JP2002243657A - Method for confirming defect of object - Google Patents
Method for confirming defect of objectInfo
- Publication number
- JP2002243657A JP2002243657A JP2001046051A JP2001046051A JP2002243657A JP 2002243657 A JP2002243657 A JP 2002243657A JP 2001046051 A JP2001046051 A JP 2001046051A JP 2001046051 A JP2001046051 A JP 2001046051A JP 2002243657 A JP2002243657 A JP 2002243657A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- confirmation
- camera
- confirming
- confirmation camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
- Image Processing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体・プリント
基板・液晶・ＰＤＰ等の配線パターン、印刷・捺印パタ
ーンなどの検査において検出された欠陥を、最終的に良
品か、不良品かを判定する対象物の欠陥確認方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention determines whether a defect detected in an inspection of a wiring pattern of a semiconductor, a printed circuit board, a liquid crystal, a PDP, or the like, or a printed or stamped pattern is finally a nondefective or defective product. The present invention relates to a method for confirming a defect of an object.
【０００２】[0002]
【従来の技術】従来の欠陥確認方法は、検査装置によっ
て検出された欠陥位置に、確認用カメラを自動的に移動
させ、人が、一つ一つ、良品か不良品かを判定して行っ
ていた。2. Description of the Related Art In a conventional defect confirmation method, a confirmation camera is automatically moved to a defect position detected by an inspection device, and a person judges each item as good or defective. I was
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、傷など
の欠陥は、狭い範囲に密集して発生する為、確認用カメ
ラの視野内に複数の欠陥が存在しても、図５の様に、一
つ一つの欠陥位置に、確認用カメラが移動させる為、効
率の悪い作業になっていた。そこで、検査工程自体のス
ループット向上の為には、確認作業を効率化することが
必要となっている。However, since defects such as scratches are densely generated in a narrow area, even if there are a plurality of defects in the field of view of the confirmation camera, as shown in FIG. Since the confirmation camera was moved to each defect position, the operation was inefficient. Therefore, in order to improve the throughput of the inspection process itself, it is necessary to make the checking work more efficient.
【０００４】[0004]
【課題を解決するための手段】この課題を解決するため
に本発明は、欠陥確認方法において、確認用カメラの同
一視野内に存在する欠陥への確認用カメラの移動をスキ
ップさせている。In order to solve this problem, in the present invention, in the defect confirmation method, the movement of the confirmation camera to a defect existing in the same field of view of the confirmation camera is skipped.
【０００５】これにより、確認作業を効率化することが
可能となる。[0005] This makes it possible to increase the efficiency of the checking operation.
【０００６】[0006]
【発明の実施の形態】本発明の請求項１に記載の発明
は、対象物の欠陥を確認する確認用カメラを欠陥位置に
移動させる工程と、この欠陥を確認する工程と、次の欠
陥位置に前記確認用カメラを移動させる工程とを有した
対象物の欠陥確認方法において、欠陥を確認した後、次
の欠陥が前記確認用カメラの同一視野内に存在する場合
は、確認用カメラの移動をスキップし、次の欠陥の確認
を行うものであり、対象物の欠陥確認方法を効率よく行
うことができる。According to the first aspect of the present invention, a step of moving a confirmation camera for confirming a defect of an object to a defect position, a step of confirming the defect, and a next defect position Moving the confirmation camera to the defect confirmation method, wherein after confirming the defect, if the next defect exists in the same field of view of the confirmation camera, the confirmation camera is moved. Is skipped, and the next defect is confirmed, and the defect confirmation method of the object can be efficiently performed.
【０００７】本発明の請求項２に記載の発明は、対象物
の欠陥を確認する確認用カメラを欠陥位置に移動させる
工程と、この欠陥を確認する工程と、次の欠陥位置に前
記確認用カメラを移動させる工程とを有した対象物の欠
陥確認方法において、欠陥を確認した後、確認用カメラ
の倍率から次の欠陥が同一視野に存在するかどうかの判
断工程と、この判断工程により同一視野に存在する場合
は、確認用カメラの移動をスキップし、次の欠陥の確認
を行うものであり、対象物の欠陥確認方法を効率よく行
うことができる。According to a second aspect of the present invention, there is provided a step of moving a confirmation camera for confirming a defect of an object to a defect position, a step of confirming the defect, and a step of moving the confirmation camera to the next defect position. In the method for checking a defect of an object having a step of moving the camera, the step of determining whether or not the next defect exists in the same field of view from the magnification of the checking camera after checking the defect. If it exists in the field of view, the movement of the confirmation camera is skipped, and the next defect is confirmed, and the defect confirmation method for the object can be performed efficiently.
【０００８】以下、本発明の実施の形態について、図１
から図４を用いて説明する。Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG.
【０００９】図１は、本発明の欠陥確認方法の実施のフ
ローを示し、まず、ステップ１で確認カメラを欠陥ｎの
位置に移動をさせる。そして、ステップ２でこの欠陥ｎ
の確認を行っている。ステップ３では次の欠陥の確認の
ための準備作業で、ｍにｎを代入している。そして、ス
テップ４でｍにｍ＋１を代入し、ステップ５で欠陥ｎと
欠陥ｍが同一視野内にあるかどうかの判断をしている。
そして、同一視野内にあれば、欠陥ｍの確認を行った
後、ステップ４に戻り、作業を続行し、同一視野内にな
ければ、ステップ６でｎにｍを代入している。FIG. 1 shows a flow of an embodiment of the defect checking method according to the present invention. First, in step 1, the checking camera is moved to the position of the defect n. Then, in step 2, this defect n
Is being verified. In step 3, n is substituted for m in the preparation work for confirming the next defect. In step 4, m + 1 is substituted for m, and in step 5, it is determined whether the defect n and the defect m are in the same field of view.
If it is within the same field of view, after confirming the defect m, the process returns to step 4 to continue the operation. If it is not within the same field of view, m is substituted for n in step 6.
【００１０】具体的な確認方法は、図２〜４で説明す
る。A specific confirmation method will be described with reference to FIGS.
【００１１】図２のように、対象物に欠陥１〜４まで存
在したとする。まずステップ１で、欠陥１に確認用カメ
ラを移動させる。このときのｎの値は１である。そし
て、ステップ２で欠陥１の確認を行い、ステップ３で、
ｍにｎの値である１を代入する。ステップ４で、ｍにｍ
＋１の値である２を代入し、欠陥ｍである欠陥２と、欠
陥ｎである欠陥１が、同一視野内にあるかどうかの判断
を、ステップ５で行っている。この場合、図３に示すよ
うに同一視野内にあるので、欠陥２の確認を行った後、
ステップ４に戻り、ｍにｍ＋１の値である３を代入す
る。そしてステップ５で、欠陥３と欠陥１が同一視野内
にあるかどうかの判断をして、この場合、再びステップ
４に戻る。ｍにｍ＋１の値である４を代入し、欠陥４と
欠陥１が同一視野内にあるかどうかの判断をする。この
場合、同一視野内にはないので、ステップ６で、ｎにｍ
の値である４を代入し、ステップ１に戻っている。それ
を現したものが図４である。It is assumed that defects 1 to 4 exist in the object as shown in FIG. First, in step 1, the confirmation camera is moved to defect 1. The value of n at this time is 1. Then, in step 2, defect 1 is confirmed, and in step 3,
The value 1 of n is substituted for m. In step 4, m to m
The value 2 of +1 is substituted, and it is determined in step 5 whether the defect 2 which is the defect m and the defect 1 which is the defect n are in the same visual field. In this case, since it is within the same field of view as shown in FIG.
Returning to step 4, 3 which is the value of m + 1 is substituted for m. Then, in step 5, it is determined whether or not the defect 3 and the defect 1 are in the same field of view. In this case, the process returns to step 4 again. Substituting 4 which is the value of m + 1 into m, it is determined whether the defect 4 and the defect 1 are in the same field of view. In this case, since they are not within the same field of view, in step 6, m is set to n.
Is substituted, and the process returns to step 1. FIG. 4 shows this.
【００１２】以上の作業を順次行うことで、確認用カメ
ラの移動するための時間を省き、作業を効率的に行うこ
とができる。By sequentially performing the above operations, time for moving the confirmation camera can be saved, and the operations can be performed efficiently.
【００１３】なお欠陥が同一視野にあるかどうかの判断
は、確認用カメラの倍率から視野を計算して、判断する
ことができる。The determination as to whether or not the defect exists in the same visual field can be made by calculating the visual field from the magnification of the confirmation camera.
【００１４】[0014]
【発明の効果】以上のように本発明によれば、欠陥確認
方法において、確認用カメラの同一視野内に存在する欠
陥への確認用カメラの移動をスキップさせることで、確
認作業を効率化することが可能となる。As described above, according to the present invention, in the defect checking method, the checking operation is efficiently performed by skipping the movement of the checking camera to a defect existing in the same field of view of the checking camera. It becomes possible.
【図１】本発明の実施の形態に係る欠陥確認方法のフロ
ー図FIG. 1 is a flowchart of a defect confirmation method according to an embodiment of the present invention.
【図２】本発明の実施の形態に係る欠陥確認方法を説明
する図FIG. 2 is a diagram for explaining a defect confirmation method according to the embodiment of the present invention.
【図３】本発明の実施の形態に係る欠陥確認方法を説明
する図FIG. 3 is a diagram for explaining a defect confirmation method according to the embodiment of the present invention.
【図４】本発明の実施の形態に係る欠陥確認方法を説明
する図FIG. 4 is a diagram for explaining a defect confirmation method according to the embodiment of the present invention.
【図５】従来の欠陥確認方法を説明する図FIG. 5 is a diagram illustrating a conventional defect confirmation method.
１ 確認用カメラ移動 ５ 同一視野内存在判断 1 Camera movement for confirmation 5 Existence judgment in the same field of view
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G051 AA51 AA65 AB07 AC04 AC15 CA04 EB05 5B047 AA12 BA02 BB06 BC14 CB09 CB13 5B057 AA03 BA02 CA12 CA16 DA03 DB02 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G051 AA51 AA65 AB07 AC04 AC15 CA04 EB05 5B047 AA12 BA02 BB06 BC14 CB09 CB13 5B057 AA03 BA02 CA12 CA16 DA03 DB02
Claims (2)
欠陥位置に移動させる工程と、この欠陥を確認する工程
と、次の欠陥位置に前記確認用カメラを移動させる工程
とを有した対象物の欠陥確認方法において、欠陥を確認
した後、次の欠陥が前記確認用カメラの同一視野内に存
在する場合は、確認用カメラの移動をスキップし、次の
欠陥の確認を行うことを特徴とする対象物の欠陥確認方
法。1. An object comprising: a step of moving a confirmation camera for confirming a defect of an object to a defect position; a step of confirming the defect; and a step of moving the confirmation camera to a next defect position. In the defect checking method for an object, after checking the defect, if the next defect exists in the same field of view of the checking camera, the movement of the checking camera is skipped and the next defect is checked. The method of confirming the defect of the target.
欠陥位置に移動させる工程と、この欠陥を確認する工程
と、次の欠陥位置に前記確認用カメラを移動させる工程
とを有した対象物の欠陥確認方法において、欠陥を確認
した後、確認用カメラの倍率から次の欠陥が同一視野に
存在するかどうかの判断工程と、この判断工程により同
一視野に存在する場合は、確認用カメラの移動をスキッ
プし、次の欠陥の確認を行うことを特徴とする対象物の
欠陥確認方法。2. An object comprising: a step of moving a confirmation camera for confirming a defect of an object to a defect position; a step of confirming the defect; and a step of moving the confirmation camera to a next defect position. In the method of confirming a defect of an object, a step of judging whether or not the next defect exists in the same field of view from the magnification of the camera for confirmation after confirming the defect. A defect confirmation method for an object, wherein the movement of the object is skipped and the next defect is confirmed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001046051A JP2002243657A (en) | 2001-02-22 | 2001-02-22 | Method for confirming defect of object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001046051A JP2002243657A (en) | 2001-02-22 | 2001-02-22 | Method for confirming defect of object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002243657A true JP2002243657A (en) | 2002-08-28 |
Family
ID=18907745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001046051A Pending JP2002243657A (en) | 2001-02-22 | 2001-02-22 | Method for confirming defect of object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002243657A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6940527B2 (en) | 2002-11-15 | 2005-09-06 | Nippon Avionics Co., Ltd. | Inspection status display method |
| JP2009180578A (en) * | 2008-01-30 | 2009-08-13 | Olympus Corp | Inspection system |
| JP2009180627A (en) * | 2008-01-31 | 2009-08-13 | Fuji Electric Holdings Co Ltd | Defect inspection apparatus |
-
2001
- 2001-02-22 JP JP2001046051A patent/JP2002243657A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6940527B2 (en) | 2002-11-15 | 2005-09-06 | Nippon Avionics Co., Ltd. | Inspection status display method |
| JP2009180578A (en) * | 2008-01-30 | 2009-08-13 | Olympus Corp | Inspection system |
| JP2009180627A (en) * | 2008-01-31 | 2009-08-13 | Fuji Electric Holdings Co Ltd | Defect inspection apparatus |
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