JP2002139415A - Light scattering type particle detector - Google Patents
Light scattering type particle detectorInfo
- Publication number
- JP2002139415A JP2002139415A JP2000335330A JP2000335330A JP2002139415A JP 2002139415 A JP2002139415 A JP 2002139415A JP 2000335330 A JP2000335330 A JP 2000335330A JP 2000335330 A JP2000335330 A JP 2000335330A JP 2002139415 A JP2002139415 A JP 2002139415A
- Authority
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- Japan
- Prior art keywords
- mounting
- laser medium
- laser
- light
- mounting block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、レーザ媒質を用い
たレーザ発振器を光源として試料流体中に含まれる粒子
を検出する光散乱式粒子検出器に関する。The present invention relates to a light scattering type particle detector for detecting particles contained in a sample fluid using a laser oscillator using a laser medium as a light source.
【０００２】[0002]
【従来の技術】従来の光散乱式粒子検出器としては、図
８に示すように、レーザ発振器を構成するレーザ媒質１
０５と反射鏡１０６の間に粒子検出対象となる流体によ
り流路１０７を形成し、半導体レーザ１０８の励起用光
Ｌｅを集光レンズ１０９でレーザ媒質１０５に集光させ
てレーザ媒質１０５を励起させ、レーザ媒質１０５と反
射鏡１０６の間で共振するレーザ光Ｌａと流路１０７が
交差する箇所を粒子検出領域１１０とし、共振するレー
ザ光Ｌａによって粒子検出領域１１０で発生する散乱光
を受光部（不図示）で受光して散乱光の強度に応じた電
気信号から試料流体中に含まれる粒子を検出するものが
知られている。2. Description of the Related Art As a conventional light scattering type particle detector, as shown in FIG. 8, a laser medium 1 constituting a laser oscillator is used.
A flow path 107 is formed between the liquid crystal 05 and the reflecting mirror 106 by a fluid to be subjected to particle detection, and the excitation light Le of the semiconductor laser 108 is condensed on the laser medium 105 by the condenser lens 109 to excite the laser medium 105. A point where the laser beam La resonating between the laser medium 105 and the reflecting mirror 106 and the flow path 107 intersect is defined as a particle detection region 110, and scattered light generated in the particle detection region 110 by the resonating laser beam La is received by a light receiving unit ( There is known an apparatus which detects particles contained in a sample fluid from an electric signal corresponding to the intensity of scattered light received at an unillustrated (not shown).
【０００３】なお、１１２は中空な第１取付ブロック、
１１３は中空な第２取付ブロックであり、第１取付ブロ
ック１１２と第２取付ブロック１１３でケース本体が形
成される。レーザ媒質１０５は、第２取付ブロック１１
３に直接組み付けられ、第２取付ブロック１１３は第１
取付ブロック１１２に組み付けられる。また、受光部を
収納した受光ケース（不図示）は第１取付ブロック１１
２の側面に組み付けられる。A reference numeral 112 denotes a hollow first mounting block,
Reference numeral 113 denotes a hollow second mounting block, and the first mounting block 112 and the second mounting block 113 form a case body. The laser medium 105 includes the second mounting block 11
3 and the second mounting block 113 is
It is assembled to the mounting block 112. The light-receiving case (not shown) containing the light-receiving portion is provided on the first mounting block 11.
2 side.
【０００４】そして、レーザ媒質１０５を第２取付ブロ
ック１１３に組み付けたとき、組付誤差等がなければ、
レーザ媒質１０５が放射するレーザ光Ｌａは、レーザ媒
質１０５の端面（放射面）に対して垂直方向で、且つ第
１取付ブロック１１２の中心軸と一致する方向に進む。When the laser medium 105 is mounted on the second mounting block 113, if there is no mounting error or the like,
The laser light La emitted from the laser medium 105 travels in a direction perpendicular to the end surface (radiation surface) of the laser medium 105 and in a direction coinciding with the central axis of the first mounting block 112.
【０００５】[0005]
【発明が解決しようとする課題】しかし、実際には、組
付誤差等があるため、レーザ光Ｌａは第１取付ブロック
１１２の中心軸と一致する方向に出ていかない。この場
合、反射鏡１０６の第１取付ブロック１１２に対する取
付角度を調整することによって、反射鏡１０６で反射す
るレーザ光Ｌａが確実にレーザ媒質１０５に帰還するよ
うにする必要がある。However, in practice, the laser beam La does not exit in the direction coinciding with the center axis of the first mounting block 112 due to an assembly error or the like. In this case, it is necessary to adjust the mounting angle of the reflecting mirror 106 with respect to the first mounting block 112 so that the laser beam La reflected by the reflecting mirror 106 returns to the laser medium 105 without fail.
【０００６】更に、反射鏡１０６で反射するレーザ光Ｌ
ａが確実にレーザ媒質１０５に帰還するように反射鏡１
０６を最適な取付角度に調整したとしても、発振したレ
ーザ光Ｌａの放射方向は第１取付ブロック１１２の中心
軸と一致しないので、一致することを前提に配置した流
路１０７をずらす必要性が生じる場合もある。そして、
流路１０７をずらせば粒子検出領域１１０の位置も変化
することになるので、これに応じて受光部を収納した受
光ケースの第１取付ブロック１１２への取付位置も調整
しなければならない。Further, the laser beam L reflected by the reflecting mirror 106
a so that the laser beam a returns to the laser medium 105 without fail.
Even if 06 is adjusted to the optimum mounting angle, the emission direction of the oscillated laser beam La does not coincide with the central axis of the first mounting block 112, so that it is necessary to shift the flow path 107 provided on the premise that they coincide with each other. May occur. And
If the flow path 107 is shifted, the position of the particle detection region 110 also changes, and accordingly, the mounting position of the light receiving case housing the light receiving unit on the first mounting block 112 must be adjusted.
【０００７】従って、従来の光散乱式粒子検出器におい
ては、組付誤差等がある場合に行う反射鏡１０６の取付
角度調整に伴って、流路１０７の位置調整や受光ケース
の第１取付ブロック１１２に対する取付調整などに複雑
な調整を必要とすると共に、装置全体の組立作業時に多
くの工数を必要とするため、問題となっていた。Therefore, in the conventional light scattering type particle detector, the position adjustment of the flow path 107 and the first mounting block of the light receiving case are performed in accordance with the mounting angle adjustment of the reflecting mirror 106 performed when there is an assembling error or the like. This requires a complicated adjustment such as mounting adjustment to the 112, and also requires a large number of man-hours when assembling the entire apparatus.
【０００８】本発明は、従来の技術が有するこのような
問題点に鑑みてなされたものであり、その目的とすると
ころは、レーザ媒質や反射鏡などの組付角度調整が容易
な散乱式粒子検出器を提供しようとするものである。The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to provide a scattering type particle having a laser medium, a reflecting mirror, etc., whose angle of attachment can be easily adjusted. It is intended to provide a detector.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決すべく請
求項１に係る発明は、励起用光によって励起するレーザ
媒質と、このレーザ媒質が放射するレーザ光を反射する
反射鏡の間に、試料流体が形成する流路を配置し、この
流路に前記レーザ光を照射して粒子検出領域を形成し、
この粒子検出領域に含まれる粒子を前記レーザ光によっ
て生じる散乱光を受光して検出する光散乱式粒子検出器
において、前記レーザ媒質の光軸と前記反射鏡の光軸を
一致させると共に、これらの光軸が前記流路と交差する
ように前記レーザ媒質と前記反射鏡の取付ブロックに対
する取付角度を調整する取付角度調整手段を設けたもの
である。In order to solve the above-mentioned problems, the invention according to claim 1 is characterized in that a laser medium which is excited by excitation light and a reflecting mirror which reflects laser light emitted by the laser medium are provided. A flow path formed by the sample fluid is arranged, and the flow path is irradiated with the laser light to form a particle detection region,
In a light-scattering particle detector that detects the particles contained in the particle detection region by receiving scattered light generated by the laser light, the optical axis of the laser medium and the optical axis of the reflecting mirror coincide with each other. A mounting angle adjusting means for adjusting a mounting angle of the laser medium and the reflecting mirror with respect to a mounting block so that an optical axis intersects the flow path is provided.
【００１０】請求項２に係る発明は、請求項１に記載の
光散乱式粒子検出器において、前記取付角度調整手段
は、前記レーザ媒質を前記取付ブロックに対して取付角
度調整自在なレーザ媒質取付部材に固定し、前記反射鏡
を前記取付ブロックに対して取付角度調整自在な反射鏡
取付部材に固定し、前記レーザ媒質取付部材と前記取付
ブロックとの間及び前記反射鏡取付部材と前記取付ブロ
ックとの間に弾性部材を介装した。According to a second aspect of the present invention, in the light scattering type particle detector according to the first aspect, the mounting angle adjusting means adjusts the mounting angle of the laser medium with respect to the mounting block. The reflector is fixed to a member, and the reflecting mirror is fixed to a reflecting mirror mounting member whose mounting angle can be adjusted with respect to the mounting block, between the laser medium mounting member and the mounting block and between the reflecting mirror mounting member and the mounting block. And an elastic member was interposed therebetween.
【００１１】請求項３に係る発明は、請求項２に記載の
光散乱式粒子検出器において、前記弾性部材をゴム製の
Ｏリングとした。According to a third aspect of the present invention, in the light scattering type particle detector according to the second aspect, the elastic member is an O-ring made of rubber.
【００１２】[0012]
【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。ここで、図１は本発明に係る
光散乱式粒子検出器の概略構成断面図、図２は受光部の
概略構成断面図、図３はレーザ媒質取付部材の斜視図、
図４は反射鏡取付部材の斜視図、図５はレーザ媒質取付
部材の取付角度調整の説明図、図６は他の実施の形態に
係る光散乱式粒子検出器の概略構成断面図、図７は反射
鏡取付部材の斜視図である。Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a schematic sectional view of a light scattering type particle detector according to the present invention, FIG. 2 is a schematic sectional view of a light receiving section, FIG. 3 is a perspective view of a laser medium mounting member,
FIG. 4 is a perspective view of a reflector mounting member, FIG. 5 is an explanatory view of adjusting a mounting angle of a laser medium mounting member, FIG. 6 is a schematic configuration sectional view of a light scattering type particle detector according to another embodiment, and FIG. FIG. 3 is a perspective view of a reflector mounting member.
【００１３】本発明に係る光散乱式粒子検出器は、図１
及び図２に示すように、光源としてのレーザ発振器１
と、検出対象となる流体により形成される流路２と、散
乱光を受光する受光部３を備えている。レーザ発振器１
はともに中空な第１取付ブロック４と第２取付ブロック
５で形成されるケース本体６内に収納され、受光部３は
第１取付ブロック４の側面に組み付けられた受光ケース
７内に収納されている。FIG. 1 shows a light scattering type particle detector according to the present invention.
And a laser oscillator 1 as a light source as shown in FIG.
And a flow path 2 formed by a fluid to be detected, and a light receiving unit 3 for receiving scattered light. Laser oscillator 1
Are housed in a case body 6 formed of a hollow first mounting block 4 and a second mounting block 5, and the light receiving section 3 is housed in a light receiving case 7 mounted on a side surface of the first mounting block 4. I have.
【００１４】レーザ発振器１は、励起用レーザ光Ｌｅを
放射する半導体レーザ１１と、励起用レーザ光Ｌｅを集
光する集光レンズ１２と、集光レンズ１２で集光した励
起用レーザ光Ｌｅを受けて励起し、レーザ光Ｌａを放射
するレーザ媒質１３と、レーザ媒質１３と流路２を挟ん
で対向して設置され、レーザ媒質１３が放射するレーザ
光Ｌａを反射してレーザ媒質１３に帰還させる反射鏡１
４からなる。The laser oscillator 1 includes a semiconductor laser 11 for emitting the excitation laser light Le, a condenser lens 12 for condensing the excitation laser light Le, and a pumping laser light Le collected by the condenser lens 12. The laser medium 13 that receives, excites, and emits the laser light La, and is installed facing the laser medium 13 with the flow path 2 interposed therebetween, reflects the laser light La emitted by the laser medium 13, and returns to the laser medium 13. Reflector 1
Consists of four.
【００１５】レーザ媒質１３としては、例えばＮｄ：Ｙ
ＶＯ4、Ｎｄ：ＹＡＧなどが用いられる。レーザ媒質１
３の集光レンズ１２側の端面には、半導体レーザ１１の
励振波長（レーザ媒質１３のポンピング波長）を通す反
射防止膜およびレーザ媒質１３の発振波長を反射する反
射膜が形成されている。また、レーザ媒質１３の反射鏡
１４側の端面には、レーザ媒質１３の発振波長に対する
反射防止膜が形成されている。なお、レーザ媒質１３
は、その端面から垂直にレーザ光Ｌａを放射する。As the laser medium 13, for example, Nd: Y
VO 4 , Nd: YAG or the like is used. Laser medium 1
An anti-reflection film that passes the excitation wavelength of the semiconductor laser 11 (the pumping wavelength of the laser medium 13) and a reflection film that reflects the oscillation wavelength of the laser medium 13 are formed on the end surface of the third condensing lens 12 side. An antireflection film for the oscillation wavelength of the laser medium 13 is formed on the end face of the laser medium 13 on the side of the reflecting mirror 14. The laser medium 13
Emits a laser beam La vertically from its end face.
【００１６】流路２は、第１取付ブロック４に形成した
インレット８とアウトレット９の間を検出対象となる流
体を流すことによって形成される。インレット８とアウ
トレット９は、流路２が第１取付ブロック４の中心軸と
直交または少なくとも交差するように第１取付ブロック
４に形成されている。流体は、アウトレット９の下流に
接続した吸引ポンプ（不図示）により吸引され、インレ
ット８からアウトレット９に流れる。そして、レーザ光
Ｌａと流路２が交差する箇所が粒子検出領域１０とな
る。The flow path 2 is formed by flowing a fluid to be detected between the inlet 8 and the outlet 9 formed in the first mounting block 4. The inlet 8 and the outlet 9 are formed in the first mounting block 4 such that the flow path 2 is orthogonal to or at least intersects with the central axis of the first mounting block 4. The fluid is sucked by a suction pump (not shown) connected downstream of the outlet 9 and flows from the inlet 8 to the outlet 9. Then, a portion where the laser beam La and the flow path 2 intersect becomes the particle detection region 10.
【００１７】受光部３は、粒子検出領域１０で生じる散
乱光Ｌｓを集光する集光レンズ１５と、集光した散乱光
Ｌｓを光電変換するフォトダイオード１６と、増幅器１
７などを備え、流体に粒子が含まれている場合に粒子検
出領域１０において粒子に照射されたレーザ光Ｌａによ
って生じる散乱光Ｌｓを受光し、散乱光Ｌｓの強度に応
じた電気信号を出力する。なお、７ａ，７ｂはＯリング
である。The light receiving section 3 includes a condenser lens 15 for condensing scattered light Ls generated in the particle detection region 10, a photodiode 16 for photoelectrically converting the collected scattered light Ls, and an amplifier 1
7 and the like, and receives scattered light Ls generated by the laser light La applied to the particles in the particle detection region 10 when the fluid contains particles, and outputs an electric signal corresponding to the intensity of the scattered light Ls. . 7a and 7b are O-rings.
【００１８】レーザ媒質１３は、図１に示すように、円
板状のレーザ媒質取付部材１８を介して第２取付ブロッ
ク５に取り付けられている。この時、レーザ媒質１３の
光軸１３ａ（レーザ光Ｌａの放射方向）上にあるレーザ
媒質１３の出射口は、レーザ媒質取付部材１８の中心軸
上にある。また、レーザ媒質取付部材１８の中心軸と第
２取付ブロック５の中心軸とは、一致した状態になって
いる。As shown in FIG. 1, the laser medium 13 is mounted on the second mounting block 5 via a disk-shaped laser medium mounting member 18. At this time, the emission port of the laser medium 13 on the optical axis 13 a (radiation direction of the laser light La) of the laser medium 13 is on the central axis of the laser medium mounting member 18. Further, the center axis of the laser medium mounting member 18 and the center axis of the second mounting block 5 are in a state of being aligned.
【００１９】レーザ媒質取付部材１８は、中心に半導体
レーザ１１が放射する励起用レーザ光Ｌｅを通す貫通孔
を有し、図３に示すように、円周を６等分した縁部にね
じを切ったねじ孔１８ａとねじを切っていない孔１８ｂ
を交互に形成している。The laser medium mounting member 18 has a through hole at the center through which the excitation laser light Le emitted from the semiconductor laser 11 passes, and as shown in FIG. Screwed hole 18a and unthreaded hole 18b
Are formed alternately.
【００２０】そして、３つのねじ孔１８ａには、それぞ
れボルト１９がねじ込まれ、これらのボルト１９の先端
部は、図１に示すように、第２取付ブロック５の表面に
当接している。また、３つの孔１８ｂには、それぞれボ
ルト１９が挿通され、これらのボルト１９の先端部は第
２取付ブロック５に形成されたねじ孔にねじ込まれてい
る。Bolts 19 are screwed into the three screw holes 18a, and the tips of the bolts 19 are in contact with the surface of the second mounting block 5, as shown in FIG. Bolts 19 are inserted into the three holes 18b, and the tips of these bolts 19 are screwed into screw holes formed in the second mounting block 5.
【００２１】従って、３つのねじ孔１８ａへの３本のボ
ルト１９のねじ込み量と、３つの孔１８ｂへ挿通したボ
ルト１９の第２取付ブロック５へのねじ込み量を適宜調
整すれば、第２取付ブロック５に対してレーザ媒質取付
部材１８を自在に傾けて取り付けることができる。これ
により、レーザ媒質取付部材１８に取り付けたレーザ媒
質１３も第２取付ブロック５に対して傾けることができ
る。Therefore, if the screwing amount of the three bolts 19 into the three screw holes 18a and the screwing amount of the bolts 19 inserted into the three holes 18b into the second mounting block 5 are appropriately adjusted, the second mounting is achieved. The laser medium attaching member 18 can be attached to the block 5 while being freely inclined. Thereby, the laser medium 13 mounted on the laser medium mounting member 18 can also be inclined with respect to the second mounting block 5.
【００２２】反射鏡１４は、図１に示すように、反射鏡
取付部材２０を介して第１取付ブロック４に取り付けら
れている。この時、反射鏡１４の光軸１４ａ（レーザ光
Ｌａの反射方向）上にある反射面の中心は、反射鏡取付
部材２０の中心軸上にある。また、反射鏡取付部材２０
の中心軸と第１取付ブロック４の中心軸とは、一致した
状態になっている。The reflecting mirror 14 is mounted on the first mounting block 4 via a reflecting mirror mounting member 20, as shown in FIG. At this time, the center of the reflection surface on the optical axis 14 a (reflection direction of the laser beam La) of the reflection mirror 14 is on the central axis of the reflection mirror mounting member 20. Also, the reflector mounting member 20
And the central axis of the first mounting block 4 are aligned.
【００２３】反射鏡取付部材２０は、図４に示すよう
に、薄肉円筒部材２０ａの両端に大径のフランジ２０ｂ
と小径のフランジ２０ｃを一体に形成したものである。
大径のフランジ２０ｂには、円周を３等分した縁部にね
じを切ったねじ孔２０ｄとねじを切っていない孔２０ｅ
を交互に形成している。As shown in FIG. 4, the reflecting mirror mounting member 20 has large diameter flanges 20b at both ends of a thin cylindrical member 20a.
And a small-diameter flange 20c are integrally formed.
The large-diameter flange 20b has a threaded hole 20d and a non-threaded hole 20e with a threaded edge at three equal parts of the circumference.
Are formed alternately.
【００２４】そして、３つのねじ孔２０ｄには、それぞ
れボルト２１がねじ込まれ、これらのボルト２１の先端
部は、図１に示すように、小径のフランジ２０ｃの表面
に当接している。また、３つの孔２０ｅには、それぞれ
ボルト２１が挿通され、これらのボルト２１の先端部は
小径のフランジ２０ｃに形成されたねじ孔２０ｆにねじ
込まれている。Bolts 21 are screwed into the three screw holes 20d, respectively, and the tips of these bolts 21 are in contact with the surface of the small-diameter flange 20c as shown in FIG. Bolts 21 are respectively inserted into the three holes 20e, and the tips of the bolts 21 are screwed into screw holes 20f formed in the small-diameter flange 20c.
【００２５】従って、３つのねじ孔２０ｄへの３本のボ
ルト２１のねじ込み量と、３つの孔２０ｅへ挿通したボ
ルト２１のフランジ２０ｃのねじ孔２０ｆへのねじ込み
量を適宜調整すれば薄肉円筒部材２０ａが撓むので、第
１取付ブロック４に対して反射鏡取付部材２０を自在に
傾けて取り付けることができる。これにより、反射鏡取
付部材２０に取り付けた反射鏡１４を第１取付ブロック
４に対して傾けることができる。Therefore, if the screwing amount of the three bolts 21 into the three screw holes 20d and the screwing amount of the bolt 20 inserted into the three holes 20e into the screw holes 20f of the flange 20c are appropriately adjusted, the thin cylindrical member can be obtained. Since the reflector 20a is bent, the reflector mounting member 20 can be attached to the first mounting block 4 by freely tilting. Thereby, the reflector 14 attached to the reflector attachment member 20 can be inclined with respect to the first attachment block 4.
【００２６】以上のように構成した本発明に係る光散乱
式粒子検出器の組付調整について説明する。先ず、レー
ザ媒質１３の第２取付ブロック５に対する取付角度の調
整を行う。この調整作業は、図５に示すように、調整用
のレーザ光Ｌｖを放射するレーザ光源２５と、レーザ光
源２５が放射したレーザ光Ｌｖが通過するシャッタ板２
６を用意して行う。The assembly adjustment of the light-scattering type particle detector according to the present invention configured as described above will be described. First, the mounting angle of the laser medium 13 with respect to the second mounting block 5 is adjusted. As shown in FIG. 5, the adjustment operation is performed by a laser light source 25 that emits the adjustment laser light Lv and a shutter plate 2 through which the laser light Lv emitted by the laser light source 25 passes.
6 is prepared.
【００２７】そして、取付角度調整治具（不図示）に、
第２取付ブロック５にレーザ媒質取付部材１８を介して
取り付けたレーザ媒質１３と、レーザ光源２５と、シャ
ッタ板２６をセットする。この時、第２取付ブロック５
の面５ａとレーザ光源２５が放射するレーザ光Ｌｖの放
射方向とは互いに垂直で、且つ第２取付ブロック５の中
心軸とレーザ光Ｌｖの放射方向とは一致するようにセッ
トされている。更に、シャッタ板２６は、その孔２６ａ
をレーザ光Ｌｖが通過するようにセットされている。Then, a mounting angle adjusting jig (not shown)
The laser medium 13 mounted on the second mounting block 5 via the laser medium mounting member 18, the laser light source 25, and the shutter plate 26 are set. At this time, the second mounting block 5
The emission direction of the laser light Lv emitted by the laser light source 25 is set to be perpendicular to the surface 5a, and the central axis of the second mounting block 5 and the emission direction of the laser light Lv coincide with each other. Further, the shutter plate 26 has a hole 26a.
Is set so that the laser light Lv passes through the light source.
【００２８】次いで、レーザ光源２５からレーザ光Ｌｖ
を放射し、レーザ媒質１３の端面で反射した反射光がシ
ャッタ板２６の孔２６ａを通過するように、６本のボル
ト１９を交互にねじ込みながらレーザ媒質取付部材１８
の第２取付ブロック５に対する取付角度を調整する。Next, the laser light Lv
And the laser medium mounting member 18 is alternately screwed with the six bolts 19 so that the reflected light reflected on the end face of the laser medium 13 passes through the hole 26a of the shutter plate 26.
Is adjusted with respect to the second mounting block 5.
【００２９】反射光がシャッタ板２６の孔２６ａを通過
するということは、レーザ媒質１３が第２取付ブロック
５の面５ａに対して垂直で、且つ第２取付ブロック５の
中心軸と一致する方向にレーザ光Ｌａを放射することを
意味する。従って、レーザ媒質１３の光軸１３ａ（レー
ザ光Ｌａの放射方向）と第２取付ブロック５の中心軸を
一致させることを目的とするレーザ媒質１３の第２取付
ブロック５に対する取付角度の調整作業は終了する。The fact that the reflected light passes through the hole 26a of the shutter plate 26 means that the laser medium 13 is perpendicular to the surface 5a of the second mounting block 5 and coincides with the central axis of the second mounting block 5. Means that the laser beam La is emitted. Accordingly, the work of adjusting the mounting angle of the laser medium 13 with respect to the second mounting block 5 for the purpose of making the optical axis 13a (radiation direction of the laser light La) of the laser medium 13 coincide with the central axis of the second mounting block 5 is performed. finish.
【００３０】次いで、上記取付角度調整が完了したレー
ザ媒質１３を取り付けた第２取付ブロック５に、反射鏡
取付部材２０を介して反射鏡１４を取り付けた第１取付
ブロック４を組み付け、光散乱式粒子検出器の組立を完
成する。この時、第１取付ブロック４の中心軸と第２取
付ブロック５の中心軸とは、一致した状態にある。Next, the first mounting block 4 on which the reflecting mirror 14 is mounted via the reflecting mirror mounting member 20 is mounted on the second mounting block 5 on which the laser medium 13 whose mounting angle has been adjusted is completed. Complete the assembly of the particle detector. At this time, the central axis of the first mounting block 4 and the central axis of the second mounting block 5 are in the same state.
【００３１】次に、反射鏡１４の第１取付ブロック４に
対する取付角度の調整を行う。この調整作業は、組立が
完成した光散乱式粒子検出器の流路２に標準粒子を含む
気体を流しながら、標準粒子が発する散乱光Ｌｓに応じ
た受光部３の出力電圧が最大になるように６本のボルト
２１を交互にねじ込んで行う。また、反射鏡１４の透過
光量を光パワーメータで見ながら透過光量が最大になる
ように、６本のボルト２１を交互にねじ込んで反射鏡１
４の第１取付ブロック４に対する取付角度の調整を行う
こともできる。Next, the mounting angle of the reflecting mirror 14 with respect to the first mounting block 4 is adjusted. This adjustment operation is performed so that the output voltage of the light receiving unit 3 according to the scattered light Ls emitted from the standard particles is maximized while flowing the gas containing the standard particles into the flow path 2 of the assembled light scattering type particle detector. 6 screws 21 are alternately screwed. Further, the six bolts 21 are alternately screwed in so as to maximize the amount of transmitted light while observing the amount of transmitted light of the reflecting mirror 14 with an optical power meter.
The mounting angle of the first mounting block 4 with respect to the first mounting block 4 can also be adjusted.
【００３２】散乱光Ｌｓに応じた電圧が最大になるとい
うことは、最も効率よくレーザ発振が行われる状態であ
って、レーザ媒質１３が放射するレーザ光Ｌａの放射方
向、即ちレーザ媒質１３の光軸１３ａと、反射鏡１４の
光軸１４ａが一致していることを意味する。従って、反
射鏡１４の光軸１４ａ（レーザ光Ｌａの反射方向）と第
１取付ブロック４の中心軸を一致させることを目的とす
る反射鏡１４の第１取付ブロック４に対する取付角度の
調整作業は終了する。The fact that the voltage corresponding to the scattered light Ls is maximum means that the laser oscillation is most efficiently performed, and the emission direction of the laser light La emitted from the laser medium 13, that is, the light of the laser medium 13 This means that the axis 13a and the optical axis 14a of the reflecting mirror 14 coincide. Therefore, the work of adjusting the mounting angle of the reflecting mirror 14 with respect to the first mounting block 4 for the purpose of making the optical axis 14a (reflection direction of the laser beam La) of the reflecting mirror 14 coincide with the central axis of the first mounting block 4 is performed. finish.
【００３３】本発明の他の実施の形態に係る光散乱式粒
子検出器は、図６に示すように、レーザ媒質取付部材１
８と第２取付ブロック５との間にゴム製のＯリング３０
を配置した点と、反射鏡取付部材３１を反射鏡取付部材
２０と異なる形状に形成した点と、第１取付ブロック４
の端部に３つのねじ孔４ａを形成した点と、ねじ孔４ａ
等によって反射鏡取付部材３１を固定した点と、反射鏡
取付部材３１と第１取付ブロック４との間にゴム製のＯ
リング３２を配置した点が、図１に示す光散乱式粒子検
出器と相違する。なお、図６において、図１と同一符号
を付す構成要素については、その説明を省略する。As shown in FIG. 6, a light scattering type particle detector according to another embodiment of the present invention
Rubber O-ring 30 between the second mounting block 5 and the second mounting block 5
And that the reflector mounting member 31 is formed in a shape different from that of the reflector mounting member 20, and that the first mounting block 4
Of three screw holes 4a formed at the end of the screw hole 4a
A rubber O is located between the reflector mounting member 31 and the first mounting block 4 between the point where the reflecting mirror mounting member 31 is fixed by
The point that the ring 32 is arranged is different from the light scattering type particle detector shown in FIG. In FIG. 6, the description of the components denoted by the same reference numerals as those in FIG. 1 is omitted.
【００３４】レーザ媒質取付部材１８と第２取付ブロッ
ク５との間に介装されたＯリング３０は、その弾発力に
よりレーザ媒質取付部材１８と第２取付ブロック５との
間を離隔するように作用する。これにより、６本のボル
ト１９のねじ込み量を調整して行うレーザ媒質取付部材
１８の第２取付ブロック５に対する取付角度の調整作業
が円滑に行われる。The O-ring 30 interposed between the laser medium mounting member 18 and the second mounting block 5 separates the laser medium mounting member 18 from the second mounting block 5 by its elastic force. Act on. Thus, the work of adjusting the mounting angle of the laser medium mounting member 18 with respect to the second mounting block 5 by adjusting the screwing amounts of the six bolts 19 is smoothly performed.
【００３５】反射鏡１４は、円板状の反射鏡取付部材３
１の中心に取り付けられている。反射鏡取付部材３１
は、図７に示すように、円周を６等分した縁部にねじを
切ったねじ孔３１ａとねじを切っていない孔３１ｂを交
互に形成している。The reflecting mirror 14 is a disk-shaped reflecting mirror mounting member 3.
It is attached to the center of one. Reflector mounting member 31
As shown in FIG. 7, threaded screw holes 31a and unthreaded holes 31b are alternately formed on the edge of the circumference divided into six equal parts.
【００３６】そして、３つのねじ孔３１ａには、それぞ
れボルト３３がねじ込まれ、これらのボルト３３の先端
部は、図６に示すように、第１取付ブロック４の表面に
当接している。また、３つの孔３１ｂには、それぞれボ
ルト３３が挿通され、これらのボルト３３の先端部は第
１取付ブロック４に形成されたねじ孔４ａにねじ込まれ
ている。Bolts 33 are screwed into the three screw holes 31a, respectively, and the tips of the bolts 33 are in contact with the surface of the first mounting block 4, as shown in FIG. Bolts 33 are inserted into the three holes 31b, respectively, and the tips of the bolts 33 are screwed into screw holes 4a formed in the first mounting block 4.
【００３７】従って、３つのねじ孔３１ａへの３本のボ
ルト３３のねじ込み量と、３つの孔３１ｂへ挿通したボ
ルト３３の第１取付ブロック４へのねじ込み量を適宜調
整すれば、第１取付ブロック４に対し反射鏡取付部材３
１を自在に傾けて取り付けることができる。これによ
り、反射鏡取付部材３１に取り付けた反射鏡１４も第１
取付ブロック４に対して傾けることができる。Therefore, if the screwing amount of the three bolts 33 into the three screw holes 31a and the screwing amount of the bolts 33 inserted into the three holes 31b into the first mounting block 4 are appropriately adjusted, the first mounting is achieved. Reflector mounting member 3 for block 4
1 can be attached at an angle. Thereby, the reflecting mirror 14 attached to the reflecting mirror attaching member 31 is also the first mirror.
It can be tilted with respect to the mounting block 4.
【００３８】この時、反射鏡取付部材３１と第１取付ブ
ロック４との間に介装されたＯリング３２は、その弾発
力により反射鏡取付部材３１と第１取付ブロック４との
間を離隔するように作用する。これにより、６本のボル
ト３３のねじ込み量を調整して行う反射鏡取付部材３１
の第１取付ブロック４に対する取付角度の調整作業が円
滑に行われる。At this time, the O-ring 32 interposed between the reflector mounting member 31 and the first mounting block 4 moves between the reflector mounting member 31 and the first mounting block 4 by its elastic force. Acts to separate. Thus, the reflecting mirror mounting member 31 that is adjusted by adjusting the screwing amounts of the six bolts 33
The operation of adjusting the mounting angle with respect to the first mounting block 4 is smoothly performed.
【００３９】また、図６に示す光散乱式粒子検出器は、
レーザ媒質取付部材１８と第２取付ブロック５との間に
Ｏリング３０を介装すると共に、反射鏡取付部材３１と
第１取付ブロック４との間にもＯリング３２を介装して
いるので、第１取付ブロック４と第２取付ブロック５と
の間にシールを施せば、ケース本体６内の空間は外部と
遮断されることになる。これにより、外部の空気などが
ケース本体６内に侵入することがなく、ケース本体６内
に配置されたレーザ媒質１３や反射鏡１４などの光学機
器が汚されることがない。The light scattering type particle detector shown in FIG.
Since the O-ring 30 is interposed between the laser medium mounting member 18 and the second mounting block 5, the O-ring 32 is also interposed between the reflector mounting member 31 and the first mounting block 4. If a seal is provided between the first mounting block 4 and the second mounting block 5, the space in the case main body 6 is shut off from the outside. This prevents external air and the like from entering the case main body 6 and prevents optical devices such as the laser medium 13 and the reflecting mirror 14 disposed in the case main body 6 from being stained.
【００４０】[0040]
【発明の効果】以上説明したように請求項１に係る発明
によれば、レーザ媒質と反射鏡の取付角度を調整可能と
したので、流路や受光部の位置調整が不要となり、組付
調整が容易になる。As described above, according to the first aspect of the present invention, since the mounting angle between the laser medium and the reflecting mirror can be adjusted, the position adjustment of the flow path and the light receiving section becomes unnecessary, and the assembly adjustment is made. Becomes easier.
【００４１】請求項２に係る発明によれば、レーザ媒質
を取付ブロックに対して取付角度調整自在なレーザ媒質
取付部材に固定し、反射鏡を取付ブロックに対して取付
角度調整自在な反射鏡取付部材に固定したので、レーザ
媒質と反射鏡の取付角度の調整が容易になる。また、レ
ーザ媒質取付部材と取付ブロックとの間及び反射鏡取付
部材と取付ブロックとの間に弾性部材を介装したので、
その弾発力によりレーザ媒質と反射鏡の取付角度の調整
作業が円滑に行われる。According to the second aspect of the present invention, the laser medium is fixed to the laser medium mounting member whose mounting angle can be adjusted with respect to the mounting block, and the reflecting mirror can be mounted on the mounting block with the mounting angle adjustable. Since it is fixed to the member, it is easy to adjust the mounting angle between the laser medium and the reflecting mirror. Also, since an elastic member is interposed between the laser medium mounting member and the mounting block and between the reflector mounting member and the mounting block,
The adjustment of the mounting angle between the laser medium and the reflecting mirror is smoothly performed by the elastic force.
【００４２】請求項３に係る発明によれば、ゴム製のＯ
リングを用いたので、レーザ媒質や反射鏡などが配置さ
れる内部空間が外部と遮断されるため、外部の空気など
が内部空間に侵入することがなく、レーザ媒質や反射鏡
などが汚されることがない。According to the third aspect of the present invention, rubber O
Because the ring is used, the internal space where the laser medium and the reflector are placed is isolated from the outside, so that the outside air does not enter the internal space and the laser medium and the reflector are contaminated. There is no.
【図１】本発明に係る光散乱式粒子検出器の概略構成断
面図FIG. 1 is a schematic sectional view of a light scattering particle detector according to the present invention.
【図２】受光部の概略構成断面図FIG. 2 is a schematic sectional view of a light receiving section.
【図３】レーザ媒質取付部材の斜視図FIG. 3 is a perspective view of a laser medium mounting member.
【図４】反射鏡取付部材の斜視図FIG. 4 is a perspective view of a reflector mounting member.
【図５】レーザ媒質取付部材の取付角度調整の説明図FIG. 5 is an explanatory diagram of adjusting a mounting angle of a laser medium mounting member.
【図６】他の実施の形態に係る光散乱式粒子検出器の概
略構成断面図FIG. 6 is a schematic sectional view of a light scattering particle detector according to another embodiment.
【図７】他の実施の形態に係る光散乱式粒子検出器の反
射鏡取付部材の斜視図FIG. 7 is a perspective view of a reflector mounting member of a light scattering type particle detector according to another embodiment.
【図８】従来の光散乱式粒子検出器の概略構成断面図FIG. 8 is a schematic cross-sectional view of a conventional light scattering type particle detector.
１…レーザ発振器、２…流路、３…受光部、４…第１取
付ブロック、５…第２取付ブロック、６…ケース本体、
８…インレット、９…アウトレット、１０…粒子検出領
域、１１…半導体レーザ、１２…集光レンズ、１３…レ
ーザ媒質、１３ａ…レーザ媒質の光軸、１４…反射鏡、
１４ａ…反射鏡の光軸、１８…レーザ媒質取付部材、４
ａ，１８ａ，２０ｄ，２０ｆ、３１ａ…ねじ孔、１８
ｂ，２０ｅ，３１ｂ…孔、１９，２１，３３…ボルト、
２０，３１…反射鏡取付部材、３０，３２…Ｏリング、
Ｌａ…レーザ光、Ｌｅ…励起用レーザ光、Ｌｓ…散乱
光。DESCRIPTION OF SYMBOLS 1 ... Laser oscillator, 2 ... Flow path, 3 ... Light receiving part, 4 ... First mounting block, 5 ... Second mounting block, 6 ... Case main body,
8 inlet, 9 outlet, 10 particle detection area, 11 semiconductor laser, 12 condenser lens, 13 laser medium, 13a optical axis of laser medium, 14 reflecting mirror,
14a: optical axis of reflecting mirror, 18: laser medium mounting member, 4
a, 18a, 20d, 20f, 31a ... screw holes, 18
b, 20e, 31b ... holes, 19, 21, 33 ... bolts,
20, 31 ... reflector mounting member, 30, 32 ... O-ring,
La: laser light, Le: laser light for excitation, Ls: scattered light.
フロントページの続き (72)発明者 佐々木 憲司 東京都国分寺市東元町３丁目20番41号 リ オン株式会社内 (72)発明者 中島 勉 東京都国分寺市東元町３丁目20番41号 リ オン株式会社内 Ｆターム(参考） 2G059 AA05 BB09 CC19 EE02 GG01 JJ11 JJ13 JJ23 KK01 Continuing on the front page (72) Inventor Kenji Sasaki 3-20-41 Higashimotomachi, Kokubunji-shi, Tokyo Rion Corporation (72) Inventor Tsutomu Nakajima 3-20-441 Higashimotomachi, Kokubunji-shi Tokyo F term (reference) 2G059 AA05 BB09 CC19 EE02 GG01 JJ11 JJ13 JJ23 KK01
Claims (3)
と、このレーザ媒質が放射するレーザ光を反射する反射
鏡の間に、試料流体が形成する流路を配置し、この流路
に前記レーザ光を照射して粒子検出領域を形成し、この
粒子検出領域に含まれる粒子を前記レーザ光によって生
じる散乱光を受光して検出する光散乱式粒子検出器にお
いて、前記レーザ媒質の光軸と前記反射鏡の光軸を一致
させると共に、これらの光軸が前記流路と交差するよう
に前記レーザ媒質と前記反射鏡の取付ブロックに対する
取付角度を調整する取付角度調整手段を設けたことを特
徴とする光散乱式粒子検出器。1. A flow path formed by a sample fluid is disposed between a laser medium excited by excitation light and a reflecting mirror reflecting laser light emitted from the laser medium, and the laser light is provided in the flow path. Forming a particle detection region by irradiating the laser beam, and detecting the particles contained in the particle detection region by receiving scattered light generated by the laser light, wherein the optical axis of the laser medium and the reflection The optical axes of the mirrors are made coincident with each other, and mounting angle adjusting means for adjusting the mounting angle of the laser medium and the reflecting mirror with respect to the mounting block is provided so that these optical axes intersect the flow path. Light scattering particle detector.
おいて、前記取付角度調整手段は、前記レーザ媒質を前
記取付ブロックに対して取付角度調整自在なレーザ媒質
取付部材に固定し、前記反射鏡を前記取付ブロックに対
して取付角度調整自在な反射鏡取付部材に固定し、前記
レーザ媒質取付部材と前記取付ブロックとの間及び前記
反射鏡取付部材と前記取付ブロックとの間に弾性部材を
介装したことを特徴とする光散乱式粒子検出器。2. The light scattering type particle detector according to claim 1, wherein the mounting angle adjusting means fixes the laser medium to a laser medium mounting member capable of adjusting a mounting angle to the mounting block. A reflecting mirror is fixed to a reflecting mirror mounting member whose mounting angle is adjustable with respect to the mounting block, and an elastic member is provided between the laser medium mounting member and the mounting block and between the reflecting mirror mounting member and the mounting block. A light scattering type particle detector characterized by interposing.
おいて、前記弾性部材は、ゴム製のＯリングであること
を特徴とする光散乱式粒子検出器。3. The light scattering type particle detector according to claim 2, wherein said elastic member is an O-ring made of rubber.
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| JP2000335330A JP3673914B2 (en) | 2000-11-02 | 2000-11-02 | Light scattering particle detector |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008203049A (en) * | 2007-02-19 | 2008-09-04 | Toyota Motor Corp | Sensor for exhaust gas analysis |
| JP2010156587A (en) * | 2008-12-26 | 2010-07-15 | Dkk Toa Corp | Mirror adjustment mechanism, optical measuring cell, water quality measuring instrument, and mirror adjustment method |
| WO2011145812A2 (en) * | 2010-05-19 | 2011-11-24 | (주)에이치시티 | Particle measurement apparatus |
-
2000
- 2000-11-02 JP JP2000335330A patent/JP3673914B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008203049A (en) * | 2007-02-19 | 2008-09-04 | Toyota Motor Corp | Sensor for exhaust gas analysis |
| JP2010156587A (en) * | 2008-12-26 | 2010-07-15 | Dkk Toa Corp | Mirror adjustment mechanism, optical measuring cell, water quality measuring instrument, and mirror adjustment method |
| WO2011145812A2 (en) * | 2010-05-19 | 2011-11-24 | (주)에이치시티 | Particle measurement apparatus |
| WO2011145812A3 (en) * | 2010-05-19 | 2012-03-01 | (주)에이치시티 | Particle measurement apparatus |
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|---|---|
| JP3673914B2 (en) | 2005-07-20 |
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