JP2001234328A - Combined hard coating member - Google Patents
Combined hard coating memberInfo
- Publication number
- JP2001234328A JP2001234328A JP2000049530A JP2000049530A JP2001234328A JP 2001234328 A JP2001234328 A JP 2001234328A JP 2000049530 A JP2000049530 A JP 2000049530A JP 2000049530 A JP2000049530 A JP 2000049530A JP 2001234328 A JP2001234328 A JP 2001234328A
- Authority
- JP
- Japan
- Prior art keywords
- hard film
- composite hard
- composite
- coating
- atomic ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金属、合金、焼結
合金、セラミックス焼結体または超高温高圧焼結体の基
材上にチタンーアルミニウム含有複合化合物でなる複合
硬質膜を含む被覆層が被覆された複合硬質膜被覆部材に
関するものである。The present invention relates to a coating layer comprising a composite hard film made of a titanium-aluminum-containing composite compound on a base material of a metal, an alloy, a sintered alloy, a ceramic sintered body or an ultra-high-temperature high-pressure sintered body. The present invention relates to a composite hard film-coated member coated with.
【０００２】[0002]
【従来の技術】従来から金属、合金、焼結合金、セラミ
ックス焼結体または超高温高圧焼結体の基材上に、化学
蒸着法（以下、「ＣＶＤ法」という），物理蒸着法（以
下、「ＰＶＤ法」という）またはプラズマＣＶＤ法を利
用して硬質膜を被覆し、基材と硬質膜とを有効に利用し
た硬質膜被覆部材が実用されてきている。現在、実用さ
れている硬質膜被覆部材における硬質膜の材質は、Ｔｉ
の窒化物，炭窒化物，炭化物などのＴｉ元素含有硬質膜
と，ＴｉとＡｌを含有の複合窒化物，複合炭窒化物など
のＴｉーＡｌ元素含有複合硬質膜と、酸化アルミニウム
硬質膜を代表例として挙げることができる。2. Description of the Related Art Conventionally, chemical vapor deposition (hereinafter, referred to as "CVD") and physical vapor deposition (hereinafter, referred to as "CVD") are applied to a substrate of a metal, an alloy, a sintered alloy, a ceramic sintered body, or an ultra-high-temperature, high-pressure sintered body. , A “PVD method”) or a plasma CVD method, and a hard film-coated member that effectively utilizes a base material and a hard film has been put to practical use. At present, the material of the hard film in the hard film covering member that is in practical use is Ti
Hard films containing Ti elements such as nitrides, carbonitrides, and carbides of titanium, composite hard films containing Ti-Al elements such as composite nitrides and composite carbonitrides containing Ti and Al, and aluminum oxide hard films Examples can be given.
【０００３】これらの硬質膜被覆部材のうち、基材上
に、ＴｉーＡｌ元素含有複合硬質膜を被覆し、ＴｉーＡ
ｌ元素含有複合硬質膜の特性を有効に引き出して、長寿
命を達成しようとした複合硬質膜被覆部材が多数提案さ
れている。これらのうち、複合硬質膜の結晶構造から長
寿命を達成させることについて提案されている代表的な
ものに、特開平８ー２０９３３５号公報、特開平２９１
３５３号公報、特開平９ー２９５２０４号公報、特開平
９ー３００１０５号公報、特開平９ー３００１０６号公
報、特開平９ー３２３２０４号公報、特開平９ー３２３
２０５号公報、特開平１０ー７６４０７号公報、特開平
１０ー７６４０８号公報、特開平１１ー１７６２号公
報、特開平１１ー１３１２１４号公報、特開平１１ー１
３１２１５号公報、特開平１１ー１３１２１６号公報、
および特開平１１ー１３１２１７号公報がある。また、
ＴｉーＡｌ元素含有複合硬質膜ではなく、Ｔｉ元素含有
化合物硬質膜を被覆した被覆超硬合金について提案され
ている代表的なものに、特開昭５２ー２８４７８号公報
がある。[0003] Among these hard film coating members, a base material is coated with a Ti-Al element-containing composite hard film, and a Ti-A
Many composite hard film-coated members have been proposed to effectively draw out the characteristics of the l-element-containing composite hard film and achieve a long life. Among these, typical ones that have been proposed to achieve a long life from the crystal structure of the composite hard film are disclosed in JP-A-8-209335 and JP-A-291-291.
353, JP-A-9-295204, JP-A-9-300105, JP-A-9-300106, JP-A-9-323204, JP-A-9-323
No. 205, JP-A-10-76407, JP-A-10-76408, JP-A-11-1762, JP-A-11-131214, JP-A-11-1
No. 31215, Japanese Patent Application Laid-Open No. H11-131216,
And JP-A-11-131217. Also,
Japanese Patent Application Laid-Open No. 52-28478 discloses a typical example of a coated cemented carbide that is coated with a Ti element-containing compound hard film instead of a Ti-Al element-containing composite hard film.
【０００４】[0004]
【発明が解決しようとする課題】ＴｉーＡｌ元素含有複
合硬質膜を被覆した複合硬質膜被覆部材に関する先行技
術文献のうち、特開平８ー２０９３３５号公報、特開平
９ー２９５２０４号公報、特開平９ー３００１０５号公
報、特開平９ー３００１０６号公報、特開平９ー３２３
２０４号公報、特開平９ー３２３２０５号公報、特開平
１０ー７６４０７号公報、特開平１０ー７６４０８号公
報、特開平１１ー１３１２１５号公報、および特開平１
１ー１３１２１７号公報には、Ｔｉ−Ａｌ元素含有複合
硬質膜のＸ線回折における（１１１）結晶面のピーク高
さに対する（２００）結晶面のピーク高さの比が１以
上、１．５以上または２以上である構成要件を含む被覆
部材について開示されている。また、先行技術文献のう
ち、特開平９ー２９１３５３号公報、特開平１１ー１３
１２１４号公報および特開平１１ー１３１２１６号公報
には、Ｔｉ−Ａｌ元素含有複合硬質膜のＸ線回折におけ
る（１１１）結晶面のピーク高さに対する（２００）結
晶面のピーク高さの比が２以下である構成要件を含む被
覆部材について開示されている。Among the prior art documents relating to a composite hard film coating member coated with a Ti—Al element-containing composite hard film, Japanese Patent Application Laid-Open Nos. 8-209335, 9-295204, and 9-295204 JP-A-9-300105, JP-A-9-300106, JP-A-9-323
Nos. 204, 9-323205, 10-76407, 10-76408, 11-131215, and 1
In JP-A-131217, the ratio of the peak height of the (200) crystal plane to the peak height of the (111) crystal plane in the X-ray diffraction of the Ti—Al element-containing composite hard film is 1 or more, and 1.5 or more. Alternatively, a covering member including a constituent feature of two or more is disclosed. Among prior art documents, Japanese Patent Application Laid-Open No. 9-291353,
JP-A-1214 and JP-A-11-131216 disclose that the ratio of the peak height of the (200) crystal plane to the peak height of the (111) crystal plane in the X-ray diffraction of the Ti—Al element-containing composite hard film is 2%. A covering member including the following components is disclosed.
【０００５】また、特開平１０ー３１７１２３号公報に
は、Ｃｕ，Ｋα線を線源とするＸ線回折における（Ｔ
ｉ，Ａｌ）Ｎに代表される複合硬質膜の回折ピークのう
ち、（２００）結晶面が最高回折ピーク高さとなる構成
要件を含む複合硬質膜部材について、さらに特開平１１
ー１７６２号公報には、Ｃｕ，Ｋα線を線源とするＸ線
回折における同複合硬質膜の回折ピークのうち、４２．
５〜４４．５度内の回折角（２θ）に最高回折ピーク高
さを構成要件とする複合硬質膜被覆部材について開示さ
れている。Further, Japanese Patent Application Laid-Open No. Hei 10-317123 discloses (T) in X-ray diffraction using Cu, Kα radiation as a radiation source.
Among the diffraction peaks of the composite hard film typified by (i, Al) N, a composite hard film member including a constituent feature that the (200) crystal plane has the highest diffraction peak height is further disclosed in Japanese Patent Application Laid-open No.
No. 1762 discloses that among the diffraction peaks of the composite hard film in X-ray diffraction using Cu, Kα ray as a source, 42.
A composite hard film-coated member having a maximum diffraction peak height at a diffraction angle (2θ) within 5 to 44.5 degrees is disclosed.
【０００６】これら１５件の公開特許公報には、Ｔｉ−
Ａｌ元素含有複合硬質膜における複合硬質膜内の残留圧
縮応力、または複合硬質膜内の結晶配向を考慮し、複合
硬質膜内の粒界破壊の抑制、基材と複合硬質膜との密着
性の向上、耐摩耗性の向上を発揮させることにより、安
定した切削加工と長寿命を可能としたことが開示されて
いる。しかしながら、これら１５件の同公報に記載され
ている複合硬質膜被覆部材は、複合硬質膜に存在する結
晶の欠陥および歪みに配慮されていないことから、複合
硬質膜自体の強度，耐摩耗性に満足できなく、その結果
基材と複合硬質膜との密着性および複合硬質膜と隣接す
る他の膜との密着性に満足できなく、寿命のバラツキが
大きく、切削工具として実用したときに低温領域から高
温領域まで広範囲の領域において、安定して長寿命を得
ることが困難であるという問題を有している。[0006] These 15 patents disclose Ti-
In consideration of the residual compressive stress in the composite hard film or the crystal orientation in the composite hard film in the Al element-containing composite hard film, suppression of grain boundary destruction in the composite hard film, adhesion between the substrate and the composite hard film It is disclosed that stable cutting and long life can be achieved by exhibiting improvement in wear resistance. However, the composite hard film-coated members described in these fifteen patent publications do not consider the crystal defects and distortion present in the composite hard film, and therefore, the strength and wear resistance of the composite hard film itself are reduced. Unsatisfactory, as a result, the adhesion between the base material and the composite hard film and the adhesion between the composite hard film and the adjacent film are not satisfactory. There is a problem that it is difficult to stably obtain a long life in a wide range from a high temperature range to a high temperature range.
【０００７】その他、Ｔｉ−Ａｌ元素含有複合硬質膜に
関する先行技術文献ではないが、特開昭５２ー２８４７
８号公報には、硬質膜の（２００）結晶面におけるＸ線
回折線が２θで半価幅が０．４度以上である硬質膜部材
について開示されている。同公報に開示の硬質膜部材
は、ＰＶＤ法による硬質膜であり、ＣＶＤ法による硬質
膜との相違を半価幅により表現しており、硬質膜の結晶
の欠陥および歪みを配慮していないことから、上述した
複合硬質膜と同様に硬質膜の強度、耐摩耗性および密着
性に満足できなく、寿命のバラツキが大きく、切削工具
として実用したときに低温領域から高温領域まで広範囲
の領域において、安定して長寿命を得ることが困難であ
るという問題を有している。[0007] In addition, although it is not a prior art document relating to a Ti—Al element-containing composite hard film, it is disclosed in Japanese Patent Application Laid-Open No. 52-2847.
No. 8 discloses a hard film member in which the X-ray diffraction line at the (200) crystal plane of the hard film is 2θ and the half width is 0.4 ° or more. The hard film member disclosed in the publication is a hard film formed by the PVD method, and the difference from the hard film formed by the CVD method is expressed by a half-value width, and the crystal defects and distortion of the hard film are not considered. From, like the above-mentioned composite hard film, the strength of the hard film as well as the wear resistance and adhesion are not satisfactory, the variation in the life is large, and when used as a cutting tool in a wide range from a low temperature region to a high temperature region, There is a problem that it is difficult to stably obtain a long life.
【０００８】本発明は、上述のような問題点を解決した
もので、具体的には、チタンーアルミニウムを含む複合
化合物でなる複合硬質膜の結晶の欠陥，歪み，結晶構造
および結晶配向を配慮し、特に切削工具としての使用領
域を拡大し、複合硬質膜の特性のバラツキを抑制し、高
靭性，高硬度性，耐摩耗性，耐酸化性，耐熱衝撃性，耐
欠損性，耐溶着性のある複合硬質膜、特に高強度および
耐剥離性を高めて被削材との耐溶着性を向上させた複合
硬質膜とすることにより一層長寿命を達成させた複合硬
質膜被覆部材の提供を目的とするものである。The present invention has solved the above-mentioned problems, and specifically considers crystal defects, distortion, crystal structure and crystal orientation of a composite hard film made of a composite compound containing titanium-aluminum. In particular, it expands the area of use as a cutting tool, suppresses variations in the characteristics of the composite hard film, and provides high toughness, high hardness, wear resistance, oxidation resistance, thermal shock resistance, chipping resistance, and welding resistance. To provide a composite hard film coated member having a longer service life by forming a composite hard film having a high hardness and peel resistance, and in particular, a composite hard film having improved adhesion resistance to a work material. It is the purpose.
【０００９】[0009]
【課題を解決するための手段】本発明者らは、ＣＶＤ
法，ＰＶＤ法およびプラズマＰＶＤ法に関する硬質膜の
成膜についての研究、特にＰＶＤ法による硬質膜につい
ての研究を長期に亘って行ってきた結果、硬質膜の中で
もＴｉ−Ａｌ含有の複合硬質膜の成膜時におけるプラズ
マ密度の向上およびイオン化効率の向上を行い、さらに
気相法エピタキシャル成長させて、結晶を最適に配向さ
せると、複合硬質膜内の歪みが均一に緩和されること、
複合硬質膜の結晶の欠陥が抑制されること、微細結晶の
複合硬質膜が得られることから、複合硬質膜自体の強
度，耐摩耗性，耐酸化性および耐熱性を向上させること
が可能となり、複合硬質膜と基材または下地層や外層と
の密着性の向上が顕著になるという第１の知見と、この
ように硬質膜が完全な結晶に近似する場合には、Ｘ線回
折における最高ピークを含めた少なくとも２本の回折線
ピークの高さ比および半価幅比から判断することが簡易
であるという第２の知見とを得るに至ったものである。
これらの知見に基づいて、本発明を完成するに至ったも
のである。Means for Solving the Problems The present inventors have developed a CVD method.
Of hard film formation by PVD method, PVD method and plasma PVD method, especially research on hard film by PVD method for a long period of time. Improving plasma density and ionization efficiency during film formation, and further performing epitaxial growth by vapor phase method to optimally orient the crystal, the strain in the composite hard film is uniformly relaxed,
Since the crystal defects of the composite hard film are suppressed, and the composite hard film of fine crystals is obtained, it is possible to improve the strength, wear resistance, oxidation resistance and heat resistance of the composite hard film itself, The first finding that the adhesion between the composite hard film and the base material or the underlayer or the outer layer becomes remarkable, and when the hard film approximates perfect crystals, the highest peak in X-ray diffraction is obtained. And the second finding that it is easy to judge from the height ratio and the half width ratio of at least two diffraction line peaks including the above.
Based on these findings, the present invention has been completed.
【００１０】本発明の複合硬質膜被覆部材は、基材の表
面にチタンとアルミニウムとを含む複合窒化物、複合炭
化物、複合炭窒化物、複合窒酸化物、複合炭酸化物、複
合炭窒酸化物の中の少なくとも１種の複合硬質膜を含む
単層または積層の被覆層として被覆されており、該複合
硬質膜の表面から銅ターゲットを用いてＸ線回折したと
きに、（２００）結晶面のピーク高さをｈ（２００）と
し、（１１１）結晶面のピーク高さをｈ（１１１）とし
たときに、ｈ（２００）／ｈ（１１１）≧４．０からな
り、該（２００）結晶面のピークの半価幅をｄ（２０
０）とし、該（１１１）結晶面のピークの半価幅をｄ
（１１１）としたときに、１．５≧ｄ（２００）／ｄ
（１１１）≧０．８からなるものである。[0010] The composite hard film-coated member of the present invention comprises a composite nitride, a composite carbide, a composite carbonitride, a composite nitroxide, a composite carbonate, and a composite carbonitride containing titanium and aluminum on the surface of a substrate. Are coated as a single layer or a laminated coating layer including at least one type of composite hard film, and when the surface of the composite hard film is subjected to X-ray diffraction using a copper target, the (200) crystal plane When the peak height is h (200) and the peak height of the (111) crystal plane is h (111), h (200) / h (111) ≧ 4.0. The half width of the peak of the plane is d (20
0), and the half width of the peak of the (111) crystal plane is d.
When (111) is satisfied, 1.5 ≧ d (200) / d
(111) ≧ 0.8.
【００１１】本発明の複合硬質膜被覆部材は、気相法エ
ピタキシャル成長を利用して、チタンとアルミニウムと
を含む複合硬質膜における（２００）結晶面の配向を強
くし、複合硬質膜内の歪みを極力抑制することにより、
複合硬質膜自体の強度、靱性を高めると共に、耐摩耗性
もすぐれるというシナージ効果を発揮させたものであ
り、複合硬質膜の表面から銅ターゲットを用いてＸ線回
折したときに、ｈ（２００）／ｈ（１１１）＜４．０に
なる場合、ｄ（２００）／ｄ（１１１）＞１．５または
ｄ（２００）／ｄ（１１１）＜０．８になる場合には、
（２００）結晶面への配向性が弱く、膜内の欠陥および
歪みが大きくなり、上述のシナージ効果が弱くなること
から、上述のようなピーク高さ比および半価幅比と定め
たものである。The composite hard film-coated member of the present invention makes use of vapor phase epitaxial growth to strengthen the orientation of the (200) crystal plane in the composite hard film containing titanium and aluminum, thereby reducing the strain in the composite hard film. By suppressing as much as possible,
The synergistic effect of enhancing the strength and toughness of the composite hard film itself and having excellent wear resistance is exhibited. When X-ray diffraction is performed from the surface of the composite hard film using a copper target, h (200) ) / H (111) <4.0, if d (200) / d (111)> 1.5 or d (200) / d (111) <0.8,
(200) Since the orientation to the crystal plane is weak, defects and strain in the film increase, and the synergistic effect described above is weakened, the peak height ratio and the half width width ratio are determined as described above. is there.
【００１２】[0012]
【発明の実施の形態】本発明の複合硬質膜被覆部材にお
ける基材は、被覆層を被覆するときに加熱する温度に耐
えることができる材料または物質ならば使用することが
可能であり、具体的には、例えばステンレス鋼，耐熱合
金，高速度鋼，ダイス鋼，Ｔｉ合金，Ａｌ合金に代表さ
れる金属部材、超硬合金，サ−メット，粉末ハイスに代
表される焼結合金、Ａｌ2Ｏ3系焼結体，Ｓｉ3Ｎ4系焼結
体,サイアロン系焼結体，ＺｒＯ2系焼結体，炭化珪素系
焼結体に代表されるセラミックス焼結体、立方晶窒化硼
素系焼結体，ダイヤモンド系焼結体に代表される超高温
高圧焼結体を挙げることができる。これらのうち、従来
から切削用工具または耐摩耗用工具として用いられてい
る材料または物質を基材とする場合には、被覆切削用工
具または被覆耐摩耗用工具としての寿命向上の効果が高
くなることから、好ましいことである。BEST MODE FOR CARRYING OUT THE INVENTION The substrate in the composite hard film-coated member of the present invention can be any material or substance that can withstand the heating temperature when coating the coating layer. Examples include metal members represented by stainless steel, heat-resistant alloys, high-speed steels, die steels, Ti alloys, Al alloys, cemented carbides, cermets, sintered alloys represented by powdered high-speed steel, Al 2 O Ceramic sintered body represented by 3 series sintered body, Si 3 N 4 based sintered body, Sialon based sintered body, ZrO 2 based sintered body, silicon carbide based sintered body, cubic boron nitride based sintering And high-temperature and high-pressure sintered bodies typified by sintered bodies and diamond-based sintered bodies. Among these, when a material or substance conventionally used as a cutting tool or a wear-resistant tool is used as a base material, the effect of improving the life as a coated cutting tool or a coated wear-resistant tool is enhanced. This is preferable.
【００１３】これらの基材のうち、超硬合金を基材とす
る場合には、主成分がＣｏおよび／またはＮｉでなる結
合相を３〜１５重量％と、残部の炭化タングステンまた
は炭化タングステンと周期律表の４ａ，５ａ，６ａ族金
属の炭化物，炭窒化物およびこれらの相互固溶体から選
ばれた少なくとも１種の硬質相とを含有する超硬合金に
すると、基材の強度，靱性および耐摩耗性などの特性と
複合硬質膜の特性とを最適に発揮させることが可能とな
り、切削工具としての寿命向上効果が顕著となることか
ら、特に好ましいことである。このときの超硬合金を構
成している結合相および硬質相は、従来の超硬合金に含
有されている結合相および硬質相の組成成分からなるも
のを実用できる。When a cemented carbide is used as the base material, the binder phase is mainly composed of Co and / or Ni in an amount of 3 to 15% by weight, and the balance of tungsten carbide or tungsten carbide. When a cemented carbide containing at least one hard phase selected from carbides, carbonitrides and mutual solid solutions of metals belonging to groups 4a, 5a and 6a of the periodic table is used, the strength, toughness and resistance of the base material This is particularly preferable because the properties such as abrasion and the properties of the composite hard film can be optimally exhibited, and the effect of improving the life as a cutting tool becomes remarkable. At this time, as the binder phase and the hard phase constituting the cemented carbide, those composed of the constituent components of the binder phase and the hard phase contained in the conventional cemented carbide can be used.
【００１４】また、セラミックス焼結体を基材にする場
合には、窒化珪素および／またはサイアロンを８０〜９
８重量％と、残部の焼結助剤からなる窒化珪素系焼結体
を基材とすると、基材の強度，靱性，耐摩耗性，熱伝導
性などの機械的特性および物理的特性と複合硬質膜の機
械的特性および物理的特性から、基材と複合硬質膜との
整合性を最適に発揮させることが可能となり、切削工具
としての寿命向上効果が顕著となり、特に好ましいこと
である。このときの窒化珪素系焼結体を構成している窒
化珪素がα窒化珪素および／またはβ窒化珪素でなる場
合、サイアロンがαサイアロンおよび／またはβサイア
ロンでなる場合でもよく、焼結助剤が従来から窒化珪素
系焼結体やサイアロン系焼結体に含有されている物質を
用いることができるものであり、具体的な焼結助剤とし
ては、例えばＹ，Ｌａ，Ｃｅ，Ｄｙ，などの希土類元素
の酸化物、酸化マグネシウム，酸化ハフニウム，酸化ジ
ルコニウム，酸化アルミニウム，窒化アルミニウム，酸
化珪素およびこれらの相互固溶体から選ばれた少なくと
も１種の焼結助剤を挙げることができる。When a ceramic sintered body is used as a base material, silicon nitride and / or sialon may be used in an amount of 80 to 9%.
When the base material is a silicon nitride-based sintered body comprising 8% by weight and the balance of a sintering aid, the mechanical properties and physical properties such as strength, toughness, wear resistance, and thermal conductivity of the base material are combined. From the mechanical and physical properties of the hard film, it is possible to optimally exhibit the consistency between the substrate and the composite hard film, and the effect of improving the life as a cutting tool becomes remarkable, which is particularly preferable. In this case, when the silicon nitride constituting the silicon nitride-based sintered body is made of α silicon nitride and / or β silicon nitride, the sialon may be made of α sialon and / or β sialon, and the sintering aid may be used. Conventionally, a substance contained in a silicon nitride-based sintered body or a sialon-based sintered body can be used. Specific sintering aids include, for example, Y, La, Ce, Dy, and the like. Examples include at least one sintering aid selected from oxides of rare earth elements, magnesium oxide, hafnium oxide, zirconium oxide, aluminum oxide, aluminum nitride, silicon oxide, and mutual solid solutions thereof.
【００１５】さらに、ダイヤモンド系焼結体，立方晶窒
化硼素系焼結体に代表される超高温高圧焼結体を基材に
する場合には、７０体積％以上のダイヤモンドと残部の
粒界相とからなるダイヤモンド系焼結体、ならびに２０
体積％以上の立方晶窒化硼素と粒界結合相とからなる立
方晶窒化硼素系焼結体でなる場合が好ましいことであ
る。これらのうち、ダイヤモンド系焼結体は、ダイヤモ
ンド（以下、「ＤＩＡ」と記す）が８５〜９８体積％と
残部の粒界相が従来のダイヤモンド系焼結体に含有され
ている金属、合金、具体的には、Ｃｏ，Ｎｉ，Ｆｅ，Ｓ
ｉおよびこれらの相互固溶体の中の少なくとも１種を含
む場合には、基材と複合硬質膜との両特性を最適に発揮
させることができ、切削工具としての寿命向上が顕著に
なることから好ましいことである。立方晶窒化硼素系焼
結体は、立方晶窒化硼素が３５〜９５体積％と残部の粒
界結合相が周期律表の４ａ，５ａ，６ａ族元素の炭化
物、窒化物、硼化物、Ｓｉ，Ｍｇ，Ａｌの窒化物、硼化
物、酸化物およびこれらの相互固溶体、Ｃｏ，Ｎｉ，Ｔ
ｉ，Ａｌの金属、合金、金属間化合物の中から選ばれた
少なくとも１種からなる場合には、基材と複合硬質膜と
の両特性を最適に発揮させることができ、切削工具とし
ての寿命向上が顕著になることから好ましいことであ
る。Further, when an ultra-high-temperature and high-pressure sintered body represented by a diamond-based sintered body and a cubic boron nitride-based sintered body is used as a base material, 70% by volume or more of diamond and the remaining grain boundary phase are used. And a diamond-based sintered body comprising:
It is preferable to use a cubic boron nitride-based sintered body composed of cubic boron nitride of at least volume% and a grain boundary binder phase. Among these, diamond-based sintered bodies include metals (metals, alloys, etc.) in which diamond (hereinafter referred to as “DIA”) has a volume of 85 to 98% by volume and the rest of the grain boundary phase is contained in conventional diamond-based sintered bodies. Specifically, Co, Ni, Fe, S
When i and at least one of these mutual solid solutions are contained, both properties of the substrate and the composite hard film can be optimally exhibited, and the life of the cutting tool is significantly improved, which is preferable. That is. In the cubic boron nitride-based sintered body, cubic boron nitride is 35 to 95% by volume, and the rest of the grain boundary bonding phases are carbides, nitrides, borides, Si, and the like of elements of Groups 4a, 5a, and 6a in the periodic table. Mg, Al nitrides, borides, oxides and their mutual solid solutions, Co, Ni, T
When it is composed of at least one selected from the metals, alloys and intermetallic compounds of i and Al, both properties of the base material and the composite hard film can be optimally exhibited, and the life as a cutting tool This is preferable because the improvement becomes remarkable.
【００１６】これらの基材に共通した問題として、基材
の表面精度があり、基材の表面精度を高くすると、複合
硬質膜の表面精度も高くなり、例えば、切削工具として
使用した場合に摩擦抵抗が低くなって複合硬質膜表面お
よび被削材表面の荒れが抑制されて、寿命向上効果が高
くなることから好ましいことである。基材の表面精度
は、ＪＩＳ規格Ｂ０６０１に規定されている表面粗さに
おける中心線平均粗さであるＲａで０．１μｍ以下が好
ましく、より好ましいのはＲａが０．０５μｍ以下から
なるものである。As a problem common to these substrates, there is a surface accuracy of the substrate. When the surface accuracy of the substrate is increased, the surface accuracy of the composite hard film is also increased. This is preferable because the resistance is reduced, the roughness of the surface of the composite hard film and the surface of the work material are suppressed, and the effect of improving the life is enhanced. The surface accuracy of the substrate is preferably 0.1 μm or less in Ra, which is the center line average roughness in the surface roughness specified in JIS B0601, and more preferably Ra is 0.05 μm or less. .
【００１７】これらの基材表面に被覆される複合硬質膜
を含む被覆層の構成は、基材に隣接して密着性を目的に
被覆される下地層、この下地層に隣接して被覆される本
発明における複合硬質膜でなる中間層、この中間層に隣
接して被覆される外層、この外層の表面に使用前後の判
別および装飾目的で被覆される最外層などを２層以上に
積層する構成、具体的には、例えば基材の表面に順次被
覆される被覆層が基材ー下地層ー複合硬質膜（中間層）
ー外層ー最外層からなる積層の構成、基材ー下地層ー複
合硬質膜（中間層）ー外層からなる積層の構成、基材ー
下地層ー複合硬質膜（中間層）の積層からなる構成、基
材ー下地層ー複合硬質膜（中間層）ー最外層からなる積
層の構成、基材ー複合硬質膜（中間層）ー外層ー最外層
からなる積層の構成、基材ー複合硬質膜（中間層）ー外
層からなる積層の構成、基材ー複合硬質膜（中間層）ー
最外層の積層からなる構成、または基材ー複合硬質膜
（中間層）の構成、を挙げることができる。これらのう
ち、基材表面に直接に複合硬質膜を被覆する構成の場合
には、製造時における工程の煩雑さがないこと、工程時
間の短縮となること、品質管理上のバラツキが少なくな
ることから、好ましいことである。The structure of the coating layer including the composite hard film coated on the surface of the base material is such that the base layer is coated adjacent to the base material for the purpose of adhesion, and the base layer is coated adjacent to the base layer. An intermediate layer comprising a composite hard film according to the present invention, an outer layer coated adjacent to the intermediate layer, and an outermost layer coated on the surface of the outer layer for the purpose of discriminating before and after use and decoration purposes, etc., in two or more layers. Specifically, for example, a coating layer sequentially coated on the surface of the substrate is composed of a substrate, an underlayer, and a composite hard film (intermediate layer).
-Layer configuration consisting of outer layer-outermost layer, substrate-underlayer-composite hard film (intermediate layer) -Layer configuration consisting of outer layer, configuration consisting of substrate-underlayer-composite hard film (intermediate layer) , Base-substrate-composite hard film (intermediate layer) -outermost layer laminate structure, substrate-composite hard film (intermediate layer) -outer layer-outermost layer laminate structure, substrate-composite hard film (Intermediate layer) -Layer composed of outer layer, substrate-composite hard film (intermediate layer) -Layer composed of outermost layer, or substrate-composite hard film (intermediate layer). . Among these, in the case of a configuration in which the composite hard film is directly coated on the base material surface, there is no complexity in the manufacturing process, the process time is reduced, and the variation in quality control is reduced. This is preferable.
【００１８】これらの被覆層のうち、下地層は、金属、
合金，金属間化合物または金属化合物でなり、具体的に
は、例えばＴｉ，Ａｌ，Ｎｉ，Ｃｏ，Ｗの金属，これら
の相互合金，Ｔｉ−Ａｌ，Ｔｉ−Ｎｉ，Ｔｉ−Ｃｏ，Ａ
ｌ−Ｎｉ，Ａｌ−Ｃｏ，Ｃｏ−Ｗ，Ｔｉ−Ａｌ−Ｎｉ，
Ｔｉ−Ａｌ−Ｃｏの金属間化合物，周期律表の４ａ，５
ａ，６ａ族金属の炭化物、窒化物、炭酸化物、窒酸化
物，これらの相互固溶体の金属化合物から選ばれた少な
くとも１種の単層または多層でなる場合を挙げることが
できる。また、外層は、具体的には、例えば周期律表の
４ａ，５ａ，６ａ族金属の炭化物、窒化物、炭酸化物、
窒酸化物，これらの相互固溶体，Ａｌの酸化物，窒化
物，酸窒化物，ダイヤモンド，硬質カーボン（ダイヤモ
ンド状カーボンともいわれる），立方晶窒化硼素，硬質
窒化硼素,これらの２種以上の混合物の中から選ばれた
少なくとも１種の単層または多層でなる場合を挙げるこ
とができる。さらに、最外層は、使用前後の判別が容易
な色彩を有する被覆層、装飾的効果のある被覆層であれ
ばよく、具体的には、例えば４ａ，５ａ，６ａ族金属の
窒化物、炭窒化物、窒酸化物，これらの相互固溶体の中
から選ばれた少なくとも１種の単層または多層でなる場
合を挙げることができる。[0018] Of these coating layers, the underlayer is made of metal,
An alloy, an intermetallic compound, or a metal compound, specifically, for example, metals of Ti, Al, Ni, Co, W, their alloys, Ti-Al, Ti-Ni, Ti-Co, A
l-Ni, Al-Co, Co-W, Ti-Al-Ni,
Ti-Al-Co intermetallic compound, 4a, 5 in the periodic table
Examples include a single layer or a multilayer of at least one selected from the group consisting of carbides, nitrides, carbonates, and nitrides of metals of Group a and 6a, and metal compounds of these mutual solid solutions. The outer layer is specifically made of, for example, carbides, nitrides, carbonates of metals belonging to groups 4a, 5a and 6a of the periodic table.
Nitric oxides, their mutual solid solutions, oxides of Al, nitrides, oxynitrides, diamond, hard carbon (also called diamond-like carbon), cubic boron nitride, hard boron nitride, and mixtures of two or more of these At least one kind selected from among them may be a single layer or a multilayer. Further, the outermost layer may be a coating layer having a color that can be easily discriminated before and after use, or a coating layer having a decorative effect. Specifically, for example, a nitride of a 4a, 5a, or 6a group metal, a carbonitride And at least one single layer or multiple layers selected from the group consisting of a substance, a nitric oxide, and a mutual solid solution thereof.
【００１９】本発明の骨子となる複合硬質膜は、被覆層
自体が複合硬質膜でなる場合、別の表現をすると、基材
表面に複合硬質膜のみが被覆された構成でなる場合、基
材表面に上述の下地層と複合硬質膜とが被覆されている
構成の場合、または前述の被覆層の構成のように中間層
として被覆されている構成の場合がある。この複合硬質
膜の組成成分、膜質は、具体的な例示として化学式によ
り記載すると、（Ｔｉ，Ａｌ）Ｎ、（Ｔｉ，Ａｌ）Ｃ、
（Ｔｉ，Ａｌ）（Ｃ，Ｎ）、（Ｔｉ，Ａｌ）（Ｎ，
Ｏ）、（Ｔｉ，Ａｌ）（Ｃ，Ｏ）、（Ｔｉ，Ａｌ）
（Ｃ，Ｎ，Ｏ）、（Ｔｉ，Ａｌ，Ｍ）Ｎ、（Ｔｉ，Ａ
ｌ，Ｍ）Ｃ、（Ｔｉ，Ａｌ，Ｍ）（Ｃ，Ｎ）、（Ｔｉ，
Ａｌ，Ｍ）（Ｎ，Ｏ）、（Ｔｉ，Ａｌ，Ｍ）（Ｃ，
Ｏ）、および（Ｔｉ，Ａｌ，Ｍ）（Ｃ，Ｎ，Ｏ）の中か
ら選ばれた少なくとも１種の単層または積層でなる場合
を挙げることができる。（ただし、Ｍは、Ｔｉ，Ａｌを
除いた金属および半金属の元素の１種以上を表わし、特
に周期律表の４ａ，５ａ，６ａ族元素、希土類元素、Ｍ
ｎ元素、Ｍｇ元素、Ｓｉ元素、Ｂ元素の中の少なくとも
１種からなる場合が好ましい）The composite hard film that forms the essence of the present invention is, when the coating layer itself is a composite hard film, in other words, when the base material surface has a configuration in which only the composite hard film is coated, There is a case where the surface is coated with the above-described underlayer and the composite hard film, or a case where the surface is coated as an intermediate layer like the structure of the above-mentioned coating layer. The composition components and film quality of this composite hard film can be described by chemical formulas as specific examples, as (Ti, Al) N, (Ti, Al) C,
(Ti, Al) (C, N), (Ti, Al) (N,
O), (Ti, Al) (C, O), (Ti, Al)
(C, N, O), (Ti, Al, M) N, (Ti, A
l, M) C, (Ti, Al, M) (C, N), (Ti,
Al, M) (N, O), (Ti, Al, M) (C,
O) and (Ti, Al, M) (C, N, O). (However, M represents one or more elements of metals and metalloids excluding Ti and Al, and in particular, elements of groups 4a, 5a and 6a of the periodic table, rare earth elements, M
(Preferably, it is composed of at least one of n element, Mg element, Si element and B element.)
【００２０】これらの複合硬質膜は、金属元素がＴｉと
Ａｌのみを含有している場合には、次の化学式で表せる
（Ｔｉa，Ａｌb）（Ｃx，Ｎy，Ｏz）wの複合硬質膜［た
だし、ａは金属元素中のＴｉ（チタン）元素の原子比、
ｂは金属元素中のＡｌ（アルミニウム）元素の原子比、
ｘは非金属元素中の炭素（Ｃ）元素の原子比、ｙは非金
属元素中の窒素（Ｎ）元素の原子比、ｚは非金属元素中
の酸素（Ｏ）元素の原子比、ｗは金属元素の合計に対す
る非金属元素の原子比を表し、それぞれがａ＋ｂ＝１、
０．８≧ａ≧０．４、ｘ＋ｙ＋ｚ＝１、０．５≧ｘ≧
０、１≧ｙ≧０．５、０．５≧ｚ≧０、１．０５≧ｗ≧
０．７の関係にある］でなる場合には、複合硬質膜自体
の強度、耐摩耗性および靱性にすぐれること、しかも歪
み，欠陥が少なく耐剥離性にすぐれることから好ましい
ことである。[0020] These composite hard film, when the metal element is contained only Ti and Al can be expressed by the following formula (Ti a, Al b) ( C x, N y, O z) of w Composite hard film [where a is the atomic ratio of Ti (titanium) element in the metal element,
b is the atomic ratio of Al (aluminum) element in the metal element,
x is the atomic ratio of the carbon (C) element in the nonmetallic element, y is the atomic ratio of the nitrogen (N) element in the nonmetallic element, z is the atomic ratio of the oxygen (O) element in the nonmetallic element, and w is Represents the atomic ratio of non-metallic elements to the total of metallic elements, where a + b = 1,
0.8 ≧ a ≧ 0.4, x + y + z = 1, 0.5 ≧ x ≧
0, 1 ≧ y ≧ 0.5, 0.5 ≧ z ≧ 0, 1.05 ≧ w ≧
0.7) is preferable because the composite hard film itself has excellent strength, wear resistance and toughness, and has few distortions and defects and excellent peel resistance.
【００２１】また、ＴｉとＡｌ以外の金属元素を含有し
た複合硬質膜でなる場合には、次の化学式で表せる（Ｔ
ｉa，Ａｌb，Ｍ1-a-b）（Ｃx，Ｎy，Ｏz）wの複合硬質
膜［ただし、ａは金属元素中のＴｉ（チタン）元素の原
子比、ｂは金属元素中のＡｌ（アルミニウム）元素の原
子比、Ｍは周期律表の４ａ，５ａ，６ａ族元素、希土類
元素、Ｓｉ元素、Ｍｎ元素、Ｍｇ元素、Ｂ元素の中の少
なくとも１種を表し、ｘは非金属元素中の炭素（Ｃ）元
素の原子比、ｙは非金属元素中の窒素（Ｎ）元素の原子
比、ｚは非金属元素中の酸素（Ｏ）元素の原子比、ｗは
金属元素の合計に対する非金属元素の原子比を表し、そ
れぞれが０．８≧ａ≧０．４、０．６＞ｂ＞０．２、ｘ
＋ｙ＋ｚ＝１、０．５≧ｘ≧０、１≧ｙ≧０．５、０．
５≧ｚ≧０、１．０５≧ｗ≧０．７の関係にある］でな
る場合には、複合硬質膜自体の強度、耐摩耗性および靱
性にすぐれること、しかも歪み，欠陥が少なく耐剥離性
にすぐれることから好ましいことである。In the case of a composite hard film containing a metal element other than Ti and Al, it can be represented by the following chemical formula (T
i a, Al b, M 1 -ab) (C x, N y, O z) w composite hard film of [where, a is the atomic ratio of Ti (titanium) element in the metal element, b is in the metal element The atomic ratio of Al (aluminum) element, M represents at least one of elements of groups 4a, 5a, 6a, rare earth element, Si element, Mn element, Mg element and B element of the periodic table, and x represents nonmetal The atomic ratio of the carbon (C) element in the elements, y is the atomic ratio of the nitrogen (N) element in the nonmetal element, z is the atomic ratio of the oxygen (O) element in the nonmetal element, and w is the total of the metal elements. Represent the atomic ratio of the non-metallic element to 0.8, a ≧ 0.4, 0.6>b> 0.2, x
+ Y + z = 1, 0.5 ≧ x ≧ 0, 1 ≧ y ≧ 0.5, 0.
5 ≧ z ≧ 0, 1.05 ≧ w ≧ 0.7], the composite hard film itself has excellent strength, abrasion resistance and toughness, and has little distortion and defect resistance. This is preferable because of excellent releasability.
【００２２】これらの複合硬質膜は、複合硬質膜の結晶
粒子の界面に金属元素からなる複合硬質膜強化物質が極
微量に含有されていると、より一層複合硬質膜自体の強
度、靱性がすぐれること、歪みが緩和されること、耐剥
離性の向上が顕著になることから好ましいことである。
このときの複合硬質膜強化物質は、基材を構成している
金属元素からなる場合には、基材と複合硬質膜との整合
性を高めること、密着性を高めることから好ましいこと
である。この複合硬質膜強化物質は、被覆層を被覆する
前に、メッキ法や真空蒸着法などにより形成しておい
て、これを拡散させることも可能であるが、基材を構成
している金属元素を複合硬質膜中に拡散させると簡易に
得られることから、好ましいことである。In the case of these composite hard films, the strength and toughness of the composite hard film itself are further improved when a very small amount of a composite hard film reinforcing material comprising a metal element is contained at the interface between the crystal grains of the composite hard film. It is preferable because the strain is reduced, and the improvement in the peeling resistance becomes remarkable.
When the composite hard film reinforcing material at this time is made of a metal element constituting the base material, it is preferable because it enhances the consistency between the base material and the composite hard film and increases the adhesion. Before coating the coating layer, the composite hard film reinforcing material may be formed by a plating method or a vacuum evaporation method, and it is possible to diffuse the material. Is preferable because it can be easily obtained by diffusing the compound into the composite hard film.
【００２３】これらの複合硬質膜は、複合硬質膜中のＴ
ｉとＡｌとの金属元素の合計含有量に対するＡｌ元素の
含有量が基材表面から複合硬質膜の表面に向かって増加
していること、別の表現をすると、Ｔｉ元素の含有量が
複合硬質膜の表面から基材表面に向かって増加している
こと、いわゆる傾斜組成の複合硬質膜にすると基材と複
合硬質膜との密着性がすぐれること、複合硬質膜自体の
強度，靱性にすぐれて、欠陥，歪みおよび残留応力が減
少すること、複合硬質膜表面の耐酸化性，耐摩耗性およ
び耐腐食性がすぐれることから、好ましいことである。
このときのＡｌ元素およびＴｉ元素の増加は、階段状，
ノコギリの刃状にミクロ的には増減があるとしてもマク
ロ的には段階的に増加する場合、放物線状，直線状に連
続的に増加している場合でもよいものである。These composite hard films are made of T in the composite hard film.
That the content of the Al element with respect to the total content of the metal elements of i and Al increases from the substrate surface toward the surface of the composite hard film. In other words, the content of the Ti element is It increases from the surface of the film toward the substrate surface. When a composite hard film having a so-called gradient composition is used, the adhesion between the substrate and the composite hard film is excellent, and the strength and toughness of the composite hard film itself are excellent. This is preferable because defects, strain and residual stress are reduced, and the oxidation resistance, abrasion resistance and corrosion resistance of the surface of the composite hard film are excellent.
At this time, the increase of the Al element and the Ti element is stepwise,
Even if the sawtooth blade has a microscopic increase or decrease, it may increase stepwise macroscopically, or may have a parabolic or linear continuous increase.
【００２４】この複合硬質膜は、複合硬質膜自体の構造
からすると、基材表面に対し垂直方向に柱状に成長した
柱状結晶が含まれている場合には、複合硬質膜の表面か
らの耐圧壊強度が向上し、耐剥離性、耐微小チッピング
性にすぐれることから、好ましいことである。この柱状
結晶を含む複合硬質膜は、具体的には、複合硬質膜全体
が柱状結晶の層でなる場合、粒状結晶と柱状結晶との混
在した層でなる場合、粒状結晶の層と柱状結晶の層との
積層でなる場合、またはこれらの粒状結晶と柱状結晶の
それぞれの中に前述した複合硬質膜強化物質が微量含有
されている場合を例示することができる。これらのう
ち、複合硬質膜強化物質が複合硬質膜と複合硬質膜強化
物質との合計に対し、３体積％以下、好ましくは１体積
％以下含有していると、複合硬質膜の表面からの垂直方
向および水平方向の両方からの耐圧壊強度，耐圧縮強度
にすぐれるとともに、耐摩耗性にもすぐれるというシナ
ージ効果を発揮することができることから、好ましいこ
とである。In view of the structure of the composite hard film itself, when the composite hard film contains columnar crystals grown in a columnar direction in a direction perpendicular to the surface of the base material, the composite hard film cannot withstand pressure from the surface of the composite hard film. This is preferable because the strength is improved and the peeling resistance and the micro chipping resistance are excellent. Specifically, the composite hard film containing the columnar crystals includes, when the entire composite hard film is formed of a columnar crystal layer, a mixed layer of granular crystals and columnar crystals, and a granular crystal layer and a columnar crystal. Examples thereof include a case in which the composite hard film reinforcing substance is contained in each of the granular crystals and the columnar crystals in a small amount. Of these, when the composite hard film reinforcing material contains 3% by volume or less, preferably 1% by volume or less of the total of the composite hard film and the composite hard film reinforcing material, the perpendicularity from the surface of the composite hard film is This is preferable because it can exhibit a synergistic effect of being excellent in pressure-resistant crushing strength and compressive strength from both directions and horizontal direction and also excellent in wear resistance.
【００２５】これらの複合硬質膜は、前述した被覆層の
構成のどの位置に存在するかにより複合硬質膜自体の構
造を配慮することが好ましく、この被覆層の構成とし
て、基材に直接複合硬質膜を被覆する場合、または基材
に下地層を被覆した後、下地層に複合硬質膜を被覆し、
複合硬質膜の表面が他の物質（例えば、切削工具におけ
る被削材）と接触する状態で使用される第１の構成によ
る複合硬質膜部材と、複合硬質膜の表面に外層を被覆し
た場合、または複合硬質膜の表面に外層および最外層を
被覆し、複合硬質膜の表面が他の物質と直接接触しない
状態で使用される第２の構成による複合硬質膜部材とに
大別することができる。In these composite hard films, it is preferable to consider the structure of the composite hard film itself depending on where it is located in the above-described configuration of the coating layer. When coating the film, or after coating the base layer on the base material, coat the composite hard film on the base layer,
When the composite hard film member according to the first configuration is used in a state where the surface of the composite hard film is in contact with another substance (for example, a work material in a cutting tool), and the outer surface is coated on the surface of the composite hard film, Alternatively, the composite hard film can be roughly classified into a composite hard film member according to the second configuration in which the outer surface and the outermost layer are coated on the surface of the composite hard film and the surface of the composite hard film is used in a state where the surface of the composite hard film is not in direct contact with other substances. .
【００２６】これらのうち、第１の構成による複合硬質
膜部材の場合には、複合硬質膜の表面は、ＪＩＳ規格Ｂ
０６０１に規定されている表面粗さにおける中心線平均
粗さＲａで０．１μｍ以下、好ましくは０．０５μｍ以
下にすると、切削工具として使用した場合に、被削材へ
の損傷が緩和されること、切削抵抗が緩和されること、
切粉の排出が容易になることから、より一層の長寿命と
なり、好ましいことである。また、第２の構成による複
合硬質膜部材においても、外層の膜厚さ、または外層と
最外層との合計膜厚さにより異なるが、複合硬質膜の表
面粗さを上述のようにしておくと、外層および最外層の
表面粗さも滑らかで、平坦となり、上述と同様の効果を
発揮できることから、好ましいことである。Of these, in the case of the composite hard film member according to the first configuration, the surface of the composite hard film is JIS B
When the center line average roughness Ra in the surface roughness specified in 0601 is 0.1 μm or less, preferably 0.05 μm or less, damage to the work material is reduced when used as a cutting tool. , The cutting resistance is reduced,
Since the discharge of the swarf becomes easy, the life is further extended, which is preferable. Also, in the composite hard film member according to the second configuration, although it depends on the thickness of the outer layer or the total thickness of the outer layer and the outermost layer, the surface roughness of the composite hard film is set as described above. The surface roughness of the outer layer and the outermost layer is smooth and flat, and the same effect as described above can be exerted.
【００２７】被覆層を構成する各層の膜厚さは、用途、
形状および被覆層の構成により、選択されるのである
が、上述の第１の構成による複合硬質膜部材の場合に
は、被覆層の主体が複合硬質膜となり、この場合には複
合硬質膜の膜厚さを１〜２０μｍ、主として密着性を目
的として下地層を介在させる場合には、下地層の膜厚さ
を０．２〜２μｍとすると、被覆層自体の強度、耐摩耗
性、靱性および耐剥離性から、好ましいことである。ま
た、上述の第２の構成による複合硬質膜部材でなる場合
には、下地層の膜厚さを０．２〜２μｍ、複合硬質膜の
膜厚さを１〜１０μｍ、外層の膜厚さを１〜１０μｍ、
最外層の膜厚さを０．５〜２μｍとすると、各膜層の特
性を最適に発揮させることができることから、好ましい
ことである。以上に詳述してきた複合硬質膜を初め、下
地層，外層，および最外層は、化学量論組成でなる場
合、または非化学量論組成でなる場合でもよく、実質的
には非化学量論組成からなっている場合が多いものであ
る。The thickness of each layer constituting the coating layer depends on the application,
It is selected depending on the shape and the configuration of the coating layer. In the case of the composite hard film member according to the first configuration, the main component of the coating layer is a composite hard film. In the case where the thickness is 1 to 20 μm and the underlayer is interposed mainly for the purpose of adhesion, if the thickness of the underlayer is 0.2 to 2 μm, the strength, abrasion resistance, toughness and resistance of the coating layer itself are improved. This is preferable from the viewpoint of peelability. In the case of the composite hard film member according to the above-described second configuration, the thickness of the underlayer is 0.2 to 2 μm, the thickness of the composite hard film is 1 to 10 μm, and the thickness of the outer layer is 1 to 10 μm,
It is preferable that the thickness of the outermost layer be 0.5 to 2 μm, since the characteristics of each film layer can be optimally exhibited. The underlayer, outer layer, and outermost layer, including the composite hard film described in detail above, may have a stoichiometric composition or a non-stoichiometric composition. Often composed of a composition.
【００２８】以上のような形態でなる本発明の複合硬質
膜部材は、各種の用途に実用できるものであり、具体的
には、例えば旋削工具，フライス工具，ドリル，エンド
ミルに代表される切削工具、特に被削材が鋳物や鋼であ
り、耐衝撃性を必要とする断続切削工具や回転切削工具
として、ダイス，パンチなどの型工具からスリッタ−な
どの切断刃，裁断刃などの耐摩耗用工具として、ノズル
や塗付工具などの耐腐食耐摩耗用工具として、鉱山，道
路，土建などに用いられる切断工具，掘削工具，窄孔工
具，破砕工具に代表される土木建設用工具として実用で
きるものである。これらのうち、本発明の複合硬質膜部
材は、ミクロ的に温度，摩擦、熱衝撃および圧縮衝撃な
どが最も過酷な条件となる切削工具、特にドリル，エン
ドミルなどの回転切削工具，スローアウエイチップなど
の切削工具として使用する場合には、複合硬質膜の特性
を最適に発揮させ得ることから、好ましいことである。
この複合硬質膜部材を切削工具として使用する場合に
は、複合硬質膜の膜厚さは、切削工具の切刃に形成され
る稜線部に向かって減少するように形成すると、耐剥離
性、微小チッピング性にすぐれることから好ましいこと
である。また、これらの複合硬質膜を含む被覆層の膜厚
さが切削工具の切刃に形成される稜線部に向かって減少
するように形成されることも、同様の効果を惹起させる
ことになり、好ましいことである。The composite hard film member of the present invention having the above-mentioned form can be put to practical use in various applications, and specifically, for example, a cutting tool represented by a turning tool, a milling tool, a drill, and an end mill. Especially, the work material is cast or steel, and it is used for intermittent cutting tools and rotary cutting tools requiring impact resistance, such as cutting tools such as dies and punches, cutting blades such as slitters, cutting blades, etc. As a tool, it can be used as a tool for corrosion and abrasion resistance such as a nozzle and a coating tool, and as a tool for civil engineering construction represented by cutting tools, drilling tools, burrowing tools, crushing tools used in mines, roads, civil engineering, etc. Things. Among these, the composite hard film member of the present invention is used for cutting tools which are subjected to the most severe conditions such as temperature, friction, thermal shock, and compression impact on a microscopic scale, especially rotary cutting tools such as drills and end mills, and throwaway tips. When used as a cutting tool, it is preferable because the characteristics of the composite hard film can be optimally exhibited.
When this composite hard film member is used as a cutting tool, if the thickness of the composite hard film is formed so as to decrease toward the ridge line formed on the cutting edge of the cutting tool, peeling resistance and fine This is preferable because of its excellent chipping property. In addition, the same effect can also be caused when the thickness of the coating layer including the composite hard film is formed so as to decrease toward the ridge portion formed on the cutting edge of the cutting tool, It is a good thing.
【００２９】この本発明の複合硬質膜被覆部材は、従来
から市販されているステンレス鋼，耐熱合金，高速度
鋼，ダイス鋼，Ｔｉ合金，Ａｌ合金に代表される金属部
材、超硬合金，サ−メット，粉末ハイスに代表される焼
結合金、Ａｌ2Ｏ3系焼結体，Ｓｉ3Ｎ4系焼結体，サイア
ロン系焼結体，ＺｒＯ2系焼結体，炭化珪素系焼結体に
代表されるセラミックス焼結体、立方晶窒化硼素系焼結
体，ダイヤモンド系焼結体に代表される超高温高圧焼結
体を基材とし、この基材の表面を、必要に応じて研磨
し、超音波洗浄、有機溶剤洗浄などを行った後に、従来
から行われているＰＶＤ法，ＣＶＤ法またはプラズマＣ
ＶＤ法により基材上に被覆層を被覆して作製することが
できるが、以下の方法で作製すると、プラズマ密度の向
上とイオン化効率の向上が可能となること、複合硬質膜
自体の気相エピタキシャル結晶成長および結晶配向が容
易となること、複合硬質膜の特性および密着性がよりす
ぐれることから、好ましいことである。The composite hard film-coated member of the present invention is made of a metal member represented by stainless steel, heat-resistant alloy, high-speed steel, die steel, Ti alloy, Al alloy, cemented carbide, - Met, sintered alloy typified powdered high-speed, Al 2 O 3 based sintered body, Si 3 N 4 based sintered body, sialon sintered body, ZrO 2 based sintered body, a silicon carbide-based sintered body The base material is an ultra-high-temperature and high-pressure sintered body represented by a ceramic sintered body represented by, a cubic boron nitride-based sintered body and a diamond-based sintered body, and the surface of the substrate is polished as necessary. After performing ultrasonic cleaning, organic solvent cleaning, etc., the conventional PVD method, CVD method or plasma C
It can be produced by coating a coating layer on a base material by the VD method. However, if it is produced by the following method, it is possible to improve the plasma density and the ionization efficiency. This is preferable because crystal growth and crystal orientation are facilitated, and the characteristics and adhesion of the composite hard film are more excellent.
【００３０】この複合硬質膜被覆部材を得るための製造
方法として、重要な特徴について具体的に詳述すると、
基材の表面は、従来から行われているブラスト処理，シ
ョットピーニング処理，研磨処理，バレル処理の中の少
なくとも１種の機械的処理と、酸性もしくはアルカリ性
の電解液による電解エッチング，酸溶液，アルカリ溶液
による表面腐食、または水，有機溶液による洗浄の中の
少なくとも１種の化学的処理と、この機械的処理と化学
的処理を同時または別々に行う処理方法とから選択され
る処理を行うと、基材表面の欠陥を除去できること、複
合硬質膜の密着性を高め得ること、膜内歪みを抑制でき
ること、膜内の欠陥を抑制できることから、好ましいこ
とである。また、基材は、このような機械的処置および
／または化学的処理と、低温による熱処理を付加して、
上述の効果を高めることも好ましいことである。The important features of the manufacturing method for obtaining the composite hard film-coated member are described in detail below.
The surface of the base material is subjected to at least one of conventional mechanical processing such as blast processing, shot peening processing, polishing processing, barrel processing, electrolytic etching with an acidic or alkaline electrolytic solution, acid solution, alkaline When a treatment selected from at least one kind of chemical treatment in solution surface corrosion or cleaning with water or an organic solution, and a treatment method of performing the mechanical treatment and the chemical treatment simultaneously or separately, This is preferable because defects on the surface of the base material can be removed, adhesion of the composite hard film can be increased, distortion in the film can be suppressed, and defects in the film can be suppressed. In addition, the substrate may be subjected to such mechanical and / or chemical treatment and heat treatment at a low temperature,
It is also preferable to enhance the above effects.
【００３１】基材の表面に複合硬質膜を被覆する場合
は、スパッター法やイオンプレーテイング法に代表され
るＰＶＤ法により行うことが好ましく、これらのうち、
マグネトロンスパッター法またはアークプラズマイオン
プレーテイング法により行うと、複合硬質膜の調整が容
易であることから、特に好ましいことである。具体的に
は、例えばイオンプレーテイング装置の反応容器内に基
材を配置し、基材表面をボンバード処理する場合に、金
属元素イオンによるボンバード処理、もしくは金属元素
イオンと非金属元素イオンとの両方によるボンバード処
理を施すと、上述の効果を高めることになることから、
好ましいことである。特に、前述の下地層のうち、金
属，合金または金属間化合物の下地層を必要とする場合
は、金属元素イオンを含むイオンボンバードを施すと、
下地層の形成が容易であること、基材と下地層との密着
性が高くなることから、好ましいことである。When the composite hard film is coated on the surface of the base material, it is preferably performed by a PVD method typified by a sputtering method or an ion plating method.
The use of the magnetron sputtering method or the arc plasma ion plating method is particularly preferable because the adjustment of the composite hard film is easy. Specifically, for example, when a substrate is placed in a reaction vessel of an ion plating apparatus and the surface of the substrate is subjected to bombardment treatment, bombardment treatment with metal element ions or both metal element ions and nonmetal element ions When the bombardment process is performed, the above-mentioned effect is enhanced,
It is a good thing. In particular, among the aforementioned underlayers, when an underlayer of a metal, an alloy or an intermetallic compound is required, ion bombardment containing metal element ions is performed.
This is preferable because the formation of the base layer is easy and the adhesion between the base material and the base layer is increased.
【００３２】複合硬質膜の被覆条件は、反応容器の構
造、プラズマの調整など装置自体の影響を重要視する必
要があり、具体的には、例えば高電圧、（場合によって
はパルス状高電圧と高周波を付加）の電源でイオンを加
速とプラズマ発生させる装置、磁界によるプラズマの調
整可能な装置を使用すること、その他、反応容器内の雰
囲気圧力，温度，アーク放電電流．電圧，基材バイアス
電圧，試料の配置などについて配慮する必要があり、こ
れらのうち、従来の条件に対し、特にアーク放電電圧を
高くすること、基材バイアス電圧を高くすること、試料
の回転および上下動などが重要な要件である。As for the coating conditions of the composite hard film, it is necessary to give importance to the influence of the apparatus itself such as the structure of the reaction vessel and the adjustment of the plasma. Use a device that accelerates ions and generates plasma with a power supply (with high frequency added), a device that can control plasma by means of a magnetic field, and other factors such as atmospheric pressure, temperature, and arc discharge current in the reaction vessel. It is necessary to consider the voltage, the substrate bias voltage, the arrangement of the sample, etc. Among these, in particular, it is necessary to increase the arc discharge voltage, the substrate bias voltage, the rotation of the sample, Vertical movement is an important requirement.
【００３３】[0033]
【実施試験１】以上に詳述してきた本発明の実施形態に
ついて、さらに具体的な代表例として実施試験により説
明する。まず、従来の配合，混合，成形，焼結の各工程
を経て作製された超硬合金の基材とサーメットの基材を
用いて、これらの基材表面に直接複合硬質膜を被覆した
試験について説明する。基材は、配合組成成分で示した
表１により作製されたＩＳＯ規格によるＳＮＧＮ１２０
４０８形状の超硬合金の基材１〜基材５とサーメットの
基材６を用い、これらの基材の上下面と外周面を２７０
＃のダイヤモンド砥石で研削加工を施し、刃先部に４０
０＃ダイヤモンド砥石により−２５°×０．１０ｍｍの
ホーニング加工を施し、さらに表面を湿式ブラスト処
理，洗浄処理および乾燥処理を行った後、アークイオン
プレーテイング装置により複合硬質膜を被覆した。[Embodiment Test 1] The embodiment of the present invention described in detail above will be described as a more specific representative example by an execution test. First, using a cemented carbide substrate and a cermet substrate produced through the conventional compounding, mixing, molding, and sintering processes, a test was conducted in which a composite hard film was directly coated on the surface of these substrates. explain. The substrate is made of SNGN120 according to ISO standards prepared according to Table 1 shown in the composition components.
Using the base material 1 to base material 5 of the 408 shape cemented carbide and the base material 6 of cermet, the upper and lower surfaces and the outer peripheral surface of these base materials are set to 270.
Grind with a diamond wheel #
Honing was performed at -25 ° × 0.10 mm with a 0 # diamond grindstone, and the surface was subjected to wet blasting, washing and drying, and then coated with a composite hard film using an arc ion plating apparatus.
【００３４】処理条件は、反応容器内の各基材表面をボ
ンバード処理した後、複合硬質膜を被覆した。ボンバー
ド処理は、反応容器内の雰囲気：真空，基材温度：８７
３Ｋ，アーク電流：７０Ａ，基材バイアス電圧：ー６０
０Ｖ，Ａｒガスボンバードにより行った。複合硬質膜の
被覆は、反応容器内のガス流量：２００〜３５０ＳＣＣ
Ｍ，蒸発源：Ｔｉ−Ａｌ合金，アーク電圧：２００〜３
００Ｖ，アーク電流：１５０〜２００Ａ，基材温度：７
７３〜８７３Ｋ，基材バイアス電圧：ー１００〜ー２０
０Ｖにより行い、表１に示した基材１〜６のそれぞれの
表面に複合硬質膜を被覆して表２に示した本発明品１〜
６を得た。これらのうち、反応容器内の雰囲気は、本発
明品１がＡｒ−Ｎ2ーＯ2ガス組成、本発明品２がＡｒ−
Ｎ2ーＣＯガス組成、その他本発明品３〜６がＡｒ−Ｎ2
ガス組成で行い、本発明品４の蒸発源には、Ｔｉ元素の
多い合金からＡｌ元素の多い合金に切り替えて行い、本
発明品５の蒸発源には、Ｔｉ元素の多い合金ーＡｌ元素
の多い合金ーＴｉ元素の多い合金に切り替えて行った。The processing conditions were as follows: after bombarding the surface of each substrate in the reaction vessel, the composite hard film was coated. In the bombardment treatment, the atmosphere in the reaction vessel: vacuum, the substrate temperature: 87
3K, arc current: 70A, substrate bias voltage: -60
The test was performed using 0 V, Ar gas bombardment. The coating of the composite hard film is performed at a gas flow rate in the reaction vessel of 200 to 350 SCC.
M, evaporation source: Ti-Al alloy, arc voltage: 200-3
00V, arc current: 150 to 200A, substrate temperature: 7
73-873K, substrate bias voltage: -100 to -20
0 V, coated with a composite hard film on each surface of the substrates 1 to 6 shown in Table 1
6 was obtained. Among these, the atmosphere in the reaction vessel is such that the product 1 of the present invention has an Ar—N 2 —O 2 gas composition and the product 2 of the present invention has an Ar—N 2 —O 2 gas composition.
N 2 -CO gas composition, and other products of the present invention 3 to 6 are Ar-N 2
The gas composition was used, and the evaporation source of the product 4 of the present invention was changed from an alloy containing a large amount of Ti to an alloy containing a large amount of Al. The alloy was switched to an alloy containing a large amount of Ti element.
【００３５】比較として、表１に示した基材３〜６のそ
れぞれの表面に複合硬質膜を被覆して表２に示した比較
品１〜４を得た。基材表面粗さは、上述の本発明品１〜
６に使用の基材表面がＲａ＝０．０１〜０．００５μｍ
に対し、比較品１〜４に使用の基材表面がＲａ＝０．１
〜０．０５μｍであった。比較品１〜４における基材処
理は、上述した本発明品の基材表面処理のうち、湿式ブ
ラスト処理を除いて、その他はほぼ同様に処理した。ま
た、同比較品１〜４における複合硬質膜の被覆は、上述
した本発明品の複合硬質膜の処理条件のうち、アーク電
圧：１０〜５０Ｖ，アーク電流：２００〜２５０Ａ，基
材バイアス電圧：ー３０〜ー８０Ｖとした以外は、ほぼ
同様に処理した。ただし、比較品１〜４の複合硬質膜処
理時の蒸発源は、Ｔｉ−Ａｌ元素比が一定のものを使用
した。For comparison, the surfaces of the substrates 3 to 6 shown in Table 1 were each coated with a composite hard film to obtain Comparative Products 1 to 4 shown in Table 2. The substrate surface roughness is the above-mentioned present invention product 1 to 1
The substrate surface used in No. 6 has Ra = 0.01 to 0.005 μm
On the other hand, the surface of the base material used for Comparative Products 1-4 was Ra = 0.1
０．０５0.05 μm. The substrate treatments of the comparative products 1 to 4 were substantially the same except for the wet blasting treatment among the substrate surface treatments of the above-mentioned inventive products. The coating of the composite hard film in the comparative products 1 to 4 is the same as the processing conditions of the composite hard film of the present invention described above, except that the arc voltage: 10 to 50 V, the arc current: 200 to 250 A, and the substrate bias voltage: Substantially the same treatment was carried out except that -30 to -80 V was applied. However, as the evaporation source at the time of treating the composite hard films of the comparative products 1 to 4, those having a constant Ti-Al element ratio were used.
【００３６】こうして得た本発明品１〜６および比較品
１〜４のそれぞれの複合硬質膜について、Ｘ線回折装
置、走査型電子顕微鏡，金属顕微鏡，ＥＤＳ装置，ビッ
カース硬さ試験機および引っ掻き硬さ試験機に相当する
スクラッチ試験機を用いて、複合硬質膜表面からのＸ線
回折によるｈ（２００）／ｈ（１１１），ｄ（２００）
／ｄ（１１１），複合硬質膜表面のＴｉとＡｌの含有
率，複合硬質膜表面の硬さ，スクラッチ強度を求めて、
それぞれの結果を表２に示した。なお、本発明品１〜６
および比較品１〜４の複合硬質膜厚さは、ほぼ５〜７μ
ｍからなり、本発明品１〜６の複合硬質膜表面の粗さ
は、ほぼＲａ＝０．０１５〜０．０１０μｍであり、比
較品１〜４の複合硬質膜表面の粗さは、ほぼＲａ＝０．
１５〜０．１０μｍであった。また、本発明品１の複合
硬質膜は、非金属元素中の酸素元素が１ａｔ％以下の窒
酸化膜（Ｔｉ，Ａｌ）（Ｎ，Ｏ）であり、本発明品２の
複合硬質膜は、非金属元素中の酸素元素が２ａｔ％以下
の炭窒化膜（Ｔｉ，Ａｌ）（Ｎ，Ｃ）であり、その他の
複合硬質膜は、（Ｔｉ，Ａｌ）Ｎで表示される窒化膜で
あった。The thus obtained composite hard films of the present invention products 1 to 6 and comparative products 1 to 4 were subjected to an X-ray diffraction apparatus, a scanning electron microscope, a metal microscope, an EDS apparatus, a Vickers hardness tester, and a scratch hardness. H (200) / h (111), d (200) by X-ray diffraction from the surface of the composite hard film using a scratch tester corresponding to a hardness tester
/ D (111), the contents of Ti and Al on the surface of the composite hard film, the hardness of the surface of the composite hard film, and the scratch strength were determined.
Table 2 shows the results. In addition, the present invention products 1 to 6
And the composite hard film thickness of the comparative products 1 to 4 is approximately 5 to 7 μm.
m, the surface roughness of the composite hard film of the present invention products 1 to 6 is approximately Ra = 0.015 to 0.010 μm, and the roughness of the composite hard film surface of the comparative products 1 to 4 is approximately Ra = 0.
15 to 0.10 μm. Further, the composite hard film of the product 1 of the present invention is a nitrided oxide film (Ti, Al) (N, O) in which the oxygen element in the nonmetallic element is 1 at% or less. The oxygen element in the nonmetal element was a carbonitride film (Ti, Al) (N, C) with 2 at% or less, and the other composite hard films were nitride films represented by (Ti, Al) N. .
【００３７】次いで、本発明品１〜５および比較品１〜
３を用いて、以下の切削条件により湿式断続切削試験を
行った。切削条件は、被削材：機械構造用炭素鋼材のＳ
４５Ｃに４本の溝入丸棒，切削速度：１５０ｍ／ｍｉ
ｎ，送り：０．３ｍｍ／ｒｅｖ，切り込み：２．０ｍ
ｍ，工具形状：ＳＮＧＮ１２０４０８，水溶性切削油に
より行った。湿式断続切削試験の結果は、切刃のチッピ
ング，被覆層の剥離したとき、平均逃げ面摩耗量または
境界摩耗量が０．３ｍｍに達したときを工具寿命とし、
そのときのそれぞれの切削可能時間を求めて、比較品１
の寿命に対する寿命比として、表２に併記した。Next, products 1 to 5 of the present invention and comparative products 1 to
Using No. 3, a wet intermittent cutting test was performed under the following cutting conditions. The cutting conditions are as follows: Work material: S of carbon steel for machine structure
45C, 4 grooved round bars, cutting speed: 150m / mi
n, feed: 0.3 mm / rev, cut: 2.0 m
m, tool shape: SNGN120408, water-soluble cutting oil. The results of the wet intermittent cutting test are based on the tool life when the chipping of the cutting edge, the coating layer peels off, and the average flank wear or boundary wear reaches 0.3 mm.
Find each possible cutting time at that time, and compare
Table 2 also shows the ratio of the life to the life of the sample.
【００３８】[0038]
【表１】 [Table 1]
【００３９】[0039]
【表２】 [Table 2]
【００４０】[0040]
【実施試験２】実施試験１の表１に示した基材３の超硬
合金を基材とし、アークイオンプレーテイング装置を用
いて、この基材の表面に下地層，複合硬質膜，外層，最
外層の中の２層以上を含む積層の被覆層を被覆した本発
明品７〜１３と比較品５と比較品６を得た。これらのう
ち、本発明品７のＴｉ下地層は、基材表面にＴｉ蒸着を
し、本発明品８の（Ｔｉ−Ａｌ）金属間化合物下地層
は、（Ｔｉ−Ａｌ）蒸発源によるボンバード処理と同時
に蒸着し、本発明品９のＴｉ下地層は、Ｔｉ蒸発源によ
るボンバード処理と同時に蒸着した。本発明品７〜１３
の基材処理および複合硬質膜の成膜は、実施試験１にお
ける本発明品３〜６とほぼ同様に処理し、比較品５およ
び比較品６の基材処理および複合硬質膜の成膜は、実施
試験１における比較品１とほぼ同様に処理した。その他
の下地層，外層および最外層は、ほぼ従来の製法により
処理した。EXAMPLE 2 Using a cemented carbide of the substrate 3 shown in Table 1 of Example 1 as a substrate, and using an arc ion plating apparatus, an underlayer, a composite hard film, an outer layer, Products 7 to 13 of the present invention, Comparative Product 5 and Comparative Product 6, which were coated with a laminated coating layer including two or more outermost layers, were obtained. Among them, the Ti underlayer of the product 7 of the present invention is obtained by evaporating Ti on the substrate surface, and the (Ti-Al) intermetallic compound underlayer of the product 8 of the present invention is bombarded by a (Ti-Al) evaporation source. The Ti underlayer of the product 9 of the present invention was deposited at the same time as the bombardment treatment using a Ti evaporation source. Invention products 7 to 13
The base material treatment and the formation of the composite hard film are substantially the same as those of the inventive products 3 to 6 in the execution test 1. The base material treatment and the formation of the composite hard film of the comparative products 5 and 6 are as follows. The treatment was performed in substantially the same manner as the comparative product 1 in the practical test 1. The other underlayer, outer layer and outermost layer were processed by a substantially conventional manufacturing method.
【００４１】こうして得た本発明品７〜１３と比較品５
および比較品６のそれぞれの下地層，複合硬質膜，外層
および最外層について、実施試験１と同様にして調べ
て、それぞれの被覆層の構成と各膜質および膜厚さを表
３に示し、複合硬質膜表面におけるＸ線回折による結晶
面ピーク高さ比，半価幅比，ＴｉとＡｌの元素比，表面
硬さ，スクラッチ強度を表４に示した。また、本発明品
７〜１３と比較品５および比較品６について、実施試験
１の切削条件と同様にして切削試験を行い、比較品５に
対するそれぞれの寿命比を求めて、表４に併記した。な
お、複合硬質膜の表面調査は、複合硬質膜を被覆した後
に反応容器から取り出して行い、本発明品１０は、全被
覆終了後に、熱処理を行って基材中の結合相を被覆層中
に拡散させ、下地層および複合硬質膜に約１体積％の結
合相を含有させた。また、本発明品１１は、下地層の炭
窒化チタン層が柱状晶からなり、かつ複合硬質膜の成膜
時にプラズマ密度，ラジカル反応および成膜速度を配慮
して柱状晶結晶としたものである。Inventive products 7 to 13 thus obtained and comparative product 5
The underlayer, the composite hard film, the outer layer, and the outermost layer of the comparative product 6 were examined in the same manner as in the test 1. The composition of each coating layer, and the quality and thickness of each coating are shown in Table 3. Table 4 shows the crystal plane peak height ratio, half width width ratio, element ratio of Ti and Al, surface hardness, and scratch strength on the hard film surface by X-ray diffraction. In addition, cutting tests were performed on the products 7 to 13 of the present invention, the comparative product 5 and the comparative product 6 in the same manner as the cutting conditions of the execution test 1, and the respective life ratios with respect to the comparative product 5 were obtained. . In addition, the surface investigation of the composite hard film was performed after the composite hard film was coated and taken out of the reaction vessel. After the completion of the entire coating, the product 10 of the present invention was subjected to heat treatment so that the binder phase in the base material was converted into the coating layer. Diffusion allowed the underlayer and the composite hard film to contain about 1% by volume of the binder phase. Further, the product 11 of the present invention has a titanium carbonitride layer as a base layer made of a columnar crystal, and is formed into a columnar crystal in consideration of a plasma density, a radical reaction, and a film formation rate when forming a composite hard film. .
【００４２】[0042]
【表３】 [Table 3]
【００４３】[0043]
【表４】 [Table 4]
【００４４】[0044]
【実施試験３】７０体積％Ａｌ2Ｏ3ー３０体積％ＴｉＣ
Ｎ（配合組成）により作製されたセラミックス焼結体の
基材７と、７０体積％Ａｌ2Ｏ3ー３０体積％ＳｉＣウイ
スカー（配合組成）により作製されたセラミックス焼結
体の基材８と、９６体積％Ｓｉ3Ｎ4−１体積％ＭｇＯ−
１体積％Ｙ2Ｏ3ー２体積％ＨｆＯ2（配合組成）により
作製されたセラミックス焼結体の基材９と、９０体積％
Ｓｉ3Ｎ4−４体積％ＡｌＮー４体積％Ａｌ2Ｏ3ー１体積
％ＭｇＯ−１体積％Ｙ2Ｏ3（配合組成）により作製され
たセラミックス焼結体の基材１０を用いて、実施試験１
における本発明品３〜６とほぼ同様に基材を処理し、各
基材表面に約１μｍ膜厚さのＴｉを蒸着した後に、複合
硬質膜を被覆し、本発明品１４〜１７を得た。また、比
較として、基材７と基材９を用いて、実施試験１におけ
る比較品１とほぼ同様に処理し、比較品７および比較品
８を得た。[Test 3] 70% by volume Al 2 O 3 -30% by volume TiC
A base material 7 of a ceramic sintered body made of N (blended composition), a base material 8 of a ceramic sintered body made of 70 vol% Al 2 O 3 -30 vol% SiC whisker (blended composition), 96% by volume Si 3 N 4 -1% by volume MgO—
1% by volume of Y 2 O 3 -2% by volume of HfO 2 (composition composition), a base material 9 of a ceramic sintered body, and 90% by volume
Using a substrate 10 of a ceramic sintered body made of Si 3 N 4 -4% by volume AlN-4% by volume Al 2 O 3 -1% by volume MgO-1% by volume Y 2 O 3 (mixing composition) Test 1
In the same manner as in Examples 3 to 6 of the present invention, the substrate was treated in the same manner as above, and about 1 μm-thick Ti was deposited on the surface of each substrate, and then coated with a composite hard film to obtain inventive products 14 to 17. . In addition, as a comparison, using the base material 7 and the base material 9, the treatment was performed in substantially the same manner as the comparison product 1 in the execution test 1 to obtain the comparison products 7 and 8.
【００４５】こうして得た本発明品１４〜１７と比較品
７及び比較品８の複合硬質膜について、実施試験１と同
様にして調べて、複合硬質膜表面におけるＸ線回折によ
る結晶面ピーク高さ比，半価幅比，ＴｉとＡｌの元素
比，表面硬さ，スクラッチ強度を表５に示した。また、
本発明品１４と本発明品１５と比較品７は、被削材：Ｆ
ＣＤ６００，切削速度：１５０ｍ／ｍｉｎ，切込み：
１．５ｍｍ，送り：０．２ｍｍ／刃，工具形状：ＳＮＧ
Ｎ１２０４０８，ホーニング：０．１５×ー２５°，乾
式フライス切削試験を行った。本発明品１６と本発明品
１７と比較品８は、被削材：ＦＣＤ２５０，切削速度：
６００ｍ／ｍｉｎ，切込み：３．０ｍｍ，送り：０．１
ｍｍ／刃，工具形状：ＳＮＧＮ１２０４１２，ホーニン
グ：０．１５×ー２５°，乾式フライス切削試験を行っ
た。これらの乾式フライス結果は、実施試験１における
切削試験と同様にし、本発明品１４と本発明品１５は、
比較品７に対する寿命比とし、本発明品１６と本発明品
１７は、比較品８に対する寿命比として表５に併記し
た。なお、本発明品１４〜１７と比較品７及び比較品８
の複合硬質膜厚さは、約５μｍであった。The composite hard films of the inventive products 14 to 17 and the comparative products 7 and 8 thus obtained were examined in the same manner as in Example 1, and the crystal plane peak height by X-ray diffraction on the surface of the composite hard film was determined. Table 5 shows the ratio, half width ratio, element ratio between Ti and Al, surface hardness, and scratch strength. Also,
The product 14 of the present invention, the product 15 of the present invention, and the comparative product 7 have a work material: F
CD600, cutting speed: 150m / min, cutting depth:
1.5mm, feed: 0.2mm / tooth, tool shape: SNG
N120408, honing: 0.15 × -25 °, dry milling test. The product 16 of the present invention, the product 17 of the present invention, and the comparative product 8 have a work material of FCD250 and a cutting speed of:
600 m / min, depth of cut: 3.0 mm, feed: 0.1
mm / blade, tool shape: SNGN120412, honing: 0.15 × -25 °, dry milling test was performed. These dry milling results were the same as in the cutting test in the execution test 1, and the products 14 and 15 of the present invention
Table 5 also shows the life ratio of the product of the present invention 16 and the product of the present invention 17 to the comparative product 8 as the life ratio to the comparative product 7. In addition, the products 14 to 17 of the present invention, the comparative product 7 and the comparative product 8
Was about 5 μm.
【００４６】[0046]
【表５】 [Table 5]
【００４７】[0047]
【実施試験４】４０体積％ｃＢＮー５体積％Ａｌ2Ｏ3−
５体積％ＡｌＮー１０体積％Ａｌ−１０体積％Ｍｇー１
０体積％Ｂ−２０体積％ＴｉＮ（配合組成）により作製
された超高温高圧の立方晶窒化硼素系焼結体の基材１１
と、８５体積％ｃＢＮー２体積％Ｃｏー５体積％Ａｌ−
２体積％Ｍｇー６体積％ＴｉＮ（配合組成）により作製
された超高温高圧の立方晶窒化硼素系焼結体の基材１２
と、９５体積％ＤＩＡー２体積％Ｃｏー２体積％Ｎｉー
１体積ＺｒＣ（配合組成）により作製された超高温高圧
のＤＩＡ系焼結体の基材１３と、９７体積％ＤＩＡー１
体積％Ｃｏー１体積％Ｎｉー１体積Ｍｇ（配合組成）に
より作製された超高温高圧のＤＩＡ系焼結体の基材１４
を用いて、実施試験１における本発明品３〜６とほぼ同
様に基材を処理し、基材１１と基材１２の表面に約１μ
ｍ膜厚さのＴｉを蒸着し、基材１３と基材１４の表面に
約１μｍ厚さのＮｉ無電解メッキを施した後に、複合硬
質膜を被覆し、本発明品１８〜２１を得た。また、比較
として、基材１１と基材１３を用いて、実施試験１にお
ける比較品１とほぼ同様に処理し、比較品９および比較
品１０を得た。[Test 4] 40% by volume cBN-5% by volume Al 2 O 3 −
5% by volume AlN-10% by volume Al-10% by volume Mg-1
Substrate 11 of cubic boron nitride sintered body of ultra-high temperature and high pressure made of 0 vol% B-20 vol% TiN (mixing composition)
And 85% by volume cBN-2% by volume Co-5% by volume Al-
Base material 12 of cubic boron nitride-based sintered body of ultra high temperature and high pressure made of 2 vol% Mg-6 vol% TiN (composition composition)
And a base material 13 of an ultra-high-temperature and high-pressure DIA-based sintered body made of 95 vol% DIA-2 vol% Co-2 vol% Ni-1 vol ZrC (mixing composition), and 97 vol% DIA-1
Base material 14 of ultra high temperature and high pressure DIA based sintered body made of volume% Co-1 volume% Ni-1 volume Mg (mixing composition)
, The substrate was treated in substantially the same manner as the products 3 to 6 of the present invention in the execution test 1, and about 1 μm
After depositing a Ti film having a thickness of m and subjecting the surfaces of the base material 13 and the base material 14 to Ni electroless plating with a thickness of about 1 μm, the composite hard film was coated to obtain the present invention products 18 to 21. . In addition, as a comparison, using the base material 11 and the base material 13, the same treatment as that of the comparative product 1 in the practical test 1 was performed to obtain a comparative product 9 and a comparative product 10.
【００４８】こうして得た本発明品１８〜２１と比較品
９及び比較品１０の複合硬質膜について、実施試験１と
同様にして調べて、複合硬質膜表面におけるＸ線回折に
よる結晶面ピーク高さ比，半価幅比，ＴｉとＡｌの元素
比，表面硬さ，スクラッチ強度を表６に示した。また、
本発明品１８と本発明品１９と比較品９は、被削材：Ｓ
ＣＭ４１５（硬さ：約ＨＲＣ６１），切削速度：１５０
ｍ／ｍｉｎ，切込み：０．５ｍｍ，送り：０．１ｍｍ／
ｒｅｖ，工具形状：Ｔんま１６０４０８，ホーニング：
０．１５×ー２５°，外周連続乾式旋削試験を行い、そ
の結果を表６に併記した。この外周連続乾式旋削試験の
評価は、実施試験１における切削試験と同様に行い、比
較品９に対する寿命比として表した。なお、本発明品１
８〜２１と比較品９及び比較品１０の複合硬質膜厚さ
は、約５μｍであった。The composite hard films of the inventive products 18 to 21 and the comparative products 9 and 10 thus obtained were examined in the same manner as in Example 1, and the crystal plane peak height by X-ray diffraction on the surface of the composite hard film was determined. Table 6 shows the ratio, the half width width ratio, the element ratio between Ti and Al, the surface hardness, and the scratch strength. Also,
The product 18 of the present invention, the product 19 of the present invention, and the comparative product 9 have a work material: S
CM415 (hardness: about HRC61), cutting speed: 150
m / min, depth of cut: 0.5 mm, feed: 0.1 mm /
rev, tool shape: T160160408, honing:
A continuous turning test of the outer circumference was performed at 0.15 × −25 °, and the results are shown in Table 6. The evaluation of the outer peripheral continuous dry turning test was performed in the same manner as the cutting test in the execution test 1, and was expressed as a life ratio to the comparative product 9. The product of the present invention 1
The composite hard film thicknesses of Nos. 8 to 21 and Comparative products 9 and 10 were about 5 μm.
【００４９】[0049]
【表６】 [Table 6]
【００５０】[0050]
【発明の効果】本発明の複合硬質膜被覆部材は、気相法
エピタキシャルによる結晶成長と結晶配向による複合硬
質膜が被覆されていること、複合硬質膜自体の歪み，欠
陥が抑制されていること、微細結晶であること、場合に
よっては柱状晶結晶および／または微量の金属などの複
合硬質膜強化物質が含まれた複合硬質膜であることか
ら、従来の複合硬質膜被覆部材または本発明から外れた
複合硬質膜被覆部材に対比して、基材と複合硬質膜，下
地層と複合硬質膜，複合硬質膜と外層など、複合硬質膜
に隣接する物質に対し、密着性および耐剥離性が非常に
すぐれること、複合硬質膜自体の高靱性，高強度，耐熱
性，耐熱衝撃性，耐酸化性および耐摩耗性がすぐれてい
ること、その結果として例えば切削工具として使用した
場合に、切削工具として重要視される高靭性，耐摩耗
性，耐熱衝撃性，耐欠損性，耐酸化性および耐溶着性が
顕著に向上し、長寿命化が達成されること、切削加工に
おける高効率化が達成されること、バラツキが小さく安
定しているという顕著な効果がある。The composite hard film-coated member according to the present invention is that the composite hard film is coated by crystal growth and crystal orientation by vapor phase epitaxy, and distortion and defects of the composite hard film itself are suppressed. A composite hard film containing a composite hard film reinforcing material such as a columnar crystal and / or a trace amount of metal. Adhesion and peeling resistance to substances adjacent to the composite hard film, such as the base material and the composite hard film, the base layer and the composite hard film, and the composite hard film and the outer layer, are much higher than those of the composite hard film coated member. That the composite hard film itself has high toughness, high strength, heat resistance, thermal shock resistance, oxidation resistance, and abrasion resistance. As a result, when used as a cutting tool, When Remarkably improved high toughness, wear resistance, thermal shock resistance, fracture resistance, oxidation resistance and welding resistance, which achieve long life and high efficiency in cutting Has a remarkable effect that the variation is small and stable.
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１２年１２月８日（２０００．１２．
８）[Submission date] December 8, 2000 (200.12.
8)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００３２[Correction target item name] 0032
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００３２】複合硬質膜の被覆条件は、反応容器の構
造、プラズマの調整など装置自体の影響を重要視する必
要があり、具体的には、例えば高電圧（場合によっては
パルス状高電圧と高周波を付加）の電源でイオンを加速
し、プラズマを発生させる装置、さらに磁界によるプラ
ズマの調整可能とした装置を使用すること、その他反応
容器内の雰囲気圧力、温度、アーク放電電流、電圧、基
材バイアス電圧、試料の配置などについて配慮する必要
があり、これらのうち、従来の条件に対し、特にアーク
放電電圧を高くすること、基材バイアス電圧を高くする
こと、試料の回転および上下動などが重要な要件であ
る。As for the coating conditions of the composite hard film, it is necessary to give importance to the influence of the apparatus itself such as the structure of the reaction vessel and the adjustment of plasma. Specifically, for example, a high voltage (in some cases, a pulsed high voltage and a high frequency Use a device that accelerates ions with a power supply and generates plasma, and a device that enables plasma to be adjusted by a magnetic field. Others include atmospheric pressure, temperature, arc discharge current, voltage, and substrate in the reaction vessel. It is necessary to consider the bias voltage, the arrangement of the sample, etc. Among these conditions, in particular, higher arc discharge voltage, higher substrate bias voltage, sample rotation and vertical movement, etc. This is an important requirement.
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ３２Ｂ 15/04 Ｂ３２Ｂ 15/04 Ｆターム(参考） 3C046 FF03 FF04 FF10 FF25 FF32 FF33 FF35 FF39 FF53 4F100 AA12B AA15B AB31A AT00A BA02 EH66 EH662 EJ34 EJ342 GB51 JK01 JK06 JK14A 4K029 AA02 AA04 BA01 BA03 BA06 BA11 BA12 BA17 BA21 BA41 BA54 BA55 BA58 BA64 BB02 BB07 BB08 BD05 CA04 DD06 EA01 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) B32B 15/04 B32B 15/04 F term (reference) 3C046 FF03 FF04 FF10 FF25 FF32 FF33 FF35 FF39 FF53 4F100 AA12B AA15B AB31A AT00A BA02 EH66 EH662 EJ34 EJ342 GB51 JK01 JK06 JK14A 4K029 AA02 AA04 BA01 BA03 BA06 BA11 BA12 BA17 BA21 BA41 BA54 BA55 BA58 BA64 BB02 BB07 BB08 BD05 CA04 DD06 EA01
Claims (16)
む複合窒化物、複合炭化物、複合炭窒化物、複合窒酸化
物、複合炭酸化物、複合炭窒酸化物の中の少なくとも１
種の複合硬質膜を含む単層または積層の被覆層として被
覆されており、該複合硬質膜の表面から銅ターゲットを
用いてＸ線回折したときに、（２００）結晶面のピーク
高さをｈ（２００）とし、（１１１）結晶面のピーク高
さをｈ（１１１）としたときに、ｈ（２００）／ｈ（１
１１）≧４．０からなり、該（２００）結晶面のピーク
の半価幅をｄ（２００）とし、該（１１１）結晶面のピ
ークの半価幅をｄ（１１１）としたときに、１．５≧ｄ
（２００）／ｄ（１１１）≧０．８からなる複合硬質膜
被覆部材。At least one of a composite nitride, a composite carbide, a composite carbonitride, a composite nitride, a composite carbonate, and a composite carbonitride containing titanium and aluminum on the surface of a substrate.
The composite hard film is coated as a single layer or a laminated coating layer containing a composite hard film, and when the surface of the composite hard film is subjected to X-ray diffraction using a copper target, the peak height of the (200) crystal plane is h. When (200) and the peak height of the (111) crystal plane is h (111), h (200) / h (1
11) ≧ 4.0, where the half width of the peak of the (200) crystal plane is d (200) and the half width of the peak of the (111) crystal plane is d (111), 1.5 ≧ d
A composite hard film-coated member comprising (200) / d (111) ≧ 0.8.
Ｎｉでなる結合相を４〜１５重量％と、残部が炭化タン
グステンまたは炭化タングステンと周期律表の４ａ，５
ａ，６ａ族金属の炭化物，炭窒化物およびこれらの相互
固溶体から選ばれた少なくとも１種との硬質相を含有す
る超硬合金からなる請求項１に記載の複合硬質膜被覆部
材。2. The base material comprises 4 to 15% by weight of a binder phase whose main component is Co and / or Ni, the balance being tungsten carbide or tungsten carbide, and 4a, 5a of the periodic table.
2. The composite hard film-coated member according to claim 1, comprising a cemented carbide containing a hard phase with at least one selected from the group consisting of carbides and carbonitrides of Group a and 6a metals and mutual solid solutions thereof.
アロンを８０〜９８重量％と、残部が焼結助剤である窒
化珪素系焼結体からなる請求項１に記載の複合硬質膜被
覆部材。3. The composite hard film coating according to claim 1, wherein the base material comprises 80 to 98% by weight of silicon nitride and / or sialon, and the remainder is a silicon nitride based sintered body which is a sintering aid. Element.
重量％と、残部がＴｉ，Ａｌ，Ｍｇ，Ｓｉの窒化物、硼
化物およびこれらの相互固溶体の中から選ばれた少なく
とも１種の粒界結合相とを含有する超高温高圧焼結体か
らなる請求項１に記載の複合硬質膜被覆部材。4. The substrate according to claim 1, wherein the cubic boron nitride is 20 to 90%.
An ultra-high-temperature and high-pressure sintered compact containing, by weight, at least one type of grain boundary binder phase selected from nitrides, borides and mutual solid solutions of Ti, Al, Mg, and Si. The composite hard film-coated member according to claim 1.
格のＲａによる平均表面粗さで０．１μｍ以下からなる
請求項１〜４のいずれか１項に記載の複合硬質膜被覆部
材。5. The composite hard film according to claim 1, wherein the substrate has a surface roughness of 0.1 μm or less in terms of average surface roughness according to JIS standard Ra. Covering member.
項１〜５のいずれか１項に記載の複合硬質膜被覆部材。6. The composite hard film-coated member according to claim 1, wherein said coating layer is made of said composite hard film.
でなる立方晶型結晶構造からなる請求項１〜６のいずれ
か１項に記載の複合硬質膜被覆部材。7. The composite hard film has a thickness of 1 to 15 μm.
The composite hard film-coated member according to any one of claims 1 to 6, wherein the member has a cubic crystal structure.
x，Ｎy，Ｏz）w［ただし、ａは金属元素中のＴｉ（チタ
ン）元素の原子比、ｂは金属元素中のＡｌ（アルミニウ
ム）元素の原子比、ｘは非金属元素中の炭素（Ｃ）元素
の原子比、ｙは非金属元素中の窒素（Ｎ）元素の原子
比、ｚは非金属元素中の酸素（Ｏ）元素の原子比、ｗは
金属元素の合計に対する非金属元素の原子比を表し、そ
れぞれがａ＋ｂ＝１、０．８≧ａ≧０．４、ｘ＋ｙ＋ｚ
＝１、０．５≧ｘ≧０、１≧ｙ≧０．５、０．５≧ｚ≧
０、１．０５≧ｗ≧０．７の関係にある］で表される複
合硬質膜を含有する請求項１〜７のいずれか１項に記載
の複合硬質膜被覆部材。8. The composite hard film according to claim 1, wherein (Ti a , Al b ) (C
x , N y , O z ) w [where a is the atomic ratio of the Ti (titanium) element in the metal element, b is the atomic ratio of the Al (aluminum) element in the metal element, x is the carbon in the non-metal element (C) Atomic ratio of element, y is atomic ratio of nitrogen (N) element in nonmetallic element, z is atomic ratio of oxygen (O) element in nonmetallic element, w is nonmetallic element with respect to total of metallic elements Where a + b = 1, 0.8 ≧ a ≧ 0.4, x + y + z
= 1, 0.5 ≧ x ≧ 0, 1 ≧ y ≧ 0.5, 0.5 ≧ z ≧
0, 1.05 ≧ w ≧ 0.7], and the composite hard film-coated member according to any one of claims 1 to 7.
1-a-b）（Ｃx，Ｎy，Ｏz） w［ただし、ａは金属元素中
のＴｉ（チタン）元素の原子比、ｂは金属元素中のＡｌ
（アルミニウム）元素の原子比、Ｍは周期律表の４ａ，
５ａ，６ａ族元素、Ｓｉ，Ｍｎ，Ｍｇ，Ｂの中の少なく
とも１種を表し、ｘは非金属元素中の炭素（Ｃ）元素の
原子比、ｙは非金属元素中の窒素（Ｎ）元素の原子比、
ｚは非金属元素中の酸素（Ｏ）元素の原子比、ｗは金属
元素の合計に対する非金属元素の原子比を表し、それぞ
れが０．８≧ａ≧０．４、０．６＞ｂ＞０．２、ｘ＋ｙ
＋ｚ＝１、０．５≧ｘ≧０、１≧ｙ≧０．５、０．５≧
ｚ≧０、１．０５≧ｗ≧０．７の関係にある］で表され
る複合硬質膜を含有する請求項１〜７のいずれか１項に
記載の複合硬質膜被覆部材。9. The composite hard film according to claim 1, wherein (Ti)a, Alb, M
1-ab) (Cx, Ny, Oz) w[However, a is a metal element
Atomic ratio of Ti (titanium) element, b is Al in metal element
The atomic ratio of the (aluminum) element, M is 4a in the periodic table,
Group 5a, 6a element, Si, Mn, Mg, B
And x represents one of the carbon (C) elements in the nonmetallic element.
Atomic ratio, y is the atomic ratio of nitrogen (N) element in the nonmetallic element,
z is the atomic ratio of the oxygen (O) element in the nonmetal element, w is the metal
Represents the atomic ratio of non-metallic elements to the sum of the elements, each
0.8 ≧ a ≧ 0.4, 0.6> b> 0.2, x + y
+ Z = 1, 0.5 ≧ x ≧ 0, 1 ≧ y ≧ 0.5, 0.5 ≧
z ≧ 0, 1.05 ≧ w ≧ 0.7]
The composite hard film according to any one of claims 1 to 7,
A composite hard film-coated member according to the above.
ｉ，Ｃｏ，Ｗ，Ｍｏ，Ａｌ，Ｔｉの金属、これらの相互
合金，これらの金属間化合物の中から選ばれた少なくと
も１種の複合硬質膜強化物質が含有されている請求項１
〜９のいずれか１項に記載の複合硬質膜被覆部材。10. The composite hard film according to claim 1, wherein said composite hard film contains N
2. A composite hard film reinforcing material selected from the group consisting of metals of i, Co, W, Mo, Al, and Ti, mutual alloys thereof, and intermetallic compounds thereof.
10. The composite hard film-coated member according to any one of items 9 to 9.
し、垂直方向に柱状でなる柱状結晶が含まれている請求
項１〜１０のいずれか１項に記載の複合硬質膜被覆部
材。11. The composite hard film coating member according to claim 1, wherein the composite hard film contains columnar crystals which are columnar in a direction perpendicular to the surface of the base material. .
ｉとＡｌとの金属元素の合計含有量に対するＡｌ元素の
含有量が上記基材の表面から該複合硬質膜の表面に向か
って増加している請求項１〜１１のいずれか１項に記載
の複合硬質膜被覆部材。12. The composite hard film according to claim 12, wherein T
The content according to any one of claims 1 to 11, wherein the content of the Al element with respect to the total content of the metal elements of i and Al increases from the surface of the base material toward the surface of the composite hard film. Composite hard film coated member.
粗さがＪＩＳ規格のＲａによる平均表面粗さで０．１μ
ｍ以下からなる請求項１〜１２のいずれか１項に記載の
複合硬質膜被覆部材。13. The composite hard film according to claim 1, wherein said composite hard film has an average surface roughness of 0.1 μm according to Ra according to JIS.
The composite hard film-coated member according to any one of claims 1 to 12, comprising m or less.
ｉおよび／またはＡｌの金属、ＴｉとＡｌの合金、Ｔｉ
および／またはＡｌを含む金属間化合物でなる薄層が１
μｍ以下の膜厚さで介在されている請求項１〜１３のい
ずれか１項に記載の複合硬質膜被覆部材。14. The method according to claim 1, wherein a T is provided between said composite hard film and said base material.
i and / or Al metal, alloy of Ti and Al, Ti
And / or a thin layer made of an intermetallic compound containing Al
The composite hard film-coated member according to any one of claims 1 to 13, wherein the member is interposed with a thickness of not more than μm.
載の複合硬質膜被覆部材は、切削工具として用いられる
複合硬質膜被覆部材。15. The composite hard film-coated member according to any one of claims 1 to 14, wherein the member is used as a cutting tool.
さが稜線部に向かって減少している請求項１５に記載の
複合硬質膜被覆部材。16. The composite hard film-coated member according to claim 15, wherein in the cutting tool, the film thickness of the composite hard film decreases toward the ridge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000049530A JP3599628B2 (en) | 2000-02-25 | 2000-02-25 | Composite hard film coated member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000049530A JP3599628B2 (en) | 2000-02-25 | 2000-02-25 | Composite hard film coated member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001234328A true JP2001234328A (en) | 2001-08-31 |
| JP3599628B2 JP3599628B2 (en) | 2004-12-08 |
Family
ID=18571457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000049530A Expired - Fee Related JP3599628B2 (en) | 2000-02-25 | 2000-02-25 | Composite hard film coated member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3599628B2 (en) |
Cited By (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1347076A1 (en) * | 2002-03-20 | 2003-09-24 | Seco Tools Ab | PVD-Coated cutting tool insert |
| US6824601B2 (en) | 2000-12-28 | 2004-11-30 | Kobe Steel, Ltd. | Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film |
| EP1640089A1 (en) * | 2003-06-27 | 2006-03-29 | Sumitomo Electric Industries, Ltd. | Surface-coated high hardness material for tool |
| US7056602B2 (en) * | 2002-09-04 | 2006-06-06 | Seco Tools Ab | Precipitation hardened wear resistant coating |
| US7083868B2 (en) * | 2002-09-04 | 2006-08-01 | Seco Tools Ab | Composite structured wear resistant coating |
| JP2006326729A (en) * | 2005-05-25 | 2006-12-07 | Mitsubishi Materials Corp | Surface coated cemented carbide cutting tool having hard coating layer exhibiting excellent high-temperature strength |
| US7150925B2 (en) | 2001-10-30 | 2006-12-19 | Mitsubishi Materials Kobe Tools Corporation | Surface coated cemented carbide cutting tool having hard coating layer exhibiting excellent wear resistance in high speed machining |
| US7258933B2 (en) * | 2002-06-25 | 2007-08-21 | Mitsubishi Materials Corporation | Coated cutting tool member |
| US7357975B2 (en) * | 2004-03-12 | 2008-04-15 | Metaplas Ionon Oberflachenveredelungstechnik Gmbh | Carbon-containing hard coating and a method for depositing a hard coating onto a substrate |
| JP2008284637A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| JP2008284636A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| JP2008284638A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| US7732066B2 (en) | 2001-12-26 | 2010-06-08 | Sumitomo Electric Industries, Ltd. | Surface-coated machining tools |
| JP2010228032A (en) * | 2009-03-26 | 2010-10-14 | Mitsubishi Materials Corp | Surface-coated cutting tool formed of cubic boron nitride-based ultra high-pressure sintered material |
| US7939186B2 (en) | 2006-05-26 | 2011-05-10 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultra-high-pressure sintered material |
| US8017225B2 (en) | 2005-12-22 | 2011-09-13 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material |
| JP2012001744A (en) * | 2010-06-14 | 2012-01-05 | Ntn Corp | TiAlN FILM AND TiAlN FILM-FORMED BODY |
| US20120201615A1 (en) * | 2011-02-07 | 2012-08-09 | Kennametal Inc. | Cubic Aluminum Titanium Nitride Coating and Method of Making Same |
| CN103878555A (en) * | 2012-12-20 | 2014-06-25 | 三菱综合材料株式会社 | Excellent Cubic Boron Nitride Ultrahigh Pressure Sintering Material Surface Coated Cutting Tool |
| JP2015033757A (en) * | 2013-06-26 | 2015-02-19 | 日立金属株式会社 | Coated cutting tool for processing titanium or titanium alloy, manufacturing method of the same and processing method of titanium or titanium alloy using the same |
| US9103036B2 (en) | 2013-03-15 | 2015-08-11 | Kennametal Inc. | Hard coatings comprising cubic phase forming compositions |
| US9168664B2 (en) | 2013-08-16 | 2015-10-27 | Kennametal Inc. | Low stress hard coatings and applications thereof |
| KR20160100817A (en) * | 2013-12-26 | 2016-08-24 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | Cutting tool |
| US9896767B2 (en) | 2013-08-16 | 2018-02-20 | Kennametal Inc | Low stress hard coatings and applications thereof |
| JP2020531300A (en) * | 2017-08-31 | 2020-11-05 | ヴァルター アーゲー | Abrasion resistant PVD tool coating with TiAlN nanolayer film |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015052762A1 (en) * | 2013-10-08 | 2015-04-16 | Ｔｐｒ株式会社 | Piston ring and seal ring for turbocharger |
| WO2015052761A1 (en) * | 2013-10-08 | 2015-04-16 | Ｔｐｒ株式会社 | Piston ring and seal ring for turbocharger |
| US10570501B2 (en) | 2017-05-31 | 2020-02-25 | Kennametal Inc. | Multilayer nitride hard coatings |
-
2000
- 2000-02-25 JP JP2000049530A patent/JP3599628B2/en not_active Expired - Fee Related
Cited By (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6824601B2 (en) | 2000-12-28 | 2004-11-30 | Kobe Steel, Ltd. | Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film |
| US6919288B2 (en) | 2000-12-28 | 2005-07-19 | Kobe Steel, Ltd. | Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film |
| US7186324B2 (en) | 2000-12-28 | 2007-03-06 | Kabushiki Kaisha Kobe Seiko Sho | Hard film cutting tools, cutting tool coated with hard film, process for forming hard film and target used to form hard film |
| US7150925B2 (en) | 2001-10-30 | 2006-12-19 | Mitsubishi Materials Kobe Tools Corporation | Surface coated cemented carbide cutting tool having hard coating layer exhibiting excellent wear resistance in high speed machining |
| US7732066B2 (en) | 2001-12-26 | 2010-06-08 | Sumitomo Electric Industries, Ltd. | Surface-coated machining tools |
| US6884497B2 (en) | 2002-03-20 | 2005-04-26 | Seco Tools Ab | PVD-coated cutting tool insert |
| EP1347076A1 (en) * | 2002-03-20 | 2003-09-24 | Seco Tools Ab | PVD-Coated cutting tool insert |
| US7258933B2 (en) * | 2002-06-25 | 2007-08-21 | Mitsubishi Materials Corporation | Coated cutting tool member |
| US7056602B2 (en) * | 2002-09-04 | 2006-06-06 | Seco Tools Ab | Precipitation hardened wear resistant coating |
| US7083868B2 (en) * | 2002-09-04 | 2006-08-01 | Seco Tools Ab | Composite structured wear resistant coating |
| US7794860B2 (en) | 2003-06-27 | 2010-09-14 | Sumitomo Electric Industries, Ltd. | Surface-coated high hardness material for tool |
| EP1640089A4 (en) * | 2003-06-27 | 2008-07-16 | Sumitomo Electric Industries | Surface-coated high hardness material for tool |
| US7524569B2 (en) | 2003-06-27 | 2009-04-28 | Sumitomo Electric Industries, Ltd. | Surface-coated high hardness material for tool |
| EP1640089A1 (en) * | 2003-06-27 | 2006-03-29 | Sumitomo Electric Industries, Ltd. | Surface-coated high hardness material for tool |
| US7357975B2 (en) * | 2004-03-12 | 2008-04-15 | Metaplas Ionon Oberflachenveredelungstechnik Gmbh | Carbon-containing hard coating and a method for depositing a hard coating onto a substrate |
| JP2006326729A (en) * | 2005-05-25 | 2006-12-07 | Mitsubishi Materials Corp | Surface coated cemented carbide cutting tool having hard coating layer exhibiting excellent high-temperature strength |
| US8017225B2 (en) | 2005-12-22 | 2011-09-13 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material |
| US7939186B2 (en) | 2006-05-26 | 2011-05-10 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultra-high-pressure sintered material |
| JP2008284637A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| JP2008284636A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| JP2008284638A (en) * | 2007-05-16 | 2008-11-27 | Sumitomo Electric Ind Ltd | Coated cutting tool |
| JP2010228032A (en) * | 2009-03-26 | 2010-10-14 | Mitsubishi Materials Corp | Surface-coated cutting tool formed of cubic boron nitride-based ultra high-pressure sintered material |
| JP2012001744A (en) * | 2010-06-14 | 2012-01-05 | Ntn Corp | TiAlN FILM AND TiAlN FILM-FORMED BODY |
| US20120201615A1 (en) * | 2011-02-07 | 2012-08-09 | Kennametal Inc. | Cubic Aluminum Titanium Nitride Coating and Method of Making Same |
| US8409702B2 (en) * | 2011-02-07 | 2013-04-02 | Kennametal Inc. | Cubic aluminum titanium nitride coating and method of making same |
| CN103878555B (en) * | 2012-12-20 | 2017-09-05 | 三菱综合材料株式会社 | Cubic boron nitride base ultra-high pressure sintered material control surface coated cutting tool |
| CN103878555A (en) * | 2012-12-20 | 2014-06-25 | 三菱综合材料株式会社 | Excellent Cubic Boron Nitride Ultrahigh Pressure Sintering Material Surface Coated Cutting Tool |
| JP2014121748A (en) * | 2012-12-20 | 2014-07-03 | Mitsubishi Materials Corp | Surface-coated cutting tool made of cubic crystal boron nitride group superhigh pressure sintered material excellent in crack resistance |
| US9103036B2 (en) | 2013-03-15 | 2015-08-11 | Kennametal Inc. | Hard coatings comprising cubic phase forming compositions |
| JP2015033757A (en) * | 2013-06-26 | 2015-02-19 | 日立金属株式会社 | Coated cutting tool for processing titanium or titanium alloy, manufacturing method of the same and processing method of titanium or titanium alloy using the same |
| US10184187B2 (en) | 2013-08-16 | 2019-01-22 | Kennametal Inc. | Low stress hard coatings and applications thereof |
| US9896767B2 (en) | 2013-08-16 | 2018-02-20 | Kennametal Inc | Low stress hard coatings and applications thereof |
| US9168664B2 (en) | 2013-08-16 | 2015-10-27 | Kennametal Inc. | Low stress hard coatings and applications thereof |
| KR20160100817A (en) * | 2013-12-26 | 2016-08-24 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | Cutting tool |
| KR102253560B1 (en) * | 2013-12-26 | 2021-05-17 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | Cutting tool |
| JP2020531300A (en) * | 2017-08-31 | 2020-11-05 | ヴァルター アーゲー | Abrasion resistant PVD tool coating with TiAlN nanolayer film |
| JP7217740B2 (en) | 2017-08-31 | 2023-02-03 | ヴァルター アーゲー | Wear-resistant PVD tool coating with TiAlN nanolayer film |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3599628B2 (en) | 2004-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2001234328A (en) | Combined hard coating member | |
| JP4927559B2 (en) | Cubic boron nitride sintered body and cutting tool using the same | |
| JP5111600B2 (en) | Surface covering member and cutting tool | |
| JP3476749B2 (en) | Ultra-high pressure and high pressure sintered body | |
| EP1867754A1 (en) | Cutting tool made of surface-coated cubic boron nitride-based ultra-high-pressure sintered material | |
| JP5368335B2 (en) | Hard coating and method for manufacturing hard coating | |
| JP5099586B2 (en) | Surface-coated cutting tool with excellent fracture resistance due to hard coating layer | |
| JP5036338B2 (en) | Surface-coated cutting tool with excellent fracture resistance due to hard coating layer | |
| JP2011505261A (en) | Coated article | |
| EP2656948A1 (en) | Cutting tool | |
| JP2006249574A (en) | Hard coating, target for forming hard coating, and method for forming hard coating | |
| JPWO2008026700A1 (en) | Cutting tool, manufacturing method thereof and cutting method | |
| JP2008100320A (en) | Surface coated cutting tool having hard coating layer exhibiting excellent chipping resistance | |
| JPH07173608A (en) | Wear resistant coated member | |
| JP2009083096A (en) | Cutting tool | |
| JP4427729B2 (en) | Cutting tool made of surface-coated cubic boron nitride based sintered material with excellent chipping resistance with hard coating layer | |
| JP2008238392A (en) | Cutting tool | |
| JP2008264988A (en) | Manufacturing method of cutting tool | |
| JP4043145B2 (en) | Surface-coated sintered alloy with excellent adhesion and process for producing the same | |
| JP5239292B2 (en) | Surface-coated cutting tool with excellent fracture resistance due to hard coating layer | |
| JP2006205300A (en) | Surface-coated member and cutting tool | |
| JP2004291162A (en) | Surface coated cutting tool | |
| JP2010094762A (en) | Surface-coated cutting tool provided with hard coated layer demonstrating superior chipping resistance | |
| JP2009214196A (en) | Surface-coated cutting tool having hard coating layer exhibiting excellent resistance to defect | |
| JP2009220239A (en) | Surface coated cutting tool having hard coating layer exerting superior chipping resistance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040113 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040914 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040914 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 3599628 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20070924 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080924 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090924 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090924 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100924 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110924 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110924 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110924 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120924 Year of fee payment: 8 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120924 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120924 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130924 Year of fee payment: 9 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |