JP2005153478A - Ink-jet printhead - Google Patents

Ink-jet printhead Download PDF

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JP2005153478A
JP2005153478A JP2003399333A JP2003399333A JP2005153478A JP 2005153478 A JP2005153478 A JP 2005153478A JP 2003399333 A JP2003399333 A JP 2003399333A JP 2003399333 A JP2003399333 A JP 2003399333A JP 2005153478 A JP2005153478 A JP 2005153478A
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piezoelectric element
laminated piezoelectric
flexible cable
fixing plate
electrode
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JP4507573B2 (en
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Nobuhiro Noto
信博 能登
Kenichi Hisagai
健一 久貝
Hiroshi Takahagi
浩 高萩
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Ricoh Printing Systems Ltd
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Ricoh Printing Systems Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ink-jet printhead in which a flexible cable is joined to a discrete electrode of a laminated piezoelectric element by a procedure in which an exposed part of the flexible cable is easily mounted to the discrete electrode. <P>SOLUTION: In the ink-jet printhead, the laminated piezoelectric element is insulated from at least part of a connecting area of a laminated piezoelectric element-fixing plate made of a conductive metal; one electrode of the flexible cable provided on the laminated piezoelectric element-fixing plate made of a conductive metal is brought in continuity to the discrete electrode of the laminated piezoelectric element by an electroconductive glue; and a common electrode of the laminated piezoelectric element, the laminated piezoelectric element-fixing plate made of a conductive metal and the other electrode of the flexible cable are electrically conducted with an electroconductive adhesive. When the laminated piezoelectric element is subjected to cutting so as to be adapted to the pressure chamber, the insulated part of the flexible cable is also cut simultaneously. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、インクを吐出するノズルと、インクに圧力を加える圧力室と、圧力室の圧力を変化させる圧電素子などの圧力発生手段とを備えて、圧力発生手段に印加する信号で圧力室の容積を変化させることによってインクを吐出させるインクジェットヘッドに関する。   The present invention comprises a nozzle for ejecting ink, a pressure chamber for applying pressure to the ink, and a pressure generating means such as a piezoelectric element for changing the pressure in the pressure chamber, and a signal applied to the pressure generating means The present invention relates to an inkjet head that ejects ink by changing its volume.

従来のインクジェットプリントヘッドには、導電性金属からなる積層圧電素子固定板とこれに接続する積層圧電素子端部との連結領域の少なくとも一部を絶縁し、前記導電性金属からなる積層圧電素子固定板上に設けたフレキシブルケーブルの一方の極と前記積層圧電素子の個別電極とを導電性接着剤により導通し、前記積層圧電素子の共通電極と前記導電性金属からなる積層圧電素子固定板と前記フレキシブルケーブルの他方の極とを夫々導電性接着剤により導通して、前記フレキシブルケーブルの個別電極の導通部をむき出しにし、その部分を前記積層圧電素子個別電極側に導電性接着剤等で接合を施したものがある（例えば、特許文献１参照）。   In a conventional inkjet printhead, at least a part of a connection region between a laminated piezoelectric element fixing plate made of a conductive metal and an end of the laminated piezoelectric element connected to the insulating plate is insulated, and the laminated piezoelectric element made of the conductive metal is fixed. One electrode of the flexible cable provided on the plate and the individual electrode of the laminated piezoelectric element are electrically connected by a conductive adhesive, the laminated piezoelectric element fixing plate made of the common electrode of the laminated piezoelectric element and the conductive metal, and Conductive conduction to the other electrode of the flexible cable with a conductive adhesive, and the conductive portion of the individual electrode of the flexible cable is exposed, and the portion is bonded to the individual electrode side of the laminated piezoelectric element with a conductive adhesive or the like. (For example, see Patent Document 1).

以下、図７により従来技術の複数の積層圧電素子１５とそれを固定する導通性の積層圧電素子固定板１６との接合部の接続処理手順について説明する。   In the following, a connection processing procedure of a joint portion between a plurality of conventional multilayer piezoelectric elements 15 and a conductive multilayer piezoelectric element fixing plate 16 that fixes the multilayer piezoelectric elements 15 will be described with reference to FIG.

まず、導通性のある積層圧電素子固定板１６に、積層圧電素子棒を設置して絶縁性の接着剤等で固定する。その後、フレキシブルケーブル１７の個別電極１７−ｂを前記積層圧電素子１５の外部電極１５−ａとの接合部のみをむき出しにした部分１７−ｂ１の先端部を前記積層圧電素子１５に導電性接着剤等で接合する。なお、前記フレキシブルケーブル１７は、耐熱性および絶縁性のあるポリイミドフィルム等で複数の個別電極１７−ｂ、共通電極１７−ｃを覆った構造である。   First, a laminated piezoelectric element rod is installed on a conductive laminated piezoelectric element fixing plate 16 and fixed with an insulating adhesive or the like. Thereafter, a conductive adhesive is applied to the laminated piezoelectric element 15 at the tip of the portion 17-b1 in which the individual electrode 17-b of the flexible cable 17 is exposed only at the junction with the external electrode 15-a of the laminated piezoelectric element 15. Join with etc. The flexible cable 17 has a structure in which a plurality of individual electrodes 17-b and a common electrode 17-c are covered with a heat-resistant and insulating polyimide film or the like.

その後、ダイシングソー、ワイヤソー等を利用して、前記フレキシブルケーブル１７の個別電極１７−ｂの１本ずつに対応する様に積層圧電素子棒を切断、分割する。この際、フレキシブルケーブル１７の個別電極１７−ｂ幅と積層圧電素子１５の分割加工後の幅との関係は、「積層圧電素子幅＞個別電極幅」とし、分割加工のピッチ誤差を吸収できるようになっている。また、分割された各々の積層圧電体素子１５は圧力室３の一つずつに対応する。更に、前記フレキシブルケーブル１７の他端は外部駆動回路に接続されている。   Thereafter, using a dicing saw, a wire saw or the like, the laminated piezoelectric element rod is cut and divided so as to correspond to each of the individual electrodes 17-b of the flexible cable 17. At this time, the relationship between the width of the individual electrode 17-b of the flexible cable 17 and the width of the laminated piezoelectric element 15 after the division processing is “laminated piezoelectric element width> individual electrode width” so that the pitch error of the division processing can be absorbed. It has become. Each of the divided laminated piezoelectric elements 15 corresponds to one of the pressure chambers 3. Further, the other end of the flexible cable 17 is connected to an external drive circuit.

このように、導通性の積層圧電素子固定板１６上にフレキシブルケーブル１７を介し、前記積層圧電素子１５と導通させる構成となっている。   In this way, the laminated piezoelectric element 15 is electrically connected to the laminated piezoelectric element 15 via the flexible cable 17 on the conductive laminated piezoelectric element fixing plate 16.

個別電極側は前記フレキシブルケーブル１７の個別電極１７−ｂを積層圧電素子１５の外部電極１５−ａと導電性接着剤２２等により導通させ、共通電極１７−ｃ側は積層圧電素子１５と前記導通性のある金属からなる積層圧電素子固定板１６とを導電性接着剤２２等により直接導通をとり、更に、前記フレキシブルケーブル１７と前記導通性のある金属からなる積層圧電素子固定板１６と導電性接着剤２２等により導通するような構成である。   On the individual electrode side, the individual electrode 17-b of the flexible cable 17 is electrically connected to the external electrode 15-a of the laminated piezoelectric element 15 by the conductive adhesive 22 and the like, and the common electrode 17-c side is electrically connected to the laminated piezoelectric element 15 and the above-mentioned conductor. The laminated piezoelectric element fixing plate 16 made of a conductive metal is directly connected by a conductive adhesive 22 or the like, and further, the flexible piezoelectric element 17 and the laminated piezoelectric element fixing plate 16 made of a conductive metal are electrically connected. The structure is such that it is conducted by the adhesive 22 or the like.

このような構成とすることにより、積層圧電素子固定板１６に個別電極側および共通電極側の両面に電極をパターニングする必要もなくなり、更に、汎用の導電性の金属板等を使用することにより、材料費も安価となり、更に、前記積層圧電素子を固定する端面および位置決め穴の機械加工性が向上するため、安価な部品を提供することが可能となる。そして、前記積層圧電素子固定板の材質をステンレス材とした場合、従来技術からなるセラミックプレートの積層圧電素子固定板を用いたインクジェットプリントヘッドの特性と、同等の性能が得られる。   By adopting such a configuration, it is not necessary to pattern electrodes on both the individual electrode side and the common electrode side on the laminated piezoelectric element fixing plate 16, and further, by using a general-purpose conductive metal plate or the like, The material cost is also low, and the machinability of the end face and the positioning hole for fixing the laminated piezoelectric element is improved, so that it is possible to provide inexpensive parts. When the laminated piezoelectric element fixing plate is made of stainless steel, the same performance as that of an ink jet print head using a ceramic plate laminated piezoelectric element fixing plate according to the prior art can be obtained.

特開２００３−７２０６６号公報JP 2003-72066 A

しかし、上述した構成の場合、フレキシブルケーブルを積層圧電素子の個別電極に接合するために、むき出しにした部分を個別電極に設置する際に、数十ミクロンの薄さのむき出し部分がよれて導電接着剤による取付に支障が出ないように慎重な作業が求められ、取り扱いが煩雑で、作業性が悪く、工数が高いものになっている。   However, in the case of the above-described configuration, when the exposed portion is installed on the individual electrode in order to join the flexible cable to the individual electrode of the laminated piezoelectric element, the exposed portion of the thin thickness of several tens of microns is not electrically conductive. Careful work is required so as not to hinder the mounting with the agent, handling is complicated, workability is poor, and man-hours are high.

本発明は、上記した従来の問題点を解決するもので、その目的は、製作がより簡単で安価なインクジェットプリントヘッドを提供することである。   The present invention solves the above-described conventional problems, and an object of the present invention is to provide an inkjet printhead that is easier to manufacture and less expensive.

上記課題を解決するため、本発明では、インクを蓄える複数の圧力室と、共通電極と個別電極とを備え、電気信号の印加により前記圧力室内に圧力変動を発生させる積層圧電素子と、導電性の積層圧電素子固定板との連結領域の少なくとも一部を絶縁し、前記導電性の積層圧電素子固定板上に設けたフレキシブルケーブルの一方の極と、前記積層圧電素子の個別電極とを導電性接着剤により導通し、前記積層圧電素子の共通電極と、前記導電性の積層圧電素子固定板と、前記フレキシブルケーブルの他方の極とを夫々導電性接着剤により導通してなるインクジェットプリントヘッドにおいて、棒状の積層圧電素子を前記圧力室に対応するように切断して前記積層圧電素子を形成する際に、フレキシブルケーブルの絶縁部も同時に切断して個別電極の導通部を形成することを特徴とする。   In order to solve the above problems, in the present invention, a laminated piezoelectric element that includes a plurality of pressure chambers for storing ink, a common electrode, and individual electrodes, and generates pressure fluctuations in the pressure chamber by application of an electrical signal; Insulating at least a part of the connection region with the laminated piezoelectric element fixing plate is electrically conductive with one pole of the flexible cable provided on the conductive laminated piezoelectric element fixing plate and the individual electrode of the laminated piezoelectric element. In the inkjet print head formed by conducting with an adhesive, and conducting the common electrode of the laminated piezoelectric element, the conductive laminated piezoelectric element fixing plate, and the other electrode of the flexible cable with a conductive adhesive, respectively. When forming the laminated piezoelectric element by cutting the rod-shaped laminated piezoelectric element so as to correspond to the pressure chamber, the insulating portion of the flexible cable is also cut at the same time. And forming a pole of conductive portions.

また、複数の電極を備えて各個別電極間が保持部材により連結したフレキシブルケーブルと、切断により複数の積層圧電素子を形成する棒状の積層圧電素子とを導電性接着剤で接着し、前記積層圧電素子と保持部材を一緒に切断して形成されることを特徴とする。   Also, a flexible cable in which a plurality of electrodes are connected to each other by a holding member and a rod-like laminated piezoelectric element that forms a plurality of laminated piezoelectric elements by cutting are bonded with a conductive adhesive, and the laminated piezoelectric It is formed by cutting the element and the holding member together.

更に、前記保持部材は絶縁性部材であることを特徴とする。   Further, the holding member is an insulating member.

本発明によれば、導通性のある積層圧電素子固定板上にフレキシブルケーブルを介し、積層圧電素子と導通することにより、積層圧電素子固定板の両面に個別電極側及び共通電極側の電極としてパターニングする必要が無く、フレキシブルケーブルが容易に取り付けられるという作業性を確保しつつ、且つ、積層圧電素子の個別電極への導通に必要なフレキシブルケーブルの取付時には、フレキシブルケーブルの個々の導通部が絶縁性の素材で連結した状態のため、取り付けの困難・煩雑さが無くなり作業性が向上すると共に、従来よりも取り扱いが容易となる。   According to the present invention, the conductive layer is connected to the laminated piezoelectric element via the flexible cable on the conductive laminated piezoelectric element fixing plate, thereby patterning both surfaces of the laminated piezoelectric element fixing plate as electrodes on the individual electrode side and the common electrode side. It is not necessary to secure the workability that the flexible cable can be easily attached, and when installing the flexible cable necessary for conduction to the individual electrodes of the laminated piezoelectric element, the individual conductive parts of the flexible cable are insulative. Because of the state of being connected with the material, it is difficult to mount and complicated, and the workability is improved, and the handling becomes easier than before.

そのため、作業工数が低下し、安価なインクジェットプリントヘッドを提供可能とする。   Therefore, the number of work steps is reduced, and an inexpensive ink jet print head can be provided.

以下、本発明の実施例を図面に基づいて説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図１は、本発明の実施例を示すインクジェットヘッドの部品構成を示す斜視図である。   FIG. 1 is a perspective view showing a component structure of an ink jet head showing an embodiment of the present invention.

また、図２は、本発明の実施例を示すインクジェットヘッドの組立構成を示す断面図である。   FIG. 2 is a cross-sectional view showing the assembly configuration of the inkjet head according to the embodiment of the present invention.

図のように、複数のノズル１を形成したオリフィスプレート２を有する。ノズル１の開口形状の加工精度はインクジェットプリントヘッドのインク吐出特性に大きな影響を及ぼす。複数のノズル１間において、ノズル精度ばらつきを低く押さえるため、オリフィスプレート２の製法は高い加工精度が要求され、ニッケル電鋳加工、ステンレス板の精密プレス加工法あるいはレーザ加工法等により形成される。   As shown in the figure, an orifice plate 2 having a plurality of nozzles 1 is formed. The processing accuracy of the opening shape of the nozzle 1 greatly affects the ink ejection characteristics of the ink jet print head. In order to keep the nozzle accuracy variation low among the plurality of nozzles 1, the manufacturing method of the orifice plate 2 is required to have high processing accuracy, and is formed by nickel electroforming, precision press processing of a stainless steel plate, laser processing, or the like.

圧力室３が形成されたチャンバプレート４、共通インク供給路１２と圧力室３とを連通して圧力室３へのインク流入量を制御するリストリクタ５が形成されたリストリクタプレート６を備える。なお、チャンバプレート４、リストリクタプレート６はステンレス材のエッチング加工法で製作されている。   A chamber plate 4 in which the pressure chamber 3 is formed, and a restrictor plate 6 in which a restrictor 5 that controls the amount of ink flowing into the pressure chamber 3 by communicating the common ink supply path 12 and the pressure chamber 3 are provided. The chamber plate 4 and the restrictor plate 6 are manufactured by a stainless steel etching method.

そして、積層圧電素子１５の圧力を効率よく圧力室に伝えるための振動伝達部７と共通インク通路１２からリストリクタ５に流入するインク中の異物等を取り除くフィルタ部８が形成されたダイヤフラムプレート９を備える。フィルタ部８にはノズル１の穴径よりも小さな無数の微細な穴が形成されている。ダイヤフラムプレート９は、ステンレス材、ニッケル材、または高分子材料の薄板で、エッチング加工法、電鋳加工法、レーザ加工法等で作られている。   The diaphragm plate 9 is formed with a vibration transmitting portion 7 for efficiently transmitting the pressure of the laminated piezoelectric element 15 to the pressure chamber and a filter portion 8 for removing foreign matters in the ink flowing into the restrictor 5 from the common ink passage 12. Is provided. The filter portion 8 has innumerable fine holes smaller than the hole diameter of the nozzle 1. The diaphragm plate 9 is a thin plate made of stainless steel, nickel, or polymer material, and is made by an etching process, an electroforming process, a laser process or the like.

また、振動伝達部７と積層圧電素子１５とを接着剤２４で固定する時に、接着箇所からはみ出た接着剤が振動伝達部７上で広がるのを規定する枠１０が形成されたサポートプレート１１を備える。サポートプレート１１はステンレス材のエッチング加工法等で作られる。   In addition, when the vibration transmitting unit 7 and the laminated piezoelectric element 15 are fixed with the adhesive 24, the support plate 11 on which the frame 10 that defines that the adhesive protruding from the adhesion portion spreads on the vibration transmitting unit 7 is formed. Prepare. The support plate 11 is made by a stainless steel etching method or the like.

また、共通インク通路１２および、積層圧電素子１５を固定する積層圧電素子固定板１６に固定した積層圧電素子組２１より大きな開口部１３−ａを設けたハウジング１３を有し、ハウジング１３は、金属または樹脂のモールド加工法等で作られ安価な部品となっている。   The housing 13 has a common ink passage 12 and a housing 13 provided with an opening 13-a larger than the laminated piezoelectric element set 21 fixed to the laminated piezoelectric element fixing plate 16 for fixing the laminated piezoelectric element 15. The housing 13 is made of metal. Or it is an inexpensive part made by resin molding.

前記オリフィスプレート２、チャンバプレート４、リストリクタプレート６、ダイヤフラムプレート９、サポートプレート１１は、ハウジング１３の基準穴２０を基準として、各プレートの基準穴１８を位置合わせして順次、接着剤等を適量塗布され、重ねて圧着されて、接着剤の加熱硬化後に、流路形成部材を形成する。   The orifice plate 2, the chamber plate 4, the restrictor plate 6, the diaphragm plate 9, and the support plate 11 are aligned with the reference holes 18 of the respective plates with reference to the reference holes 20 of the housing 13. Appropriate amounts are applied, overlapped and pressure-bonded to form a flow path forming member after heat-curing of the adhesive.

上記構成部品をフロントエンド組２０と呼ぶ。また、１５は積層圧電素子、１６は金属等の導通性の素材を用いた積層圧電素子固定板、１７はフレキシブルケーブルである。これらの構成部品の部クミを積層圧電素子クミ２１と呼ぶ。   The above components are referred to as a front end set 20. 15 is a laminated piezoelectric element, 16 is a laminated piezoelectric element fixing plate using a conductive material such as metal, and 17 is a flexible cable. A partial kumi of these component parts is called a laminated piezoelectric element kumi 21.

図３は、本発明となる、フレキシブルケーブル１７の積層圧電素子棒への取付を示す斜視図である。積層圧電素子固定板１６に積層圧電素子棒２５を１本または複数本並べて絶縁性の接着剤で固定する（図では１本の場合を示す）。なお、積層圧電素子棒２５の個別電極側を形成する積層圧電素子固定板１６との接着面の隅部は、図５で示すように切り欠き部１５−ｂが設けられている。また、その対抗面となる積層圧電素子固定板１６の隅部も切り欠き１６−ａが設けられている。   FIG. 3 is a perspective view showing attachment of the flexible cable 17 to the laminated piezoelectric element rod according to the present invention. One or more laminated piezoelectric element rods 25 are arranged on the laminated piezoelectric element fixing plate 16 and fixed with an insulating adhesive (in the figure, one is shown). In addition, as shown in FIG. 5, the notch part 15-b is provided in the corner part of the adhesion surface with the laminated piezoelectric element fixing plate 16 that forms the individual electrode side of the laminated piezoelectric element rod 25. Further, notches 16-a are also provided at the corners of the laminated piezoelectric element fixing plate 16 serving as the opposing surface.

まず、取付は、フレキシブルケーブル１７をフレキシブルケーブル位置決め穴１７−ｄにピンを挿入し、積層圧電素子固定板１６にフレキシブルケーブル１７を設置する。フレキシブルケーブル１７の積層圧電素子棒２５に取り付く部分の電極は、むき出しになっており、積層圧電素子棒２５の外部電極と導通が形成できるように導電性接着剤を塗布して、加熱硬化させ接着する。   First, a pin is inserted into the flexible cable positioning hole 17-d and the flexible cable 17 is installed on the laminated piezoelectric element fixing plate 16. The electrode of the portion that attaches to the laminated piezoelectric element rod 25 of the flexible cable 17 is exposed, and a conductive adhesive is applied so as to form electrical continuity with the external electrode of the laminated piezoelectric element rod 25, and is cured by heating and bonding. To do.

各個別電極の幅は非常に狭いため、予め個別電極として分割してある構成では、接着時にヨレ等が発生するが、本発明では、図のように、フレキシブルケーブルの先端の各個別電極間がフレキシブルケーブルの絶縁素材で接続された状態となっているため、各個別電極の接着部分がヨレてしまったりすることが無く、適切且つ容易に接着することが可能となる。   Since the width of each individual electrode is very narrow, in the configuration that is divided as individual electrodes in advance, a twist or the like occurs at the time of bonding, but in the present invention, between the individual electrodes at the tip of the flexible cable as shown in the figure. Since it is in the state connected by the insulating material of the flexible cable, the adhesion part of each individual electrode does not twist, and it becomes possible to adhere appropriately and easily.

なお、フレキシブルケーブルの各個別電極１７−ｂ間が、導電素材で繋がっている構成であっても、後で切断する際に各個別電極となるように分離・絶縁される構成の場合は、問題無く使用可能である。   Note that even if the individual electrodes 17-b of the flexible cable are connected by a conductive material, there is a problem in the case where the individual electrodes 17-b are separated and insulated so as to become individual electrodes when cut later. It is usable without.

図４は、本発明によるフレキシブルケーブル１７と積層圧電素子棒組の加工を示す斜視図である。   FIG. 4 is a perspective view showing the processing of the flexible cable 17 and the laminated piezoelectric element rod assembly according to the present invention.

加工は、ダイシングソー、ワイヤソー等を利用して行われるが、ここではダイシングソーの場合で示す。図において、ダイシンソー２６で、積層圧電素子棒２５とフレキシブルケーブル１７を、所望の幅となるように切断し、複数の積層圧電素子１５を形成する。   The processing is performed using a dicing saw, a wire saw, or the like. Here, the processing is shown in the case of a dicing saw. In the drawing, the laminated piezoelectric element rod 25 and the flexible cable 17 are cut to a desired width by the die-sink 26 to form a plurality of laminated piezoelectric elements 15.

図５は、本発明による積層圧電素子組の概略構成を示す横断面図である。   FIG. 5 is a cross-sectional view showing a schematic configuration of a multilayered piezoelectric element set according to the present invention.

前記したが、前記積層圧電素子１５と前記積層圧電素子固定板１６との絶縁性を確保するため、前記積層圧電素子１５の外部電極１５−ａが前記積層圧電素子固定板１６と導通しないように切り欠き部１５−ｂを設けられ、また、更に絶縁性を向上させるため前記積層圧電素子固定板１６にも切り欠き部１６−ａが設けられている。   As described above, in order to ensure insulation between the laminated piezoelectric element 15 and the laminated piezoelectric element fixing plate 16, the external electrode 15-a of the laminated piezoelectric element 15 is not electrically connected to the laminated piezoelectric element fixing plate 16. A cutout portion 15-b is provided, and the laminated piezoelectric element fixing plate 16 is also provided with a cutout portion 16-a in order to further improve insulation.

フレキシブルケーブル１７の個別電極１７−ｂの剥き出しになった先端部の電極１７−ｂ１と、前記積層圧電素子１５の外部電極１５−ａとは、導電性接着剤で接合されている。前記フレキシブルケーブル１７の個別電極１７−ｂと共通電極１７−ｃは、図２に示すように、耐熱性および絶縁性のあるポリイミドフィルム等で覆われている。   The electrode 17-b1 at the tip end where the individual electrode 17-b of the flexible cable 17 is exposed and the external electrode 15-a of the laminated piezoelectric element 15 are joined by a conductive adhesive. As shown in FIG. 2, the individual electrode 17-b and the common electrode 17-c of the flexible cable 17 are covered with a heat-resistant and insulating polyimide film or the like.

また、図５に示すように、フレキシブルケーブル１７において、積層圧電素子１５と積層圧電素子固定板１６の絶縁性を確保するため、絶縁部１７−ａ１が前記積層圧電素子１５の個別電極１５−ａ側の一部にかかり、積層圧電素子との境界を覆っている。   Further, as shown in FIG. 5, in the flexible cable 17, in order to ensure insulation between the laminated piezoelectric element 15 and the laminated piezoelectric element fixing plate 16, the insulating portion 17-a 1 is an individual electrode 15-a of the laminated piezoelectric element 15. It covers a part of the side and covers the boundary with the laminated piezoelectric element.

なお、フレキシブルケーブル１７が取り付けられた積層圧電素子棒２５は、ダイシングソー２６で、前記フレキシブルケーブル１７の個別電極１７−ｂの１本ずつに対応する様に、積層圧電素子とフレキシブルケーブルを一緒に切断して分割する。   The laminated piezoelectric element rod 25 to which the flexible cable 17 is attached is a dicing saw 26. The laminated piezoelectric element and the flexible cable are combined together so as to correspond to each individual electrode 17-b of the flexible cable 17. Cut and split.

この際、フレキシブルケーブル１７の個別電極１７−ｂ幅と積層圧電素子１５の分割加工後の幅との関係は、「積層圧電素子幅＞個別電極幅」となっており、分割加工時のピッチ誤差による個別電極１７−ｂの破損で導通不良などが起こらないようになっている。分割された各積層圧電素子１５は、それぞれの圧力室３に対応し、前記フレキシブルケーブル１９の端末は外部駆動回路にノズル単位で接続されている。   At this time, the relationship between the width of the individual electrode 17-b of the flexible cable 17 and the width of the laminated piezoelectric element 15 after the division processing is “laminated piezoelectric element width> individual electrode width”, and pitch error during division processing. The individual electrode 17-b is prevented from being damaged due to breakage of the individual electrode 17-b. Each of the divided laminated piezoelectric elements 15 corresponds to each pressure chamber 3, and the end of the flexible cable 19 is connected to an external drive circuit in units of nozzles.

前述のように、分割された前記積層圧電素子１５の個別電極側は、導通性のある金属からなる積層圧電素子固定板１６上のフレキシブルケーブル１７を介して、駆動電源と導通させる。一方、共通電極１７−ｃ側は、積層圧電素子１５と前記導通性のある金属からなる積層圧電素子固定板１６とを導電性接着剤２２等により直接導通をとり、更に前記フレキシブルケーブル１７と前記導通性のある金属からなる積層圧電素子固定板１６と導電性接着剤２２により導通するような構成となっている。   As described above, the individual electrode side of the divided laminated piezoelectric element 15 is electrically connected to the drive power supply via the flexible cable 17 on the laminated piezoelectric element fixing plate 16 made of conductive metal. On the other hand, on the common electrode 17-c side, the laminated piezoelectric element 15 and the laminated piezoelectric element fixing plate 16 made of a conductive metal are directly connected by a conductive adhesive 22 or the like. The laminated piezoelectric element fixing plate 16 made of conductive metal and the conductive adhesive 22 are electrically connected.

このような構成により、積層圧電素子固定板１６に個別電極側および共通電極側の両面に電極をパターニングする必要がなく、更に、汎用の金属材料を用いることにより、材料費は安価となり、更に、前記積層圧電素子を固定する端面および位置決め穴の機械加工性が向上する。なお、本発明によるインクジェットプリントヘッドでは、従来技術によるインクジェットプリントヘッドと、同等の性能を発揮することが確認されている。   With such a configuration, there is no need to pattern electrodes on both the individual electrode side and the common electrode side on the laminated piezoelectric element fixing plate 16, and further, by using a general-purpose metal material, the material cost is reduced. The machinability of the end face for fixing the laminated piezoelectric element and the positioning hole is improved. It has been confirmed that the ink jet print head according to the present invention exhibits the same performance as the ink jet print head according to the prior art.

図６は、本発明による一例を示すフロントエンド組と積層圧電素子組の位置決め接着作業を示す正面断面図である。   FIG. 6 is a front sectional view showing the positioning and bonding operation of the front end group and the laminated piezoelectric element group according to an example of the present invention.

図において、フロントエンド組２０及び図示しない位置決め用ダミーサポートプレートを位置決めする位置決めピンを具備した図示しないベースＡ、積層圧電素子組２１を固定する図示しないベースＢ、積層圧電素子組２１を微小移動をさせるための複数の図示しないマイクロメータヘッド、積層圧電素子組２１を微小移動後固定するための図示しない固定ネジ等、前記フロントエンド組２０を固定した前記ベースＡに積層圧電素子組２１を固定した前記ベースＢを接着させるために、図中矢印方向に移動を可能にするための直動ガイド等を具備した図示しない位置決め治具により、前記位置決め用ダミーサポートプレートを前記ベースＢに位置決め穴１８を用いセットする。   In the figure, a base A (not shown) having a positioning pin for positioning a front end set 20 and a positioning dummy support plate (not shown), a base B (not shown) for fixing the laminated piezoelectric element set 21 and a laminated piezoelectric element set 21 are slightly moved. A plurality of micrometer heads (not shown) for fixing the laminated piezoelectric element set 21 and a fixing screw (not shown) for fixing the micro-movable piezoelectric element set 21 after a minute movement, and the like. In order to bond the base B, the positioning dummy support plate is provided with a positioning hole 18 in the base B by a positioning jig (not shown) provided with a linear motion guide or the like for enabling movement in the arrow direction in the figure. Set to use.

また、積層圧電素子組２１は前記ベースＢに固定し、積層圧電素子１５と反対側の面から観察しつつ、前記ダミーサポートプレートの開口部を基準に前記マイクロメータヘッドにより、ＸおよびＹ方向に位置合わせをし、前記固定ネジ等により積層圧電素子組２１を固定する。   Also, the laminated piezoelectric element set 21 is fixed to the base B, and is observed in the X and Y directions by the micrometer head with reference to the opening of the dummy support plate while observing from the surface opposite to the laminated piezoelectric element 15. Positioning is performed, and the laminated piezoelectric element set 21 is fixed by the fixing screw or the like.

次に、前記ダミーサポートプレートを前記ベースＡより取り外し、前記フロントエンド組２０を、位置決め穴１８を用いて前記ベースＡの位置決めピンに挿入しセットする。   Next, the dummy support plate is removed from the base A, and the front end set 20 is inserted into the positioning pins of the base A using the positioning holes 18 and set.

次に、前記振動板７もしくは積層圧電素子１５に接着剤２４を塗布し、前記直動ガイドにより前記積層圧電素子組２１をフロントエンド組２０側の矢印方向に移動して、前記積層圧電素子組２１の積層圧電素子１５を振動板７に前記接着剤２４で接着する。この時、積層圧電素子１５は前記位置決め用ダミーサポートプレートに対して既に位置決めがなされているので、正確に規定の位置に合わせて接着することが可能となる。   Next, an adhesive 24 is applied to the diaphragm 7 or the laminated piezoelectric element 15, and the laminated piezoelectric element set 21 is moved in the direction of the arrow on the front end set 20 side by the linear motion guide, so that the laminated piezoelectric element set is moved. 21 laminated piezoelectric elements 15 are bonded to the diaphragm 7 with the adhesive 24. At this time, since the laminated piezoelectric element 15 has already been positioned with respect to the positioning dummy support plate, it is possible to adhere the laminated piezoelectric element 15 in accordance with a specified position accurately.

この際、前述したように、前記ハウジング１３の開口部１３−ａと前記積層圧電素子組２１の間には隙間がある状態で位置決めされ、接着されている。更に、前記ハウジング１３の開口部１３−ａと前記積層圧電素子組２１の隙間にインクが侵入して前記積層圧電素子１５の地絡による破損を防止するためのインクシール目的のシーリング剤２３等を充填して組み立て工程を終了する。   At this time, as described above, the opening 13-a of the housing 13 and the laminated piezoelectric element set 21 are positioned and bonded together with a gap. Further, a sealing agent 23 for ink sealing for preventing ink from entering the gap between the opening 13-a of the housing 13 and the multilayered piezoelectric element set 21 and causing damage to the multilayered piezoelectric element 15 due to a ground fault is provided. Fill and finish the assembly process.

上記の様な構成で組み立てることにより、前記積層圧電素子と振動板との位置決め精度はある程度の加工ばらつきを持った部品でも、接着位置のばらつきを最小限に押さえられることが可能となり、安価でインク噴射特性ばらつきを低減することが可能となる。また、フロントエンド組２０と積層圧電素子組２１を位置決め後、前記ハウジング１３の開口部１４と前記積層圧電素子固定板１６との隙間にインクシール目的のシーリング剤２３等を充填することにより、インクによる積層圧電素子１５の地絡による破損を防止することが可能となる。   By assembling with the above configuration, it is possible to minimize the variation in the bonding position even with parts having a certain degree of processing variation in the positioning accuracy between the laminated piezoelectric element and the diaphragm, and it is possible to reduce the cost of the ink. It is possible to reduce variations in the injection characteristics. Further, after positioning the front end group 20 and the laminated piezoelectric element group 21, the gap between the opening 14 of the housing 13 and the laminated piezoelectric element fixing plate 16 is filled with a sealing agent 23 or the like for the purpose of ink sealing. It is possible to prevent the multilayer piezoelectric element 15 from being damaged due to the ground fault.

また、前記インクシール目的のシーリング剤２３等の接着剤硬度が９０度（ショア−Ａ）以下の接着剤を前記積層圧電素子固定板１６と前記ハウジング１３との隙間に充填することによっても、前記積層圧電素子１５と振動板７の接着位置を保持したまま、温度差による伸縮によるひずみを前記硬度の接着剤で吸収することが可能となる。   Also, the gap between the laminated piezoelectric element fixing plate 16 and the housing 13 may be filled with an adhesive having an adhesive hardness of 90 degrees (Shore-A) or less, such as the sealing agent 23 for ink sealing. It is possible to absorb the strain due to the expansion and contraction due to the temperature difference with the adhesive having the hardness while maintaining the bonding position between the laminated piezoelectric element 15 and the diaphragm 7.

以上説明した構成をとることにより、安価なインクジェットプリントヘッドを提供することが可能となる。   By adopting the configuration described above, an inexpensive ink jet print head can be provided.

本発明によるインクジェットプリントヘッドの概略構成を示す斜視図である。1 is a perspective view showing a schematic configuration of an ink jet print head according to the present invention. 本発明によるインクジェットプリントヘッドの概略構成を示す横断面図である。1 is a transverse sectional view showing a schematic configuration of an ink jet print head according to the present invention. 本発明によるフレキシブルケーブルと積層圧電素子棒組への取付を示す斜視図である。It is a perspective view which shows the attachment to the flexible cable and laminated piezoelectric element stick | rod group by this invention. 本発明によるフレキシブルケーブルと積層圧電素子棒組の加工を示す斜視図である。It is a perspective view which shows the process of the flexible cable and laminated piezoelectric element stick | rod group by this invention. 本発明による積層圧電素子組の概略構成を示す横断面図である。It is a cross-sectional view showing a schematic configuration of a laminated piezoelectric element set according to the present invention. 本発明による一例を示すフロントエンド組と積層圧電素子組の位置決め接着を示す図である。It is a figure which shows the positioning adhesion | attachment of the front end group and laminated piezoelectric element group which show an example by this invention. 従来技術からなるインクジェットヘッドの概略構成を示す斜視図である。It is a perspective view which shows schematic structure of the inkjet head which consists of a prior art.

符号の説明Explanation of symbols

１はノズル、２はオリフィスプレート、３は圧力室、４はチャンバプレート、５はリストリクタ、６はリストリクタプレート、７は振動板、８はフィルタ部、９はダイヤフラムプレート、１０は枠、１１はサポートプレート、１２は共通インク通路、１３はハウジング、１４は開口部、１５は積層圧電素子、１５−ａは積層圧電素子外部電極、１５−ｂは積層圧電素子切り欠き部、１６は積層圧電素子固定板、１６−ａは積層圧電素子固定板切り欠き部、１６−ｂは個別電極、１６−ｃは共通電極、１６−ｄはスルーホール、１６−ｅは位置決め穴、１７はフレキシブルケーブル、１７−ａはフレキシブルケーブルフィルム部、１７−ｂはフレキシブルケーブル個別電極、１７−ｂ１はフレキシブルケーブル個別電極むき出し部、１７−ｃはフレキシブルケーブル共通電極、１７−ｄはフレキシブルケーブル位置決め穴、１８は位置決め穴、１９はハウジング位置決め穴、２０はフロントエンド組、２１は積層圧電素子組、２２は導電性接着剤、２３はシーリング剤、２４は接着剤、２５は積層圧電素子棒、２６はダイシングソーである。
1 is a nozzle, 2 is an orifice plate, 3 is a pressure chamber, 4 is a chamber plate, 5 is a restrictor, 6 is a restrictor plate, 7 is a diaphragm, 8 is a filter section, 9 is a diaphragm plate, 10 is a frame, 11 Is a support plate, 12 is a common ink passage, 13 is a housing, 14 is an opening, 15 is a laminated piezoelectric element, 15-a is a laminated piezoelectric element external electrode, 15-b is a laminated piezoelectric element notch, and 16 is a laminated piezoelectric element. Element fixing plate, 16-a is a laminated piezoelectric element fixing plate notch, 16-b is an individual electrode, 16-c is a common electrode, 16-d is a through hole, 16-e is a positioning hole, 17 is a flexible cable, 17-a is a flexible cable film part, 17-b is a flexible cable individual electrode, 17-b1 is a flexible cable individual electrode exposed part, and 17-c is Rexable cable common electrode, 17-d is a flexible cable positioning hole, 18 is a positioning hole, 19 is a housing positioning hole, 20 is a front end group, 21 is a laminated piezoelectric element group, 22 is a conductive adhesive, 23 is a sealing agent, Reference numeral 24 denotes an adhesive, 25 denotes a laminated piezoelectric element rod, and 26 denotes a dicing saw.

Claims (3)

インクを蓄える複数の圧力室と、共通電極と個別電極とを備え、電気信号の印加により前記圧力室内に圧力変動を発生させる積層圧電素子と、導電性の積層圧電素子固定板との連結領域の少なくとも一部を絶縁し、
前記導電性の積層圧電素子固定板上に設けたフレキシブルケーブルの一方の極と、前記積層圧電素子の個別電極とを導電性接着剤により導通し、
前記積層圧電素子の共通電極と、前記導電性の積層圧電素子固定板と、前記フレキシブルケーブルの他方の極とを夫々導電性接着剤により導通してなるインクジェットプリントヘッドにおいて、
棒状の積層圧電素子を前記圧力室に対応するように切断して前記積層圧電素子を形成する際に、フレキシブルケーブルの絶縁部も同時に切断して個別電極の導通部を形成することを特徴とするインクジェットプリントヘッド。 A plurality of pressure chambers for storing ink, a common electrode and individual electrodes, and a connection region between a conductive layered piezoelectric element fixing plate and a laminated piezoelectric element that generates a pressure fluctuation in the pressure chamber by applying an electric signal; Insulate at least partly,
One electrode of the flexible cable provided on the conductive laminated piezoelectric element fixing plate and the individual electrode of the laminated piezoelectric element are conducted with a conductive adhesive,
In the inkjet print head formed by conducting the common electrode of the laminated piezoelectric element, the conductive laminated piezoelectric element fixing plate, and the other pole of the flexible cable with a conductive adhesive,
When forming the laminated piezoelectric element by cutting the rod-shaped laminated piezoelectric element so as to correspond to the pressure chamber, the insulating part of the flexible cable is also cut at the same time to form the conductive part of the individual electrode. Inkjet printhead. 複数の電極を備えて各個別電極間が保持部材により連結したフレキシブルケーブルと、切断により複数の積層圧電素子を形成する棒状の積層圧電素子とを導電性接着剤で接着し、前記積層圧電素子と保持部材を一緒に切断して形成されることを特徴とするインクジェットプリントヘッド。   A flexible cable having a plurality of electrodes and each individual electrode connected by a holding member and a rod-shaped laminated piezoelectric element that forms a plurality of laminated piezoelectric elements by cutting are bonded with a conductive adhesive, and the laminated piezoelectric element An ink jet print head formed by cutting a holding member together. 前記保持部材は絶縁性部材であることを特徴とする請求項２記載のインクジェットプリントヘッド。
3. The ink jet print head according to claim 2, wherein the holding member is an insulating member.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296578A (en) * 2007-05-30 2008-12-11 Oce Technologies Bv Piezoelectric ink jet device manufacturing method
JP2013224007A (en) * 2012-03-19 2013-10-31 Ricoh Co Ltd Liquid drop ejecting head, image forming apparatus, and method of manufacturing liquid drop ejecting head
CN111016432A (en) * 2019-12-19 2020-04-17 西安增材制造国家研究院有限公司 Piezoelectric type printing head and manufacturing method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003072066A (en) * 2001-08-31 2003-03-12 Hitachi Koki Co Ltd Ink jet printing head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003072066A (en) * 2001-08-31 2003-03-12 Hitachi Koki Co Ltd Ink jet printing head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296578A (en) * 2007-05-30 2008-12-11 Oce Technologies Bv Piezoelectric ink jet device manufacturing method
JP2013224007A (en) * 2012-03-19 2013-10-31 Ricoh Co Ltd Liquid drop ejecting head, image forming apparatus, and method of manufacturing liquid drop ejecting head
CN111016432A (en) * 2019-12-19 2020-04-17 西安增材制造国家研究院有限公司 Piezoelectric type printing head and manufacturing method thereof

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