JP2005218179A - Ultrasonic motor and lens device - Google Patents

Ultrasonic motor and lens device Download PDF

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JP2005218179A
JP2005218179A JP2004019479A JP2004019479A JP2005218179A JP 2005218179 A JP2005218179 A JP 2005218179A JP 2004019479 A JP2004019479 A JP 2004019479A JP 2004019479 A JP2004019479 A JP 2004019479A JP 2005218179 A JP2005218179 A JP 2005218179A
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elastic body
ultrasonic motor
protrusions
longitudinal
motor according
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JP4565850B2 (en
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Hirotaka Tsuyoshi
宏卓 津吉
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor which has a large driving force and operates efficiently, and has little slippage at a start by arranging a constitution such that the elliptic loci of a plurality of projections may lean in the same direction, and that the horizontal motion of the elliptic motion and the half upward/downward motion may accord with each other. <P>SOLUTION: The loci of the elliptic motion that the a plurality of projections 4 and 5 of the ultrasonic motor draw lean in the same direction within a plane which is determined by the longitudinal direction of an elastic body 1 and the direction orthogonal to the first plane a. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、超音波振動を利用した超音波モータ、及び、この超音波モータを用いてレンズを光軸方向に移動することで、焦点調節、ズームを行うレンズ装置に関する。   The present invention relates to an ultrasonic motor that uses ultrasonic vibration, and a lens apparatus that performs focus adjustment and zooming by moving the lens in the optical axis direction using the ultrasonic motor.

近年、動きの速さ、静粛性および変位精度の正確性に優れるという理由から、カメラなどにおいてレンズのピント合わせやズーム機構等に超音波モータが好適に用いられているが、このような超音波モータとして、下記の特許文献１に記載されたようなものが知られている。図６（ａ）、（ｂ）は、従来の超音波モータの断面図である。特許文献１に記されたこの超音波モータは直方体状の弾性体１の下面（第１面ａ）側中央付近に電気機械変換素子２、３が併設して接着され、その両側に突起部４、５が取り付けられた構造となっており、このような超音波モータでは電気機械変換素子が弾性体の長手方向の中央面に対して対称の位置に設けられている。   In recent years, an ultrasonic motor is suitably used for focusing a lens, a zoom mechanism, and the like in a camera because of its excellent speed of movement, quietness, and accuracy of displacement. As a motor, a motor described in Patent Document 1 below is known. 6A and 6B are cross-sectional views of a conventional ultrasonic motor. In this ultrasonic motor described in Patent Document 1, electromechanical conversion elements 2 and 3 are bonded together near the center of the lower surface (first surface a) side of a rectangular parallelepiped elastic body 1, and protrusions 4 are formed on both sides thereof. In such an ultrasonic motor, the electromechanical conversion element is provided at a symmetrical position with respect to the center plane in the longitudinal direction of the elastic body.

そして、電気機械変換素子２、３により弾性体１に、長手方向に変位する縦振動、および、厚み方向に変位する屈曲振動を発生させ、これら振動の合成によって突起部４、５を楕円運動させて駆動力を取り出すことができる。突起部４、５がすなわち駆動力取り出し部４、５に相当する。さらに、これら駆動力取り出し部４、５に接するように被駆動部材であるロータ（不図示）を設ければ、このロータを、例えば、矢印で示すように弾性体１の長手方向に移動させることができる。なお、図６（ａ）は、駆動力取り出し部４、５が弾性体１に発生する屈曲振動の腹の位置よりも外側に取り付けられたものであり、図６（ｃ）に示すように、２つの楕円軌跡の長軸または短軸の向きが弾性体１の第１面ａに直交する方向と一致する運動をする。一方、図６（ｂ）は駆動力取り出し部４、５が弾性体１に発生する屈曲振動の腹の位置に取り付けられたものであり、この場合楕円軌跡は図６（ｄ）のように互いに逆向きに傾いている。
特開平７−３２７３７９号 Then, the electromechanical transducers 2 and 3 cause the elastic body 1 to generate longitudinal vibrations that are displaced in the longitudinal direction and bending vibrations that are displaced in the thickness direction. Driving force can be taken out. The protrusions 4 and 5 correspond to the driving force takeout portions 4 and 5. Further, if a rotor (not shown), which is a driven member, is provided so as to be in contact with the driving force extraction portions 4 and 5, the rotor is moved in the longitudinal direction of the elastic body 1 as indicated by an arrow, for example. Can do. FIG. 6 (a) shows that the driving force take-out portions 4 and 5 are attached outside the position of the antinodes of the bending vibration generated in the elastic body 1, and as shown in FIG. 6 (c), The movement of the long axis or the short axis of the two elliptical trajectories coincides with the direction perpendicular to the first surface a of the elastic body 1. On the other hand, FIG. 6 (b) shows that the driving force extracting portions 4 and 5 are attached to the antinodes of the bending vibration generated in the elastic body 1, and in this case the elliptical trajectories are mutually connected as shown in FIG. 6 (d). Tilt in the opposite direction.
JP 7-327379 A

しかしながら、上記の超音波モータでは、電気機械変換素子２、３と突起部４、５が、弾性体１の長手方向の中央面に対して対称の位置に設けられているために、図６（ｃ）のように、２つの楕円軌跡の長軸または短軸の向きが弾性体１の第１面ａに直交する方向に一致することから、このような場合、駆動力は楕円運動の水平方向の運動のみであり、突起部４、５の楕円軌跡においてロータが接触する間は摩擦力を介して突起部４、５はロータを水平方向に移動させることができるものの、駆動開始時や停止時には滑りが生じやすく効率が低下するという問題があった。   However, in the above-described ultrasonic motor, the electromechanical conversion elements 2 and 3 and the protrusions 4 and 5 are provided at positions symmetrical with respect to the center plane in the longitudinal direction of the elastic body 1, so that FIG. As in c), since the orientation of the major axis or minor axis of the two elliptical trajectories coincides with the direction perpendicular to the first surface a of the elastic body 1, in such a case, the driving force is the horizontal direction of the elliptical motion. The protrusions 4 and 5 can move the rotor in the horizontal direction via frictional force while the rotor contacts in the elliptical locus of the protrusions 4 and 5, but at the start or stop of driving. There was a problem that slipping was likely to occur and efficiency was lowered.

一方、楕円軌跡が図６（ｄ）のように、互いに逆向きに傾きロータの移動の向きと傾きの向きが一致する場合においては、例えば、一方の突起４では楕円運動の水平方向の運動に斜め上下方向の運動が加わり大きな駆動力が得られるが、もう一方の突起５においては、ロータの移動の向きと傾きの向きが逆向きになるため、楕円運動の水平方向の運動に対して斜め上下方向の運動はブレーキとなり、突起部５とロータとの摩耗も大きくなり、これにより全体の駆動力が低下するという問題があった。   On the other hand, when the elliptical trajectory is in the opposite direction to each other as shown in FIG. 6D and the direction of the inclination rotor and the direction of the inclination coincide with each other, for example, one of the protrusions 4 moves horizontally in the elliptical motion. Although a large driving force is obtained by adding an oblique vertical movement, the other protrusion 5 is inclined with respect to the horizontal movement of the elliptical movement because the direction of movement and inclination of the rotor are reversed. The movement in the vertical direction becomes a brake, and the wear of the protrusion 5 and the rotor is increased, which causes a problem that the entire driving force is reduced.

従って、本発明は、複数の突起部の楕円軌跡が、同一方向に傾くようにして、楕円運動の水平方向の運動と、斜め上下方向の運動がロータの移動方向と一致するようにし、駆動力が大きく、始動時の滑りが少なく高効率で動作する超音波モータと、それを用いたレンズ装置を提供することを目的とする。   Therefore, according to the present invention, the elliptical trajectories of the plurality of protrusions are inclined in the same direction so that the horizontal movement of the elliptical movement and the diagonal movement of the vertical movement coincide with the moving direction of the rotor. It is an object of the present invention to provide an ultrasonic motor that is large and operates with high efficiency with little slippage at start-up, and a lens device using the same.

本発明の超音波モータは、第１面および該第１面と対抗配置される第２面を有する直方体状の弾性体と、この弾性体の前記第１面又は第２面側に結合される電気機械変換素子と、前記弾性体の第１面側の所定箇所に取り付けられる複数の突起部とを備え、前記電気機械変換素子により前記弾性体に縦振動および屈曲振動を発生させ、これら振動の合成によって前記突起部を楕円運動させて駆動力を取り出す超音波モータであって、前記複数の突起部の描く楕円運動の軌跡が、前記弾性体の長手方向と前記第１面に直交する方向とから定められる面内で、同じ方向に傾いていることを特徴とする。   The ultrasonic motor according to the present invention is coupled to a rectangular parallelepiped elastic body having a first surface and a second surface opposed to the first surface, and the first surface or the second surface side of the elastic body. An electromechanical transducer, and a plurality of protrusions attached to predetermined locations on the first surface side of the elastic body, the electromechanical transducer generates longitudinal vibration and bending vibration in the elastic body, An ultrasonic motor for extracting a driving force by elliptically moving the protrusions by synthesis, wherein a trajectory of the elliptical motion drawn by the plurality of protrusions is perpendicular to the longitudinal direction of the elastic body and the first surface It is characterized in that they are inclined in the same direction within a plane determined by

本発明では、このように、複数の突起部の楕円軌跡の軸が同じ方向に傾いているため、突起部の楕円運動による駆動力と突起の斜め上下運動による駆動力が同じ向きに重畳して働くようにでき、こうして大きな駆動力が得られ、さらには、始動時の滑りをも小さくできる。   In the present invention, since the axes of the elliptical trajectories of the plurality of protrusions are inclined in the same direction as described above, the driving force due to the elliptical motion of the protrusions and the driving force due to the oblique vertical movement of the protrusions are superimposed in the same direction. Thus, a large driving force can be obtained, and the slippage at the start can be reduced.

即ち、本発明の超音波モータは、第１面および該第１面と対抗配置される第２面を有する直方体状の弾性体と、この弾性体の前記第１面又は第２面側に結合される電気機械変換素子と、前記弾性体の第１面側の所定箇所に取り付けられる複数の突起部とを備え、前記電気機械変換素子により前記弾性体に縦振動および屈曲振動を発生させ、これら振動の合成によって前記突起部を楕円運動させて駆動力を取り出す超音波モータであって、それぞれ複数個の突起部又は電気機械変換素子が、前記弾性体の長手方向の中央面に対して、非対称の位置に設けられていることを特徴とする。   That is, the ultrasonic motor of the present invention is coupled to a rectangular parallelepiped elastic body having a first surface and a second surface opposed to the first surface, and is coupled to the first surface or the second surface side of the elastic body. Electromechanical conversion element, and a plurality of protrusions attached to predetermined locations on the first surface side of the elastic body, and the electromechanical conversion element generates longitudinal vibration and bending vibration in the elastic body, An ultrasonic motor that extracts the driving force by elliptically moving the protrusions by synthesizing vibrations, wherein each of the plurality of protrusions or electromechanical transducers is asymmetric with respect to the longitudinal central surface of the elastic body It is provided in the position of.

即ち、本発明では、複数個の突起部又は電気機械変換素子が弾性体の長手方向の中央面に対して非対称の位置に設けることにより、上記したように複数の突起部の楕円軌跡の軸を同じ方向に傾かせることができる。   That is, in the present invention, the plurality of protrusions or the electromechanical conversion elements are provided at asymmetric positions with respect to the central surface in the longitudinal direction of the elastic body. Can be tilted in the same direction.

また、上記超音波モータでは、弾性体の長さが変化すること、弾性体が、長手方向に可動する錘を具備してなることが望ましい。   In the ultrasonic motor, it is desirable that the length of the elastic body changes, and that the elastic body includes a weight movable in the longitudinal direction.

このように、弾性体の長さが可変であることにより、突起部における楕円軌跡の軸を同一方向に傾けることができ、また弾性体の長さを一方に伸ばした場合と、他方に伸ばした場合で、楕円軌跡の軸の傾きを逆向きにすることができる。   As described above, the length of the elastic body is variable, so that the axis of the elliptical locus in the protrusion can be inclined in the same direction, and the length of the elastic body is extended to one side and extended to the other side. In some cases, the inclination of the axis of the elliptical trajectory can be reversed.

さらに、長手方向の重量分布を変化させることができるような、可動する錘を具備することにより、弾性体の長さを変化させることと等価な効果が得られるために、同様に楕円軌跡の軸の傾きを逆転させることが可能となる。   Further, by providing a movable weight capable of changing the weight distribution in the longitudinal direction, an effect equivalent to changing the length of the elastic body can be obtained. Can be reversed.

これらにより、例えば、ロータを左右どちらに動かす場合でも、最適な向きに楕円軌跡の軸を傾けることが可能となり、ロータの移動方向を逆転させても高い駆動効率を得ることが可能となる。   Thus, for example, when moving the rotor to the left or right, the axis of the elliptical trajectory can be tilted in an optimum direction, and high driving efficiency can be obtained even if the moving direction of the rotor is reversed.

そして上記超音波モータでは、とりわけ弾性体が、この弾性体の第１面に垂直な向きを軸に１８０度回転することが望ましい。   In the ultrasonic motor, it is particularly desirable that the elastic body rotate 180 degrees about the direction perpendicular to the first surface of the elastic body.

また、上記超音波モータでは、電気機械変換素子が積層型圧電素子であることが望ましい。即ち、本発明によれば、電気機械変換素子として、低電圧駆動が可能な積層型圧電素子を用いることにより、トランスなどを設けなくてもカメラなどに備えられる低電圧電源を高周波に変換して駆動できる超音波モータを形成できる。   In the ultrasonic motor, the electromechanical conversion element is preferably a multilayer piezoelectric element. That is, according to the present invention, a low-voltage power source provided in a camera or the like can be converted to a high frequency without providing a transformer or the like by using a laminated piezoelectric element that can be driven at a low voltage as an electromechanical conversion element. An ultrasonic motor that can be driven can be formed.

そして、駆動効率が高く、始動時の応答性が高い、本発明の超音波モータをレンズの焦点調節やズームに使用すれば、タイムラグが小さく迅速に撮影ができるレンズ装置を備えたカメラが実現でき、また消費電力も低く出来るため、携帯用カメラなどに好適である。   If the ultrasonic motor of the present invention, which has high driving efficiency and high responsiveness at start-up, is used for lens focus adjustment and zooming, it is possible to realize a camera equipped with a lens device that can shoot quickly with a small time lag. Moreover, since power consumption can be reduced, it is suitable for portable cameras and the like.

本発明の実施形態である超音波モータを図１を用いて説明する。図１は、本発明の超音波モータを示す断面図である。   An ultrasonic motor according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view showing an ultrasonic motor of the present invention.

本発明の超音波モータは、ロータＢの上面側にモータ本体Ａが加圧接触して設けられている。モータ本体Ａは、弾性体１の上面（第２面ｂ）側に複数の電気機械変換素子である圧電素子２、３が接合されており、圧電素子２、３の上面および下面には、それぞれ不図示の駆動用電極が接合されている。一方、弾性体１の下面である（第１面ａ）には複数の突起部４、５が設けられている。この突起部４、５の楕円運動を利用して超音波モータの駆動力が取り出される。以下、この突起部４、５を駆動用突起部と呼ぶ。この駆動用突起部４、５は、弾性体１の長手方向の中心面に対して対称でない位置に取り付けられている（図１では、ｃ≠ｄとなっている）。この場合、圧電素子２、３と駆動用突起部４、５とは異なる面に設けられているが同一の面に設けてもよい。 In the ultrasonic motor of the present invention, the motor body A is provided on the upper surface side of the rotor B in pressure contact. The motor body A has a plurality of piezoelectric elements 2 and 3 which are electromechanical transducers bonded to the upper surface (second surface b) of the elastic body 1. A driving electrode (not shown) is joined. On the other hand, a plurality of protrusions 4 and 5 are provided on the lower surface (first surface a) of the elastic body 1. The driving force of the ultrasonic motor is extracted using the elliptical motion of the protrusions 4 and 5. Hereinafter, the protrusions 4 and 5 are referred to as driving protrusions. The driving protrusions 4 and 5 are attached at positions that are not symmetrical with respect to the longitudinal center surface of the elastic body 1 (in FIG. 1, c ≠ d). In this case, the piezoelectric elements 2 and 3 and the driving protrusions 4 and 5 are provided on different surfaces, but may be provided on the same surface.

また、本発明の超音波モータを構成する圧電素子２、３は、厚み方向の同一方向に分極しており、また、各圧電素子２、３には電極を介して互いに９０度（π／２）位相の異なる高周波電圧が印加される。高周波電圧が印加されると各圧電素子２、３は励振し、それに応じて弾性体１は縦振動および屈曲振動を行うことができる。そして、これらの振動が弾性体１内部で合成されて、駆動用突起部４、５は楕円運動を発生する。なお、圧電素子２、３の分極方向は互いに逆向きでもよい。   In addition, the piezoelectric elements 2 and 3 constituting the ultrasonic motor of the present invention are polarized in the same direction of the thickness direction, and the piezoelectric elements 2 and 3 are each 90 degrees (π / 2) via electrodes. ) High frequency voltages with different phases are applied. When a high frequency voltage is applied, the piezoelectric elements 2 and 3 are excited, and the elastic body 1 can perform longitudinal vibration and bending vibration accordingly. And these vibrations are synthesize | combined inside the elastic body 1, and the drive projection parts 4 and 5 generate | occur | produce an elliptical motion. The polarization directions of the piezoelectric elements 2 and 3 may be opposite to each other.

即ち、本発明の超音波モータでは、上記したように圧電素子２、３の励振と、駆動用突起部４、５の非対称な配置どりにより、複数の駆動用突起部４、５の描く楕円運動の軌跡が、前記弾性体１の長手方向と前記第１面に直交する方向とから定められる面内で、同じ方向に傾いていることを特徴とするものである。   That is, in the ultrasonic motor of the present invention, the elliptical motion drawn by the plurality of driving protrusions 4 and 5 by the excitation of the piezoelectric elements 2 and 3 and the asymmetrical arrangement of the driving protrusions 4 and 5 as described above. Are inclined in the same direction within a plane defined by the longitudinal direction of the elastic body 1 and the direction orthogonal to the first surface.

本発明の弾性体１を構成する材料としては、ステンレス、アルミニウム、インバー等の金属、樹脂、炭素繊維もしくはガラス繊維等を含有する金属、セラミックスまたは樹脂等が用いられる。   As a material constituting the elastic body 1 of the present invention, a metal such as stainless steel, aluminum, or invar, a metal containing a resin, carbon fiber, glass fiber, or the like, a ceramic, a resin, or the like is used.

圧電素子２、３は、大きな駆動力を得るという点から、例えばチタン酸ジルコン酸鉛を主成分とする圧電セラミックスが好ましく、さらに、駆動用突起部４、５の材質としては、弾性体１と一体的に形成することで取付位置精度を高くできるという理由から弾性体１と同じ材質が望ましいが、駆動用突起部４、５の耐久性を重視する場合は、セラミックスなど耐磨耗性の高い材料を用いるのがよい。   The piezoelectric elements 2 and 3 are preferably made of, for example, piezoelectric ceramics mainly composed of lead zirconate titanate from the viewpoint of obtaining a large driving force. Further, as the material of the driving projections 4 and 5, the elastic body 1 and The same material as that of the elastic body 1 is preferable because the mounting position accuracy can be increased by forming it integrally. However, when the durability of the driving projections 4 and 5 is important, the wear resistance such as ceramics is high. Materials should be used.

図２は、圧電ＦＥＭ解析により得られた駆動用突起部を設ける位置（ａ〜ｊ）と、仮想的な駆動用突起部の各位置での楕円軌跡形状の概略図である。この超音波モータは、長手方向縦振動は１次モード、屈曲振動は４次モードを用いた場合であり、図２には屈曲振動４次モードの概略形状を示している。なお、縦振動１次モードとは、弾性体１の長手方向縦振動の１／２波長が弾性耐の長さと同じになるモードをいい、屈曲振動４次モードとは、屈曲振動の腹が４つ存在するモードをいう。図２によれば、屈曲振動の節（例えば、ａ点とｂ点の間の位置）を境に楕円軌道の回転の向きが変わり、楕円軌道の回転の向きが同じ領域、即ち、屈曲振動の同じ腹の領域においては、駆動用突起部４、５を設ける位置によって楕円軌道の軸の傾きが変化していくことが分かる。例えば、ｄ点とｇ点は屈曲振動の腹の位置であり、従来の超音波モータで駆動用突起部４、５が設けられる位置であるが、楕円軌道の傾きは互いに逆向きに傾いている。又、ｃ点とｈ点は、特許文献１において良いとされている位置である。   FIG. 2 is a schematic diagram of elliptical trajectory shapes at positions (a to j) at which driving protrusions are provided and the positions of virtual driving protrusions obtained by piezoelectric FEM analysis. In this ultrasonic motor, the longitudinal mode longitudinal vibration uses the primary mode and the bending vibration uses the quaternary mode, and FIG. 2 shows a schematic shape of the bending vibration quaternary mode. The longitudinal vibration primary mode refers to a mode in which the half wavelength of longitudinal vibration in the longitudinal direction of the elastic body 1 is the same as the length of the elastic resistance. One mode exists. According to FIG. 2, the rotation direction of the elliptical orbit changes at the bending vibration node (for example, the position between points a and b), and the rotation direction of the elliptical orbit is the same region, that is, bending vibration. In the same antinode region, it can be seen that the inclination of the axis of the elliptical trajectory changes depending on the position where the driving protrusions 4 and 5 are provided. For example, points d and g are antinodes of bending vibration and are positions where drive projections 4 and 5 are provided by a conventional ultrasonic motor, but the inclinations of the elliptical orbits are inclined in opposite directions. . The points c and h are positions that are considered good in Patent Document 1.

これに対して、本発明における駆動用突起部４、５を設ける位置は、例えば、ｂ点とｇ点又はｄ点とｉ点となり、このような位置に駆動用突起部４、５を設けることにより楕円軌跡の軸の傾きを同じ方向にできる。なお、ロータＢを図２の左方向に駆動する場合はｄ点とｉ点の組み合わせ、一方、ロータＢを図２の右方向に駆動する場合はｂ点とｇ点の組み合わせがよく、これらの組み合わせにより、ロータＢの移動方向と楕円軌跡の軸の傾きの向きを一致させることができ高効率に駆動できる。なお、移動方向を変える場合は圧電素子２、３に与える高周波電圧の位相を反転させて楕円軌跡の回転の向きを反転させればよい。   On the other hand, the positions where the driving protrusions 4 and 5 are provided in the present invention are, for example, points b and g or points d and i, and the driving protrusions 4 and 5 are provided at such positions. Thus, the inclination of the axis of the elliptical locus can be made the same direction. When the rotor B is driven in the left direction in FIG. 2, the combination of the points d and i is preferable. On the other hand, when the rotor B is driven in the right direction in FIG. 2, the combination of the points b and g is good. By the combination, the moving direction of the rotor B and the direction of the inclination of the axis of the elliptical locus can be matched, and the drive can be performed with high efficiency. In the case of changing the moving direction, the phase of the high frequency voltage applied to the piezoelectric elements 2 and 3 may be reversed to reverse the direction of rotation of the elliptical locus.

本発明の超音波モータについて、以下の実施例を用いて具体的に説明をする。弾性体１は真鍮とし、長さ５ｍｍ、幅２ｍｍ、厚さ０．２６ｍｍとした。また、圧電素子２、３はＰＺＴ磁器の両面に銀電極を焼付けたものとし、厚さ０．１ｍｍ、幅０．８ｍｍ、圧電素子２、３どうしの間隔は０．４ｍｍとし、弾性体１の長手方向の中央面に対し対称な位置に付けることとした。圧電素子２、３は厚さ方向に２ｋＶ／ｍｍの電界を印加して８０度の絶縁オイル中で５分間分極処理を行ったものであり、弾性体１の上面側である第２面に瞬間接着剤で貼り付けた。駆動用突起部４は弾性体１の第１面ａに左端から０．７ｍｍの位置に設け、もう１つの駆動用突起部５は弾性体１の第１面ａに右端から０．９ｍｍの位置に設けた。それぞれの駆動用突起部４、５は、長さ０．４ｍｍ、厚さ０．２ｍｍとして、材料は弾性体１と同じ真鍮とし弾性体１と一体的に作製した。   The ultrasonic motor of the present invention will be specifically described using the following examples. The elastic body 1 was made of brass and had a length of 5 mm, a width of 2 mm, and a thickness of 0.26 mm. The piezoelectric elements 2 and 3 are made by baking silver electrodes on both sides of the PZT porcelain. The thickness is 0.1 mm, the width is 0.8 mm, and the distance between the piezoelectric elements 2 and 3 is 0.4 mm. It was decided to attach it at a symmetrical position with respect to the central plane in the longitudinal direction. The piezoelectric elements 2 and 3 are obtained by applying an electric field of 2 kV / mm in the thickness direction and performing a polarization treatment for 5 minutes in insulating oil at 80 degrees, and instantaneously apply to the second surface on the upper surface side of the elastic body 1. Affixed with an adhesive. The driving projection 4 is provided on the first surface a of the elastic body 1 at a position 0.7 mm from the left end, and the other driving projection 5 is provided on the first surface a of the elastic body 1 at a position 0.9 mm from the right end. Provided. Each of the driving protrusions 4 and 5 is 0.4 mm in length and 0.2 mm in thickness, and the material is brass, which is the same as that of the elastic body 1.

圧電素子２、３には振幅５ボルトの高周波電圧を印加し、圧電素子２と３に与える高周波電圧の位相は９０度異なるようにした。すなわち、圧電素子２には、振幅５ボルトのｓｉｎ波を、圧電素子３には振幅５ボルトのｃｏｓ波の高周波電圧を印加した。   A high frequency voltage having an amplitude of 5 volts was applied to the piezoelectric elements 2 and 3 so that the phases of the high frequency voltages applied to the piezoelectric elements 2 and 3 were different by 90 degrees. That is, a sin wave with an amplitude of 5 volts was applied to the piezoelectric element 2, and a high frequency voltage of a cosine wave with an amplitude of 5 volts was applied to the piezoelectric element 3.

図３は、本発明の超音波モータの駆動用突起部４における長手方向（ｙ）と厚さ方向（ｚ）の振幅と、本超音波モータでロータを駆動したときのロータの速度の印加電圧の周波数依存性を示すものである。   FIG. 3 shows the amplitude of the longitudinal direction (y) and the thickness direction (z) of the driving projection 4 of the ultrasonic motor of the present invention, and the applied voltage of the rotor speed when the rotor is driven by the ultrasonic motor. This shows the frequency dependence of.

縦１次振動の共振ピークが３６２．５ｋＨｚ付近にあり、曲げ４次振動の共振ピークが３６４．５ｋＨｚ付近にあり、縦１次振動の共振ピーク付近で、ロータの駆動速度が最も大きくなることが分かる。   The resonance peak of longitudinal primary vibration is in the vicinity of 362.5 kHz, the resonance peak of bending quaternary vibration is in the vicinity of 364.5 kHz, and the driving speed of the rotor is maximized in the vicinity of the resonance peak of longitudinal primary vibration. I understand.

図４（ａ）、（ｂ）は、本発明の第２の実施例を示すものであり、弾性体の長さ可変機構を設けた本発明の超音波モータの概略断面図である。図４（ａ）、（ｂ）において、弾性体１の左右両端部に弾性体長可変機構８、９が設けられている。ここで図４の破線部分が弾性体１の最初の形状である。図４（ａ）は、弾性体長可変機構８が伸び、弾性体長可変機構９が縮んだ状態を示す。このとき、圧電素子２にｓｉｎ波、圧電素子３にｃｏｓ波の高周波電圧を印加すると、楕円軌跡の回転の向きと軸の傾きは図示のようになり、ロータを左に駆動する際に好適である。   FIGS. 4A and 4B show a second embodiment of the present invention and are schematic cross-sectional views of the ultrasonic motor of the present invention provided with an elastic body length varying mechanism. 4A and 4B, elastic body length variable mechanisms 8 and 9 are provided at the left and right ends of the elastic body 1, respectively. Here, the broken line portion in FIG. 4 is the initial shape of the elastic body 1. FIG. 4A shows a state where the elastic body length variable mechanism 8 is extended and the elastic body length variable mechanism 9 is contracted. At this time, when a sin wave and a cosine wave high frequency voltage are applied to the piezoelectric element 2 and the piezoelectric element 3, the rotation direction of the elliptical locus and the inclination of the shaft are as shown in the figure, which is suitable for driving the rotor to the left. is there.

図４（ｂ）は、弾性体長可変機構８が縮み、弾性体長可変機構９が伸びた状態を示す。このとき、圧電素子２にｃｏｓ波、圧電素子３にｓｉｎ波の高周波電圧を印加すると、楕円軌跡の回転の向きと軸の傾きは図示のようになり、ロータを右に駆動する際に好適である。   FIG. 4B shows a state where the elastic body length variable mechanism 8 is contracted and the elastic body length variable mechanism 9 is extended. At this time, if a high frequency voltage of a cosine wave is applied to the piezoelectric element 2 and a sin wave is applied to the piezoelectric element 3, the rotation direction of the elliptical locus and the inclination of the axis are as shown in the figure, which is suitable for driving the rotor to the right. is there.

図５（ａ）、（ｂ）は、本発明の第３の実施例を示すものであり、弾性体１に空洞部１１を設け、その空洞部１１内に可動錘１２を内蔵させた本発明の超音波モータの概略断面図である。この超音波モータでは、可動錘１２を弾性体１の中心から左右に移動することで、ロータＢを左右に効率よく駆動することが出来る。   5 (a) and 5 (b) show a third embodiment of the present invention, in which the cavity 11 is provided in the elastic body 1 and the movable weight 12 is built in the cavity 11. It is a schematic sectional drawing of an ultrasonic motor. In this ultrasonic motor, the rotor B can be efficiently driven left and right by moving the movable weight 12 left and right from the center of the elastic body 1.

本発明の超音波モータを示す断面図である。It is sectional drawing which shows the ultrasonic motor of this invention. 圧電ＦＥＭ解析により得られた駆動用突起部を設ける位置（ａ〜ｊ）と、仮想的な駆動用突起部の各位置での楕円軌跡形状の概略図である。It is the schematic of the elliptical locus | trajectory shape in each position of the position (aj) where the drive projection part obtained by the piezoelectric FEM analysis is provided, and a virtual drive projection part. 本発明の超音波モータの駆動用突起部４における長手方向（ｙ）と厚さ方向（ｚ）の振幅と、本超音波モータでロータを駆動したときのロータの速度の印加電圧の周波数依存性を示すものである。Frequency dependence of applied voltage of the longitudinal direction (y) and thickness direction (z) of the driving projection 4 of the ultrasonic motor of the present invention, and the speed of the rotor when the rotor is driven by this ultrasonic motor. Is shown. （ａ）は、弾性体長可変機構８が伸び、弾性体長可変機構９が縮んだ状態を示す、（ｂ）は、弾性体長可変機構８が縮み、弾性体長可変機構９が伸びた状態を示す、本発明の第２の実施例を示すものである。(A) shows a state where the elastic body length variable mechanism 8 is extended and the elastic body length variable mechanism 9 is contracted, and (b) shows a state where the elastic body length variable mechanism 8 is contracted and the elastic body length variable mechanism 9 is extended. 2 shows a second embodiment of the present invention. （ａ）、（ｂ）は、本発明の第３の実施例を示すものであり、弾性体に空洞部を設け、その空洞部内に可動錘を内蔵させた本発明の超音波モータの概略断面図である。(A), (b) shows a third embodiment of the present invention, and is a schematic cross section of an ultrasonic motor of the present invention in which a hollow portion is provided in an elastic body and a movable weight is built in the hollow portion. FIG. 従来の超音波モータの断面図と、駆動用突起部の楕円軌跡を示す概略断面図である。It is sectional drawing of the conventional ultrasonic motor, and schematic sectional drawing which shows the elliptical locus | trajectory of a drive projection part.

符号の説明Explanation of symbols

１ 弾性体
２、３ 電気機械変換素子（圧電素子）
４、５ 突起部（駆動用突起部）
ａ 第1面
ｂ 第２面 1 Elastic body 2, 3 Electromechanical transducer (piezoelectric element)
4, 5 Protrusion (drive protrusion)
a first side b second side

Claims (7)

第１面および該第１面と対向配置される第２面を有する直方体状の弾性体と、この弾性体の前記第１面又は第２面側に結合される電気機械変換素子と、前記弾性体の第１面側の所定箇所に取り付けられる複数の突起部とを備え、前記電気機械変換素子により前記弾性体に縦振動および屈曲振動を発生させ、これら振動の合成によって前記突起部を楕円運動させて駆動力を取り出す超音波モータであって、前記突起部の描く楕円運動の軌跡が、前記弾性体の長手方向と前記第１面に直交する方向とから定められる面内で同じ方向に傾いていることを特徴とする超音波モータ。 A rectangular parallelepiped elastic body having a first surface and a second surface disposed opposite to the first surface, an electromechanical transducer element coupled to the first surface or the second surface side of the elastic body, and the elasticity A plurality of protrusions attached to predetermined positions on the first surface side of the body, and the electromechanical conversion element generates longitudinal vibration and bending vibration in the elastic body, and the protrusions are elliptically moved by combining these vibrations. An ultrasonic motor for taking out a driving force, and the locus of the elliptical motion drawn by the protrusion is inclined in the same direction within a plane determined from the longitudinal direction of the elastic body and the direction orthogonal to the first surface An ultrasonic motor characterized by that. 第１面および該第１面と対向配置される第２面を有する直方体状の弾性体と、この弾性体の前記第１面又は第２面側に結合される電気機械変換素子と、前記弾性体の第１面側の所定箇所に取り付けられる複数の突起部とを備え、前記電気機械変換素子により前記弾性体に縦振動および屈曲振動を発生させ、これら振動の合成によって前記突起部を楕円運動させて駆動力を取り出す超音波モータであって、それぞれ複数個の突起部又は電気機械変換素子が、前記弾性体の長手方向の中央面に対して非対称の位置に設けられていることを特徴とする超音波モータ。 A rectangular parallelepiped elastic body having a first surface and a second surface disposed opposite to the first surface, an electromechanical transducer element coupled to the first surface or the second surface side of the elastic body, and the elasticity A plurality of protrusions attached to predetermined positions on the first surface side of the body, and the electromechanical conversion element generates longitudinal vibration and bending vibration in the elastic body, and the protrusions are elliptically moved by combining these vibrations. An ultrasonic motor for extracting a driving force, wherein a plurality of protrusions or electromechanical conversion elements are provided at asymmetric positions with respect to the longitudinal central surface of the elastic body. Ultrasonic motor. 弾性体の長さが変化することを特徴とする請求項１または２に記載の超音波モータ。 The ultrasonic motor according to claim 1, wherein the length of the elastic body changes. 弾性体が、長手方向に可動する錘を具備してなることを特徴とする請求項１乃至３のうちいずれか記載の超音波モータ。 The ultrasonic motor according to any one of claims 1 to 3, wherein the elastic body includes a weight movable in a longitudinal direction. 弾性体が、該弾性体の第１面に垂直な向きを軸に１８０度回転することを特徴とする請求項１乃至４のうちいずれか記載の超音波モータ。 The ultrasonic motor according to any one of claims 1 to 4, wherein the elastic body rotates 180 degrees about an axis perpendicular to the first surface of the elastic body. 電気機械変換素子が積層型圧電素子であることを特徴とする請求項１乃至５のうちいずれか記載の超音波モータ。 6. The ultrasonic motor according to claim 1, wherein the electromechanical transducer is a multilayer piezoelectric element. 少なくとも一部が光軸方向に移動する可動光学系と、該可動光学系を支持する支持部材と、該支持部材を光軸方向に移動するための超音波モータとを備えたレンズ装置であって、前記超音波モータが請求項１乃至６のうちいずれか記載の超音波モータであることを特徴とするレンズ装置。 A lens apparatus comprising: a movable optical system that moves at least partially in the optical axis direction; a support member that supports the movable optical system; and an ultrasonic motor that moves the support member in the optical axis direction. A lens apparatus, wherein the ultrasonic motor is the ultrasonic motor according to any one of claims 1 to 6.
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US7772744B2 (en) 2006-03-13 2010-08-10 Fujinon Corporation Ultrasonic actuator which acts on a rotor to rotate the rotor
CN112108691A (en) * 2020-09-07 2020-12-22 陈习 Composite board perforating device

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US7772744B2 (en) 2006-03-13 2010-08-10 Fujinon Corporation Ultrasonic actuator which acts on a rotor to rotate the rotor
CN112108691A (en) * 2020-09-07 2020-12-22 陈习 Composite board perforating device

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