JP2005257615A - 角速度センサ - Google Patents
角速度センサ Download PDFInfo
- Publication number
- JP2005257615A JP2005257615A JP2004072557A JP2004072557A JP2005257615A JP 2005257615 A JP2005257615 A JP 2005257615A JP 2004072557 A JP2004072557 A JP 2004072557A JP 2004072557 A JP2004072557 A JP 2004072557A JP 2005257615 A JP2005257615 A JP 2005257615A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- case
- angular velocity
- velocity sensor
- soldering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005476 soldering Methods 0.000 claims abstract description 40
- 238000001514 detection method Methods 0.000 claims description 20
- 238000005452 bending Methods 0.000 claims description 7
- 229910000679 solder Inorganic materials 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 description 19
- 239000000919 ceramic Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000006071 cream Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5628—Manufacturing; Trimming; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
【解決手段】収納部43における載置部47に、端子44の一端部とケース30におけるケース電極とをはんだ付けするための開口部48を設け、はんだ付け後に載置部47における開口部48からはんだ付けのはんだ量を確認することができる構成としたものである。
【選択図】図1
Description
25,26 駆動電極
27 検出電極
30 ケース
35 IC
37 ケース電極
43 収納部
44 端子
45 はんだ付け部
46 フィレット形成部
47 載置部
48 開口部
49,50,51,52 電極
54 カバー
Claims (5)
- 駆動電極および検出電極を設けた音叉型の振動子と、この振動子における検出電極から出力される出力信号を処理するICと、このICおよび振動子を内側に収納するとともに外底面にケース電極を設けたケースと、このケースにおけるケース電極と一端部が電気的に接続されるとともにケースを周囲から支持する少なくとも3つの端子と、前記ケースを載置する載置部を有するとともに前記端子の他端部側を一体に埋設し、かつこの端子における他端部側先端に電極を設けた収納部と、この収納部を覆うカバーとを備え、前記収納部における載置部に、端子の一端部とケースにおけるケース電極とをはんだ付けするための開口部を設けた角速度センサ。
- 少なくとも3つの端子におけるそれぞれの一端部側に、収納部における載置部と略平行にはんだ付け部を設けた請求項1記載の角速度センサ。
- 端子における一端部側を折り曲げることにより、はんだ付け部から略垂直にフィレット形成部を設けた請求項2記載の角速度センサ。
- 収納部における電極を上下方向に変位可能に構成した請求項1記載の角速度センサ。
- 収納部の線膨張係数を端子の線膨張係数よりも大きくした請求項1記載の角速度センサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004072557A JP4449504B2 (ja) | 2004-03-15 | 2004-03-15 | 角速度センサ |
US11/078,297 US7127945B2 (en) | 2004-03-15 | 2005-03-14 | Angular velocity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004072557A JP4449504B2 (ja) | 2004-03-15 | 2004-03-15 | 角速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005257615A true JP2005257615A (ja) | 2005-09-22 |
JP4449504B2 JP4449504B2 (ja) | 2010-04-14 |
Family
ID=34918616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004072557A Expired - Lifetime JP4449504B2 (ja) | 2004-03-15 | 2004-03-15 | 角速度センサ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7127945B2 (ja) |
JP (1) | JP4449504B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009192459A (ja) * | 2008-02-18 | 2009-08-27 | Panasonic Corp | 角速度センサ |
US9927238B2 (en) | 2015-03-09 | 2018-03-27 | Seiko Epson Corporation | Physical quantity sensor, electronic apparatus, and moving object |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007071672A (ja) * | 2005-09-06 | 2007-03-22 | Fujitsu Media Device Kk | 角速度センサ |
US8028579B2 (en) * | 2006-01-13 | 2011-10-04 | Citizen Holdings Co., Ltd. | Vibration body for angular speed sensor |
CN103196437B (zh) * | 2006-03-15 | 2016-04-06 | 松下知识产权经营株式会社 | 角速度传感器及其制造方法 |
JP2008058066A (ja) * | 2006-08-30 | 2008-03-13 | Fujitsu Media Device Kk | 振動センサ |
JP2008096318A (ja) * | 2006-10-13 | 2008-04-24 | Fujitsu Media Device Kk | 振動センサおよびその製造方法 |
JP2008256570A (ja) * | 2007-04-05 | 2008-10-23 | Fujitsu Media Device Kk | 角速度センサ |
US8646332B2 (en) | 2007-09-03 | 2014-02-11 | Panasonic Corporation | Inertia force sensor |
JP2009092545A (ja) * | 2007-10-10 | 2009-04-30 | Panasonic Corp | 角速度および加速度検出用複合センサ |
JP2010060358A (ja) * | 2008-09-02 | 2010-03-18 | Murata Mfg Co Ltd | 角速度センサ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4343135A1 (de) * | 1993-12-17 | 1995-06-22 | Bosch Gmbh Robert | Drehratensensor |
JP3387199B2 (ja) * | 1994-04-21 | 2003-03-17 | 松下電器産業株式会社 | 角速度センサ装置 |
JPH10332378A (ja) | 1997-05-28 | 1998-12-18 | Murata Mfg Co Ltd | 振動ジャイロ |
US6145380A (en) * | 1997-12-18 | 2000-11-14 | Alliedsignal | Silicon micro-machined accelerometer using integrated electrical and mechanical packaging |
JPH11218424A (ja) * | 1998-02-03 | 1999-08-10 | Alps Electric Co Ltd | 振動型ジャイロスコープ |
EP1132712A4 (en) * | 1999-09-10 | 2006-05-17 | Matsushita Electric Ind Co Ltd | ROTARY SPEED SENSOR |
JP4654480B2 (ja) * | 2000-03-17 | 2011-03-23 | パナソニック株式会社 | 角速度センサ |
JP4701505B2 (ja) * | 2001-01-29 | 2011-06-15 | パナソニック株式会社 | 慣性トランスデューサ |
US6880399B1 (en) * | 2001-11-29 | 2005-04-19 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor |
-
2004
- 2004-03-15 JP JP2004072557A patent/JP4449504B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-14 US US11/078,297 patent/US7127945B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009192459A (ja) * | 2008-02-18 | 2009-08-27 | Panasonic Corp | 角速度センサ |
US9927238B2 (en) | 2015-03-09 | 2018-03-27 | Seiko Epson Corporation | Physical quantity sensor, electronic apparatus, and moving object |
Also Published As
Publication number | Publication date |
---|---|
JP4449504B2 (ja) | 2010-04-14 |
US7127945B2 (en) | 2006-10-31 |
US20050199062A1 (en) | 2005-09-15 |
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