JP2003030827A - Method of manufacturing magnetic recording medium - Google Patents
Method of manufacturing magnetic recording mediumInfo
- Publication number
- JP2003030827A JP2003030827A JP2001215570A JP2001215570A JP2003030827A JP 2003030827 A JP2003030827 A JP 2003030827A JP 2001215570 A JP2001215570 A JP 2001215570A JP 2001215570 A JP2001215570 A JP 2001215570A JP 2003030827 A JP2003030827 A JP 2003030827A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic film
- recording medium
- heating
- seed layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気ディスク装置
等の磁気記録再生装置に用いられる磁気記録媒体の製造
方法に関し、特に高い記録密度を有する磁気記録媒体の
製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium used in a magnetic recording / reproducing apparatus such as a magnetic disk device, and more particularly to a method for manufacturing a magnetic recording medium having a high recording density.
【０００２】[0002]
【従来の技術】近年、ハードディスクドライブは、パー
ソナルコンピュータやワークステーションのみならずＡ
Ｖ機器等にも用いられるようになり、大容量化及び小型
化が必要とされている。そのため、磁気ディスクは更な
る高記録密度化が要求されているが、記録密度の向上の
ためには、トラック幅の短縮あるいは記録ビット長の短
縮が必要である。2. Description of the Related Art In recent years, hard disk drives have been used not only in personal computers and workstations but also in A
Since it is also used in V equipment and the like, it is required to have a large capacity and a small size. Therefore, the magnetic disk is required to have a higher recording density, but in order to improve the recording density, it is necessary to shorten the track width or the recording bit length.
【０００３】しかし、トラック幅があまり狭くなると、
隣接する記録トラックの磁気信号による干渉（クロスト
ーク）が大きくなるので、再生信号の劣化が問題とな
る。また、記録ビット長を短くしすぎると、隣接ビット
間における磁気信号の干渉（パーシャルイレージャ）が
大きくなり、再生信号の劣化が問題となる。However, if the track width becomes too narrow,
Since interference (crosstalk) due to magnetic signals of adjacent recording tracks becomes large, deterioration of reproduced signals becomes a problem. Further, if the recording bit length is too short, the interference of magnetic signals between adjacent bits (partial erasure) becomes large, and the deterioration of the reproduced signal becomes a problem.
【０００４】これらの問題を解決するため、磁性粒子間
の磁気的相互作用を低減するなど磁気記録膜の改善検討
が行われているが、磁気記録媒体全体にわたって連続的
な構造を持っている従来の磁気記録媒体では根本的な解
決はできない。In order to solve these problems, improvement studies of the magnetic recording film have been conducted such as reducing magnetic interaction between magnetic particles, but the conventional magnetic recording medium has a continuous structure. With the magnetic recording medium of, the fundamental solution cannot be achieved.
【０００５】そこで、特開平９−２９７９１８号公報に
は、トラック幅と最短ビット規定長とを２辺の長さとす
る矩形領域からなる記録部を複数設け、この複数の記録
部が隙間部により互いに分離して配置された状態で情報
の蓄積を行う磁気記録媒体が提案されている。この磁気
記録媒体では、磁気記録領域が磁気的に分離独立した構
造、すなわちディスクリート構造を有することにより、
クロストークやパーシャルイレージャによる再生信号の
劣化が低減でき、磁気情報の検出が容易になるという利
点がある。しかも高密度に形成した情報トラックに磁気
情報記録再生手段を正確に追従させることができる。In view of this, Japanese Patent Laid-Open No. 9-297918 provides a plurality of recording portions each having a rectangular area having a track width and a minimum defined bit length of two sides, and the plurality of recording portions are mutually separated by a gap portion. There has been proposed a magnetic recording medium that stores information in a state where they are separately arranged. In this magnetic recording medium, the magnetic recording area has a magnetically separated and independent structure, that is, a discrete structure,
There is an advantage that deterioration of a reproduced signal due to crosstalk or partial erasure can be reduced and magnetic information can be easily detected. Moreover, the magnetic information recording / reproducing device can accurately follow the information tracks formed with high density.
【０００６】ここで、上記ディスクリート構造を有する
磁気記録媒体の従来の製造方法の第１の例について、図
４を参照して説明する。Here, a first example of a conventional method of manufacturing a magnetic recording medium having the above discrete structure will be described with reference to FIG.
【０００７】先ず、図４（ａ）に示すように、非磁性基
板２１上にフォトレジスト２２を塗布した後、フォトリ
ソグラフィーによりパターニングし、図４（ｂ）に示す
形状とする。次に、図４（ｃ）に示すように、フォトレ
ジスト２２をエッチングマスクとして、反応性イオンエ
ッチング等により非磁性基板２１をエッチングする。続
いて、非磁性基板２１の露出した表面及びフォトレジス
ト２２上に磁性膜２３をスパッタリング等により成膜
し、図４（ｄ）に示す状態とする。その後、フォトレジ
スト２２をレジスト除去液により除去することにより、
その上に付着していた磁性膜２３も同時に除去する。こ
れにより、図４（ｅ）に示すように、情報記録部２４が
磁気的に分離独立した構造を有する磁気記録媒体２５が
得られる。First, as shown in FIG. 4A, a photoresist 22 is applied on a non-magnetic substrate 21 and patterned by photolithography to obtain a shape shown in FIG. 4B. Next, as shown in FIG. 4C, the nonmagnetic substrate 21 is etched by reactive ion etching or the like using the photoresist 22 as an etching mask. Then, a magnetic film 23 is formed on the exposed surface of the non-magnetic substrate 21 and the photoresist 22 by sputtering or the like, so that the state shown in FIG. After that, by removing the photoresist 22 with a resist removing liquid,
The magnetic film 23 adhered thereon is also removed at the same time. As a result, as shown in FIG. 4E, a magnetic recording medium 25 having a structure in which the information recording portion 24 is magnetically separated and independent is obtained.
【０００８】次に、図５を参照して、上記ディスクリー
ト構造を有する磁気記録媒体の製造方法の第２の例につ
いて説明する。Next, with reference to FIG. 5, a second example of the method of manufacturing the magnetic recording medium having the discrete structure will be described.
【０００９】先ず、図５（ａ）に示すように、非磁性基
板２１上にフォトレジスト２２を塗布した後、フォトリ
ソグラフィーによりパターニングし、図５（ｂ）に示す
形状とする。次に、図５（ｃ）に示すように、フォトレ
ジスト２２をエッチングマスクとして、反応性イオンエ
ッチング等により非磁性基板２１をエッチングする。続
いて、フォトレジスト２２を除去した後、非磁性基板２
１上に磁性膜２３をスパッタリング等により成膜し、図
５（ｄ）に示す状態とする。その後、非磁性基板２１の
凸部上の磁性膜２３を化学的機械的研磨（ＣＭＰ）によ
り除去し、非磁性基板２１の凸部の高さと磁性膜２３の
厚さをほぼ同じにする。これにより、図５（ｅ）に示す
ように、情報記録部２４が磁気的に分離独立した構造を
有する磁気記録媒体２５が得られる。First, as shown in FIG. 5 (a), a photoresist 22 is applied on a non-magnetic substrate 21 and then patterned by photolithography to obtain a shape shown in FIG. 5 (b). Next, as shown in FIG. 5C, the nonmagnetic substrate 21 is etched by reactive ion etching or the like using the photoresist 22 as an etching mask. Subsequently, after removing the photoresist 22, the non-magnetic substrate 2
A magnetic film 23 is formed on the magnetic layer 1 by sputtering or the like, so that the state shown in FIG. After that, the magnetic film 23 on the convex portion of the non-magnetic substrate 21 is removed by chemical mechanical polishing (CMP) so that the height of the convex portion of the non-magnetic substrate 21 and the thickness of the magnetic film 23 are made substantially the same. As a result, as shown in FIG. 5E, a magnetic recording medium 25 having a structure in which the information recording unit 24 is magnetically separated and independent is obtained.
【００１０】[0010]
【発明が解決しようとする課題】しかしながら、上述の
ような製造方法では、リソグラフィーやドライエッチン
グといった、いわゆる微細加工技術を必要とし、工程の
増加、複雑化を伴う。また、前記製造方法の第１の例で
は、図４（ｄ）に示すフォトレジスト２２を除去した
際、フォトレジスト２２の側面に付着していた磁性膜２
３が残留し、磁性膜２３の端部にバリとして残り、磁気
ディスク上のゴミの原因となることがある。更に、非磁
性基板２１の凸部の高さと磁性膜２３の厚さの制御を厳
密に行わなければ磁気記録媒体の表面に凹凸ができてし
まい、スライダの浮上量が不安定になり、信号の記録再
生に悪影響を与えてしまう。However, the above-described manufacturing method requires so-called fine processing technology such as lithography and dry etching, which causes an increase in the number of steps and a complicated process. In the first example of the manufacturing method, the magnetic film 2 attached to the side surface of the photoresist 22 when the photoresist 22 shown in FIG. 4D is removed.
3 remains and remains as a burr at the end of the magnetic film 23, which may cause dust on the magnetic disk. Furthermore, unless the height of the convex portion of the non-magnetic substrate 21 and the thickness of the magnetic film 23 are strictly controlled, irregularities are formed on the surface of the magnetic recording medium, the flying height of the slider becomes unstable, and the signal level of the signal is reduced. It adversely affects recording and reproduction.
【００１１】また、前記製造方法の第２の例では、ＣＭ
Ｐなどの研磨により、図５に示す非磁性基板２１の凸部
の高さと磁性膜２３の厚さの制御を行うが、この方法に
よると局所的な制御はできても、非磁性基板２１の凹凸
の粗密差に伴うディッシングなど、研磨のパターン依存
性により、磁気記録媒体の表面にうねりが生じる。ま
た、研磨を用いる以上、マイクロスクラッチなどの欠陥
は不可避である。更に、磁性膜の厚さが数十ｎｍ程度で
ある場合、研磨により膜厚の制御を行うのは困難であ
る。スライダの浮上量が数十ｎｍ程度であることを考え
ると、凹凸などの表面形状を制御できないことは、磁気
記録媒体としては致命的である。In the second example of the manufacturing method, CM
Although the height of the convex portion of the non-magnetic substrate 21 and the thickness of the magnetic film 23 shown in FIG. 5 are controlled by polishing with P or the like, this method allows local control, but Waviness occurs on the surface of the magnetic recording medium due to pattern dependence of polishing, such as dishing due to the difference in the density of irregularities. Further, as long as polishing is used, defects such as micro scratches are unavoidable. Further, when the thickness of the magnetic film is about several tens of nm, it is difficult to control the film thickness by polishing. Considering that the flying height of the slider is about several tens of nm, it is fatal for a magnetic recording medium that the surface shape such as unevenness cannot be controlled.
【００１２】上記の２つの例に限らず、従来の方法で
は、磁気記録領域が磁気的に分離独立した構造を形成す
るために、何らかの段差形状を形成する必要があった。
この場合、表面形状の制御に困難が生じるのは、原理的
に避けられない問題であった。Not only the above-mentioned two examples but also the conventional method, it is necessary to form some step shape in order to form the structure in which the magnetic recording regions are magnetically separated and independent.
In this case, the difficulty in controlling the surface shape has been an unavoidable problem in principle.
【００１３】そこで、本発明は前記従来の問題を解決す
るためになされたものであり、情報記録部が分離され、
且つ、表面の凹凸が実質的に無い磁気記録媒体を微細加
工技術を用いることなく作製できる磁気記録媒体の製造
方法を提供するものである。Therefore, the present invention has been made to solve the above-mentioned conventional problems, in which the information recording section is separated,
Further, the present invention provides a method of manufacturing a magnetic recording medium that can be manufactured without using a microfabrication technique, so that the magnetic recording medium having substantially no surface irregularities can be manufactured.
【００１４】[0014]
【課題を解決するための手段】前記目的を達成するた
め、本発明の磁気記録媒体の製造方法は、非磁性基板
と、前記非磁性基板上に設けられた、加熱により磁性膜
中に拡散する材料からなる拡散種層と、前記拡散種層上
に設けられた磁気記録層とを少なくとも備え、前記磁気
記録層が、情報の蓄積を行う情報記録部と、前記情報記
録部を分離するための分離帯とからなる連続膜で形成さ
れた磁気記録媒体の製造方法であって、前記非磁性基板
上に前記拡散種層を形成する工程と、前記拡散種層上に
磁性膜を形成する工程と、前記磁性膜の分離帯に相当す
る部分を加熱することにより、加熱部に前記拡散種層の
材料を拡散させ、前記磁性膜の分離帯に相当する部分の
磁化を減少させる工程とを有することを特徴とする。In order to achieve the above object, a method of manufacturing a magnetic recording medium according to the present invention comprises a non-magnetic substrate and a magnetic film provided on the non-magnetic substrate and diffused in a magnetic film by heating. At least a diffusion seed layer made of a material and a magnetic recording layer provided on the diffusion seed layer, wherein the magnetic recording layer separates the information recording section for storing information from the information recording section A method of manufacturing a magnetic recording medium formed of a continuous film including a separation band, the method comprising: forming the diffusion seed layer on the non-magnetic substrate; and forming a magnetic film on the diffusion seed layer. Heating the portion of the magnetic film corresponding to the separation band to diffuse the material of the diffusion seed layer in the heating portion and reduce the magnetization of the portion of the magnetic film corresponding to the separation band. Is characterized by.
【００１５】これにより、構造的に連続した磁性膜中に
情報記録領域が分離独立した構造を、微細加工技術を用
いることなく形成することが可能であり、また、磁性膜
表面の凹凸が実質的にない磁気記録媒体を実現すること
ができる。Thus, it is possible to form a structure in which information recording areas are separated and independent in a structurally continuous magnetic film without using a fine processing technique, and unevenness on the surface of the magnetic film is substantially formed. It is possible to realize a magnetic recording medium that does not exist.
【００１６】また、本発明の磁気記録媒体の製造方法
は、前記磁性膜の分離帯に相当する部分を加熱すること
により、加熱部に前記拡散種層の材料を拡散させ、前記
磁性膜の分離帯に相当する部分の磁化を減少させる工程
において、前記分離帯への加熱が、光又は電子ビーム又
はイオンビームを各分離帯に相当する部分に照射するこ
とにより行うことが好ましい。これにより、微小部分の
加熱を正確に且つ容易に行うことができる。Further, in the method for manufacturing a magnetic recording medium of the present invention, the material corresponding to the separation zone of the magnetic film is heated to diffuse the material of the diffusion seed layer in the heating portion to separate the magnetic film. In the step of reducing the magnetization of the portions corresponding to the bands, it is preferable that the heating of the separation bands is performed by irradiating the portions corresponding to the respective separation bands with a light, an electron beam or an ion beam. This makes it possible to accurately and easily heat the minute portion.
【００１７】また、本発明の磁気記録媒体の製造方法
は、前記磁性膜の分離帯に相当する部分を加熱すること
により、加熱部に前記拡散種層の材料を拡散させ、前記
磁性膜の分離帯に相当する部分の磁化を減少させる工程
において、前記分離帯への加熱が、フォトマスクを介し
て光を各分離帯に相当する部分に照射することにより一
括して行うことが好ましい。これにより、微小部分の加
熱を一回の光の照射で短時間に且つ正確に行うことがで
きる。Further, in the method for manufacturing a magnetic recording medium of the present invention, the material corresponding to the separation zone of the magnetic film is heated to diffuse the material of the diffusion seed layer in the heating portion to separate the magnetic film. In the step of reducing the magnetization of the portions corresponding to the bands, it is preferable that the heating of the separation bands is performed collectively by irradiating the portions corresponding to the separation bands with light via a photomask. As a result, it is possible to accurately heat the minute portion in a short time by irradiating light once.
【００１８】[0018]
【発明の実施の形態】以下、本発明の磁気記録媒体の製
造方法の実施の形態について説明する。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a method for manufacturing a magnetic recording medium of the present invention will be described below.
【００１９】本発明の磁気記録媒体の製造方法は、非磁
性基板と、前記非磁性基板上に設けられた、加熱により
磁性膜中に拡散する材料からなる拡散種層と、前記拡散
種層上に設けられた磁気記録層とを少なくとも備え、前
記磁気記録層が、情報の蓄積を行う情報記録部と、前記
情報記録部を分離するための分離帯とからなる連続膜で
形成された磁気記録媒体の製造方法であって、前記非磁
性基板上に前記拡散種層を形成する工程と、前記拡散種
層上に磁性膜を形成する工程と、前記磁性膜の分離帯に
相当する部分を加熱することにより、加熱部に前記拡散
種層の材料を拡散させ、前記磁性膜の分離帯に相当する
部分の磁化を減少させる工程とを有する。A method of manufacturing a magnetic recording medium according to the present invention comprises a non-magnetic substrate, a diffusion seed layer provided on the non-magnetic substrate, the diffusion seed layer being made of a material that diffuses into a magnetic film by heating, and the diffusion seed layer. At least a magnetic recording layer provided in the magnetic recording layer, the magnetic recording layer being a continuous film formed of an information recording section for storing information and a separation band for separating the information recording section. A method of manufacturing a medium, comprising: forming the diffusion seed layer on the non-magnetic substrate; forming a magnetic film on the diffusion seed layer; and heating a portion corresponding to a separation band of the magnetic film. By doing so, the step of diffusing the material of the diffusion seed layer in the heating portion and reducing the magnetization of the portion corresponding to the separation band of the magnetic film.
【００２０】先ず、本発明の拡散種層について説明す
る。この拡散種層は加熱により磁性膜中に拡散する材料
からなる。すなわち、加熱により隣接した磁性膜中に、
この拡散種層の材料が拡散していき、その磁性膜の磁化
を減少させるものである。この際、前記拡散種層の材料
は、単純希釈以上に磁性膜の磁化を減少させる材料であ
ることが望ましい。例えば、磁性膜の材料として公知の
Ｃｏを含む合金等を用いた場合、拡散種層の材料として
は、Ｃｒ、Ｖ、Ｍｎなどの単体金属又はこれらを含む合
金等が挙げられる。First, the diffusion seed layer of the present invention will be described. This diffusion seed layer is made of a material that diffuses into the magnetic film by heating. That is, in the adjacent magnetic film by heating,
The material of the diffusion seed layer diffuses to reduce the magnetization of the magnetic film. At this time, the material of the diffusion seed layer is preferably a material that reduces the magnetization of the magnetic film more than simple dilution. For example, when a known alloy containing Co or the like is used as the material of the magnetic film, the material of the diffusion seed layer may be a single metal such as Cr, V, or Mn, or an alloy containing these.
【００２１】本発明で使用する磁性膜としては、Ｃｏ−
Ｃｒ、Ｃｏ−Ｃ、Ｃｏ−Ａｇ、Ｃｏ−Ｂｉ、Ｃｏ−Ｐ
ｂ、Ｃｏ−Ｋ、Ｃｏ−Ｉｎ、Ｃｏ−Ｍｇ、Ｃｏ−Ｐｂ、
Ｃｏ−Ａｕ、Ｃｏ−Ｐｔ、Ｆｅ−Ｉｎ、Ｆｅ−Ｍｇ、Ｆ
ｅ−Ｃｕ、Ｆｅ−Ａｇ、Ｆｅ−Ｂｉ、Ｆｅ−Ｎａ、Ｆｅ
−Ｌｉ、Ｆｅ−Ｋ、Ｆｅ−Ｃｒなどを主たる成分とする
膜や、Ｃｏ又はＦｅを主たる磁性元素とし、ＳｉＯ2な
どの酸化物、ＳｉＮなどの窒化物、あるいはＳｉＣなど
の炭化物とからなるグラニュラー膜などが適している。
この中でも特にＣｏ−Ｃｒ、Ｃｏ−Ｐｔ、Ｆｅ−Ｐｔ
は、高い保磁力が得られる点で好ましい。The magnetic film used in the present invention is Co-
Cr, Co-C, Co-Ag, Co-Bi, Co-P
b, Co-K, Co-In, Co-Mg, Co-Pb,
Co-Au, Co-Pt, Fe-In, Fe-Mg, F
e-Cu, Fe-Ag, Fe-Bi, Fe-Na, Fe
-Li, Fe-K, and film and Fe-Cr, etc. The main component, and Co or Fe as a main magnetic element, an oxide such as SiO 2, nitrides such as SiN, or a carbide such as SiC granular Membranes are suitable.
Among these, especially Co-Cr, Co-Pt, Fe-Pt
Is preferable in that a high coercive force can be obtained.
【００２２】また、本発明で使用する非磁性基板として
は、アルミニウム合金基板、ガラス基板、シリコン基板
等が挙げられる。Further, examples of the non-magnetic substrate used in the present invention include an aluminum alloy substrate, a glass substrate and a silicon substrate.
【００２３】次に、本発明の磁気記録媒体の製造方法の
工程を図１に基づき説明する。先ず洗浄された非磁性基
板１上に、拡散種層２及び磁性膜３を順次形成（図１
（ａ））した後、情報の蓄積を行う情報記録部を分離す
る分離帯の形成予定領域を、光などの加熱手段４により
局所的に加熱する（図１（ｂ））。加熱された領域で
は、拡散種層２の材料が磁性膜３中に拡散し、磁性膜３
の磁化が減少するか、又は非磁性となる。この領域は、
情報記録部５となる領域よりも磁化が減少するか、又は
磁化がない領域であり、情報記録部５を分離する分離帯
６となる。これにより、図１（ｃ）に示すように、磁気
記録領域が磁気的に分離独立した構造を有する磁気記録
媒体７が得られる。Next, the steps of the method for manufacturing the magnetic recording medium of the present invention will be described with reference to FIG. First, the diffusion seed layer 2 and the magnetic film 3 are sequentially formed on the washed non-magnetic substrate 1 (see FIG. 1).
After (a)), the area where the separation band is to be formed, which separates the information recording portion for accumulating information, is locally heated by the heating means 4 such as light (FIG. 1 (b)). In the heated region, the material of the diffusion seed layer 2 diffuses into the magnetic film 3 and
Magnetization decreases or becomes non-magnetic. This area is
This is a region in which the magnetization decreases or is non-magnetized as compared with the region that becomes the information recording unit 5, and serves as a separation band 6 that separates the information recording unit 5. As a result, as shown in FIG. 1C, a magnetic recording medium 7 having a structure in which the magnetic recording regions are magnetically separated and independent is obtained.
【００２４】情報記録部５を分離するための分離帯６と
なる領域の磁化は、情報記録部５の飽和磁化の５０％以
下になっていることが好ましく、非磁性になっているこ
とがより好ましい。The magnetization of the area which becomes the separation band 6 for separating the information recording section 5 is preferably 50% or less of the saturation magnetization of the information recording section 5, and more preferably non-magnetic. preferable.
【００２５】前記分離帯への加熱は、ビーム径を収束さ
せたレーザービームや電子ビームやイオンビームなどを
走査して、各分離帯に相当する部分に照射することによ
り行う。また、前記分離帯への加熱の他の方法として、
フォトマスクを介してＵＶ光などを照射することにより
一括して行うこともできる。The heating of the separation bands is performed by scanning a laser beam, an electron beam, an ion beam, or the like having a converged beam diameter, and irradiating a portion corresponding to each separation band. In addition, as another method of heating the separation zone,
It can also be performed collectively by irradiating UV light or the like through a photomask.
【００２６】この方法によると、構造的に連続した磁気
記録膜中に、情報記録領域が分離独立した構造を、微細
加工技術を用いることなく形成することが可能であり、
また、磁性膜表面の凹凸を実質的になくすことができ
る。According to this method, it is possible to form a structure in which the information recording areas are separated and independent from each other in the structurally continuous magnetic recording film without using a fine processing technique.
Moreover, the unevenness on the surface of the magnetic film can be substantially eliminated.
【００２７】なお、情報記録部は、同心円状帯形状のみ
ならずスパイラル状、あるいは周方向及び半径方向に間
隔をおいて配置された多数の記録部であってもよい。The information recording section may be not only a concentric circular band shape but also a spiral shape or a large number of recording sections arranged at intervals in the circumferential direction and the radial direction.
【００２８】[0028]
【実施例】以下、実施例に基づき本発明を具体的に説明
する。EXAMPLES The present invention will be specifically described below based on examples.
【００２９】（実施例１）図２は本実施例における磁気
記録媒体の製造方法の一例を示す工程断面図である。図
２を参照しながら、本実施例の磁気記録媒体の製造方法
を説明する。(Embodiment 1) FIG. 2 is a process sectional view showing an example of a method of manufacturing a magnetic recording medium in this embodiment. A method of manufacturing the magnetic recording medium of this embodiment will be described with reference to FIG.
【００３０】先ず、図２（ａ）に示すように、６５ｍｍ
径のガラス基板８上に、到達真空度２×１０-7Ｐａ、Ａ
ｒガス圧０．１３Ｐａの条件でスパッタ法により、膜厚
１００ｎｍのＣｒ膜を成膜して拡散種層９とした。次
に、その上に上記と同じ条件で、膜厚２０ｎｍの７６原
子％Ｃｏ−１２原子％Ｃｒ−１２原子％Ｐｔからなる膜
を成膜して磁性膜１０とした。成膜した磁性膜１０を、
ＶＳＭ（振動試料型磁束計）により磁化測定を行ったと
ころ、残留磁化は５００ｋＡ／ｍであった。First, as shown in FIG. 2 (a), 65 mm
On the glass substrate 8 having a diameter of 2 × 10 −7 Pa, A
A Cr film having a film thickness of 100 nm was formed as a diffusion seed layer 9 by a sputtering method under the condition of r gas pressure of 0.13 Pa. Then, a film of 76 at% Co-12 at% Cr-12 at% Pt having a film thickness of 20 nm was formed thereon under the same conditions as above to form a magnetic film 10. The formed magnetic film 10 is
When the magnetization was measured by a VSM (vibrating sample type magnetometer), the residual magnetization was 500 kA / m.
【００３１】続いて、図２（ｂ−１）〜（ｂ−３）に示
すように、レーザービーム１１を用いて分離帯予定領域
を、順次、加熱した。レーザービーム１１は、波長０．
６８μｍ、パワー１０ｍＷのレーザーを直径０．５μｍ
に収束させて用いた。走査速度は２ｍ／ｓｅｃとした。
このときの加熱温度は４５０℃であった。レーザービー
ム１１は、加熱部幅０．５μｍ、非加熱部幅１μｍ、ピ
ッチ１．５μｍの同心円状に走査した。Subsequently, as shown in FIGS. 2 (b-1) to 2 (b-3), the laser beam 11 was used to sequentially heat the regions to be separated zones. The laser beam 11 has a wavelength of 0.
Laser with a diameter of 68 μm and a power of 10 mW is 0.5 μm
It was used after converging to. The scanning speed was 2 m / sec.
The heating temperature at this time was 450 ° C. The laser beam 11 was scanned concentrically with a heated portion width of 0.5 μm, a non-heated portion width of 1 μm, and a pitch of 1.5 μm.
【００３２】加熱後、磁性膜１０の表面形状をＡＦＭ
（原子間力顕微鏡）により観察したところ、加熱部と非
加熱部に段差は確認されなかった。また、磁性膜１０の
磁化状態をＭＦＭ（磁気力顕微鏡）により観察したとこ
ろ、レーザービーム１１の走査部に応じた非磁性領域と
磁性領域のパターンが観察された。After heating, the surface shape of the magnetic film 10 is AFM.
When observed with an (atomic force microscope), no step was observed between the heated part and the non-heated part. Further, when the magnetization state of the magnetic film 10 was observed by an MFM (magnetic force microscope), a pattern of the nonmagnetic region and the magnetic region corresponding to the scanning portion of the laser beam 11 was observed.
【００３３】これにより、図２（ｃ）に示すように、情
報記録部１４が分離帯１５によって分離独立した構造を
有する磁気記録媒体１６が得られたことが確認された。
ここで、全面加熱した試料の磁化をＶＳＭ（振動試料型
磁束計）により測定したところ、５０ｋＡ／ｍであっ
た。As a result, as shown in FIG. 2C, it was confirmed that a magnetic recording medium 16 having a structure in which the information recording section 14 was separated and separated by the separation band 15 was obtained.
Here, when the magnetization of the sample heated on the entire surface was measured by a VSM (vibrating sample type magnetometer), it was 50 kA / m.
【００３４】なお、加熱手段としてレーザービームに代
えて電子ビーム又はイオンビームを用いても、同じ結果
が得られた。The same result was obtained by using an electron beam or an ion beam instead of the laser beam as the heating means.
【００３５】（実施例２）図３は本実施例における磁気
記録媒体の製造方法の一例を示す工程断面図である。図
３を参照しながら、本実施例の磁気記録媒体の製造方法
を説明する。(Embodiment 2) FIG. 3 is a process sectional view showing an example of a method of manufacturing a magnetic recording medium in this embodiment. A method of manufacturing the magnetic recording medium of this embodiment will be described with reference to FIG.
【００３６】先ず、図３（ａ）に示すように、６５ｍｍ
径のガラス基板８上に、到達真空度２×１０-7Ｐａ、Ａ
ｒガス圧０．１３Ｐａの条件でスパッタ法により、膜厚
１００ｎｍのＣｒ膜を成膜して拡散種層９とし、その上
に上記と同じ条件で、膜厚２０ｎｍの７６原子％Ｃｏ−
１２原子％Ｃｒ−１２原子％Ｐｔからなる膜を成膜し磁
性膜１０とした。成膜した磁性膜１０を、ＶＳＭ（振動
試料型磁束計）により磁化測定を行ったところ、残留磁
化は５００ｋＡ／ｍであった。First, as shown in FIG. 3 (a), 65 mm
On the glass substrate 8 having a diameter of 2 × 10 −7 Pa, A
A Cr film having a film thickness of 100 nm was formed as a diffusion seed layer 9 by a sputtering method under the condition of r gas pressure of 0.13 Pa, and a 76 atomic% Co-film having a film thickness of 20 nm was formed thereon under the same conditions as above.
A film made of 12 atom% Cr-12 atom% Pt was formed as the magnetic film 10. When the magnetization of the formed magnetic film 10 was measured by a VSM (vibrating sample type magnetometer), the residual magnetization was 500 kA / m.
【００３７】次に、図３（ｂ）に示すように、ガラス基
板上にＣｒマスクを形成したフォトマスク１２を通して
ＵＶ光１３を照射し、磁性膜１０の分離帯予定領域を加
熱した。フォトマスク１２には、露光部幅０．５μｍ、
非露光部幅１μｍ、ピッチ１．５μｍの同心円状のパタ
ーンを配列した。ＵＶ光１３は、波長０．３６５μｍ、
パワー３０００Ｗとし、これにより磁性膜１０の照射部
を６００℃に加熱した。Next, as shown in FIG. 3B, UV light 13 was radiated through a photomask 12 having a Cr mask formed on a glass substrate to heat a region of the magnetic film 10 where a separation band was planned. The photomask 12 has an exposed portion width of 0.5 μm,
Concentric patterns having an unexposed portion width of 1 μm and a pitch of 1.5 μm were arranged. UV light 13 has a wavelength of 0.365 μm,
The power was set to 3000 W, whereby the irradiation part of the magnetic film 10 was heated to 600 ° C.
【００３８】加熱後、磁性膜１０の表面形状をＡＦＭ
（原子間力顕微鏡）により観察したところ、加熱部と非
加熱部に段差は確認されなかった。また、磁性膜１０の
磁化状態をＭＦＭ（磁気力顕微鏡）により観察したとこ
ろ、レーザービームの走査部に応じた非磁性領域と磁性
領域のパターンが観察された。After heating, the surface shape of the magnetic film 10 is AFM.
When observed with an (atomic force microscope), no step was observed between the heated part and the non-heated part. Further, when the magnetization state of the magnetic film 10 was observed by an MFM (magnetic force microscope), a pattern of the nonmagnetic region and the magnetic region corresponding to the scanning portion of the laser beam was observed.
【００３９】これにより、図３（ｃ）に示すように、情
報記録部１４が分離帯１５によって分離独立した構造を
有する磁気記録媒体１６が得られたことが確認された。
ここで、全面加熱した試料の磁化をＶＳＭ（振動試料型
磁束計）により測定したところ、５０ｋＡ／ｍであっ
た。As a result, as shown in FIG. 3C, it was confirmed that the magnetic recording medium 16 having a structure in which the information recording section 14 was separated and separated by the separation band 15 was obtained.
Here, when the magnetization of the sample heated on the entire surface was measured by a VSM (vibrating sample type magnetometer), it was 50 kA / m.
【００４０】以上のように本発明では、情報記録部１４
と分離帯１５は同一の膜から形成するので、磁性膜表面
の凹凸は実質的になく、望ましい表面形状が得られる。As described above, in the present invention, the information recording unit 14
Since the separation band 15 and the separation band 15 are formed of the same film, there is substantially no unevenness on the surface of the magnetic film, and a desired surface shape can be obtained.
【００４１】[0041]
【発明の効果】以上のように本発明の磁気記録媒体の製
造方法によれば、構造的に連続した磁性膜中に、情報記
録領域が分離独立した構造を、微細加工技術を用いるこ
となく形成することが可能であり、また、磁性膜表面の
凹凸が実質的にない磁気記録媒体を実現することができ
る。As described above, according to the method of manufacturing a magnetic recording medium of the present invention, a structure in which information recording areas are separated and independent is formed in a structurally continuous magnetic film without using a fine processing technique. It is also possible to realize a magnetic recording medium having substantially no unevenness on the surface of the magnetic film.
【図１】本発明の磁気記録媒体の製造方法の実施形態を
示す工程断面図である。FIG. 1 is a process sectional view showing an embodiment of a method for manufacturing a magnetic recording medium of the present invention.
【図２】実施例１における磁気記録媒体の製造方法を示
す工程断面図である。2A to 2D are process cross-sectional views showing a method of manufacturing a magnetic recording medium in Example 1. FIGS.
【図３】実施例２における磁気記録媒体の製造方法を示
す工程断面図である。FIG. 3 is a process cross-sectional view showing the method of manufacturing the magnetic recording medium in Example 2.
【図４】従来の磁気記録媒体の製造方法の一例を示す工
程断面図である。FIG. 4 is a process sectional view showing an example of a conventional method of manufacturing a magnetic recording medium.
【図５】従来の磁気記録媒体の製造方法の一例を示す工
程断面図である。FIG. 5 is a process cross-sectional view showing an example of a conventional magnetic recording medium manufacturing method.
１ 非磁性基板 ２ 拡散種層 ３ 磁性膜 ４ 加熱手段 ５ 情報記録部 ６ 分離帯 ７ 磁気記録媒体 ８ ガラス基板 ９ 拡散種層 １０ 磁性膜 １１ レーザービーム １２ フォトマスク １３ ＵＶ光 １４ 情報記録部 １５ 分離帯 １６ 磁気記録媒体 ２１ 非磁性基板 ２２ フォトレジスト ２３ 磁性膜 ２４ 情報記録部 ２５ 磁気記録媒体 1 Non-magnetic substrate 2 diffusion seed layer 3 Magnetic film 4 heating means 5 Information recording section 6 Separators 7 Magnetic recording media 8 glass substrates 9 Diffusion seed layer 10 Magnetic film 11 laser beam 12 Photomask 13 UV light 14 Information recording section 15 Separators 16 Magnetic recording medium 21 Non-magnetic substrate 22 photoresist 23 Magnetic film 24 Information recording section 25 magnetic recording media
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 5D006 BB07 CA01 CB04 DA03 EA03 FA09 5D112 AA03 AA05 AA24 FA04 GA19 ─────────────────────────────────────────────────── ─── Continued front page F-term (reference) 5D006 BB07 CA01 CB04 DA03 EA03 FA09 5D112 AA03 AA05 AA24 FA04 GA19
Claims (3)
られた、加熱により磁性膜中に拡散する材料からなる拡
散種層と、前記拡散種層上に設けられた磁気記録層とを
少なくとも備え、前記磁気記録層が、情報の蓄積を行う
情報記録部と、前記情報記録部を分離するための分離帯
とからなる連続膜で形成された磁気記録媒体の製造方法
であって、前記非磁性基板上に前記拡散種層を形成する
工程と、前記拡散種層上に磁性膜を形成する工程と、前
記磁性膜の分離帯に相当する部分を加熱することによ
り、加熱部に前記拡散種層の材料を拡散させ、前記磁性
膜の分離帯に相当する部分の磁化を減少させる工程とを
有することを特徴とする磁気記録媒体の製造方法。1. A non-magnetic substrate, a diffusion seed layer formed on the non-magnetic substrate and made of a material that diffuses into a magnetic film by heating, and a magnetic recording layer provided on the diffusion seed layer. A method for manufacturing a magnetic recording medium, comprising at least the magnetic recording layer, wherein the magnetic recording layer is formed of a continuous film composed of an information recording section for storing information and a separation band for separating the information recording section, The step of forming the diffusion seed layer on the non-magnetic substrate, the step of forming a magnetic film on the diffusion seed layer, and the step of heating the portion corresponding to the separation band of the magnetic film to cause the diffusion to the heating portion. A step of diffusing the material of the seed layer to reduce the magnetization of a portion corresponding to the separation band of the magnetic film.
熱することにより、加熱部に前記拡散種層の材料を拡散
させ、前記磁性膜の分離帯に相当する部分の磁化を減少
させる工程において、前記分離帯への加熱が、光又は電
子ビーム又はイオンビームを各分離帯に相当する部分に
照射することにより行う請求項１に記載の磁気記録媒体
の製造方法。2. A step of diffusing the material of the diffusion seed layer in a heating portion by heating a portion of the magnetic film corresponding to a separation band to reduce magnetization of a portion of the magnetic film corresponding to a separation band. 2. The method for manufacturing a magnetic recording medium according to claim 1, wherein the heating of the separation band is performed by irradiating a portion corresponding to each separation band with a light beam, an electron beam, or an ion beam.
熱することにより、加熱部に前記拡散種層の材料を拡散
させ、前記磁性膜の分離帯に相当する部分の磁化を減少
させる工程において、前記分離帯への加熱が、フォトマ
スクを介して光を各分離帯に相当する部分に照射するこ
とにより一括して行う請求項１に記載の磁気記録媒体の
製造方法。3. A step of diffusing the material of the diffusion seed layer in a heating portion by heating a portion of the magnetic film corresponding to a separation band to reduce magnetization of a portion of the magnetic film corresponding to a separation band. 2. The method of manufacturing a magnetic recording medium according to claim 1, wherein the heating of the separation bands is performed collectively by irradiating a portion corresponding to each separation band with light through a photomask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001215570A JP2003030827A (en) | 2001-07-16 | 2001-07-16 | Method of manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001215570A JP2003030827A (en) | 2001-07-16 | 2001-07-16 | Method of manufacturing magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003030827A true JP2003030827A (en) | 2003-01-31 |
Family
ID=19050186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001215570A Withdrawn JP2003030827A (en) | 2001-07-16 | 2001-07-16 | Method of manufacturing magnetic recording medium |
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| Country | Link |
|---|---|
| JP (1) | JP2003030827A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007242182A (en) * | 2006-03-10 | 2007-09-20 | Fujitsu Ltd | Method for manufacturing magnetic recording medium, and magnetic recording medium |
| JP2008084433A (en) * | 2006-09-27 | 2008-04-10 | Hoya Corp | Manufacturing method of magnetic recording medium |
| JP2009026384A (en) * | 2007-07-19 | 2009-02-05 | Sharp Corp | Magnetic recording medium, manufacturing method of magnetic recording medium, and magnetic information recording method |
| US7586830B2 (en) | 2005-04-05 | 2009-09-08 | Canon Kabushiki Kaisha | Magnetic recording medium and manufacturing method therefor |
-
2001
- 2001-07-16 JP JP2001215570A patent/JP2003030827A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7586830B2 (en) | 2005-04-05 | 2009-09-08 | Canon Kabushiki Kaisha | Magnetic recording medium and manufacturing method therefor |
| JP2007242182A (en) * | 2006-03-10 | 2007-09-20 | Fujitsu Ltd | Method for manufacturing magnetic recording medium, and magnetic recording medium |
| JP2008084433A (en) * | 2006-09-27 | 2008-04-10 | Hoya Corp | Manufacturing method of magnetic recording medium |
| US9005699B2 (en) | 2006-09-27 | 2015-04-14 | WD Media, LLC | Method for manufacturing magnetic recording medium |
| JP2009026384A (en) * | 2007-07-19 | 2009-02-05 | Sharp Corp | Magnetic recording medium, manufacturing method of magnetic recording medium, and magnetic information recording method |
| JP4694536B2 (en) * | 2007-07-19 | 2011-06-08 | シャープ株式会社 | Magnetic recording medium, method for manufacturing magnetic recording medium, and magnetic information recording method |
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