JP2005084090A - Integrated optical waveguide device - Google Patents

Integrated optical waveguide device Download PDF

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JP2005084090A
JP2005084090A JP2003312602A JP2003312602A JP2005084090A JP 2005084090 A JP2005084090 A JP 2005084090A JP 2003312602 A JP2003312602 A JP 2003312602A JP 2003312602 A JP2003312602 A JP 2003312602A JP 2005084090 A JP2005084090 A JP 2005084090A
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optical waveguide
substrate
grin lens
integrated optical
waveguide device
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JP4183583B2 (en
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Noritaka Hara
徳隆 原
Junichiro Ichikawa
潤一郎 市川
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Sumitomo Osaka Cement Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an integrated optical waveguide device with lower propagation loss while maintaining integration and improving compactness, even in the integrated optical waveguide device generating an optical beam having asymmetric intensity distribution. <P>SOLUTION: The integrated optical waveguide device is provided with a substrate 30 consisting of a material having electro-optic effect, an optical waveguide 31 formed on the top side of the substrate, and an optical waveguide 32 formed on the bottom side of the substrate. On at least one end face of the substrate, the optical waveguides formed on the different sides are provided with an emission port 33 and an incidence port 34, respectively. A GRIN lens 10 is arranged adjacently to the one end face so that light emitted from the emission port enters the incidence port. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、集積型光導波路素子に関し、特に、基板の異なる面または複数の基板上に形成された光導波路を、光学的に結合することを特徴とする集積型光導波路素子に関する。   The present invention relates to an integrated optical waveguide device, and more particularly, to an integrated optical waveguide device characterized by optically coupling optical waveguides formed on different surfaces of a substrate or on a plurality of substrates.

近年、光通信などの分野において、高速なスイッチングを可能にすることなどの目的から、光導波路デバイスなどの外部変調器が広く用いられるようになった。そして、このような外部変調器としては、高周波特性や低挿入損失、高消光比などの特徴を有するニオブ酸リチウム（ＬｉＮｂＯ３；以下、ＬＮという）を基板に用い、この基板にＴｉなどを熱拡散させることにより形成した光導波路を具える導波路型の光変調器が実用化されている。 In recent years, external modulators such as optical waveguide devices have been widely used in the field of optical communications and the like for the purpose of enabling high-speed switching. As such an external modulator, lithium niobate (LiNbO 3 ; hereinafter referred to as LN) having characteristics such as high frequency characteristics, low insertion loss, and high extinction ratio is used as a substrate, and Ti or the like is heated on the substrate. A waveguide type optical modulator having an optical waveguide formed by diffusing has been put into practical use.

光変調器には、光強度変調器、位相変調器、偏波変調器などがあり、これらを複数組み合わせることにより、多種多様な光回路を形成することが行われているが、最近では、これら回路素子全体を高密度に集積化及びコンパクト化することが求められており、同一基板上に複数の光変調器を形成することが行われている。
具体的には、同一基板上に目的とする機能を有する複数の光導波路を基板の幅方向に平行に並べて構成し、それぞれを（１）ファイバーで結合する、（２）同一基板上の半円状の導波路で結合する、（３）基板端面で反射を利用する接続用導波路で結合するなどの方法により、複数の光導波路を光学的に結合させることが行われている。 Optical modulators include optical intensity modulators, phase modulators, polarization modulators, etc., and various types of optical circuits have been formed by combining a plurality of these. It is required to integrate and compact the entire circuit element with high density, and a plurality of optical modulators are formed on the same substrate.
Specifically, a plurality of optical waveguides having a desired function are arranged on the same substrate in parallel in the width direction of the substrate, and each is (1) coupled with a fiber, and (2) a semicircle on the same substrate. A plurality of optical waveguides are optically coupled by a method such as coupling with a rectangular waveguide, or (3) coupling with a connection waveguide using reflection on the end face of the substrate.

しかしながら、（１）の方法では、光ファイバを設置する空間が必要となるため、並列接続による光通信網の高密度化を十分に達成することができないという問題があった。また、（２）の方法においても、半円型の光導波路を別個に設けること、及びこの半円の曲率半径Ｒが非常に大きいため基板面積が増大し、結果的に、光通信網の高密度化を達成することができないという問題があった。さらに、（３）の方法は、基板端面の切断位置を高精度に制御する必要があることから、生産性が低下して歩留まりが悪化するという問題があった。   However, since the method (1) requires a space for installing an optical fiber, there is a problem in that it is not possible to sufficiently achieve a high-density optical communication network by parallel connection. Also in the method (2), a semicircular optical waveguide is separately provided and the radius of curvature R of the semicircle is very large, so that the substrate area is increased. There was a problem that densification could not be achieved. Furthermore, since the method (3) needs to control the cutting position of the substrate end face with high accuracy, there is a problem that the productivity is lowered and the yield is deteriorated.

これらの問題を解決するため、本出願人は、以下の特許文献１において、同一基板上に複数の光導波路を並列した場合に、各々の光導波路を図７に示すようにＧＲＩＮレンズを用いて接続し、集積型光導波路素子を形成することを提案した。
なお、ＧＲＩＮレンズとは、グレーテッドインデックスレンズの略称であり、本技術分野において一般的に用いられている名称である。
図７に示す集積型光導波路素子は、電気光学効果を有する材料からなる基板５１上にマッハツェンダ型の光導波路５２及び５３を具える。光ビームは、矢印に従って光導波路５２に入射し、信号電極５４−１及び接地電極５５間で外部電源６０−１から電気信号を印加されることによって強度変調された後、基板５１の端面５２Ａに至り、ＧＲＩＮレンズ５６を曲線５８に沿って反射膜５７に至る。
次いで、反射膜５７で反射された後、曲線５９に沿って再び端面５２Ａに戻り、光導波路５３の入射口に入射される。
その後、該入射光は、信号電極５４−２及び接地電極５５間で外部電源６０−２によって、さらに強度変調を受けた後、基板５１の端面５１Ｂから矢印に沿って出射する。
特開２００１−３５００４６号 In order to solve these problems, in the following Patent Document 1, the present applicant uses a GRIN lens as shown in FIG. 7 when a plurality of optical waveguides are arranged in parallel on the same substrate. It was proposed to connect and form an integrated optical waveguide device.
The GRIN lens is an abbreviation for a graded index lens and is a name generally used in this technical field.
The integrated optical waveguide device shown in FIG. 7 includes Mach-Zehnder optical waveguides 52 and 53 on a substrate 51 made of a material having an electro-optic effect. The light beam is incident on the optical waveguide 52 according to the arrow, and is modulated in intensity by applying an electric signal from the external power source 60-1 between the signal electrode 54-1 and the ground electrode 55, and then is applied to the end surface 52A of the substrate 51. The GRIN lens 56 reaches the reflection film 57 along the curve 58.
Next, after being reflected by the reflective film 57, the light returns again to the end face 52 </ b> A along the curve 59 and enters the entrance of the optical waveguide 53.
Thereafter, the incident light is further subjected to intensity modulation between the signal electrode 54-2 and the ground electrode 55 by the external power source 60-2, and then emitted from the end face 51B of the substrate 51 along the arrow.
JP 2001-350046 A

これら集積型光導波路素子は、ＬＮなどの基板上に光導波路が形成されており、一般的に、ＳｉＯ２などの誘電体によるバッファ層が光導波路を含む基板全体を被覆するように構成されている。
例えば、ＬＮ基板にＴｉを拡散して形成した光導波路の屈折率分布は、図１に示すように、光導波路の延伸方向に垂直な断面（ｃ）で見ると、基板表面上（ｙ方向）ではガウス型分布（ａ）を形成し、基板の深さ方向（ｘ方向、図１（ｂ））では、基板表面以下はガウス型分布であるが、基板表面より上方は、バッファ層による一定の屈折率となる。ここでは、便宜上、光導波路の幅は２ｄｙとし、最大屈折率ｎＷＧと基板の屈折率ｎＬＮとの差が１／ｅとなる領域幅とする。基板の深さ方向は、同様の考え方でｄｘで表す。 In these integrated optical waveguide elements, an optical waveguide is formed on a substrate such as LN, and generally, a buffer layer made of a dielectric such as SiO 2 is configured to cover the entire substrate including the optical waveguide. Yes.
For example, as shown in FIG. 1, the refractive index distribution of an optical waveguide formed by diffusing Ti in an LN substrate is on the substrate surface (y direction) when viewed in a section (c) perpendicular to the extending direction of the optical waveguide. In FIG. 1B, a Gaussian distribution (a) is formed, and in the depth direction of the substrate (x direction, FIG. 1B), the area below the substrate surface is a Gaussian distribution. Refractive index. For convenience, the width of the optical waveguide and 2d y, the difference between the refractive index n LN of maximum refractive index n WG and the substrate is a region width becomes 1 / e. The depth direction of the substrate is represented by d x in the same way.

図１（ａ）（ｂ）のような屈折率分布を有する光導波路中を、図１（ｃ）の紙面に垂直な方向に、進行する光のモードパターン（強度分布）は、図１（ｄ）に示すように、基板表面に平行なｙ方向では、ガウス型分布（ｆ）であるが、基板の深さ方向（ｘ方向）では、非対称な強度分布（ｅ）となっている。
このため、図２に示すように、ＧＲＩＮレンズ１０を利用して、特定の光導波路から出射した光１を折り返し、２に示すようように他の光導波路の入射口に入射させた場合、光１の非対称な強度分布が、光２にように上下左右が反転した強度分布となる。なお、図２中の光１から光２に繋がる各線は、光の進行経路を示す。
図３は、ＧＲＩＮレンズ１０を横方向から眺めた図であり、上向き矢印１’で示す光像から出た光が、ＧＲＩＮレンズ１０中を進行し、反射膜１１で反射した後、逆方向に戻って、下向き矢印２’の光像を形成する。このように、ＧＲＩＮレンズでは、光像の上下方向が反転する。 A mode pattern (intensity distribution) of light traveling in an optical waveguide having a refractive index distribution as shown in FIGS. 1A and 1B in a direction perpendicular to the paper surface of FIG. 1C is shown in FIG. ), The y direction parallel to the substrate surface has a Gaussian distribution (f), but the depth direction (x direction) of the substrate has an asymmetric intensity distribution (e).
Therefore, as shown in FIG. 2, when the GRIN lens 10 is used and the light 1 emitted from a specific optical waveguide is folded back and incident on the entrance of another optical waveguide as shown in FIG. The asymmetric intensity distribution of 1 is an intensity distribution in which the top, bottom, left and right are inverted as in the light 2. In addition, each line connected from the light 1 to the light 2 in FIG. 2 indicates the traveling path of the light.
FIG. 3 is a view of the GRIN lens 10 viewed from the lateral direction. Light emitted from the optical image indicated by the upward arrow 1 ′ travels through the GRIN lens 10 and is reflected by the reflective film 11, and then in the reverse direction. Returning, the light image of the downward arrow 2 ′ is formed. Thus, in the GRIN lens, the vertical direction of the optical image is reversed.

図２又は図３のように、ＧＲＩＮレンズ１０を利用して光ビームを折り返した場合、基板から出射する光が非対称な強度分布を有すると、光の強度分布の上下左右の反転した光が該基板の入射口に入射される。このため、出射口から出射した光が別の光導波路の入射口へ折り返して結合される結合効率は、対称な強度分布を有する光ビームであれば、０．９０以上（結合損０．５ｄＢ以下）であるのに対し、非対称の強度分布を有する光ビームでは、ＬＮ基板の場合、０．５程度（結合損３ｄＢ程度）に低下する。   As shown in FIG. 2 or 3, when the light beam is folded using the GRIN lens 10, if the light emitted from the substrate has an asymmetric intensity distribution, the light whose intensity distribution is inverted vertically and horizontally The light enters the entrance of the substrate. For this reason, the coupling efficiency in which the light emitted from the exit port is folded and coupled to the entrance port of another optical waveguide is 0.90 or more (coupling loss 0.5 dB or less) for a light beam having a symmetric intensity distribution. In contrast, in the case of an LN substrate, a light beam having an asymmetric intensity distribution is reduced to about 0.5 (coupling loss is about 3 dB).

本出願人は、上述した問題を解決するため、以下の特許文献２において、電気光学効果を有する材料からなる基板と、該基板上に形成された複数の光導波路とを備え、該基板の少なくとも一端面に前記複数の光導波路のいずれかの光導波路の出射口と入射口とが形成されており、該出射口から出射した光が該入射口に入射するように構成されたＧＲＩＮレンズを前記一端面に近接して設けた集積型光導波路素子において、該ＧＲＩＮレンズは、ＧＲＩＮレンズの光軸方向に略半分に分割され、該分割面に反射面が形成されていることを特徴とする集積型光導波路素子を提案した。
特願２００２−７７４１０号（出願日：平成１４年３月２０日） In order to solve the above-described problem, the applicant of the present invention includes a substrate made of a material having an electro-optic effect and a plurality of optical waveguides formed on the substrate in Patent Document 2 below. An GRIN lens configured such that an exit port and an entrance port of any one of the plurality of optical waveguides are formed on one end surface, and light emitted from the exit port is incident on the entrance port In the integrated optical waveguide device provided close to one end surface, the GRIN lens is divided into approximately half in the optical axis direction of the GRIN lens, and a reflecting surface is formed on the divided surface. Type optical waveguide device was proposed.
Japanese Patent Application No. 2002-77410 (Application date: March 20, 2002)

具体的には、図４に示すように、ＧＲＩＮレンズ２０の光軸方向であると共に、放物線状の屈折率分布を有するＧＲＩＮレンズの中心を包含し、出射口と入射口を結ぶ直線を含む平面（略基板表面）に平行な平面により、ＧＲＩＮレンズを分割する。さらに、該分割面と、通常のＧＲＩＮレンズの端面（基板と反対側の側面）とに反射膜２２，２１を施すことにより、該分割面を対称に上下方向の光像の反転を防止することが可能となる。
しかも望ましくは、図４に示すように、光ビームの出射位置（光ビームの中心軸に相当し、矢印１”又は矢印２”の中心）を該ＧＲＩＮレンズの光軸（図中の一点鎖線）より、若干上方にずらすことにより、例えば、上方矢印１”で出射した光ビームを、上方矢印２”で示すような、ＧＲＩＮレンズの反転を補正した光ビームとして、入射口に入射することが可能となる。 Specifically, as shown in FIG. 4, the plane includes the center of the GRIN lens having a parabolic refractive index distribution and including a straight line connecting the exit port and the entrance port, in the optical axis direction of the GRIN lens 20. The GRIN lens is divided by a plane parallel to (substantially the substrate surface). Further, by applying reflection films 22 and 21 to the dividing surface and the end surface (side surface opposite to the substrate) of a normal GRIN lens, the inversion of the optical image in the vertical direction is prevented symmetrically with the dividing surface. Is possible.
In addition, preferably, as shown in FIG. 4, the emission position of the light beam (corresponding to the central axis of the light beam, the center of the arrow 1 ″ or the arrow 2 ″) is the optical axis of the GRIN lens (the one-dot chain line in the figure). By slightly shifting upward, for example, the light beam emitted by the upward arrow 1 ″ can be incident on the entrance as a light beam corrected for inversion of the GRIN lens as indicated by the upward arrow 2 ″. It becomes.

本発明が解決しようとする課題は、上述したような非対称な強度分布を有する光ビームが発生する集積型光導波路素子であっても、集積化及びコンパクト化を維持・向上しつつ、伝搬損失のより低い集積型光導波路素子を提供することである。   The problem to be solved by the present invention is that, even in an integrated optical waveguide device that generates a light beam having an asymmetric intensity distribution as described above, it is possible to reduce propagation loss while maintaining and improving integration and compactness. It is to provide a lower integrated optical waveguide device.

上記課題を解決するために、請求項１に係る発明は、電気光学効果を有する材料からなる基板と、該基板の表面に形成された光導波路と、該基板の裏面に形成された光導波路とを備え、該基板の少なくとも一端面において、前記異なる面に形成された光導波路が出射口と入射口とを有し、該出射口から出射した光が該入射口に入射するように、ＧＲＩＮレンズを前記一端面に近接して配置したことを特徴とする集積型光導波路素子である。   In order to solve the above-mentioned problem, an invention according to claim 1 includes a substrate made of a material having an electro-optic effect, an optical waveguide formed on the surface of the substrate, and an optical waveguide formed on the back surface of the substrate. And a GRIN lens so that the optical waveguide formed on the different surface has an exit and an entrance on at least one end surface of the substrate, and light emitted from the exit enters the entrance Is an integrated optical waveguide device characterized by being disposed close to the one end face.

また、請求項２に係る発明は、電気光学効果を有する材料からなる複数の基板と、特定の基板の表面に形成された光導波路と、他の基板の裏面に形成された光導波路とを備え、該複数の基板を積層し、該積層した基板の少なくとも一端面において、前記異なる面に形成された光導波路が出射口と入射口とを有し、該出射口から出射した光が該入射口に入射するように、ＧＲＩＮレンズを前記一端面に近接して配置したことを特徴とする集積型光導波路素子である。   The invention according to claim 2 includes a plurality of substrates made of a material having an electro-optic effect, an optical waveguide formed on the surface of a specific substrate, and an optical waveguide formed on the back surface of another substrate. The plurality of substrates are stacked, and at least one end surface of the stacked substrates, the optical waveguide formed on the different surface has an exit port and an entrance port, and light emitted from the exit port is the entrance port. The integrated optical waveguide device is characterized in that a GRIN lens is disposed close to the one end surface so as to be incident on the one end.

また、請求項３に係る発明では、請求項１又は２に記載された集積型光導波路素子において、該ＧＲＩＮレンズの光軸中心が、該光導波路の出射口と入射口との中間点を通るように配置されることを特徴とする。   In the invention according to claim 3, in the integrated optical waveguide device according to claim 1 or 2, the center of the optical axis of the GRIN lens passes through an intermediate point between the exit and entrance of the optical waveguide. It is arranged so that it may be arranged.

また、請求項４に係る発明では、請求項１乃至３のいずれかに記載された集積型光導波路素子において、該基板の一端面と該ＧＲＩＮレンズの基板に対向する面の少なくとも一方の面が、該光導波路から出射する光又は該光導波路へ入射する光の進行方向に対してスネルの法則を満たす傾斜面を有していることを特徴とする。   In the invention according to claim 4, in the integrated optical waveguide element according to any one of claims 1 to 3, at least one of the one end surface of the substrate and the surface of the GRIN lens facing the substrate is provided. And an inclined surface satisfying Snell's law with respect to the traveling direction of the light emitted from the optical waveguide or the light incident on the optical waveguide.

また、請求項５に係る発明では、請求項１乃至４のいずれかに記載された集積型光導波路素子において、該基板に接合した補強部材を設け、該ＧＲＩＮレンズは、該基板の一端面と該補強部材とに接着固定されていることを特徴とする。   According to a fifth aspect of the present invention, in the integrated optical waveguide device according to any one of the first to fourth aspects, a reinforcing member bonded to the substrate is provided, and the GRIN lens is connected to one end surface of the substrate. The reinforcing member is bonded and fixed to the reinforcing member.

請求項１に係る発明によれば、基板の表面に形成された光導波路と、該基板の裏面に形成された光導波路とでは、基板の表面に垂直な方向の非対称な屈折率分布が、逆の関係となっており、ＧＲＩＮレンズによる光ビームの強度分布の上下左右を反転させる性質を利用することにより、例えば、基板の表面の光導波路から出射した光ビームを、基板の裏面に形成された光導波路に入射させることにより、光損失を抑制した光学的結合を実現することが可能となる。   According to the first aspect of the present invention, the asymmetric refractive index distribution in the direction perpendicular to the surface of the substrate is reversed between the optical waveguide formed on the surface of the substrate and the optical waveguide formed on the back surface of the substrate. For example, the light beam emitted from the optical waveguide on the surface of the substrate is formed on the back surface of the substrate by utilizing the property of reversing the vertical and horizontal directions of the intensity distribution of the light beam by the GRIN lens. By making the light incident on the optical waveguide, it is possible to realize optical coupling with suppressed light loss.

請求項２に係る発明によれば、特定の基板の表面に形成された光導波路と、他の基板の裏面に形成された光導波路とでは、基板の表面に垂直な方向の非対称な屈折率分布が、逆の関係となっており、ＧＲＩＮレンズによる光ビームの強度分布の上下左右を反転させる性質を利用することにより、例えば、特定の基板の表面の光導波路から出射した光ビームを、他の基板の裏面に形成された光導波路に入射させることにより、光損失を抑制した光学的結合を実現することが可能となる。
ここで、「他の基板の裏面に形成された光導波路」とは、単に、他の基板の裏面に光導波路を形成するものに限らず、他の基板の表面に光導波路を形成し、該光導波路を形成した面を、該特定の基板の表面に対して反対の面となるように配置するものも、含むものである。 According to the second aspect of the present invention, the optical waveguide formed on the surface of the specific substrate and the optical waveguide formed on the back surface of the other substrate have an asymmetric refractive index distribution in a direction perpendicular to the surface of the substrate. However, by utilizing the property of reversing the intensity distribution of the light beam by the GRIN lens in the reverse relationship, for example, the light beam emitted from the optical waveguide on the surface of a specific substrate By making it enter into the optical waveguide formed in the back surface of the board | substrate, it becomes possible to implement | achieve the optical coupling which suppressed the optical loss.
Here, “the optical waveguide formed on the back surface of the other substrate” is not limited to the one in which the optical waveguide is formed on the back surface of the other substrate, and the optical waveguide is formed on the surface of the other substrate. This includes the one in which the surface on which the optical waveguide is formed is arranged to be opposite to the surface of the specific substrate.

請求項３に係る発明によれば、ＧＲＩＮレンズの光軸中心が、該光導波路の出射口と入射口との中間点を通るように配置されているため、光導波路の出射口から出射した、非対称な強度分布を有する光ビームを、光ビームの上下左右方向を反転させ、正確に他の光導波路の入射口に入射させることが可能となるため、光導波路の結合効率の低下をより一層防止することが可能となる。   According to the invention of claim 3, since the center of the optical axis of the GRIN lens is disposed so as to pass through the intermediate point between the exit and entrance of the optical waveguide, the GRIN lens exits from the exit of the optical waveguide. A light beam having an asymmetric intensity distribution can be reversed in the vertical and horizontal directions of the light beam and accurately incident on the entrance of another optical waveguide, thus further reducing the coupling efficiency of the optical waveguide. It becomes possible to do.

請求項４に係る発明よれば、光の進行方向に対して、基板端面やＧＲＩＮレンズの端面を傾斜させているため、進行方向に逆行する反射光の発生を防止でき、しかも、スネルの法則を満たす角度で基板とＧＲＩＮレンズが接合されているため、光の進行方向に対して常に適正な方向に光導波路やＧＲＩＮレンズを配置でき、光導波路などからの漏光を抑制できる。また、仮に、ＧＲＩＮレンズを複数設けた場合でも、光波の伝播強度の減衰を防止でき、より高密度に集積した光導波路素子を得ることが可能となる。   According to the invention of claim 4, since the substrate end face and the end face of the GRIN lens are inclined with respect to the light traveling direction, it is possible to prevent the generation of reflected light that goes backward in the traveling direction, and Snell's law is Since the substrate and the GRIN lens are bonded at a satisfying angle, the optical waveguide and the GRIN lens can always be arranged in an appropriate direction with respect to the light traveling direction, and light leakage from the optical waveguide or the like can be suppressed. Further, even if a plurality of GRIN lenses are provided, it is possible to prevent attenuation of light wave propagation intensity, and to obtain an optical waveguide element integrated at a higher density.

請求項５に係る発明によれば、補強部材によりＧＲＩＮレンズの接着固定する面積を十分に確保でき、ＧＲＩＮレンズを基板側により強固に固定することが可能となる。また、補強部材において、少なくとも基板上の光導波路と接する領域を特定の屈折率を有する誘電体（例えば、基板と補強部材とが同じ屈折率となる誘電体や、基板と補強部材の屈折率の大小関係が、基板とバッファ層との屈折率の大小関係に対して逆となるように設定された誘電体で構成する。）で形成することにより、光導波路の出射口から放出する光ビームの強度分布を略対称となるように、調整することも可能である。   According to the fifth aspect of the present invention, a sufficient area for bonding and fixing the GRIN lens can be secured by the reinforcing member, and the GRIN lens can be more firmly fixed to the substrate side. Further, in the reinforcing member, at least a region in contact with the optical waveguide on the substrate is a dielectric having a specific refractive index (for example, a dielectric having the same refractive index between the substrate and the reinforcing member, or a refractive index of the substrate and the reinforcing member). The size of the light beam emitted from the exit of the optical waveguide is made up of a dielectric that is set so as to be opposite to that of the refractive index of the substrate and the buffer layer. It is also possible to adjust the intensity distribution so as to be substantially symmetric.

以下、本発明を好適例を用いて詳細に説明する。
集積型光導波路素子を構成する基板としては、電気光学効果を有する材料、例えば、ニオブ酸リチウム、タンタル酸リチウム、ＰＬＺＴ（ジルコン酸チタン酸鉛ランタン）、及び石英系の材料から構成され、具体的には、これら単結晶材料の、Ｘカット板、Ｙカット板、及びＺカット板から構成され、特に、光導波路デバイスとして構成されやすく、かつ異方性が大きいという理由から、ニオブ酸リチウム（ＬＮ）を用いることが好ましい。
基板上の光導波路は、熱拡散法及びプロトン交換法などで形成することができ、以下の説明では、ＬＮを基板とし、これにＴｉを熱拡散させて光導波路を形成したものを中心に説明する。 Hereinafter, the present invention will be described in detail using preferred examples.
The substrate constituting the integrated optical waveguide element is composed of a material having an electro-optic effect, for example, lithium niobate, lithium tantalate, PLZT (lead lanthanum zirconate titanate), and a quartz-based material. Are composed of X-cut plates, Y-cut plates, and Z-cut plates of these single crystal materials, and in particular, lithium niobate (LN) because they are easily configured as optical waveguide devices and have high anisotropy. ) Is preferably used.
The optical waveguide on the substrate can be formed by a thermal diffusion method, a proton exchange method, or the like. In the following description, an explanation will be made focusing on the case where LN is used as a substrate and Ti is thermally diffused to form an optical waveguide. To do.

ＧＲＩＮレンズにはＳｅｌｆｏｃ Ｌｅｎｓなど公知のものを用いることができる。また、ＧＲＩＮレンズの光軸方向の長さは、ＧＲＩＮレンズの端面で折り返した光ビームが、基板側の出射口及び入射口において、平行光束となる長さに設定する必要がある。実際には、ＧＲＩＮレンズを基板に固定するための接着剤などの厚さをも考慮する必要がある。   A known lens such as Selfoc Lens can be used for the GRIN lens. Further, the length of the GRIN lens in the optical axis direction needs to be set to such a length that the light beam turned back at the end surface of the GRIN lens becomes a parallel light flux at the exit and entrance of the substrate. Actually, it is necessary to consider the thickness of an adhesive or the like for fixing the GRIN lens to the substrate.

ＧＲＩＮレンズは接着剤によって基板に接着固定されている。これによって両者の位置関係を強く固定することができ、基板とＧＲＩＮレンズとの位置ズレや脱落を防止し、長期に渡り安定した積型光導波路素子を提供することが可能となる。
接着剤としては、紫外線硬化型接着剤（ＵＶ接着剤）など、光の透過性、接着性、取扱いの容易性などを考慮して、公知の接着剤を選択することができる。
特に、基板とＧＲＩＮレンズとの接合を強固なものとするため、基板に補助部材を接着し、さらに、基板と補助部材とに対し、ＧＲＩＮレンズを接合するよう構成することが望ましい。 The GRIN lens is bonded and fixed to the substrate with an adhesive. As a result, the positional relationship between the two can be strongly fixed, and it is possible to provide a product type optical waveguide element that is stable for a long period of time by preventing positional displacement and dropping of the substrate and the GRIN lens.
As the adhesive, a known adhesive can be selected in consideration of light transmittance, adhesiveness, ease of handling, etc., such as an ultraviolet curable adhesive (UV adhesive).
In particular, in order to strengthen the bonding between the substrate and the GRIN lens, it is desirable that the auxiliary member is bonded to the substrate and further the GRIN lens is bonded to the substrate and the auxiliary member.

ＧＲＩＮレンズに設けられる反射膜は、レンズ内を通過する光ビームに対して高い反射率を有するものであれば、その材料及び構成については限定されない。Ｃｒ、Ａｕ、Ａｌなどの金属からなる金属膜、又はＳｉＯ２及びＴｉＯ２などの誘電体を交互に積層した誘電体多層膜などを好ましくは用いることができる。 The reflective film provided on the GRIN lens is not limited in its material and configuration as long as it has a high reflectance with respect to the light beam passing through the lens. A metal film made of a metal such as Cr, Au, Al, or a dielectric multilayer film in which dielectrics such as SiO 2 and TiO 2 are alternately stacked can be preferably used.

次に、本発明の特徴である、上下方向に非対称な強度分布を有する光ビームが、光導波路の出射口から出射する場合の問題への対応策について説明する。
図５（ａ）は、本発明に係る集積型光導波路素子の斜視図であり、図５（ｂ）は、側面図であり、図５（ｃ）は、基板とＧＲＩＮレンズとの接合部の状態を示す図である。
基板３０には、光導波路３１，３２が形成されており、特に、光導波路３１は基板の表面に、光導波路３２は、基板の裏面に各々形成されている。
基板の一端面には、光導波路３１による出射口３３と、光導波路３２による入射口３４が形成され、出射口３３から出射した光ビーム３５は、ＧＲＩＮレンズ１０により、反射面１１で折り返され、光ビームの強度分布の上下左右方向が反転させられ、入射口３４に入射する。 Next, a countermeasure for the problem in the case where a light beam having an asymmetric intensity distribution in the vertical direction, which is a feature of the present invention, is emitted from the exit of the optical waveguide will be described.
FIG. 5A is a perspective view of the integrated optical waveguide device according to the present invention, FIG. 5B is a side view, and FIG. 5C is a view of a joint portion between the substrate and the GRIN lens. It is a figure which shows a state.
Optical waveguides 31 and 32 are formed on the substrate 30. In particular, the optical waveguide 31 is formed on the surface of the substrate, and the optical waveguide 32 is formed on the back surface of the substrate.
An exit port 33 by the optical waveguide 31 and an entrance port 34 by the optical waveguide 32 are formed on one end surface of the substrate, and the light beam 35 emitted from the exit port 33 is folded back by the reflection surface 11 by the GRIN lens 10. The vertical and horizontal directions of the intensity distribution of the light beam are reversed and enter the entrance 34.

基板上に形成される光導波路は、図１が示すように、基板の表面に垂直な方向に向かって非対称な屈折率分布をしており、基板の表面に形成した光導波路と、基板の裏面に形成した光導波路とでは、互いに上下方向が逆向きの屈折率分布を構成する。
このため、ＧＲＩＮレンズ１０により、光ビーム３５の上下方向が反転することにより、光導波路３２の入射口３４における屈折率分布と、光ビーム３５の強度分布が、適合することとなり、光損失を抑えた光学的結合を可能とすることができる。
特に、ＧＲＩＮレンズの光軸中心を、光導波路の出射口と入射口との中間点を通るように配置されている場合には、光導波路間の結合効率を最も高めることが可能となる。 As shown in FIG. 1, the optical waveguide formed on the substrate has an asymmetric refractive index distribution in a direction perpendicular to the surface of the substrate, and the optical waveguide formed on the surface of the substrate and the back surface of the substrate. In the optical waveguide formed in the above, a refractive index distribution in which the vertical direction is opposite to each other is formed.
Therefore, the vertical direction of the light beam 35 is inverted by the GRIN lens 10, so that the refractive index distribution at the entrance 34 of the optical waveguide 32 and the intensity distribution of the light beam 35 are matched, thereby suppressing light loss. Optical coupling can be made possible.
In particular, when the center of the optical axis of the GRIN lens is disposed so as to pass through an intermediate point between the exit and entrance of the optical waveguide, the coupling efficiency between the optical waveguides can be maximized.

また、基板３０には、補助部材４０が接合されており、基板３０と補助部材４０とに対してＧＲＩＮレンズ１０を接合することで、ＧＲＩＮレンズと基板とのより強固な接合を可能としている。
補助部材４０には、ＧＲＩＮレンズとの接合強度を高く保つ目的以外に、例えば、基板と補強部材とが同じ屈折率となる誘電体や、基板と補強部材の屈折率の大小関係が、基板とバッファ層との屈折率の大小関係に対して逆となるように設定された誘電体で構成する補助部材を用いることにより、出射口３３から出射する光ビームの強度分布を調整する働きもある。 In addition, the auxiliary member 40 is bonded to the substrate 30, and the GRIN lens 10 is bonded to the substrate 30 and the auxiliary member 40, thereby enabling stronger bonding between the GRIN lens and the substrate.
In addition to the purpose of keeping the bonding strength with the GRIN lens high, the auxiliary member 40 has, for example, a dielectric having the same refractive index as that of the substrate and the reinforcing member, and the magnitude relationship between the refractive indexes of the substrate and the reinforcing member. By using an auxiliary member made of a dielectric material set so as to be opposite to the magnitude relationship of the refractive index with the buffer layer, there is also a function of adjusting the intensity distribution of the light beam emitted from the emission port 33.

さらに、図５（ｂ）に示すように、基板の一端面とＧＲＩＮレンズの基板に対向する面の少なくとも一方の面が傾斜面を有するように、基板とＧＲＩＮレンズが接合されている。この傾斜面の角度は、光ビームの出射口３３及び入射口３４において、光導波路の屈折率とＧＲＩＮレンズの屈折率との差により、光ビームの屈折角がスネルの法則を満たすよう設定されている。これにより、出射口３３や入射口３４における光損失を低減させることが可能となる。   Further, as shown in FIG. 5B, the substrate and the GRIN lens are bonded so that at least one of the one end surface of the substrate and the surface of the GRIN lens facing the substrate has an inclined surface. The angle of the inclined surface is set so that the refraction angle of the light beam satisfies Snell's law at the exit 33 and the entrance 34 of the light beam due to the difference between the refractive index of the optical waveguide and the refractive index of the GRIN lens. Yes. Thereby, it is possible to reduce light loss at the exit port 33 and the entrance port 34.

本発明に係る集積型光導波路素子の他の実施例を図６に示す。
図６（ａ）は、基板３０の表面に光導波路（出射口３３，３６）を形成し、該基板の裏面に他の光導波路（入射口３４，３７）を形成したものである。
光導波路の出射口３３から出射した光ビームは、ＧＲＩＮレンズ４０により入射口３４に導かれ、また、出射口２６から出射した光ビームは同様に、入射口３７に入射する。
この際に、出射口３３と入射口３４、及び出射口３６と入射口３７の中間点にＧＲＩＮレンズの光軸中心（図６（ａ）のＧＲＩＮレンズ４０を示す点線の円の中心）が通るように配置することが好ましい。 Another embodiment of the integrated optical waveguide device according to the present invention is shown in FIG.
In FIG. 6A, an optical waveguide (output ports 33 and 36) is formed on the surface of the substrate 30, and other optical waveguides (incident ports 34 and 37) are formed on the back surface of the substrate.
The light beam emitted from the exit 33 of the optical waveguide is guided to the entrance 34 by the GRIN lens 40, and the light beam emitted from the exit 26 is similarly incident on the entrance 37.
At this time, the center of the optical axis of the GRIN lens (the center of the dotted circle indicating the GRIN lens 40 in FIG. 6A) passes through the intermediate point between the exit port 33 and the entrance port 34 and between the exit port 36 and the entrance port 37. It is preferable to arrange in such a manner.

図６（ｂ）は、異なる基板上に形成される光導波路を、光学的に結合する例を示すものである。
基板３０の表面に出射口３３を有する光導波路を形成し、基板３０’の裏面（基板の表面に形成する場合には、該表面を裏返した面）に入射口３４’を有する光導波路を形成し、２つの基板３０，３０’を互いに接合したものである。２つの基板は、図６（ｂ）のように直接接合しても良いが、必要に応じて、２つの基板間に光導波路を有する他の基板や、スペーサーなどを挟む状態で、両者を接合することも可能である。
出射口３３から出射した光ビーム３５’は、ＧＲＩＮレンズ４０により、入射口３４’に導かれる。 FIG. 6B shows an example in which optical waveguides formed on different substrates are optically coupled.
An optical waveguide having an exit port 33 is formed on the surface of the substrate 30, and an optical waveguide having an entrance port 34 'is formed on the back surface of the substrate 30' (in the case of being formed on the surface of the substrate, the surface is turned upside down). The two substrates 30, 30 ′ are joined to each other. The two substrates may be directly joined as shown in FIG. 6B, but if necessary, the two substrates are joined together with another substrate having an optical waveguide or a spacer interposed between the two substrates. It is also possible to do.
The light beam 35 ′ emitted from the exit port 33 is guided to the entrance port 34 ′ by the GRIN lens 40.

図６（ｃ）は、光導波路が形成された異なる基板を、光導波路が形成された面を互いに対向するように配置した場合を示す。
基板３０の表面に出射口３３を有する光導波路を形成し、基板３０’’の裏面に入射口３４’’を有する光導波路を形成し、２つの基板３０，３０’’を互いに接合したものである。２つの基板は、図６（Ｃ）のように直接接合しても良いが、必要に応じて、２つの基板間に光導波路を有する他の基板や、スペーサーなどを挟む状態で、両者を接合することも可能である。
出射口３３から出射した光ビーム３５’’は、ＧＲＩＮレンズ４０により、入射口３４’’に導かれる。 FIG. 6C shows a case where different substrates on which optical waveguides are formed are arranged so that the surfaces on which the optical waveguides are formed face each other.
An optical waveguide having an exit port 33 is formed on the front surface of the substrate 30, an optical waveguide having an entrance port 34 '' is formed on the back surface of the substrate 30 '', and the two substrates 30, 30 '' are joined to each other. is there. The two substrates may be directly joined as shown in FIG. 6C. However, if necessary, the two substrates are joined together with another substrate having an optical waveguide or a spacer interposed between the two substrates. It is also possible to do.
The light beam 35 ″ emitted from the exit port 33 is guided to the entrance port 34 ″ by the GRIN lens 40.

以上説明したように、本発明によれば、基板上の光導波路の屈折率分布の非対称性などに起因する、非対称な強度分布を有する光ビームが発生する場合であっても、ＧＲＩＮレンズを用いて集積型光導波路素子を構成でき、しかも、集積化及びコンパクト化を維持・向上しつつ、光ビームの伝搬損失の低減を達成することが可能となる。   As described above, according to the present invention, even when a light beam having an asymmetric intensity distribution due to the asymmetry of the refractive index distribution of the optical waveguide on the substrate is generated, the GRIN lens is used. Thus, it is possible to configure an integrated optical waveguide element, and to achieve a reduction in propagation loss of the light beam while maintaining and improving integration and compactness.

基板上の光導波路に係る屈折率分布と該光導波路を通過する光の強度分布を示す図である。It is a figure which shows the refractive index distribution which concerns on the optical waveguide on a board | substrate, and the intensity distribution of the light which passes this optical waveguide. 非対称な強度分布を有する光ビームに係るＧＲＩＮレンズ内の進行状態を説明する図である。It is a figure explaining the advancing state in the GRIN lens which concerns on the light beam which has asymmetric intensity distribution. ＧＲＩＮレンズによる光像の反転現象を説明する図である。It is a figure explaining the inversion phenomenon of the optical image by a GRIN lens. 分割したＧＲＩＮレンズによる光像の状態を示す図である。It is a figure which shows the state of the optical image by the divided | segmented GRIN lens. 本発明に係る集積型光導波路素子を示し、特に、（ａ）は該素子の斜視図であり、（ｂ）は側面図であり、（ｃ）は基板とＧＲＩＮレンズとの接合部の状態を示す図である。1 shows an integrated optical waveguide device according to the present invention, in particular, (a) is a perspective view of the device, (b) is a side view, and (c) shows a state of a joint portion between a substrate and a GRIN lens. FIG. 本発明に係る集積型光導波路素子の他の実施例を示す図である。It is a figure which shows the other Example of the integrated optical waveguide element which concerns on this invention. 集積型光導波路素子の概略図である。It is the schematic of an integrated optical waveguide element.

符号の説明Explanation of symbols

１ 基板からの出射光
２ 基板への入射光
１０ ＧＲＩＮレンズ
１１ 反射膜
２０ 分割したＧＲＩＮレンズ
２１，２２ 反射膜
３０ 基板
３１，３２ 光導波路
３３ 出射口
３４ 入射口
４０ 補強部材
DESCRIPTION OF SYMBOLS 1 Light emitted from substrate 2 Light incident on substrate 10 GRIN lens 11 Reflective film 20 Divided GRIN lenses 21 and 22 Reflective film 30 Substrate 31 and 32 Optical waveguide 33 Output port 34 Entrance port 40 Reinforcing member

Claims (5)

電気光学効果を有する材料からなる基板と、該基板の表面に形成された光導波路と、該基板の裏面に形成された光導波路とを備え、該基板の少なくとも一端面において、前記異なる面に形成された光導波路が出射口と入射口とを有し、該出射口から出射した光が該入射口に入射するように、ＧＲＩＮレンズを前記一端面に近接して配置したことを特徴とする集積型光導波路素子。   A substrate made of a material having an electro-optic effect, an optical waveguide formed on the surface of the substrate, and an optical waveguide formed on the back surface of the substrate, and formed on the different surface at least on one end surface of the substrate The integrated optical waveguide has an exit port and an entrance port, and a GRIN lens is disposed close to the one end surface so that light emitted from the exit port enters the entrance port. Type optical waveguide element. 電気光学効果を有する材料からなる複数の基板と、特定の基板の表面に形成された光導波路と、他の基板の裏面に形成された光導波路とを備え、該複数の基板を積層し、該積層した基板の少なくとも一端面において、前記異なる面に形成された光導波路が出射口と入射口とを有し、該出射口から出射した光が該入射口に入射するように、ＧＲＩＮレンズを前記一端面に近接して配置したことを特徴とする集積型光導波路素子。   A plurality of substrates made of a material having an electro-optic effect; an optical waveguide formed on the surface of a specific substrate; and an optical waveguide formed on the back surface of another substrate; and laminating the plurality of substrates, In at least one end surface of the laminated substrate, the optical waveguide formed on the different surface has an exit and an entrance, and the GRIN lens is disposed so that light emitted from the exit enters the entrance. An integrated optical waveguide device, wherein the integrated optical waveguide device is disposed close to one end face. 請求項１又は２に記載された集積型光導波路素子において、該ＧＲＩＮレンズの光軸中心が、該光導波路の出射口と入射口との中間点を通るように配置されることを特徴とする集積型光導波路素子。   3. The integrated optical waveguide device according to claim 1, wherein the center of the optical axis of the GRIN lens is disposed so as to pass through an intermediate point between the exit and entrance of the optical waveguide. Integrated optical waveguide device. 請求項１乃至３のいずれかに記載された集積型光導波路素子において、該基板の一端面と該ＧＲＩＮレンズの基板に対向する面の少なくとも一方の面が、該光導波路から出射する光又は該光導波路へ入射する光の進行方向に対してスネルの法則を満たす傾斜面を有していることを特徴とする集積型光導波路素子。   4. The integrated optical waveguide device according to claim 1, wherein at least one of the one end surface of the substrate and the surface of the GRIN lens facing the substrate is emitted from the optical waveguide, or the An integrated optical waveguide device having an inclined surface satisfying Snell's law with respect to a traveling direction of light incident on the optical waveguide. 請求項１乃至４のいずれかに記載された集積型光導波路素子において、該基板に接合した補強部材を設け、該ＧＲＩＮレンズは、該基板の一端面と該補強部材とに接着固定されていることを特徴とする集積型光導波路素子。
5. The integrated optical waveguide device according to claim 1, wherein a reinforcing member bonded to the substrate is provided, and the GRIN lens is bonded and fixed to one end surface of the substrate and the reinforcing member. An integrated optical waveguide device characterized by the above.
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