JP2003139538A - Angular velocity sensor - Google Patents
Angular velocity sensorInfo
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- JP2003139538A JP2003139538A JP2001340699A JP2001340699A JP2003139538A JP 2003139538 A JP2003139538 A JP 2003139538A JP 2001340699 A JP2001340699 A JP 2001340699A JP 2001340699 A JP2001340699 A JP 2001340699A JP 2003139538 A JP2003139538 A JP 2003139538A
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- Prior art keywords
- beams
- angular velocity
- ninth
- axis direction
- velocity sensor
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、航空機、自動車、
ロボット、船舶、車両等の移動体の姿勢制御やナビゲー
ションあるいはカメラやビデオカメラ等の手振れ防止
用、遠隔操作用のリモコン用等に用いる角速度センサに
関するものである。TECHNICAL FIELD The present invention relates to an aircraft, an automobile,
The present invention relates to an angular velocity sensor used for posture control or navigation of a moving body such as a robot, a ship, or a vehicle, for preventing camera shake of a camera or a video camera, or for a remote control for remote operation.
【０００２】[0002]
【従来の技術】従来の角速度センサとしては、特開平１
０−１７０２７６号公報に記載されたものが知られてい
る。このセンサにおいては、振動体としての質量部とこ
れに対向するように電極が設けられ、電極間に働く静電
引力により質量部が振動する。この角速度センサに角速
度が与えられた時、コリオリ力が質量部に発生し、その
方向は印加された角速度の軸と質量部の振動方向に直角
である。このコリオリ力により質量部が変位し、対向す
る電極関の距離が変化する。この距離の変化による質量
部と対向電極間の静電容量の変化を用いて、角速度を検
出するように構成されている。2. Description of the Related Art As a conventional angular velocity sensor, Japanese Patent Laid-Open No.
The thing described in the 0-170276 publication is known. In this sensor, an electrode is provided so as to face a mass portion as a vibrating body, and the mass portion vibrates due to electrostatic attraction acting between the electrodes. When an angular velocity is applied to this angular velocity sensor, Coriolis force is generated in the mass portion, and its direction is perpendicular to the axis of the applied angular velocity and the vibration direction of the mass portion. Due to this Coriolis force, the mass portion is displaced and the distance between the electrodes facing each other is changed. The angular velocity is detected by using the change in the capacitance between the mass unit and the counter electrode due to the change in the distance.
【０００３】[0003]
【発明が解決しようとする課題】このような角速度セン
サにおいては、対向する電極と質量部を静電力にて駆動
したり、対向する電極間の静電容量の変化を測定する場
合、効率的に駆動し、かつ、静電容量を検出するため
に、電極間距離は数ミクロンオーダーで管理しなければ
ならない。しかし、このギャップに異物やゴミ等が付着
すると、電極間のショートが発生する可能性がある。ま
た、効率的に駆動したり検出するために多数の電極を櫛
の歯のように設けている場合に、１箇所でも異物、ゴミ
等によって電極間がショートすれば静電力による駆動も
静電容量の検出もできなくなってしまうという課題を有
していた。また、このような多数の電極を形成する構造
においては、量産性にも課題がある。In such an angular velocity sensor, when the opposing electrode and the mass portion are driven by electrostatic force, or when the change in electrostatic capacitance between the opposing electrodes is measured, the angular velocity sensor can be efficiently used. In order to drive and detect the capacitance, the distance between the electrodes must be controlled on the order of several microns. However, if foreign matter or dust adheres to this gap, a short circuit between electrodes may occur. Further, in the case where a large number of electrodes are provided like comb teeth for efficient driving and detection, if the electrodes are short-circuited even at one place due to foreign matter, dust, etc., driving by electrostatic force can be performed by electrostatic capacitance. However, there is a problem in that it is not possible to detect. Further, in such a structure in which a large number of electrodes are formed, there is a problem in mass productivity.
【０００４】本発明は、この課題を解決するものであ
り、対向する可動部分に数ミクロンオーダーの間隙を必
要としない構造であり、かつ、量産性に適した角速度セ
ンサを提供することを目的とする。The present invention is to solve this problem, and an object of the present invention is to provide an angular velocity sensor having a structure that does not require a gap of the order of several microns in the movable parts facing each other and is suitable for mass production. To do.
【０００５】[0005]
【課題を解決するための手段】本発明はＸＹ面内に相対
向するように設けられた第１、第２の基部と、この第
１、第２の基部により支持固定され、Ｙ軸方向に延出し
た第１の梁と、この第１の梁を挟んで前記第１の基部よ
り対をなすようにＹ軸方向に延出した第２、第３の梁
と、前記第１の梁を挟み、かつ、前記第２、第３の梁と
それぞれ相対向するように前記第２の基部より対をなす
ようにＹ軸方向に延出した第４、第５の梁と、前記第１
の梁のＹ軸方向のほぼ中央部よりＸ軸方向に相反するよ
うにそれぞれ延出した第６、第７の梁と、この第６、第
７の梁の先端部よりそれぞれＹ軸方向に相反するように
延出した第８、第９の梁とを備え、前記第８、第９の梁
の内の少なくとも１つの梁を駆動することにより前記第
８、第９の梁がＸ軸方向に互いに逆相になるように振動
し、かつ、Ｚ軸まわりに印加された角速度に応じて前記
第１、第２、第３、第４、第５の梁の内の少なくとも１
つの梁がＸＹ面内で変形し、この変形に対応する物理量
が電気的に検出されるように構成されていることを特徴
とするものである。According to the present invention, there are provided first and second base portions provided in the XY plane so as to face each other, and supported and fixed by the first and second base portions in the Y-axis direction. The first beam that extends and the second and third beams that extend in the Y-axis direction so as to form a pair with the first base with the first beam sandwiched between the first beam and the first beam. A fourth beam extending in the Y-axis direction so as to form a pair from the second base so as to face the second beam and the third beam, and the first beam.
6th and 7th beams respectively extending from the substantially central part of the Y-axis direction so as to be opposite to each other in the X-axis direction, and the tip ends of the 6th and 7th beams are opposite to each other in the Y-axis direction. And 8th and 9th beams which are extended so that the 8th and 9th beams are moved in the X-axis direction by driving at least one of the 8th and 9th beams. At least one of the first, second, third, fourth, and fifth beams vibrates so that they are in opposite phases, and depends on the angular velocity applied about the Z axis.
One beam is deformed in the XY plane, and a physical quantity corresponding to this deformation is electrically detected.
【０００６】この構成により、対向する可動部分に数ミ
クロンオーダーの間隙を必要としない構造であり、か
つ、量産性に適した角速度センサを実現することができ
る。With this structure, it is possible to realize an angular velocity sensor having a structure that does not require a gap of the order of several microns in the movable parts facing each other and is suitable for mass production.
【０００７】[0007]
【発明の実施の形態】本発明の請求項１に記載の発明
は、ＸＹ面内の相対向するように設けられた第１、第２
の基部と、この第１、第２の基部により支持固定されＹ
軸方向に延出した第１の梁と、この第１の梁を挟んで前
記第１の基部より対をなすようにＹ軸方向に延出した第
２、第３の梁と、前記第１の梁を挟み、かつ、前記第
２、第３の梁とそれぞれ相対向するように前記第２の基
部より対をなすようにＹ軸方向に延出した第４、第５の
梁と、前記第１の梁のＹ軸方向のほぼ中央部よりＸ軸方
向に相反するようにそれぞれ延出した第６、第７の梁
と、この第６、第７の梁の先端部よりそれぞれＹ軸方向
に相反するように延出した第８、第９の梁とを備え、前
記第８、第９の梁の内の少なくとも１つの梁を駆動する
ことにより前記第８、第９の梁がＸ軸方向に互いに逆相
になるように振動し、かつ、Ｚ軸まわりに印加された角
速度に応じて前記第１、第２、第３、第４、第５の梁の
内の少なくとも１つの梁がＸＹ面内で変形し、この変形
に対応する物理量が電気的に検出されるように構成され
ているため、対向する可動部分に数ミクロンオーダーの
間隙を必要としない構造であり、かつ、量産性に適する
という作用を有する。BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is the first and second embodiments provided so as to face each other in the XY plane.
The base portion of the Y is supported and fixed by the first and second base portions.
A first beam extending in the axial direction, second and third beams extending in the Y-axis direction so as to form a pair from the first base with the first beam interposed therebetween, and the first beam And a fourth beam extending in the Y-axis direction so as to form a pair from the second base so as to face the second and third beams, respectively. A sixth beam and a seventh beam, which respectively extend from the substantially central portion of the first beam in the Y-axis direction so as to be opposite to each other in the X-axis direction, and the tip portions of the sixth and seventh beams, respectively, in the Y-axis direction. And 8th and 9th beams extending so as to be opposite to each other, and by driving at least one of the 8th and 9th beams, the 8th and 9th beams can At least one of the first, second, third, fourth, and fifth beams that vibrate in opposite directions and have an angular velocity applied around the Z axis. Is deformed in the XY plane, and the physical quantity corresponding to this deformation is electrically detected. Therefore, it is a structure that does not require a gap of the order of several microns between the movable parts facing each other, and mass production. It has the effect of being suitable for sex.
【０００８】請求項２に記載の発明は、請求項１に記載
の発明において、第１の梁及び第６、第７の梁に対して
それぞれ第２から第９の梁、第１、第２の基部が対称に
構成されているため、コリオリ力を高精度に検出できる
という作用を有する。According to a second aspect of the present invention, in the first aspect of the invention, the second beam to the ninth beam, the first beam, and the second beam with respect to the first beam and the sixth beam and the seventh beam, respectively. Since the base portion of is configured symmetrically, the Coriolis force can be detected with high accuracy.
【０００９】請求項３に記載の発明は、請求項１に記載
の発明において、第２から第５の梁の外側に第８、第９
の梁を設けているため、第２から第５の梁と第１の梁の
距離が近接することになり、第１、第２の基部における
検出エネルギーのロスが少なくなり、コリオリ力を好感
度に検出できるという作用を有する。According to a third aspect of the invention, in the invention according to the first aspect, the eighth and ninth parts are provided outside the second to fifth beams.
Since the second beam is provided, the second to fifth beams and the first beam are close to each other, and the loss of detection energy in the first and second bases is reduced, and the Coriolis force is favorably detected. It has the effect that it can be detected.
【００１０】請求項４に記載の発明は、請求項１に記載
の発明において、第１、第２の基部の左右端よりも内側
に第２から第５の梁を設けているため、基部の変位量を
さらに小さくすることができ、コリオリ力をさらに高精
度に検出できるという作用を有する。According to a fourth aspect of the present invention, in the first aspect of the invention, the second to fifth beams are provided inside the left and right ends of the first and second base portions. The displacement amount can be further reduced, and the Coriolis force can be detected with higher accuracy.
【００１１】請求項５に記載の発明は、請求項１に記載
の発明において、第１から第９の梁、第１、第２の基部
をすべて単一材料から構成されているため、駆動する梁
と検出する梁との機械的結合度及び全体剛性が増し、振
動の安定性と耐振性が向上するという作用を有する。According to a fifth aspect of the present invention, in the first aspect of the invention, the first to ninth beams, the first and second bases are all made of a single material, and therefore are driven. The mechanical coupling degree between the beam and the beam to be detected and the overall rigidity are increased, and the vibration stability and the vibration resistance are improved.
【００１２】請求項６に記載の発明は、請求項５に記載
の発明において、第１から第９の梁、第１、第２の基部
を構成する材料が圧電単結晶から構成されているため、
機械的、電気的な信頼性が高まるという作用を有する。According to a sixth aspect of the invention, in the fifth aspect of the invention, the material forming the first to ninth beams and the first and second base portions is composed of a piezoelectric single crystal. ,
It has the effect of increasing the mechanical and electrical reliability.
【００１３】請求項７に記載の発明は、請求項１に記載
の発明において、第８、第９の梁の内の少なくとも１つ
の梁には駆動用の圧電体が設けられ、かつ、第１から第
５の梁の内の少なくとも１つの梁には検出用の圧電体が
設けられているため、駆動用、検出用に圧電定数の大き
な材料を採用することができセンサ感度を向上すること
ができるという作用を有する。According to a seventh aspect of the present invention, in the first aspect of the invention, at least one of the eighth and ninth beams is provided with a driving piezoelectric body, and the first piezoelectric beam is provided. Since at least one of the fifth beams is provided with a piezoelectric body for detection, a material having a large piezoelectric constant can be used for driving and detection, and the sensor sensitivity can be improved. It has the effect of being able to.
【００１４】以下、本発明の実施の形態について図１か
ら図７を用いて説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 7.
【００１５】図１は本発明の角速度センサの実施の形態
におけるセンサ素子の斜視図、図２は同センサ素子にお
ける駆動用の梁の説明図、図３は同センサ素子の駆動振
動モードを示す模式図、図４は同センサ素子におけるモ
ニター用の梁の説明図、図５は同センサ素子における検
出用の梁の説明図、図６は同センサ素子に角速度が印加
されたときに発生するコリオリ力を示す模式図、図７は
同センサ素子に角速度が印加されたときに全梁の振動モ
ードを示す模式図である。FIG. 1 is a perspective view of a sensor element in an embodiment of an angular velocity sensor of the present invention, FIG. 2 is an explanatory view of a driving beam in the sensor element, and FIG. 3 is a schematic view showing a driving vibration mode of the sensor element. FIG. 4, FIG. 4 is an explanatory view of a monitoring beam in the same sensor element, FIG. 5 is an explanatory view of a detection beam in the same sensor element, and FIG. 6 is a Coriolis force generated when an angular velocity is applied to the same sensor element. FIG. 7 is a schematic diagram showing a vibration mode of all beams when an angular velocity is applied to the sensor element.
【００１６】図１において、第１の梁３の両端は第１、
第２の基部１、２により支持固定されている。第１の梁
３の左右両側に対称になるように駆動用の第８、第９の
梁４、５が配置され、上記第１の梁３、第８、第９の梁
４、５の各々の中央部を接続するように第６、第７の梁
６、７を配置し、第１、第６〜第９の梁３、６、７、
４、５で駆動用のＨ型振動子８を構成する。また、第
１、第８、第９の梁３、４、５の間にそれぞれ第１、第
８、第９の梁３、４、５と平行になるように第１、第２
の基部１、２から検出用の第２〜第５の梁９、１０、１
１、１２が設けられ、第１の梁３、第２と第３の梁９、
１０と第１の基部１により３脚音叉型振動子１３が構成
され、第１の梁３、第４、第５の梁１１、１２と第２の
基部２により３脚音叉型振動子１４が構成される。In FIG. 1, both ends of the first beam 3 are first and
It is supported and fixed by the second bases 1 and 2. Eighth and ninth beams 4 and 5 for driving are arranged symmetrically on both left and right sides of the first beam 3, and each of the first beam 3, the eighth beam 9, and the fifth beam 5 is arranged. The sixth and seventh beams 6, 7 are arranged so as to connect the central portions of the first and sixth to ninth beams 3, 6, 7,
An H-type vibrator 8 for driving is constituted by 4 and 5. In addition, the first, second, and ninth beams 3, 4, and 5 are arranged so as to be parallel to the first, eighth, and ninth beams 3, 4, and 5, respectively.
Second to fifth beams 9, 10 and 1 for detection from the bases 1 and 2 of
1, 12 are provided, the first beam 3, the second and third beams 9,
10 and the first base 1 constitute a tripod tuning fork type vibrator 13, and the first beam 3, the fourth and fifth beams 11, 12 and the second base 2 form a tripod tuning fork type vibrator 14. Composed.
【００１７】Ｈ型振動子８と３脚音叉型振動子１３、１
４からセンサ素子１５が構成されている。センサ素子１
５は、圧電単結晶としての水晶からなり、かつ、ＸＹ平
面内に形成されている。H-shaped oscillator 8 and tripod tuning-fork type oscillator 13, 1
The sensor element 15 is composed of four. Sensor element 1
Reference numeral 5 is made of quartz as a piezoelectric single crystal and is formed in the XY plane.
【００１８】図２において、下向きの矢印は第８の梁４
の断面における電気軸の方向を表わし、この電気軸の方
向に駆動用の電界が加わるように第８の梁４の上面に電
極２１、２２、下面に電極２３、２４を配置している。
４０は交流電界を印加するための駆動源である。破線の
矢印は駆動用の交流電界の方向を示す。例えば、電極２
３から電極２１に向かって駆動電界がかかる場合は、こ
の部分においては第８の梁４が縮む方向に働く。また、
電極２３から２１に向かって駆動電界が印加される場合
は、電極２２から電極２４に向かって駆動電界が印加さ
れるように構成され、この部分においては第８の梁４を
伸ばす方向に働く。このようにして、第８の梁４は振動
する。これにより、図３に示すように第９の梁５も同時
に第８の梁４とは逆位相になるように共振する。In FIG. 2, the downward arrow indicates the eighth beam 4.
The electrodes 21 and 22 are arranged on the upper surface of the eighth beam 4 and the electrodes 23 and 24 are arranged on the lower surface thereof so that an electric field for driving is applied in the direction of the electric axis.
Reference numeral 40 is a drive source for applying an alternating electric field. The dashed arrow indicates the direction of the driving AC electric field. For example, electrode 2
When a driving electric field is applied from 3 to the electrode 21, the eighth beam 4 acts in a contracting direction in this portion. Also,
When the driving electric field is applied from the electrodes 23 to 21, the driving electric field is applied from the electrode 22 to the electrode 24, and this portion works in the direction of extending the eighth beam 4. In this way, the eighth beam 4 vibrates. As a result, as shown in FIG. 3, the ninth beam 5 also resonates at the same time so as to have a phase opposite to that of the eighth beam 4.
【００１９】図４において、下向きの矢印は図２と同じ
く電気軸の方向を表わす。第９の梁５の上面に電極２
５、２６、下面に電極２７、２８が配置されている。こ
れにより、第９の梁５の振動振幅に比例した電荷を検出
する。第９の梁５は第８の梁４と逆位相となるように振
動している結果、電極２５から電極２７の方向（破線の
矢印で示す方向）に電荷が発生し、また、電極２８から
電極２６の方向（破線の矢印で示す方向）に電荷が発生
する。これらにより得られたモニター部からの信号が一
定になるよう駆動信号を制御することによって第８の梁
４と第９の梁５の振幅は常に一定に保たれている。In FIG. 4, the downward arrow indicates the direction of the electric axis as in FIG. The electrode 2 is formed on the upper surface of the ninth beam 5.
5, 26, and electrodes 27, 28 are arranged on the lower surface. Thereby, the electric charge proportional to the vibration amplitude of the ninth beam 5 is detected. As a result of the ninth beam 5 vibrating so as to be in a phase opposite to that of the eighth beam 4, charges are generated in the direction from the electrode 25 to the electrode 27 (direction indicated by a dashed arrow), and also from the electrode 28. Electric charges are generated in the direction of the electrode 26 (the direction indicated by the dashed arrow). The amplitudes of the eighth beam 4 and the ninth beam 5 are always kept constant by controlling the drive signal so that the signal from the monitor unit obtained by these becomes constant.
【００２０】図５において、下向きの矢印は図２と同じ
く電気軸の方向を表わす。第２の梁９の上面に電極２
９、３０、下面に電極３１、３２が配置されている。In FIG. 5, the downward arrow indicates the direction of the electric axis as in FIG. The electrode 2 is formed on the upper surface of the second beam 9.
Electrodes 31 and 32 are arranged on the bottom surfaces of the electrodes 9 and 30, respectively.
【００２１】Ｚ軸まわりに角速度Ωが印加されると、図
６に示すように第８、第９の梁４、５にはそれぞれＹ軸
方向に相反するコリオリ力Ｆｃが発生する。このコリオ
リ力Ｆｃにより第１の梁３と第６の梁６、第７の梁７の
結合点を中心に回転力Ｍｃが発生する。この回転力Ｍｃ
により、ＸＹ面内に設けられた第１の梁３から第７の梁
７及び第２の梁９から第５の梁１２には図７に示すよう
な振動モードが発生する。図７に示すような振動モード
の発生により、例えば図５に示す第２の梁９の左側の部
分は伸びるため、電極２９にはプラスの電荷が、電極３
１にはマイナスの電荷が生じる。また、第２の梁９の右
側は縮むため、電極３０にはマイナスの電荷が生じ、電
極３２にはプラスの電荷が生じる。この電極２９から３
２により検出された電荷により、角速度に対応した出力
が得られる。When the angular velocity Ω is applied around the Z axis, as shown in FIG. 6, the Coriolis forces Fc which are opposite to each other in the Y axis direction are generated on the eighth and ninth beams 4 and 5, respectively. Due to this Coriolis force Fc, a rotational force Mc is generated around the connection point of the first beam 6, the sixth beam 6 and the seventh beam 7. This rotational force Mc
As a result, vibration modes as shown in FIG. 7 are generated in the first to third beams 7 to 7 and the second to fifth beams 9 to 12 provided in the XY plane. Due to the generation of the vibration mode as shown in FIG. 7, for example, the left side portion of the second beam 9 shown in FIG.
Negative charge is generated at 1. Further, since the right side of the second beam 9 contracts, a negative charge is generated on the electrode 30 and a positive charge is generated on the electrode 32. This electrode 29 to 3
The electric charge detected by 2 provides an output corresponding to the angular velocity.
【００２２】以上のような構成とすることにより、対向
する可動部分に数ミクロンオーダーの間隙を必要としな
い構造であり、かつ、量産性に適した角速度センサを実
現することができる。With the above-described structure, it is possible to realize an angular velocity sensor having a structure that does not require a gap of the order of several microns in the movable parts facing each other and is suitable for mass production.
【００２３】本実施の形態においては、第２の梁９によ
り角速度の検出を行う説明をしてきたが、これ以外にも
第１の梁３、第３〜第５の梁１０、１１、１２を用いて
検出することも当然可能である。Although the second beam 9 is used to detect the angular velocity in the present embodiment, the first beam 3 and the third to fifth beams 10, 11, and 12 may be used in addition to this. It is naturally possible to detect it by using it.
【００２４】本実施の形態においては、第８の梁４を駆
動し、第９の梁５によりモニターする例について説明を
してきたが、第９の梁５を第８の梁４と逆相になるよう
に駆動する構成も可能である。In the present embodiment, the example in which the eighth beam 4 is driven and the ninth beam 5 is used for monitoring has been described. However, the ninth beam 5 and the eighth beam 4 are in opposite phase. It is also possible to drive so that
【００２５】本実施の形態におけるセンサ素子１５は、
好ましくは第１の梁３及び第６、第７の梁６、７に対し
てそれぞれ第６〜第９の梁６、７、４、５、第２の梁９
から第５の梁１２、第１、第２の基部１、２が対称に構
成されるのが望ましい。The sensor element 15 in this embodiment is
Preferably, for the first beam 3 and the sixth and seventh beams 6 and 7, the sixth to ninth beams 6, 7, 4, 5 and the second beam 9 are provided, respectively.
Therefore, it is desirable that the fifth beam 12, the first and second bases 1 and 2 are symmetrically configured.
【００２６】本実施の形態においては、コリオリ力を好
感度に検出できるという観点から、第２の梁９から第５
の梁１２の外側に第８、第９の梁４、５が設けられる構
成について説明してきたが、この逆の構成にすることも
可能である。In the present embodiment, from the viewpoint that the Coriolis force can be detected with good sensitivity, the second beam 9 to the fifth beam 9 can be detected.
Although the configuration in which the eighth and ninth beams 4 and 5 are provided on the outer side of the beam 12 has been described, the configuration may be reversed.
【００２７】本実施の形態においては、支持固定による
影響が極めて少なくなる（第１、第２の基部１、２の両
端部が不動）という観点から、第２〜第５の梁９、１
０、１１、１２を第１、第２の基部１、２の端から少し
内側に入ったところから延出する構成について説明して
きたが、これ以外の構成にすることも可能である。In the present embodiment, from the viewpoint that the influence of supporting and fixing is extremely small (both ends of the first and second base portions 1 and 2 are immovable), the second to fifth beams 9 and 1 are provided.
Although the configuration has been described in which 0, 11, and 12 extend from a position slightly inward from the ends of the first and second base portions 1 and 2, a configuration other than this is also possible.
【００２８】本実施の形態においては、第９の梁３〜
７、９〜１２、第１、第２の基部１、２がすべて水晶か
らなる単一材料から構成されているため、駆動する梁と
検出する梁との機械的結合度及び全体剛性が増し、振動
の安定性と耐振性が向上する。In the present embodiment, the ninth beam 3 ...
Since 7, 9 to 12, the first and second bases 1 and 2 are all made of a single material made of quartz, the degree of mechanical coupling between the driving beam and the beam to be detected and the overall rigidity are increased, Vibration stability and vibration resistance are improved.
【００２９】本実施の形態においては、圧電単結晶とし
ての水晶を用いて説明してきたが、これ以外の圧電単結
晶を用いることも当然可能である。In the present embodiment, quartz is used as the piezoelectric single crystal, but it is of course possible to use other piezoelectric single crystals.
【００３０】本実施の形態においては、第１から第９の
梁３〜７、９〜１２、第１、第２の基部１、２がすべて
水晶からなる単一材料から構成されている例について説
明してきたが、例えば第１から第９の梁３〜７、９〜１
２、第１、第２の基部１、２を恒弾性金属、アルミナ、
シリコン、溶融石英等の材料から構成し、駆動用の第
８、第９の梁４、５のいずれか１つの梁に圧電セラミッ
クス、圧電薄膜等を設け、検出用の第１〜第５の梁３、
９から１２のいずれか１つの梁に圧電セラミックス、圧
電薄膜等を設けた構成とすることも可能である。この構
成によると、駆動用、検出用に圧電定数の大きな材料を
採用することができ、センサ感度をより向上させること
ができる。In the present embodiment, an example in which the first to ninth beams 3 to 7, 9 to 12 and the first and second bases 1 and 2 are all made of a single material made of quartz As described above, for example, the first to ninth beams 3 to 7 and 9 to 1
2, the first and second bases 1 and 2 are made of a constant elastic metal, alumina,
It is made of a material such as silicon or fused quartz, and piezoelectric ceramics, a piezoelectric thin film or the like is provided on any one of the eighth and ninth beams for driving, and first to fifth beams for detection. 3,
It is also possible to adopt a configuration in which any one of beams 9 to 12 is provided with piezoelectric ceramics, a piezoelectric thin film, or the like. With this configuration, a material having a large piezoelectric constant can be used for driving and detection, and the sensor sensitivity can be further improved.
【００３１】本実施の形態においては、水晶からなる第
１〜第５の梁３、９〜１２の変形を圧電的に検出する構
成について説明してきたが、梁の変形に応じて変化する
抵抗の変化、容量の変化、光量の変化等さまざまな物理
量の変化を電気的に検出するように構成することも可能
である。In the present embodiment, the configuration in which the deformation of the first to fifth beams 3 and 9 to 12 made of quartz is detected piezoelectrically has been described, but the resistance which changes according to the deformation of the beam is used. It is also possible to electrically detect changes in various physical quantities such as changes, changes in capacitance, changes in light quantity, and the like.
【００３２】[0032]
【発明の効果】以上のように本発明は、ＸＹ面内に相対
向するように設けられた第１、第２の基部と、この第
１、第２の基部により支持固定され、Ｙ軸方向に延出し
た第１の梁と、この第１の梁を挟んで前記第１の基部よ
り対をなすようにＹ軸方向に延出した第２、第３の梁
と、前記第１の梁を挟み、かつ、前記第２、第３の梁と
それぞれ相対向するように前記第２の基部より対をなす
ようにＹ軸方向に延出した第４、第５の梁と、前記第１
の梁のＹ軸方向のほぼ中央部よりＸ軸方向に相反するよ
うにそれぞれ延出した第６、第７の梁と、この第６、第
７の梁の先端部よりそれぞれＹ軸方向に相反するように
延出した第８、第９の梁とを備え、前記第８、第９の梁
の内の少なくとも１つの梁を駆動することにより前記第
８、第９の梁がＸ軸方向に互いに逆相になるように振動
し、かつ、Ｚ軸まわりに印加された角速度に応じて前記
第１、第２、第３、第４、第５の梁の内の少なくとも１
つの梁がＸＹ面内で変形し、この変形に対応する物理量
が電気的に検出されるように構成されていることによ
り、対向する可動部分に数ミクロンオーダーの間隙を必
要としない構造であり、かつ、量産性に適した角速度セ
ンサを実現できる。また、駆動振動時、検出振動時のい
ずれにおいても支持固定部である基部が不動となるため
に、支持による影響の少ないセンサ素子構造となり、角
速度の検出精度が極めて向上する。As described above, according to the present invention, the first and second base portions provided so as to face each other in the XY plane and the first and second base portions are supported and fixed in the Y-axis direction. A first beam, and second and third beams extending in the Y-axis direction so as to form a pair with the first base with the first beam interposed therebetween, and the first beam. And the fourth and fifth beams extending in the Y-axis direction so as to form a pair from the second base so as to face the second and third beams, respectively, and the first and second beams.
6th and 7th beams respectively extending from the substantially central part of the Y-axis direction so as to be opposite to each other in the X-axis direction, and the tip ends of the 6th and 7th beams are opposite to each other in the Y-axis direction. And 8th and 9th beams which are extended so that the 8th and 9th beams are moved in the X-axis direction by driving at least one of the 8th and 9th beams. At least one of the first, second, third, fourth, and fifth beams vibrates so that they are in opposite phases, and depends on the angular velocity applied about the Z axis.
Since the two beams are deformed in the XY plane and the physical quantity corresponding to this deformation is electrically detected, the structure does not require a gap on the order of several microns between the movable parts facing each other. Moreover, an angular velocity sensor suitable for mass production can be realized. In addition, since the base portion that is the supporting and fixing portion is immovable during both driving vibration and detection vibration, the sensor element structure is less affected by the support, and the angular velocity detection accuracy is significantly improved.
【図１】本発明の角速度センサの実施の形態におけるセ
ンサ素子の斜視図FIG. 1 is a perspective view of a sensor element in an embodiment of an angular velocity sensor of the present invention.
【図２】同センサ素子における駆動用の梁の説明図FIG. 2 is an explanatory view of a driving beam in the sensor element.
【図３】同センサ素子の駆動振動モードを示す模式図FIG. 3 is a schematic diagram showing a drive vibration mode of the sensor element.
【図４】同センサ素子におけるモニター用の梁の説明図FIG. 4 is an explanatory view of a monitor beam in the sensor element.
【図５】同センサ素子における検出用の梁の説明図FIG. 5 is an explanatory view of a beam for detection in the sensor element.
【図６】同センサ素子に角速度が印加されたときに発生
するコリオリ力を示す模式図FIG. 6 is a schematic diagram showing a Coriolis force generated when an angular velocity is applied to the sensor element.
【図７】同センサ素子に角速度が印加されたときに全梁
の振動モードを示す模式図FIG. 7 is a schematic diagram showing vibration modes of all beams when an angular velocity is applied to the sensor element.
１、２ 第１、第２の基部
３、４、５、６、７、９、１０、１１、１２ 第１〜第
９の梁
８ Ｈ型振動子
１３、１４ ３脚音叉型振動子
１５ センサ素子
２１、２２、２３、２４、２５、２６、２７、２８、２
９、３０、３１、３２電極
４０ 駆動源1, 2 1st, 2nd base 3, 4, 5, 6, 7, 9, 10, 11, 12 1st-9th beam 8 H type | mold oscillator 13,14 3 leg tuning-fork type | formula oscillator 15 Sensor Elements 21, 22, 23, 24, 25, 26, 27, 28, 2
9, 30, 31, 32 electrode 40 drive source
───────────────────────────────────────────────────── フロントページの続き (72)発明者 菅原 澄夫 宮城県石巻市蛇田字新埣寺69−７ Ｆターム(参考） 2F105 AA01 AA06 AA08 BB15 CC01 CD01 CD05 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Sumio Sugawara 69-7 Shinshoji Temple, Jinda, Ishinomaki City, Miyagi Prefecture F term (reference) 2F105 AA01 AA06 AA08 BB15 CC01 CD01 CD05
Claims (7)
第１、第２の基部と、この第１、第２の基部により支持
固定されＹ軸方向に延出した第１の梁と、この第１の梁
を挟んで前記第１の基部より対をなすようにＹ軸方向に
延出した第２、第３の梁と、前記第１の梁を挟み、前記
第２、第３の梁とそれぞれ相対向するように前記第２の
基部より対をなすようにＹ軸方向に延出した第４、第５
の梁と、前記第１の梁のＹ軸方向のほぼ中央部よりＸ軸
方向に相反するようにそれぞれ延出した第６、第７の梁
と、この第６、第７の梁の先端部よりそれぞれＹ軸方向
に相反するように延出した第８、第９の梁とを備え、前
記第８、第９の梁の内の少なくとも１つの梁を駆動する
ことにより前記第８、第９の梁がＸ軸方向に互いに逆相
になるように振動し、かつ、Ｚ軸まわりに印加された角
速度に応じて前記第１、第２、第３、第４、第５の梁の
内の少なくとも１つの梁がＸＹ面内で変形し、この変形
に対応する物理量が電気的に検出されるように構成され
た角速度センサ。1. A first and a second base portion provided to face each other in an XY plane, and a first beam supported and fixed by the first and second base portions and extending in the Y-axis direction. , Second and third beams extending in the Y-axis direction so as to form a pair from the first base with the first beam sandwiched therebetween, and the first and second beams sandwiched between the second and third beams. Fourth and fifth extending in the Y-axis direction so as to form a pair from the second base so as to face the respective beams.
Beam, sixth and seventh beams extending from the substantially central portion in the Y-axis direction of the first beam so as to be opposite to each other in the X-axis direction, and tip portions of the sixth and seventh beams. The eighth and ninth beams extending so as to be opposite to each other in the Y-axis direction, and by driving at least one of the eighth and ninth beams, the eighth and ninth beams are provided. Of the first beam, the second beam, the third beam, the fourth beam, and the fifth beam depending on the angular velocity applied around the Z-axis. An angular velocity sensor configured such that at least one beam is deformed in an XY plane and a physical quantity corresponding to this deformation is electrically detected.
れぞれ第２から第９の梁、第１、第２の基部が対称に構
成された請求項１に記載の角速度センサ。2. The angular velocity sensor according to claim 1, wherein the second to ninth beams, the first and second bases are symmetrically arranged with respect to the first beam and the sixth and seventh beams, respectively. .
梁を設けた請求項１に記載の角速度センサ。3. The angular velocity sensor according to claim 1, wherein the eighth and ninth beams are provided outside the second to fifth beams.
第２から第５の梁を設けた請求項１に記載の角速度セン
サ。4. The angular velocity sensor according to claim 1, wherein the second to fifth beams are provided inside the left and right ends of the first and second base portions.
すべて単一材料から構成した請求項１に記載の角速度セ
ンサ。5. The angular velocity sensor according to claim 1, wherein the first to ninth beams, the first and second bases are all made of a single material.
構成する材料が圧電単結晶である請求項５に記載の角速
度センサ。6. The angular velocity sensor according to claim 5, wherein the material forming the first to ninth beams and the first and second bases is a piezoelectric single crystal.
梁には駆動用の圧電体が設けられ、かつ、第１から第５
の梁の内の少なくとも１つの梁には検出用の圧電体が設
けられた請求項１に記載の角速度センサ。7. A driving piezoelectric body is provided on at least one of the eighth and ninth beams, and the first to fifth beams are provided.
The angular velocity sensor according to claim 1, wherein a piezoelectric body for detection is provided on at least one of the beams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001340699A JP2003139538A (en) | 2001-11-06 | 2001-11-06 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001340699A JP2003139538A (en) | 2001-11-06 | 2001-11-06 | Angular velocity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003139538A true JP2003139538A (en) | 2003-05-14 |
Family
ID=19154853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001340699A Pending JP2003139538A (en) | 2001-11-06 | 2001-11-06 | Angular velocity sensor |
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| Country | Link |
|---|---|
| JP (1) | JP2003139538A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006266969A (en) * | 2005-03-25 | 2006-10-05 | Nec Tokin Corp | Tuning fork type piezo-electric oscillating gyroscope |
| DE102007018834A1 (en) * | 2007-04-20 | 2008-10-23 | Eads Deutschland Gmbh | Yaw rate sensor |
-
2001
- 2001-11-06 JP JP2001340699A patent/JP2003139538A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006266969A (en) * | 2005-03-25 | 2006-10-05 | Nec Tokin Corp | Tuning fork type piezo-electric oscillating gyroscope |
| DE102007018834A1 (en) * | 2007-04-20 | 2008-10-23 | Eads Deutschland Gmbh | Yaw rate sensor |
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