JP2002328317A - Light deflector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light deflector capable of obtaining a large deflection angle of a light refection part with a low driving voltage. SOLUTION: The light deflector comprises a fixing base 4 having an opening 4a and equipped with a first supporting part 3a protruding toward the central part of the opening 4a, a supporting base 2 arranged on the opening 4a and equipped with a second supporting part 6a arranged facing the first supporting part 3a radially protruding from the peripheral part, a plurality of elastic members 5 connecting to the supporting base 2 and the fixing base 4, a light reflection part 1 placed on the supporting base 2 so as a reflection part 1a to make a prescribed angle, a first electrode 3 arranged on a first comb-shaped part 3A of the first supporting part 3a, and a second electrode 6 arranged on a second comb-shaped part 6A of the second supporting part 6a. A potential is impressed to between the first electrode 3 and the second electrode to make them attract and repel each other by static electricity and oscillate the supporting base 2, thereby, to make the light incident on the reflection part 1a of the light reflection part 1 reflected at a prescribed angle. Voltage is applied between the first electrode 3 and the second electrode 6. The first supporting part 3a and the second supporting part 6a are sucked and repelled by electrostatic force. The supporting base 2 is swung, and light incident on the reflection part 1a of the light reflection part 1 is reflected by the prescribed angle.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、光偏向器に係わる
ものであり、特にレーザ光を連続走査するのに用いる光
スキャナーや、レーザー光を所定の角度に偏向させて方
向を変えるための光スイッチや光クロスコネクトなどに
好適な光偏向器に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical deflector, and more particularly, to an optical scanner used for continuously scanning laser light, and a light for changing the direction by deflecting the laser light to a predetermined angle. The present invention relates to an optical deflector suitable for a switch, an optical cross connect, and the like.

【０００２】[0002]

【従来の技術】電子写真式複写機、レーザビームプリン
タ、バーコードリーダ等の光学機器の走査装置や、光デ
ィスクのトラッキング制御装置の光偏向装置や、レーザ
光をスキャニングして映像を投影する表示装置などに
は、光偏向器が使用されている。2. Description of the Related Art Scanning devices for optical equipment such as electrophotographic copying machines, laser beam printers, bar code readers, etc., optical deflecting devices for optical disk tracking control devices, and display devices for scanning laser beams and projecting images. For example, an optical deflector is used.

【０００３】一般に、機械的に光偏向を行う光偏向器と
しては、回転多面鏡（ポリゴンミラー）、振動型反射鏡
（ガルバノミラー）等があるが、ガルバノミラー型のも
のはポリゴンミラー型のものに比べて機構を小型化で
き、又、最近の半導体プロセス技術を応用してシリコン
基板を用いたマイクロミラーの試作例なども報告されて
おり、さらに小型化、軽量化、低コスト化が期待でき
る。[0003] In general, optical deflectors for mechanically deflecting light include a rotary polygon mirror (polygon mirror) and a vibrating reflecting mirror (galvano mirror). The galvanomirror type is a polygon mirror type. The mechanism can be made smaller than that of, and a prototype of a micromirror using a silicon substrate by applying recent semiconductor process technology has been reported. Further reductions in size, weight, and cost can be expected. .

【０００４】このようなガルバノミラー型の光偏向器の
従来例が図６及び図７にそれぞれ示されている。Conventional examples of such a galvanomirror type optical deflector are shown in FIGS. 6 and 7, respectively.

【０００５】図６は、第１従来例の光偏向器を示す分解
斜視図である。図６において、ベース５９には左右一対
の支持部５１、５２が設けられ、この一対の支持部５
１、５２上には振動体５３が配置されている。この振動
体５３は、外枠部５４と、この外枠部５４の開口部５４
ａに配置された反射ミラー部５５と、この反射ミラー部
５５の重心を通る軸上の位置で反射ミラー部５５と外枠
部５４とを連結する一対の梁部５６，５６とから一体的
に形成されている。外枠部５４の左右両端部分が一対の
支持部５１，５２上に固定されている。FIG. 6 is an exploded perspective view showing a first conventional optical deflector. In FIG. 6, a base 59 is provided with a pair of left and right support portions 51 and 52, and this pair of support portions 5 is provided.
A vibrating body 53 is arranged on 1 and 52. The vibrating body 53 includes an outer frame 54 and an opening 54 of the outer frame 54.
a, and a pair of beams 56, 56 connecting the reflection mirror 55 and the outer frame 54 at an axial position passing through the center of gravity of the reflection mirror 55. Is formed. The left and right ends of the outer frame 54 are fixed on a pair of support parts 51 and 52.

【０００６】又、駆動手段Ｄは、ベース５９上に配置さ
れた左右一対の固定電極５７，５８を有し、この一対の
固定電極５７，５８は反射ミラー部５５の左右両端部に
対向する位置に配置されている。この一対の固定電極５
７，５８の相手側の電極として反射ミラー部５５が設け
られ、この一対の固定電極５７，５８のいずれか一方と
反射ミラー部５５との間には切替スイッチＳＷを介して
選択的に電圧を印加できるようになっている。なお、反
射ミラー部５５は外枠部５４と一対の梁部５６，５６を
介して接続されているため、反射ミラー部５５への電圧
印加は外枠部５４に印加すれば良い。The driving means D has a pair of left and right fixed electrodes 57 and 58 disposed on a base 59, and the pair of fixed electrodes 57 and 58 are located at positions opposed to both left and right ends of the reflection mirror 55. Are located in This pair of fixed electrodes 5
A reflection mirror section 55 is provided as an electrode on the other side of the pair of fixed electrodes 57 and 58. A voltage is selectively applied between one of the pair of fixed electrodes 57 and 58 and the reflection mirror section 55 via a switch SW. It can be applied. Since the reflection mirror 55 is connected to the outer frame 54 via the pair of beams 56, 56, the voltage applied to the reflection mirror 55 may be applied to the outer frame 54.

【０００７】上記の構成の第１従来例の光偏向器５０Ａ
において、一方の固定電極５７と反射ミラー部５５との
間に電圧が印加されたときには，反射ミラー部５５の図
示向って左側が静電力により吸引されて、反射ミラー部
５５が一対の梁部５６，５６を軸として反時計方向に回
転し、又、他方の固定電極５８と反射ミラー部５５との
間に電圧が印加されたときには、反射ミラー部５５の右
側が静電力により吸引されて反射ミラー部５５が一対の
梁部５６，５６を軸として時計方向に回転する。従っ
て、駆動手段Ｄによって一対の固定電極５７，５８に交
互に電圧が印加されることによって反射ミラー部５５が
左右に振動するものである。この反射ミラー部５５に入
射された光は、反射ミラー部５５の振動によって反射角
が変更され、これによって光偏向される。[0007] The first conventional optical deflector 50A having the above-described configuration.
In the above, when a voltage is applied between one fixed electrode 57 and the reflection mirror portion 55, the left side of the reflection mirror portion 55 with respect to the drawing is attracted by electrostatic force, and the reflection mirror portion 55 is moved to the pair of beam portions 56. , 56, and when a voltage is applied between the other fixed electrode 58 and the reflection mirror portion 55, the right side of the reflection mirror portion 55 is attracted by electrostatic force and the reflection mirror portion is attracted. The portion 55 rotates clockwise about the pair of beam portions 56, 56. Therefore, the reflection mirror 55 vibrates right and left by alternately applying a voltage to the pair of fixed electrodes 57 and 58 by the driving means D. The reflection angle of the light incident on the reflection mirror section 55 is changed by the vibration of the reflection mirror section 55, and the light is deflected by this.

【０００８】図７は、第２従来例の光偏向器を示す分解
斜視図である。図７において、この第２従来例にあって
前記第１従来例と同一構成箇所は図面に同一符号を付し
てその説明を省略し、異なる構成箇所のみを説明する。FIG. 7 is an exploded perspective view showing a second conventional optical deflector. In FIG. 7, the same components as those of the first conventional example in the second conventional example are denoted by the same reference numerals in the drawings, and the description thereof will be omitted. Only different components will be described.

【０００９】即ち、この第２従来例の光偏向器５０Ｂに
おいては、駆動手段Ｄはベース５９上に配置された左右
一対の永久磁石６０，６１と、反射ミラー部５５の外周
部に配置された駆動用コイル６２とを有し、この駆動用
コイル６２に正逆交互の駆動電流を通電するように構成
されている。That is, in the optical deflector 50B of the second conventional example, the driving means D is disposed on a pair of left and right permanent magnets 60 and 61 disposed on the base 59 and on the outer peripheral portion of the reflection mirror section 55. And a driving coil 62, and a driving current is supplied to the driving coil 62 alternately in the forward and reverse directions.

【００１０】上記の構成の光偏向器５０Ｂにおいて、駆
動手段Ｄにより駆動用コイル６２に正逆交互の駆動電流
が通電されると、一対の永久磁石６０，６１の外部磁界
と駆動用コイル６２の電流とによるローレンツ力で反射
ミラー部５５が一対の梁部５６，５６を軸として振動す
るものである。In the optical deflector 50B having the above-described configuration, when a driving current is applied to the driving coil 62 by the driving means D in the alternate direction, the external magnetic field of the pair of permanent magnets 60 and 61 and the driving coil 62 The reflection mirror 55 oscillates around the pair of beams 56, 56 by Lorentz force caused by the current.

【００１１】[0011]

【発明が解決しようとする課題】ところで、第１従来例
の光偏向器５０Ａのように、静電気力により反射ミラー
部（光反射部）５５を傾斜または振動させるタイプの場
合（静電構造ともいう）においては、反射ミラー部５５
の振れ角（光走査角度ともいう）を大きくするために
は、固定電極５７，５８と反射ミラー部５５とのギャッ
プ間隔を大きくする必要がある。しかし、静電気力は、
ギャップ間隔の２乗に反比例するので、大きな振れ角を
得るには、固定電極５７，５８と反射ミラー部５５の間
に大きな電圧を印加する必要があるという課題があっ
た。By the way, as in the optical deflector 50A of the first conventional example, in the case of a type in which the reflection mirror portion (light reflection portion) 55 is tilted or vibrated by an electrostatic force (also referred to as an electrostatic structure). In), the reflection mirror 55
In order to increase the deflection angle (also referred to as an optical scanning angle), it is necessary to increase the gap between the fixed electrodes 57 and 58 and the reflection mirror unit 55. However, the electrostatic force
Since it is inversely proportional to the square of the gap interval, there is a problem that it is necessary to apply a large voltage between the fixed electrodes 57 and 58 and the reflection mirror unit 55 to obtain a large deflection angle.

【００１２】また、第２従来例の光偏向器５０Ｂのよう
に、ロレンツ力により反射ミラー部（光反射部）５５を
傾斜または振動させるタイプの場合においては、反射ミ
ラー部５５の振れ角を大きくするためには、駆動コイル
６２に流す電流を大きくすることによって大きなロレン
ツ力を得る必要があり、大きな電流を流すことによるジ
ュール熱の発生により、反射ミラー部５５が変形を起
し、大きな振れ角を安定して得るのは困難であるという
課題があった。Further, in the case of a type in which the reflection mirror section (light reflection section) 55 is tilted or vibrated by the Lorentz force as in the optical deflector 50B of the second conventional example, the deflection angle of the reflection mirror section 55 is increased. In order to achieve this, it is necessary to obtain a large Lorentz force by increasing the current flowing through the drive coil 62, and the reflection mirror 55 is deformed by the generation of Joule heat due to the flow of the large current, resulting in a large deflection angle. There is a problem that it is difficult to stably obtain.

【００１３】そこで本発明は、上記課題を解決し、光偏
向器において、簡単な構造を有すると共に小さい駆動電
圧で大きな光反射部の振れ角を得ることができる光偏向
器を提供することを目的とするものである。SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide an optical deflector having a simple structure and capable of obtaining a large deflection angle of a light reflecting portion with a small driving voltage. It is assumed that.

【００１４】[0014]

【課題を解決するための手段】上記目的を達成するため
の手段として、本発明の光偏向器は、開口部を有し、こ
の開口部の中央部に向かって突き出た第１支持部を備え
た固定台と、前記開口部に配置され、かつ周縁部から放
射状に向かって突き出された前記第１支持部と対向配置
する第２支持部を備えた支持台と、前記支持台と前記固
定台とを接続する複数の弾性部材と、前記支持台上に反
射部が所定の角度を有して載置された光反射部と、前記
第１支持部の第１櫛状部に配置された第１電極と、前記
第２支持部の第２櫛状部に配置された第２電極と、から
なり、前記第１電極と前記第２電極との間に電圧を印加
し、前記第１支持部と前記第２支持部を静電力により吸
引反発させ、前記支持台を揺動して、前記光反射部の反
射部に入射した光を所定の角度で反射させることを特徴
とする光偏向器である。As a means for achieving the above object, the optical deflector of the present invention has an opening and a first supporting portion protruding toward the center of the opening. A support base, a support base including a second support portion disposed in the opening and radially protruding from a peripheral edge and opposed to the first support portion; and the support base and the fixed base And a plurality of elastic members for connecting the first and second supporting members, a light reflecting portion having a reflecting portion mounted on the support table at a predetermined angle, and a second reflecting portion disposed on a first comb portion of the first supporting portion. A first electrode, and a second electrode disposed on a second comb-like portion of the second support portion, wherein a voltage is applied between the first electrode and the second electrode, and a voltage is applied between the first electrode and the second electrode. And the second support portion is attracted and repelled by electrostatic force, the support base is swung, and the light incident on the reflection portion of the light reflection portion An optical deflector for causing reflected at a predetermined angle.

【００１５】[0015]

【発明の実施の形態】以下、本発明の実施の形態につ
き、好ましい実施例により、図面を参照して説明する。Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

【００１６】＜第１実施例＞図１は本発明の光偏向器の
第１実施例を示す上面図である。図２は図１に示される
Ａ−Ａ’断面図である。図３は本発明の光偏向器の第１
実施例の動作状態を示す斜視図である。第１実施例の光
偏向器１０は、固定台４と、光反射部１の配置された支
持台２と、支持台２を保持するために固定台４と支持台
２との間に設けられた複数のバネ５と、支持台２に配置
された複数の第２電極６と、固定台４に配置された複数
の第１電極３と、第２電極６と第１電極３の間に電圧を
印加するための駆動源（図示しない）とから、概略、構
成されている。<First Embodiment> FIG. 1 is a top view showing a first embodiment of the optical deflector of the present invention. FIG. 2 is a sectional view taken along the line AA 'shown in FIG. FIG. 3 shows a first example of the optical deflector of the present invention.
FIG. 4 is a perspective view illustrating an operation state of the example. The optical deflector 10 according to the first embodiment is provided between the fixed base 4, the support base 2 on which the light reflection unit 1 is disposed, and the fixed base 4 and the support base 2 for holding the support base 2. A plurality of springs 5, a plurality of second electrodes 6 arranged on the support base 2, a plurality of first electrodes 3 arranged on the fixed base 4, and a voltage between the second electrodes 6 and the first electrodes 3. And a driving source (not shown) for applying the voltage.

【００１７】入射光１１を所定の振れ角で反射するため
の光反射部１は、支持台２上に、支持台２の表面に対し
て所定の角度（傾斜角）θでもって斜めに傾けて配置さ
れている。光反射部１の支持台２に接する端部はストッ
パー８により位置決めされ、光反射部１の概ね中央部を
支持する高さ調整部７により、光反射部１の支持台２に
対する傾きの大きさ（傾斜角）が規定されている。光反
射部１の反射部１ａは鏡面加工されており、入射する入
射光１１を反射して出射光１２として出射する。The light reflecting portion 1 for reflecting the incident light 11 at a predetermined deflection angle is inclined on the support 2 at a predetermined angle (inclination angle) θ with respect to the surface of the support 2. Are located. The end of the light reflecting portion 1 in contact with the support 2 is positioned by a stopper 8, and the height of the light reflecting portion 1 with respect to the support 2 is adjusted by a height adjusting portion 7 that supports a substantially central portion of the light reflecting portion 1. (Tilt angle) is defined. The reflecting portion 1a of the light reflecting portion 1 is mirror-finished, reflects the incident light 11 and emits it as the outgoing light 12.

【００１８】支持台２は例えば円盤状であり、固定台４
の開口部４ａ内に配置されており、固定台４に複数の２
個以上のバネ５により支持されているが、支持台２の表
面に垂直な回転中心軸１０ｃの周りに所定角度回転でき
るようになっている。支持台２の外周部には、複数の例
えば２個以上の第２電極６が設けられており、第２電極
６は固定台４とは所定の間隔離れている。The support table 2 is, for example, disc-shaped, and
Are arranged in the opening 4a, and a plurality of 2
Although supported by at least one spring 5, it can rotate by a predetermined angle around a rotation center axis 10 c perpendicular to the surface of the support 2. A plurality of, for example, two or more second electrodes 6 are provided on the outer peripheral portion of the support base 2, and the second electrodes 6 are separated from the fixed base 4 by a predetermined distance.

【００１９】第２電極６は第２支持部６ａとそれに接続
する複数の櫛部６Ａ，６Ｂ上に形成されており、第２支
持部６ａは支持台２の外周部に設けられており、固定台
４側に向って放射状に伸びており、これらに円周状の櫛
部６Ａ，６Ｂの一端が繋がっている。櫛部６Ａ，６Ｂ
は、第２支持部６ａに対し一定の方向の側例えば時計回
りの方向の側に、互いに所定距離離間して配置されてい
る。The second electrode 6 is formed on the second support portion 6a and a plurality of comb portions 6A and 6B connected to the second support portion 6a. The second support portion 6a is provided on the outer peripheral portion of the support base 2, and It extends radially toward the fourth side, and one ends of the circumferential comb portions 6A and 6B are connected to these. Combs 6A, 6B
Are arranged at a predetermined distance from the second support portion 6a, for example, at a side in a clockwise direction, and are spaced apart from each other by a predetermined distance.

【００２０】固定台４には、第２電極６に対応して複数
の例えば２個以上の第１電極３が設けられている。第１
電極３は第１支持部３ａと櫛部３Ａ、３Ｂ上に形成され
ており、第１支持部３ａは固定台４の内周部（支持台
側）に設けられており、支持台２に向って放射状に伸び
ており、これらに円周状の櫛部３Ａ，３Ｂの一端が繋が
っている。櫛部３Ａ，３Ｂは、第１支持部３ａに対し、
櫛部６Ａ，６Ｂと第２支持部６ａとは逆の方向の側すな
わちこの場合は反時計回りの方向の側に、互いに所定距
離離間して配置されている。The fixed base 4 is provided with a plurality of, for example, two or more first electrodes 3 corresponding to the second electrodes 6. First
The electrode 3 is formed on the first support portion 3a and the comb portions 3A and 3B. The first support portion 3a is provided on the inner peripheral portion of the fixed base 4 (on the support base side). They extend radially, and one ends of the circumferential comb portions 3A and 3B are connected to them. The comb portions 3A and 3B are arranged with respect to the first support portion 3a.
The comb portions 6A, 6B and the second support portion 6a are arranged on the opposite side, that is, on the side in the counterclockwise direction in this case, at a predetermined distance from each other.

【００２１】櫛部６Ａ，６Ｂと櫛部３Ａ，３Ｂ３とは、
対向して噛み合うようになっており、支持台２の外周部
と櫛部６Ａの間に、隙間を設けて櫛部３Ａが配置され、
櫛部６Ａと櫛部６Ｂの間に、隙間を設けて櫛部３Ｂが配
置されている。櫛部６Ａ，６Ｂの第２支持部６ａ側と反
対の端と、櫛部３Ａ，３Ｂの第１支持部３ａ側と反対の
端は、互いに向き合う配置になっている。The comb portions 6A and 6B and the comb portions 3A and 3B3
The comb portion 3A is arranged with a gap provided between the outer peripheral portion of the support base 2 and the comb portion 6A.
A comb portion 3B is arranged with a gap provided between the comb portions 6A and 6B. The ends of the comb portions 6A and 6B opposite to the second support portion 6a and the ends of the comb portions 3A and 3B opposite to the first support portion 3a are arranged to face each other.

【００２２】第２電極６と第１電極３は互いに絶縁され
ており、第２電極６と第１電極３との間には、図示しな
い駆動源（電圧源）が接続されており、電圧が印加され
ると、静電気力により、櫛場電極６の櫛部６Ａ，６Ｂと
第１電極３の櫛部３Ａ，３Ｂが互いに吸引されたり又は
反発して、固定台４に対し、支持台２が回転中心軸１０
ｃの周りに、時計周り又は反時計方向に所定の角度、揺
動回転する。このときの揺動の角度は、バネ５により固
定台４に対し反時計方向又は時計方向に支持台２に作用
する復元力と、第２電極６−第１電極３間の印加電圧に
よる静電気力との釣り合いによって決まる。The second electrode 6 and the first electrode 3 are insulated from each other, and a drive source (voltage source) (not shown) is connected between the second electrode 6 and the first electrode 3 so that a voltage is applied. When applied, the comb portions 6A, 6B of the comb field electrode 6 and the comb portions 3A, 3B of the first electrode 3 are attracted or repelled to each other by electrostatic force, and the support base 2 is rotated relative to the fixed base 4 with respect to the rotation center. Axis 10
The oscillating rotation is performed at a predetermined angle clockwise or counterclockwise around c. The swing angle at this time is determined by the restoring force acting on the support base 2 counterclockwise or clockwise with respect to the fixed base 4 by the spring 5 and the electrostatic force due to the voltage applied between the second electrode 6 and the first electrode 3. It depends on the balance.

【００２３】図３に示すように、光反射部１の反射部１
ａに入射したレーザー光からなる入射光１１は、第２電
極６と第１電極３間に印加される電圧によって決まる回
転角で、回転中心軸１０ｃの周りに支持台２の揺動回転
と共に回転する光反射部１により、走査、もしくは偏向
され、出射光１２として出射される。As shown in FIG. 3, the reflecting portion 1 of the light reflecting portion 1
The incident light 11 composed of the laser light incident on the a rotates at the rotation angle determined by the voltage applied between the second electrode 6 and the first electrode 3 together with the swing rotation of the support 2 around the rotation center axis 10c. The light is scanned or deflected by the light reflecting unit 1 and emitted as the emission light 12.

【００２４】本第１実施例の光偏向器１０を、所定の角
度で停止するように動作させれば、レーザー光の方向を
変える光スイッチなどの用途に用いることができるし、
所定角度の範囲を往復で回転振動するように動作させれ
ば光スキャナ等の用途に利用することができる。If the optical deflector 10 of the first embodiment is operated so as to stop at a predetermined angle, it can be used for applications such as an optical switch for changing the direction of laser light.
If it operates so as to rotate and reciprocate within a predetermined angle range, it can be used for applications such as an optical scanner.

【００２５】本第１実施例の光偏向器１０の構造では、
回転中心軸１０ｃの周りの回転角を大きくするには、円
周状の櫛歯６Ａ，６Ｂと櫛歯３Ａ，３Ｂの長さを長くす
れば良く、櫛歯６Ａ，６Ｂと櫛歯３Ａ，３Ｂ間の間隙を
広げる必要がないので、大きな回転角が必要でも、印加
電圧を極端に大きくする必要がない、という利点を有す
る。また、構造的には、同一平面上に支持台２及び固定
台４を配置してあるので、マイクロマシン作製技術を適
用して、簡便な製造プロセスで製造でき、また、小型化
が容易である。In the structure of the optical deflector 10 of the first embodiment,
In order to increase the rotation angle around the rotation center axis 10c, the length of the circumferential comb teeth 6A, 6B and the comb teeth 3A, 3B may be increased, and the comb teeth 6A, 6B and the comb teeth 3A, 3B may be increased. Since there is no need to widen the gap between them, there is an advantage that the applied voltage does not need to be extremely increased even if a large rotation angle is required. Further, structurally, since the support base 2 and the fixed base 4 are arranged on the same plane, the micromachine manufacturing technique can be applied to manufacture the semiconductor device by a simple manufacturing process, and the size can be easily reduced.

【００２６】＜第２実施例＞図４は本発明の光偏向器の
第２実施例を示す概略斜視図である。第２実施例の光偏
向器１０Ａは、第１実施例の光偏向器１０において、高
さ調整部７に代えて、高さ調整部１７とした以外は、第
１実施例の光偏向器１０と同様に構成したものである。<Second Embodiment> FIG. 4 is a schematic perspective view showing a second embodiment of the optical deflector of the present invention. The optical deflector 10A according to the second embodiment is the same as the optical deflector 10 according to the first embodiment except that a height adjusting unit 17 is used instead of the height adjusting unit 7. It is configured similarly to.

【００２７】高さ調整部１７は、その一端が光反射部１
の概ね中心部に揺動可能に接続され、その他端は支持台
２上に配置されているスライド部１７Ａに接続してお
り、矢印ｃ方向に所定距離往復移動可能なギヤラックピ
ニオン構造からなるスライド部１７Ａの移動により光反
射部１の反射部１ａの支持台２に対する傾斜角θ１を所
定範囲内の値に可変に設定できるようになっている。One end of the height adjusting section 17 has the light reflecting section 1.
Is connected to a slide portion 17A arranged on the support base 2 at the other end thereof so as to be swingable, and has a gear rack and pinion structure capable of reciprocating a predetermined distance in the direction of arrow c. By moving the portion 17A, the inclination angle θ1 of the light reflecting portion 1 with respect to the support 2 of the reflecting portion 1a can be variably set to a value within a predetermined range.

【００２８】円盤状の支持台２は支持台２の中心にあり
表面に垂直なその回転中心軸１０Ａｃの周りに、第１電
極３と第２電極６との間に所定の電圧を印加することに
より、所定の回転角で回転でき、かつ光反射部１の傾斜
角θ１を変更できるので、光反射部１に入射する入射光
を２軸で偏向することができる。The disc-shaped support base 2 applies a predetermined voltage between the first electrode 3 and the second electrode 6 around its center axis of rotation 10Ac which is at the center of the support base 2 and is perpendicular to the surface. Accordingly, since the light can be rotated at a predetermined rotation angle and the inclination angle θ1 of the light reflecting portion 1 can be changed, the incident light incident on the light reflecting portion 1 can be deflected in two axes.

【００２９】本第２実施例の光偏向器１０Ａの構造で
は、回転中心軸１０Ａｃの周りの回転角を大きくするに
は、第１実施例と同様、図示しない円周状の櫛歯６Ａ，
６Ｂと櫛歯３Ａ，３Ｂの長さを長くすれば良く、櫛歯６
Ａ，６Ｂと櫛歯３Ａ，３Ｂ間の間隙を広げる必要がない
ので、大きな回転角が必要でも、印加電圧を極端に大き
くする必要がない、という利点を有する。また、本第２
実施例の光偏向器１０Ａは、マイクロマシン作製技術を
適用して、支持台２、固定台４等と共にギヤラックピニ
オンを簡単な製造プロセスで作製でき、また、小型化が
容易であり、光スイッチや光クロスコネクトに適用する
ことができる。In the structure of the optical deflector 10A of the second embodiment, in order to increase the rotation angle around the rotation center axis 10Ac, similarly to the first embodiment, the circumferential comb teeth 6A (not shown),
6B and the comb teeth 3A, 3B may be lengthened.
Since there is no need to widen the gap between A, 6B and the comb teeth 3A, 3B, there is an advantage that it is not necessary to extremely increase the applied voltage even if a large rotation angle is required. In addition, this second
The optical deflector 10A of the embodiment can manufacture the gear rack and pinion together with the support base 2, the fixing base 4 and the like by a simple manufacturing process by applying the micromachine manufacturing technology, and can easily downsize the optical switch and the optical switch. It can be applied to optical cross connect.

【００３０】＜第３実施例＞図５は本発明の光偏向器の
第３実施例を示す概略斜視図である。第３実施例の光偏
向器１０Ｂは、第１実施例の光偏向器１０において、光
反射部１がストッパー８と高さ調整部７により所定角度
に保持されて配置されている支持台２に代えて、図示し
ない光反射部１がストッパー８と高さ調整部７により所
定角度に保持され配置されている円盤状の支持台２Ｂ
を、支持台２Ｂの重心を通る左右一対の支持部５Ａで保
持するリング状の支持台２Ａとし、支持台２Ｂの支持部
５Ａから離れた両端の下部にそれぞれ配置してある一対
の電極１３、１３のいずれか一方と支持台２Ｂとの間に
は、選択的に、電圧が印加できるようにした以外は、第
１実施例の光偏向器１０と同様に構成したものである。<Third Embodiment> FIG. 5 is a schematic perspective view showing a third embodiment of the optical deflector of the present invention. The optical deflector 10B according to the third embodiment is different from the optical deflector 10 according to the first embodiment in that the light reflecting portion 1 is provided on the support base 2 which is disposed at a predetermined angle by the stopper 8 and the height adjusting portion 7. Instead, a disc-shaped support base 2B in which the light reflecting unit 1 (not shown) is held and arranged at a predetermined angle by the stopper 8 and the height adjusting unit 7
Is a ring-shaped support base 2A held by a pair of left and right support parts 5A passing through the center of gravity of the support base 2B, and a pair of electrodes 13 respectively disposed at lower portions at both ends separated from the support part 5A of the support base 2B. The configuration is the same as that of the optical deflector 10 of the first embodiment, except that a voltage can be selectively applied between any one of the support 13 and the support 2B.

【００３１】支持台２Ａはその中心にあり支持台２の表
面に垂直な回転中心軸１０Ｂｃの周りに、図示しない支
持台２Ａの外周部に設けられている第２電極６と、図示
しない固定台４の内周部に設けられている第１電極３と
の間に、所定の電圧を印加することにより、所定の角度
で回転する。The support 2A has a second electrode 6 provided on the outer periphery of the support 2A (not shown) around a rotation center axis 10Bc perpendicular to the surface of the support 2 at the center thereof, and a fixed base (not shown). When a predetermined voltage is applied between the first electrode 3 and the first electrode 3 provided on the inner peripheral portion of the motor 4, the motor 4 rotates at a predetermined angle.

【００３２】支持台２Ｂは、電極１３、１３のいずれか
一方と支持台２Ｂ間に所定の電圧を印加することによ
り、支持部５Ａの周りに、図示向って反時計周り、又は
時計周りに揺動回転する。したがって、入射光を図示し
ない光反射部１の反射部１ａにより２軸で偏向すること
ができる。The support 2B swings counterclockwise or clockwise around the support 5A by applying a predetermined voltage between one of the electrodes 13 and 13 and the support 2B. Rotate dynamically. Therefore, the incident light can be deflected in two axes by the reflector 1a of the light reflector 1 (not shown).

【００３３】本第３実施例の光偏向器１０Ｂの構造で
は、回転中心軸１０Ｂｃの周りの回転角を大きくするに
は、第１実施例と同様、図示しない円周状の櫛歯６Ａ，
６Ｂと櫛歯３Ａ，３Ｂの長さを長くすれば良く、櫛歯６
Ａ，６Ｂと櫛歯３Ａ，３Ｂ間の間隙を広げる必要がない
ので、大きな回転角が必要でも、印加電圧を極端に大き
くする必要がない、という利点を有する。In the structure of the optical deflector 10B according to the third embodiment, in order to increase the rotation angle around the rotation center axis 10Bc, similarly to the first embodiment, the circumferential comb teeth 6A,
6B and the comb teeth 3A, 3B may be lengthened.
Since there is no need to widen the gap between A, 6B and the comb teeth 3A, 3B, there is an advantage that it is not necessary to extremely increase the applied voltage even if a large rotation angle is required.

【００３４】本第３実施例の光偏向器１０Ｂは、マイク
ロマシン作製技術を適用して、支持台２Ａ，支持台２
Ｂ、支持部５Ａをエッチング、パターンニング等で加工
して、光反射部１を型抜きすることにより、容易に作製
でき、また、小型化が容易であリ、光スイッチや光クロ
スコネクトに適用することができる。The optical deflector 10B according to the third embodiment employs a micromachine fabrication technique to support the support 2A and the support 2A.
B, the supporting portion 5A is processed by etching, patterning, and the like, and the light reflecting portion 1 is die-cut, so that it can be easily manufactured and can be easily miniaturized, and is applied to an optical switch and an optical cross connect. can do.

【００３５】[0035]

【発明の効果】以上説明したように、本発明の光偏向器
は、開口部を有し、この開口部の中央部に向かって突き
出た第１支持部を備えた固定台と、前記開口部に配置さ
れ、かつ周縁部から放射状に向かって突き出された前記
第１支持部と対向配置する第２支持部を備えた支持台
と、前記支持台と前記固定台とを接続する複数の弾性部
材と、前記支持台上に反射部が所定の角度を有して載置
された光反射部と、前記第１支持部の第１櫛状部に配置
された第１電極と、前記第２支持部の第２櫛状部に配置
された第２電極と、からなり、前記第１電極と前記第２
電極との間に電圧を印加し、前記第１支持部と前記第２
支持部を静電力により吸引反発させ、前記支持台を揺動
して、前記光反射部の反射部に入射した光を所定の角度
で反射させることにより、簡単な構造を有すると共に小
さい駆動電圧で大きな光反射部の振れ角を得ることがで
きる光偏向器を提供することができるという効果があ
る。As described above, the optical deflector of the present invention has an opening, a fixed base having a first support protruding toward the center of the opening, and the opening. And a plurality of elastic members for connecting the support table and the fixed table, the support table including a second support section disposed opposite to the first support section and radially protruding from a peripheral edge portion. A light reflecting portion having a reflecting portion mounted on the support table at a predetermined angle; a first electrode disposed on a first comb portion of the first supporting portion; And a second electrode disposed on a second comb-like portion of the first portion.
A voltage is applied between the first support portion and the second electrode.
The support section is attracted and repelled by electrostatic force, the support base is swung, and the light incident on the reflection section of the light reflection section is reflected at a predetermined angle, thereby having a simple structure and a small driving voltage. There is an effect that an optical deflector that can obtain a large deflection angle of the light reflecting portion can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の光偏向器の第１実施例を示す上面図で
ある。FIG. 1 is a top view showing a first embodiment of an optical deflector of the present invention.

【図２】図１に示されるＡ−Ａ’断面図である。FIG. 2 is a sectional view taken along the line A-A 'shown in FIG.

【図３】本発明の光偏向器の第１実施例の動作状態を示
す斜視図である。FIG. 3 is a perspective view showing an operation state of the first embodiment of the optical deflector of the present invention.

【図４】本発明の光偏向器の第２実施例を示す概略斜視
図である。FIG. 4 is a schematic perspective view showing a second embodiment of the optical deflector of the present invention.

【図５】本発明の光偏向器の第３実施例を示す概略斜視
図である。FIG. 5 is a schematic perspective view showing a third embodiment of the optical deflector of the present invention.

【図６】第１従来例の光偏向器を示す分解斜視図であ
る。FIG. 6 is an exploded perspective view showing an optical deflector of a first conventional example.

【図７】第２従来例の光偏向器を示す分解斜視図であ
る。FIG. 7 is an exploded perspective view showing an optical deflector of a second conventional example.

【符号の説明】[Explanation of symbols]

１…光反射部、１ａ…反射部、２，２Ａ，２Ｂ…支持
台、３…第１電極、３ａ…第１支持部、３Ａ，３Ｂ…櫛
部、４…固定台、４ａ…開口部、５…バネ、５Ａ…支持
部、６…第２電極、６ａ…第２支持部、６Ａ，６Ｂ…櫛
部、７…高さ調整部、８…ストッパー、１０，１０Ａ，
１０Ｂ…光偏向器、１０ｃ，１０Ａｃ，１０Ｂｃ…回転
中心軸、１１…入射光、１２…出射光、１３…電極、１
７…高さ調整部、１７Ａ…スライド部、１７Ｂ…支持
板、５０Ａ…光偏向器、５０Ｂ…光偏向器、５１…支持
部、５２…支持部、５３…振動体、５４…外枠部、５４
ａ…開口部、５５…反射ミラー部、５６…梁部、５７…
固定電極、５８…固定電極、５９…ベース、６０…永久
磁石、６１…永久磁石、６２…駆動用コイル。DESCRIPTION OF SYMBOLS 1 ... Light reflection part, 1a ... Reflection part, 2, 2A, 2B ... Support base, 3 ... 1st electrode, 3a ... First support part, 3A, 3B ... Comb part, 4 ... Fixed base, 4a ... Opening part, 5 ... Spring, 5A ... support part, 6 ... second electrode, 6a ... second support part, 6A, 6B ... comb part, 7 ... height adjustment part, 8 ... stopper, 10, 10A,
10B: optical deflector, 10c, 10Ac, 10Bc: center axis of rotation, 11: incident light, 12: outgoing light, 13: electrode, 1
Reference numeral 7: height adjustment section, 17A: slide section, 17B: support plate, 50A: optical deflector, 50B: optical deflector, 51: support section, 52: support section, 53: vibrating body, 54: outer frame section, 54
a ... opening, 55 ... reflection mirror, 56 ... beam, 57 ...
Fixed electrode, 58: fixed electrode, 59: base, 60: permanent magnet, 61: permanent magnet, 62: driving coil.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】開口部を有し、この開口部の中央部に向か
って突き出た第１支持部を備えた固定台と、 前記開口部に配置され、かつ周縁部から放射状に向かっ
て突き出された前記第１支持部と対向配置する第２支持
部を備えた支持台と、 前記支持台と前記固定台とを接続する複数の弾性部材
と、 前記支持台上に反射部が所定の角度を有して載置された
光反射部と、 前記第１支持部の第１櫛状部に配置された第１電極と、 前記第２支持部の第２櫛状部に配置された第２電極と、
からなり、 前記第１電極と前記第２電極との間に電圧を印加し、前
記第１支持部と前記第２支持部を静電力により吸引反発
させ、前記支持台を揺動して、前記光反射部の反射部に
入射した光を所定の角度で反射させることを特徴とする
光偏向器。1. A fixed base having an opening and having a first support protruding toward the center of the opening, and being disposed in the opening and projecting radially from a peripheral edge. A support having a second support disposed opposite to the first support, a plurality of elastic members connecting the support and the fixed base, and a reflecting part having a predetermined angle on the support. A light reflecting portion mounted and mounted; a first electrode disposed on a first comb portion of the first support portion; and a second electrode disposed on a second comb portion of the second support portion. When,
A voltage is applied between the first electrode and the second electrode, the first support and the second support are attracted and repelled by electrostatic force, and the support is oscillated, An optical deflector that reflects light incident on a reflecting portion of the light reflecting portion at a predetermined angle.