JP2002103142A - Electrode for electric discharge machining, and manufacturing method for the same - Google Patents
Electrode for electric discharge machining, and manufacturing method for the sameInfo
- Publication number
- JP2002103142A JP2002103142A JP2000291116A JP2000291116A JP2002103142A JP 2002103142 A JP2002103142 A JP 2002103142A JP 2000291116 A JP2000291116 A JP 2000291116A JP 2000291116 A JP2000291116 A JP 2000291116A JP 2002103142 A JP2002103142 A JP 2002103142A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- brazing material
- discharge machining
- conductor
- electric discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は放電加工用電極およ
びその製造方法に係り、特に、電極本体部への溶浸操作
と同時に行う電極本体部と導電体部との拡散接合によっ
て生じた空隙を完全に補修することが可能であり、また
電極の製造工数を低減できる上に欠陥が少なく製造歩留
りを高めることが可能な放電加工用電極およびその製造
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode for electrical discharge machining and a method for manufacturing the same, and more particularly to a method for removing a gap formed by diffusion bonding between an electrode body and a conductor at the same time as infiltration operation into the electrode body. The present invention relates to an electrode for electric discharge machining, which can be completely repaired, can reduce the number of manufacturing steps of the electrode, can reduce defects, and can increase the manufacturing yield, and a method for manufacturing the electrode.
【０００２】[0002]
【従来の技術】電気エネルギを使用して複雑で微細な金
属加工を行う放電加工機が、金型やダイヤモンド砥石等
の微細加工に使用されている。この放電加工機の要部と
なる放電加工用電極としては、電極消耗量が少ないこ
と、加工速度が大きく、さらに加工精度が高いことなど
が要求される。2. Description of the Related Art An electric discharge machine for performing complicated and fine metal working using electric energy is used for fine working of a mold, a diamond grindstone and the like. An electrode for electric discharge machining which is a main part of the electric discharge machine is required to have a small amount of electrode consumption, a high machining speed, and a high machining accuracy.
【０００３】公知の放電加工用電極としては、例えば黄
銅，銅，グラファイト，Ａｇ−Ｗ材，Ｃｕ−Ｗ材などか
ら成る電極が知られている。これらのうちで、Ａｇ−Ｗ
材やＣｕ−Ｗ材から成る電極では加工速度がやや遅い欠
点を有するが、電極の消耗が極めて少なく加工精度が高
いという優れた利点を有している。[0003] Electrodes made of, for example, brass, copper, graphite, Ag-W material, Cu-W material, etc. are known as known EDM electrodes. Among these, Ag-W
An electrode made of a material or a Cu—W material has a disadvantage that the processing speed is slightly slower, but has an excellent advantage that the electrode is extremely consumed and processing accuracy is high.
【０００４】特に金型の放電加工や半導体用ウェハー切
断用砥石などの冶工具などの製造に際しては、精密加工
を必須とする加工部が多いため、Ａｇ−Ｗ材やＣｕ−Ｗ
材やＭｏ材などから成る放電加工用電極が多用化されて
いる。[0004] In particular, in the manufacture of electric discharge machining of molds and jigs such as grindstones for cutting semiconductor wafers, there are many machining parts which require precision machining, so that Ag-W materials and Cu-W
Electrode machining electrodes made of a material such as Mo and Mo are widely used.
【０００５】しかしながら、上記のＡｇ−Ｗ材，Ｃｕ−
Ｗ材，Ｍｏ材のようにＷまたはＭｏを主成分とする放電
加工用電極においては、Ｗ，Ｍｏなどの高融点金属の原
料コストが極めて高いため電極の製造コストが高騰して
しまうため、コスト面においてその使用用途が狭い範囲
に限定されてしまう欠点を有していた。However, the above Ag-W material, Cu-
In the case of an electrode for electric discharge machining mainly containing W or Mo as in the case of W material or Mo material, the raw material cost of a high melting point metal such as W or Mo increases the production cost of the electrode. On the other hand, there is a drawback in that its use is limited to a narrow range.
【０００６】その解決策として例えば特開昭４９−１１
２２９５号公報に示すように、電極の要部となる部分の
みに高価な高融点材料を適用するとともに、直接放電加
工に関与しない部分にはＦｅなどの安価材を使用して放
電加工用電極を形成してコスト低減を図る工夫もなされ
ている。As a solution, for example, Japanese Patent Laid-Open No. 49-11 / 1979
As shown in Japanese Patent No. 2295, an expensive high melting point material is applied only to a portion that is a main part of the electrode, and a portion not directly involved in electric discharge machining is formed by using an inexpensive material such as Fe to form an electrode for electric discharge machining. There is also a device to reduce the cost by forming.
【０００７】図２および図３は上記のように構成した放
電加工用電極の形状例を示す斜視図である。図２に示す
放電加工用電極１ａにおいては、Ｗ，Ｍｏを主成分とし
て形成された円筒状の電極本体部２ａの内側に、Ｆｅや
Ｆｅ合金などの導電体から成る円筒状の導電体部３ａが
嵌挿されており、上記電極本体部２ａと導電体部３ａと
は、電極本体部２ａへのＣｕ溶浸操作と同時に、Ｆｅや
Ｆｅ合金の拡散接合により接合される。FIGS. 2 and 3 are perspective views showing examples of the shape of the electric discharge machining electrode configured as described above. In the electrode 1a for electric discharge machining shown in FIG. 2, a cylindrical conductor portion 3a made of a conductor such as Fe or Fe alloy is provided inside a cylindrical electrode body 2a formed mainly of W and Mo. The electrode body 2a and the conductor 3a are joined by diffusion bonding of Fe or an Fe alloy simultaneously with the Cu infiltration operation into the electrode body 2a.
【０００８】しかしながら、電極本体部２ａと導電体部
３ａとは完全に接合されずに、接合部に空隙が形成され
る場合がある。そこで、拡散接合後に残留している空隙
に、ＣｕやＡｇを含有する１種類のろう材４ａを配置し
た状態で加熱し、ＣｕやＡｇの含浸溶融により電極本体
部２ｂと導電体部３ｂとの間の空隙にろう材４ａを充填
して電極を形成している。電極１ａの中心部には放電加
工機のスピンドルに挿通するための中空部５ａが形成さ
れる。However, there is a case where the electrode body 2a and the conductor 3a are not completely joined and a gap is formed at the joint. Therefore, heating is performed in a state where one kind of brazing material 4a containing Cu or Ag is arranged in the voids remaining after diffusion bonding, and the electrode body 2b and the conductor 3b are impregnated and melted by Cu or Ag. The space between them is filled with the brazing material 4a to form an electrode. A hollow portion 5a is formed in the center of the electrode 1a to be inserted into the spindle of the electric discharge machine.
【０００９】一方、図３に示す放電加工用電極１ｂにお
いては、Ｗ，Ｍｏを主成分として形成された四角筒状の
電極本体部２ｂの内側に、ＦｅやＦｅ合金などの導電体
から成る四角筒状の導電体部３ｂが嵌挿されており、上
記電極本体部２ｂと導電体部３ｂは、電極本体部２ｂへ
のＣｕ溶浸操作と同時に、ＦｅやＦｅ合金の拡散接合に
より接合される。On the other hand, in the electric discharge machining electrode 1b shown in FIG. 3, a square tube made of a conductor such as Fe or an Fe alloy is provided inside a square cylindrical electrode body 2b formed mainly of W and Mo. The electrode body 2b and the conductor 3b are joined by diffusion bonding of Fe or an Fe alloy simultaneously with the Cu infiltration operation into the electrode body 2b. .
【００１０】しかしながら、電極本体部２ｂと導電体部
３ｂとは完全に接合されずに、接合部に空隙が形成され
る場合がある。そこで、拡散接合後に残留している空隙
に、ＣｕやＡｇを含有する１種類のろう材４ｂを配置し
た状態で加熱し、ＣｕやＡｇの拡散接合により電極本体
部２ｂと導電体部３ｂとの間の空隙にろう材４ｂを充填
して電極を形成している。電極１ｂの中心部には放電加
工機のスピンドルに挿通するための中空部５ｂが形成さ
れる。However, there is a case where the electrode body 2b and the conductor 3b are not completely joined and a gap is formed at the joint. Therefore, heating is performed in a state where one kind of brazing material 4b containing Cu or Ag is arranged in the gap remaining after diffusion bonding, and the electrode body 2b and the conductor 3b are connected by diffusion bonding of Cu or Ag. The space between them is filled with the brazing material 4b to form an electrode. A hollow portion 5b is formed at the center of the electrode 1b to be inserted into the spindle of the electric discharge machine.
【００１１】上記図１および図２に示す従来の放電加工
用電極１ａ，１ｂにおいては、ＷやＭｏなどの高価な高
融点金属材は、電極要部となる電極本体部２ａ，２ｂに
限定して使用されている一方、導電体部３ａ，３ｂは安
価なＦｅなどの導電材料で形成され、電極本体部へのＣ
ｕ溶浸操作と同時に、導電部材のＦｅ等の拡散による拡
散接合を実施し、さらに接合部に残留する空隙には、さ
らにろう材を充填して、導電体部３ａ，３ｂと電極本体
部２ａ，２ｂとの接合を補完する補修工程を実施して電
極１ａ，１ｂの製造コストを低減している。In the conventional electric discharge machining electrodes 1a and 1b shown in FIGS. 1 and 2, expensive high-melting metal materials such as W and Mo are limited to the electrode main parts 2a and 2b which are the main parts of the electrodes. On the other hand, the conductor portions 3a and 3b are formed of an inexpensive conductive material such as Fe, and C
(d) Simultaneously with the infiltration operation, diffusion bonding of the conductive member by diffusion of Fe or the like is performed, and further, the gap remaining at the bonding portion is further filled with a brazing filler metal, and the conductor portions 3a and 3b and the electrode body portion 2a are filled. , 2b to reduce the manufacturing cost of the electrodes 1a, 1b.
【００１２】[0012]
【発明が解決しようとする課題】しかしながら、上記従
来の放電加工用電極の拡散接合後の補修工程において
は、Ａｇ−Ｃｕ系ろう材を１種類のみ使用して導電体部
と電極本体部とを補修接合しているため、導電体部と電
極本体部との間に空隙が生じ易く放電加工精度が低下
し、加工操作の安定性が小さいという問題を生じてい
た。すなわち、電極製造工程でろう材による補修接合を
行う際に、溶融したろう材が流出して空隙が生じ易くな
っていた。However, in the above-described repair process after diffusion bonding of the electrode for electric discharge machining, only one type of Ag-Cu brazing material is used to separate the conductor portion and the electrode body portion from each other. Due to the repair joining, a gap is easily formed between the conductor portion and the electrode main body portion, and the accuracy of electric discharge machining is reduced, and the stability of machining operation is small. That is, when performing the repair joining with the brazing material in the electrode manufacturing process, the molten brazing material flows out and voids are easily generated.
【００１３】この空隙が接合部に生じると導電体部から
電極本体部へ流れる電気エネルギの分布が不均一とな
り、放電加工時に放電アークが不安定になり、加工精度
が低下してしまう問題点があった。この傾向は、導電体
部と電極本体部との接合部に形成される空隙が電極の厚
さ方向に貫通している場合には、より顕著になる。If the gap is formed in the joint, the distribution of electric energy flowing from the conductor to the electrode body becomes uneven, and the electric discharge arc becomes unstable at the time of electric discharge machining. there were. This tendency becomes more remarkable when the gap formed at the junction between the conductor portion and the electrode body penetrates in the thickness direction of the electrode.
【００１４】上記接合時に形成された空隙を解消するた
めには、空隙の有無を確認する検査工程がさらに必要に
なり、空隙を有する電極については、さらにＣｕよりも
融点が低いＡｇ系ろう材を使用して空隙の穴埋め処理な
どの修正工程が必須であり、その修正工程が複数回に及
ぶ場合もあり、また、修正しきれずに不良となる場合も
多かった。その結果、電極の製造工数が大幅に増加する
とともに電極製品の歩留りが低下し易くなるなどの問題
点が提起されていた。In order to eliminate the voids formed at the time of the bonding, an inspection step for confirming the presence or absence of the voids is further required. For the electrode having the voids, an Ag-based brazing material having a lower melting point than Cu is used. A repairing process such as a filling process of voids is indispensable when used, and the repairing process may be performed a plurality of times, and in many cases, the repair may not be completed and a defect may occur. As a result, there have been raised such problems that the number of manufacturing steps of the electrode is greatly increased and the yield of the electrode product is easily lowered.
【００１５】本発明は、上記課題を解決するためになさ
れたものであり、特に、電極本体部と導電体部との拡散
接合部に生じた残存空隙をＡｇ系ろう材を使用して１回
の補修工程で解消することが可能であり、また電極の製
造工数を低減できる上に欠陥が少なく製造歩留りを高め
ることが可能な放電加工用電極およびその製造方法を提
供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. In particular, a residual void generated at a diffusion junction between an electrode body and a conductor is formed once using an Ag-based brazing material. It is an object of the present invention to provide an electrode for electric discharge machining, which can be eliminated by the repairing process of the above, can reduce the number of manufacturing steps of the electrode, can reduce defects, and can increase the manufacturing yield, and a method for manufacturing the same.
【００１６】[0016]
【課題を解決するための手段】本発明者は上記目的を達
成するため、電極本体部と導電体部との接合方法を種々
検討して、各接合方法が電極特性に及ぼす影響を比較検
討した。その結果、拡散接合後に電極本体部と導電体部
との間に厚さ方向に貫通するような空隙が残留している
場合には、融点が異なり、溶融時の粘性が異なる２種以
上のろう材を用いて上記間隙を埋める熱処理を実施した
ときに、接合部に空隙を生ぜず、接合部の仕上りが良好
であり、さらなる補修工程が不要となり、安定した放電
特性を有する電極が高い製造歩留りで得られるという知
見を得た。本発明は、これらの知見に基づいて完成され
たものである。Means for Solving the Problems In order to achieve the above object, the present inventor examined various joining methods of the electrode body and the conductor, and compared and examined the effect of each joining method on electrode characteristics. . As a result, when there is a gap that penetrates in the thickness direction between the electrode body and the conductor after diffusion bonding, two or more kinds of waxes having different melting points and different viscosities during melting are obtained. When the heat treatment for filling the gap is performed using a material, no void is generated in the joint, the finish of the joint is good, no further repairing step is required, and an electrode having stable discharge characteristics has a high production yield. Was obtained. The present invention has been completed based on these findings.
【００１７】すなわち、本発明に係る放電加工用電極
は、電極本体部と、この電極本体部を保持する導電体部
とを接合した放電加工用電極において、上記電極本体部
と導電体部との接合部に、溶融時の粘性が異なる２種以
上のろう材が充填されていることを特徴とする。That is, in the electrode for electric discharge machining according to the present invention, an electrode for electric discharge machining in which an electrode main body portion and a conductor portion holding the electrode main body portion are joined to each other, The joint is filled with two or more kinds of brazing materials having different viscosities at the time of melting.
【００１８】また、上記放電加工用電極において電極本
体部と導電体部との接合部の重力場下方位置に高粘性ろ
う材を配置する一方、重力場上方位置に低粘性ろう材を
配置するとよい。さらに、前記電極本体部と前記導電体
部との接合部に、空隙が実質的に形成されていないこと
を特徴とする。また、前記電極本体部と前記導電体部と
が拡散接合されていることを特徴とする。In the above-mentioned electric discharge machining electrode, a high-viscosity brazing material may be arranged at a position below the gravitational field at a joint between the electrode body and the conductor, and a low-viscosity brazing material may be arranged at a position above the gravitational field. . Further, a gap is not substantially formed at a joint between the electrode body and the conductor. Further, the electrode body and the conductor are diffusion-bonded.
【００１９】さらに、ろう材がＡｇ−Ｃｕ系ろう材から
構成することが好ましい。また、電極本体部は、タング
ステン（Ｗ）およびモリブデン（Ｍｏ）の少なくとも一
方から成る多孔質焼結体に銅（Ｃｕ）を溶浸した電極材
から構成するとよい。さらに、導電本体部は鉄，ステン
レス鋼のいずれかの低炭素系鋼材から構成するとよい。Further, it is preferable that the brazing material is made of an Ag-Cu brazing material. Further, the electrode body may be made of an electrode material in which copper (Cu) is infiltrated into a porous sintered body made of at least one of tungsten (W) and molybdenum (Mo). Further, the conductive body may be made of a low-carbon steel material such as iron or stainless steel.
【００２０】さらに本発明に係る放電加工用電極の製造
方法は、電極本体部と、この電極本体部を保持する導電
体部とを拡散接合し、上記電極本体部と導電体部との拡
散接合後に残存する空隙の重力場下方位置に第１のろう
材を配置する一方、重力場上方位置に上記第１のろう材
より溶融時の粘性が低い第２のろう材を配置した状態で
熱処理することにより、上記空隙にろう材を含浸させて
上記電極本体部と導電体部との接合部の空隙を解消する
ことを特徴とする。Further, in the method of manufacturing an electrode for electric discharge machining according to the present invention, the electrode body and the conductor holding the electrode body are diffusion-bonded, and the electrode body and the conductor are diffusion-bonded. While the first brazing material is arranged at a position below the gravitational field of the remaining space, the heat treatment is performed in a state where the second brazing material having a lower viscosity at the time of melting than the first brazing material is arranged at a position above the gravitational field. Thereby, the gap is impregnated with a brazing material to eliminate the gap at the joint between the electrode body and the conductor.
【００２１】また上記製造方法において、ろう材がＡｇ
−Ｃｕ系ろう材から構成することが好ましい。さらに、
電極本体部は、タングステン（Ｗ）およびモリブデン
（Ｍｏ）の少なくとも一方から成る多孔質焼結体に銅
（Ｃｕ）を溶浸した電極材から構成することが好まし
い。In the above method, the brazing material may be made of Ag.
-It is preferable to be composed of a Cu-based brazing material. further,
The electrode body is preferably made of an electrode material obtained by infiltrating copper (Cu) into a porous sintered body made of at least one of tungsten (W) and molybdenum (Mo).
【００２２】電極本体部を構成する材料は、特に限定さ
れるものではないが、タングステン（Ｗ）およびモリブ
デン（Ｍｏ）の少なくとも一方から成る多孔質焼結体に
銅（Ｃｕ）を溶浸した電極材から構成することにより、
特に放電加工時における電極の消耗量が極めて少なく加
工精度が高くなり、長寿命の電極が得られるので好まし
い。なお、上記電極本体部の材料素地の強化あるいは電
極としての性能向上を図るためにジルコニア（Ｚｒ
Ｏ２）のような添加物を少量添加しても良い。The material constituting the electrode body is not particularly limited, but an electrode obtained by infiltrating copper (Cu) into a porous sintered body made of at least one of tungsten (W) and molybdenum (Mo). By constructing from materials,
Particularly, it is preferable because the amount of electrode consumption during electric discharge machining is extremely small, machining accuracy is increased, and a long-life electrode is obtained. Zirconia (Zr) is used in order to strengthen the base material of the electrode body or to improve the performance as an electrode.
A small amount of an additive such as O 2 ) may be added.
【００２３】一方、導電体部はろう材成分より高い融点
を有し電極本体部を強固に保持できる機械的強度を有
し、かつ電極本体部に電気エネルギを伝達できる材料で
ある限り、何ら構成材料は限定されるものではないが、
特に、材料コストが安価な鉄，ステンレス鋼などの低炭
素系鋼材から構成することにより、電極全体の製造コス
トを低減することが可能である。なお、導電体部の材料
素地を強化するための添加物としてＣｕ，Ｎｉ，Ｍｏ，
Ｗなどを数質量％程度含有する材料を使用してもよい。On the other hand, as long as the conductor has a melting point higher than that of the brazing material, has a mechanical strength capable of firmly holding the electrode main body, and is a material capable of transmitting electric energy to the electrode main body, any structure can be used. Materials are not limited,
In particular, by using a low-carbon steel material such as iron or stainless steel whose material cost is low, it is possible to reduce the manufacturing cost of the entire electrode. In addition, Cu, Ni, Mo, as an additive for strengthening the material base of the conductor portion,
A material containing several percent by mass of W or the like may be used.
【００２４】また溶融時に粘性が異なるろう材として
は、例えば、ＪＩＳ（日本工業規格）Ｚ３２６１で規定
された銀ろう材（Ａｇ−Ｃｕ系）を適宜組み合わせて使
用することができる。具体的にはＪＩＳ Ｚ３２６１に
おいては、ＢＡｇ−１〜ＢＡｇ−２４までの１７種類の
各組成の銀ろう材が規定されており、その融点に対応す
る液相線温度は６２０〜８００℃の範囲にあり、ろう付
け温度も６２０〜９００℃の範囲から適宜選定できる。
上記銀ろう材の形状は特に限定されず、帯状，線状，棒
状，粒状，粉末状などがあり、電極本体部と導電体部と
の接合部に形成される空隙形状に応じて適宜選択して使
用できる。As the brazing material having a different viscosity at the time of melting, for example, a silver brazing material (Ag-Cu-based) specified in JIS (Japanese Industrial Standard) Z3261 can be used in appropriate combination. Specifically, JIS Z3261 defines 17 types of silver brazing materials of BAg-1 to BAg-24, and the liquidus temperature corresponding to the melting point thereof is in the range of 620 to 800 ° C. Yes, the brazing temperature can be appropriately selected from the range of 620 to 900 ° C.
The shape of the silver brazing material is not particularly limited, and may be a band shape, a linear shape, a rod shape, a granular shape, a powder shape, or the like, and may be appropriately selected according to the shape of the gap formed at the joint between the electrode body and the conductor. Can be used.
【００２５】そして、電極本体部と導電体部との接合部
に形成される空隙に充填するろう材として溶融時に粘性
が異なる２種以上のろう材で形成することにより、高粘
性のろう材により低粘性のろう材の流出が効果的に防止
でき、接合部に空隙が形成されるおそれがなく、実質的
に空隙が解消することになり、放電加工特性が安定した
電極が得られる。[0025] By forming two or more kinds of brazing materials having different viscosities at the time of melting as a brazing material to be filled in a gap formed at a joint between the electrode body and the conductor, a high-viscosity brazing material is used. Outflow of the low-viscosity brazing material can be effectively prevented, and there is no possibility that a void is formed at the joint, and the void is substantially eliminated, so that an electrode having stable electric discharge machining characteristics can be obtained.
【００２６】特に電極本体部と導電体部との接合部に形
成された空隙の重力場下方位置に高粘性ろう材（高融点
ろう材）を配置する一方、重力場上方位置に低粘性ろう
材（低融点ろう材）を配置した状態で熱処理した場合に
は、粘性が低く湯回りが良好な銀ろう材が高粘性の銀ろ
う材によって空隙の底部で堰き止められるため、低粘性
のろう材が空隙部から流出することが効果的に防止でき
る。そのため、接合部に形成された空隙部をろう材によ
ってほぼ完全に埋めることができ、実質的に空隙がな
く、安定した放電加工特性を有する電極が得られる。In particular, a high-viscosity brazing material (high-melting-point brazing material) is arranged at a position below the gravitational field in a gap formed at a joint between the electrode body and the conductor, while a low-viscosity brazing material is disposed at a position above the gravitational field. When heat treatment is performed with the (low melting point brazing material) arranged, the low viscosity brazing material is blocked by the high viscosity silver brazing material at the bottom of the voids due to the low viscosity and good melt flow. Can be effectively prevented from flowing out of the gap. Therefore, the gap formed in the joint can be almost completely filled with the brazing material, and an electrode having substantially no gap and having stable electric discharge machining characteristics can be obtained.
【００２７】さらに具体的な処理方法については、本発
明の製造方法に規定したように、電極本体部と、この電
極本体部を保持する導電体部とを拡散接合した後に、上
記電極本体部と導電体部との接合部に残存する空隙の重
力場下方位置に第１のろう材（高融点ろう材）を配置す
る一方、重力場上方位置に上記第１のろう材より溶融時
の粘性が低い第２のろう材（低融点ろう材）を配置した
状態で熱処理することにより、上記空隙にろう材を含浸
させて上記電極本体部と導電体部との接合部の空隙を解
消するものである。More specifically, as described in the manufacturing method of the present invention, the electrode body and the conductor holding the electrode body are diffusion-bonded, and then the electrode body is connected to the electrode body. The first brazing material (high melting point brazing material) is arranged at a position below the gravitational field of the gap remaining at the joint with the conductor portion, while the viscosity at the time of melting is higher than the first brazing material at the position above the gravitational field. Heat treatment is performed in a state where a low second brazing material (low melting point brazing material) is arranged, so that the gap is impregnated with the brazing material to eliminate the gap at the joint between the electrode body and the conductor. is there.
【００２８】本発明に係る放電加工用電極およびその製
造方法によれば、粘性が高い高融点銀ろう材が、電極本
体部と導電体部との間の空隙で粘性が低い低融点銀ろう
材の流出を効果的に抑制することになるため、空隙のろ
う材による埋め修正が効率よく実施できる。そのため、
放電加工用電極の接合後の仕上り状態が良好であり、さ
らなる埋め修正作業も不要となり、製品の製造歩留りお
よび製造効率を大幅に向上させることができる。According to the electrode for electric discharge machining and the method of manufacturing the same according to the present invention, the high-viscosity high-melting silver brazing material has a low-viscosity low-melting silver brazing material in the gap between the electrode body and the conductor. Therefore, the filling of the gap with the brazing filler metal can be efficiently performed. for that reason,
The finished state of the electric discharge machining electrode after bonding is good, and further filling and repair work is not required, and the production yield and production efficiency of the product can be greatly improved.
【００２９】[0029]
【発明の実施の形態】次に本発明の実施形態について添
付図面を参照して説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the accompanying drawings.
【００３０】実施例 平均粒径３μｍのＷ粉末に電解銅粉と粘結剤としてのパ
ラフィンとを添加混合して原料混合体とした。得られた
原料混合体を金型に充填し２００ＭＰａの加圧力で加圧
成形して円筒状の電極本体部用成形体を調製した。この
成形体を黒鉛ボードに収容して連続水素炉内に挿入して
炉温を１１００℃に保持しながら６０分間焼結すること
により、多孔性焼結体としてのＷスケルトンを調製し
た。 Example A raw material mixture was prepared by adding and mixing electrolytic copper powder and paraffin as a binder to W powder having an average particle diameter of 3 μm. The obtained raw material mixture was filled in a mold, and pressure-molded with a pressure of 200 MPa to prepare a cylindrical electrode body molded body. This compact was housed in a graphite board, inserted into a continuous hydrogen furnace, and sintered for 60 minutes while maintaining the furnace temperature at 1100 ° C., to prepare a W skeleton as a porous sintered body.
【００３１】一方、Ｎｉを２質量％含有するＦｅ基合金
素材を切削加工することにより、図１に示すように、上
記電極本体部２の内側中心部に嵌挿する導電体部３を調
製した。On the other hand, by cutting a Fe-based alloy material containing 2% by mass of Ni, as shown in FIG. 1, a conductor portion 3 to be inserted into the center of the inside of the electrode body 2 was prepared. .
【００３２】次に黒鉛ボード中に溶浸材としてのＣｕ粉
を挿入し、このＣｕ粉に接するように上記Ｗスケルトン
と導電体部３とを組み合わせて配置した状態で１２００
℃に加熱することにより、図１に示すようにＷスケルト
ン内にＣｕを溶浸するとともに、電極本体部２と導電体
部３とを拡散接合した円筒形状の電極を調製した。Next, a Cu powder as an infiltration material is inserted into the graphite board, and the W skeleton and the conductor portion 3 are arranged in combination with each other so as to be in contact with the Cu powder.
By heating to ° C., Cu was infiltrated into the W skeleton as shown in FIG. 1 and a cylindrical electrode was prepared by diffusion bonding the electrode body 2 and the conductor 3.
【００３３】次に、図１に示すように上記電極本体部２
と導電体部３とを拡散接合した後に、両者の接合部に残
留する空隙の重力場下方位置に、粘性が高い第１のろう
材としてのＢＡｇ−３（銀ろう材）を配置する一方、重
力場上方位置に粘性が低い第２のろう材としてのＢＡｇ
−１（銀ろう材）を配置した。Next, as shown in FIG.
After diffusion bonding of the conductive member 3 and the conductive member 3, BAg-3 (silver brazing material) as a high-viscosity first brazing material is arranged at a position below the gravitational field of a gap remaining at the joint between the two. BAg as a low-viscosity second brazing material above the gravitational field
-1 (silver brazing material).
【００３４】ここで上記ＢＡｇ−１（銀ろう材）は、質
量％基準で４４〜４６％Ａｇ−１４〜１６％Ｃｕ−１４
〜１８％Ｚｎ−２３〜２５％Ｃｄなる組成を有し、融点
に相当する液相線温度が約６２０℃である。一方、ＢＡ
ｇ−３（銀ろう材）は、４９〜５１％Ａｇ−１４．５〜
１６．５Ｃｕ−１３．５〜１７．５Ｚｎ−１５〜１７％
Ｃｄなる組成を有し、液相線温度が約６５０℃である。Here, the BAg-1 (silver brazing material) is 44 to 46% Ag-14 to 16% Cu-14 on a mass% basis.
-18% Zn-23-25% Cd, and the liquidus temperature corresponding to the melting point is about 620 ° C. Meanwhile, BA
g-3 (silver brazing material) is 49-51% Ag-14.5-
16.5Cu-13.5-17.5Zn-15-17%
It has a composition of Cd and a liquidus temperature of about 650 ° C.
【００３５】次に上記のように第１のろう材（ＢＡｇ−
３）および第２のろう材（ＢＡｇ−１）を配置した状態
で温度７２０℃で６０分間保持する熱処理を実施するこ
とにより、図１に示すような構造を有する実施例に係る
放電加工用電極１を得た。Next, as described above, the first brazing material (BAg-
By performing a heat treatment at a temperature of 720 ° C. for 60 minutes in a state where 3) and the second brazing material (BAg-1) are arranged, the electrode for electric discharge machining according to the example having the structure shown in FIG. 1 was obtained.
【００３６】実施例に係る放電加工用電極１はＣｕを溶
浸したＷ製電極本体部２の内側に、Ｆｅ製の導電体部３
が同心状に配置され、その両者の間隙部にろう材層４が
形成される。またろう材層４は、下方部位に配置された
第１のろう材６としてのＢＡｇ−３と、上方部位に配置
された第２のろう材７としてのＢＡｇ−１とから構成さ
れている。The electrode 1 for electric discharge machining according to the embodiment has a conductor portion 3 made of Fe inside a W electrode body 2 in which Cu is infiltrated.
Are arranged concentrically, and a brazing material layer 4 is formed in the gap between the two. The brazing material layer 4 is composed of BAg-3 as a first brazing material 6 disposed at a lower portion and BAg-1 as a second brazing material 7 disposed at an upper portion.
【００３７】上記実施例に係る放電加工用電極１におい
ては、拡散接合後に電極本体部２と導電体部３との接合
部に残留した空隙の下方位置に配置された高粘性の銀ろ
う材（ＢＡｇ−３）によって低粘性の銀ろう材（ＢＡｇ
−１）の流出が効果的に防止でき、空隙の残留がないろ
う材層４を１回の接合処理で形成することが可能になっ
た。In the electrode for electric discharge machining 1 according to the above embodiment, a high-viscosity silver brazing material (disposed below the gap remaining at the joint between the electrode body 2 and the conductor 3 after diffusion bonding). BAg-3) to provide a low-viscosity silver brazing material (BAg
The outflow of -1) can be effectively prevented, and the brazing material layer 4 having no remaining voids can be formed by one joining process.
【００３８】すなわち、接合操作時において溶融した低
粘性の銀ろう材（ＢＡｇ−１）は、高粘性の銀ろう材
（ＢＡｇ−３）によって空隙内に堰き止められるため、
流出してろう材層４に空隙などの欠陥として残留するこ
とが少ない。したがって、安定した放電加工特性を発揮
する電極が得られ、製品機能の向上、製造歩留りの向上
を実現できる。また、空隙などの欠陥の発生が少ないた
め、実質的に１回の接合処理のみで間隙の十分な埋め修
正も可能になり補修工程も簡素化できる。That is, the low-viscosity silver brazing material (BAg-1) melted during the joining operation is blocked in the void by the high-viscosity silver brazing material (BAg-3).
It hardly flows out and remains in the brazing material layer 4 as defects such as voids. Therefore, an electrode exhibiting stable electric discharge machining characteristics can be obtained, and an improvement in product functions and an improvement in manufacturing yield can be realized. In addition, since there are few occurrences of defects such as voids, the gap can be sufficiently filled and repaired substantially by only one joining process, and the repair process can be simplified.
【００３９】比較例 粘性が異なる２種類の銀ろう材を使用せずに、従来の低
粘性の銀ろう材（ＢＡｇ−１）のみを用いた点以外は、
実施例と全く同様な処理を行って実施例と同一寸法を有
する比較例に係る放電加工用電極を調製した。[0039] without the use of comparative example viscosity two different silver brazing material, except that using only silver brazing material of the conventional low viscosity (BAg-1),
An electrode for electrical discharge machining according to a comparative example having the same dimensions as the example was prepared by performing the same processing as in the example.
【００４０】しかしながら、比較例の電極においては、
加熱接合時に溶融した低粘性の銀ろう材（ＢＡｇ−１）
が、電極本体部と導電体部との間隙を下方向に通り抜け
を起し空隙が形成されていた。そのため、上記空隙を完
全に埋めるためには、さらに融点が低いろう材によって
補修する工程が２〜３回必要であった。However, in the electrode of the comparative example,
Low-viscosity silver brazing material (BAg-1) melted during heat bonding
However, through the gap between the electrode main body portion and the conductor portion, a gap was formed in a downward direction. Therefore, in order to completely fill the voids, a step of repairing with a brazing material having a lower melting point was required two to three times.
【００４１】上記実施例においては、電極本体部と導電
体部とが共に円筒形状である電極を例にとって説明した
が、本発明はこの形状に限定されるものではなく、例え
ば図３に示すように、四角筒状の電極本体部と導電体部
とを用いた場合においても、同様な作用効果が得られ
る。In the above embodiment, an example was described in which the electrode body and the conductor were both cylindrical in shape. However, the present invention is not limited to this shape. For example, as shown in FIG. In addition, the same operation and effect can be obtained even when a quadrangular cylindrical electrode body and a conductor are used.
【００４２】[0042]
【発明の効果】以上説明の通り、本発明に係る放電加工
用電極およびその製造方法によれば、粘性が高い高融点
銀ろう材が、電極本体部と導電体部との間隙で粘性が低
い低融点銀ろう材の流出を効果的に抑制することになる
ため、間隙部のろう材による埋め修正が効率よく実施で
きる。そのため、放電加工用電極の接合後の仕上り状態
が良好であり、さらなる埋め修正作業も不要となり、製
品の製造歩留りおよび製造効率を大幅に向上させること
ができる。As described above, according to the electrode for electric discharge machining and the method of manufacturing the same according to the present invention, the high-viscosity high-melting silver brazing material has a low viscosity in the gap between the electrode body and the conductor. Since the outflow of the low melting point silver brazing material is effectively suppressed, the filling of the gap with the brazing material can be efficiently performed. Therefore, the finished state of the electric discharge machining electrode after bonding is good, and further filling and repair work is not required, and the production yield and production efficiency of the product can be greatly improved.
【図１】本発明に係る放電加工用電極の一実施例を示す
断面図。FIG. 1 is a sectional view showing one embodiment of an electrode for electric discharge machining according to the present invention.
【図２】放電加工用電極の形状例を示す斜視図。FIG. 2 is a perspective view showing an example of the shape of an electrode for electric discharge machining.
【図３】放電加工用電極の他の形状例を示す斜視図。FIG. 3 is a perspective view showing another example of the shape of the electric discharge machining electrode.
１，１ａ，１ｂ 放電加工用電極 ２，２ａ，２ｂ 電極本体部 ３，３ａ，３ｂ 導電体部 ４，４ａ，４ｂ ろう材層 ５，５ａ，５ｂ 中空部 ６ 第１のろう材（ＢＡｇ−３） ７ 第２のろう材（ＢＡｇ−１） 1, 1a, 1b Electrode for electrical discharge machining 2, 2a, 2b Electrode main body 3, 3a, 3b Conductor 4,5a, 4b Brazing material layer 5,5a, 5b Hollow portion 6 First brazing material (BAg-3 7) Second brazing material (BAg-1)
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ２３Ｋ 20/00 ３１０ Ｂ２３Ｋ 20/00 ３１０Ｍ 35/30 ３１０ 35/30 ３１０Ｂ Ｃ２２Ｃ 1/04 Ｃ２２Ｃ 1/04 Ｄ Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) B23K 20/00 310 B23K 20/00 310M 35/30 310 35/30 310B C22C 1/04 C22C 1/04 D
Claims (10)
る導電体部とを接合した放電加工用電極において、上記
電極本体部と導電体部との接合部に、溶融時の粘性が異
なる２種以上のろう材が充填されていることを特徴とす
る放電加工用電極。In an electric discharge machining electrode in which an electrode main body and a conductor holding the electrode main body are joined, a viscosity at the time of melting is different at a joint between the electrode main body and the conductor. An electrode for electric discharge machining, characterized by being filled with two or more kinds of brazing materials.
重力場下方位置に高粘性ろう材を配置する一方、重力場
上方位置に低粘性ろう材を配置したことを特徴とする請
求項１記載の放電加工用電極。2. A high-viscosity brazing material is arranged at a position below a gravitational field at a joint between the electrode body and the conductor, and a low-viscosity brazing material is arranged at a position above the gravitational field. Item 2. An electrode for electrical discharge machining according to item 1.
部に、空隙が実質的に形成されていないことを特徴とす
る請求項１記載の放電加工用電極。3. The electric discharge machining electrode according to claim 1, wherein substantially no void is formed at a joint between the electrode body and the conductor.
接合されていることを特徴とする請求項１記載の放電加
工用電極。4. The electrode for electric discharge machining according to claim 1, wherein said electrode body and said conductor are diffusion bonded.
ることを特徴とする請求項１記載の放電加工用電極。5. The electrode according to claim 1, wherein the brazing material is made of an Ag—Cu-based brazing material.
およびモリブデン（Ｍｏ）の少なくとも一方から成る多
孔質焼結体に銅（Ｃｕ）を溶浸した電極材から成ること
を特徴とする請求項１記載の放電加工用電極。6. The electrode main body is made of tungsten (W).
The electrode for electric discharge machining according to claim 1, comprising an electrode material in which copper (Cu) is infiltrated into a porous sintered body made of at least one of molybdenum (Mo) and molybdenum (Mo).
かの低炭素系鋼材から成ることを特徴とする請求項１記
載の放電加工用電極。7. The electrode for electric discharge machining according to claim 1, wherein said conductor portion is made of a low carbon steel material selected from iron and stainless steel.
る導電体部とを拡散接合し、上記電極本体部と導電体部
との拡散接合後に残存する空隙の重力場下方位置に第１
のろう材を配置する一方、重力場上方位置に上記第１の
ろう材より溶融時の粘性が低い第２のろう材を配置した
状態で熱処理することにより、上記空隙にろう材を含浸
させて上記電極本体部と導電体部との接合部の空隙を解
消することを特徴とする放電加工用電極の製造方法。8. An electrode body portion and a conductor portion holding the electrode body portion are diffusion-bonded to each other, and the first body is positioned below a gravitational field in a gap remaining after diffusion bonding between the electrode body portion and the conductor portion.
By disposing the second brazing material having a lower viscosity at the time of melting than the first brazing material at a position above the gravitational field while the brazing material is arranged, the gap is impregnated with the brazing material. A method of manufacturing an electrode for electric discharge machining, wherein a gap at a joint between the electrode body and the conductor is eliminated.
ることを特徴とする請求項８記載の放電加工用電極の製
造方法。9. The method according to claim 8, wherein the brazing material is made of an Ag—Cu-based brazing material.
（Ｗ）およびモリブデン（Ｍｏ）の少なくとも一方から
成る多孔質焼結体に銅（Ｃｕ）を溶浸した電極材から成
ることを特徴とする請求項８記載の放電加工用電極の製
造方法。10. The electrode body portion is made of an electrode material obtained by infiltrating copper (Cu) into a porous sintered body made of at least one of tungsten (W) and molybdenum (Mo). 9. The method for producing an electrode for electrical discharge machining according to claim 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000291116A JP2002103142A (en) | 2000-09-25 | 2000-09-25 | Electrode for electric discharge machining, and manufacturing method for the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000291116A JP2002103142A (en) | 2000-09-25 | 2000-09-25 | Electrode for electric discharge machining, and manufacturing method for the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002103142A true JP2002103142A (en) | 2002-04-09 |
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| JP2000291116A Pending JP2002103142A (en) | 2000-09-25 | 2000-09-25 | Electrode for electric discharge machining, and manufacturing method for the same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101925692A (en) * | 2008-01-30 | 2010-12-22 | 株式会社Ihi | Discharge surface treatment method and coating block for discharge surface treatment |
| CN111014852A (en) * | 2019-12-11 | 2020-04-17 | 深圳大学 | Powder metallurgy composite material electrode and preparation method thereof |
-
2000
- 2000-09-25 JP JP2000291116A patent/JP2002103142A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101925692A (en) * | 2008-01-30 | 2010-12-22 | 株式会社Ihi | Discharge surface treatment method and coating block for discharge surface treatment |
| US9478325B2 (en) | 2008-01-30 | 2016-10-25 | Ihi Corporation | Discharge surface treatment method and coating block for discharge surface treatments |
| CN111014852A (en) * | 2019-12-11 | 2020-04-17 | 深圳大学 | Powder metallurgy composite material electrode and preparation method thereof |
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