JP2002156188A - Roller hearth type atmospheric furnace - Google Patents
Roller hearth type atmospheric furnaceInfo
- Publication number
- JP2002156188A JP2002156188A JP2000350480A JP2000350480A JP2002156188A JP 2002156188 A JP2002156188 A JP 2002156188A JP 2000350480 A JP2000350480 A JP 2000350480A JP 2000350480 A JP2000350480 A JP 2000350480A JP 2002156188 A JP2002156188 A JP 2002156188A
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- Japan
- Prior art keywords
- furnace
- atmosphere
- temperature
- zone
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Heat Treatments In General, Especially Conveying And Cooling (AREA)
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、被熱物を無酸化
性雰囲気内で高温度に加熱処理するローラハース式雰囲
気炉に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roller hearth type atmosphere furnace for heating an object to be heated at a high temperature in a non-oxidizing atmosphere.
【０００２】[0002]
【従来の技術】ローラハース式雰囲気炉は、鋼材の熱処
理等に広く使用されているが、そのハースロールとして
は、ステンレス材や耐熱鋳鋼などから成る金属製のハー
スロールを用いるのが一般的であった。ところがこの金
属製のハースロールは耐熱性の点で最高使用温度は約１
１００℃であり、これより炉温の高い場合はアルミナ系
のセラミックロールが使われることが多いが、熱衝撃に
弱く割れ易いため、操業に支障をきたすことがしばしば
見受けられた。またカーボン製のハースロールは高温で
は酸化しやすいため、カーボンロールにＡｌ２Ｏ３やＳ
ｉＣ等による表面処理や含浸を施して耐酸化向上対策を
おこなったロールも検討されているが、酸化性雰囲気で
の使用には耐え得るものではない。2. Description of the Related Art Roller hearth type furnaces are widely used for heat treatment of steel materials and the like, and metal hearth rolls made of stainless steel or heat-resistant cast steel are generally used as the hearth rolls. Was. However, this metal hearth roll has a maximum operating temperature of about 1 in terms of heat resistance.
When the temperature is 100 ° C. and the furnace temperature is higher than this, an alumina-based ceramic roll is often used. However, it is often found that it is susceptible to a thermal shock and easily cracked, thereby hindering the operation. Also, since the hearth roll made of carbon is easily oxidized at high temperatures, Al 2 O 3 or S
Rolls that have been subjected to surface treatment or impregnation with iC or the like to improve oxidation resistance have been studied, but they cannot withstand use in an oxidizing atmosphere.
【０００３】[0003]
【発明が解決しようとする課題】この発明は上記従来の
問題点を解決しようとするもので、ハースロールに損傷
を生じることなく高温度で被熱物の加熱処理をおこなう
ことができるローラハース式雰囲気炉を提供することを
目的とする。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and to provide a roller hearth type atmosphere capable of performing heat treatment of an object to be heated at a high temperature without causing damage to a hearth roll. It is intended to provide a furnace.
【０００４】[0004]
【課題を解決するための手段】上記目的を達成するため
に請求項１記載の発明は、炉の出口部と入口部に炉外か
らの酸化性雰囲気の流入を阻止する外気流入阻止手段を
そなえ、無酸化性雰囲気内で被熱物の加熱処理をおこな
うローラハース式雰囲気炉において、炉内に炉温１１０
０℃以上の高温処理ゾーンを設け、該高温処理ゾーンに
おけるハースロールをカーボンロールで構成したことを
特徴とする。According to a first aspect of the present invention, there is provided an outside air inflow preventing means for preventing an oxidizing atmosphere from flowing from outside the furnace into an outlet and an inlet of the furnace. In a roller hearth type atmosphere furnace in which a heating target is heated in a non-oxidizing atmosphere, a furnace temperature of 110
A high-temperature treatment zone of 0 ° C. or higher is provided, and the hearth roll in the high-temperature treatment zone is constituted by a carbon roll.
【０００５】この発明においてカーボンロールとは、焼
成温度が１５００℃程度の通常の炭素材を主体とするロ
ールの他、黒鉛ロールや炭素繊維複合炭素材であるＣ／
Ｃコンポジット（以下Ｃ／Ｃ材という）製のロール、お
よびこれら各ロールにＡｌ２Ｏ３やＳｉＣ等による表面
処理や含浸を施したものも含むものとし、特にＣ／Ｃ材
製のロールは高温強度に優れているので好ましい。また
この発明において外気流入阻止手段とは、たとえばガス
パージをおこなう前室や後室，無酸化性雰囲気に維持さ
れる冷却室，気密扉など、炉外からの酸化性雰囲気の流
入を阻止する各種構造のものを含む。[0005] In the present invention, a carbon roll is a roll mainly composed of a normal carbon material having a sintering temperature of about 1500 ° C, a graphite roll or a carbon fiber composite carbon material such as C / C.
Rolls made of C composite (hereinafter referred to as C / C material) and those rolls which have been subjected to surface treatment or impregnation with Al 2 O 3 , SiC or the like are also included. Particularly, rolls made of C / C material have high-temperature strength. It is preferable because it is excellent. In the present invention, the outside air inflow prevention means includes various structures for preventing the inflow of the oxidizing atmosphere from outside the furnace, such as a front chamber and a rear chamber for performing gas purging, a cooling chamber maintained in a non-oxidizing atmosphere, and a hermetic door. Including
【０００６】請求項１の手段によれば、外気流入阻止手
段により炉外からの酸化性雰囲気の流入が阻止されるの
で、炉内は無酸化性雰囲気に維持され、高温処理ゾーン
におけるハースロールを構成するカーボンロールは、上
記無酸化性雰囲気内にあるため１１００℃以上の炉温に
おいても酸化により折損したり消耗したりすることがな
い。According to the first aspect of the present invention, the inflow of the oxidizing atmosphere from the outside of the furnace is prevented by the outside air inflow preventing means, so that the inside of the furnace is maintained in the non-oxidizing atmosphere, and the hearth roll in the high temperature processing zone is removed. Since the constituent carbon rolls are in the non-oxidizing atmosphere, they are not broken or consumed by oxidation even at a furnace temperature of 1100 ° C. or more.
【０００７】また請求項２記載の発明は、炉の出口部と
入口部に炉外からの酸化性雰囲気の流入を阻止する外気
流入阻止手段をそなえ、無酸化性雰囲気内で被熱物の加
熱処理をおこなうローラハース式雰囲気炉において、炉
内に炉温１１００℃以上の高温処理ゾーンを設け、該高
温処理ゾーンにおけるハースロールをカーボンロールで
構成するとともに、前記高温処理ゾーンに隣接する隣接
ゾーンから該高温処理ゾーンへの雰囲気の流入を阻止す
る雰囲気流入阻止手段を設けたことを特徴とする。According to a second aspect of the present invention, an outside air inflow prevention means for preventing an inflow of an oxidizing atmosphere from outside the furnace is provided at an outlet portion and an inlet portion of the furnace, so that the object to be heated is heated in the non-oxidizing atmosphere. In a roller hearth-type atmosphere furnace for performing processing, a high-temperature processing zone having a furnace temperature of 1100 ° C. or higher is provided in the furnace, and a hearth roll in the high-temperature processing zone is formed of a carbon roll. Atmosphere inflow prevention means for preventing the inflow of the atmosphere into the high-temperature processing zone is provided.
【０００８】この発明において雰囲気流入阻止手段と
は、たとえば高温処理ゾーンと隣接ゾーンの境界部に形
成した高温処理ゾーンから隣接ゾーンへの雰囲気ガス流
通路，上記境界部に設けた噴気路からのガス吹込みによ
るガスシール機構，上記両ゾーン間に設けたパージ室
（ガス置換室）など、隣接ゾーンから高温処理ゾーンへ
の雰囲気の流入を阻止する各種構造のものを含む。In the present invention, the atmosphere inflow prevention means includes, for example, an atmosphere gas flow passage from the high temperature processing zone formed at the boundary between the high temperature processing zone and the adjacent zone to the adjacent zone, and a gas from the blowing passage provided at the boundary. It includes various structures such as a gas seal mechanism by blowing, a purge chamber (gas replacement chamber) provided between the above-mentioned zones, and an atmosphere from an adjacent zone to the high-temperature processing zone.
【０００９】請求項２の手段によれば、請求項１の手段
によるのと同じ作用効果が得られるのに加えて、雰囲気
流入阻止手段によって、予熱ゾーンなどの隣接ゾーンか
ら、より酸化性の強い雰囲気（たとえばＲＸガス雰囲
気，露点の高い雰囲気，処理品から発生した酸化性ガス
の混入した雰囲気など）が高温処理ゾーンに流入するの
が阻止されるので、高温処理ゾーンにおけるカーボンロ
ールの酸化による折損や消耗を一層確実に防止すること
ができる。According to the second aspect of the present invention, in addition to the same effect as that of the first aspect of the present invention, in addition to the effect of preventing the inflow of the atmosphere, the more intensely oxidizable gas is removed from the adjacent zone such as the preheating zone. Atmosphere (for example, RX gas atmosphere, high dew point atmosphere, atmosphere containing oxidizing gas generated from the processed product, etc.) is prevented from flowing into the high-temperature processing zone. And wear can be more reliably prevented.
【００１０】この発明において高温処理ゾーンの炉体の
構造は、通気性を有しない一般的な炉体構造としてもよ
いが、請求項３記載の発明のように、前記高温処理ゾー
ンの炉体を、通気性を有する断熱材と、この断熱材をガ
ス空間を介して包囲する外殻板とから成る二重構造と
し、加熱処理中において炉内雰囲気ガスを、前記断熱材
を通過させ前記ガス空間を経て炉外へ排出させるように
した構成とすれば、長期運転により炉壁の内面部に蓄積
する被熱物からの蒸散物などの汚れによって炉内雰囲気
が影響を受けるのを防止でき、また炉開放時に炉壁内面
部に付着したＯ２やＨ２Ｏ分をベーキングにより短時間
で炉外へ放出させることができるので、好ましい。In the present invention, the structure of the furnace body in the high-temperature processing zone may be a general furnace structure having no air permeability. A heat insulating material having air permeability and an outer shell plate surrounding the heat insulating material with a gas space interposed therebetween. If it is configured to be discharged out of the furnace through the furnace, it is possible to prevent the atmosphere in the furnace from being affected by dirt such as evaporation from the heated object accumulated on the inner surface of the furnace wall due to long-term operation, and This is preferable because the O 2 and H 2 O components adhering to the inner surface of the furnace wall when the furnace is opened can be released outside the furnace in a short time by baking.
【００１１】またこの発明において、炉内における被熱
物の加熱は、ヒータなどの加熱源からの放射熱により被
熱物を直接加熱する構成としてもよいが、請求項４記載
の発明のように、少なくとも前記高温処理ゾーンにおい
て、炉内上部に設けた加熱源と前記ハースロール上の被
熱物との間に、前記加熱源により加熱され前記被熱物に
対向する下面からの放射熱により前記被熱物を加熱する
熱放射板を設けた構成とすれば、熱放射板の下面からの
広範囲にわたる均一な放射熱によって、被熱物はほぼ均
一な温度に加熱され、加熱処理後の被熱物の品質のばら
つきを少量に抑えることができるので、好ましい。In the present invention, the heating of the object to be heated in the furnace may be performed by directly heating the object to be heated by radiant heat from a heating source such as a heater. At least in the high-temperature treatment zone, between the heating source provided in the upper part of the furnace and the object to be heated on the hearth roll, by the radiant heat from the lower surface facing the object to be heated by the heating source If the heat radiating plate for heating the object is provided, the object to be heated is heated to a substantially uniform temperature by the uniform radiant heat over a wide area from the lower surface of the heat radiating plate. This is preferable because variation in quality of the product can be suppressed to a small amount.
【００１２】[0012]
【発明の実施の形態】以下図１および図２に示す第１例
により、請求項１記載の発明の実施の形態を説明する。
図中、１はローラハース式雰囲気炉であり、２は炉の入
口、３は炉の出口である。４は炉の入口２部に設けた炉
外からの酸化性雰囲気の流入を阻止する外気流入阻止手
段である前室、５は炉の出口３部に設けた上記と同様な
外気流入阻止手段である冷却室である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The first embodiment of the present invention will be described below with reference to a first example shown in FIGS.
In the drawing, 1 is a roller hearth type atmosphere furnace, 2 is an inlet of the furnace, and 3 is an outlet of the furnace. Reference numeral 4 denotes an outside air inflow prevention means provided at the furnace inlet 2 for preventing an oxidizing atmosphere from flowing from outside the furnace, and reference numeral 5 denotes an outside air inflow prevention means provided at the furnace outlet 3 similar to the above. There is a cooling room.
【００１３】炉内には、炉内上部および下部に設けた炭
化珪素製の電熱ヒータ６により炉温を制御される予熱ゾ
ーン７と高温処理ゾーン８が設けられ、高温処理ゾーン
８においては１１００℃以上の炉温（たとえば１４００
℃）で被熱物Ｗの熱処理や焼結などの加熱処理がおこな
われ、予熱ゾーン７においては１１００℃未満の炉温
（たとえば１０００℃）で被熱物Ｗの予熱がおこなわれ
る。In the furnace, there are provided a preheating zone 7 and a high-temperature processing zone 8 in which the furnace temperature is controlled by silicon carbide electric heaters 6 provided in the upper and lower portions of the furnace. The above furnace temperature (for example, 1400
C), heat treatment such as heat treatment and sintering of the object to be heated W is performed. In the preheating zone 7, the object to be heated W is preheated at a furnace temperature of less than 1100 ° C (for example, 1000 ° C).
【００１４】高温処理ゾーン８部を形成する炉体１１
は、図２にも示すようにセラミックファイバの積層体か
ら成る通気性を有する断熱材１２を四角筒状に形成した
ものの外側を、ガス流通用のガス空間１３を介して鋼板
製の外殻板１４の四角筒状体で包囲した二重構造を有す
るものである。なお断熱材１２は、耐火物を焼成した多
孔質ボードなどを用いてもよい。１５は外殻板１４に設
けたガス排出口である。Furnace body 11 forming 8 parts of high temperature processing zone
As shown in FIG. 2, an outer shell plate made of a steel plate is formed on the outside of a rectangular tube-shaped heat-insulating material 12 formed of a ceramic fiber laminate through a gas space 13 for gas flow. It has a double structure surrounded by fourteen square tubular bodies. Note that the heat insulating material 12 may be a porous board or the like obtained by firing a refractory. Reference numeral 15 denotes a gas outlet provided in the outer shell plate 14.
【００１５】前室４から冷却室５に至る被熱物搬送路に
沿って搬送用のハースロールが設けられているが、高温
処理ゾーン８のハースロール２１はカーボンロール（こ
の例ではＣ／Ｃ材製ロール）から成り、他のハースロー
ル２２，２３，２４は金属製ロールから成る。A hearth roll for conveyance is provided along a heated object conveyance path from the front chamber 4 to the cooling chamber 5, and the hearth roll 21 in the high temperature processing zone 8 is a carbon roll (C / C in this example). The other hearth rolls 22, 23, 24 are made of metal rolls.
【００１６】また高温処理ゾーン８においては、図２に
も示すように、炉内上部に設けた加熱源である電熱ヒー
タ６と、ハースロール２１上の被熱物Ｗとの間に、カー
ボン製の熱放射板２５が支持ボルト２６により吊設され
ており、熱放射板２５の下面２５ａは被熱物Ｗに対向し
ている。In the high-temperature treatment zone 8, as shown in FIG. 2, a carbon-made material is placed between the electric heater 6, which is a heating source provided in the upper part of the furnace, and the object W on the hearth roll 21. The heat radiating plate 25 is suspended by a support bolt 26, and the lower surface 25 a of the heat radiating plate 25 faces the object to be heated W.
【００１７】上記構成のローラハース式雰囲気炉１にお
いては、雰囲気ガス供給口１６から、ＡｒやＮ２などの
不活性ガスやＮＸガスなどの酸化成分の少ない変成ガス
から成る無酸化性雰囲気ガス（この例ではＡｒガス）を
炉内に供給し、炉内各ゾーンの炉温を所定炉温に制御
し、被熱物Ｗを前室４を経て予熱ゾーン７から高温処理
ゾーン８へと間欠搬送しつつ加熱処理をおこない、冷却
室５を経て炉外へと送出する。In the roller hearth type atmosphere furnace 1 having the above-mentioned structure, the non-oxidizing atmosphere gas made of a modified gas containing a small amount of an oxidizing component such as an inert gas such as Ar or N 2 or an NX gas is supplied from the atmosphere gas supply port 16. In the example, Ar gas is supplied into the furnace, the furnace temperature in each zone in the furnace is controlled to a predetermined furnace temperature, and the object to be heated W is intermittently transported from the preheating zone 7 to the high-temperature processing zone 8 via the front chamber 4. While the heat treatment is being performed, it is sent out of the furnace through the cooling chamber 5.
【００１８】前室４においては、図示しない真空ポンプ
による排気とＮ２ガスの送入とによるガスパージがおこ
なわれ、外気が入口２を経て炉内に流入するのが阻止さ
れ、また冷却室５においては冷却後の被熱物Ｗの送出後
に給気口１７からＮ２ガスを送入して冷却室５内を無酸
化雰囲気に維持することにより、外気が出口３を経て炉
内に流入するのが阻止される。In the front chamber 4, gas purging is performed by evacuation by a vacuum pump (not shown) and feeding of N 2 gas to prevent outside air from flowing into the furnace through the inlet 2. After the cooled object to be heated W is sent out, the N 2 gas is supplied from the air supply port 17 to maintain the inside of the cooling chamber 5 in a non-oxidizing atmosphere, so that the outside air flows into the furnace through the outlet 3. Is blocked.
【００１９】そして雰囲気ガス供給口１６から炉内に供
給されたＡｒガスにより炉内は無酸化性雰囲気に維持さ
れ、このＡｒガスの一部は高温処理ゾーン８の断熱材１
２を通過してガス空間１３を経てガス排出口１５から炉
外へ排出され、上記Ａｒガスの残部は炉内を流通し予熱
ゾーン７の排ガス口１８から炉外へ流出する。The furnace is maintained in a non-oxidizing atmosphere by the Ar gas supplied from the atmosphere gas supply port 16 into the furnace.
After passing through the gas space 13 and passing through the gas space 13, the gas is discharged from the gas outlet 15 to the outside of the furnace. The remaining Ar gas flows through the furnace and flows out of the furnace through the exhaust gas port 18 of the preheating zone 7.
【００２０】高温処理ゾーン８においては、ハースロー
ル２１は１１００℃以上の高温のもとで、被熱物Ｗの保
持および搬送をおこなうのであるが、高温処理ゾーン８
は無酸化性雰囲気に維持されているので、カーボン製の
ハースロール２１は酸化により折損したり急速に消耗し
たりすることなく、長期にわたり支障なく使用できる。In the high-temperature processing zone 8, the hearth roll 21 holds and transports the object to be heated W at a high temperature of 1100 ° C. or higher.
Is maintained in a non-oxidizing atmosphere, so that the carbon hearth roll 21 can be used for a long period without trouble without being broken or rapidly consumed by oxidation.
【００２１】特にこの例では、高温処理ゾーン８におい
ては炉内の雰囲気ガスの一部を断熱材１２を経て炉外へ
流出させるようにしたので、長期運転により断熱材１２
の内面部に蓄積する被熱物からの蒸散物などの汚れによ
って炉内雰囲気が影響を受けるのを防止でき、また炉開
放時に断熱材１２の内面部に付着したＯ２やＨ２Ｏ分を
ベーキングにより短時間で炉外へ放出させることができ
る。Particularly, in this example, in the high temperature treatment zone 8, a part of the atmosphere gas in the furnace is caused to flow out of the furnace through the heat insulating material 12, so that the heat insulating material 12
The atmosphere in the furnace can be prevented from being affected by dirt such as evaporated substances from the heat-receiving material accumulated on the inner surface of the furnace, and the O 2 and H 2 O components adhering to the inner surface of the heat insulating material 12 when the furnace is opened can be reduced. It can be released from the furnace in a short time by baking.
【００２２】また高温処理ゾーン８に設けた熱放射板２
５は、炉内上部の電熱ヒータ６により加熱されてその下
面２５ａからの放射熱により被熱物Ｗを加熱するので、
棒状の電熱ヒータ６が間隔をおいて配置された加熱源配
置構造においても、被熱物Ｗは温度むらの少ないほぼ均
一な温度に加熱され、加熱処理後の品質のばらつきが少
ない。The heat radiation plate 2 provided in the high-temperature processing zone 8
5 is heated by the electric heater 6 in the upper part of the furnace and heats the object to be heated W by radiant heat from the lower surface 25a.
Even in the heating source arrangement structure in which the rod-shaped electric heaters 6 are arranged at intervals, the object to be heated W is heated to a substantially uniform temperature with little temperature unevenness, and there is little variation in quality after the heat treatment.
【００２３】次に図３および図２に示す第２例により、
請求項２記載の発明の実施の形態を説明する。この例の
ローラハース式雰囲気炉３１は、予熱ゾーン７と高温処
理ゾーン８との境界部に隔壁３２を設け、この隔壁３２
の先端部と被熱物Ｗとの間に高温処理ゾーン８から予熱
ゾーン７へと雰囲気ガスが流れる流通路３３を形成する
とともに、この隔壁３２を貫通して前記境界部内にシー
ル用ガスとしてＡｒガスを噴出する噴気路３４を設け、
高温処理ゾーン８用とは異種の雰囲気ガス（この例では
ＲＸガス）を予熱ゾーン７へ供給する雰囲気ガス供給口
３５を設け、また炉の出口３側には、炉外からの酸化性
雰囲気の流入を阻止する外気流入阻止手段として、冷却
室３６および後室３７を設けてある。その他の構成は前
記第１例のローラハース式雰囲気炉１と同様であり、図
１と同一または相当部分には図１と同一符号を付して、
それらの部分の詳細な説明は省略する。Next, according to a second example shown in FIGS. 3 and 2,
An embodiment of the invention described in claim 2 will be described. In the roller hearth type atmosphere furnace 31 of this example, a partition wall 32 is provided at a boundary between the preheating zone 7 and the high-temperature processing zone 8.
A flow path 33 through which the atmospheric gas flows from the high-temperature processing zone 8 to the preheating zone 7 is formed between the tip end of the substrate and the object to be heated W. Providing a fumarole 34 for discharging gas;
An atmosphere gas supply port 35 for supplying an atmosphere gas (RX gas in this example) different from that for the high temperature processing zone 8 to the preheating zone 7 is provided, and an oxidizing atmosphere from outside the furnace is provided on the outlet 3 side of the furnace. A cooling chamber 36 and a rear chamber 37 are provided as outside air inflow prevention means for preventing inflow. Other configurations are the same as those of the roller hearth type atmosphere furnace 1 of the first example, and the same or corresponding parts as those in FIG.
Detailed description of those parts will be omitted.
【００２４】このローラハース式雰囲気炉３１において
は、雰囲気ガス供給口１６から無酸化性雰囲気ガス（こ
の例ではＡｒガス）を高温処理ゾーン８内に供給すると
ともに、雰囲気ガス供給口３５から上記Ａｒガスよりも
酸化性の強い雰囲気ガス（この例ではＲＸガス）を予熱
ゾーン７内に供給し、炉内各ゾーンの炉温を所定炉温に
制御し、被熱物Ｗを前室４を経て予熱ゾーン７から高温
処理ゾーン８へと間欠搬送しつつ加熱処理をおこない、
冷却室３６および後室３７を経て炉外へと送出する。In the roller hearth type atmosphere furnace 31, a non-oxidizing atmosphere gas (Ar gas in this example) is supplied from the atmosphere gas supply port 16 into the high-temperature treatment zone 8, and the Ar gas is supplied from the atmosphere gas supply port 35. A more oxidizing atmosphere gas (RX gas in this example) is supplied into the preheating zone 7, the furnace temperature in each zone in the furnace is controlled to a predetermined furnace temperature, and the object to be heated W is preheated through the front chamber 4. Heat treatment is performed while carrying out intermittently from zone 7 to high-temperature treatment zone 8,
It is sent out of the furnace through a cooling chamber 36 and a rear chamber 37.
【００２５】前室４および後室３７においては、図示し
ない真空ポンプによる排気とＮ２ガスの送入とによるガ
スパージがおこなわれ、外気が入口２および出口３を経
て炉内に流入するのが阻止される。また冷却室３６内
も、高温処理ゾーン８における高温処理後の被熱物を受
入れる際の出口３の扉開放時に流入するＡｒガスによっ
て、無酸化雰囲気に維持されている。In the front chamber 4 and the rear chamber 37, gas purging is performed by evacuation by a vacuum pump (not shown) and feeding of N 2 gas to prevent outside air from flowing into the furnace via the inlet 2 and the outlet 3. Is done. The interior of the cooling chamber 36 is also maintained in a non-oxidizing atmosphere by the Ar gas that flows in when the door of the outlet 3 is opened when receiving the object to be heated after the high-temperature processing in the high-temperature processing zone 8.
【００２６】そして雰囲気ガス供給口１６から炉内に供
給されたＡｒガスにより高温処理ゾーン８内は無酸化性
雰囲気に維持され、このＡｒガスの一部は高温処理ゾー
ン８の断熱材１２を通過してガス空間１３を経てガス排
出口１５から炉外へ排出され、上記Ａｒガスの残部は高
温処理ゾーン８を流通し、隔壁３２先端部の流通路３３
を経て予熱ゾーン７へと流入するのに加えて、噴気路３
４から上記流通路３３部に噴出するＡｒガスがエアカー
テン状のシールとして作用するため、予熱ゾーン７内
の、より酸化性の強いＲＸガス雰囲気が、高温処理ゾー
ン８内に流入するのが阻止される。そして予熱ゾーン７
に流入した各ガスは予熱ゾーン流通後、排ガス口１８か
ら炉外へ流出する。The high temperature processing zone 8 is maintained in a non-oxidizing atmosphere by the Ar gas supplied from the atmosphere gas supply port 16 into the furnace, and a part of the Ar gas passes through the heat insulating material 12 of the high temperature processing zone 8. Then, the Ar gas is discharged out of the furnace through the gas outlet 15 through the gas space 13, and the remaining Ar gas flows through the high-temperature treatment zone 8 and flows through the flow path 33 at the tip of the partition wall 32.
Flow into the preheating zone 7 via the
4 prevents the RX gas atmosphere in the preheating zone 7 from flowing into the high temperature processing zone 8 because the Ar gas ejected from the channel 4 into the flow passage 33 acts as an air curtain seal. Is done. And preheating zone 7
After flowing into the preheating zone, each gas flows out of the furnace through the exhaust gas port 18.
【００２７】高温処理ゾーン８においては、ハースロー
ル２１は１１００℃以上の高温のもとで、被熱物Ｗの保
持および搬送をおこなうのであるが、高温処理ゾーン８
内は、Ａｒガスの送入に加えて、上記の流通路３３，噴
気路３４などの雰囲気ガス流入阻止手段により隣接の予
熱ゾーン７からの雰囲気の流入が阻止されることによ
り、確実に無酸化性雰囲気に維持されているので、カー
ボン製のハースロール２１は酸化により折損したり急速
に消耗したりすることなく、長期にわたり支障なく使用
できる。In the high-temperature processing zone 8, the hearth roll 21 holds and transports the object to be heated W at a high temperature of 1100 ° C. or higher.
The inside is reliably non-oxidized by preventing the inflow of the atmosphere from the adjacent preheating zone 7 by the atmosphere gas inflow prevention means such as the flow passage 33 and the blast passage 34 in addition to the supply of the Ar gas. Since the carbon atmosphere hearth roll 21 is maintained in a neutral atmosphere, the hearth roll 21 made of carbon can be used for a long period without any trouble without being broken or rapidly consumed by oxidation.
【００２８】またこの例では、前記第１例と同様に高温
処理ゾーン８においては炉内の雰囲気ガスの一部を断熱
材１２を経て炉外へ流出させるようにするとともに、熱
放射板２５を設けたので、これによって第１例と同様な
作用効果が得られる。なおこの例では隣接ゾーンからの
雰囲気の流入を阻止する雰囲気流入阻止手段として、流
通路３３と噴気路３４を設けたが、いずれか一方を省略
してもよい。In this embodiment, as in the first embodiment, in the high-temperature treatment zone 8, a part of the atmosphere gas in the furnace is caused to flow out of the furnace through the heat insulating material 12, and the heat radiating plate 25 is removed. Since this is provided, the same operation and effect as in the first example can be obtained. In this example, the flow path 33 and the jet path 34 are provided as the atmosphere inflow prevention means for preventing the flow of the atmosphere from the adjacent zone, but either one may be omitted.
【００２９】次に図４に示す第３例により、請求項２記
載の発明の他の実施の形態を説明する。この例のローラ
ハース式雰囲気炉４１は、炉体を予熱ゾーン７用と高温
処理ゾーン８用に２分割して、その中間部に仕切扉４
２，４３付きのパージ室４４を介在させるとともに、高
温処理ゾーン８の炉体４５は、予熱ゾーン７の炉体４６
と同様な非通気性の炉殻で構成して、排ガス口４７を設
け、さらに前記第２例（および第１例）における熱放射
板２５を除去したものである。その他の構成は前記第２
例のローラハース式雰囲気炉３１と同様であり、図３と
同一または相当部分には図３と同一符号を付してある。Next, another embodiment of the present invention will be described with reference to a third example shown in FIG. In the roller hearth type atmosphere furnace 41 of this example, the furnace body is divided into two parts for a preheating zone 7 and a high temperature processing zone 8, and a partition door 4 is provided at an intermediate portion thereof.
The furnace body 45 of the high-temperature processing zone 8 is connected to the furnace body 46 of the preheating zone 7 while a purge chamber 44 with
The exhaust gas port 47 is provided, and the heat radiation plate 25 in the second example (and the first example) is removed. Other configurations are the same as those of the second embodiment.
This is the same as the roller hearth type atmosphere furnace 31 of the example, and the same or corresponding parts as those in FIG.
【００３０】この例のローラハース式雰囲気炉４１にお
いては、Ａｒガスによりガスパージされるパージ室４４
が、隣接ゾーンである予熱ゾーン７のＲＸガス雰囲気が
高温処理ゾーン８に流入するのを阻止する雰囲気流入阻
止手段として作用し、高温処理ゾーン８内はＡｒガス雰
囲気に維持されるので、高温処理ゾーン８においては酸
化成分の少ない高度の無酸化性雰囲気内で被処理物Ｗを
高温加熱処理できるとともに、カーボンロールから成る
ハースロール２１は１１００℃以上の高温のもとでも、
酸化による折損や急速な消耗を生じることなく、長期に
わたり支障なく使用できるのである。In the roller hearth type atmosphere furnace 41 of this embodiment, a purge chamber 44 which is purged by Ar gas is used.
Acts as an atmosphere inflow prevention means for preventing the RX gas atmosphere in the adjacent preheating zone 7 from flowing into the high temperature processing zone 8, and the inside of the high temperature processing zone 8 is maintained in the Ar gas atmosphere. In the zone 8, the workpiece W can be heated at a high temperature in a highly non-oxidizing atmosphere having a small amount of oxidizing components, and the hearth roll 21 made of a carbon roll can be heated under a high temperature of 1100 ° C.
It can be used for a long time without any trouble without breakage or rapid consumption due to oxidation.
【００３１】なお第２例とは異なり炉体４５は非通気性
であり、また熱放射板２５を設けていないので、第２例
における通気性を有する炉体および熱放射板２５による
作用効果は、この第３例では得られないものである。Unlike the second example, the furnace body 45 is non-permeable and does not have the heat radiating plate 25. Therefore, the function and effect of the air permeable furnace body and the heat radiating plate 25 in the second example are as follows. Cannot be obtained in the third example.
【００３２】この発明は上記各例に限定されるものでは
なく、たとえば雰囲気炉各部の具体的構造や材質、雰囲
気ガスやシール用ガスの種類、炉温などは、上記以外の
ものとしてもよい。The present invention is not limited to the above examples. For example, the specific structure and material of each part of the atmosphere furnace, the type of atmosphere gas and sealing gas, and the furnace temperature may be other than those described above.
【００３３】[0033]
【発明の効果】以上説明したようにこの発明によれば、
無酸化性雰囲気に維持された高温処理ゾーンにおけるハ
ースロールをカーボンロールで構成したので、高温強度
が高いカーボンロールの酸化が防止され、ハースロール
に損傷を生じることなく高温度で被熱物の加熱処理をお
こなうことができる。As described above, according to the present invention,
Since the hearth roll in the high-temperature treatment zone maintained in the non-oxidizing atmosphere is composed of carbon rolls, oxidation of the carbon roll having high high-temperature strength is prevented, and the heating target is heated at a high temperature without causing damage to the hearth roll. Processing can be performed.
【００３４】また上記の効果に加えて、請求項２記載の
発明によれば、隣接ゾーンの雰囲気が高温処理ゾーンに
流入するのが阻止されるので、高温処理ゾーンにおける
カーボンロールの酸化による折損や消耗を一層確実に防
止することができる。In addition to the above effects, according to the second aspect of the present invention, the atmosphere in the adjacent zone is prevented from flowing into the high-temperature processing zone. Wear can be more reliably prevented.
【００３５】また上記の効果に加えて、請求項３記載の
発明によれば、炉壁内面部に蓄積する汚れによって炉内
雰囲気が影響を受けるのを防止して高温処理ゾーン内を
確実に無酸化性雰囲気に維持できるとともに、炉開放時
に炉壁内面部に付着したＯ２やＨ２Ｏ分をベーキングに
より短時間で炉外へ放出させることができるので、炉の
保守が容易である。In addition to the above effects, according to the third aspect of the present invention, the atmosphere inside the furnace is prevented from being affected by dirt accumulated on the inner surface of the furnace wall, and the inside of the high-temperature processing zone is reliably prevented. Oxidizing atmosphere can be maintained, and O 2 and H 2 O attached to the inner wall of the furnace wall can be released to the outside of the furnace in a short time by baking when the furnace is opened, so that furnace maintenance is easy.
【００３６】また上記の効果に加えて、請求項４記載の
発明によれば、熱放射板からの放射熱によって、被熱物
はほぼ均一な温度に加熱され、加熱処理後の被熱物の品
質のばらつきを少量に抑えることができる。In addition to the above effects, according to the fourth aspect of the present invention, the object to be heated is heated to a substantially uniform temperature by the radiant heat from the heat radiating plate. Variation in quality can be suppressed to a small amount.
【図１】この発明の実施の形態の第１例を示すローラハ
ース式雰囲気炉の縦断面図である。FIG. 1 is a longitudinal sectional view of a roller hearth type atmosphere furnace showing a first example of an embodiment of the present invention.
【図２】図１および図３におけるＡ−Ａ線断面図であ
る。FIG. 2 is a sectional view taken along line AA in FIGS. 1 and 3;
【図３】この発明の実施の形態の第２例を示すローラハ
ース式雰囲気炉の縦断面図である。FIG. 3 is a longitudinal sectional view of a roller hearth type atmosphere furnace showing a second example of the embodiment of the present invention.
【図４】この発明の実施の形態の第３例を示すローラハ
ース式雰囲気炉の要部縦断面図である。FIG. 4 is a longitudinal sectional view of a main part of a roller hearth type atmosphere furnace showing a third embodiment of the present invention.
１…ローラハース式雰囲気炉、２…入口、３…出口、４
…前室、５…冷却室、６…電熱ヒータ、７…予熱ゾー
ン、８…高温処理ゾーン、１１…炉体、１２…断熱材、
１３…ガス空間、１４…外殻板、１５…ガス排出口、２
１…ハースロール、２５…熱放射板、３１…ローラハー
ス式雰囲気炉、３３…流通路、３４…噴気路、３６…冷
却室、３７…後室、４１…ローラハース式雰囲気炉、４
４…パージ室。1 ... roller hearth type atmosphere furnace, 2 ... inlet, 3 ... outlet, 4
... front chamber, 5 ... cooling chamber, 6 ... electric heater, 7 ... preheating zone, 8 ... high temperature processing zone, 11 ... furnace body, 12 ... heat insulating material,
13: gas space, 14: shell plate, 15: gas outlet, 2
DESCRIPTION OF SYMBOLS 1 ... Heath roll, 25 ... Heat radiation plate, 31 ... Roller hearth type atmosphere furnace, 33 ... Flow path, 34 ... Fume path, 36 ... Cooling room, 37 ... Rear chamber, 41 ... Roller hearth type atmosphere furnace, 4
4: Purge chamber.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 松原 寛和 愛知県名古屋市熱田区六野一丁目２番５号 大同特殊鋼株式会社高蔵製作所内 Ｆターム(参考） 4K034 AA05 AA16 EA12 EB08 GA05 4K050 AA02 BA01 CA04 CC07 CF06 CF16 CG05 4K063 AA05 CA03 CA05 CA06 DA05 DA22 DA26 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hirokazu Matsubara 1-2-5 Rokuno, Atsuta-ku, Nagoya-shi, Aichi F-term in Takakura Works, Daido Steel Co., Ltd. (Reference) 4K034 AA05 AA16 EA12 EB08 GA05 4K050 AA02 BA01 CA04 CC07 CF06 CF16 CG05 4K063 AA05 CA03 CA05 CA06 DA05 DA22 DA26
Claims (4)
雰囲気の流入を阻止する外気流入阻止手段をそなえ、無
酸化性雰囲気内で被熱物の加熱処理をおこなうローラハ
ース式雰囲気炉において、炉内に炉温１１００℃以上の
高温処理ゾーンを設け、該高温処理ゾーンにおけるハー
スロールをカーボンロールで構成したことを特徴とする
ローラハース式雰囲気炉。1. A roller hearth type atmosphere furnace having an outside air inflow prevention means for preventing an inflow of an oxidizing atmosphere from outside the furnace at an outlet portion and an inlet portion of the furnace, and performing a heat treatment of a heat target in a non-oxidizing atmosphere. , Wherein a high-temperature treatment zone having a furnace temperature of 1100 ° C. or higher is provided in the furnace, and a hearth roll in the high-temperature treatment zone is formed of a carbon roll.
雰囲気の流入を阻止する外気流入阻止手段をそなえ、無
酸化性雰囲気内で被熱物の加熱処理をおこなうローラハ
ース式雰囲気炉において、炉内に炉温１１００℃以上の
高温処理ゾーンを設け、該高温処理ゾーンにおけるハー
スロールをカーボンロールで構成するとともに、前記高
温処理ゾーンに隣接する隣接ゾーンから該高温処理ゾー
ンへの雰囲気の流入を阻止する雰囲気流入阻止手段を設
けたことを特徴とするローラハース式雰囲気炉。2. A roller hearth type atmosphere furnace having an outside air inflow preventing means at an outlet portion and an inlet portion of the furnace for preventing inflow of an oxidizing atmosphere from the outside of the furnace, and performing heat treatment of an object to be heated in a non-oxidizing atmosphere. In the furnace, a high-temperature processing zone having a furnace temperature of 1100 ° C. or higher is provided, and a hearth roll in the high-temperature processing zone is formed of a carbon roll, and an atmosphere from an adjacent zone adjacent to the high-temperature processing zone to the high-temperature processing zone is provided. A roller hearth-type atmosphere furnace comprising an atmosphere inflow prevention means for preventing inflow.
有する断熱材と、この断熱材をガス空間を介して包囲す
る外殻板とから成る二重構造とし、加熱処理中において
炉内雰囲気ガスを、前記断熱材を通過させ前記ガス空間
を経て炉外へ排出させるようにしたことを特徴とする請
求項１または２記載のローラハース式雰囲気炉。3. The furnace body of the high-temperature treatment zone has a double structure including a heat-insulating material having air permeability and an outer shell plate surrounding the heat-insulating material via a gas space. 3. The roller hearth type atmosphere furnace according to claim 1, wherein the atmosphere gas is passed through the heat insulating material and discharged out of the furnace through the gas space.
て、炉内上部に設けた加熱源と前記ハースロール上の被
熱物との間に、前記加熱源により加熱され前記被熱物に
対向する下面からの放射熱により前記被熱物を加熱する
熱放射板を設けたことを特徴とする請求項１または２ま
たは３記載のローラハース式雰囲気炉。4. At least in the high-temperature treatment zone, a space between a heating source provided in an upper part of the furnace and an object to be heated on the hearth roll is heated from the lower surface facing the object to be heated by the heating source. 4. The roller hearth type atmosphere furnace according to claim 1, further comprising a heat radiating plate for heating the object by radiant heat.
Priority Applications (1)
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|---|---|---|---|
| JP2000350480A JP2002156188A (en) | 2000-11-17 | 2000-11-17 | Roller hearth type atmospheric furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000350480A JP2002156188A (en) | 2000-11-17 | 2000-11-17 | Roller hearth type atmospheric furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002156188A true JP2002156188A (en) | 2002-05-31 |
Family
ID=18823704
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000350480A Pending JP2002156188A (en) | 2000-11-17 | 2000-11-17 | Roller hearth type atmospheric furnace |
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|---|---|
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| JP2017032219A (en) * | 2015-08-03 | 2017-02-09 | 住友電工焼結合金株式会社 | Roller hearth furnace and process of manufacture of heat treatment product by roller hearth furnace |
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2000
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| JP2005207692A (en) * | 2004-01-26 | 2005-08-04 | Nec Corp | Heating device |
| JP4561107B2 (en) * | 2004-01-26 | 2010-10-13 | 日本電気株式会社 | Heating apparatus and heating method |
| WO2007086173A1 (en) * | 2006-01-30 | 2007-08-02 | International Customer Service | Gas atmosphere heat treating apparatus and method |
| JP2008002747A (en) * | 2006-06-22 | 2008-01-10 | Kanto Yakin Kogyo Co Ltd | Atmospheric gas sealing method and device for heating furnace, and heating furnace comprising the same |
| JP2012097935A (en) * | 2010-10-29 | 2012-05-24 | Takasago Ind Co Ltd | Roller hearth kiln, and method and cylindrical member for adjusting difference in speed |
| CN102419088A (en) * | 2011-12-09 | 2012-04-18 | 云南铝业股份有限公司 | Graphite cathode carbon block preheating equipment capable of continuously heating in reciprocating mode |
| JP2017032219A (en) * | 2015-08-03 | 2017-02-09 | 住友電工焼結合金株式会社 | Roller hearth furnace and process of manufacture of heat treatment product by roller hearth furnace |
| CN109269295A (en) * | 2018-10-30 | 2019-01-25 | 湖南金炉科技股份有限公司 | A kind of atmosphere protection roller kilns |
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