JP2004172135A - X-ray generating method and rotary anticathode x-ray generator - Google Patents

X-ray generating method and rotary anticathode x-ray generator Download PDF

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JP2004172135A
JP2004172135A JP2004009221A JP2004009221A JP2004172135A JP 2004172135 A JP2004172135 A JP 2004172135A JP 2004009221 A JP2004009221 A JP 2004009221A JP 2004009221 A JP2004009221 A JP 2004009221A JP 2004172135 A JP2004172135 A JP 2004172135A
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JP4204986B2 (en
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Tomohei Sakabe
知平 坂部
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<P>PROBLEM TO BE SOLVED: To provide an X-ray generating method for obtaining output power exceeding the limit with a conventional rotary anticathode X-ray generator, and to provide a rotary anticathode X-ray generator. <P>SOLUTION: An electron beam is radiated to the surface of the rotary anticathode. The portion of the rotary anticathode radiated by the electron beam is heated to near or over a boiling point of the rotary anticathode. With the rotary anticathode being dissolved at least partly, an X-ray is generated from the rotary anticathode. Then a centrifugal movement is applied to the portion of the rotary anticathode radiated by the electron beam, from the surface to the inner part. The portion is supported by a predetermined structure provided inside the rotary anticathode. <P>COPYRIGHT: (C)2004,JPO

Description

本発明は、超高輝度を実現できるＸ線発生方法及び回転対陰極Ｘ線発生装置に関する。   The present invention relates to an X-ray generation method and a rotating anti-cathode X-ray generator capable of realizing ultra-high brightness.

X線回折測定等においては、可能なかぎり強い強度のX線を試料に照射して測定を行う必要のある場合がある。この様な場合に用いられるX線発生装置として従来から回転対陰極X線発生装置が知られている。   In X-ray diffraction measurement and the like, it may be necessary to perform measurement by irradiating a sample with X-rays having the highest possible intensity. As an X-ray generator used in such a case, a rotating anti-cathode X-ray generator has been conventionally known.

この回転対陰極X線発生装置は、内部に冷却媒体を流通させた円柱状の対陰極（ターゲット）を高速で回転させながら、その外周表面に電子線を照射してX線を発生させるものである。この回転対陰極X発生装置は、ターゲットを固定した固定ターゲットのタイプに比較してターゲット上の電子線の照射位置が時々刻々と変化するので冷却効率が極めて高く、したがって、対陰極に大電流の電子線を照射することができ、強力な（高輝度の）X線を発生させることができる。   This rotating anti-cathode X-ray generator generates X-rays by irradiating the outer peripheral surface with an electron beam while rotating a cylindrical anti-cathode (target) in which a cooling medium is circulated at high speed. is there. This rotating anti-cathode X generator has an extremely high cooling efficiency because the irradiation position of the electron beam on the target changes every moment as compared with the fixed target type in which the target is fixed, and therefore, a large current is applied to the anti-cathode. It can be irradiated with an electron beam and can generate strong (high-brightness) X-rays.

ところで、一般的にX線の出力は陰極と対陰極との間に印加する電力（電流×電圧）に対応するので、X線の出力強度をこの電力で表示すると、上記従来の回転対陰極X線発生装置では、ターゲット上に０．１×１ｍｍの電子ビームを照射する汎用のX線発生装置の場合は、最大１．２ｋＷ程度、超高輝度といわれるものでも最大３．５ｋＷ程度の出力を得るのが限界であった。   By the way, since the output of X-rays generally corresponds to the power (current x voltage) applied between the cathode and the negative electrode, when the output intensity of the X-rays is expressed by this power, the above-described conventional rotary anti-cathode X A general-purpose X-ray generator that irradiates a target with an electron beam of 0.1 × 1 mm has a maximum output of about 1.2 kW and a maximum output of about 3.5 kW even if it is said to be ultra-bright. It was the limit to get.

本発明は、上述の背景のもとでなされたものであり、従来の回転対陰極X線発生装置の出力限界を越えた出力を得ることが可能な、Ｘ線発生方法及び回転対陰極X線発生装置を提供することを目的とするものである。   The present invention has been made under the above-described background, and an X-ray generation method and a rotating anti-cathode X-ray capable of obtaining an output exceeding the output limit of a conventional rotary anti-cathode X-ray generator. It is intended to provide a generator.

上述の課題を解決するための手段として、第１の発明は、
回転対陰極の表面に電子線を照射し、前記回転対陰極の前記電子線が照射された部分を前記回転対陰極の融点近傍又は融点以上にまで加熱して、少なくとも部分的に溶解させた状態で前記回転対陰極よりＸ線を発生させる工程と、
前記回転対陰極の、前記電子線が照射された前記部分に対して、その表面から内部に向かうように遠心力を作用させ、前記部分を前記回転対陰極の内方に設けられた所定の構造物で支持する工程と、
を具えることを特徴とする、Ｘ線発生方法であり、
回転対陰極に陰極から放出される電子線を照射してＸ線を発生させる回転対陰極Ｘ線発生装置であって、
前記回転対陰極の表面に電子線を照射し、前記回転対陰極の前記電子線が照射された部分を前記回転対陰極の融点近傍又は融点以上にまで加熱して、少なくとも部分的に溶解させた状態で前記回転対陰極より前記Ｘ線を発生させるとともに、前記回転対陰極の、前記電子線が照射された前記部分に対して、その表面から内部に向かうように遠心力を作用させ、前記部分を前記回転対陰極の内方に設けられた所定の構造物で支持するように構成したことを特徴とする、回転対陰極Ｘ線発生装置である。 As means for solving the above-mentioned problems, the first invention is
A state in which the surface of the rotating anti-cathode is irradiated with an electron beam, and the portion of the rotating anti-cathode irradiated with the electron beam is heated to near or above the melting point of the rotating anti-cathode to at least partially dissolve it. Generating X-rays from the rotating anti-cathode at
A predetermined structure in which a centrifugal force is applied to the portion of the rotary anti-cathode irradiated with the electron beam so that the portion is directed toward the inside from the surface, and the portion is provided inside the rotary anti-cathode. Supporting with an object,
An X-ray generation method characterized by comprising:
A rotating anti-cathode X-ray generator that irradiates a rotating anti-cathode with an electron beam emitted from the cathode to generate X-rays,
The surface of the rotating anti-cathode was irradiated with an electron beam, and the portion of the rotating anti-cathode irradiated with the electron beam was heated to near or above the melting point of the rotating anti-cathode to at least partially dissolve it. While generating the X-rays from the rotating anti-cathode in the state, the centrifugal force acts on the portion of the rotating anti-cathode, which is irradiated with the electron beam, from the surface thereof toward the inside, Is supported by a predetermined structure provided inside the rotating anti-cathode.

第２の発明は、前記第１の発明において、前記回転対陰極は、前記回転対陰極の回転中心を中心軸とする筒状部分を有し、前記電子線は前記筒状部分の内壁表面に照射するようにしたＸ線発生方法及び回転対陰極Ｘ線発生装置である。   In a second aspect based on the first aspect, the rotating anti-cathode has a cylindrical portion whose center axis is the rotation center of the rotating anti-cathode, and the electron beam is provided on an inner wall surface of the cylindrical portion. An X-ray generating method and a rotating anti-cathode X-ray generating apparatus for irradiation.

第３の発明は、第１又は第２の発明において、前記電子線は前記回転対陰極に対向するようにして設けられた陰極から放出され、前記回転対陰極を収納する対陰極室と、前記陰極を収納する陰極室とを隣接させて気密部材で構成し、前記対陰極室及び前記陰極室を仕切る隔壁に前記陰極から射出される前記電子線を通過させる小さな貫通孔を設けるとともに、前記対陰極室及び前記陰極室それぞれに真空排気装置を接続して、真空排気するようにしたＸ線発生方法及び回転対陰極Ｘ線発生装置である。   According to a third aspect, in the first or second aspect, the electron beam is emitted from a cathode provided so as to face the rotating anti-cathode, and an anti-cathode chamber containing the rotating anti-cathode; A cathode chamber accommodating a cathode is formed by an airtight member adjacent to the cathode chamber, and a small through-hole for passing the electron beam emitted from the cathode is provided in a partition partitioning the counter-cathode chamber and the cathode chamber. An X-ray generation method and a rotating anti-cathode X-ray generation apparatus in which a vacuum exhaust device is connected to each of the cathode chamber and the cathode chamber to evacuate the cathode chamber.

上述の発明によれば、対陰極の表面であって回転による遠心力が前記対陰極の表面から内部に向かって作用する部位に電子線を照射するように構成したことによって、前記電子線の照射によって前記対陰極の表面が溶解に近い状態になった場合でもその電子線照射部分が対陰極内部の構造物に支えられて変形もしくは破損するおそれを効果的に阻止とすることが可能になる。そのため、対陰極表面を構成する物質が融点に近い温度になるまで照射電子線の電流を増やすことが可能になる。   According to the above-described invention, the electron beam irradiation is performed by irradiating the electron beam to the portion of the surface of the anti-cathode where the centrifugal force due to rotation acts from the surface of the anti-cathode toward the inside. Thus, even when the surface of the counter-cathode is in a state close to melting, it is possible to effectively prevent the possibility that the electron beam-irradiated portion is deformed or damaged while being supported by the structure inside the counter-cathode. Therefore, it is possible to increase the current of the irradiated electron beam until the material constituting the surface of the anti-cathode reaches a temperature close to the melting point.

これに対して、従来の回転対陰極X線発生装置では、回転による遠心力が電子線照射部である表面から外方に向かって作用するので、この遠心力に抗して表面の形状を維持するために融点より大巾に低い温度（１／２以下程度）に対陰極表面を維持しなければならなかった。また、それゆえ、対陰極表面の温度がその範囲を越えないように、照射する電子線による電流が制限されていたものである。   On the other hand, in the conventional rotary anti-cathode X-ray generator, the centrifugal force due to rotation acts outward from the surface that is the electron beam irradiation unit, and the surface shape is maintained against this centrifugal force. Therefore, the surface of the anti-cathode had to be maintained at a temperature much lower than the melting point (about 以下 or less). Therefore, the current caused by the electron beam to be irradiated is limited so that the temperature of the surface of the anti-cathode does not exceed the range.

これに対して本発明では、遠心力の作用による変形を著しく軽減できるので、前記対陰極の前記表面の温度を融点の近傍もしくは融点以上（従来の２．５倍以上）に設定可能であることから、本発明では、従来の超高輝度の回転対陰極X線発生装置の最大許容負荷電力の少なくとも２．５倍以上の許容負荷電力を有するものとすることが可能であることが判明している。   On the other hand, according to the present invention, since the deformation due to the action of the centrifugal force can be remarkably reduced, the temperature of the surface of the counter electrode can be set near the melting point or higher than the melting point (2.5 times or more the conventional value). From this, it has been found that in the present invention, it is possible to have a permissible load power of at least 2.5 times or more the maximum permissible load power of the conventional ultra-high brightness rotating anti-cathode X-ray generator. I have.

また、第３の発明のように、対陰極を収納する部屋である対陰極室と陰極を収納する部屋である陰極室とを仕切って各々独立に排気するようにすれば、対陰極の電子線照射部の近傍の真空度の変化が陰極の近傍の真空度に影響を及ばすのを軽減できるので、イレギュラー放電のおそれを防止することができる。   Further, as in the third invention, if the anode chamber, which is a room for housing the cathode, and the cathode chamber, which is a room for housing the cathode, are partitioned and evacuated independently of each other, the electron beam of the cathode can be obtained. Since a change in the degree of vacuum near the irradiating portion can be reduced from affecting the degree of vacuum near the cathode, irregular discharge can be prevented.

以上詳述したように、本発明は、回転対陰極の表面であって回転による遠心力が前記対陰極の表面から内部に向かって作用する部位に電子線を照射するように構成したことによって、前記対陰極表面が溶解に近い状態になるまで照射電子線の電流を増大することを可能にし、これによって従来の回転対陰極X線発生装置の出力限界を越えた極めて大出力のＸ線発生方法及び回転対陰極X線発生装置を提供しているものである。   As described above in detail, the present invention is configured to irradiate the electron beam to the portion of the surface of the rotating anti-cathode where the centrifugal force due to rotation acts from the surface of the anti-cathode toward the inside, It is possible to increase the current of the irradiating electron beam until the surface of the anti-cathode is in a state close to melting, thereby producing an X-ray having a very high output exceeding the output limit of the conventional rotating anti-cathode X-ray generator. And a rotating anti-cathode X-ray generator.

図１は本発明の一実施の形態に係るX線発生装置の構成を示す断面図であり、図２は図１の一部拡大図である。以下、これらの図を参照にしながら一実施の形態を説明する。   FIG. 1 is a sectional view showing a configuration of an X-ray generator according to one embodiment of the present invention, and FIG. 2 is a partially enlarged view of FIG. Hereinafter, an embodiment will be described with reference to these drawings.

図において、回転対陰極１が収納される対陰極室２と、陰極３が収納される陰極室４と、回転対陰極１を回転駆動する駆動モータ５が設けられた回転駆動部６とが、隣接して気密構造部材２ａ、４ａ及び６ａによってそれぞれ形成されている。また、対陰極室２と陰極室４とを仕切る隔壁部２ｂには、陰極３から射出される電子線３０を通過させる小さな貫通孔２ｃが設けられている。さらに、対陰極室２及び陰極室４の各々には図示しない真空排気装置が接続される真空排気□２ｄ及び４ｄが設けられている。   In the figure, a cathode chamber 2 in which a rotating cathode 1 is housed, a cathode chamber 4 in which a cathode 3 is housed, and a rotation drive unit 6 provided with a driving motor 5 for rotating the rotating cathode 1 are provided. Adjacently formed by the hermetic structural members 2a, 4a and 6a, respectively. Further, a small through hole 2c through which the electron beam 30 emitted from the cathode 3 passes is provided in the partition wall portion 2b that separates the counter cathode chamber 2 and the cathode chamber 4. Further, each of the counter-cathode chamber 2 and the cathode chamber 4 is provided with vacuum exhausts 2d and 4d to which a vacuum exhaust device (not shown) is connected.

回転対陰極１は、Ｃｕ（銅）等からなる筒状部１１と、この筒状部１１の筒の一方の開口部を塞ぐように形成された円板状部１２と、筒状部１１及び円板状部１２の共通の中心軸をその中心軸とする回転軸部１３とが連続して一体に形成され、かつ内部は空洞に形成されたもので、筒状部１１の筒の内壁表面１ａを電子線照射部とするものである。   The rotating anti-cathode 1 includes a tubular portion 11 made of Cu (copper) or the like, a disc-shaped portion 12 formed so as to cover one opening of a tube of the tubular portion 11, a tubular portion 11, The rotating shaft portion 13 having the common central axis of the disc-shaped portion 12 as its central axis is formed continuously and integrally, and the inside is formed in a cavity, and the inner wall surface of the cylindrical portion of the cylindrical portion 11 is formed. 1a is an electron beam irradiation unit.

回転対陰極１の回転軸部１３は、回転騒動部６内に設けられた１対の軸受け部材１３ａ、１３ｂによって回転自在に支持されている。また、回転軸部１３の外周部には上記駆動モータ５の回転子５ｂが取付けられ、この回転子５ｂを回転駆動する固定子５ｂが上記回転駆動部６内において気密構造部材６ａに取付けられている。   The rotating shaft 13 of the rotating cathode 1 is rotatably supported by a pair of bearing members 13a and 13b provided in the rotating noise part 6. A rotor 5b of the drive motor 5 is attached to an outer peripheral portion of the rotating shaft portion 13. A stator 5b for rotating the rotor 5b is attached to an airtight structure member 6a in the rotation drive unit 6. I have.

回転軸部１３の円板状部１２寄りの根元部には、回転軸部１３と気密構造部材６ａとの間を気密に保持して上記体対陰極室２の真空を維持する回転軸シール部材１３ｃが設けられている。   A rotating shaft seal member for maintaining a vacuum in the body-to-cathode chamber 2 by keeping the space between the rotating shaft portion 13 and the airtight structural member 6a airtight at a root portion of the rotating shaft portion 13 near the disk-shaped portion 12. 13c is provided.

さらに、回転対陰極１の内部には、電子線照射部１ａの内壁面に冷却水を流通させるための固定隔壁部材１４が挿入設定されている。この固定隔壁部材１４は、回転軸部１３の内部においては筒状をなしており、円板状部１２に至ってその筒の端部を円板状に拡げ、筒状部１１の内部の右端部内壁の手前で延長されている。   Further, a fixed partition member 14 for flowing cooling water through the inner wall surface of the electron beam irradiating section 1a is inserted and set inside the rotating anode 1. The fixed partition member 14 has a cylindrical shape inside the rotating shaft portion 13, reaches the disk-shaped portion 12, expands the end of the cylinder into a disk shape, and extends the right end portion inside the cylindrical portion 11. It is extended in front of the inner wall.

すなわち、この固定隔壁１４は、回転対陰極１の内部の空洞部分をいわば二重管構造に仕切っている。この二重管の外側管部１４ａは冷却水の導入口１５に連通されている。なお、回転軸部１３の左端部の外周には軸シール部材１５が設けられており、冷却水の導入口１６から導入された冷却水が軸受け部材１３ｂや駆動モータ５が設けられた収納スペース内に洩れ出ないようにしつつ二重管の外側管部１４ａ内に導入されるようになっている。   In other words, the fixed partition 14 partitions the hollow portion inside the rotating anode 1 into a so-called double tube structure. The outer tube portion 14a of the double tube communicates with the cooling water inlet 15. A shaft seal member 15 is provided on the outer periphery of the left end of the rotating shaft portion 13, and cooling water introduced from a cooling water inlet 16 is supplied to the inside of a storage space in which the bearing member 13 b and the drive motor 5 are provided. While being prevented from leaking into the outer tube portion 14a of the double tube.

したがって、冷却水導入口１６から導入された冷却水は、二重管の外側管部１４ａを進行、上記筒状部１１の内部の右端部内壁で折り返して二重管の内側管部１４ｂに進行して電子線照射部１ａの内壁面を冷却した後、内側管部１４ｂ内をさらに進行して冷却水の排出□１７を通じて外部に排出される。   Therefore, the cooling water introduced from the cooling water inlet 16 travels through the outer tube portion 14a of the double tube, turns back on the inner wall at the right end inside the tubular portion 11, and proceeds to the inner tube portion 14b of the double tube. After cooling the inner wall surface of the electron beam irradiator 1a, the cooling water further proceeds inside the inner tube portion 14b and is discharged to the outside through the cooling water discharge □ 17.

回転対陰極１の電子線照射部１ａの近傍の気密構造部材２ａには、電子線照射部１ａに電子線３０が照射されたときに発生するX線２０を外部に取り出すためのX線窓２１が形成されている。このX線窓２１にはべリリウム膜やニッケル膜等のX線透過性の材料からなるX線透過膜２２が形成されており、対陰極室２の真空の維持しながらX線を取り出せるようになっている。   An X-ray window 21 for taking out X-rays 20 generated when the electron beam irradiation unit 1a is irradiated with the electron beam 30 is provided on the airtight structural member 2a near the electron beam irradiation unit 1a of the rotating anti-cathode 1. Is formed. An X-ray permeable film 22 made of an X-ray permeable material such as a beryllium film or a nickel film is formed in the X-ray window 21 so that X-rays can be taken out while maintaining a vacuum in the anti-cathode chamber 2. Has become.

陰極３は、絶縁構造部３２、フィラメント３３及びウエーネルト３４等とから構成されており高圧導入部３１から導入された数十ＫＶの高圧電力及びフィラメント電力を供給することによって、対陰極１に電子線３０を照射する。   The cathode 3 is composed of an insulating structure portion 32, a filament 33, a Wehnelt 34, and the like. By supplying a high-voltage power of several tens of KV and a filament power introduced from the high-voltage introduction portion 31, the cathode 3 emits an electron beam to the cathode 1. Irradiate 30.

上述の構成において、冷却水導入口１６から冷却水を導入し、騒動モータ５によって回転対陰極１を高速回転させ、陰極３から対陰極１の電子線照射部１ａに電子線３０を照射するとX線２０を発生させることができる。   In the above-described configuration, when cooling water is introduced from the cooling water inlet 16 and the rotating anti-cathode 1 is rotated at high speed by the noise motor 5 and the electron beam 30 is irradiated from the cathode 3 to the electron beam irradiation unit 1a of the anti-cathode 1, X Line 20 can be generated.

上述の捕成によれば、遠心力の作用による変形を著しく軽減できるので、対陰極表面の温度を融点の近傍もしくは融点以上（従来の２．５倍以上）に設定可能であることから、本発明では、従来の超高輝度の回転対陰極X線発生装置の最大許容負荷電力の少なくとも２．５倍以上の許容負荷電力を有するものとすることが可能である。   According to the above-described trapping, the deformation due to the action of the centrifugal force can be remarkably reduced, so that the temperature of the surface of the anti-cathode can be set near or above the melting point (2.5 times or more the conventional value). According to the invention, it is possible to have an allowable load power that is at least 2.5 times or more the maximum allowable load power of the conventional ultra-high brightness rotating anti-cathode X-ray generator.

なお、上述の実施例では、回転対陰極１の筒状部１１の筒の内壁面形状に対して特に変形加工を加えることなく、すなわち、筒状部１１の側壁が回転軸線（中心軸）に平行になる状態のままで、前記内壁面を電子線照射部１ａとしたが、これは例えば、電子線照射部１ａの表面をその断面の表面輪郭線が回転軸線に対して数度ないし十数度いずれかに傾くように形成してもよい。例えば、筒状部１１の前記側壁を前記回転軸線に向けて数度ないし数十度の角度で傾斜するようにすることができる。この場合、電子線照射部１ａの一部が溶解してもそれが回転対陰極外部に飛び散るおそれを防止できる。また、前記側壁を前記回転軸線から外方へ向けて傾斜するようにすることができる。この場合には、X線の取り出しが容易になる。   In the above-described embodiment, the inner wall surface of the cylindrical portion 11 of the rotating anti-cathode 1 is not particularly deformed, that is, the side wall of the cylindrical portion 11 is aligned with the rotation axis (center axis). While the inner wall surface was used as the electron beam irradiating section 1a in the state of being kept parallel, for example, the surface of the electron beam irradiating section 1a was formed so that the surface contour of its cross section was several degrees to several tens of degrees with respect to the rotation axis. It may be formed so as to be tilted to any degree. For example, the side wall of the cylindrical portion 11 can be inclined at an angle of several degrees to several tens degrees toward the rotation axis. In this case, even if a part of the electron beam irradiator 1a is melted, it is possible to prevent the electron beam irradiator 1a from scattering outside the rotating anode. Further, the side wall may be inclined outward from the rotation axis. In this case, extraction of X-rays becomes easy.

さらに、電子線照射部１ａの部分を断面がＶ字溝状又はＵ字構状に形成すれば、電子照射部１ａの一部が溶解してもそれが回転対陰極１の外部に飛び散るおそれをより効果的に防止できる。この場合には、Ｖ宇状又はＵ字状の溝巾やその傾斜角度もしくは溝深さ等は、X線取り出しが可能な寸法にすることは勿論である。さらには、上記溝形状を、前記表面部分が溶解して液状になった場合に遠心力の作用によって形成される液状部の表面形状と同一の表面形状に予め形成しておけば、表面が溶解状態に近い状態になった場合においても表面の変形のおそれを軽減することが可能になる。   Further, if the section of the electron beam irradiation section 1a is formed in a V-shaped groove or U-shaped cross section, even if a part of the electron irradiation section 1a is melted, it may be scattered outside the rotating anode 1. It can be more effectively prevented. In this case, it is a matter of course that the V-shaped or U-shaped groove width, the inclination angle, the groove depth, and the like are set to dimensions that enable X-ray extraction. Furthermore, if the groove shape is formed in advance in the same surface shape as the surface shape of the liquid portion formed by the action of centrifugal force when the surface portion is dissolved and becomes liquid, the surface can be dissolved. Even in a state close to the state, it is possible to reduce the risk of surface deformation.

また、電子線照射部１ａの部分だけを、発生させるX線の種類で決まるターゲット物質で構成し、その周囲をより高融点の物質及び／又は熱伝導度のより高い物質で構成すれば、ターゲット物質の冷却効率の向上、あるいは、変形防止が図られて、より高出力化することが可能になる。   Further, if only the electron beam irradiating portion 1a is made of a target material determined by the type of X-ray to be generated, and its surroundings are made of a material having a higher melting point and / or a material having a higher thermal conductivity, It is possible to improve the cooling efficiency of the substance or to prevent the deformation, thereby achieving higher output.

さらに、本発明においては、電子線照射部１ａの温度を融点近傍もしくはそれ以上に設定する場合がある。この場合には対陰極室２内において、電子線照射部１ａを構成する金属の蒸気圧が上昇し、X線透過膜２２が汚染される場合がある。これを防止するために、対陰極室２内のX線透過膜１ａの前面に交換可能なX線透過性の保護膜を設けることが望ましい。この保護膜としては、例えば、反跳電子に耐えられるＮｉ膜等の長尺状の保護膜をロールに巻いた供給ロールと、この供給ロールの保護膜を巻き取る巻取ロールとをX線窓２１の内側に設け、供給ロールと巻取ロールとの間に張られた保護膜がX線透過膜１ａの前面に配置されるようにすれはよい。   Further, in the present invention, the temperature of the electron beam irradiating section 1a may be set near the melting point or higher. In this case, in the anti-cathode chamber 2, the vapor pressure of the metal constituting the electron beam irradiation unit 1a increases, and the X-ray permeable film 22 may be contaminated. In order to prevent this, it is desirable to provide a replaceable X-ray permeable protective film on the front surface of the X-ray permeable film 1a in the anti-cathode chamber 2. As the protective film, for example, a supply roll in which a long protective film such as a Ni film that can withstand recoil electrons is wound around a roll, and a take-up roll that winds up the protective film of the supply roll include an X-ray window. It is preferable that the protective film provided inside the supply roller 21 and stretched between the supply roll and the take-up roll is disposed on the front surface of the X-ray transmission film 1a.

本発明の一実施形態に係るX線発生装置の構成を示す断面図である。It is a sectional view showing the composition of the X-ray generator concerning one embodiment of the present invention. 図１の一部拡大図である。FIG. 2 is a partially enlarged view of FIG. 1.

符号の説明Explanation of reference numerals

１ 回転対陰極
１ａ 電子線照射部、
２ 対陰極室
３ 陰極
４ 陰極室、
５ 駆動モータ
６ 回転駆動部
１１ 筒状部
２０ X線
３０ 電子線 1 rotating anti-cathode 1a electron beam irradiation unit
2 anti-cathode room 3 cathode 4 cathode room,
Reference Signs List 5 drive motor 6 rotation drive unit 11 cylindrical part 20 X-ray 30 electron beam

Claims (20)

回転対陰極の表面に電子線を照射し、前記回転対陰極の前記電子線が照射された部分を前記回転対陰極の融点近傍又は融点以上にまで加熱して、少なくとも部分的に溶解させた状態で前記回転対陰極よりＸ線を発生させる工程と、
前記回転対陰極の、前記電子線が照射された前記部分に対して、その表面から内部に向かうように遠心力を作用させ、前記部分を前記回転対陰極の内方に設けられた所定の構造物で支持する工程と、
を具えることを特徴とする、Ｘ線発生方法。 A state in which the surface of the rotating anti-cathode is irradiated with an electron beam, and the portion of the rotating anti-cathode irradiated with the electron beam is heated to near or above the melting point of the rotating anti-cathode to at least partially dissolve it. Generating X-rays from the rotating anti-cathode at
A predetermined structure in which a centrifugal force is applied to the portion of the rotary anti-cathode irradiated with the electron beam so that the portion is directed toward the inside from the surface, and the portion is provided inside the rotary anti-cathode. Supporting with an object,
An X-ray generation method, comprising: 前記回転対陰極は、前記回転対陰極の回転中心を中心軸とする筒状部分を有し、前記電子線は前記筒状部分の内壁表面に照射することを特徴とする、請求項１に記載のＸ線発生方法。   2. The rotating anti-cathode according to claim 1, wherein the rotating anti-cathode has a cylindrical portion having a rotation axis as a central axis, and the electron beam irradiates an inner wall surface of the cylindrical portion. 3. X-ray generation method. 前記電子線は前記回転対陰極に対向するようにして設けられた陰極から放出され、前記回転対陰極を収納する対陰極室と、前記陰極を収納する陰極室とを隣接させて気密部材で構成し、前記対陰極室及び前記陰極室を仕切る隔壁に前記陰極から射出される前記電子線を通過させる小さな貫通孔を設けるとともに、前記対陰極室及び前記陰極室それぞれに真空排気装置を接続して、真空排気することを特徴とする、請求項１又は２に記載のＸ線発生方法。   The electron beam is emitted from a cathode provided so as to face the rotating anti-cathode, and comprises a hermetic member in which an anti-cathode chamber accommodating the rotating anti-cathode and a cathode chamber accommodating the cathode are adjacent to each other. And, while providing a small through-hole through which the electron beam emitted from the cathode passes through the partition partitioning the counter-cathode chamber and the cathode chamber, a vacuum exhaust device is connected to each of the counter-cathode chamber and the cathode chamber. 3. The X-ray generation method according to claim 1, wherein the X-ray is evacuated. 前記筒状部材の側壁を前記中心軸側へ向けて傾斜させ、前記回転対陰極の、前記電子線を照射した前記部分の、溶解に伴う飛散を抑制することを特徴とする、請求項２又は３に記載のＸ線発生方法。   The side wall of the cylindrical member is inclined toward the central axis side, and the rotating anti-cathode suppresses scattering of the portion irradiated with the electron beam due to melting, or 3. The X-ray generation method according to 3. 前記筒状部材の側壁を前記中心軸から外方へ向けて傾斜させ、前記回転対陰極から発生した前記Ｘ線の取り出しを容易にすることを特徴とする、請求項２又は３に記載のＸ線発生方法。   The side wall of the cylindrical member is inclined outward from the central axis to facilitate extraction of the X-rays generated from the rotating anti-cathode. Line generation method. 前記回転対陰極の、前記電子線が照射される前記部分をＶ字溝状又はＵ字溝状に形成することを特徴とする、請求項１〜５のいずれか一に記載のＸ線発生方法。   The X-ray generation method according to any one of claims 1 to 5, wherein the portion of the rotating anti-cathode to be irradiated with the electron beam is formed in a V-shaped groove or a U-shaped groove. . 前記回転対陰極の、前記電子線が照射される前記Ｖ字溝状又は前記Ｕ字溝状に形成された前記部分は、前記電子線照射による溶解後の、前記遠心力が作用した場合の形状と略同形状に形成することを特徴とする、請求項６に記載のＸ線発生方法。   The portion of the rotating anti-cathode formed in the V-shaped groove or the U-shaped groove irradiated with the electron beam has a shape after the melting by the electron beam irradiation, when the centrifugal force acts. The X-ray generation method according to claim 6, wherein the X-ray generation method is formed in substantially the same shape as that of the X-ray. 前記回転対陰極の、前記電子線が照射される前記部分の周囲を、前記回転対陰極の、前記Ｘ線発生に寄与するターゲット材料よりも高融点及び／又は高熱伝導度の物質で構成することを特徴とする、請求項１〜７のいずれか一に記載のＸ線発生方法。   The rotating anti-cathode is configured so that the periphery of the portion irradiated with the electron beam is made of a substance having a higher melting point and / or higher thermal conductivity than the target material of the rotating anti-cathode that contributes to the X-ray generation. The X-ray generation method according to any one of claims 1 to 7, wherein: 前記Ｘ線は、前記気密部材に設けられた所定のＸ線透過膜を介して外部に取り出すことを特徴とする、請求項３〜８のいずれか一に記載のＸ線発生方法。   The X-ray generation method according to any one of claims 3 to 8, wherein the X-ray is taken out through a predetermined X-ray transmission film provided on the airtight member. 前記Ｘ線透過膜の前方に、前記回転対陰極の、前記Ｘ線発生に寄与するターゲット材料の蒸発に伴う前記Ｘ線透過膜の汚染を防止するための、保護膜を設けることを特徴とする、請求項９に記載のＸ線発生方法。   A protective film is provided in front of the X-ray permeable film for preventing contamination of the X-ray permeable film due to evaporation of the target material contributing to the X-ray generation of the rotating anti-cathode. An X-ray generation method according to claim 9. 回転対陰極に陰極から放出される電子線を照射してＸ線を発生させる回転対陰極Ｘ線発生装置であって、
回転対陰極の表面に電子線を照射し、前記回転対陰極の前記電子線が照射された部分を前記回転対陰極の融点近傍又は融点以上にまで加熱して、少なくとも部分的に溶解させた状態で前記回転対陰極より前記Ｘ線を発生させるとともに、前記回転対陰極の、前記電子線が照射された前記部分に対して、その表面から内部に向かうように遠心力を作用させ、前記部分を前記回転対陰極の内方に設けられた所定の構造物で支持するように構成したことを特徴とする、回転対陰極Ｘ線発生装置。 A rotating anti-cathode X-ray generator that irradiates a rotating anti-cathode with an electron beam emitted from the cathode to generate X-rays,
A state in which the surface of the rotating anti-cathode is irradiated with an electron beam, and the portion of the rotating anti-cathode irradiated with the electron beam is heated to near or above the melting point of the rotating anti-cathode to at least partially dissolve it. While generating the X-rays from the rotating anti-cathode, and applying a centrifugal force on the portion of the rotating anti-cathode, the portion of the rotating anti-cathode irradiated with the electron beam, from the surface toward the inside, the portion A rotating anti-cathode X-ray generator, characterized in that it is supported by a predetermined structure provided inside the rotating anti-cathode. 前記回転対陰極は、前記回転対陰極の回転中心を中心軸とする筒状部分を有し、前記電子線は前記筒状部分の内壁表面に照射するように構成したことを特徴とする、請求項１１に記載の回転対陰極Ｘ線発生装置。   The rotating anti-cathode has a cylindrical portion whose center is a rotation center of the rotating anti-cathode, and the electron beam is configured to irradiate an inner wall surface of the cylindrical portion. Item 12. A rotating anti-cathode X-ray generator according to item 11. 前記回転対陰極を収納する対陰極室と、前記陰極を収納する陰極室とを隣接させて気密部材で構成し、前記対陰極室及び前記陰極室を仕切る隔壁に前記陰極から射出される前記電子線を通過させる小さな貫通孔を設けるとともに、前記対陰極室及び前記陰極室それぞれに真空排気装置を接続して、真空排気するように構成したことを特徴とする、請求項１１又は１２に記載の回転対陰極Ｘ線発生装置。   The counter-electrode chamber containing the rotating counter-cathode and the cathode chamber containing the cathode are formed by an airtight member adjacent to each other, and the electrons emitted from the cathode to a partition partitioning the counter-cathode chamber and the cathode chamber. The small through-hole for passing a wire is provided, and a vacuum exhaust device is connected to each of the counter-cathode chamber and the cathode chamber, so that the counter-electrode chamber and the cathode chamber are configured to be evacuated. Rotating anti-cathode X-ray generator. 前記筒状部材の側壁を前記中心軸側へ向けて傾斜させ、前記回転対陰極の、前記電子線を照射した前記部分の、溶解に伴う飛散を抑制したことを特徴とする、請求項１２又は１３に記載の回転対陰極Ｘ線発生装置。   The side wall of the cylindrical member is inclined toward the central axis side, and the rotating anti-cathode, wherein the portion irradiated with the electron beam, is prevented from scattering due to melting, or 14. A rotating anti-cathode X-ray generator according to claim 13. 前記筒状部材の側壁を前記中心軸から外方へ向けて傾斜させ、前記回転対陰極から発生した前記Ｘ線の取り出しを容易にしたことを特徴とする、請求項１２又は１３に記載の回転対陰極Ｘ線発生装置。   14. The rotation according to claim 12, wherein a side wall of the cylindrical member is inclined outward from the central axis to facilitate extraction of the X-rays generated from the rotating anti-cathode. Anti-cathode X-ray generator. 前記回転対陰極の、前記電子線が照射される前記部分をＶ字溝状又はＵ字溝状に形成したことを特徴とする、請求項１１〜１５のいずれか一に記載の回転対陰極Ｘ線発生装置。   The rotating anti-cathode X according to any one of claims 11 to 15, wherein the portion of the rotating anti-cathode to be irradiated with the electron beam is formed in a V-shaped groove or a U-shaped groove. Line generator. 前記回転対陰極の、前記電子線が照射される前記Ｖ字溝状又は前記Ｕ字溝状に形成された前記部分は、前記電子線照射による溶解後の、前記遠心力が作用した場合の形状と略同形状に形成したことを特徴とする、請求項１６に記載の回転対陰極Ｘ線発生装置。   The portion of the rotating anti-cathode formed in the V-shaped groove or the U-shaped groove irradiated with the electron beam has a shape after the melting by the electron beam irradiation, when the centrifugal force acts. 17. The rotating anti-cathode X-ray generator according to claim 16, wherein the X-ray generator is formed in substantially the same shape as the above. 前記回転対陰極の、前記電子線が照射される前記部分の周囲を、前記回転対陰極の、前記Ｘ線発生に寄与するターゲット材料よりも高融点及び／又は高熱伝導度の物質で構成したことを特徴とする、請求項１１〜１７のいずれか一に記載の回転対陰極Ｘ線発生装置。   The periphery of the rotating anti-cathode, which is irradiated with the electron beam, is made of a substance having a higher melting point and / or higher thermal conductivity than the target material of the rotating anti-cathode that contributes to the X-ray generation. The rotating anti-cathode X-ray generator according to any one of claims 11 to 17, characterized in that: 前記気密部材に所定のＸ線透過膜を設け、前記Ｘ線は前記Ｘ線透過膜を介して外部に取り出すようにしたことを特徴とする、請求項１３〜１８のいずれか一に記載の回転対陰極Ｘ線発生装置。   The rotation according to any one of claims 13 to 18, wherein a predetermined X-ray transmission film is provided on the airtight member, and the X-rays are extracted to the outside through the X-ray transmission film. Anti-cathode X-ray generator. 前記Ｘ線透過膜の前方に、前記回転対陰極の、前記Ｘ線発生に寄与するターゲット材料の蒸発に伴う前記Ｘ線透過膜の汚染を防止するための、保護膜を設けたことを特徴とする、請求項１９に記載の回転対陰極Ｘ線発生装置。   A protective film is provided in front of the X-ray transmission film to prevent contamination of the X-ray transmission film due to evaporation of the target material contributing to the generation of the X-rays in the rotating anti-cathode. 20. The rotating anti-cathode X-ray generator according to claim 19.
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US7653178B2 (en) 2004-08-20 2010-01-26 Satoshi Ohsawa X-ray generating method, and X-ray generating apparatus
JP2008048986A (en) * 2006-08-25 2008-03-06 Tomohei Sakabe Method of and apparatus for measuring image
JP2008122101A (en) * 2006-11-08 2008-05-29 Tomohei Sakabe Image measuring method and device
US8027434B2 (en) 2007-07-11 2011-09-27 Noriyoshi Sakabe Rotating anticathode X-ray generating apparatus and X-ray generating method
JP2009054447A (en) * 2007-08-28 2009-03-12 Tomohei Sakabe Rotating target x-ray generator and x-ray generation method
US7769139B2 (en) 2008-09-29 2010-08-03 Noriyoshi Sakabe X-ray generating method, and X-ray generating apparatus
US9153410B2 (en) 2010-10-12 2015-10-06 Noriyoshi Sakabe X-ray generating method, and X-ray generating apparatus

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