傾斜角を測定し、前記個々の結晶粒が示す０〜４５度の範囲内の測定傾斜角を０．２５度のピッチ毎に区分し、各区分内に存在する測定傾斜角を区分毎に集計してなるポールプロットグラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが現れ、かつ１〜３０μｍの平均層厚を有する酸化アルミニウム層、
（ｃ）表面層として、蒸着形成され、０．５〜３μｍの平均層厚を有する窒化クロム層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を形成してなる、硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
(A) As a lower layer, any one or more of Ti carbide layer, nitride layer, carbonitride layer, oxide, carbonate layer, and carbonitride layer formed by vapor deposition And a Ti compound layer having an overall average layer thickness of 0.5 to 20 μm,
(B) Crystal grains having an α-type crystal structure in the state of chemical vapor deposition as an upper layer and having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope Individually irradiated with an electron beam, the inclination angle of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the surface-polished surface is measured, and within the range of 0 to 45 degrees indicated by the individual crystal grain In the pole plot graph in which the measured inclination angles are divided for each pitch of 0.25 degrees and the measured inclination angles existing in each section are aggregated for each section, the inclination angles are in the range of 0 to 10 degrees. An aluminum oxide layer having the highest peak and an average layer thickness of 1 to 30 μm,
(C) a chromium nitride layer formed by vapor deposition and having an average layer thickness of 0.5 to 3 μm as a surface layer;
A surface-coated cermet cutting tool that exhibits a chipping resistance with a hard coating layer formed by forming the hard coating layer configured as described above in (a) to (c).
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160497A (en) * | 2005-11-18 | 2007-06-28 | Mitsubishi Materials Corp | SURFACE COATED CUTTING TOOL MADE OF CERMET HAVING PROPERTY-MODIFIED ALPHA TYPE Al2O3 LAYER OF HARD COATING LAYER HAVING EXCELLENT CRYSTAL GRAIN INTERFACE STRENGTH |
| JP2007237391A (en) * | 2006-03-03 | 2007-09-20 | Sandvik Intellectual Property Ab | Coated cermet cutting tool |
| JP2008055583A (en) * | 2006-09-01 | 2008-03-13 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coating layer exhibiting excellent abrasion resistance |
| JP2009006425A (en) * | 2007-06-27 | 2009-01-15 | Mitsubishi Materials Corp | Surface coated cutting tool |
-
2004
- 2004-04-27 JP JP2004130670A patent/JP2005313245A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160497A (en) * | 2005-11-18 | 2007-06-28 | Mitsubishi Materials Corp | SURFACE COATED CUTTING TOOL MADE OF CERMET HAVING PROPERTY-MODIFIED ALPHA TYPE Al2O3 LAYER OF HARD COATING LAYER HAVING EXCELLENT CRYSTAL GRAIN INTERFACE STRENGTH |
| JP2007237391A (en) * | 2006-03-03 | 2007-09-20 | Sandvik Intellectual Property Ab | Coated cermet cutting tool |
| JP2008055583A (en) * | 2006-09-01 | 2008-03-13 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coating layer exhibiting excellent abrasion resistance |
| JP2009006425A (en) * | 2007-06-27 | 2009-01-15 | Mitsubishi Materials Corp | Surface coated cutting tool |
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