JP2004138425A5 - - Google Patents
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- JP2004138425A5 JP2004138425A5 JP2002301421A JP2002301421A JP2004138425A5 JP 2004138425 A5 JP2004138425 A5 JP 2004138425A5 JP 2002301421 A JP2002301421 A JP 2002301421A JP 2002301421 A JP2002301421 A JP 2002301421A JP 2004138425 A5 JP2004138425 A5 JP 2004138425A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002301421A JP4669193B2 (ja) | 2002-10-16 | 2002-10-16 | 圧力式流量制御装置の温度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002301421A JP4669193B2 (ja) | 2002-10-16 | 2002-10-16 | 圧力式流量制御装置の温度測定装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009025342A Division JP4852619B2 (ja) | 2009-02-05 | 2009-02-05 | 圧力式流量制御装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004138425A JP2004138425A (ja) | 2004-05-13 |
| JP2004138425A5 true JP2004138425A5 (ja) | 2008-06-19 |
| JP4669193B2 JP4669193B2 (ja) | 2011-04-13 |
Family
ID=32449767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002301421A Expired - Lifetime JP4669193B2 (ja) | 2002-10-16 | 2002-10-16 | 圧力式流量制御装置の温度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4669193B2 (ja) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5269285B2 (ja) * | 2005-07-11 | 2013-08-21 | 東京エレクトロン株式会社 | 流量測定器 |
| JP5933936B2 (ja) * | 2011-06-17 | 2016-06-15 | 株式会社堀場エステック | 流量測定システム、流量制御システム、及び、流量測定装置 |
| US10883866B2 (en) | 2015-09-24 | 2021-01-05 | Fujikin Incorporated | Pressure-based flow rate control device and malfunction detection method therefor |
| JP6892687B2 (ja) | 2015-12-25 | 2021-06-23 | 株式会社フジキン | 流量制御装置および流量制御装置を用いる異常検知方法 |
| JP6106773B2 (ja) * | 2016-01-28 | 2017-04-05 | 株式会社堀場エステック | 流量測定装置及び流量制御装置 |
| US10928813B2 (en) | 2016-03-29 | 2021-02-23 | Fujikin Incorporated | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition |
| KR102131633B1 (ko) | 2016-09-28 | 2020-07-08 | 가부시키가이샤 후지킨 | 농도 검출 방법 및 압력식 유량 제어 장치 |
| US11054052B2 (en) | 2016-12-26 | 2021-07-06 | Fujikin Incorporated | Piezoelectric-element-driven valve and flow rate control device |
| KR101806490B1 (ko) | 2016-12-26 | 2017-12-07 | 주식회사 현대케피코 | 센서 엘리먼트 |
| WO2019107215A1 (ja) | 2017-11-30 | 2019-06-06 | 株式会社フジキン | 流量制御装置 |
| CN111788534A (zh) | 2018-02-26 | 2020-10-16 | 株式会社富士金 | 流量控制装置以及流量控制方法 |
| WO2020085236A1 (ja) | 2018-10-26 | 2020-04-30 | 株式会社フジキン | 濃度測定装置 |
| CN113632038A (zh) * | 2019-04-25 | 2021-11-09 | 株式会社富士金 | 流量控制装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5790107A (en) * | 1980-11-26 | 1982-06-04 | Toyoda Mach Works Ltd | Method for compensating temperature in semiconductor converter |
| US4659235A (en) * | 1985-04-16 | 1987-04-21 | Borg-Warner Automotive, Inc. | Fluid pressure sensor with temperature indication |
| JPS62168030A (ja) * | 1986-01-21 | 1987-07-24 | Yamatake Honeywell Co Ltd | 半導体圧力センサの温度補償回路 |
| JP2730152B2 (ja) * | 1989-03-15 | 1998-03-25 | 株式会社デンソー | 圧力・温度複合検出装置 |
| US5642278A (en) * | 1995-01-03 | 1997-06-24 | Hewlett-Packard Co. | Method and apparatus for temperature and pressure compensation of pneumatic manifolds |
| JP3291161B2 (ja) * | 1995-06-12 | 2002-06-10 | 株式会社フジキン | 圧力式流量制御装置 |
| US5668320A (en) * | 1995-06-19 | 1997-09-16 | Cardiometrics, Inc. | Piezoresistive pressure transducer circuitry accommodating transducer variability |
| JP2000075931A (ja) * | 1998-08-31 | 2000-03-14 | Stec Kk | 流路絞りノズルを備えた制御バルブ |
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2002
- 2002-10-16 JP JP2002301421A patent/JP4669193B2/ja not_active Expired - Lifetime