JP2005195639A - Planar type actuator - Google Patents

Planar type actuator Download PDF

Info

Publication number
JP2005195639A
JP2005195639A JP2003435211A JP2003435211A JP2005195639A JP 2005195639 A JP2005195639 A JP 2005195639A JP 2003435211 A JP2003435211 A JP 2003435211A JP 2003435211 A JP2003435211 A JP 2003435211A JP 2005195639 A JP2005195639 A JP 2005195639A
Authority
JP
Japan
Prior art keywords
movable part
movable
planar actuator
actuator according
movable portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003435211A
Other languages
Japanese (ja)
Inventor
Yuzuru Ueda
譲 上田
Hirohiko Aiba
博彦 相場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Signal Co Ltd
Miyota KK
Original Assignee
Nippon Signal Co Ltd
Miyota KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd, Miyota KK filed Critical Nippon Signal Co Ltd
Priority to JP2003435211A priority Critical patent/JP2005195639A/en
Publication of JP2005195639A publication Critical patent/JP2005195639A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Laser Beam Printer (AREA)
  • Lens Barrels (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a planar type actuator which gives a necessary deflection angle easily and improves the flexibility of optical design. <P>SOLUTION: The planar type actuator is provided with a movable part 1 supported freely movably on a fixed part 3 with a beam part 6; and a driving means 4 which drives the movable part 1 by applying driving force. The actuator deflects a light beam by driving the movable part 1, and the light beam which is made incident on the movable part 1 from one side thereof is refracted. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、光ビームを偏向するプレーナ型アクチュエータに関し、特に、必要な偏向角が容易に得られると共に、光学設計の自由度を向上させたプレーナ型アクチュエータに関する。   The present invention relates to a planar actuator that deflects a light beam, and more particularly, to a planar actuator that can easily obtain a necessary deflection angle and that has an improved degree of freedom in optical design.

従来のこの種のプレーナ型アクチュエータには、一方の主面に光を反射させるミラー面を形成した可動部を固定部に梁部で回動可能に軸支し、可動部の周縁部に沿って敷設したコイルと、梁部の軸線に平行な対辺の側方に可動部を間にして互いに反対磁極を対向させて配置した永久磁石とで駆動手段を構成し、上記対辺近傍のコイルに互いに反対方向の電磁力を発生して可動部を回動し、ミラー面で光ビームを反射して偏向するようにしたものがある（例えば、特許文献１参照）。   In this type of conventional planar actuator, a movable part having a mirror surface that reflects light on one main surface is pivotally supported by a fixed part so as to be rotatable by a beam part, and along the peripheral part of the movable part. The driving means is composed of the laid coil and the permanent magnet arranged with the movable part on the side of the opposite side parallel to the axis of the beam and facing the opposite magnetic poles. There is one in which a moving part is rotated by generating an electromagnetic force in a direction, and a light beam is reflected and deflected on a mirror surface (see, for example, Patent Document 1).

また、駆動手段を可動部の他方の主面に形成した上部電極と、該上部電極に対向して固定部に形成した下部電極とで構成し、両電極間に電圧を印加することにより発生する静電引力によって可動部を回動させるようにしたものがある（例えば、特許文献２参照）
特許第２７２２３１４号公報 特開２００１−１３４４３号公報 Further, the driving means is composed of an upper electrode formed on the other main surface of the movable portion and a lower electrode formed on the fixed portion so as to face the upper electrode, and is generated by applying a voltage between both electrodes. There is one in which the movable part is rotated by electrostatic attraction (for example, see Patent Document 2).
Japanese Patent No. 2722314 JP 2001-13443 A

しかし、このような従来のプレーナ型アクチュエータにおいては、光ビームを発する光源が可動部に対して光ビームの反射側と同じ側に配置されるため、光ビームの偏向領域が光源の存在により制限され、必要な偏向角が得られないことがあった。   However, in such a conventional planar type actuator, the light source that emits the light beam is arranged on the same side as the light beam reflection side with respect to the movable part, so that the deflection region of the light beam is limited by the presence of the light source. The required deflection angle may not be obtained.

また、図９に示すように反射光が光源側に戻らないようにするためには、静止状態において入射光をミラー面１ａに斜めに入射させなければならない。この場合、可動部１の振れ角を大きくして光ビームの偏向角を大きくしようとしたときには、反射光が可動部１の周辺に配置した例えば永久磁石２Ａ，２Ｂや固定部３又はその他の構成部材によりけられる虞がある。そのため、光偏向角を大きくすることができず、光学設計に制約を受ける場合があった。   Further, as shown in FIG. 9, in order to prevent the reflected light from returning to the light source side, the incident light must be incident on the mirror surface 1a obliquely in a stationary state. In this case, when the deflection angle of the light beam is increased by increasing the deflection angle of the movable part 1, for example, the permanent magnets 2A and 2B, the fixed part 3 or other configurations in which the reflected light is arranged around the movable part 1 There is a risk of being scraped by the member. For this reason, the optical deflection angle cannot be increased, and the optical design may be restricted.

そこで、本発明は上記問題点に着目してなされたもので、必要な偏向角が容易に得られると共に、光学設計の自由度を向上させたプレーナ型アクチュエータを提供することを目的とする。   Accordingly, the present invention has been made paying attention to the above problems, and an object of the present invention is to provide a planar actuator in which a necessary deflection angle can be easily obtained and the degree of freedom in optical design is improved.

このために、請求項１の発明は、固定部に梁部で可動自由に支持された可動部と、該可動部に駆動力を作用して駆動させる駆動手段とを備え、前記可動部を駆動して光ビームを偏向するプレーナ型アクチュエータであって、前記可動部に、当該可動部の一側から入射する光ビームを屈折して可動部の他側に出射する屈折手段を設けた。   For this purpose, the invention of claim 1 comprises a movable part that is supported by a beam part on a fixed part, and a driving means that drives the movable part by applying a driving force to drive the movable part. Thus, the planar actuator for deflecting the light beam is provided with a refracting means for refracting the light beam incident from one side of the movable part and emitting it to the other side of the movable part.

このような構成により、駆動手段で可動部に駆動力を作用して駆動し、可動部の一側から入射した光ビームを屈折手段で屈折して可動部の他側に出射する。   With such a configuration, the driving unit drives the movable unit by applying a driving force, and the light beam incident from one side of the movable unit is refracted by the refracting unit and emitted to the other side of the movable unit.

この場合、前記屈折手段は、請求項２のようにレンズであってもよい。   In this case, the refracting means may be a lens as in the second aspect.

また、前記駆動手段は、請求項３のように前記可動部を前記梁部の軸回りに回動させる駆動力を発生する構成とするとよい。具体的には、請求項４のように、前記駆動手段は、前記可動部の周縁部に沿って敷設したコイルと、前記梁部の軸方向に平行な可動部の対辺近傍のコイルに静磁界を作用させる静磁界発生手段とで構成し、前記コイルを流れる電流と前記静磁界との相互作用により可動部の前記対辺に互いに反対向きの電磁力を作用させるようにしてもよく、請求項５のように前記梁部の軸方向に平行な可動部の対辺近傍に設けた上部電極と、該上部電極に対向して可動部の下方部位に配設した下部電極とで構成し、両電極間に静電引力を発生させるようにしてもよい。   The driving means may be configured to generate a driving force for rotating the movable part around the axis of the beam part as in claim 3. Specifically, as in claim 4, the driving means includes a static magnetic field applied to a coil laid along the peripheral edge of the movable portion and a coil near the opposite side of the movable portion parallel to the axial direction of the beam portion. And a static magnetic field generating means for causing the electromagnetic field to act, and electromagnetic forces in directions opposite to each other may be applied to the opposite sides of the movable part by the interaction between the current flowing through the coil and the static magnetic field. The upper electrode provided in the vicinity of the opposite side of the movable part parallel to the axial direction of the beam part, and the lower electrode disposed in the lower part of the movable part opposite the upper electrode, between the two electrodes An electrostatic attractive force may be generated.

または、前記駆動手段は、請求項６のように前記可動部を水平方向に移動させる駆動力を発生する構成としてもよい。具体的には、請求項７のように、前記駆動手段は、前記可動部の周縁部に沿って敷設したコイルと、前記梁部の軸方向に平行な対辺近傍のコイルに対して上下方向で互いに反対向きの静磁界を作用させる静磁界発生手段とで構成し、前記コイルを流れる電流と前記静磁界との相互作用により可動部に水平方向の電磁力を作用させるようにしてもよく、請求項８のように前記可動部の周縁部に沿って放射状に延設した第１櫛歯電極と、前記第１櫛歯電極と噛み合って、円周方向に複数にグループ分けして固定配設された第２櫛歯電極とで構成し、両電極間に静電引力を発生させるようにしてもよい。また、請求項８の場合は、請求項９のように前記可動部の中心に対して放射状に設けた少なくとも３本の梁部で前記可動部を支持する構成とするとよい。   Alternatively, the driving means may be configured to generate a driving force for moving the movable portion in the horizontal direction as in claim 6. Specifically, as in claim 7, the driving means is arranged in a vertical direction with respect to a coil laid along the peripheral edge of the movable part and a coil near the opposite side parallel to the axial direction of the beam part. It may be constituted by a static magnetic field generating means for applying static magnetic fields in opposite directions, and a horizontal electromagnetic force may be applied to the movable part by the interaction between the current flowing through the coil and the static magnetic field. The first comb electrode extending radially along the peripheral edge of the movable part as in item 8 and the first comb electrode are meshed with each other and fixedly arranged in groups in the circumferential direction. The second comb electrode may be used to generate an electrostatic attractive force between the two electrodes. In the case of claim 8, it is preferable that the movable part is supported by at least three beam parts provided radially with respect to the center of the movable part as in claim 9.

さらに、前記梁部は、請求項１０のように略Ｓ字状に屈曲した形状に形成してもよい。   Further, the beam portion may be formed in a shape bent in a substantially S shape as in claim 10.

また、請求項１１の構成の場合においては、前記可動部の下方部位に配設した固定基板に前記屈折手段に対向して光ビームを通過させる開口部を形成した。   In the case of the configuration of claim 11, an opening for allowing the light beam to pass through is formed on the fixed substrate disposed in the lower part of the movable part so as to face the refracting means.

そして、請求項１２の構成の場合においては、前記可動部の一側に前記光ビームを発生する発光素子を一体に設けた。   In the case of the structure of claim 12, a light emitting element for generating the light beam is integrally provided on one side of the movable portion.

本発明のプレーナ型アクチュエータによれば、可動部における透過光を屈折手段で屈折して出射し、可動部の駆動に伴って偏向するようにしたことにより、光ビームを発する光源配置位置と光ビームの偏向方向とが可動部を挟んで互いに反対側となるので偏向領域が光源の存在で制限されることがない。したがって、必要な偏向角を容易に得ることができる。   According to the planar actuator of the present invention, the transmitted light in the movable part is refracted by the refracting means and emitted, and is deflected as the movable part is driven. The deflection direction is opposite to each other across the movable part, so that the deflection region is not limited by the presence of the light source. Therefore, a necessary deflection angle can be easily obtained.

また、可動部の透過光を偏向するようにしているので、偏向角を大きくしても偏向光の一部が可動部の周辺に配置した構成部材にけられる虞がない。したがって、光学設計の自由度が向上する。   Further, since the transmitted light of the movable part is deflected, there is no possibility that a part of the deflected light is applied to the constituent members arranged around the movable part even if the deflection angle is increased. Therefore, the degree of freedom in optical design is improved.

そして、可動部の一側に光ビームを発生する発光素子を一体に設ければ、発光素子を一体化した簡単な構造の光偏向用のプレーナ型アクチュエータを提供することができる。   If a light-emitting element that generates a light beam is integrally provided on one side of the movable portion, a planar actuator for light deflection having a simple structure in which the light-emitting elements are integrated can be provided.

以下、本発明の実施の形態を添付図面に基づいて詳細に説明する。なお、図９と同一の要素については、同一符号を用いて示す。
図１に、本発明に係るプレーナ型アクチュエータの第１実施形態の平面図を示す。
図１において、本第１実施形態のプレーナ型アクチュエータは、光ビームを偏向するものであり、可動部１と、駆動手段４と、固定基板５とを備えて構成する。なお、ここでは、光ビームを一次元方向に偏向するプレーナ型アクチュエータを例に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, about the same element as FIG. 9, it shows using the same code | symbol.
FIG. 1 shows a plan view of a first embodiment of a planar actuator according to the present invention.
In FIG. 1, the planar actuator according to the first embodiment deflects a light beam, and includes a movable portion 1, a drive unit 4, and a fixed substrate 5. Here, a planar actuator that deflects a light beam in a one-dimensional direction will be described as an example.

上記可動部１は、光ビームを透過すると共に回動して出射光を偏向するものであり、固定部３に一対の梁部６で回動可能に軸支されており、固定部３と梁部６と共に例えばシリコン基板をエッチングして一体的に形成される。また、可動部１は、中央部に設けた貫通孔１ｂに光ビームを屈折して出射する屈折手段としての例えば凸レンズ７を設け、周縁部に沿ってコイル８を敷設している。そして、コイル８は梁部６を介して固定部３側に引出されて固定部３上に設けた電極端子９に接続されている。   The movable portion 1 transmits the light beam and rotates to deflect the emitted light. The movable portion 1 is pivotally supported by the fixed portion 3 by a pair of beam portions 6. For example, the silicon substrate is etched together with the portion 6 to be integrally formed. Further, the movable portion 1 is provided with, for example, a convex lens 7 as a refracting means for refracting and emitting a light beam in a through hole 1b provided in the center portion, and a coil 8 is laid along the peripheral portion. The coil 8 is pulled out to the fixed portion 3 side via the beam portion 6 and connected to the electrode terminal 9 provided on the fixed portion 3.

また、上記駆動手段４は、可動部１に駆動力を作用して回動させるものであり、上記コイル８と、上記梁部６の軸方向に平行な可動部１の対辺近傍のコイル４に静磁界を作用して互いに反対向きの電磁力を発生させる静磁界発生手段としての永久磁石２Ａ，２Ｂとで構成している。永久磁石２Ａ，２Ｂは、枠状のヨーク１０の内側に設けられており、可動部１を間にして互いに反対磁極を対向して固定部３の外側に配置されている。   The driving means 4 rotates the movable portion 1 by applying a driving force to the coil 8 and the coil 4 near the opposite side of the movable portion 1 parallel to the axial direction of the beam portion 6. Permanent magnets 2A and 2B as static magnetic field generating means for generating an electromagnetic force in opposite directions by applying a static magnetic field. The permanent magnets 2 </ b> A and 2 </ b> B are provided inside the frame-shaped yoke 10, and are arranged outside the fixed portion 3 with the opposite magnetic poles facing each other with the movable portion 1 therebetween.

そして、上記固定基板５は、上記固定部３及び永久磁石２Ａ，２Ｂ並びにヨーク１０を載置して保持するものであり、図２に示すように上記凸レンズ７の対向部位に開口部５ａを形成し、光ビームＬを下方から凸レンズ７に入射させることができるようにしている。   The fixed substrate 5 mounts and holds the fixed portion 3, the permanent magnets 2A and 2B, and the yoke 10, and an opening 5a is formed at a portion facing the convex lens 7 as shown in FIG. In addition, the light beam L can be incident on the convex lens 7 from below.

なお、凸レンズ７は個別に加工したものを可動部１の貫通孔１ｂに対応して貼り付けてもよく、可動部１の一方の面に透明樹脂を滴下して表面張力により凸レンズを形成し、可動部１のもう一方の面から貫通孔１ｂを形成してもよい。また、可動部１が光ビームの透過を妨げない材質である場合には、可動部１の貫通孔１ｂ相当部分に貫通孔を設けなくてもよい。   The convex lens 7 may be individually processed and pasted corresponding to the through hole 1b of the movable part 1, and a convex resin is formed by surface tension by dropping a transparent resin on one surface of the movable part 1, The through hole 1b may be formed from the other surface of the movable portion 1. Further, when the movable part 1 is made of a material that does not hinder the transmission of the light beam, it is not necessary to provide a through hole in a portion corresponding to the through hole 1 b of the movable part 1.

次に、本第１実施形態に係るプレーナ型アクチュエータの動作を説明する。
先ず、コイル８に対して外部から電極端子９を介して駆動電流を供給する。このとき、梁部６の軸線に平行な可動部１の対辺には、永久磁石２Ａ，２Ｂによる静磁界が作用している。そのため、可動部１の面に平行な静磁界成分と、上記対辺近傍のコイル８を流れる電流との相互作用により、可動部１の上記対辺には、互いに反対向きの電磁力が発生し、可動部１が梁部６を軸として図２中矢印Ａ又はＢ方向に回動する。 Next, the operation of the planar actuator according to the first embodiment will be described.
First, a drive current is supplied to the coil 8 from the outside via the electrode terminal 9. At this time, the static magnetic field by the permanent magnets 2A and 2B acts on the opposite side of the movable part 1 parallel to the axis of the beam part 6. Therefore, due to the interaction between the static magnetic field component parallel to the surface of the movable part 1 and the current flowing through the coil 8 in the vicinity of the opposite side, opposite electromagnetic forces are generated on the opposite side of the movable part 1 to move the movable part 1. The part 1 rotates about the beam part 6 in the direction of arrow A or B in FIG.

ここで、図２に示すように例えば凸レンズ７の光軸中心に沿って、アクチュエータの下方から固定基板５の開口部５ａを通してレーザ光のような光ビームＬを入射すると、光ビームＬは凸レンズ７により屈折して出射し、可動部１の回動に伴って同図中左右の一次元方向に偏向される。   Here, as shown in FIG. 2, for example, when a light beam L such as a laser beam is incident through the opening 5 a of the fixed substrate 5 from below the actuator along the center of the optical axis of the convex lens 7, the light beam L is converted into the convex lens 7. The light is refracted and emitted, and is deflected in the left-right one-dimensional direction in FIG.

このように構成された第１実施形態によれば、可動部１における透過光を凸レンズ７で屈折して出射し、可動部１の回動に伴って偏向するようにしたことにより、光ビームＬを発する光源の配置位置と光ビームの偏向方向とが可動部１を挟んで互いに反対側となるので偏向領域が光源の存在で制限されることがない。したがって、必要な偏向角を容易に得ることができる。   According to the first embodiment configured as described above, the light transmitted through the movable portion 1 is refracted by the convex lens 7 and emitted, and is deflected as the movable portion 1 is rotated. Since the arrangement position of the light source emitting light and the deflection direction of the light beam are opposite to each other across the movable portion 1, the deflection region is not limited by the presence of the light source. Therefore, a necessary deflection angle can be easily obtained.

また、可動部１における透過光を偏向するようにしているので、偏向角を大きくしても偏向光の一部が可動部１の周辺に配置した永久磁石２Ａ，２Ｂ等の構成部材にけられる虞がない。したがって、光学設計の自由度が向上する。   Further, since the transmitted light in the movable portion 1 is deflected, even if the deflection angle is increased, a part of the deflected light can be applied to the constituent members such as the permanent magnets 2A and 2B arranged around the movable portion 1. There is no fear. Therefore, the degree of freedom in optical design is improved.

そして、可動部１に直接駆動力を作用して回動させるようにしているので、応答速度が速く、また変位量を大きくすることが容易である。   Since the driving force is directly applied to the movable part 1 to rotate it, the response speed is fast and it is easy to increase the amount of displacement.

なお、光ビームＬの入射方向は、プレーナ型アクチュエータの下方から上方に向かうものに限定されず、上方から下方に向けて入射させてもよい。   The incident direction of the light beam L is not limited to the direction from the lower side to the upper side of the planar actuator, and may be incident from the upper side to the lower side.

また、駆動手段４は、上記電磁駆動方式に限定されず、梁部６の軸方向に平行な可動部１の対辺近傍に設けた上部電極と、該上部電極に対向して可動部１の下方部位に配設した下部電極とで構成し、両電極間に静電引力を発生させるようにした静電駆動方式であってもよい。さらに、可動部１の主面に設けた薄膜永久磁石と、可動部１の下方部位に配設したコイルとで構成し、コイルによる上下方向の電磁界と薄膜永久磁石の静磁界との相互作用により可動部１を回動させるようにした薄膜磁石方式であってもよい。   Further, the driving means 4 is not limited to the electromagnetic driving method described above, and an upper electrode provided near the opposite side of the movable portion 1 parallel to the axial direction of the beam portion 6 and a lower portion of the movable portion 1 facing the upper electrode. An electrostatic drive method may be used in which an electrostatic attraction force is generated between the electrodes and the lower electrode disposed in the region. Furthermore, it is composed of a thin film permanent magnet provided on the main surface of the movable part 1 and a coil disposed in a lower part of the movable part 1, and the interaction between the vertical electromagnetic field by the coil and the static magnetic field of the thin film permanent magnet. It may be a thin film magnet system in which the movable part 1 is rotated.

次に、本発明のプレーナ型アクチュエータの第２実施形態を、図３及び図４を参照して説明する。ここでは、図１及び図２と同一の要素には同一の符号を付して示し、第１実施形態と異なる部分についてのみ説明する。
図３に示す本第２実施形態は、可動部１を略Ｓ字状に屈曲した形状の一対の梁部１１で水平移動可能に固定部３に支持しており、可動部１には周縁部に沿ってコイル８を敷設し、梁部１１の可動部１側の接続部１１ａ，１１ａを結ぶ線に対して平行な可動部１の対辺の下方部位には永久磁石２Ａ，２Ｂを配置し、この永久磁石２Ａ，２Ｂと上記コイル８とで駆動手段４を構成している。そして、図４に示すように永久磁石２Ａ，２Ｂは、可動部１の上記対辺に対してそれぞれ反対磁極を対向し、上下方向に静磁界を作用させている。 Next, a planar actuator according to a second embodiment of the present invention will be described with reference to FIGS. Here, the same elements as those in FIGS. 1 and 2 are denoted by the same reference numerals, and only different portions from the first embodiment will be described.
In the second embodiment shown in FIG. 3, the movable portion 1 is supported by the fixed portion 3 so as to be horizontally movable by a pair of beam portions 11 bent in a substantially S shape. The permanent magnets 2A and 2B are arranged in the lower part of the opposite side of the movable part 1 parallel to the line connecting the connecting parts 11a and 11a on the movable part 1 side of the beam part 11 along the The permanent magnets 2A and 2B and the coil 8 constitute a driving means 4. As shown in FIG. 4, the permanent magnets 2 </ b> A and 2 </ b> B oppose the opposite magnetic poles to the opposite sides of the movable part 1, and apply a static magnetic field in the vertical direction.

次に、本第２実施形態の動作を、図５を参照して説明する。
先ず、コイル８に対して外部から電極端子９を介して駆動電流を供給する。このとき、可動部１の上記対辺には、永久磁石２Ａ，２Ｂによる互いに反対向きの静磁界が上下方向に作用している。そのため、可動部１の面に垂直な静磁界成分と、上記対辺近傍のコイル８を流れる電流との相互作用により、可動部１の上記対辺には、互いに同じ向きの水平方向の電磁力が発生し、可動部１が梁部１１に支持されて図３又は図４中Ｃ又はＤ方向に水平動作をする。 Next, the operation of the second embodiment will be described with reference to FIG.
First, a drive current is supplied to the coil 8 from the outside via the electrode terminal 9. At this time, static magnetic fields opposite to each other by the permanent magnets 2A and 2B are acting on the opposite side of the movable part 1 in the vertical direction. Therefore, due to the interaction between the static magnetic field component perpendicular to the surface of the movable part 1 and the current flowing through the coil 8 near the opposite side, horizontal electromagnetic forces in the same direction are generated on the opposite side of the movable part 1. Then, the movable part 1 is supported by the beam part 11 and moves horizontally in the direction C or D in FIG. 3 or FIG.

ここで、図４に示すように可動部１の凸レンズ７の光軸中心に沿って、アクチュエータの下方から固定基板５の開口部５ａを通して光ビームＬを入射すると、光ビームＬは凸レンズ７により屈折して出射する。このとき、可動部１が水平方向に移動すると、例えば図５に示すように凸レンズ７がＣ方向に移動した場合には、凸レンズ７に対する光ビームの入射点は、同図中破線で示す移動後の凸レンズ７の光軸中心から同図中右側にずれることになり、凸レンズ７の出射光は、移動後の凸レンズ７の焦点を通るように同図中左方向に屈折する。   Here, as shown in FIG. 4, when the light beam L is incident through the opening 5 a of the fixed substrate 5 from below the actuator along the center of the optical axis of the convex lens 7 of the movable portion 1, the light beam L is refracted by the convex lens 7. Then exit. At this time, when the movable part 1 moves in the horizontal direction, for example, when the convex lens 7 moves in the C direction as shown in FIG. 5, the incident point of the light beam on the convex lens 7 is after the movement indicated by the broken line in the figure. Therefore, the light emitted from the convex lens 7 is refracted in the left direction so as to pass through the focal point of the convex lens 7 after the movement.

また、凸レンズ７が図４中Ｄ方向に移動した場合には、上述と反対に光ビームＬは、同図中右方向に屈折して出射する。このようにして、凸レンズ７が水平方向に往復移動するのに伴って、光ビームＬは同図中左右の一次元方向に偏向される。   Further, when the convex lens 7 moves in the direction D in FIG. 4, the light beam L is refracted and emitted in the right direction in FIG. In this way, as the convex lens 7 reciprocates in the horizontal direction, the light beam L is deflected in the left and right one-dimensional direction in the figure.

このように、本第２実施形態によれば、可動部１の透過光を偏向するようにしているので必要な偏向角を容易に得ることができ、また偏向光がアクチュエータの構成部材によってけられる虞がなく、光学設計の自由を向上することができる。   As described above, according to the second embodiment, since the transmitted light of the movable portion 1 is deflected, a necessary deflection angle can be easily obtained, and the deflected light is scattered by the constituent members of the actuator. There is no fear, and the freedom of optical design can be improved.

さらに、可動部１に直接駆動力を作用して可動させるようにしているので、応答速度が速く、また変位量を大きくすることが容易である。   Furthermore, since the driving force is directly applied to the movable part 1 to move it, the response speed is fast and it is easy to increase the amount of displacement.

次に、本発明プレーナ型アクチュエータの第３実施形態を、図６及び図７を参照して説明する。なお、ここでは、図１と同一の要素には同一符号を付して示す。
図６に示す本第３実施形態は、中央部に凸レンズ７を備えた円形状の可動部１を、可動部１の中心に対して放射状に設けた３本の略Ｓ字状に屈曲した梁部１１で固定部３に支持している。また、可動部１には、第１櫛歯電極１２を放射状に延設し、第１櫛歯電極１２の内側端部を互いに接続して上記梁部１１を介して固定部３側に引出し、固定部３上に設けた電極端子９に接続している。さらに、可動部１の下方部位に設けた固定基板５には、上記第１櫛歯電極１２と噛み合うように第２櫛歯電極１３ａ，１３ｂ，１３ｃを円周方向に三つのグループに区分けして立設し、グループ毎にその外側端部を互いに接続して、それぞれ電極端子１４ａ，１４ｂ，１４ｃに接続している。そして、第１櫛歯電極１２と第２櫛歯電極１３ａ，１３ｂ，１３ｃとで駆動手段４を構成し、両電極間に静電引力が発生するようにしている。 Next, a third embodiment of the planar actuator of the present invention will be described with reference to FIGS. Here, the same elements as those in FIG. 1 are denoted by the same reference numerals.
The third embodiment shown in FIG. 6 is a beam in which a circular movable portion 1 having a convex lens 7 at the center is bent into three substantially S-shapes provided radially with respect to the center of the movable portion 1. The part 11 supports the fixed part 3. Further, the movable part 1 is provided with a first comb-teeth electrode 12 extending radially, the inner ends of the first comb-teeth electrode 12 are connected to each other, and are drawn out to the fixed part 3 side through the beam part 11, It is connected to an electrode terminal 9 provided on the fixed portion 3. Further, on the fixed substrate 5 provided in the lower part of the movable part 1, the second comb electrodes 13a, 13b, 13c are divided into three groups in the circumferential direction so as to mesh with the first comb electrodes 12. Standing up, the outer ends of each group are connected to each other and connected to the electrode terminals 14a, 14b, and 14c, respectively. The first comb-teeth electrode 12 and the second comb-teeth electrodes 13a, 13b, and 13c constitute the drive means 4 so that an electrostatic attractive force is generated between the electrodes.

次に、本第３実施形態の動作を、図７を参照して説明する。
例えば図７に示すように、直流電源Ｅにより第１櫛歯電極１２に負の電圧を供給し、第２櫛歯電極１３ａ，１３ｂ，１３ｃに正の電圧を供給する。この場合、第２櫛歯電極１３ａ，１３ｂ，１３ｃに供給する電圧値をグループ毎に変化させると、可動部１は、第１櫛歯電極１２と三グループの第２櫛歯電極１３ａ，１３ｂ，１３ｃとの静電引力の違いにより水平のＸＹ平面内で二次元方向に移動する。したがって、アクチュエータの下方から固定基板５の開口部５ａを通して凸レンズ７に光ビームＬを入射すると、光ビームＬは凸レンズ７により屈折して出射し、可動部１の二次元移動に伴って二次元方向に偏向される。 Next, the operation of the third embodiment will be described with reference to FIG.
For example, as shown in FIG. 7, a negative voltage is supplied to the first comb electrode 12 by the DC power source E, and a positive voltage is supplied to the second comb electrodes 13a, 13b, 13c. In this case, when the voltage value supplied to the second comb-teeth electrodes 13a, 13b, 13c is changed for each group, the movable part 1 is connected to the first comb-teeth electrode 12 and the three groups of second comb-teeth electrodes 13a, 13b, It moves in a two-dimensional direction in the horizontal XY plane due to the difference in electrostatic attraction with 13c. Accordingly, when the light beam L is incident on the convex lens 7 through the opening 5a of the fixed substrate 5 from below the actuator, the light beam L is refracted and emitted by the convex lens 7, and in a two-dimensional direction along with the two-dimensional movement of the movable portion 1. To be biased.

このように、本第３実施形態によれば、第２実施形態の効果に加えて、駆動手段４が静電駆動方式であるため電磁駆動方式のようなコイルや永久磁石を必要とせず小型軽量のアクチュエータを実現することができる。   Thus, according to the third embodiment, in addition to the effects of the second embodiment, since the driving means 4 is an electrostatic drive system, it is not necessary to use a coil or a permanent magnet as in the electromagnetic drive system. The actuator can be realized.

次に、本発明のプレーナ型アクチュエータの第４実施形態を、図８を参照して説明する。なお、ここでは、図１と同一の要素には同一符号を付して示し、第１実施形態と異なる部分についてのみ説明する。
図８に示す本第４実施形態は、第１実施形態におけるように外部から光ビームＬを与えるのではなく、可動部１の下方部位に配設した固定基板５に凸レンズ７に対向して発光素子１５を設け、この発光素子１５から発した光ビームＬを凸レンズ７に入射させるように構成している。 Next, a fourth embodiment of the planar actuator of the present invention will be described with reference to FIG. Here, the same elements as those in FIG. 1 are denoted by the same reference numerals, and only different portions from the first embodiment will be described.
The fourth embodiment shown in FIG. 8 does not apply the light beam L from the outside as in the first embodiment, but emits light on the fixed substrate 5 disposed below the movable portion 1 so as to face the convex lens 7. An element 15 is provided, and the light beam L emitted from the light emitting element 15 is made incident on the convex lens 7.

このように構成したことにより、本第４実施形態によれば、第１実施形態の効果に加えて発光素子１５を一体化した簡単な構成の光偏向用プレーナ型アクチュエータを提供することができる。   With this configuration, according to the fourth embodiment, in addition to the effects of the first embodiment, it is possible to provide a planar actuator for light deflection having a simple configuration in which the light emitting element 15 is integrated.

なお、本第４実施形態では、第１実施形態のプレーナ型アクチュエータに発光素子１５を一体化した構成のものを示したが、これに限られず、第２又は第３実施形態のプレーナ型アクチュエータにも適用することができる。   In the fourth embodiment, the light emitting element 15 is integrated with the planar actuator of the first embodiment. However, the present invention is not limited to this, and the planar actuator of the second or third embodiment is used. Can also be applied.

また、屈折手段は、凸レンズ７に限られず、凹レンズやプリズムまたは光を屈折する平板な部材のいずれであってもよい。   Further, the refracting means is not limited to the convex lens 7 and may be a concave lens, a prism, or a flat member that refracts light.

本発明によるプレーナ型アクチュエータの第１実施形態を示す平面図である。It is a top view which shows 1st Embodiment of the planar type actuator by this invention. 図１のＹ−Ｙ線断面図である。It is the YY sectional view taken on the line of FIG. 本発明によるプレーナ型アクチュエータの第２実施形態を示す平面図である。It is a top view which shows 2nd Embodiment of the planar type actuator by this invention. 図３のＸ−Ｘ線断面図である。It is the XX sectional view taken on the line of FIG. 第２実施形態の光偏向の動作を示す説明図である。It is explanatory drawing which shows the operation | movement of the optical deflection of 2nd Embodiment. 本発明によるプレーナ型アクチュエータの第３実施形態を示す平面図である。It is a top view which shows 3rd Embodiment of the planar type actuator by this invention. 図６のＹ−Ｙ線断面図である。It is the YY sectional view taken on the line of FIG. 本発明によるプレーナ型アクチュエータの第４実施形態を示す断面図である。It is sectional drawing which shows 4th Embodiment of the planar type actuator by this invention. 従来技術における光偏向を示す説明図である。It is explanatory drawing which shows the optical deflection in a prior art.

符号の説明Explanation of symbols

１…固定部
２…可動部
３Ａ，３Ｂ…永久磁石
４…駆動手段
５…固定基板
６，１１…梁部
７…屈折手段
８…コイル
１２…第１櫛歯電極
１３ａ，１３ｂ，１３ｃ…第２櫛歯電極
１５…発光素子 DESCRIPTION OF SYMBOLS 1 ... Fixed part 2 ... Movable part 3A, 3B ... Permanent magnet 4 ... Driving means 5 ... Fixed substrate 6,11 ... Beam part 7 ... Refraction means 8 ... Coil 12 ... 1st comb-tooth electrode 13a, 13b, 13c ... 2nd Comb electrode 15 ... light emitting element

Claims (12)

固定部に梁部で可動自由に支持された可動部と、該可動部に駆動力を作用して駆動させる駆動手段とを備え、前記可動部を駆動して光ビームを偏向するプレーナ型アクチュエータであって、
前記可動部に、当該可動部の一側から入射する光ビームを屈折して可動部の他側に出射する屈折手段を設けたことを特徴とするプレーナ型アクチュエータ。 A planar actuator that includes a movable part that is freely supported by a beam part on a fixed part, and a driving means that drives the movable part by applying a driving force, and that drives the movable part to deflect a light beam; There,
A planar actuator, wherein the movable part is provided with a refracting means for refracting a light beam incident from one side of the movable part and emitting it to the other side of the movable part. 前記屈折手段は、レンズであることを特徴とする請求項１に記載のプレーナ型アクチュエータ。   2. The planar actuator according to claim 1, wherein the refracting means is a lens. 前記駆動手段は、前記可動部を前記梁部の軸回りに回動させる駆動力を発生する構成としたことを特徴とする請求項１又は２に記載のプレーナ型アクチュエータ。   3. The planar actuator according to claim 1, wherein the driving unit is configured to generate a driving force for rotating the movable portion around an axis of the beam portion. 前記駆動手段は、前記可動部の周縁部に沿って敷設したコイルと、前記梁部の軸方向に平行な可動部の対辺近傍のコイルに静磁界を作用させる静磁界発生手段とで構成し、前記コイルを流れる電流と前記静磁界との相互作用により可動部の前記対辺に互いに反対向きの電磁力を作用させるようにしたことを特徴とする請求項３に記載のプレーナ型アクチュエータ。   The driving means comprises a coil laid along the peripheral edge of the movable part, and a static magnetic field generating means for applying a static magnetic field to a coil near the opposite side of the movable part parallel to the axial direction of the beam part, 4. The planar actuator according to claim 3, wherein electromagnetic forces in opposite directions are applied to the opposite sides of the movable portion by an interaction between a current flowing through the coil and the static magnetic field. 5. 前記駆動手段は、前記梁部の軸方向に平行な可動部の対辺近傍に設けた上部電極と、該上部電極に対向して可動部の下方部位に配設した下部電極とで構成し、両電極間に静電引力を発生させるようにしたことを特徴とする請求項３に記載のプレーナ型アクチュエータ。   The driving means includes an upper electrode provided in the vicinity of the opposite side of the movable portion parallel to the axial direction of the beam portion, and a lower electrode disposed at a lower portion of the movable portion so as to face the upper electrode. 4. The planar actuator according to claim 3, wherein electrostatic attraction is generated between the electrodes. 前記駆動手段は、前記可動部を水平方向に移動させる駆動力を発生する構成としたことを特徴とする請求項１又は２に記載のプレーナ型アクチュエータ。   The planar actuator according to claim 1, wherein the driving unit is configured to generate a driving force that moves the movable part in a horizontal direction. 前記駆動手段は、前記可動部の周縁部に沿って敷設したコイルと、前記梁部の軸方向に平行な対辺近傍のコイルに対して上下方向で互いに反対向きの静磁界を作用させる静磁界発生手段とで構成し、前記コイルを流れる電流と前記静磁界との相互作用により可動部に水平方向の電磁力を作用させるようにしたことを特徴とする請求項６に記載のプレーナ型アクチュエータ。   The driving means generates a static magnetic field that applies a static magnetic field opposite to each other in the vertical direction to a coil laid along the peripheral edge of the movable part and a coil near the opposite side parallel to the axial direction of the beam part. 7. The planar actuator according to claim 6, wherein a horizontal electromagnetic force is applied to the movable portion by the interaction between the current flowing through the coil and the static magnetic field. 前記駆動手段は、前記可動部の周縁部に沿って放射状に延設した第１櫛歯電極と、前記第１櫛歯電極と噛み合って、円周方向に複数にグループ分けして固定配設された第２櫛歯電極とで構成し、両電極間に静電引力を発生させるようにしたことを特徴とする請求項６に記載のプレーナ型アクチュエータ。   The driving means is fixedly arranged in a plurality of groups in the circumferential direction by meshing with the first comb electrode extending radially along the peripheral edge of the movable portion and the first comb electrode. The planar actuator according to claim 6, wherein the second comb-shaped electrode is configured to generate an electrostatic attractive force between the two electrodes. 前記可動部の中心に対して放射状に設けた少なくとも３本の梁部で前記可動部を支持する構成としたことを特徴とする請求項８に記載のプレーナ型アクチュエータ。   The planar actuator according to claim 8, wherein the movable portion is supported by at least three beam portions provided radially with respect to the center of the movable portion. 前記梁部は、略Ｓ字状に屈曲した形状に形成されたことを特徴とする請求項１〜９のいずれか一つに記載のプレーナ型アクチュエータ。   The planar actuator according to any one of claims 1 to 9, wherein the beam portion is formed in a shape bent in a substantially S shape. 前記可動部の一側に配設した固定基板に前記屈折手段に対向して光ビームを通過させる開口部を形成したことを特徴とする請求項１〜１０のいずれか一つに記載のプレーナ型アクチュエータ。   The planar type according to any one of claims 1 to 10, wherein an opening for allowing a light beam to pass through is formed on a fixed substrate disposed on one side of the movable portion so as to face the refracting means. Actuator. 前記可動部の一側に前記光ビームを発生する発光素子を一体に設けたことを特徴とする請求項１〜１０のいずれか一つに記載のプレーナ型アクチュエータ。   The planar actuator according to any one of claims 1 to 10, wherein a light emitting element that generates the light beam is integrally provided on one side of the movable part.
JP2003435211A 2003-12-26 2003-12-26 Planar type actuator Pending JP2005195639A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003435211A JP2005195639A (en) 2003-12-26 2003-12-26 Planar type actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003435211A JP2005195639A (en) 2003-12-26 2003-12-26 Planar type actuator

Publications (1)

Publication Number Publication Date
JP2005195639A true JP2005195639A (en) 2005-07-21

Family

ID=34815402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003435211A Pending JP2005195639A (en) 2003-12-26 2003-12-26 Planar type actuator

Country Status (1)

Country Link
JP (1) JP2005195639A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008203406A (en) * 2007-02-19 2008-09-04 Konica Minolta Opto Inc Drive unit, imaging unit, and imaging apparatus
JP2011525288A (en) * 2008-06-13 2011-09-15 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Orientable lens for LED fixtures
JP2012008569A (en) * 2010-06-23 2012-01-12 Lg Innotek Co Ltd Camera module having mems actuator and driving method thereof
JP2013066846A (en) * 2011-09-22 2013-04-18 Minebea Motor Manufacturing Corp Vibration generator
JP2014112264A (en) * 2006-06-30 2014-06-19 New Shicoh Technology Co Ltd Lens drive, camera, and cellular phone with camera
WO2015005217A1 (en) * 2013-07-10 2015-01-15 株式会社村田製作所 Lens module
JP2015061428A (en) * 2013-09-19 2015-03-30 日本信号株式会社 Planar actuator
US9590463B2 (en) 2011-09-22 2017-03-07 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
US9989437B2 (en) 2013-01-22 2018-06-05 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
US10305357B2 (en) 2012-05-22 2019-05-28 Minebea Co., Ltd. Vibration generator having swing unit, frame and elastic member

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014112264A (en) * 2006-06-30 2014-06-19 New Shicoh Technology Co Ltd Lens drive, camera, and cellular phone with camera
JP2008203406A (en) * 2007-02-19 2008-09-04 Konica Minolta Opto Inc Drive unit, imaging unit, and imaging apparatus
JP2011525288A (en) * 2008-06-13 2011-09-15 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Orientable lens for LED fixtures
JP2012008569A (en) * 2010-06-23 2012-01-12 Lg Innotek Co Ltd Camera module having mems actuator and driving method thereof
US10790735B2 (en) 2011-09-22 2020-09-29 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
US10298106B2 (en) 2011-09-22 2019-05-21 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
US11336164B2 (en) 2011-09-22 2022-05-17 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
JP2013066846A (en) * 2011-09-22 2013-04-18 Minebea Motor Manufacturing Corp Vibration generator
US9590463B2 (en) 2011-09-22 2017-03-07 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
US10778074B2 (en) 2011-09-22 2020-09-15 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and holder used in vibration-generator
US11196327B2 (en) 2012-05-22 2021-12-07 Minebea Mitsumi Inc. Vibration generator having swing unit, frame and elastic member
US10305357B2 (en) 2012-05-22 2019-05-28 Minebea Co., Ltd. Vibration generator having swing unit, frame and elastic member
US10848043B2 (en) 2012-05-22 2020-11-24 Minebea Mitsumi Inc. Vibration generator having swing unit, frame and elastic member
US11552542B2 (en) 2012-05-22 2023-01-10 Minebea Mitsumi Inc. Vibrator generator having swing unit, frame and elastic member
US11837936B2 (en) 2012-05-22 2023-12-05 Minebea Mitsumi, Inc. Vibrator generator having swing unit, frame and elastic member
US10350637B2 (en) 2013-01-22 2019-07-16 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
US9989437B2 (en) 2013-01-22 2018-06-05 Minebea Co., Ltd. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
US10780457B2 (en) 2013-01-22 2020-09-22 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
US11642696B2 (en) 2013-01-22 2023-05-09 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
US11904359B2 (en) 2013-01-22 2024-02-20 Minebea Mitsumi Inc. Vibration generator moving vibrator by magnetic field generated by coil and vibrator-mounted holder used in vibration-generator
JPWO2015005217A1 (en) * 2013-07-10 2017-03-02 株式会社村田製作所 Lens module
WO2015005217A1 (en) * 2013-07-10 2015-01-15 株式会社村田製作所 Lens module
JP2015061428A (en) * 2013-09-19 2015-03-30 日本信号株式会社 Planar actuator

Similar Documents

Publication Publication Date Title
JP6519033B1 (en) Object detection device, object detection method, and design method of object detection device
JP4457093B2 (en) Micromirror device and array thereof
JP5872073B2 (en) Optical scanning device and projector
JP5783568B2 (en) Micro scanner
JP6388262B2 (en) Scanner device
JP2016046407A (en) Piezoelectric actuator, linear drive device and electronic apparatus
KR20160094297A (en) Optical device and image display apparatus
JP2005195639A (en) Planar type actuator
JP2007014130A (en) Planar-type electromagnetic actuator
JP2009003429A (en) Actuator
KR20060124079A (en) Mems scanning micromirror and dual-axis electromagnetic mems scanning micromirror device
JP6651110B1 (en) Object detection device
JP4144840B2 (en) Oscillator device, optical deflector, and optical apparatus using optical deflector
JP2004110005A (en) Shaking device, optical deflector using same, image display device using the optical deflector, image forming apparatus, and manufacturing method therefor
JP2006072251A (en) Planar type actuator
JP2021132416A (en) Actuator, optical scanner and article detecting device
JP2009042322A (en) Oscillating body apparatus, optical deflector and optical equipment using the same
JP2013138601A (en) Planar type electromagnetic actuator
JP2005181395A (en) Light deflector
JP2009265479A (en) Optical deflector and method of driving the same
JP5387222B2 (en) Optical deflector
JP2002328317A (en) Light deflector
JP4491064B2 (en) Optical path changing device, optical switch, and optical head
JP2003029190A (en) Optical deflector, image display device and imaging device using the same, and method for manufacturing optical deflector
JP2013156487A (en) Mirror device, method for manufacturing mirror device, optical scanner and image forming apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061025

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20061121

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20061121

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20081125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081202

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090331