JP2002277771A - Optical modulator - Google Patents
Optical modulatorInfo
- Publication number
- JP2002277771A JP2002277771A JP2001080542A JP2001080542A JP2002277771A JP 2002277771 A JP2002277771 A JP 2002277771A JP 2001080542 A JP2001080542 A JP 2001080542A JP 2001080542 A JP2001080542 A JP 2001080542A JP 2002277771 A JP2002277771 A JP 2002277771A
- Authority
- JP
- Japan
- Prior art keywords
- reflector
- electrode
- intermediate electrode
- voltage
- modulation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光変調装置に係
り、特に、静電気力によって反射板を変位させて光スイ
ッチングを行う光変調装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical modulator and, more particularly, to an optical modulator that performs optical switching by displacing a reflector by electrostatic force.
【０００２】[0002]
【従来の技術】この種の光変調装置として、反射板を構
成している片持ち梁を静電気力で撓ませることにより、
光の反射方向を変えて光スイッチング（変調）を行うデ
バイスと、それを用いた変調システムが K. E. Peterse
n により1977年に発表されている（Applied Physics Le
tters, Vol.31, No.8, pp.521〜523）。同様の片持ち梁
の反射板を用いる光変調装置は、例えば特公平7−56531
号公報にも開示されている。また、特開平7−49460号公
報には、円形の薄膜ダイアフラムで反射板を構成し、静
電気力でダイアフラムを変形させ、その焦点を変える光
変調装置が開示されている。2. Description of the Related Art As a light modulator of this type, a cantilever constituting a reflector is bent by electrostatic force.
KE Peterse is a device that performs optical switching (modulation) by changing the direction of light reflection and a modulation system using it.
n in 1977 (Applied Physics Le
tters, Vol. 31, No. 8, pp. 521-523). An optical modulator using a similar cantilever reflector is disclosed in, for example, Japanese Patent Publication No. 7-56531.
This is also disclosed in the official gazette. Japanese Patent Application Laid-Open No. 7-49460 discloses an optical modulator in which a reflector is formed by a circular thin-film diaphragm, the diaphragm is deformed by electrostatic force, and the focus is changed.
【０００３】[0003]
【発明が解決しようとする課題】反射板を変位させて光
の反射方向を変える光変調装置は、ディスプレイやプロ
ジェクタなどに使用されている。このような応用では、
反射板は表示画像の１つ１つの画素に対応付けられ、数
十乃至数百μmといった微小な大きさに形成される。Light modulators for changing the direction of light reflection by displacing a reflector are used in displays and projectors. In such applications,
The reflector is associated with each pixel of the display image and is formed in a minute size such as several tens to several hundreds μm.
【０００４】反射板の駆動方法には種々の方式がある
が、反射板を変形させるための力以外の力は不要である
こと、変位量を比較的大きく取れること、及び、低消費
電力であることから、静電気力が利用されることが多
い。反射板を導電性部材で形成して電極とし、反射板の
対向位置にさらに電極を設けて、それら電極間に電圧を
印加(ON)することで静電気力を作用させて反射板を対向
電極側に撓ませる。印加電圧を解除(OFF)すると、反射
板は自身のバネ性で復帰する。したがって、電圧のON/O
FFによって反射板を駆動することで光スイッチングがで
きることになる。すなわち、反射板と対向電極とで静電
アクチュエータを構成している。こういった静電アクチ
ュエータを用いた光変調装置は、前記特公平7-56531号
公報に開示されたもののほか種々提案されている。There are various methods of driving the reflector, but no force other than a force for deforming the reflector is required, a relatively large displacement can be obtained, and power consumption is low. For this reason, electrostatic force is often used. The reflector is made of a conductive material to serve as an electrode.An additional electrode is provided at a position facing the reflector, and a voltage is applied (ON) between the electrodes to apply an electrostatic force to move the reflector to the opposite electrode. To bend. When the applied voltage is released (OFF), the reflector returns to its own spring property. Therefore, voltage ON / O
Optical switching can be performed by driving the reflection plate by the FF. That is, the reflection plate and the counter electrode constitute an electrostatic actuator. Various light modulators using such an electrostatic actuator have been proposed in addition to the one disclosed in Japanese Patent Publication No. 7-56531.
【０００５】ところで、反射板の変位量を大きくしたい
場合には、反射板と対向電極との距離を大きくしなけれ
ばならない。しかし、電極間に作用する静電気力の強さ
は電極間の距離の２乗に反比例するため、反射板と対向
電極の距離を大きくすると駆動電圧の大幅な上昇を招く
という問題があった。In order to increase the displacement of the reflector, the distance between the reflector and the counter electrode must be increased. However, since the strength of the electrostatic force acting between the electrodes is inversely proportional to the square of the distance between the electrodes, there is a problem that increasing the distance between the reflector and the counter electrode causes a significant increase in the driving voltage.
【０００６】また、反射板と対向電極との間に、反射板
が変位振動するスペース（以下、ギャップと記す）が確
保されるが、このギャップ内部の空気が反射板の変位に
伴って圧縮されて圧力が上昇する現象（エアダンパ効果
と呼ぶ）が起こる。このエアダンパ効果のために、ギャ
ップ内が空気がない条件下で静的に計算して求めた反射
板の変位量よりも、反射板の実際の変位量が小さくなっ
てしまい、必要な変位量を得るための駆動電圧が上昇す
るという問題がある。このエアダンパ効果は、反射板の
応答特性を損ねる要因にもなる。Further, a space (hereinafter, referred to as a gap) for displacing and vibrating the reflector is secured between the reflector and the counter electrode, but the air in the gap is compressed by the displacement of the reflector. (Referred to as an air damper effect). Due to this air damper effect, the actual displacement of the reflector is smaller than the displacement of the reflector calculated statically under the condition that there is no air in the gap. There is a problem that the driving voltage for obtaining the voltage increases. This air damper effect is also a factor that impairs the response characteristics of the reflector.
【０００７】また、反射板の変位量は反射板の厚さの３
乗に反比例するため、反射板の変位量を確保しつつ駆動
電圧を下げるためには、反射板の厚さも薄くする必要が
ある。しかし、反射板を薄くすると、均一な薄さに形成
することが困難となり、また、特性を揃えるのが難しく
なるため、反射板を薄くすることにも限界がある。The amount of displacement of the reflector is three times the thickness of the reflector.
Since it is inversely proportional to the power, the thickness of the reflector needs to be reduced in order to lower the driving voltage while securing the displacement of the reflector. However, when the thickness of the reflector is reduced, it is difficult to form the reflector in a uniform thickness, and it is difficult to make the characteristics uniform. Therefore, the thickness of the reflector is also limited.
【０００８】よって、本発明の１つの目的は、駆動電圧
の上昇を招くことなく反射板の変位量を増加させること
ができ、あるいは、反射板の変位量を減少させることな
く低電圧で駆動できる光変調装置を提供することにあ
る。本発明のもう１つの目的は、エアダンパ効果を低減
し、低電圧駆動が可能で、かつ、応答性の良い光変調装
置を提供することにある。本発明のもう１つの目的は、
駆動回路又は駆動方法の単純化が可能な光変調装置を提
供することにある。これ以外の本発明の目的は以下の説
明から明らかになろう。Therefore, an object of the present invention is to increase the displacement of the reflector without increasing the driving voltage, or to drive the reflector at a low voltage without decreasing the displacement of the reflector. An object of the present invention is to provide a light modulation device. Another object of the present invention is to provide an optical modulation device which can reduce the air damper effect, can be driven at a low voltage, and has good responsiveness. Another object of the present invention is
An object of the present invention is to provide an optical modulation device capable of simplifying a driving circuit or a driving method. Other objects of the present invention will become apparent from the following description.
【０００９】[0009]
【課題を解決するための手段】本発明による光変調装置
の基本的な特徴は、請求項１記載のように、第１の電極
を兼ねる変位可能な反射板と、前記反射板に対向して配
設された変位不可能な第２の電極と、前記反射板と前記
第２の電極の間に配設された、少なくとも１つの変位可
能な中間電極とを有し、前記各電極間に作用する静電気
力により前記中間電極及び前記反射板を変位させる構成
にある。The basic features of the optical modulator according to the present invention are as follows: a displaceable reflector serving also as a first electrode; and a displaceable reflector facing the reflector. A non-displaceable second electrode, and at least one displaceable intermediate electrode disposed between the reflector and the second electrode; The intermediate electrode and the reflection plate are displaced by the generated electrostatic force.
【００１０】本発明による光変調装置のもう１つの特徴
は、請求項２記載のように、少なくとも反射板に最も近
い中間電極は、反射板に対向する面が導電性材料で形成
される構成にある。もう１つの特徴は、請求項３記載の
ように、中間電極が誘電体からなることである。もう１
つの特徴は、請求項４記載のように、中間電極が前記反
射板より低い剛性を有することである。もう１つの特徴
は、請求項５記載のように、中間電極がその両面に貫通
する穴を有することである。Another feature of the light modulation device according to the present invention is that, as described in claim 2, at least the intermediate electrode closest to the reflector has a structure in which the surface facing the reflector is formed of a conductive material. is there. Another feature is that the intermediate electrode is made of a dielectric material. Another one
One feature is that the intermediate electrode has lower rigidity than the reflector. Another feature is that the intermediate electrode has through holes on both sides thereof.
【００１１】また、本発明により提供される光変調装置
駆動方法は、請求項６記載のように、請求項１、２、４
又は５記載の光変調装置において、前記反射板の変位開
始が、少なくとも前記反射板に最も近い前記中間電極の
変位開始より遅れないように前記各電極への駆動電圧の
印加タイミングを制御することである。もう１つの特徴
は、請求項７記載のように、請求項３記載の光変調装置
において、第１の電極と第２の電極に対してのみ駆動電
圧を印加することである。Further, according to the present invention, there is provided a method for driving an optical modulation device, comprising the steps of:
Or in the optical modulation device according to 5, by controlling the application timing of the drive voltage to each of the electrodes such that the displacement start of the reflector is not delayed at least from the displacement start of the intermediate electrode closest to the reflector. is there. Another feature is that, in the optical modulator according to the third aspect, a driving voltage is applied only to the first electrode and the second electrode.
【００１２】以上に述べた本発明の目的及び特徴と、そ
の他の本発明の目的及び特徴について、実施の形態に関
連して以下に具体的に説明する。The above-described objects and features of the present invention and other objects and features of the present invention will be specifically described below with reference to embodiments.
【００１３】[0013]
【発明の実施の形態】本発明の理解を容易にするため、
まず、本発明を適用し得る光変調装置の基本構成の一例
を図１を参照して説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to facilitate understanding of the present invention,
First, an example of a basic configuration of a light modulation device to which the present invention can be applied will be described with reference to FIG.
【００１４】図１は光変調装置の概略断面図である。図
１において、反射板１は固定支持部９で電極基板３に固
定され、電極基板３の凹部を塞ぐ状態に保持される。反
射板１は電極も兼ねるもので、例えば薄い梁の上面に反
射面と電極として作用する金属層を形成したものであっ
たり、導電性を有する材質で一体的に形成されるもので
ある。電極基板３の凹部の底には、反射板１と対向する
対向電極２が設けられ、対向電極２と反射板１の間にギ
ャップ８が形成される。対向電極２と反射板１は静電ア
クチュエータを構成する。FIG. 1 is a schematic sectional view of a light modulation device. In FIG. 1, the reflection plate 1 is fixed to the electrode substrate 3 by a fixed support portion 9 and is held so as to cover a concave portion of the electrode substrate 3. The reflection plate 1 also serves as an electrode. For example, a reflection plate and a metal layer acting as an electrode are formed on the upper surface of a thin beam, or the reflection plate 1 is integrally formed of a conductive material. At the bottom of the concave portion of the electrode substrate 3, a counter electrode 2 facing the reflector 1 is provided, and a gap 8 is formed between the counter electrode 2 and the reflector 1. The counter electrode 2 and the reflector 1 constitute an electrostatic actuator.
【００１５】反射板１は、電極基板３とは別個に作ら
れ、後で電極基板３と接合される場合と、製膜プロセス
や犠牲層プロセス等によって電極基板３に反射板１が積
層される場合とがある。The reflector 1 is formed separately from the electrode substrate 3 and is laminated on the electrode substrate 3 by a film forming process, a sacrifice layer process, or the like, when the electrode 1 is bonded to the electrode substrate 3 later. There are cases.
【００１６】反射板１と対向電極２の間に電圧が印加さ
れない時（電圧ＯＦＦ時）には、図１（ａ）に示すよう
に、反射板１は対向電極２とほぼ平行な状態であり、入
射光４は反射板１により反射光５のように反射される。When no voltage is applied between the reflection plate 1 and the counter electrode 2 (when the voltage is OFF), the reflection plate 1 is substantially parallel to the counter electrode 2 as shown in FIG. The incident light 4 is reflected by the reflector 1 like the reflected light 5.
【００１７】一方、図示しない駆動回路から反射板１と
対向電極２の間に電圧が印加された時（電圧ＯＮ時）に
は、反射板１と対向電極２の間に静電気による吸引力が
作用する。反射板１は薄く作られているので、その静電
気力によって反射板１は対向電極２側へ変位し、図１
（ｂ）に示すような状態になる。この状態では、入射光
６は反射板１で反射光７のように反射される。なお、図
示していないが、反射板１が対向電極２と接触した場合
に両者の電気的短絡を防ぐため、反射板１と対向電極２
の一方又は両方の接触する側の面に絶縁膜が形成され
る。On the other hand, when a voltage is applied between the reflection plate 1 and the counter electrode 2 from a drive circuit (not shown) (when the voltage is ON), an attractive force of static electricity acts between the reflection plate 1 and the counter electrode 2. I do. Since the reflecting plate 1 is made thin, the reflecting plate 1 is displaced toward the counter electrode 2 by the electrostatic force.
The state shown in FIG. In this state, the incident light 6 is reflected by the reflector 1 like the reflected light 7. Although not shown, when the reflector 1 comes into contact with the counter electrode 2, the reflector 1 and the counter electrode 2
An insulating film is formed on one or both contacting surfaces.
【００１８】以上に述べたように、反射板１と対向電極
２との間の電圧のＯＮ、ＯＦＦによって光の反射方向を
切り替えて光を変調することができる。光の反射方向
に、図示しない色フィルタやレンズなどを設けることで
表示装置を構成することができる。また、電子写真装置
の光書込み系への応用も可能である。As described above, the light can be modulated by switching the light reflection direction by turning on and off the voltage between the reflection plate 1 and the counter electrode 2. A display device can be configured by providing a color filter, a lens, and the like (not shown) in the light reflection direction. Further, application to an optical writing system of an electrophotographic apparatus is also possible.
【００１９】さて、図１に示したような基本構成の光変
調装置においては、反射板１の変位量を大きくするため
に反射板１と対向電極２の距離を大きくとると、前述の
ように反射板１と対向電極２の間に非常に大きな駆動電
圧を印加しなければならなくなる。本発明によれば、駆
動電圧を増大させることなく反射板１の変位量を増加さ
せ、あるいは、反射板１の所定の変位量を確保して駆動
電圧の低電圧化を図ることができる。In the light modulator having the basic configuration as shown in FIG. 1, if the distance between the reflector 1 and the counter electrode 2 is increased in order to increase the displacement of the reflector 1, as described above. A very large driving voltage must be applied between the reflector 1 and the counter electrode 2. According to the present invention, the amount of displacement of the reflector 1 can be increased without increasing the drive voltage, or a predetermined amount of displacement of the reflector 1 can be secured to lower the drive voltage.
【００２０】以下、図１に示したような基本構成の光変
調装置に本発明を適用した実施例を、図２及び図３を参
照して説明する。Hereinafter, an embodiment in which the present invention is applied to an optical modulation device having a basic configuration as shown in FIG. 1 will be described with reference to FIGS.
【００２１】図２は、本発明による光変調装置の一実施
例を示す概略断面図である。図２において、図１と同一
の参照番号は同様の要素を示す。図２（ａ）は非駆動状
態（電圧ＯＦＦ時）を示し、図２（ｂ）は駆動状態（電
圧ＯＮ時）を示す。FIG. 2 is a schematic sectional view showing an embodiment of the light modulation device according to the present invention. 2, the same reference numerals as those in FIG. 1 indicate the same elements. FIG. 2A shows a non-driving state (when the voltage is OFF), and FIG. 2B shows a driving state (when the voltage is ON).
【００２２】本実施例では、電極基板３の凹部の内部
に、反射板１と対向電極２との間のギャップ８を上下２
つのギャップに仕切るように、薄い中間電極１０が設け
られる。この中間電極１０は、例えば、その全体を金属
のような導電性材料で形成してもよいし、絶縁性材料や
半導体材料などで作られた薄い板もしくは膜の表面に金
属などの導電性材料で電極を形成した構成としてもよ
い。また、中間電極１０は、電極基板３と独立した部品
として作成し、それを電極基板３の凹部の途中に設けた
段部に接合してもよいが、電極基板３の製作過程で一般
的な犠牲層プロセスなどを用いて中間電極１０を形成し
てもよい。In the present embodiment, the gap 8 between the reflector 1 and the counter electrode 2
A thin intermediate electrode 10 is provided so as to partition into two gaps. The intermediate electrode 10 may be entirely formed of a conductive material such as a metal, or may be formed of a conductive material such as a metal on a thin plate or a film made of an insulating material or a semiconductor material. It is good also as a structure which formed the electrode by. In addition, the intermediate electrode 10 may be formed as a component independent of the electrode substrate 3 and joined to a step provided in the middle of the concave portion of the electrode substrate 3. The intermediate electrode 10 may be formed using a sacrifice layer process or the like.
【００２３】以上のような構成において、反射板１、中
間電極１０、対向電極２のいずれの間にも駆動電圧を印
加しない時（電圧ＯＦＦ時）には、図２（ａ）に示すよ
うに、各電極は平行な状態であり、反射板１によって入
射光４は反射光５のように反射される。In the above configuration, when no drive voltage is applied between any of the reflector 1, the intermediate electrode 10, and the counter electrode 2 (when the voltage is OFF), as shown in FIG. Each electrode is in a parallel state, and the incident light 4 is reflected by the reflector 1 like the reflected light 5.
【００２４】一方、対向電極２と中間電極１０の間に、
図示しない駆動回路から電圧を印加すると、静電気力に
よって中間電極１０は対向電極２に向かって変位する。
同様に、反射板１と中間電極１０の間に、図示しない駆
動回路から電圧を印加すると、静電気力によって反射板
１は中間電極１０に向かって変位する。中間電極１０と
対向電極２との間及び中間電極１０と反射板１との間に
静電気力は同等に作用するが、反射板１も中間電極１０
も薄く作られているので、中間電極１０は変位しない対
向電極２側に引き寄せられる結果、図２（ｂ）に示すよ
うな状態となる。したがって、反射板１は入射光６を反
射光７のように反射する。On the other hand, between the counter electrode 2 and the intermediate electrode 10,
When a voltage is applied from a drive circuit (not shown), the intermediate electrode 10 is displaced toward the counter electrode 2 by an electrostatic force.
Similarly, when a voltage is applied between the reflection plate 1 and the intermediate electrode 10 from a drive circuit (not shown), the reflection plate 1 is displaced toward the intermediate electrode 10 by an electrostatic force. The electrostatic force acts equally between the intermediate electrode 10 and the counter electrode 2 and between the intermediate electrode 10 and the reflection plate 1.
Since the intermediate electrode 10 is also made thin, the intermediate electrode 10 is drawn to the counter electrode 2 side that is not displaced, resulting in a state as shown in FIG. 2B. Therefore, the reflector 1 reflects the incident light 6 like the reflected light 7.
【００２５】本実施例の光変調装置における反射板１の
絶対的変位量が図１の場合と等しいとすると、その絶対
的変位量に比べ、中間電極１０の変位量も、反射板１の
中間電極１０に対する相対的変位量も小さいため、電極
間に印加する駆動電圧を図１の場合よりも下げることが
できる。逆に、図１の場合と同じ駆動電圧で駆動すれ
ば、反射板１をより大きく変位させることができる。Assuming that the absolute displacement of the reflector 1 in the light modulator of the present embodiment is equal to that of FIG. 1, the displacement of the intermediate electrode 10 is also smaller than that of the reflector. Since the amount of relative displacement with respect to the electrode 10 is also small, the drive voltage applied between the electrodes can be lower than in the case of FIG. Conversely, if driven by the same drive voltage as in FIG. 1, the reflector 1 can be displaced more greatly.
【００２６】本実施例では、反射板１と対向電極２の間
に中間電極１０が１つだけ設けられた。図示しないが、
本発明の他の実施例によれば、反射板１と対向電極１０
の間のギャップ８を３つ以上に仕切るように、中間電極
１０と同様の中間電極が複数個設けられる。このように
中間電極を複数個設けた構成によれば、電極間距離を短
縮し、駆動電圧のさらなる低電圧化が可能であることは
明白である。In this embodiment, only one intermediate electrode 10 is provided between the reflector 1 and the counter electrode 2. Although not shown,
According to another embodiment of the present invention, the reflection plate 1 and the counter electrode 10
A plurality of intermediate electrodes similar to the intermediate electrode 10 are provided so as to partition the gap 8 between them into three or more. According to the configuration in which a plurality of intermediate electrodes are provided as described above, it is apparent that the distance between the electrodes can be reduced and the driving voltage can be further reduced.
【００２７】なお、中間電極１０と、反射板１又は対向
電極２との接触による電気的短絡を防ぐために（中間電
極を複数設ける場合には他の中間電極との接触による電
気的短絡も防ぐために）、図示しないが、接触が想定さ
れる部分には少なくとも絶縁保護膜を形成するなどの絶
縁手段が講じられる。Note that, in order to prevent an electrical short circuit due to contact between the intermediate electrode 10 and the reflection plate 1 or the counter electrode 2 (when a plurality of intermediate electrodes are provided, to prevent an electrical short circuit due to contact with another intermediate electrode). Although not shown, an insulating means such as forming at least an insulating protective film is provided on a portion where contact is assumed.
【００２８】また、中間電極１０を２つ以上設けた場
合、反射板１と、それに最も近い中間電極１０とからな
る静電アクチュエータの特性が、反射板１の変位特性に
最も大きな影響を与える。中間電極１０を、絶縁性材料
や半導体材料で作られた薄い板もしくは膜の表面に電極
としての導電性材料の膜を形成した構成とする場合に
は、少なくとも反射板１に最も近い中間電極１０につい
ては、その反射板１に対向する側の面に、電極としての
導電性材料の膜を形成するのが好ましい。このようにす
ると、電極としての導電性材料の膜を反対側の面に形成
した場合に比べ、反射板１とそれに最も近い中間電極１
０との距離を短くできる分、それらによって構成される
静電アクチュエータの駆動電圧の低電圧化、駆動特性の
向上を図ることができる。When two or more intermediate electrodes 10 are provided, the characteristics of the electrostatic actuator composed of the reflector 1 and the closest intermediate electrode 10 have the greatest effect on the displacement characteristics of the reflector 1. When the intermediate electrode 10 has a thin plate made of an insulating material or a semiconductor material or a structure in which a film of a conductive material as an electrode is formed on the surface of the film, the intermediate electrode 10 at least closest to the reflector 1 is used. It is preferable to form a film of a conductive material as an electrode on the surface facing the reflection plate 1. In this case, the reflection plate 1 and the nearest intermediate electrode 1 are compared with the case where a film of a conductive material as an electrode is formed on the opposite surface.
Since the distance to zero can be shortened, the driving voltage of the electrostatic actuator constituted by them can be reduced and the driving characteristics can be improved.
【００２９】さて、図２（ｂ）においては、中間電極１
０と反射板１は、ともに静電気力を生じている相手方の
電極に非接触であった（非当接駆動）が、さらに印加す
る駆動電圧を上げると相手方の電極に当接することにな
る（当接駆動）。当接駆動の場合、設計パラメータのバ
ラツキや駆動電圧の変動、その他の外部要因によって、
反射板１が中間電極１０に当接するよりも早く、中間電
極１０が対向電極２に当接してしまうことがある。その
様子を図３に示す。Now, in FIG. 2B, the intermediate electrode 1
0 and the reflector 1 were both in non-contact with the other electrode generating electrostatic force (non-contact drive). However, when the drive voltage applied was further increased, the electrode and the reflection plate 1 were brought into contact with the other electrode (this contact). Contact drive). In the case of contact drive, due to variations in design parameters, fluctuations in drive voltage, and other external factors,
The intermediate electrode 10 may come into contact with the counter electrode 2 earlier than the reflector 1 comes into contact with the intermediate electrode 10. This is shown in FIG.
【００３０】図３（ａ）では、反射板１が中間電極１０
に当接している様子を示している。この場合、その後に
中間電極１０を対向電極２側に変位させることになる
が、中間電極１０と対向電極２の距離は、初期状態（電
圧ＯＦＦ時）と同じであるので、駆動に不都合はない。In FIG. 3A, the reflector 1 is connected to the intermediate electrode 10.
Is in contact with. In this case, the intermediate electrode 10 is subsequently displaced toward the counter electrode 2, but since the distance between the intermediate electrode 10 and the counter electrode 2 is the same as in the initial state (when the voltage is OFF), there is no inconvenience in driving. .
【００３１】これに対し、図３（ｂ）では、中間電極１
０が対向電極２に当接している様子を示している。この
場合、その後に反射板１を中間電極１０側に変位させる
ことになるが、反射板１と中間電極１０の距離は初期状
態よりも大きくなっている。前述したように、静電気力
は電極間の距離の２乗に反比例するので、図３（ｂ）の
状態では、図３（ａ）の状態に比較して、反射板１の駆
動には大きな駆動電圧が必要になるという不都合があ
る。On the other hand, in FIG.
0 indicates a state in which it is in contact with the counter electrode 2. In this case, the reflecting plate 1 is subsequently displaced toward the intermediate electrode 10, but the distance between the reflecting plate 1 and the intermediate electrode 10 is larger than in the initial state. As described above, since the electrostatic force is inversely proportional to the square of the distance between the electrodes, the driving of the reflector 1 is larger in the state of FIG. 3B than in the state of FIG. There is a disadvantage that a voltage is required.
【００３２】このような不都合な状態を回避するため
に、本発明の光変調装置駆動方法によれば、反射板１の
変位開始が、中間電極１０の変位開始より遅れないよう
に各電極への駆動電圧の印加タイミングを制御する。こ
のような駆動方法によって、図３（ｂ）のような不都合
な状態を確実に回避し、低電圧による安定な駆動が可能
となる。In order to avoid such an inconvenient state, according to the light modulator driving method of the present invention, the start of displacement of the reflection plate 1 is applied to each electrode so that the start of displacement of the intermediate electrode 10 is not delayed. The timing of applying the driving voltage is controlled. With such a driving method, an inconvenient state as shown in FIG. 3B is reliably avoided, and stable driving with a low voltage is possible.
【００３３】本発明の光変調装置駆動方法は、反射板１
と対向電極２の間に中間電極１０が複数設けられた場合
にも同様に適用できる。すなわち、反射板１の変形開始
が、少なくとも反射板１に最も近い中間電極１０の変形
開始より遅れないように、各電極への駆動電圧の印加タ
イミングを制御することによって、図３（ｂ）のような
不都合を回避する。The method of driving the light modulation device according to the present invention uses the reflection plate 1
The same can be applied to a case where a plurality of intermediate electrodes 10 are provided between and the counter electrode 2. That is, by controlling the application timing of the drive voltage to each electrode so that the start of the deformation of the reflector 1 is not delayed at least from the start of the deformation of the intermediate electrode 10 closest to the reflector 1, as shown in FIG. Avoid such inconveniences.
【００３４】このような駆動方法は、反射板や中間電極
を当接駆動する場合に限らず、非当接駆動する場合にも
適用できる。なお、反射板１や中間電極１０の剛性に応
じて、各電極への駆動電圧の印加タイミングを適切に調
整するのが望ましい。Such a driving method can be applied not only to the case where the reflection plate and the intermediate electrode are driven in contact but also to the case where non-contact driving is performed. Note that it is desirable to appropriately adjust the timing of applying the drive voltage to each electrode according to the rigidity of the reflector 1 and the intermediate electrode 10.
【００３５】前述のように、中間電極１０によって駆動
電圧の低電圧化を図ることができるが、中間電極１０の
剛性が高く、その変形のために必要なエネルギーが大き
いと、その駆動電圧の上昇を招く恐れがある。そこで、
本発明の一実施例によれば、中間電極１０の剛性が少な
くとも反射板１の剛性よりも低くなるように中間電極１
０が形成される。このようにすれば、中間電極１０の駆
動電圧の低電圧化に有利であり、また、中間電極１０で
構成される静電アクチュエータの応答性も良好になる。As described above, the driving voltage can be reduced by the intermediate electrode 10. However, if the rigidity of the intermediate electrode 10 is high and the energy required for its deformation is large, the driving voltage increases. May be caused. Therefore,
According to one embodiment of the present invention, the intermediate electrode 10 is so formed that the rigidity of the intermediate electrode 10 is at least lower than the rigidity of the reflector 1.
0 is formed. This is advantageous for lowering the drive voltage of the intermediate electrode 10, and also improves the responsiveness of the electrostatic actuator constituted by the intermediate electrode 10.
【００３６】図示しないが、本発明の他の実施例によれ
ば、中間電極１０は誘電体で形成される。このような構
成において、対向電極２と反射板１の間に電圧を印加す
ると、中間電極１０の対向電極２側には対向電極２に引
かれる形で電荷が誘起し、電気双極子の働きによって、
中間電極１０の対向電極２と反対側にも逆極性の電荷が
誘起することになり、したがって、反射板１と中間電極
１０との間にも電圧が発生するため、中間電極１０に外
部より電圧を印加したと同様の反射板１の駆動が可能と
なる。このように中間電極１０は静電気力を発生するた
めの電極として作用するが、それ自体に外部より電圧を
印加するための電極を設ける必要がなくなるため、中間
電極１０の構造が非常に単純になり、光変調装置の生産
性、信頼性の向上に有利である。また、反射板１と対向
電極２のみに駆動電圧を印加するだけでよいため、駆動
のための回路を単純化することができる。このように反
射板１と対向電極２にのみ駆動電圧を印加することによ
って光変調装置を駆動する方法も本発明に包含される。Although not shown, according to another embodiment of the present invention, the intermediate electrode 10 is formed of a dielectric. In such a configuration, when a voltage is applied between the counter electrode 2 and the reflector 1, an electric charge is induced on the counter electrode 2 side of the intermediate electrode 10 in such a manner as to be attracted by the counter electrode 2. ,
A charge of the opposite polarity is also induced on the opposite side of the intermediate electrode 10 from the counter electrode 2, and a voltage is also generated between the reflector 1 and the intermediate electrode 10. , The same driving of the reflector 1 is possible. As described above, the intermediate electrode 10 functions as an electrode for generating an electrostatic force. However, since there is no need to provide an electrode for applying a voltage from the outside, the structure of the intermediate electrode 10 becomes very simple. This is advantageous for improving the productivity and reliability of the light modulation device. Also, since it is only necessary to apply a driving voltage to only the reflection plate 1 and the counter electrode 2, the driving circuit can be simplified. The method of driving the light modulation device by applying a drive voltage only to the reflection plate 1 and the counter electrode 2 as described above is also included in the present invention.
【００３７】さて、反射板１を変位駆動する場合、ギャ
ップ８内部の空気が反射板１の変位に伴って圧縮され圧
力が上昇し、反射板１がギャップ８内部の圧力で押し戻
されるため、ギャップ８内部に空気がない条件で静的に
計算して求めた反射板１の変位量よりも実際の変位量が
小さくなってしまう。その圧力の上昇ΔＰは次式で示さ
れる。When the reflecting plate 1 is driven for displacement, the air inside the gap 8 is compressed with the displacement of the reflecting plate 1 and the pressure rises, and the reflecting plate 1 is pushed back by the pressure inside the gap 8. The actual amount of displacement of the reflector 1 is smaller than the amount of displacement of the reflecting plate 1 statically calculated under the condition that there is no air inside the reflector 8. The pressure rise ΔP is expressed by the following equation.
【００３８】 ΔＰ＝Ｐｏ・ΔＶ／（Ｖ−ΔＶ） （１） ここで、Ｐｏはギャップ８内の初期圧力、Ｖはギャップ
の初期容積、ΔＶは反射板１の変位による容積変化量で
ある。ΔP = Po · ΔV / (V−ΔV) (1) where Po is the initial pressure in the gap 8, V is the initial volume of the gap, and ΔV is the volume change due to the displacement of the reflector 1.
【００３９】このような反射板１の変位に伴うギャップ
８内の圧力上昇、すなわちエアダンパ効果を低減し、駆
動電圧の低電圧化と応答性の向上を達成するためには、
ギャップ８の初期容積Ｖを増加させることが効果的であ
る。In order to reduce the pressure increase in the gap 8 due to the displacement of the reflector 1, that is, the air damper effect, to achieve a lower driving voltage and an improved response.
It is effective to increase the initial volume V of the gap 8.
【００４０】図２においては、中間電極１０によりギャ
ップ８は上下の２つのギャップに分割されている。分割
された各々のギャップの合計容積が図１の場合のギャッ
プ容積と同じであるとすると、分割された各々のギャッ
プの容積は図１の場合よりも小さくなっており、前記
（１）式で示したギャップの初期容積Ｖが小さくなって
しまう。In FIG. 2, the gap 8 is divided by the intermediate electrode 10 into two upper and lower gaps. Assuming that the total volume of each of the divided gaps is the same as the gap volume in the case of FIG. 1, the volume of each of the divided gaps is smaller than that of FIG. The indicated initial volume V of the gap becomes small.
【００４１】そこで、本発明の一実施例によれば、図２
に示すように、中間電極１０に貫通穴１２が設けられ
る。中間電極１０が対向電極２側に変形した場合、変形
に伴って圧縮された中間電極１０と対向電極２の間のギ
ャップ内の空気は貫通穴１２を通って反射板１側のギャ
ップに移動するため、対向電極２側のギャップ内の圧力
上昇を抑えることができる。この反作用によって、反射
板１側のギャップ内の圧力が上昇してしまうが、各々の
ギャップが貫通穴１２により連通することによってギャ
ップ８内の圧力が平均化され、全体としてエアダンパ効
果の増大を抑制することができるため、低電圧駆動が可
能である。Therefore, according to one embodiment of the present invention, FIG.
As shown in FIG. 1, a through hole 12 is provided in the intermediate electrode 10. When the intermediate electrode 10 is deformed toward the counter electrode 2, the air in the gap between the intermediate electrode 10 and the counter electrode 2 that has been compressed due to the deformation moves through the through hole 12 to the gap on the reflector 1 side. Therefore, a pressure increase in the gap on the counter electrode 2 side can be suppressed. Due to this reaction, the pressure in the gap on the side of the reflection plate 1 increases. However, since the gaps communicate with each other through the through holes 12, the pressure in the gap 8 is averaged, and the increase in the air damper effect is suppressed as a whole. Therefore, low voltage driving is possible.
【００４２】なお、ギャップ８の内部に高誘電率の物
質、例えばグリセリンや強誘電性液晶などを充填する
と、静電アクチュエータの低電圧化には好ましいが、そ
のような物質は体積圧縮率が極めて小さいのでダンパ効
果が顕著になる。したがって、ギャップ８には、体積圧
縮率の小さな物質、例えば空気や不活性ガスなどの気体
を充填するのが一般に好ましい。It is preferable to fill the gap 8 with a substance having a high dielectric constant, for example, glycerin or ferroelectric liquid crystal, in order to reduce the voltage of the electrostatic actuator. However, such a substance has an extremely low volume compression ratio. Since it is small, the damper effect becomes remarkable. Therefore, it is generally preferable to fill the gap 8 with a substance having a small volume compressibility, for example, a gas such as air or an inert gas.
【００４３】また、図示しないが、本発明の他の実施例
によれば、反射板１の少なくとも１辺は解放され、ギャ
ップ８は反射板１によっては完全には封止されない。例
えば、反射板１は、その一端のみで電極基板３に片持ち
保持される構成とされる。このような構成においても、
エアダンパ効果は存在するため、中間電極１０に貫通穴
を設けることによるエアダンパ効果の低減に有効であ
る。Although not shown, according to another embodiment of the present invention, at least one side of the reflector 1 is opened, and the gap 8 is not completely sealed by the reflector 1. For example, the reflection plate 1 is configured to be cantilevered by the electrode substrate 3 at only one end thereof. Even in such a configuration,
Since the air damper effect exists, the provision of the through hole in the intermediate electrode 10 is effective in reducing the air damper effect.
【００４４】また、図示しないが、本発明による他の実
施例によれば、中間電極１０も少なくとも１辺が解放さ
れる構成とされる。例えば、中間電極１０は、その一端
のみで電極基板３の凹部に片持ち保持される構成とされ
る。中間電極１０の解放部分が前記貫通穴１２と同様の
作用をするため、格別の貫通穴を設けることなくエアダ
ンパ効果の低減が可能である。Although not shown, according to another embodiment of the present invention, at least one side of the intermediate electrode 10 is also opened. For example, the intermediate electrode 10 is configured to be cantilevered in a recess of the electrode substrate 3 at only one end thereof. Since the open portion of the intermediate electrode 10 operates in the same manner as the through hole 12, the air damper effect can be reduced without providing a special through hole.
【００４５】また、図示しないが、本発明の他の実施例
によれば、中間電極１０は多数の貫通穴を持つ網目状の
構成とされる。Although not shown, according to another embodiment of the present invention, the intermediate electrode 10 has a mesh structure having a large number of through holes.
【００４６】なお、前記各実施例の光変調装置を１つの
素子として、複数の素子を１次元又は２次元に配列した
装置も本発明に包含されることは当然である。It should be understood that the present invention also encompasses a device in which the light modulation device of each of the above embodiments is regarded as one element and a plurality of elements are arranged one-dimensionally or two-dimensionally.
【００４７】[0047]
【発明の効果】以上の説明から明らかなように、（１）
請求項１乃至５記載の発明によれば、反射板の変位量を
減らすことなく駆動電圧を下げることができ、あるい
は、駆動電圧を上げることなく反射板の変位量を増大さ
せることができる。（２）請求項２記載の発明は、反射
板の変位特性に最も影響のある、反射板と、それに最も
近い中間電極とで構成される静電アクチュエータの駆動
電圧の低電圧化、駆動特性の向上を図ることができる。
（３）請求項３記載の発明によれば、中間電極そのもの
に外部から駆動電圧を印加するための電極を設ける必要
がなくなり、中間電極の構造が非常に単純になるため、
光変調装置の生産性、信頼性の向上に有利であり、ま
た、中間電極に外部から駆動電圧を印加する必要がなく
なるため、光変調装置の駆動回路を単純化することがで
きる。（４）請求項４記載の発明によれば、中間電極の
変形に要するエネルギーが小さくなるため、その駆動電
圧の低電圧化に有利であり、また中間電極で構成される
静電アクチュエータの応答性も良好にできる。また、
（５）請求項５記載の発明によれば、中間電極を設けた
ことによるエアダンパ効果の増大を抑えることができ
る。（６）請求項６記載の発明によれば、反射板とそれ
に対向する中間電極との距離が広がる現象を防止し、低
電圧で安定な駆動が可能となる。（７）請求項７記載の
発明によれば、第１の電極と第２の電極の間にのみ駆動
電圧を印加するだけでよいため、光変調装置の駆動回路
を単純化できる、等々の効果を得られる。As apparent from the above description, (1)
According to the first to fifth aspects of the present invention, the drive voltage can be reduced without reducing the displacement of the reflector, or the displacement of the reflector can be increased without increasing the drive voltage. (2) The invention according to claim 2 is to reduce the driving voltage of the electrostatic actuator composed of the reflector and the intermediate electrode closest to the reflector, which has the greatest influence on the displacement characteristics of the reflector, and to reduce the Improvement can be achieved.
(3) According to the third aspect of the present invention, it is not necessary to provide an electrode for applying a driving voltage from the outside to the intermediate electrode itself, and the structure of the intermediate electrode becomes very simple.
This is advantageous in improving the productivity and reliability of the light modulation device, and eliminates the need to externally apply a drive voltage to the intermediate electrode, so that the drive circuit of the light modulation device can be simplified. (4) According to the fourth aspect of the present invention, the energy required for deformation of the intermediate electrode is reduced, which is advantageous for lowering the driving voltage, and the responsiveness of the electrostatic actuator constituted by the intermediate electrode. Can also be improved. Also,
(5) According to the fifth aspect of the invention, an increase in the air damper effect due to the provision of the intermediate electrode can be suppressed. (6) According to the invention described in claim 6, the phenomenon that the distance between the reflection plate and the intermediate electrode facing the reflection plate is prevented from being widened, and stable driving at low voltage becomes possible. (7) According to the seventh aspect of the invention, it is only necessary to apply a drive voltage between the first electrode and the second electrode, so that the drive circuit of the optical modulation device can be simplified. Can be obtained.
【図１】本発明を適用し得る光変調装置の基本構成の一
例を示す概略断面図である。FIG. 1 is a schematic sectional view showing an example of a basic configuration of a light modulation device to which the present invention can be applied.
【図２】本発明による光変調装置の一例を示す概略断面
図である。FIG. 2 is a schematic sectional view showing an example of a light modulation device according to the present invention.
【図３】本発明による光変調装置の駆動方法を説明する
ための概略断面図である。FIG. 3 is a schematic sectional view for explaining a driving method of the light modulation device according to the present invention.
１ 反射板（第１の電極） ２ 対向電極（第２の電極） ３ 電極基板 ８ ギャップ １０ 中間電極 １２ 貫通穴 DESCRIPTION OF SYMBOLS 1 Reflector (1st electrode) 2 Counter electrode (2nd electrode) 3 Electrode board 8 Gap 10 Intermediate electrode 12 Through hole
Claims (7)
と、 前記反射板に対向して配設された変位不可能な第２の電
極と、 前記反射板と前記第２の電極の間に配設された、少なく
とも１つの変位可能な中間電極とを有し、 前記各電極間に作用する静電気力により前記中間電極及
び前記反射板を変位させることを特徴する光変調装置。1. A displaceable reflector serving also as a first electrode, a non-displaceable second electrode disposed opposite to the reflector, and between the reflector and the second electrode. And at least one displaceable intermediate electrode disposed in the optical modulator, wherein the intermediate electrode and the reflector are displaced by an electrostatic force acting between the electrodes.
間電極は、前記反射板に対向する面が導電性材料で形成
されることを特徴とする請求項１記載の光変調装置。2. The light modulation device according to claim 1, wherein at least the intermediate electrode closest to the reflector has a surface facing the reflector made of a conductive material.
徴とする請求項１記載の光変調装置。3. The light modulation device according to claim 1, wherein the intermediate electrode is made of a dielectric.
を有することを特徴とする請求項１記載の光変調装置。4. The light modulation device according to claim 1, wherein the intermediate electrode has lower rigidity than the reflection plate.
有することを特徴とする請求項１記載の光変調装置。5. The light modulation device according to claim 1, wherein the intermediate electrode has holes penetrating on both surfaces thereof.
置の駆動方法であって、前記反射板の変位開始が、少な
くとも前記反射板に最も近い前記中間電極の変位開始よ
り遅れないように前記各電極への駆動電圧の印加タイミ
ングを制御することを特徴とする光変調装置駆動方法。6. The method of driving a light modulation device according to claim 1, wherein the start of displacement of the reflector is at least delayed from the start of displacement of the intermediate electrode closest to the reflector. Controlling the application timing of the drive voltage to each of the electrodes as described above.
あって、前記第１の電極と前記第２の電極に対してのみ
駆動電圧を印加することを特徴とする光変調装置駆動方
法。7. The method of driving an optical modulation device according to claim 3, wherein a driving voltage is applied only to the first electrode and the second electrode. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001080542A JP2002277771A (en) | 2001-03-21 | 2001-03-21 | Optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001080542A JP2002277771A (en) | 2001-03-21 | 2001-03-21 | Optical modulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002277771A true JP2002277771A (en) | 2002-09-25 |
Family
ID=18936807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001080542A Pending JP2002277771A (en) | 2001-03-21 | 2001-03-21 | Optical modulator |
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| Country | Link |
|---|---|
| JP (1) | JP2002277771A (en) |
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