JP2005147661A - Heat treatment apparatus - Google Patents

Heat treatment apparatus Download PDF

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JP2005147661A
JP2005147661A JP2005006210A JP2005006210A JP2005147661A JP 2005147661 A JP2005147661 A JP 2005147661A JP 2005006210 A JP2005006210 A JP 2005006210A JP 2005006210 A JP2005006210 A JP 2005006210A JP 2005147661 A JP2005147661 A JP 2005147661A
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furnace body
support
support member
processed
supported
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JP4145305B2 (en
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Oudo Fujita
翁堂 藤田
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus for improving treatment efficiency of material to be treated without requiring a large mounting space, for uniformly heating the material, and reducing generation of dust. <P>SOLUTION: The heat treatment apparatus is provided with: a furnace body 2 with a gateway 15 that is opened in a crosswise direction; a drive device for turning a support member 4 around an axis in upper and lower directions so that a material 3 to be treated being supported by the support member 4 can be orbited around the axis in the upper and lower directions; and a heating device of the material 3 to be treated by circulation of hot air. The position of the support member 4 for the furnace body 2 is determined so that the material 3 to be treated can enter or exit from the furnace body 2 through the gateway 15 due to the orbiting. The material 3 to be treated can be supported or released by the support member 4 outside the furnace body 2. Shutoff members 61 are arranged between the support positions in a circumferential direction of the materials 3 by a support members 4, and are rotated together with the support member 4 so as to enter or exit from the furnace body 2 through the gateway 15 by the rotation. The shutoff member 61 can prevent flow of the hot air to the outside of the furnace body 2 when passing through the gateway 15. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、記録媒体用各種基板等の熱処理に適した熱処理装置に関する。   The present invention relates to a heat treatment apparatus suitable for heat treatment of various substrates for recording media.

従来、ハードディスク基板等の被処理材に対して焼成等の熱処理を行う場合、複数の被処理材をマガジンラックに収納した状態で、ウォーキングビーム式連続炉、チェーンコンベヤ式連続炉、バッチ炉等により加熱していた。   Conventionally, when heat treatment such as baking is performed on a material to be processed such as a hard disk substrate, a plurality of materials to be processed are stored in a magazine rack, and a walking beam type continuous furnace, a chain conveyor type continuous furnace, a batch furnace, etc. It was heated.

しかし、ウォーキングビーム式連続炉やチェーンコンベヤ式連続炉は、被処理材を一方向に搬送するものであるため、その搬送方向において大きな設置スペースを必要とする。また、炉内への被処理材の投入と取り出しを異なる場所で行う必要があり、投入のためのローディング機構と取り出しのためのアンローディング機構が個別に必要になり、設備コストや設備スペースが増大する。また、バッチ炉では各バッチ毎に被処理材の炉体への出し入れが必要であるため、処理効率が低下する。   However, since the walking beam type continuous furnace and the chain conveyor type continuous furnace convey the material to be processed in one direction, a large installation space is required in the conveying direction. In addition, it is necessary to load and unload the material to and from the furnace at different locations, and a loading mechanism for loading and an unloading mechanism for unloading are required separately, which increases equipment costs and space. To do. Further, in the batch furnace, since it is necessary to put the material to be processed into and out of the furnace body for each batch, the processing efficiency is lowered.

また、炉体内で被処理物をマガジンラックにより支持する場合、マガジンラックの耐熱性が低いと熱処理最高温度が制約され、マガジンラックの熱容量が大きいと被処理材の加熱時間が長くなると共に温度分布不良が生じる。また、被処理材をマガジンラックにより支持すると、被処理材の外周部に傷等の不良が発生する上に蓄熱ロスが大きくなるおそれがある。さらに、炉体内で加熱されたマガジンを再利用するための回収や発塵防止のための清掃等のために専用の取り扱い機構が必要になり、構造が複雑になる。   In addition, when a workpiece is supported by a magazine rack in the furnace, if the heat resistance of the magazine rack is low, the maximum heat treatment temperature is restricted, and if the heat capacity of the magazine rack is large, the heating time of the material to be processed becomes longer and temperature distribution is increased. Defects occur. In addition, if the material to be processed is supported by the magazine rack, defects such as scratches may occur on the outer periphery of the material to be processed, and the heat storage loss may increase. Furthermore, a dedicated handling mechanism is required for recovery for recycling the magazine heated in the furnace, cleaning for preventing dust generation, and the structure becomes complicated.

本発明は上記問題を解決することのできる熱処理装置を提供することを目的とする。   An object of this invention is to provide the heat processing apparatus which can solve the said problem.

本発明の熱処理装置は、横向きに開口する出入り口を有する炉体と、被処理材の支持部材と、その被処理材を炉体内で加熱する加熱装置と、その支持部材により支持された被処理材が上下方向軸まわりに周回するように、その支持部材を上下方向軸まわりに旋回させる駆動装置とを備え、その支持部材により被処理材が周方向に間隔をおいた複数位置において支持され、その周回により被処理材が前記出入り口を通って炉体に出入りするように、その支持部材の炉体に対する位置が定められ、その炉体の外部において、その被処理材の支持部材による支持と支持解除が可能とされ、前記加熱装置は炉体内で熱風を循環させることで被処理材を加熱するものとされ、その支持部材による被処理材の支持位置の周方向間に配置される遮断部材が、その支持部材と同行旋回すると共に、その旋回により前記出入り口を通って炉体に出入りするように設けられ、その遮断部材は、その出入り口の通過時に、炉体内の熱風の炉体外への流れを阻止可能であることを特徴とする。
本発明の構成によれば、支持部材に支持された被処理材は支持部材の旋回により炉体に出入りするので、炉体外に位置する被処理材を冷却したり、支持部材による支持を解除して回収できる。また、被処理材を炉体外において支持部材により支持させた後に炉体内に位置させて加熱できる。さらに、炉体外での被処理材の支持部材による支持と支持解除を同一場所あるいは互いに近接した場所で行うことが可能になり、被処理材を支持部材に支持させる機構と支持部材による支持を解除する機構とを単一機構により構成することもできるし、スループットの向上のために別個の機構により構成することもできる。また、炉体内で周回する被処理材を均一に加熱できる。さらに、その出入り口から炉体内の熱が逃げるのを遮断部材により防止でき、その遮断部材は支持部材と同行旋回するので専用の駆動機構が不要であり誤動作等のトラブルがなく、その出入り口を開閉する専用の開閉機構が不要であるため構造が複雑化することはなく、さらに、そのような専用の開閉機構を設ける必要がないので発塵がない。 The heat treatment apparatus of the present invention includes a furnace body having a door opening that opens sideways, a support member for the material to be processed, a heating device for heating the material to be processed in the furnace body, and the material to be processed supported by the support member. And a drive device for turning the support member around the vertical axis so that the workpiece is supported at a plurality of positions spaced apart in the circumferential direction by the support member. The position of the support member with respect to the furnace body is determined so that the material to be processed enters and exits the furnace body through the entrance and exit by circulation, and support and release of support by the support member of the material to be processed outside the furnace body The heating device is configured to heat the material to be processed by circulating hot air in the furnace body, and a blocking member disposed between the circumferential positions of the support positions of the material to be processed by the support member, The support member is provided so as to swivel with the support member and to enter and exit the furnace body through the entrance and exit, and the blocking member prevents the flow of hot air inside the furnace body outside the furnace body when passing through the entrance and exit. It is possible.
According to the configuration of the present invention, since the material to be processed supported by the support member enters and exits the furnace body by turning the support member, the material to be processed located outside the furnace body is cooled or the support by the support member is released. Can be recovered. Further, after the material to be processed is supported by the support member outside the furnace body, it can be placed in the furnace body and heated. Furthermore, it becomes possible to support and release support of the material to be processed outside the furnace body at the same place or in a location close to each other, and release the support by the support member and the mechanism for supporting the material to be processed. The mechanism to be operated can be configured by a single mechanism, or can be configured by a separate mechanism in order to improve throughput. Moreover, the to-be-processed material which circulates within a furnace body can be heated uniformly. Further, the heat from the furnace body can be prevented from escaping from the entrance / exit by a shut-off member, and the shut-off member rotates together with the support member, so that a dedicated drive mechanism is unnecessary and there is no trouble such as malfunction, and the entrance / exit is opened / closed. Since a dedicated opening / closing mechanism is not required, the structure is not complicated, and further, there is no need to provide such a dedicated opening / closing mechanism, so there is no dust generation.

その被処理材は孔を有し、その支持部材は、その孔に挿入される支持部を有し、その被処理材は、その孔の内周を介して支持部により吊り下げ状に支持されるのが好ましい。被処理材を吊り下げ状に支持することで、被処理材の保持用マガジンラック等が不要になるので、構造を複雑化することなく、熱処理最高温度の制約をなくし、加熱時間を短縮し、温度分布の均一性を向上できる。   The material to be treated has a hole, the support member has a support part inserted into the hole, and the material to be treated is supported in a suspended manner by the support part via the inner periphery of the hole. It is preferable. By supporting the material to be processed in a suspended form, a magazine rack for holding the material to be processed is unnecessary, so that the structure is complicated, the heat treatment maximum temperature is eliminated, the heating time is shortened, The uniformity of temperature distribution can be improved.

その支持部は、その支持部材から横方向に延びるように設けられ、その横方向に並列する複数の被処理材を吊り下げ状に支持可能であるのが好ましい。これにより、複数の被処理材を一挙に熱処理できる。   The support part is preferably provided so as to extend in the lateral direction from the support member, and is preferably capable of supporting a plurality of materials to be processed in parallel in the lateral direction in a suspended form. Thereby, a plurality of processed materials can be heat-treated at once.

その加熱装置は、熱風を前記支持部に支持された被処理材に上下方向に沿って吹き付けられるように循環させ、その支持部に、その熱風の通過路が形成されているのが好ましい。これにより、熱風の流れが乱れるのを防止し、より均一に被処理材を加熱できる。   It is preferable that the heating device circulates hot air so that the hot air is blown to the material to be treated supported by the support portion in the vertical direction, and the hot air passage is formed in the support portion. As a result, the flow of hot air is prevented from being disturbed, and the material to be treated can be heated more uniformly.

その遮断部材は上下方向に沿う整流面を有し、その整流面に沿い前記加熱装置により循環される熱風が流動するのが好ましい。これにより、熱風の流れが乱れるのを防止し、より均一に被処理材を加熱できる。   It is preferable that the blocking member has a straightening surface along the vertical direction, and the hot air circulated by the heating device flows along the straightening surface. As a result, the flow of hot air is prevented from being disturbed, and the material to be treated can be heated more uniformly.

その支持部材は間欠的に旋回され、その旋回の停止時に、その複数の支持位置の中の一部において支持された被処理材は炉体外に配置されると共に残部において支持された被処理材は炉体内に配置されるのが好ましい。これにより、炉体内で被処理材の熱処理を行うと同時に、炉体外で処理済の被処理材を支持部材から取り外し、未処理の被処理材を支持部材により支持させることができる。   The support member is swirled intermittently, and when the swiveling is stopped, the material to be treated supported in a part of the plurality of support positions is arranged outside the furnace body and the material to be treated supported in the remaining part is It is preferable to arrange in the furnace. As a result, the material to be treated can be heat-treated in the furnace, and the material to be treated that has been treated outside the furnace can be removed from the support member, and the untreated material can be supported by the support member.

本発明によれば、大きな設置スペースを必要とすることなく処理効率を向上でき、被処理材を熱処理最高温度の制約なく短時間で均一に加熱でき、省電力化でき、さらに発塵を低減でき、電子部品等の熱処理に適した熱処理装置を提供できる。   According to the present invention, the processing efficiency can be improved without requiring a large installation space, the material to be processed can be heated uniformly in a short time without restriction of the maximum heat treatment temperature, power can be saved, and dust generation can be reduced. It is possible to provide a heat treatment apparatus suitable for heat treatment of electronic parts and the like.

図１〜図３を参照して本発明の比較例を説明する。
図１〜図３に示す熱処理装置１は、炉体２と、被処理材３の支持部材４と、その被処理材３を炉体２内で加熱する加熱装置５と、その支持部材４の駆動装置６とを備える。 A comparative example of the present invention will be described with reference to FIGS.
The heat treatment apparatus 1 shown in FIGS. 1 to 3 includes a furnace body 2, a support member 4 for the material 3 to be processed, a heating device 5 for heating the material 3 to be processed in the furnace body 2, and the support member 4. And a driving device 6.

その炉体２は架台７上に設けられ、その内部は上壁１１、底壁１２および第１〜第８側壁部１３ａ〜１３ｈを連ねることで構成される周壁１３により囲まれる。各側壁部１３ａ〜１３ｈは正面視方形で、相隣接する側壁部は互いに直交するように配置され、横幅最大の第１側壁部１３ａの一端に、横幅が２番目に大きな第２側壁部１３ｂの一端が連なり、第２側壁部１３ｂの他端に横幅が３番目に大きな第３側壁部１３ｃの一端が第１側壁部１３ａに対向するように連なり、第３側壁部１３ｂの他端に第４側壁部１３ｄの一端が第１側壁部１３ａに近接する方向に延びるように連なり、第４側壁部１３ｂの他端に第５側壁部１３ｅの一端が第２側壁部１３ｂから離れる方向に延びるように連なり、第５側壁部１３ｅの他端に第６側壁部１３ｆの一端が第１側壁部１３ａに近接する方向に延びるように連なり、第６側壁部１３ｆの他端に第７側壁部１３ｇの一端が第２側壁部１３ｂから離れる方向に延びるように連なり、第７側壁部１３ｇの他端と第１側壁部１３ａの他端とに第８側壁部１３ｈが連なる。   The furnace body 2 is provided on a gantry 7, and the inside thereof is surrounded by a peripheral wall 13 configured by connecting an upper wall 11, a bottom wall 12, and first to eighth side wall portions 13 a to 13 h. Each of the side wall portions 13a to 13h has a square shape when viewed from the front, and the adjacent side wall portions are arranged so as to be orthogonal to each other, and at one end of the first side wall portion 13a having the largest width, the second side wall portion 13b having the second largest width. One end is continuous, the other end of the second side wall portion 13b is connected so that one end of the third side wall portion 13c having the third largest width faces the first side wall portion 13a, and the other end of the third side wall portion 13b is connected to the fourth end. One end of the side wall portion 13d is connected so as to extend in the direction approaching the first side wall portion 13a, and one end of the fifth side wall portion 13e extends in a direction away from the second side wall portion 13b to the other end of the fourth side wall portion 13b. One end of the sixth side wall portion 13f extends to the other end of the fifth side wall portion 13e so as to extend in a direction close to the first side wall portion 13a, and one end of the seventh side wall portion 13g extends to the other end of the sixth side wall portion 13f. Extends in a direction away from the second side wall portion 13b. Contiguous manner, the eighth sidewall portion 13h is connected to the other ends of the first side wall portion 13a of the seventh sidewall portion 13 g.

その炉体２に横向きに開口する出入り口１５が、その第４側壁部１３ｄ〜第７側壁部１３ｇに亘り形成されている。   An entrance / exit 15 that opens laterally in the furnace body 2 is formed across the fourth side wall 13d to the seventh side wall 13g.

その支持部材４は、炉体２内で上下方向軸中心に旋回可能に支持される支柱２１と、この支柱２１の上端に同行回転可能に取り付けられた旋回盤２２と、この旋回盤２２に同行回転可能に取り付けられた複数のロッド状支持部２３とを有する。   The support member 4 includes a support column 21 supported to be rotatable about the vertical axis in the furnace body 2, a turntable 22 attached to the upper end of the support column 21 so as to be able to rotate together, and the turntable 22. And a plurality of rod-like support portions 23 that are rotatably attached.

それら支持部２３は、支持部材４の旋回軸まわりに周方向の等間隔をおいて配置されている。また、各支持部３は、それぞれ支持部材４の旋回軸から放射方向に延びることで、その支持部材４から横方向に延びる。図４（１）に示すように、各支持部２３は、相対向する一対の側板２３ａと、両側板２３ａの下端を連結する底板２３ｂとを有するように板材から曲げ成形され、各側板２３ａの上部に、その放射方向に間隔をおいて並列する複数の溝２３ａ′が形成されている。   The support portions 23 are arranged at equal intervals in the circumferential direction around the pivot axis of the support member 4. In addition, each support portion 3 extends in the radial direction from the support member 4 by extending in the radial direction from the pivot axis of the support member 4. As shown in FIG. 4 (1), each support portion 23 is formed by bending from a plate material so as to have a pair of side plates 23a facing each other and a bottom plate 23b connecting the lower ends of both side plates 23a. A plurality of grooves 23a 'are formed in the upper portion and are arranged in parallel at intervals in the radial direction.

その被処理材３は例えばハードディスク基板であって中心孔３ａを有し、その中心孔３ａに上記支持部２３が挿入される。これにより、その被処理材３は中心孔３ａの内周を介して支持部２３により、周方向に間隔をおいた複数位置において吊り下げ状に支持される。また、各支持部２３は複数の被処理材３の中心孔３ａに挿入され、上記複数の溝２３ａ′に被処理材３が上記放射方向に間隔をおいて並列するように嵌め合わされることで、その放射方向に並列する複数の被処理材３を吊り下げ状に支持可能である。その溝２３′の形状や寸法は被処理材３のサイズに応じて定めればよい。また、その溝２３′の側面視形状はＶ字形状とされ、そのＶ字の角度は被処理材３の振れを規制できるように設定するのが好ましく、その振れ規制により被処理材３が互いに衝突して傷つくのを防止できる。   The processed material 3 is, for example, a hard disk substrate and has a center hole 3a, and the support portion 23 is inserted into the center hole 3a. Thereby, the to-be-processed material 3 is supported by the support part 23 through the inner periphery of the center hole 3a in a suspended manner at a plurality of positions spaced in the circumferential direction. In addition, each support portion 23 is inserted into the center hole 3a of the plurality of materials to be processed 3, and the materials to be processed 3 are fitted in the plurality of grooves 23a 'so as to be parallel to each other at intervals in the radial direction. The plurality of workpieces 3 arranged in parallel in the radial direction can be supported in a suspended manner. The shape and dimensions of the groove 23 ′ may be determined according to the size of the material 3 to be processed. Further, the shape of the groove 23 'when viewed from the side is V-shaped, and the angle of the V-shape is preferably set so as to be able to restrict the deflection of the material 3 to be processed. It can be prevented from colliding and getting hurt.

その加熱装置５は、炉体２内で熱風を循環させることで被処理材３を加熱する。すなわち、その炉体２の内部に内壁３１が設けられ、この内壁３１により炉体２の内部は処理室３２と、ヒータ室３３と、ブロア室３４とに区画されている。その処理室３２の内部に上記支持部２３が配置され、そのヒータ室３３にヒータ３５が設けられ、そのブロア室３４にブロア３６の翼３６ａが設けられ、その翼３６ａの回転駆動モータ３６ｂは炉体２外に取り付けられる。また、その処理室３２とブロア室３４との間に介在する耐熱性フィルター３７が設けられる。その内壁３１における処理室３２の上部３２ａと下部３２ｂとを構成する部分に、複数の通風口３８が形成されている。その処理室３２は、下部３２ｂに形成された通風口３８を介してヒータ室３３に連なり、上部３２ａに形成された通風口３８とフィルター３７を介してブロア室３４に通じる。なお、その通風口３８の開度は変更調節可能とされているのが好ましい。   The heating device 5 heats the workpiece 3 by circulating hot air in the furnace body 2. That is, the inner wall 31 is provided inside the furnace body 2, and the inner wall 31 divides the interior of the furnace body 2 into a processing chamber 32, a heater chamber 33, and a blower chamber 34. The support portion 23 is arranged inside the processing chamber 32, the heater 35 is provided in the heater chamber 33, the blade 36a of the blower 36 is provided in the blower chamber 34, and the rotation drive motor 36b of the blade 36a is a furnace. It is attached outside the body 2. Further, a heat resistant filter 37 interposed between the processing chamber 32 and the blower chamber 34 is provided. A plurality of vent holes 38 are formed in a portion of the inner wall 31 constituting the upper portion 32a and the lower portion 32b of the processing chamber 32. The processing chamber 32 is connected to the heater chamber 33 through a ventilation port 38 formed in the lower portion 32 b, and communicates with the blower chamber 34 through a ventilation port 38 formed in the upper portion 32 a and a filter 37. In addition, it is preferable that the opening degree of the vent hole 38 can be changed and adjusted.

図１において矢印で示すように、そのヒータ室３３においてヒータ３５により加熱された炉体２内の雰囲気は、そのブロア３６によりヒータ室３３からブロア室３４に至り、次にフィルター３７、通風口３８を介して処理室３２に至り、その処理室３２において支持部２３により支持された被処理材３に上下方向に沿って吹き付けられる熱風となり、しかる後に通風口３８を介してヒータ室３３に還流する。その炉体２内の雰囲気としては、例えば空気や窒素を用いることができる。   As indicated by arrows in FIG. 1, the atmosphere in the furnace body 2 heated by the heater 35 in the heater chamber 33 reaches from the heater chamber 33 to the blower chamber 34 by the blower 36, and then the filter 37 and the ventilation port 38. , The hot air blown in the vertical direction to the workpiece 3 supported by the support portion 23 in the processing chamber 32, and then returns to the heater chamber 33 through the ventilation port 38. . As the atmosphere in the furnace body 2, for example, air or nitrogen can be used.

上記駆動装置６は架台７に内蔵されたモータ４１と、そのモータ４１の制御装置（図示省略）とを有し、その制御装置からの信号によりモータ４１は支持部材４を上下方向軸まわりに間欠的に旋回させる。その旋回方向は、図３において矢印で示すように一方向とされているが、旋回方向を逆転可能にしてもよい。その旋回により支持部２３により支持された被処理材３は上下方向軸まわりに周回する。この周回により被処理材３が上記出入り口１５を通って炉体２に出入りするように、その支持部材４の炉体２に対する位置が定められている。その支持部材４の旋回中心は炉体２内に配置され、その旋回の停止時に、複数の支持部２３の中の一部は炉体２外に配置され、残部は炉体２内に配置される。これにより、支持部材４による複数の支持位置の中の一部において支持部２３により支持された被処理材３は炉体２外に配置されると共に、残部において支持部２３により支持された被処理材３は炉体２内に配置される。   The drive device 6 has a motor 41 built in the gantry 7 and a control device (not shown) of the motor 41, and the motor 41 intermittently supports the support member 4 about the vertical axis by a signal from the control device. Swivel. The turning direction is one direction as indicated by an arrow in FIG. 3, but the turning direction may be reversed. The material 3 to be processed supported by the support portion 23 by the turning rotates around the vertical axis. The position of the support member 4 with respect to the furnace body 2 is determined so that the material 3 to be processed enters and exits the furnace body 2 through the doorway 15 by this circulation. The turning center of the support member 4 is arranged in the furnace body 2, and when the turning is stopped, a part of the plurality of support parts 23 is arranged outside the furnace body 2, and the remaining part is arranged in the furnace body 2. The As a result, the workpiece 3 supported by the support portion 23 at a part of the plurality of support positions by the support member 4 is disposed outside the furnace body 2, and the treatment target supported by the support portion 23 at the remaining portion. The material 3 is disposed in the furnace body 2.

その炉体２の外部において、その被処理材３の支持部材４による支持と支持解除が可能とされている。すなわち、炉体２の外部に位置する支持部２３に被処理材３を中心孔３ａを介して嵌め合わせることで、支持部材４により被処理材３を支持でき、その支持部２３から被処理材３を引き抜くことで支持を解除できる。その被処理材３の支持と支持解除は、図５に示すようなケース５１を用いることで効率良く行うことができる。そのケース５１は、複数の被処理材３を各中心孔３ａが同心になるように間隔をおいて並列させた状態で保持するもので、その並列方向を前後方向として前後面と上面とが開放されている。これにより、そのケース５１により保持された複数の被処理材３を、そのケース５１の前後移動により各中心孔３ａを介してまとめて支持部２３に嵌め合わせ、しかる後にケースを下方移動させることで、支持部２３に支持させることができる。また、支持部２３により支持された複数の被処理材３を、下方からケース５１を上方に移動させることで支持し、しかる後にケースを後方移動させることでまとめて支持部２３から引き抜くことができる。そのケース５１の移動は公知のマニピュレータやロボット等を用いて行うことができる。また、炉体２外での被処理材３の支持部材４による支持と支持解除を同一場所で行うことが可能であるので、被処理材３を支持部材４に支持させる機構と支持部材４による支持を解除する機構とを単一機構により構成することが可能である。   Outside the furnace body 2, the support material 4 can be supported and released by the support member 4. That is, the material 3 can be supported by the support member 4 by fitting the material 3 to the support 23 positioned outside the furnace body 2 through the center hole 3a, and the material to be processed can be supported from the support 23. The support can be released by pulling out 3. The support and release of the material to be processed 3 can be efficiently performed by using a case 51 as shown in FIG. The case 51 holds a plurality of materials to be processed 3 in a state of being arranged in parallel so that the central holes 3a are concentric, and the front and rear surfaces and the upper surface are opened with the parallel direction as the front and rear direction. Has been. As a result, the plurality of workpieces 3 held by the case 51 are collectively fitted to the support portion 23 through the center holes 3a by moving the case 51 back and forth, and then the case is moved downward. , And can be supported by the support portion 23. Further, the plurality of materials to be processed 3 supported by the support portion 23 can be supported by moving the case 51 upward from below, and then pulled out from the support portion 23 collectively by moving the case backward. . The case 51 can be moved using a known manipulator, robot, or the like. Further, since it is possible to support and release the support of the material to be processed 3 outside the furnace body 2 at the same place, the mechanism and the support member 4 support the material to be processed 3 on the support member 4. The mechanism for releasing the support can be constituted by a single mechanism.

上記構成によれば、支持部材４に支持された被処理材３は支持部材４の旋回により炉体２に出入りするので、炉体２外に位置する時に冷却し、支持部材４による支持を解除して回収できる。また、炉体２外において被処理材３を支持部材４により支持させた後に、炉体２内に位置させることで加熱できる。さらに、炉体２内で被処理材３の熱処理を行うと同時に、炉体２外で処理済の被処理材３を支持部材４から取り外し、未処理の被処理材３を支持部材４により支持させることができる。その被処理材３を中心孔３ａを介して支持することで、構造を複雑化することなく、熱処理最高温度の制約をなくし、加熱時間を短縮し、温度分布の均一性を向上できる。また、その支持部２３の支持部２３により複数の被処理材３を吊り下げ状に支持可能であるので、複数の被処理材３を一挙に熱処理できる。さらに、熱風を循環させることで炉体２内で周回する被処理材３を均一に加熱できる。また、フィルター３７を介することで清浄度の高い熱風を被処理材３に吹き付けることができ、被処理材３として電子部品の熱処理に適したものにできる。   According to the above configuration, since the workpiece 3 supported by the support member 4 enters and exits the furnace body 2 by the turning of the support member 4, it is cooled when positioned outside the furnace body 2, and the support by the support member 4 is released. And can be recovered. Further, after the workpiece 3 is supported by the support member 4 outside the furnace body 2, it can be heated by being positioned in the furnace body 2. Furthermore, at the same time as the heat treatment of the material 3 to be processed in the furnace body 2, the material 3 to be processed outside the furnace body 2 is removed from the support member 4, and the untreated material 3 is supported by the support member 4. Can be made. By supporting the material 3 to be processed through the center hole 3a, it is possible to eliminate the restriction on the maximum heat treatment temperature without complicating the structure, shorten the heating time, and improve the uniformity of the temperature distribution. In addition, since the plurality of workpieces 3 can be supported in a suspended manner by the support portion 23 of the support portion 23, the plurality of workpieces 3 can be heat-treated at once. Furthermore, the to-be-processed material 3 which circulates within the furnace body 2 can be heated uniformly by circulating hot air. Further, by passing through the filter 37, hot air having a high cleanliness can be blown to the material 3 to be processed, and the material 3 to be processed can be suitable for heat treatment of electronic components.

図６〜図８は本発明の実施形態を示す。上記比較例との相違は、支持部材４による被処理材３の支持位置の周方向間、すなわち支持部２３の周方向間に遮断部材６１が配置される点にある。その遮断部材６１は、その支持部材４と同行旋回すると共に、その旋回により前記出入り口１５を通って炉体２に出入りするように設けられている。その遮断部材６１の一端側は板状であって、その出入り口１５の通過時に、その出入り口１５を略閉鎖することで炉体２内の熱風の炉体２外への流れを実質的に阻止できる。また、その遮断部材６１の一端側の旋回方向前後側の面は上下方向に沿う整流面６１ａとされ、その整流面６１ａに沿って加熱装置５により循環される熱風が流動する。その遮断部材６１による出入り口１５の閉鎖領域は可及的に大きくされ、その遮断部材６１は外周は出入り口１５の内周に略沿う形状に成形されるのが好ましい。   6 to 8 show an embodiment of the present invention. The difference from the comparative example is that the blocking member 61 is disposed between the circumferential positions of the support positions of the workpiece 3 by the support member 4, that is, between the circumferential directions of the support portion 23. The blocking member 61 is provided so as to turn together with the support member 4 and to enter and exit the furnace body 2 through the doorway 15 by the turning. One end side of the shut-off member 61 is plate-shaped, and the flow of hot air in the furnace body 2 to the outside of the furnace body 2 can be substantially blocked by substantially closing the doorway 15 when the doorway 15 passes. . Moreover, the surface of the one end side of the blocking member 61 on the front and rear sides in the turning direction is a rectifying surface 61a along the vertical direction, and the hot air circulated by the heating device 5 flows along the rectifying surface 61a. The closed region of the entrance / exit 15 by the blocking member 61 is made as large as possible, and the outer periphery of the blocking member 61 is preferably formed in a shape substantially along the inner periphery of the entrance / exit 15.

本発明の実施形態によれば、その出入り口１５から炉体２内の熱が逃げるのを遮断部材６１により防止でき、その遮断部材６１は支持部材４と同行旋回するので専用の駆動機構が不要であり誤動作等のトラブルがなく、その出入り口１５を開閉する専用の開閉機構が不要であるため構造が複雑化することはなく、さらに、そのような専用の開閉機構を設ける必要がないので発塵がない。また、その遮断部材６１の整流面６１ａに沿って熱風が流動するので、その熱風の流れが乱れるのを防止し、より均一に被処理材を加熱できる。他は上記比較例と同様で、同一部分は同一符号で示す。   According to the embodiment of the present invention, it is possible to prevent the heat in the furnace body 2 from escaping from the entrance / exit 15 by the blocking member 61, and the blocking member 61 rotates together with the support member 4, so that a dedicated drive mechanism is not required. There is no trouble such as malfunction, and no dedicated opening / closing mechanism for opening / closing the entrance / exit 15 is required, so that the structure is not complicated. Absent. Further, since the hot air flows along the rectifying surface 61a of the blocking member 61, the flow of the hot air is prevented from being disturbed, and the material to be processed can be heated more uniformly. Others are the same as those in the comparative example, and the same parts are denoted by the same reference numerals.

図４の（２）は本発明の変形例を示す。上記実施形態との相違は、各支持部２３において底板２３ｂをなくし、一対の側板２３ａの間を熱風の通過路２３′とした点にある。これにより、加熱装置５により被処理材３に上下方向に沿って吹き付けられる熱風は、その通過路２３を通るので流れが乱れるのが防止され、被処理材３をより均一に加熱できる。他は上記実施形態と同様で、同一部分は同一符号で示す。   FIG. 4 (2) shows a modification of the present invention. The difference from the above embodiment is that the bottom plate 23b is eliminated from each support portion 23, and a passage 23 'for hot air is provided between the pair of side plates 23a. Thereby, since the hot air blown to the to-be-processed material 3 by the heating apparatus 5 along the up-down direction passes through the passage 23, it is prevented that a flow is disturbed and the to-be-processed material 3 can be heated more uniformly. Others are the same as in the above embodiment, and the same parts are denoted by the same reference numerals.

本発明は上記実施形態や変形例に限定されない。例えば、上記実施形態では支持部材の旋回中心は炉体内に位置されたが炉体外に位置されてもよい。被処理材は中心以外の位置に孔を有するものであってもよく、また、その孔に挿入される支持部により被処理材を吊り下げ状に支持できれば、その孔の内周は閉じることなく部分的に開いてもよい。さらに、被処理材を中心孔を介することなく収納ケース等を介して支持部材により支持してもよく、この場合、被処理材として中心孔を有さない熱処理装置にも本発明を適用できる。支持部材の間欠回転角度や回転速度は特に限定されず、熱処理条件に応じて任意の角度ずつ（例えば２０度ずつ）、任意の時間だけ回転を停止させつつ間欠的に移動させればよい。また、支持部材による被処理材の支持位置の数や、各支持部により支持する被処理材の数は特に限定されず、その支持部の着脱により増減できるようにしてもよい。また、支持部材により支持された被処理材を炉体外において冷却する機構を別途設けてもよい。   The present invention is not limited to the above embodiments and modifications. For example, in the above embodiment, the turning center of the support member is located in the furnace body, but may be located outside the furnace body. The material to be processed may have a hole at a position other than the center, and if the material to be processed can be supported in a suspended manner by the support portion inserted into the hole, the inner periphery of the hole is not closed. It may be partially open. Furthermore, the material to be treated may be supported by a support member via a storage case or the like without going through the center hole. In this case, the present invention can be applied to a heat treatment apparatus that does not have a center hole as the material to be treated. The intermittent rotation angle and rotation speed of the support member are not particularly limited, and may be moved intermittently while stopping the rotation for an arbitrary time by an arbitrary angle (for example, 20 degrees) according to the heat treatment conditions. Further, the number of support positions of the material to be processed by the support member and the number of materials to be processed supported by each support part are not particularly limited, and may be increased or decreased by attaching or detaching the support part. Moreover, you may provide the mechanism which cools the to-be-processed material supported by the supporting member outside a furnace body.

本発明の比較例の熱処理装置の部分破断正面図The partially broken front view of the heat processing apparatus of the comparative example of this invention 図１のＩＩ‐ＩＩ線断面図II-II sectional view of FIG. 本発明の比較例の熱処理装置の要部の斜視図The perspective view of the principal part of the heat processing apparatus of the comparative example of this invention （１）は本発明の実施形態の支持部の斜視図、（２）は本発明の変形例の支持部の斜視図(1) is a perspective view of a support portion of an embodiment of the present invention, (2) is a perspective view of a support portion of a modification of the present invention. 本発明の実施形態のケースの斜視図The perspective view of the case of embodiment of this invention 本発明の実施形態の熱処理装置の部分破断正面図The partially broken front view of the heat processing apparatus of embodiment of this invention 図６のＶＩＩ‐ＶＩＩ線断面図Sectional view taken along line VII-VII in FIG. 本発明の実施形態の熱処理装置の要部の斜視図The perspective view of the principal part of the heat processing apparatus of embodiment of this invention

符号の説明Explanation of symbols

１ 熱処理装置
２ 炉体
３ 被処理材
４ 支持部材
５ 加熱装置
６ 駆動装置
１５ 出入り口
６１ 遮断部材 DESCRIPTION OF SYMBOLS 1 Heat processing apparatus 2 Furnace body 3 To-be-processed material 4 Support member 5 Heating apparatus 6 Drive apparatus 15 Entrance / exit 61 Shut-off member

Claims (6)

横向きに開口する出入り口を有する炉体と、
被処理材の支持部材と、
その被処理材を炉体内で加熱する加熱装置と、
その支持部材により支持された被処理材が上下方向軸まわりに周回するように、その支持部材を上下方向軸まわりに旋回させる駆動装置とを備え、
その支持部材により被処理材が周方向に間隔をおいた複数位置において支持され、
その周回により被処理材が前記出入り口を通って炉体に出入りするように、その支持部材の炉体に対する位置が定められ、
その炉体の外部において、その被処理材の支持部材による支持と支持解除が可能とされ、前記加熱装置は炉体内で熱風を循環させることで被処理材を加熱するものとされ、
その支持部材による被処理材の支持位置の周方向間に配置される遮断部材が、その支持部材と同行旋回すると共に、その旋回により前記出入り口を通って炉体に出入りするように設けられ、
その遮断部材は、その出入り口の通過時に、炉体内の熱風の炉体外への流れを阻止可能である熱処理装置。 A furnace body having a doorway that opens sideways;
A support member for the material to be treated;
A heating device for heating the material to be treated in the furnace,
A drive device for turning the support member around the vertical axis so that the workpiece supported by the support member circulates around the vertical axis;
The workpiece is supported at a plurality of positions spaced in the circumferential direction by the support member,
The position of the supporting member with respect to the furnace body is determined so that the material to be processed enters and exits the furnace body through the entrance and exit by the circulation,
Outside the furnace body, it is possible to support and release the support of the material to be processed, and the heating device heats the material to be processed by circulating hot air inside the furnace body,
A blocking member disposed between the circumferential positions of the support positions of the material to be processed by the support member is provided so as to rotate along with the support member and to enter and exit the furnace body through the entrance through the rotation.
The blocking member is a heat treatment apparatus capable of preventing the flow of hot air inside the furnace body to the outside of the furnace body when passing through the entrance / exit. その被処理材は孔を有し、
その支持部材は、その孔に挿入される支持部を有し、
その被処理材は、その孔の内周を介して支持部により吊り下げ状に支持される請求項１に記載の熱処理装置。 The treated material has holes,
The support member has a support portion inserted into the hole,
The heat treatment apparatus according to claim 1, wherein the material to be treated is supported in a suspended form by a support portion via an inner periphery of the hole. その支持部は、その支持部材から横方向に延びるように設けられ、その横方向に並列する複数の被処理材を吊り下げ状に支持可能である請求項２に記載の熱処理装置。 The heat treatment apparatus according to claim 2, wherein the support portion is provided so as to extend in a lateral direction from the support member, and can support a plurality of materials to be processed in parallel in the lateral direction in a suspended manner. 前記加熱装置は、熱風を前記支持部に支持された被処理材に上下方向に沿って吹き付けられるように循環させ、
前記支持部に、その熱風の通過路が形成されている請求項１〜３の中の何れかに記載の熱処理装置。 The heating device circulates hot air so as to be blown along the vertical direction to the material supported by the support portion,
The heat treatment apparatus according to claim 1, wherein a passage for the hot air is formed in the support portion. その遮断部材は上下方向に沿う整流面を有し、その整流面に沿い前記加熱装置により循環される熱風が流動する請求項１〜４の中の何れかに記載の熱処理装置。 5. The heat treatment apparatus according to claim 1, wherein the blocking member has a rectifying surface along a vertical direction, and hot air circulated by the heating device flows along the rectifying surface. その支持部材は間欠的に旋回され、
その旋回の停止時に、その複数の支持位置の中の一部において支持された被処理材は炉体外に配置されると共に残部において支持された被処理材は炉体内に配置される請求項１〜５の中の何れかに記載の熱処理装置。 The support member is intermittently swiveled,
The material to be processed supported at a part of the plurality of support positions is arranged outside the furnace body and the material to be supported supported at the remaining part is arranged inside the furnace body when the turning is stopped. The heat treatment apparatus according to any one of 5.
JP2005006210A 2005-01-13 2005-01-13 Heat treatment apparatus and method of using the same Expired - Lifetime JP4145305B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014209404A (en) * 2008-10-22 2014-11-06 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Patterning of magnetic thin film using energized ions
US9263078B2 (en) 2008-02-12 2016-02-16 Applied Materials, Inc. Patterning of magnetic thin film using energized ions

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9263078B2 (en) 2008-02-12 2016-02-16 Applied Materials, Inc. Patterning of magnetic thin film using energized ions
JP2014209404A (en) * 2008-10-22 2014-11-06 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Patterning of magnetic thin film using energized ions

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