JP2005307971A - 真空ポンプ減衰アダプタ - Google Patents
真空ポンプ減衰アダプタ Download PDFInfo
- Publication number
- JP2005307971A JP2005307971A JP2005078655A JP2005078655A JP2005307971A JP 2005307971 A JP2005307971 A JP 2005307971A JP 2005078655 A JP2005078655 A JP 2005078655A JP 2005078655 A JP2005078655 A JP 2005078655A JP 2005307971 A JP2005307971 A JP 2005307971A
- Authority
- JP
- Japan
- Prior art keywords
- damping
- adapter
- vacuum pump
- bellows
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 title claims abstract description 76
- 229920001971 elastomer Polymers 0.000 claims abstract description 22
- 239000000806 elastomer Substances 0.000 claims abstract description 22
- 239000010409 thin film Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 241000282472 Canis lupus familiaris Species 0.000 description 10
- 239000000725 suspension Substances 0.000 description 6
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000004141 dimensional analysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
- F16F3/08—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber
- F16F3/10—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction
- F16F3/12—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction the steel spring being in contact with the rubber spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0052—Physically guiding or influencing
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Diaphragms And Bellows (AREA)
Abstract
【解決手段】アダプタ3は、2つの端フランジ4、5に支持された減衰スリーブ7に囲繞されたフレキシブルベローの形状の管状ダクト壁6から成る。フレキシブルベローの襞状部6a、6bがその外面に、連続襞状部6a、6b間に係合の受動減衰エラストマー8aを受ける。それによって、真空ポンプ1からサービスチャンバ2への振動の伝達が相当に減少し、特に顕微鏡分野における応用を可能とする。
【選択図】 図1
Description
管状壁6は、フレキシブルベローとされ、同軸の減衰スリーブ7に囲繞され、同スリーブの端部7aおよび7bが入口フランジ4および出口フランジ5にそれぞれ当接支持される。減衰スリーブ7は、エラストマー製とされる。そのショア硬さ数約70を選択することにより、良好な結果が得られる。
2 サービスチャンバ
3 減衰アダプタ
6 管状ダクト壁
6a、6b 襞状部
7 減衰スリーブ
8a 受動減衰エラストマー
10、10d 回転防止クレビス
13 能動振動制御装置、圧電薄膜
Claims (9)
- サービスチャンバ(2)と真空ポンプ(1)の間の吸込ダクト内に挿設可能な真空ライン減衰アダプタ(3)であり、アダプタが、両端で柔軟なベローの形状の管状壁(6)から成り、管状壁はフレキシブルベローの両端に支持された減衰スリーブ(7)に囲繞されており、フレキシブルベローの襞状部(6a、6b)がその外面に前記襞状部(6a、6b)間に係合の受動減衰エラストマー(8a)を受ける減衰アダプタ。
- ベローの襞状部(6a、6b)間に係合の受動減衰エラストマー(8a)が減衰スリーブ(7)に継合される請求項1に記載の減衰アダプタ(3)。
- 受動減衰エラストマー(8a)が減衰スリーブ(7)と一体である請求項2に記載の減衰アダプタ(3)。
- フレキシブルベローの2つの連続襞状部(6a、6b)間で、休止時に、減衰エラストマー(8a)が、内径がフレキシブルベローから半径方向に離間した円冠状の形状を有する請求項1に記載の減衰アダプタ(3)。
- 真空ポンプ(1)とプロセスチャンバ(2)の間の相対回転応力に対抗するように、径方向に関して正反対に位置する回転防止クレビス(10、10d)がベロー周囲に配置され、正規使用においては接触することがない請求項1に記載の減衰アダプタ(3)。
- 減衰スリーブ(7)が、振動減衰を最適化する能動振動制御装置(13)をも含む請求項1に記載の減衰アダプタ(3)。
- 能動振動制御装置が、減衰スリーブ(7)の一端(7b)と真空ポンプ(1)接続フランジの間に係合され、かつ適切な振動センサ、真空ポンプ(1)磁気軸受制御装置、あるいは真空ポンプ(1)の駆動モータ動力供給装置から生じる信号によって作動する制御装置によって動力を供給される圧電横方向薄膜(13)から成る請求項6に記載の減衰アダプタ(3)。
- 真空ポンプ(1)とサービスチャンバ(2)の間の真空ダクト内に挿設された、請求項1に記載の減衰アダプタ(3)を含む真空ライン。
- 真空ポンプ(1)が少なくとも一部、管状壁(6)を形成するフレキシブルベロー内部に係合される請求項8に記載の真空ライン。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0450565 | 2004-03-22 | ||
FR0450565A FR2867823B1 (fr) | 2004-03-22 | 2004-03-22 | Raccord amortisseur pour pompe a vide |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005307971A true JP2005307971A (ja) | 2005-11-04 |
JP4920193B2 JP4920193B2 (ja) | 2012-04-18 |
Family
ID=34855226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005078655A Expired - Fee Related JP4920193B2 (ja) | 2004-03-22 | 2005-03-18 | 真空ポンプ減衰アダプタ |
Country Status (5)
Country | Link |
---|---|
US (1) | US7854128B2 (ja) |
EP (1) | EP1580477B1 (ja) |
JP (1) | JP4920193B2 (ja) |
CN (1) | CN1673550B (ja) |
FR (1) | FR2867823B1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008111335A1 (ja) * | 2007-03-13 | 2008-09-18 | Edwards Japan Limited | 真空ポンプ防振構造とその構造を備えた真空ポンプ |
JP2011012777A (ja) * | 2009-07-03 | 2011-01-20 | Kurashiki Kako Co Ltd | 防振継手 |
US9795340B2 (en) | 2010-12-13 | 2017-10-24 | National Taiwan University | Vacuum-pump sucker |
JP2020133628A (ja) * | 2019-02-12 | 2020-08-31 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空装置及び真空システム |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60304870T2 (de) * | 2003-11-18 | 2006-11-30 | Varian S.P.A., Leini | Vakuumpumpe mit Schwingungsdämpfer |
IL161900A (en) * | 2004-05-09 | 2011-01-31 | Rami Ben Maimon | Vibration reliever for vacuum pump |
WO2006041113A1 (ja) | 2004-10-15 | 2006-04-20 | Boc Edwards Japan Limited | ダンパおよび真空ポンプ |
WO2006068014A1 (ja) * | 2004-12-20 | 2006-06-29 | Boc Edwards Japan Limited | 端部間の接続構造及び該構造を適用した真空システム |
FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
EP1914469A1 (de) * | 2006-10-17 | 2008-04-23 | Linde Aktiengesellschaft | Durchführung durch eine Behälterwand |
GB0620723D0 (en) * | 2006-10-19 | 2006-11-29 | Boc Group Plc | Vibration isolator |
DE102007018292A1 (de) | 2007-04-18 | 2008-10-23 | Pfeiffer Vacuum Gmbh | Schwingungsisolierendes Zwischenbauteil |
DE102007059257A1 (de) * | 2007-12-08 | 2009-06-10 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
PT2296515E (pt) * | 2008-05-28 | 2012-08-24 | Nestec Sa | Bomba para dispositivos de preparação de bebidas líquidas |
JP6053552B2 (ja) * | 2013-02-18 | 2016-12-27 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ取付構造 |
CN106641602B (zh) * | 2015-11-04 | 2018-10-19 | 北京卫星环境工程研究所 | 应用于真空容器内部的大型航天器隔振密封支撑结构 |
DE202015008803U1 (de) * | 2015-12-23 | 2017-03-24 | Leybold Gmbh | Verbindungseinrichtung |
JP2017194098A (ja) * | 2016-04-19 | 2017-10-26 | オイレス工業株式会社 | 免震装置 |
US10704715B2 (en) * | 2017-05-29 | 2020-07-07 | Shimadzu Corporation | Vacuum pumping device, vacuum pump, and vacuum valve |
CN109386564A (zh) * | 2017-08-11 | 2019-02-26 | 上海锆智电子科技有限公司 | 涡轮分子泵减震器 |
CN108706049B (zh) * | 2018-05-25 | 2023-06-06 | 西南交通大学 | 一种动态特性可调的汽车副车架与车身连接装置 |
JP7099306B2 (ja) * | 2018-12-25 | 2022-07-12 | 株式会社オートネットワーク技術研究所 | クランプ及びクランプ付ワイヤハーネス |
KR102211869B1 (ko) * | 2019-03-14 | 2021-02-03 | 주식회사 케이티엘 | 벨로우즈 가이드 장치 |
CN110519907B (zh) * | 2019-08-23 | 2024-05-10 | 无锡爱邦辐射技术有限公司 | 真空室高压电源引入装置 |
CN112984904A (zh) * | 2019-12-12 | 2021-06-18 | 海信(山东)冰箱有限公司 | 冰箱 |
CN114658785A (zh) * | 2022-03-01 | 2022-06-24 | 国仪量子(合肥)技术有限公司 | 组合减振装置和扫描电镜 |
NL2034497B1 (en) | 2023-04-04 | 2024-03-05 | Phe Nx Knowledge B V | Vacuum coupling with integrated vibration insulator. |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003519761A (ja) * | 2000-01-15 | 2003-06-24 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | 振動緩衝器を備えた真空ポンプ |
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US4523612A (en) * | 1983-04-15 | 1985-06-18 | The United States Of America As Represented By The United States Department Of Energy | Apparatus and method for suppressing vibration and displacement of a bellows |
US4565940A (en) * | 1984-08-14 | 1986-01-21 | Massachusetts Institute Of Technology | Method and apparatus using a piezoelectric film for active control of vibrations |
DE3436982A1 (de) * | 1984-10-09 | 1986-04-10 | Heidemann-Werke GmbH & Co KG, 3352 Einbeck | Abgasrohr fuer eine verbrennungskraftmaschine |
US4862697A (en) * | 1986-03-13 | 1989-09-05 | Helix Technology Corporation | Cryopump with vibration isolation |
JPH03503923A (ja) * | 1988-12-22 | 1991-08-29 | ムーグ インコーポレーテツド | 振動を絶縁する機械取付台 |
US5294757A (en) * | 1990-07-18 | 1994-03-15 | Otis Elevator Company | Active vibration control system for an elevator, which reduces horizontal and rotational forces acting on the car |
JP2802542B2 (ja) | 1990-09-12 | 1998-09-24 | タイガースポリマー株式会社 | ホース |
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US5713438A (en) * | 1996-03-25 | 1998-02-03 | Lord Corporation | Method and apparatus for non-model based decentralized adaptive feedforward active vibration control |
DE29611142U1 (de) * | 1996-06-25 | 1996-09-05 | Feodor Burgmann Dichtungswerke GmbH & Co, 82515 Wolfratshausen | Entkopplungselement für Schwingungen in Rohrleitungen |
US6065742A (en) * | 1996-09-13 | 2000-05-23 | Lord Corporation | Multi-directional tuned vibration absorber |
JP3343581B2 (ja) * | 1997-10-27 | 2002-11-11 | 独立行政法人産業技術総合研究所 | 真空防振継手 |
US5924282A (en) * | 1998-01-20 | 1999-07-20 | Tru-Flex Metal Hose Corp. | Vehicle with improved exhaust system for internal combustion engine |
US6667844B1 (en) * | 1998-09-25 | 2003-12-23 | Seagate Technology Llc | Active vibration suppression of glide head suspension arm |
DE10119075A1 (de) * | 2001-04-19 | 2002-10-24 | Leybold Vakuum Gmbh | Vakuumleitung |
US20030051958A1 (en) * | 2001-09-18 | 2003-03-20 | Esche Sven K. | Adaptive shock and vibration attenuation using adaptive isolators |
-
2004
- 2004-03-22 FR FR0450565A patent/FR2867823B1/fr not_active Expired - Fee Related
-
2005
- 2005-03-18 EP EP05290609A patent/EP1580477B1/fr not_active Not-in-force
- 2005-03-18 JP JP2005078655A patent/JP4920193B2/ja not_active Expired - Fee Related
- 2005-03-21 US US11/083,989 patent/US7854128B2/en not_active Expired - Fee Related
- 2005-03-22 CN CN2005100568398A patent/CN1673550B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003519761A (ja) * | 2000-01-15 | 2003-06-24 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | 振動緩衝器を備えた真空ポンプ |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008111335A1 (ja) * | 2007-03-13 | 2008-09-18 | Edwards Japan Limited | 真空ポンプ防振構造とその構造を備えた真空ポンプ |
JP2011012777A (ja) * | 2009-07-03 | 2011-01-20 | Kurashiki Kako Co Ltd | 防振継手 |
US9795340B2 (en) | 2010-12-13 | 2017-10-24 | National Taiwan University | Vacuum-pump sucker |
JP2020133628A (ja) * | 2019-02-12 | 2020-08-31 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空装置及び真空システム |
JP7111754B2 (ja) | 2019-02-12 | 2022-08-02 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空装置及び真空システム |
Also Published As
Publication number | Publication date |
---|---|
JP4920193B2 (ja) | 2012-04-18 |
EP1580477B1 (fr) | 2013-03-06 |
EP1580477A1 (fr) | 2005-09-28 |
CN1673550A (zh) | 2005-09-28 |
FR2867823A1 (fr) | 2005-09-23 |
FR2867823B1 (fr) | 2006-07-14 |
US7854128B2 (en) | 2010-12-21 |
US20050204754A1 (en) | 2005-09-22 |
CN1673550B (zh) | 2011-06-15 |
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