JP2001277102A5 - - Google Patents
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- Publication number
- JP2001277102A5 JP2001277102A5 JP2000092167A JP2000092167A JP2001277102A5 JP 2001277102 A5 JP2001277102 A5 JP 2001277102A5 JP 2000092167 A JP2000092167 A JP 2000092167A JP 2000092167 A JP2000092167 A JP 2000092167A JP 2001277102 A5 JP2001277102 A5 JP 2001277102A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000092167A JP2001277102A (ja) | 2000-03-29 | 2000-03-29 | 補助パッド及び研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000092167A JP2001277102A (ja) | 2000-03-29 | 2000-03-29 | 補助パッド及び研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001277102A JP2001277102A (ja) | 2001-10-09 |
| JP2001277102A5 true JP2001277102A5 (xx) | 2005-10-27 |
Family
ID=18607536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000092167A Pending JP2001277102A (ja) | 2000-03-29 | 2000-03-29 | 補助パッド及び研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001277102A (xx) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004023009A (ja) * | 2002-06-20 | 2004-01-22 | Nikon Corp | 研磨体、研磨装置、半導体デバイス及び半導体デバイス製造方法 |
| JP5587636B2 (ja) * | 2010-03-01 | 2014-09-10 | 富士紡ホールディングス株式会社 | 研磨パッド |
| JP5528520B2 (ja) * | 2012-10-18 | 2014-06-25 | 株式会社東京精密 | 圧力分布調整機能を有する研磨装置 |
| JP2014176950A (ja) * | 2013-02-12 | 2014-09-25 | Ebara Corp | 研磨装置、及び研磨パッド貼り付け方法 |
| WO2014119598A1 (ja) * | 2013-01-31 | 2014-08-07 | 株式会社 荏原製作所 | 研磨装置、研磨パッド貼り付け方法、及び研磨パッド張り替え方法 |
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2000
- 2000-03-29 JP JP2000092167A patent/JP2001277102A/ja active Pending