JP2002363614A - Sintering die of electric pressure sintering apparatus - Google Patents
Sintering die of electric pressure sintering apparatusInfo
- Publication number
- JP2002363614A JP2002363614A JP2001178057A JP2001178057A JP2002363614A JP 2002363614 A JP2002363614 A JP 2002363614A JP 2001178057 A JP2001178057 A JP 2001178057A JP 2001178057 A JP2001178057 A JP 2001178057A JP 2002363614 A JP2002363614 A JP 2002363614A
- Authority
- JP
- Japan
- Prior art keywords
- sintering
- mold
- powder
- die
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、通電加圧焼結装置
の焼結型に関する。通電加圧焼結装置は、内部に金属や
セラミックス等の粉末が入れられた焼結型内の粉末を加
圧しながら通電し、通電により焼結型や粉末を発熱させ
て、粉末を加熱焼結させるための装置である。本発明
は、かかる通電加圧焼結装置の焼結型に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sintering die for an electric pressure sintering apparatus. The current-pressing sintering device pressurizes and pressurizes the powder in the sintering mold in which powder of metal, ceramics, etc. is placed, and heats and sinters the powder by heating the sintering mold and powder. It is a device for making it. The present invention relates to a sintering die for such an electric pressure sintering apparatus.
【0002】[0002]
【従来の技術】図2は従来の通電加圧焼結装置の焼結型
180 の縦断面図である。同図に示すように、従来の焼結
型180 はモールド181 および上下一対のダイス182 ,18
3 から構成されたものである。モールド181 は、素材が
カーボングラファイトであり、中空部分を備えた円筒状
に形成されたものである。各ダイス182 ,183 は、素材
がカーボングラファイトであり、モールド181 の中空部
分と同一径の円柱状に形成されたものである。この上下
一対のダイス182 ,183 には、直流電源の正極負極がそ
れぞれ接続されている。このため、モールド181 の中空
部分における上下一対のダイス182 ,183 間の空間に、
銅(Cu)やニッケル(Ni)、アルミナ(Al2O3)
等の粉末mを気密に収容して、上下のダイス182 ,183
によって粉末mを加圧しながら上下のダイス182 ,183
に通電すれば、焼結型180 が発熱するので、粉末mを加
圧焼結することができる。2. Description of the Related Art FIG. 2 shows a sintering mold of a conventional electric pressure sintering apparatus.
FIG. 180 is a longitudinal sectional view of FIG. As shown in the figure, a conventional sintering die 180 includes a mold 181 and a pair of upper and lower dies 182, 18.
It consists of three. The mold 181 is made of carbon graphite, and is formed in a cylindrical shape having a hollow portion. Each of the dies 182 and 183 is made of carbon graphite, and is formed in a cylindrical shape having the same diameter as the hollow portion of the mold 181. The pair of dies 182, 183 are connected to the positive and negative electrodes of a DC power supply, respectively. Therefore, in the space between the pair of upper and lower dies 182, 183 in the hollow portion of the mold 181,
Copper (Cu), nickel (Ni), alumina (Al 2 O 3 )
, 182, 183
Upper and lower dies 182, 183 while pressing powder m
When the power is supplied to the sintering device 180, the sintering mold 180 generates heat, so that the powder m can be sintered under pressure.
【0003】[0003]
【発明が解決しようとする課題】しかるに、従来の焼結
型180 では、その内部および粉末mの内部の温度分布が
通電径路により異なるが、導電性の良い材料を焼結した
場合には、通電している電流の殆どが最短かつ通電し易
い部分を流れる。つまり、上方のダイス182 から粉末m
内を通って下方のダイス183 に流れてしまう。すると、
モールド181 に流れる電流が少なくなり、モールド181
はほとんど発熱せず、粉末mは、その内部からの発熱に
よってのみ加熱されることになる。このため、粉末mの
内部において、その中央部と外周部との間に大きな温度
勾配ができてしまい、焼結された焼結品には、その内部
に焼結状態や密度のバラツキが生じるという問題があ
る。However, in the conventional sintering mold 180, the temperature distribution in the inside and the inside of the powder m differ depending on the energization path. Most of the current flows through the shortest and easily energized portions. That is, the powder m
It flows through the inside to the lower die 183. Then
The current flowing through the mold 181 decreases,
Hardly generates heat, and the powder m is heated only by the heat generated from inside. For this reason, inside the powder m, a large temperature gradient is generated between the central portion and the outer peripheral portion, and the sintered product has a sintering state and a variation in density inside the sintered product. There's a problem.
【0004】本発明はかかる事情に鑑み、導電性の良い
材料を焼結しても、粉末内部の温度分布を均一にするこ
とができる通電加圧焼結装置の焼結型を提供することを
目的とする。The present invention has been made in view of the above circumstances, and provides a sintering mold for an electric pressure sintering apparatus capable of making the temperature distribution inside a powder uniform even when sintering a material having good conductivity. Aim.
【0005】[0005]
【課題を解決するための手段】請求項1の通電加圧焼結
装置の焼結型は、通電加圧焼結装置の焼結型であって、
該焼結型が、中空部分を備えたモールドと、該モールド
の中空部分に挿入離脱自在に取り付けられた上下一対の
ダイスとからなり、前記モールドの中空部分において、
該モールドと上下一対のダイスによって焼結室が形成さ
れており、前記上下一対のダイスが、直流電源の正極負
極にそれぞれ接続されており、前記上下一対のダイスに
おいて、前記焼結室を形成する面に、温度が上昇すると
絶縁破壊する絶縁板が取り付けられたことを特徴とす
る。The sintering mold of the electric pressure sintering apparatus according to claim 1 is a sintering mold of the electric pressure sintering apparatus,
The sintering mold includes a mold having a hollow portion, and a pair of upper and lower dies attached to the hollow portion of the mold so as to be freely inserted and detached. In the hollow portion of the mold,
A sintering chamber is formed by the mold and a pair of upper and lower dies, and the pair of upper and lower dies are respectively connected to a positive electrode and a negative electrode of a DC power supply, and the sintering chamber is formed by the pair of upper and lower dies. An insulating plate, which breaks down when the temperature rises, is attached to the surface.
【0006】請求項1の発明によれば、上下のダイスに
おける焼結室を形成する面には絶縁板が取付けられてい
るので、焼結型の温度がある温度以下のときには、電流
は、粉末内部を流れずに、正極に接続されたダイスから
モールドを通って負極に接続されたダイスに向かって流
れる。このため、モールドが発熱し、粉末をその外周部
から加熱することができる。そして、焼結型の温度があ
る温度以上になれば、絶縁板が絶縁破壊し、電流は粉末
内を通って流れ、粉末自体が発熱し、粉末をその内部か
ら加熱することができる。つまり、温度が上昇しにくい
粉末の外周部の温度を上昇させてから、粉末の内部を粉
末自体の発熱によって加熱するので、焼結中における粉
末内部の温度分布を均一にすることができる。このた
め、焼結品の内部に、焼結状態や密度のバラツキが生じ
ることを防ぐことができ、焼結品の品質を向上すること
ができる。しかも、絶縁板の絶縁破壊する温度を変化さ
せれば、粉末をその内部から加熱する温度を変えること
ができるので、粉末の加熱状態を変化させることができ
る。According to the first aspect of the present invention, since the insulating plate is attached to the surface of the upper and lower dies forming the sintering chamber, when the temperature of the sintering mold is lower than a certain temperature, the electric current is reduced Rather than flowing inside, it flows from the die connected to the positive electrode through the mold to the die connected to the negative electrode. For this reason, the mold generates heat and the powder can be heated from the outer peripheral portion. When the temperature of the sintering mold becomes higher than a certain temperature, the insulating plate is broken down, the electric current flows through the powder, the powder itself generates heat, and the powder can be heated from the inside. That is, since the inside of the powder is heated by the heat generated by the powder itself after the temperature of the outer peripheral portion of the powder whose temperature is unlikely to rise is increased, the temperature distribution inside the powder during sintering can be made uniform. For this reason, it is possible to prevent the sintering state and the density from being varied within the sintered product, thereby improving the quality of the sintered product. In addition, by changing the temperature at which the insulating plate breaks down, the temperature at which the powder is heated from the inside can be changed, so that the heating state of the powder can be changed.
【0007】[0007]
【発明の実施の形態】つぎに、本発明の実施形態を図面
に基づき説明する。図1は本実施形態の焼結型80の縦
断面図である。同図に示すように、本実施形態の焼結型
80は、モールド81および上下一対のダイス82,8
3から構成されたものであり、上下一対のダイス82,
83において、焼結室Aを形成する面に、それぞれ絶縁
板95を取り付けたことが特徴である。Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a longitudinal sectional view of a sintering die 80 of the present embodiment. As shown in the figure, a sintering die 80 of the present embodiment includes a mold 81 and a pair of upper and lower dies 82 and 8.
3, a pair of upper and lower dies 82,
83 is characterized in that insulating plates 95 are attached to the surfaces forming the sintering chamber A, respectively.
【0008】図1に示すように、モールド81は、中空
部分を備えた円筒状に形成されたものであり、その素材
は例えばカーボングラファイトである。各ダイス82,
83は、モールド81の中空部分と同一径の円柱状に形
成されたものであり、その素材は例えばカーボングラフ
ァイトである。As shown in FIG. 1, a mold 81 is formed in a cylindrical shape having a hollow portion, and its material is, for example, carbon graphite. Each die 82,
83 is formed in a columnar shape having the same diameter as the hollow portion of the mold 81, and its material is, for example, carbon graphite.
【0009】前記モールド81の中空部分には、上方の
ダイス82の下端部、および下方のダイス83の上端部
が、それぞれ挿入離脱自在に取り付けられている。そし
て、モールド81の中空部分において、モールド81、
ダイス82の下端およびダイス83の上端で囲まれた部
分が焼結室Aとなっている。A lower end of an upper die 82 and an upper end of a lower die 83 are attached to the hollow portion of the mold 81 so that they can be inserted and removed. Then, in the hollow portion of the mold 81, the mold 81,
The portion surrounded by the lower end of the die 82 and the upper end of the die 83 is a sintering chamber A.
【0010】また、上方のダイス82の下端、つまり焼
結室Aを形成する面には、絶縁板95が取り付けられて
いる。この絶縁板95の素材は、例えばアルミナのファ
イバシートやボロンナイトライド、炭化珪素等であり、
常温では絶縁作用をし、一定の温度(例えば、1300
℃程度)以上の温度になると絶縁破壊(通電)するもの
である。下方のダイス82の上端、つまり焼結室Aを形
成する面にも、上記と同様の素材の絶縁板95が取り付
けられている。さらに、上下一対のダイス82, 83
は、直流電源の正極負極にそれぞれ接続されている。An insulating plate 95 is attached to a lower end of the upper die 82, that is, a surface on which the sintering chamber A is formed. The material of the insulating plate 95 is, for example, an alumina fiber sheet, boron nitride, silicon carbide, or the like.
At room temperature, it acts as an insulator, and at a certain temperature (for example, 1300
When the temperature reaches about (° C.) or higher, dielectric breakdown (energization) occurs. An insulating plate 95 made of the same material as described above is also attached to the upper end of the lower die 82, that is, the surface forming the sintering chamber A. Further, a pair of upper and lower dies 82, 83
Are connected to the positive and negative electrodes of a DC power supply, respectively.
【0011】つぎに、本実施形態の焼結型80の作用効
果を説明する。焼結型80の焼結室Aに、導電性の良い
材料である超硬合金や銅等の粉末mを収容する。そし
て、上下一対のダイス82,83によって粉末mを上下
から加圧しながら直流電源によってダイス82, 83に
通電する。Next, the operation and effect of the sintering die 80 of the present embodiment will be described. In the sintering chamber A of the sintering mold 80, a powder m of a material having good conductivity, such as a cemented carbide or copper, is stored. Then, while the powder m is pressed from above and below by a pair of upper and lower dies 82 and 83, the dies 82 and 83 are energized by a DC power supply.
【0012】このとき、上下一対のダイス82, 83に
おける焼結室Aを形成する面、つまり焼結室A内の粉末
と接する面には絶縁板95がそれぞれ取付けられている
ので、電流は絶縁板95を通過できず、上方のダイス8
2からモールド81を通って下方のダイス83に向かっ
て流れる。すると、モールド81および上下一対のダイ
ス82, 83が発熱し、粉末mは、その外周部から加熱
されるので、粉末mは、まず、その外周部の温度が上昇
する。At this time, since the insulating plates 95 are respectively attached to the surfaces of the upper and lower dies 82 and 83 which form the sintering chamber A, that is, the surfaces in contact with the powder in the sintering chamber A, the electric current is insulated. The upper die 8 cannot pass through the plate 95
2 flows through the mold 81 toward the lower die 83. Then, the mold 81 and the pair of upper and lower dies 82 and 83 generate heat, and the powder m is heated from the outer peripheral portion, so that the temperature of the powder m first increases at the outer peripheral portion.
【0013】やがて、焼結型80や粉末mの外周の温度
が上昇し、焼結型80や粉末mの外周からの熱によって
絶縁板95が加熱されて、絶縁板95が絶縁破壊する温
度以上になると、焼結室A内に収容された粉末mの導電
性が良いので、電流は絶縁板95を通過して通電経路の
短い粉末m内を通って流れる。このため、粉末m自体が
発熱し、粉末mは、その発熱によって中央部から加熱さ
れる。すると、粉末m全体が加熱されるが、温度が上昇
しにくい粉末mの外周部の温度が先に上昇しているの
で、焼結中における粉末m内部の温度分布が均一にな
り、粉末mは、その内部の温度分布が均一になった状態
で焼結される。Eventually, the temperature of the outer periphery of the sintering mold 80 or the powder m rises, and the heat from the outer periphery of the sintering mold 80 or the powder m heats the insulating plate 95, and exceeds the temperature at which the insulating plate 95 breaks down. Then, since the powder m contained in the sintering chamber A has good conductivity, the current flows through the insulating plate 95 and through the powder m having a short conduction path. For this reason, the powder m itself generates heat, and the powder m is heated from the center by the heat generation. Then, the entire powder m is heated, but since the temperature of the outer peripheral portion of the powder m whose temperature is unlikely to rise has risen first, the temperature distribution inside the powder m during sintering becomes uniform, and the powder m becomes Then, sintering is performed in a state where the temperature distribution inside is uniform.
【0014】よって、本実施形態の焼結型80によれ
ば、導電性の良い材料を焼結しても、粉末mが、その内
部の温度分布が均一になった状態で焼結されるので、焼
結品の内部に、焼結状態や密度のバラツキが生じること
を防ぐことができ、焼結品の品質を向上することができ
る。Therefore, according to the sintering mold 80 of the present embodiment, even when a material having good conductivity is sintered, the powder m is sintered in a state where the temperature distribution inside the powder m is uniform. In addition, it is possible to prevent variations in the sintering state and density from occurring inside the sintered product, thereby improving the quality of the sintered product.
【0015】しかも、絶縁板95の素材や厚さを変え
て、絶縁板95が絶縁破壊する温度を変化させれば、粉
末mをその内部からの加熱する温度を変えることができ
る。このため、焼結する粉末mの素材によって、粉末m
の加熱状況を変化させることができるし、焼結する焼結
品によって粉末mの加熱状態を変えることができる。Moreover, by changing the material and thickness of the insulating plate 95 and changing the temperature at which the insulating plate 95 breaks down, the temperature at which the powder m is heated from the inside can be changed. Therefore, depending on the material of the powder m to be sintered, the powder m
Can be changed, and the heating state of the powder m can be changed depending on the sintered product to be sintered.
【0016】[0016]
【発明の効果】請求項1の発明によれば、焼結中におけ
る粉末内部の温度分布を均一にすることができ、焼結品
の内部に、焼結状態や密度のバラツキが生じることを防
ぐことができ、焼結品の品質を向上することができる。
しかも、絶縁板の絶縁破壊する温度を変化させれば、粉
末をその内部からの加熱する温度を変えることができる
ので、粉末の加熱状態を変化させることができる。According to the first aspect of the invention, the temperature distribution inside the powder during sintering can be made uniform, and the sintering state and the density do not vary within the sintered product. It is possible to improve the quality of the sintered product.
In addition, by changing the temperature at which the insulating plate breaks down, the temperature at which the powder is heated from the inside can be changed, so that the heating state of the powder can be changed.
【図1】本実施形態の加圧焼結装置の焼結型80の縦断
面図である。FIG. 1 is a longitudinal sectional view of a sintering mold 80 of a pressure sintering apparatus of the present embodiment.
【図2】従来の加圧焼結装置の焼結型180 の縦断面図で
ある。FIG. 2 is a longitudinal sectional view of a sintering die 180 of a conventional pressure sintering apparatus.
80 焼結型 81 モールド 82 ダイス 83 ダイス 95 絶縁板 A 焼結室 Reference Signs List 80 Sintering mold 81 Mold 82 Dies 83 Dies 95 Insulating plate A Sintering chamber
Claims (1)
結型が、中空部分を備えたモールドと、該モールドの中
空部分に挿入離脱自在に取り付けられた上下一対のダイ
スとからなり、前記モールドの中空部分において、該モ
ールドと上下一対のダイスによって焼結室が形成されて
おり、前記上下一対のダイスが、直流電源の正極負極に
それぞれ接続されており、前記上下一対のダイスにおい
て、前記焼結室を形成する面に、温度が上昇すると絶縁
破壊する絶縁板が取り付けられたことを特徴とする通電
加圧焼結装置の焼結型。1. A sintering mold for an electric pressure sintering apparatus, wherein the sintering mold includes a mold having a hollow portion, and a pair of upper and lower dies which are removably inserted into and removed from the hollow portion of the mold. In the hollow portion of the mold, a sintering chamber is formed by the mold and a pair of upper and lower dies, and the pair of upper and lower dies are connected to a positive electrode and a negative electrode of a DC power supply, respectively. A sintering die for an electric current pressure sintering apparatus, wherein an insulating plate that breaks down when the temperature rises is attached to a surface forming the sintering chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001178057A JP3681993B2 (en) | 2001-06-13 | 2001-06-13 | Sintering die of the current pressure sintering equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001178057A JP3681993B2 (en) | 2001-06-13 | 2001-06-13 | Sintering die of the current pressure sintering equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002363614A true JP2002363614A (en) | 2002-12-18 |
JP3681993B2 JP3681993B2 (en) | 2005-08-10 |
Family
ID=19018808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001178057A Expired - Fee Related JP3681993B2 (en) | 2001-06-13 | 2001-06-13 | Sintering die of the current pressure sintering equipment |
Country Status (1)
Country | Link |
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JP (1) | JP3681993B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010222689A (en) * | 2009-03-25 | 2010-10-07 | Sumitomo Heavy Industries Techno-Fort Co Ltd | Sintering mold for electric pressurizing and sintering apparatus |
US8637379B2 (en) | 2009-10-08 | 2014-01-28 | Infineon Technologies Ag | Device including a semiconductor chip and a carrier and fabrication method |
JP2017095778A (en) * | 2015-11-26 | 2017-06-01 | 住友金属鉱山株式会社 | Spark plasma sintering mold and arc plasma sintering method |
US10790431B2 (en) | 2016-03-07 | 2020-09-29 | Furukawa Co., Ltd. | Method of manufacturing thermoelectric conversion material |
-
2001
- 2001-06-13 JP JP2001178057A patent/JP3681993B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010222689A (en) * | 2009-03-25 | 2010-10-07 | Sumitomo Heavy Industries Techno-Fort Co Ltd | Sintering mold for electric pressurizing and sintering apparatus |
US8637379B2 (en) | 2009-10-08 | 2014-01-28 | Infineon Technologies Ag | Device including a semiconductor chip and a carrier and fabrication method |
JP2017095778A (en) * | 2015-11-26 | 2017-06-01 | 住友金属鉱山株式会社 | Spark plasma sintering mold and arc plasma sintering method |
US10790431B2 (en) | 2016-03-07 | 2020-09-29 | Furukawa Co., Ltd. | Method of manufacturing thermoelectric conversion material |
Also Published As
Publication number | Publication date |
---|---|
JP3681993B2 (en) | 2005-08-10 |
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