JP2002047556A - Dlc film deposition method, and dlc coated aluminum alloy and dlc coated magnesium alloy using the method - Google Patents
Dlc film deposition method, and dlc coated aluminum alloy and dlc coated magnesium alloy using the methodInfo
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- JP2002047556A JP2002047556A JP2001142591A JP2001142591A JP2002047556A JP 2002047556 A JP2002047556 A JP 2002047556A JP 2001142591 A JP2001142591 A JP 2001142591A JP 2001142591 A JP2001142591 A JP 2001142591A JP 2002047556 A JP2002047556 A JP 2002047556A
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- dlc
- treatment
- dlc film
- film
- aluminum alloy
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、省エネルギ型ＤＬ
Ｃ成膜方法およびその方法を使用したＤＬＣ皮膜アルミ
ニウム合金、ＤＬＣ皮膜マグネシウム合金に関し、特に
アルミニウム合金製機械部品、マグネシウム合金製機械
部品の摺動特性を改善して、多種技術分野でのアルミニ
ウム合金、マグネシウム合金の活用を促進するものであ
る。The present invention relates to an energy-saving DL
The present invention relates to a C film forming method and a DLC film aluminum alloy and a DLC film magnesium alloy using the method, and particularly to improving the sliding characteristics of aluminum alloy machine parts and magnesium alloy machine parts, It promotes the use of magnesium alloys.
【０００２】[0002]
【従来の技術】ＤＬＣ（ダイヤモンドライクカーボン）
皮膜は、密着性、摺動性、コストパフォーマンスに優れ
るため、省エネルギー化、高効率化、環境共生化が要求
される機器、特に自動車や航空機等への輸送用機器分野
での適用が期待されている。このように、エネルギー問
題、環境問題等の観点から輸送用機器の環境低負荷化が
きわめて重要な課題となっている。特に自動車や航空機
のエンジン部品等における超高速摺動機器では、摩擦お
よび重量によるエネルギー損失の低減が高効率化に直結
することから、素材の摺動特性の改善と軽量化が必要不
可欠な技術として時代の要請を受けてきている。そこ
で、基材として軽量なアルミニウム合金あるいはマグネ
シウム合金を用い、その表面の摺動特性を飛躍的に向上
させるものとして、ＤＬＣ（ダイヤモンドライクカーボ
ン）皮膜を形成させるＤＬＣ成膜方法が提案された。2. Description of the Related Art DLC (Diamond Like Carbon)
The film is excellent in adhesion, slidability, and cost performance, and is expected to be applied to equipment that requires energy saving, high efficiency, and symbiosis with the environment, especially in the field of transportation equipment for automobiles and aircraft. I have. As described above, it is extremely important to reduce the environmental load of transportation equipment from the viewpoint of energy problems, environmental problems, and the like. Especially for ultra-high-speed sliding equipment such as engine parts of automobiles and aircraft, reduction of energy loss due to friction and weight is directly linked to higher efficiency, so improving the sliding characteristics of materials and reducing weight are indispensable technologies. We are receiving the demands of the times. Accordingly, a DLC film forming method for forming a DLC (diamond-like carbon) film has been proposed as a material which uses a lightweight aluminum alloy or magnesium alloy as a base material and dramatically improves the sliding characteristics of its surface.
【０００３】従来のＤＬＣ成膜方法では、アルミニウム
合金あるいはマグネシウム合金に対するＤＬＣ皮膜は、 アルミニウム合金あるいはマグネシウム合金を過飽
和固溶体温度以上に昇温させる溶体化処理→室温より少
し温度を上げる時効処理→ＤＬＣコーティング処理によ
りコーティングして形成するか、または、 溶体化処理→時効処理→研磨→ＤＬＣコーティング
処理によりコーティングして形成されていた。In a conventional DLC film forming method, a DLC film for an aluminum alloy or a magnesium alloy is formed by a solution treatment for raising the temperature of an aluminum alloy or a magnesium alloy to a temperature higher than a supersaturated solid solution temperature → aging treatment for slightly raising the temperature from room temperature → DLC coating It was formed by coating by a treatment, or by coating by solution treatment → aging treatment → polishing → DLC coating treatment.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、このよ
うなプロセスによりコーティングして形成されていたＤ
ＬＣ皮膜では、基材であるアルミニウム合金あるいはマ
グネシウム合金表面とコーティング部材であるＤＬＣ皮
膜との間の密着性にやや問題があり、また、工程も多く
コストアップを招いていた。すなわち、前記のプロセ
スでは、溶体化処理、時効処理の間に生成される酸化皮
膜（図２のｂの従来法参照）の影響によって基材と皮膜
との間に充分な密着力が得られず、また、前記のプロ
セスでは、溶体化処理、時効処理の間に生成される酸化
皮膜を研磨によって除去することはできる（図６の従来
法参照）ものの、研磨工程に時間を要して要処理時間が
増大してコストアップを招いた。However, the D which has been formed by coating by such a process.
In the case of the LC film, there is a problem in the adhesiveness between the surface of the aluminum alloy or magnesium alloy as the base material and the DLC film as the coating member, and the number of steps has increased the cost. That is, in the above-described process, a sufficient adhesion between the base material and the film cannot be obtained due to the effect of the oxide film (see the conventional method of FIG. 2B) generated during the solution treatment and the aging treatment. In the above-mentioned process, the oxide film formed during the solution treatment and the aging treatment can be removed by polishing (see the conventional method in FIG. 6), but the polishing step requires time. The time has increased and the cost has increased.
【０００５】そこで本発明では、前記従来のアルミニウ
ム合金あるいはマグネシウム合金へのＤＬＣ成膜方法の
課題を解決し、アルミニウム合金、マグネシウム合金へ
のＤＬＣ皮膜の密着力を向上させて、軽量かつ自己潤滑
性の高い高品質な素材の供給を可能にするとともに、プ
ロセスが簡素化されて低コストな省エネルギ型製造によ
り成膜がなされるＤＬＣ成膜方法およびその方法を使用
したＤＬＣ皮膜アルミニウム合金、ＤＬＣ皮膜マグネシ
ウム合金を提供することを目的とする。Accordingly, the present invention solves the above-mentioned problems of the conventional method of forming a DLC film on an aluminum alloy or a magnesium alloy, improves the adhesion of the DLC film to the aluminum alloy or the magnesium alloy, and reduces the weight and the self-lubricating property. DLC film forming method capable of supplying high-quality materials with high quality, simplifying the process and forming a film by low-cost energy-saving manufacturing, DLC film aluminum alloy using the method, and DLC film It is intended to provide a magnesium alloy.
【０００６】[0006]
【課題を解決するための手段】このため本発明は、基材
の表面にＤＬＣ（ダイヤモンドライクカーボン）皮膜を
形成するＤＬＣ成膜方法において、基材を溶体化処理
し、その後時効処理とＤＬＣコーティング処理とを複合
同時処理プロセスにより同時に行うことを特徴とするＤ
ＬＣ成膜方法である。また、前記基材はアルミニウム合
金であることを特徴とするＤＬＣ成膜方法である。ま
た、前記基材はマグネシウム合金であることを特徴とす
るＤＬＣ成膜方法である。また、アルミニウム合金の表
面を溶体化処理し、その後時効処理とＤＬＣコーティン
グ処理とを複合同時処理プロセスにより同時に行いＤＬ
Ｃ皮膜を成膜したことを特徴とするＤＬＣ皮膜アルミニ
ウム合金である。また、マグネシウム合金の表面を溶体
化処理し、その後時効処理とＤＬＣコーティング処理と
を複合同時処理プロセスにより同時に行いＤＬＣ皮膜を
成膜したことを特徴とするＤＬＣ皮膜マグネシウム合金
である。SUMMARY OF THE INVENTION Accordingly, the present invention provides a DLC film forming method for forming a DLC (diamond-like carbon) film on the surface of a substrate, wherein the substrate is subjected to a solution treatment, followed by aging treatment and DLC coating. Characterized in that the processing and the simultaneous processing are performed simultaneously by a complex simultaneous processing process
This is an LC film forming method. Further, in the DLC film forming method, the base material is an aluminum alloy. Further, in the DLC film forming method, the base material is a magnesium alloy. Also, the surface of the aluminum alloy is subjected to a solution treatment, and then the aging treatment and the DLC coating treatment are simultaneously performed by a combined simultaneous treatment process to obtain a DL.
It is a DLC film aluminum alloy characterized by forming a C film. A DLC-coated magnesium alloy obtained by subjecting a surface of a magnesium alloy to a solution treatment, and then simultaneously performing an aging treatment and a DLC coating treatment by a combined simultaneous treatment process to form a DLC film.
【０００７】[0007]
【実施の形態】以下、本発明のアルミニウム合金（例え
ば７５Ｓ、１４Ｓ等）へのＤＬＣ成膜方法の１実施の形
態を図面に基づいて説明する。図１は本発明のアルミニ
ウム合金へのＤＬＣ成膜方法の１実施の形態を示すもの
で、本発明は、アルミニウム合金の表面にＤＬＣ皮膜を
形成するアルミニウム合金へのＤＬＣ成膜方法におい
て、Ｔ６過程（溶体化処理→時効処理）の中で溶体化処
理後における時効処理とＤＬＣコーティング処理とを複
合同時処理プロセスにより同時に行うことを特徴とす
る。つまり、本発明では、アルミニウム合金を過飽和固
溶体温度以上に昇温させる溶体化処理に続き、室温より
少し温度を上げる時効処理とＤＬＣコーティング処理と
を同時に、複合同時処理プロセスにより行い、自己潤滑
性の高いＤＬＣ皮膜と基材であるアルミニウム合金との
密着力を向上させる手法に特徴がある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a method for forming a DLC film on an aluminum alloy (for example, 75S, 14S, etc.) of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of a method of forming a DLC film on an aluminum alloy according to the present invention. The present invention relates to a method of forming a DLC film on an aluminum alloy surface by using a TLC process. In the (solution treatment → aging treatment), the aging treatment and the DLC coating treatment after the solution treatment are simultaneously performed by a composite simultaneous treatment process. That is, in the present invention, following the solution treatment in which the temperature of the aluminum alloy is raised to the supersaturated solid solution temperature or higher, the aging treatment in which the temperature is slightly raised from room temperature and the DLC coating treatment are simultaneously performed by the composite simultaneous treatment process, and the self-lubricating property is obtained. It is characterized by a technique for improving the adhesion between the high DLC film and the aluminum alloy as the base material.
【０００８】すなわち、溶体化処理に続いて、時効処理
とＤＬＣコーティング処理とを同時に行う複合表面改質
によって処理工程を削減してコストダウンが図られると
ともに、複合同時処理プロセス中になされる、Ａｌ−Ｃ
ｕ系化合物あるいはＡｌ−Ｍｇ系化合物の析出が進行し
て、ＤＬＣ皮膜とアルミニウム合金基材との間の界面親
和力を活発化し、ＤＬＣ皮膜とアルミニウム合金基材と
の密着密度を向上させることができる。これにより、部
品の軽量化と摺動特性の改善が一挙になされる。That is, following the solution treatment, the aging treatment and the DLC coating treatment are performed at the same time to reduce the number of treatment steps by the composite surface modification, thereby reducing the cost. -C
Precipitation of the u-based compound or the Al-Mg-based compound proceeds, the interface affinity between the DLC film and the aluminum alloy substrate is activated, and the adhesion density between the DLC film and the aluminum alloy substrate can be improved. . As a result, the weight of the component is reduced and the sliding characteristics are improved at once.
【０００９】図１に示すドライプロセスすなわち、溶体
化処理→イオンボンバーディング処理（コーティングの
前処理）→ＤＬＣ皮膜コーティングと時効処理の複合同
時プロセスを用いて、図２のａのような酸化皮膜を含ま
ない界面組織を形成する。特に、溶体化処理→イオンボ
ンバーディング処理→複合同時プロセスを連続的に行う
ことで、大幅なコストダウンとＤＬＣ皮膜の密着力の向
上を可能にする。該ＤＬＣ皮膜は、複合同時プロセス中
に基材の界面付近に生成される析出とコーティングとが
同時に行われることで、基材と強固に密着され、摺動部
品におけるＤＬＣ皮膜の自己潤滑機能を発現させるため
の充分なる密着力が確保される。An oxide film as shown in FIG. 2A is formed by using a dry process shown in FIG. 1, that is, a solution simultaneous treatment → ion bombarding treatment (pre-coating treatment) → combined simultaneous process of DLC film coating and aging treatment. Forms an interfacial texture that does not contain it. In particular, by successively performing the solution treatment → ion bombarding treatment → complex simultaneous process, it is possible to greatly reduce the cost and improve the adhesion of the DLC film. The DLC film is firmly adhered to the substrate by simultaneously performing precipitation and coating generated near the interface of the substrate during the composite simultaneous process, thereby exhibiting a self-lubricating function of the DLC film in the sliding component. Sufficient adhesion to secure the contact is ensured.
【００１０】図１の処理プロセスにより作成された表面
改質層において、予想される基材との密着力を従来のコ
ーティングプロセスと比較した結果を図３に示す。図３
において、は（溶体化処理＋時効処理＋ＤＬＣコーテ
ィング）からなる従来のプロセスＡ、は（溶体化処理
＋時効処理＋研磨＋ＤＬＣコーティング）からなる従来
のプロセスＢ、は（溶体化処理＋時効処理／ＤＬＣコ
ーティング）からなる本発明の複合同時プロセスであ
る。同図により、従来のコーティングプロセスに比
較して、本発明の複合同時プロセスでは非常に優れた
密着性能を発揮することが理解される。FIG. 3 shows the result of comparing the expected adhesion to the substrate in the surface-modified layer prepared by the treatment process of FIG. 1 with that of the conventional coating process. FIG.
In the conventional process A consisting of (solution treatment + aging treatment + DLC coating), the conventional process B consisting of (solution treatment + aging treatment + polishing + DLC coating) is referred to as (solution treatment + aging treatment / DLC coating). Coating) of the present invention. From the figure, it is understood that the composite simultaneous process of the present invention exhibits extremely excellent adhesion performance as compared with the conventional coating process.
【００１１】これは、従来のコーティングプロセスでは
時効処理過程でアルミニウム基材の表面に酸化皮膜が生
成されることが避けられず、該酸化皮膜がＤＬＣ皮膜と
の密着力を低下させてしまうのに対して、本発明の複合
同時プロセスによって生成されたＤＬＣ皮膜では、酸化
皮膜が生成されずに析出と成膜が同時に行われてＤＬＣ
皮膜がアルミニウム基材の表面に強固に密着するためと
思料される。本発明の複合同時プロセスによって生成さ
れたＤＬＣ皮膜は、従来プロセスの３倍以上の密着性能
を有しており、機械部品に適した軽量素材に好都合な表
面改質処理方法であることが理解される。This is because in the conventional coating process, it is inevitable that an oxide film is formed on the surface of the aluminum substrate during the aging process, and this oxide film reduces the adhesion to the DLC film. On the other hand, in the DLC film formed by the composite simultaneous process of the present invention, the oxide film is not formed, and the deposition and the film formation are simultaneously performed.
It is considered that the coating adheres firmly to the surface of the aluminum substrate. It is understood that the DLC film produced by the composite simultaneous process of the present invention has an adhesion performance three times or more that of the conventional process, and is a convenient surface modification method for lightweight materials suitable for machine parts. You.
【００１２】つぎに、本発明の第２実施形態としてのマ
グネシウム合金（例えばＭｇ−Ａｌ系、Ｍｇ−Ｚｎ系、
Ｍｇ−希土類系等）へのＤＬＣ成膜方法を図面に基づい
て説明すると、図４は本発明のマグネシウム合金へのＤ
ＬＣ成膜方法（ドライプロセス）の説明図である。図４
において、まずマグネシウム合金の表面に溶体化処理を
施し、その後イオンボンバーディング処理（コーティン
グの前処理）を行い、さらにＤＬＣ被膜コーティングと
時効処理の複合同時プロセスを用いて、図５のような酸
化被膜を含まない界面組織を形成する。上記のように、
溶体化処理→イオンボンバーディング処理→複合同時プ
ロセスを連続的に行うことで大幅なコストダウンとＤＬ
Ｃ被膜の密着力向上を可能にする。このＤＬＣ被膜は、
基材の界面付近に生成される析出とコーティングとが同
時に行われることで基材と強固に密着する。このように
強固な密着力が摺動部品においてＤＬＣ被膜の自己潤滑
機能を発現させる。Next, a magnesium alloy according to a second embodiment of the present invention (for example, Mg-Al, Mg-Zn,
A method of forming a DLC film on a Mg-rare earth system will be described with reference to the drawings.
It is explanatory drawing of the LC film-forming method (dry process). FIG.
First, a solution treatment is applied to the surface of the magnesium alloy, then an ion bombardment treatment (pretreatment of coating) is performed, and an oxide film as shown in FIG. To form an interfacial structure containing no. As described above,
Significant cost reduction and DL by continuous solution treatment → ion bombarding → composite simultaneous process
Enables improvement of adhesion of C film. This DLC coating is
The deposition and coating generated near the interface of the substrate are performed at the same time, whereby the substrate and the substrate are firmly adhered to each other. Such strong adhesion exerts the self-lubricating function of the DLC film in the sliding component.
【００１３】図４の処理プロセスにより作成された表面
改質層において、予想される基材との密着力を従来のコ
ーティングプロセスと比較した結果を図 に示す。図７
において、は（溶体化処理＋時効処理＋ＤＬＣコーテ
ィング）からなる従来のプロセスＡ、は（溶体化処理
＋時効処理＋研磨＋ＤＬＣコーティング）からなる従来
のプロセスＢ、は（溶体化処理＋時効処理／ＤＬＣコ
ーティング）からなる本発明の複合同時プロセスであ
る。同図により、従来のコーティングプロセスに比
較して、本発明の複合同時プロセスでは非常に優れた
密着性能を発揮することが理解される。FIG. 4 shows the result of comparing the expected adhesion to the substrate in the surface-modified layer formed by the treatment process of FIG. 4 with that of the conventional coating process. FIG.
In the conventional process A consisting of (solution treatment + aging treatment + DLC coating), the conventional process B consisting of (solution treatment + aging treatment + polishing + DLC coating) is referred to as (solution treatment + aging treatment / DLC coating). Coating) of the present invention. From the figure, it is understood that the composite simultaneous process of the present invention exhibits extremely excellent adhesion performance as compared with the conventional coating process.
【００１４】これは、従来のコーティングプロセスでは
時効処理過程でマグネシウム基材の表面に酸化皮膜が生
成されることが避けられず、該酸化皮膜がＤＬＣ皮膜と
の密着力を低下させてしまうのに対して、本発明の複合
同時プロセスによって生成されたＤＬＣ皮膜では、酸化
被膜が生成されず、コーティング中にＡＬーＭｇ系化合
物の析出と成膜とが同時に行われるために基材に強固に
密着する。このためＤＬＣ被膜と基材の界面の親和力が
活発になり、ＤＬＣ被膜と基材の密着度が向上する。本
発明の複合同時プロセスによって生成されたＤＬＣ皮膜
は、従来プロセスの３倍以上の密着性能を有しており、
機械部品に適した軽量素材に好都合な表面改質処理方法
であることが理解される。This is because, in the conventional coating process, it is inevitable that an oxide film is formed on the surface of the magnesium base material during the aging treatment, and the oxide film reduces the adhesion to the DLC film. On the other hand, in the DLC film formed by the composite simultaneous process of the present invention, an oxide film is not formed, and the deposition and deposition of the AL-Mg-based compound are performed simultaneously during the coating, so that the DLC film is firmly adhered to the substrate. I do. For this reason, the affinity of the interface between the DLC film and the substrate becomes active, and the degree of adhesion between the DLC film and the substrate is improved. The DLC film produced by the composite simultaneous process of the present invention has more than three times the adhesion performance of the conventional process,
It is understood that this is a surface modification treatment method that is advantageous for lightweight materials suitable for machine parts.
【００１５】以上、本発明のアルミニウム合金あるいは
マグネシウム合金へのＤＬＣ成膜方法の実施の形態を説
明してきたが、本発明の趣旨の範囲内で、溶体化処理形
態、時効処理およびＤＬＣコーティング処理形態等は適
宜選定が可能であり、基材も適宜選択可能である。また
時効処理と同に行うコーティング処理は、イオンプレー
ティング処理、スパッタ処理等を採用することができ
る。さらに、本発明は上記実施形態に限定することな
く、本発明はその精神または主要な特徴から逸脱するこ
となく、他のいかなる形でも実施できる。そのため、前
述の実施形態はあらゆる点で単なる例示にすぎず限定的
に解釈してはならない。The embodiments of the method for forming a DLC film on an aluminum alloy or a magnesium alloy according to the present invention have been described above. However, within the scope of the present invention, a solution treatment form, an aging treatment form, and a DLC coating form Etc. can be appropriately selected, and the base material can also be appropriately selected. As the coating treatment performed in the same manner as the aging treatment, an ion plating treatment, a sputtering treatment, or the like can be employed. Furthermore, the present invention is not limited to the above embodiments, and the present invention can be implemented in any other form without departing from the spirit or main features thereof. Therefore, the above-described embodiment is merely an example in all aspects and should not be interpreted in a limited manner.
【００１６】[0016]
【発明の効果】以上、詳細に説明したように、本発明で
は、アルミニウム合金あるいはマグネシウム合金の表面
にＤＬＣ皮膜を形成する成膜方法において、溶体化処理
後における時効処理とＤＬＣコーティング処理とを複合
同時処理プロセスにより同時に行うことにより、複合同
時プロセスによって生成されたＤＬＣ皮膜では、酸化皮
膜が生成されずに析出と成膜が同時に行われて、アルミ
ニウム合金あるいはマグネシウム合金の表面にＤＬＣ皮
膜が強固に密着され、軽量機械部品の摺動特性が大きく
改善される。As described above in detail, according to the present invention, in a film forming method for forming a DLC film on a surface of an aluminum alloy or a magnesium alloy, aging treatment after solution treatment and DLC coating treatment are combined. Simultaneous processing by the simultaneous treatment process allows the deposition and film formation to be performed simultaneously without forming an oxide film on the DLC film generated by the composite simultaneous process, and the DLC film is firmly formed on the surface of the aluminum alloy or magnesium alloy. Being in close contact, the sliding characteristics of lightweight machine parts are greatly improved.
【００１７】したがって、軽量で、高い摺動特性が要求
される自動車部品関連、宇宙機器部品関連、航空機器部
品関連等様々な産業分野の高効率化、省エネルギー化技
術およびドライ潤滑技術として適用が期待される。ま
た、本発明は、アルミニウム製機械部品、マグネシウム
製機械部品のあらゆる分野に適用が可能である。かくし
て、本発明では、アルミニウム基材、マグネシウム基材
へのＤＬＣ皮膜の密着力を向上させて、軽量かつ自己潤
滑性の高い高品質な素材の供給を可能にするとともに、
プロセスが簡素化されて低コストな省エネルギ型製造に
より成膜がなされるアルミニウム合金あるいはマグネシ
ウム合金へのＤＬＣ成膜方法が提供される。Therefore, it is expected to be applied as a high-efficiency, energy-saving technology and dry lubrication technology in various industrial fields such as automobile parts, space equipment parts, aviation equipment parts, etc., which are required to be lightweight and have high sliding characteristics. Is done. Further, the present invention is applicable to all fields of aluminum mechanical parts and magnesium mechanical parts. Thus, in the present invention, by improving the adhesion of the DLC film to the aluminum substrate and the magnesium substrate, it is possible to supply a high-quality material that is lightweight and highly self-lubricating,
A method of forming a DLC film on an aluminum alloy or a magnesium alloy by which a process is simplified and a film is formed by low-cost energy-saving manufacturing is provided.
【図１】本発明のアルミニウム合金へのＤＬＣ成膜方法
を示す複合同時処理プロセスの代表例図である。FIG. 1 is a typical example of a combined simultaneous treatment process showing a method for forming a DLC film on an aluminum alloy according to the present invention.
【図２】本発明と従来のＤＬＣ成膜方法により生成され
た表面構造の比較図である。FIG. 2 is a comparison diagram of a surface structure generated by the present invention and a conventional DLC film forming method.
【図３】本発明と従来のＤＬＣ成膜方法により生成され
たＤＬＣ皮膜の密着力の比較図である。FIG. 3 is a comparison diagram of the adhesion between DLC films formed by the present invention and a conventional DLC film forming method.
【図４】本発明のマグネシウム合金へのＤＬＣ成膜方法
を示す複合同時処理プロセスの代表例図である。FIG. 4 is a typical example of a combined simultaneous treatment process showing a method for forming a DLC film on a magnesium alloy according to the present invention.
【図５】本発明の複合同時プロセスによるＤＬＣ成膜方
法の説明図である。FIG. 5 is an explanatory diagram of a DLC film forming method according to the composite simultaneous process of the present invention.
【図６】従来のＤＬＣ成膜方法の説明図である。FIG. 6 is an explanatory diagram of a conventional DLC film forming method.
【図７】複合同時プロセスにより生成されたＤＬＣ成膜
皮膜の密着力の比較図である。FIG. 7 is a comparison diagram of the adhesion of a DLC film formed by a combined simultaneous process.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ２３Ｃ 14/22 Ｃ２３Ｃ 14/22 Ｚ // Ｃ２２Ｆ 1/00 ６０２ Ｃ２２Ｆ 1/00 ６０２ ６１３ ６１３ ６３０ ６３０Ｄ ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) C23C 14/22 C23C 14/22 Z // C22F 1/00 602 C22F 1/00 602 613 613 630 630 630D
Claims (5)
クカーボン）皮膜を形成するＤＬＣ成膜方法において、
基材を溶体化処理し、その後時効処理とＤＬＣコーティ
ング処理とを複合同時処理プロセスにより同時に行うこ
とを特徴とするＤＬＣ成膜方法。1. A DLC film forming method for forming a DLC (diamond-like carbon) film on a surface of a substrate,
A DLC film forming method, comprising: performing a solution treatment on a substrate; and then simultaneously performing an aging treatment and a DLC coating treatment by a combined simultaneous treatment process.
を特徴とする請求項１に記載のＤＬＣ成膜方法。2. The DLC film forming method according to claim 1, wherein the substrate is an aluminum alloy.
を特徴とする請求項１に記載のＤＬＣ成膜方法。3. The method according to claim 1, wherein the substrate is a magnesium alloy.
し、その後時効処理とＤＬＣコーティング処理とを複合
同時処理プロセスにより同時に行いＤＬＣ皮膜を成膜し
たことを特徴とするＤＬＣ皮膜アルミニウム合金。4. A DLC-coated aluminum alloy obtained by subjecting a surface of an aluminum alloy to a solution treatment, and then simultaneously performing an aging treatment and a DLC coating treatment by a combined simultaneous treatment process to form a DLC film.
し、その後時効処理とＤＬＣコーティング処理とを複合
同時処理プロセスにより同時に行いＤＬＣ皮膜を成膜し
たことを特徴とするＤＬＣ皮膜マグネシウム合金。5. A DLC-coated magnesium alloy obtained by subjecting a surface of a magnesium alloy to a solution treatment, and then simultaneously performing an aging treatment and a DLC coating treatment by a combined simultaneous treatment process to form a DLC film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001142591A JP2002047556A (en) | 2000-05-26 | 2001-05-14 | Dlc film deposition method, and dlc coated aluminum alloy and dlc coated magnesium alloy using the method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-155624 | 2000-05-26 | ||
| JP2000155624 | 2000-05-26 | ||
| JP2001142591A JP2002047556A (en) | 2000-05-26 | 2001-05-14 | Dlc film deposition method, and dlc coated aluminum alloy and dlc coated magnesium alloy using the method |
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| Publication Number | Publication Date |
|---|---|
| JP2002047556A true JP2002047556A (en) | 2002-02-15 |
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|---|---|---|---|
| JP2001142591A Pending JP2002047556A (en) | 2000-05-26 | 2001-05-14 | Dlc film deposition method, and dlc coated aluminum alloy and dlc coated magnesium alloy using the method |
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| JP (1) | JP2002047556A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005256047A (en) * | 2004-03-10 | 2005-09-22 | Ulvac Japan Ltd | SURFACE TREATMENT METHOD AND SURFACE TREATMENT APPARATUS FOR Mg ALLOY MEMBER |
| CN103695857A (en) * | 2013-12-25 | 2014-04-02 | 湖南中航超强金刚石膜高科技有限公司 | Preparation process for medical operating forceps with antibacterial and anticorrosive DLC (diamond-like carbon) film coating |
| CN110484861A (en) * | 2019-08-09 | 2019-11-22 | 广东工业大学 | A kind of magnesium alloy materials and the synchronous intensifying method of magnesium alloy solution treatment+PVD coating |
-
2001
- 2001-05-14 JP JP2001142591A patent/JP2002047556A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005256047A (en) * | 2004-03-10 | 2005-09-22 | Ulvac Japan Ltd | SURFACE TREATMENT METHOD AND SURFACE TREATMENT APPARATUS FOR Mg ALLOY MEMBER |
| CN103695857A (en) * | 2013-12-25 | 2014-04-02 | 湖南中航超强金刚石膜高科技有限公司 | Preparation process for medical operating forceps with antibacterial and anticorrosive DLC (diamond-like carbon) film coating |
| CN110484861A (en) * | 2019-08-09 | 2019-11-22 | 广东工业大学 | A kind of magnesium alloy materials and the synchronous intensifying method of magnesium alloy solution treatment+PVD coating |
| CN110484861B (en) * | 2019-08-09 | 2021-03-12 | 广东工业大学 | Magnesium alloy material and magnesium alloy solution treatment and PVD coating synchronous strengthening method |
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