JP2001221908A - Reflector - Google Patents
ReflectorInfo
- Publication number
- JP2001221908A JP2001221908A JP2000359770A JP2000359770A JP2001221908A JP 2001221908 A JP2001221908 A JP 2001221908A JP 2000359770 A JP2000359770 A JP 2000359770A JP 2000359770 A JP2000359770 A JP 2000359770A JP 2001221908 A JP2001221908 A JP 2001221908A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- substrate
- reflector
- film
- added
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/30—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors
- F21S41/37—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors characterised by their material, surface treatment or coatings
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ヘッドライトやフ
ォグライト等の車両用灯具、或いは屋外、屋内照明機器
類等に、そして、レーザー機器を含む光学機器の平面鏡
や曲面鏡等に使用される反射体の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for vehicular lamps such as headlights and fog lights, outdoor and indoor lighting equipment and the like, and for plane mirrors and curved mirrors of optical equipment including laser equipment. It relates to improvement of a reflector.
【０００２】[0002]
【従来の技術】従来から、この種の反射体（通称、リフ
レクターと称されている）には主にＭｇ、Ｃａ、Ｓｒ、
Ｌｉ等のアルカリ土類金属を添加して、そのアルカリ土
類金属の酸素吸着効果を用いて浮動体膜を形成した比較
的に安定なＡｌ若しくはＡｌ合金が使用されていたが、
低電力コストで高照度が得られるＡｌや、Ａｌよりも反
射率が低下するＡｌ合金よりも高い反射率を有するＡｇ
の使用が近年検討及び実施されている。しかし、Ａｌの
場合では浮動体膜の安定性や再現性、若しくは浮動体膜
自体がＡｌの酸化性の向上を目的とするために、例えば
塩素を始めとするハロゲン系元素等の大気に添加される
非金属成分に対しては、必ずしも安定ではないために、
実際にリフレクターに採用する場合ではアクリル系の樹
脂系保護膜でＡｌ膜若しくはＡｌ合金膜を被覆すること
で、リフレクターの形成を行うことが広く知られてい
る。2. Description of the Related Art Conventionally, this type of reflector (commonly called a reflector) mainly includes Mg, Ca, Sr,
A relatively stable Al or Al alloy in which a floating body film is formed by adding an alkaline earth metal such as Li and using the oxygen adsorption effect of the alkaline earth metal has been used,
Ag that has high reflectance at a low power cost and Ag that has a higher reflectance than an Al alloy that has a lower reflectance than Al
Has been studied and implemented in recent years. However, in the case of Al, for the purpose of improving the stability and reproducibility of the floating body film or the oxidizing property of the Al itself, the floating body film is added to the atmosphere such as a halogen element such as chlorine. Is not always stable for non-metal components,
It is widely known that in the case where the reflector is actually used, the reflector is formed by coating an Al film or an Al alloy film with an acrylic resin-based protective film.
【０００３】ところで、ＡｇはＡｌに比べて可視光域、
特には光学波長域で４００〜８００ｎｍの範囲での高い
反射率を有する材料として高反射率のリフレクターを形
成する場合においては高い評価が得られているが、大気
中に多く添加される硫黄、塩素により硫化、塩化、ある
いは酸化等と非金属元素に対して大変活性であるため
に、反射膜として汎用的に用いることが困難であると言
われている。つまりは、Ａｇは大気中に長時間暴露され
ると、硫化銀（Ａｇ2Ｓ）となり黒く変色したり、又、
塩化銀（ＡｇＣｌ）となり白濁化して光学特性が劣化す
る。従って、大気中に長時間曝されると、Ａｇの光学特
性が劣化して反射率が低下する問題があることから、低
電力コストで高照度を求めている近年の照明機器類や車
両用灯具等には適用され難いとされている。By the way, Ag is in the visible light range compared to Al,
In particular, high evaluation has been obtained in the case of forming a high-reflectance reflector as a material having a high reflectivity in the range of 400 to 800 nm in the optical wavelength range, but sulfur and chlorine which are frequently added to the atmosphere are obtained. It is said that it is very active against non-metallic elements such as sulfurization, chloride, or oxidation, so that it is difficult to use it as a reflective film for general use. In other words, Ag becomes silver sulfide (Ag2S) when exposed to the air for a long time and changes its color to black,
It becomes silver chloride (AgCl), becomes cloudy, and deteriorates optical characteristics. Therefore, when exposed to the atmosphere for a long time, the optical characteristics of Ag deteriorate and the reflectivity decreases. Therefore, recent lighting equipment and vehicle lamps that require high illuminance at low power cost. And so on.
【０００４】そこで、この問題の解決策として、硫黄や
塩素と反応し難く耐薬品性等の耐候性に優れたＰｄかＡ
ｕの内のどちらか、或いは両方を３０ｗｔ％以下にて添
加させたＡｇを主成分とするＡｇ合金反射膜、又は、Ｐ
ｔを３０ｗｔ％以下にて添加させたＡｇを主成分とする
ＡｇＰｔ合金反射膜を、支持体となる基板上に形成する
ことにより、高い反射率を維持しながら硫黄、塩素に対
する耐候性をも向上させた反射体が提案され、知られて
いる（例えば、特開平６−１８６４０７号参照）。Therefore, as a solution to this problem, Pd or A, which hardly reacts with sulfur or chlorine and has excellent weather resistance such as chemical resistance, has been proposed.
Ag alloy reflecting film containing Ag as a main component, in which one or both of the two elements are added at 30 wt% or less, or P
By forming an AgPt alloy reflective film containing Ag as a main component to which t is added at 30 wt% or less on a substrate serving as a support, weather resistance to sulfur and chlorine is also improved while maintaining high reflectivity. A reflector which has been proposed has been proposed and known (for example, see JP-A-6-186407).
【０００５】[0005]
【発明が解決しようとする課題】しかし乍ら、この従来
の反射体においては、高い反射性が得られることは評価
試験等の結果から明らかにされているが、塩素、硫黄と
の反応による変色や白濁化等の耐候性においては必ずし
も十分とは言えず、実用化上未だに不十分であると言っ
た問題が残されている。即ち、Ｐｄ及びＡｕは高温高湿
の雰囲気中に長時間暴露されない限りでは塩素や硫黄と
反応し難い耐候性に優れた材料ではあるが、オゾンと呼
称される特定環境下で高温高湿の雰囲気中に暴露される
と、非金属元素と反応しその非金属元素の化合物を形成
する虞れがあると言われている。従って、例えば時間の
経過とともに温度が徐々に上昇し、雨の日等には温度に
加えて湿度も上昇すると言った厳しい環境下で使用され
るヘッドライトやフォグライト等の車両用灯具等に適用
された場合、高温高湿の雰囲気中に長時間暴露されるこ
ととなり、耐候性が急激に低下する可能性が高いことか
ら、更になる改善が望まれているのが現状である。However, although it has been clarified from the results of evaluation tests and the like that high reflectivity can be obtained with this conventional reflector, discoloration due to reaction with chlorine and sulfur has been clarified. However, there is a problem that it is not always sufficient in terms of weather resistance such as cloudiness and cloudiness, and is still insufficient for practical use. That is, Pd and Au are materials having excellent weather resistance that are unlikely to react with chlorine or sulfur unless exposed to a high-temperature and high-humidity atmosphere for a long time. It is said that if exposed to inside, there is a risk of reacting with the nonmetallic element to form a compound of the nonmetallic element. Therefore, for example, it is applied to vehicular lighting such as headlights and fog lights used in harsh environments where the temperature gradually rises with the passage of time and the humidity increases in addition to the temperature on rainy days. In such a case, the film is exposed to a high-temperature and high-humidity atmosphere for a long period of time, and there is a high possibility that the weather resistance will suddenly decrease. Therefore, at present, further improvement is desired.
【０００６】又、従来の反射体では前述したように、塩
素、硫黄と反応して塩化、硫化、酸化されることが懸念
されることから、当該反応により反射膜が基板から部分
的に浮いてしまう膜剥がれ現象が発生すると言った、接
合性（密着力）においても劣る課題があった。Further, as described above, in the conventional reflector, there is a concern that the reflector reacts with chlorine and sulfur to be chlorinated, sulfurized and oxidized. Therefore, the reflection film partially floats from the substrate by the reaction. There is a problem that the film peeling phenomenon occurs, and that the bonding property (adhesion force) is inferior.
【０００７】更には、前記特開平６−１８６４０７号に
関して、Ｐｄ若しくはＰｔが３０ｗｔ％添加された場合
にはＰｄ、Ｐｔ共に大変市場価格が不安定であること
と、コスト的に高いために、コスト的にＡｌ若しくはＡ
ｌ合金と比した場合においては、少なくとも適切な材料
であるとは検討し難いため、現実的とは考えられなかっ
た。[0007] Further, with respect to the above-mentioned JP-A-6-186407, when Pd or Pt is added in an amount of 30 wt%, the market prices of both Pd and Pt are very unstable. Al or A
In comparison with 1 alloy, it was difficult to consider that it was at least an appropriate material, and thus it was not considered realistic.
【０００８】本発明はこの様な従来事情に鑑みてなされ
たもので、その目的とする処は、Ａｇの優れた高反射率
の低下を抑制し、且つ高温高湿の厳しい環境下に暴露さ
れても安定した耐候性が継続的に得られ、更には接合性
が効果的に強化された実用化上の効果が大きく、高い信
頼性の反射体を提供することにある。The present invention has been made in view of such a conventional situation, and an object of the present invention is to suppress the decrease in the excellent high reflectivity of Ag and to expose the Ag under a severe environment of high temperature and high humidity. However, it is another object of the present invention to provide a highly reliable reflector in which stable weather resistance can be continuously obtained, and in which the bonding property is effectively enhanced, which has a great effect in practical use.
【０００９】[0009]
【課題を達成するための手段】課題を達成するために本
発明は、主成分となるＡｇに、耐食性向上を目的として
ＰｄかＡｕの内のいずれか、或いは両方を所定の範囲内
で添加し、更にＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、
Ｎｉ、Ｃｏ、Ｓｉこれらいずれか一種若しくは複数の選
択された元素を所定の範囲内で添加してなる合金反射膜
を、基板上に形成してなることである。又、上記Ａｕ、
Ｐｄの内のいずれか、或いは両方を０．５〜３．０ｗｔ
％の範囲内で添加し、更にＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃ
ｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれらいずれか一種若しく
は複数の選択された元素を０．１〜３．０ｗｔ％の範囲
内で添加してなることである。ここで、耐食性向上を目
的とするＰｄ、Ａｕの好ましい添加量は０．７〜２．３
ｗｔ％であり、特に好ましくは０．９ｗｔ％である。
又、Ａｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃ
ｏ、Ｓｉの内の１種類以上を添加する場合の好ましい添
加量としては０．５〜２．５ｗｔ％であり、特に好まし
くは１．０ｗｔ％である。In order to achieve the object, the present invention provides a method of adding one or both of Pd and Au in a predetermined range to Ag as a main component for the purpose of improving corrosion resistance. , And further, Al, Pt, Cu, Ta, Cr, Ti,
Ni, Co, Si One or a plurality of these selected elements are added within a predetermined range to form an alloy reflection film on a substrate. Also, the above Au,
Either or both of Pd are 0.5 to 3.0 wt.
%, Al, Pt, Cu, Ta, C
r, Ti, Ni, Co, Si One or more of these selected elements are added in the range of 0.1 to 3.0 wt%. Here, the preferable addition amount of Pd and Au for improving the corrosion resistance is 0.7 to 2.3.
wt%, particularly preferably 0.9 wt%.
Al, Pt, Cu, Ta, Cr, Ti, Ni, C
When one or more of o and Si are added, the preferable addition amount is 0.5 to 2.5 wt%, particularly preferably 1.0 wt%.
【００１０】又、本発明では上記Ａｇを主成分として、
それにＰｄを添加し、更に添加する元素が、Ａｌ、Ｐ
ｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれら
いずれかから選ばれたＣｕ又はＴｉであり、このＡｇＰ
ｄＣｕ合金反射膜又はＡｇＰｄＴｉ合金反射膜を、基板
上に形成することにより耐食性に富んで尚且つ反射率の
高い反射体を形成できるようにしたことである。又、基
板上に反射膜との接合性を向上させるために中間層とし
て酸化物や複合酸化物、若しくは窒化物の下地膜等を前
処理として施してなることである。In the present invention, the above-mentioned Ag is a main component,
Pd is added thereto, and the elements to be added are Al, P
t, Cu, Ta, Cr, Ti, Ni, Co, Si Cu or Ti selected from any of these, and AgP
By forming a dCu alloy reflective film or an AgPdTi alloy reflective film on a substrate, a reflector having high corrosion resistance and high reflectivity can be formed. Further, in order to improve the bonding property with the reflection film on the substrate, an oxide, a composite oxide, or a nitride base film or the like is applied as a pretreatment as an intermediate layer.
【００１１】更に、上記ＡｇＰｄＣｕ合金又はＡｇＰｄ
Ｔｉ合金以外では、Ａｇを主成分として、それにＡｕを
添加し、更に添加する元素が、Ａｌ、Ｐｔ、Ｃｕ、Ｔ
ａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれらいずれかから
選ばれたＣｕ又はＴｉであり、このＡｇＡｕＣｕ合金反
射膜又はＡｇＡｕＴｉ合金反射膜を、基板上に形成する
ことによりＡｇＰｄＣｕ合金及びＡｇＰｄＴｉ合金と同
様に耐食性に富んで尚且つ反射率の高い反射体を形成で
きることが確認されている。又、斯かる構成においても
前述と同様に基板上に反射膜との接合性を向上させるた
めに中間層として酸化物や複合酸化物、若しくは窒化物
の下地膜等を前処理として施してなることである。Further, the above AgPdCu alloy or AgPd
Other than Ti alloy, Ag is the main component, Au is added to it, and the elements to be added are Al, Pt, Cu, T
a, Cr, Ti, Ni, Co, Si Cu or Ti selected from any of these, the same as AgPdCu alloy and AgPdTi alloy by forming this AgAuCu alloy reflective film or AgAuTi alloy reflective film on a substrate It has been confirmed that a reflector having high corrosion resistance and high reflectivity can be formed. Also, in such a configuration, an oxide, a composite oxide, or a nitride base film or the like is provided as a pretreatment as an intermediate layer on the substrate as described above in order to improve the bonding property with the reflection film. It is.
【００１２】又、本発明では上記ＡｇＰｄＣｕ合金、Ａ
ｇＰｄＴｉ合金、ＡｇＡｕＣｕ合金、ＡｇＡｕＴｉ合金
の何れもがスパッタリングターゲット材料又は蒸着材料
であり、スパッタリング法又は蒸着法等の成膜プロセス
により、Ａｇを主成分として構成されるＡｇＰｄＸ、Ａ
ｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）合金からなる反射膜を、基
板上に形成してなることである。In the present invention, the above AgPdCu alloy, A
Each of gPdTi alloy, AgAuCu alloy, and AgAuTi alloy is a sputtering target material or a vapor deposition material, and AgPdX, A composed mainly of Ag by a film forming process such as a sputtering method or a vapor deposition method.
That is, a reflective film made of a gAuX (X = Cu, Ti) alloy is formed on a substrate.
【００１３】而して、斯かる技術的手段によれば、Ａｇ
にＰｄかＡｕの内のいずれか、或いは両方を０．１〜
３．０ｗｔ％の範囲内で添加し、更にＡｌ、Ｐｔ、Ｃ
ｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれらいずれ
か一種を０．１〜３．０ｗｔ％の範囲内で添加してなる
例えばＡｇＰｄＸ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）合金
からなる反射膜を、スパッタリング法又は蒸着法等の成
膜プロセスにより基板上に形成することで、高い反射率
を維持しながら、高温高湿の雰囲気においても塩化、硫
化、酸化による黒いシミの発生や白濁化を防止し、又、
反射膜が基板から部分的に浮くことを防止するために、
このＡｇを主成分として三元素以上からなる合金では、
耐候性が大幅に改善され、且つ基板との接合性が効果的
に強化されることがわかった。Thus, according to such technical means, Ag
0.1 or more of Pd or Au
Al is added within the range of 3.0 wt%, and further, Al, Pt, and C are added.
a reflective film made of, for example, an AgPdX or AgAuX (X = Cu, Ti) alloy obtained by adding any one of u, Ta, Cr, Ti, Ni, Co, and Si in a range of 0.1 to 3.0 wt%. Is formed on a substrate by a film forming process such as a sputtering method or a vapor deposition method. Prevent,
To prevent the reflective film from partially floating from the substrate,
In an alloy composed of three or more elements with Ag as a main component,
It was found that the weather resistance was significantly improved, and that the bondability with the substrate was effectively enhanced.
【００１４】[0014]
【発明の実施の形態】本発明の実施の具体例を図面に基
づいて説明する。図１は、本発明に係る反射体１の実施
形態の一例を示した断面図で、車両用灯具４用として使
用した例を示し、この実施形態においては、主成分とな
るＡｇに、耐食性向上を目的としてＰｄかＡｕの内のい
ずれか、或いは両方を添加し、更にＡｌ、Ｐｔ、Ｃｕ、
Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれらいずれか一
種を添加してなる三元素以上で構成されるＡｇ合金反射
膜を、周知の断面形状を呈し、灯体５内に収容保持され
る支持体となる基板２上に、スパッタリング法、蒸着法
による成膜プロセスにより所定膜厚（ｎｍ）にて成膜す
る。図において、６は光源、７は灯体５に着脱可能に装
着されるレンズである。ここで、ＡｇにＰｄを所定の添
加量で添加して溶融することにより、Ａｇ結晶に均質に
Ｐｄ若しくはＡｕを固溶させることができ、Ａｇ全体の
耐候性を向上させることは従来から知られている。しか
し、単にＡｇにＰｄを添加するだけでは高温高湿の雰囲
気中では塩素、硫黄に対する十分な耐候性が得られな
い。又、前記雰囲気中においても十分な耐候性が得られ
る程度までＰｄかＡｕの内のいずれかを添加するとＡｇ
の反射率が低下する。換言すれば、Ａｇの光学特性の低
下を招く。そこで、Ｐｄ若しくはＡｕの添加量を０．５
〜３．０ｗｔ％の範囲内に抑え、更に、第三元素として
Ａｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓ
ｉこれらいずれか一種の添加量を０．１〜３．０ｗｔ％
の範囲内に抑えることで、Ａｇの高反射率の低下を抑制
し、耐候性を効果的に改善することが可能となる。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing an example of an embodiment of a reflector 1 according to the present invention, showing an example in which the reflector 1 is used for a vehicular lamp 4. In this embodiment, Ag as a main component has improved corrosion resistance. For the purpose of adding one or both of Pd and Au, and further adding Al, Pt, Cu,
An Ag alloy reflective film composed of three or more elements obtained by adding any one of Ta, Cr, Ti, Ni, Co, and Si has a well-known cross-sectional shape, and is supported and held in the lamp body 5. A film having a predetermined thickness (nm) is formed on the substrate 2 serving as a body by a film forming process using a sputtering method or an evaporation method. In the figure, reference numeral 6 denotes a light source, and 7 denotes a lens which is detachably attached to the lamp body 5. Here, it has been known that Pd or Au can be homogeneously dissolved in Ag crystals by adding Pd to Ag in a predetermined addition amount and melting, thereby improving the weather resistance of Ag as a whole. ing. However, simply adding Pd to Ag does not provide sufficient weather resistance to chlorine and sulfur in a high-temperature, high-humidity atmosphere. Also, if either Pd or Au is added to such an extent that sufficient weather resistance can be obtained even in the above atmosphere, Ag
Reflectivity decreases. In other words, the optical characteristics of Ag are deteriorated. Therefore, the addition amount of Pd or Au is set to 0.5
To 3.0 wt%, and further, Al, Pt, Cu, Ta, Cr, Ti, Ni, Co, S
i 0.1% to 3.0% by weight of any one of these additives
, The reduction in the high reflectance of Ag can be suppressed, and the weather resistance can be effectively improved.
【００１５】従って、本発明においてはＡｇを主成分と
し、耐候性向上を目的としたＰｄかＡｕの内のいずれ
か、或いは両方の添加量を０．５〜３．０ｗｔ％の範囲
内に、更にＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎ
ｉ、Ｃｏ、Ｓｉこれらいずれか一種若しくは複数の選択
された元素の添加量を０．１〜３．０ｗｔ％の範囲内に
抑えることが本発明を成立させる上で重要である。その
理由は、Ｐｄ若しくはＡｕの添加量が０．５ｗｔ％以下
だと、高温高湿環境下では黄色に変色してしまい、反射
率を低下させる傾向や塩素に対して安定性が必ずしも高
くはないために、リフレクターとして長時間大気放置し
た場合での経時変化を検討した場合に安定性に欠けるか
らであり、３．０ｗｔ％を越えると、Ａｇの反射率の低
下が著しくなってしまうために実用的ではなくなるから
である。Therefore, in the present invention, Ag or Pd and / or Au for the purpose of improving the weather resistance are added in the range of 0.5 to 3.0 wt%. Further, Al, Pt, Cu, Ta, Cr, Ti, N
i, Co, Si It is important to suppress the addition amount of one or a plurality of the selected elements within the range of 0.1 to 3.0 wt% for realizing the present invention. The reason is that if the added amount of Pd or Au is 0.5 wt% or less, the color changes to yellow in a high-temperature and high-humidity environment, and the reflectivity tends to decrease and the stability to chlorine is not always high. For this reason, stability is lacking when a change over time when the reflector is left in the air for a long period of time is lacking in stability. When the content exceeds 3.0 wt%, the reflectivity of Ag is remarkably reduced, so that it is practically used. This is because it is no longer a target.
【００１６】又、Ａｇを主成分として第２の添加元素と
してＰｄを添加する場合にはＰｄの水素融解能力に対し
ての材料本質的な安定性に欠けてしまうために、更に添
加するＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃ
ｏ、Ｓｉの添加量が０．１ｗｔ％以下の場合には、例え
ば高温高湿下で放置した場合では、ＡｇにＰｄのみを添
加した２元合金で生じていた黒色の励起物の発生が確認
されてしまい、材料としての耐候性が不安定になってし
まうからであり、３．０ｗｔ％を越えると、添加物の影
響を大きく受けてしまうために、例えばＡｌ、Ｃｕ、Ｓ
ｉでは酸素と結合し易くなって、Ａｇの酸素に対しての
安定性を損なってしまったり、Ｐｔ、Ｔａ、Ｃｒについ
ては膜にした際の内部応力が顕著に大きくなるために合
成樹脂製の基板に対しての密着性が極端に低下してしま
ったり、更にはＡｕ、Ｔｉ、Ｎｉ、Ｃｏについては反射
率が大きく低下する等の本発明によって得ようとする効
果が損なわれてしまうからである。この様に、ＰｄかＡ
ｕの内のいずれか、或いは両方を０．５〜３．０ｗｔ％
の範囲内で添加し、更にＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃ
ｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉを０．１〜３．０ｗｔ％の
範囲内で添加して溶融することで、金属元素の中で最も
優れた高反射率を有するＡｇの特性が維持され、尚且
つ、耐候性が効果的に改善されたＡｇ合金を得ることが
できる。ここで、Ｐｄ、Ａｕの内のいずれか、或いは両
方の好ましい添加量は０．７〜２．３ｗｔ％であり、特
に好ましくは０．９ｗｔ％である。又、更に添加する元
素の好ましい添加量は０．５〜２．５ｗｔ％であり、特
に好ましくは１．０ｗｔ％である。この様にして得られ
たＡｇ合金は前述した反射膜３の成膜に使用するスパッ
タリングターゲット材料又は蒸着材料として適用される
ものである。Further, when Pd is added as a second additive element with Ag as a main component, the material inherent stability with respect to the hydrogen melting ability of Pd is lacking. Pt, Cu, Ta, Cr, Ti, Ni, C
When the addition amount of o and Si is 0.1 wt% or less, for example, when left under high temperature and high humidity, the generation of black excitable substances generated in the binary alloy in which only Pd is added to Ag is confirmed. This is because the weather resistance of the material becomes unstable. When the content exceeds 3.0 wt%, the influence of the additive is greatly affected, and thus, for example, Al, Cu, S
In the case of i, it is easy to bond with oxygen, and the stability of Ag to oxygen is impaired, and the internal stress of Pt, Ta, and Cr when formed into a film is significantly increased. This is because the effects to be obtained by the present invention such as the adhesiveness to the substrate is extremely reduced, and the reflectance of Au, Ti, Ni, and Co is greatly reduced, and the like. is there. Like this, Pd or A
0.5% to 3.0% by weight of one or both of u
And Al, Pt, Cu, Ta, C
By adding and melting r, Ti, Ni, Co, and Si in the range of 0.1 to 3.0 wt%, the characteristics of Ag having the highest reflectance among the metal elements are maintained, In addition, an Ag alloy having effectively improved weather resistance can be obtained. Here, a preferable addition amount of either or both of Pd and Au is 0.7 to 2.3 wt%, particularly preferably 0.9 wt%. Further, the preferable addition amount of the element to be further added is 0.5 to 2.5 wt%, particularly preferably 1.0 wt%. The Ag alloy thus obtained is applied as a sputtering target material or a vapor deposition material used for forming the above-mentioned reflective film 3.
【００１７】実施例 純Ａｇに対し、第二元素のＰｄかＡｕの内のいずれか、
或いは両方を０．５〜３．０ｗｔ％の範囲内で添加し、
更にＣｕ又はＴｉを０．１〜３．０ｗｔ％の範囲内で添
加してなるＡｇＰｄＸ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）
合金からなる所定膜厚（ｎｍ）の反射膜３を、支持体と
なる基板２の表面にスパッタリング法又は蒸着法による
成膜プロセスにより成膜し、車両用灯具４に適用される
反射体１を得る（図１参照）。ここで、前記ＡｇＰｄ合
金、ＡｇＡｕ合金、或いはＡｇＰｄＡｕ合金に、更に追
加元素としてＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎ
ｉ、Ｃｏ、Ｓｉこれらの各金属元素中からＣｕ又はＴｉ
を選んだ理由としては、大気中の塩素や硫黄に対するＡ
ｇの耐候性が得られるまでＰｄ又はＡｕのみを添加させ
た場合に比べて、Ａｇの高反射率の低下を効果的に抑制
し、しかも、例えば温度６００℃で湿度が１００％の高
温高湿の厳しき環境下において長期に亘り高い信頼性が
得られる耐候性を効果的に改善する上で、Ｃｕ又はＴｉ
が添加する元素として本発明に対して特に有効な金属元
素であることが確認できるからである。因みに、基板２
は、主に金属、合成樹脂等から形成されている。EXAMPLE For pure Ag, either of the second element Pd or Au,
Alternatively, both are added within the range of 0.5 to 3.0 wt%,
Further, AgPdX and AgAuX (X = Cu, Ti) obtained by adding Cu or Ti in a range of 0.1 to 3.0 wt%.
A reflective film 3 of a predetermined thickness (nm) made of an alloy is formed on a surface of a substrate 2 serving as a support by a film forming process by a sputtering method or a vapor deposition method, and a reflector 1 applied to a vehicle lamp 4 is formed. (See FIG. 1). Here, Al, Pt, Cu, Ta, Cr, Ti, and N are further added to the AgPd alloy, AgAu alloy, or AgPdAu alloy.
i, Co, Si Cu or Ti
The reason for choosing was that A for chlorine and sulfur in the atmosphere
As compared with the case where only Pd or Au is added until the weather resistance of g is obtained, a decrease in the high reflectivity of Ag is effectively suppressed, and furthermore, for example, high temperature and high humidity at a temperature of 600 ° C. and a humidity of 100%. In order to effectively improve the weather resistance, which can provide high reliability for a long time under severe environment of Cu or Ti, Cu or Ti
Is a metal element that is particularly effective for the present invention as an element to be added. By the way, substrate 2
Is mainly formed of metal, synthetic resin, or the like.
【００１８】次に、スパッタリングターゲット材料又は
蒸着材料について説明する。スパッタリングターゲット
材料又は蒸着材料としてはＣｕやＴｉをＡｇに添加する
場合には、ＣｕやＴｉをＡｇに完全に固溶させることが
困難である。従って、部分的にＣｕ或いはＴｉの組成が
変動するため、そのスパッタリングターゲットを用いて
形成されたＡｇＣｕ合金、或いはＡｇＴｉ合金において
も、Ｃｕ或いはＴｉの組成が変動し、安定した光学特性
を得ることができない。Next, a sputtering target material or a vapor deposition material will be described. When Cu or Ti is added to Ag as a sputtering target material or a vapor deposition material, it is difficult to completely dissolve Cu or Ti in Ag. Therefore, since the composition of Cu or Ti partially fluctuates, even in an AgCu alloy or an AgTi alloy formed using the sputtering target, the composition of Cu or Ti fluctuates and stable optical characteristics can be obtained. Can not.
【００１９】そこで、Ａｇを主成分として、ＰｄかＡｕ
の内のいずれか、或いは両方を添加してなる合金に対し
てＣｕ或いはＴｉを添加すると、Ｃｕ或いはＴｉは比較
的容易に固溶することが分かった。これは、Ｐｄ及びＡ
ｕがＡｇ、Ｃｕ、Ｔｉの夫々の原子と固溶することが確
認されている。従って、Ｐｄ及びＡｕが、固溶助剤とし
ての作用を起して、固溶し難いＡｇとＣｕ或いはＴｉに
対して夫々の元素と１次固溶反応を起しその後の残りの
１元素と２次固溶反応を起して結合させることで、これ
らのＡｇを主成分として更に添加する元素間で完全固溶
体を作ることが可能になったものと考えられる。Therefore, Ag is used as a main component and Pd or Au is used.
It has been found that when Cu or Ti is added to an alloy obtained by adding one or both of them, Cu or Ti is relatively easily dissolved. This is Pd and A
It has been confirmed that u forms a solid solution with each of Ag, Cu, and Ti atoms. Therefore, Pd and Au act as solid-solution aids to cause a primary solid-solution reaction between Ag and Cu or Ti, which are hard to form a solid solution, with the respective elements, and with the remaining one element thereafter. It is considered that a complete solid solution can be formed between the elements further containing Ag as a main component by causing a secondary solid solution reaction and binding.
【００２０】次に、本実施例詳述にて得られた例えばＡ
ｇＰｄＸ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）合金からなる
反射膜３を基板２上に成膜してなる本発明の反射体１
（以後、本発明品）と、ＡｇＰｄ合金反射膜を成膜して
なる従来の反射体（以後、従来品）について行った反射
率、耐候性の評価測定の実験結果を以下に説明する。Next, for example, A
Reflector 1 of the present invention in which reflective film 3 made of gPdX, AgAuX (X = Cu, Ti) alloy is formed on substrate 2
Experimental results of evaluation and measurement of reflectance and weather resistance performed on (hereinafter, the present invention) and a conventional reflector (hereinafter, a conventional product) formed by forming an AgPd alloy reflective film will be described below.
【００２１】まず、反射率の評価測定について説明する
と、ここでは平滑な表面を有するガラス基板上に、各組
成の合金反射膜をスパッタリング法又は蒸着法により成
膜して作製した試料を用いた。膜厚はいずれも１２ｎｍ
であり、用いた波長域は４００〜８００ｎｍである。こ
こで、これらの波長域を選んだ理由は、照明機器類や車
両用灯具等、特にヘッドライトやフォグライト等の車両
用灯具４に適用される光源６から照射される波長が一般
的に４００〜８００ｎｍの範囲とされているからであ
る。試験結果を表１に示す。First, the evaluation and measurement of the reflectance will be described. Here, a sample prepared by forming an alloy reflection film of each composition on a glass substrate having a smooth surface by a sputtering method or a vapor deposition method was used. Each film thickness is 12 nm
And the wavelength range used is 400 to 800 nm. Here, the reason for selecting these wavelength ranges is that the wavelength radiated from the light source 6 applied to the vehicle lighting device 4 such as lighting equipment and vehicle lighting devices, especially headlights and fog lights, is generally 400 wavelengths. This is because the range is set to about 800 nm. Table 1 shows the test results.
【００２２】[0022]
【表１】 [Table 1]
【００２３】表１から明らかなように、本発明品は従来
品と同じく高い反射率を示していることが分かる。即
ち、ＰｄかＡｕの内のいずれか、或いは両方を０．５〜
３．０ｗｔ％の範囲内で添加し、更にＣｕ又はＴｉを
０．１〜３．０ｗｔ％の範囲内で添加してなるＡｇを主
成分とするＡｇＰｄＸ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）
合金からなる反射膜３を基板２上に成膜して形成した本
発明品であっても純Ａｇの優れた高反射率を維持し、低
電力コストで高照度の反射体１が得られることが分か
る。As is clear from Table 1, it can be seen that the product of the present invention shows a high reflectance like the conventional product. That is, one or both of Pd and Au are 0.5 to
AgPdX, AgAuX (X = Cu, Ti) containing Ag as a main component, which is added within a range of 3.0 wt% and further Cu or Ti is added within a range of 0.1 to 3.0 wt%.
Even in the case of the present invention in which the reflective film 3 made of an alloy is formed on the substrate 2, it is possible to maintain the excellent high reflectivity of pure Ag and obtain the reflector 1 with high illuminance at low power cost. I understand.
【００２４】次に、耐薬品性から見た耐候性の評価測定
について説明すると、ここでは石英ガラス基板上に、各
組成の合金反射膜をスパッタリング法又は蒸着法により
成膜して作製した試料を用いた。膜厚はいずれも１２ｎ
ｍである。この評価試験では、１％Ｈ2ＳＯ4、３％Ｎａ
Ｃｌ、１％ＫＯＨこれらの溶液を各試料に滴らして１０
分経過後、又は３０分経過後に、目視により観察したも
のである。その試験結果を表２に示す。Next, the evaluation and measurement of weather resistance from the viewpoint of chemical resistance will be described. Here, a sample prepared by forming an alloy reflection film of each composition on a quartz glass substrate by a sputtering method or a vapor deposition method is described. Using. Each film thickness is 12n
m. In this evaluation test, 1% H 2 SO 4 , 3% Na
Cl, 1% KOH These solutions were dripped onto each sample to give 10%.
After a lapse of minutes or 30 minutes, it was visually observed. Table 2 shows the test results.
【００２５】[0025]
【表２】 [Table 2]
【００２６】従来品ではＰｄの添加量によらず、薬液を
滴らしてから１０分経過した時点でＡｇＰｄ合金反射膜
及びＡｇＡｕ合金反射膜の衰失、白濁化が観察され、こ
れにより各薬液と反応していることが確認された。対照
的に、本発明品では薬液を滴らしてから１０分後、３０
分後においても全く反応による変色が認められなかっ
た。これにより、Ａｇを主成分としてＰｄかＡｕの内の
いずれか、或いは両方を添加し、更にＣｕ又はＴｉを添
加するにより、耐候性が大幅に改善されていることが分
かる。In the conventional product, the AgPd alloy reflective film and the AgAu alloy reflective film were observed to be lost and clouded at 10 minutes after the drop of the chemical solution, regardless of the amount of Pd added. Reaction was confirmed. In contrast, in the case of the product of the present invention, 30 minutes after dropping the drug solution,
Even after minutes, no discoloration due to the reaction was observed. This indicates that the weather resistance is significantly improved by adding one or both of Pd and Au containing Ag as a main component, and further adding Cu or Ti.
【００２７】更に、長期信頼性の評価試験として、高温
高湿の厳しい環境下で行った耐候性の評価測定について
説明すると、ここでは前述した石英ガラス基板上に、各
組成の合金反射膜をスパッタリング法又は蒸着法により
成膜して作製した試料を用い、温度６００℃で湿度１０
０％の高温高湿の空気雰囲気中に２４時間暴露した後、
目視により観察したものである。試験結果は表３に示
す。Further, as an evaluation test of long-term reliability, an evaluation measurement of weather resistance performed in a severe environment of high temperature and high humidity will be described. Here, an alloy reflecting film of each composition is formed by sputtering on a quartz glass substrate described above. Using a sample prepared by film formation by the vapor deposition method or evaporation method, at a temperature of 600 ° C. and a humidity of 10
After exposure to 0% high temperature and high humidity air atmosphere for 24 hours,
Observed visually. The test results are shown in Table 3.
【００２８】[0028]
【表３】 [Table 3]
【００２９】従来品では黒いシミの発生が確認された。
この黒いシミの発生は、顕微鏡による観察の結果、各薬
品と反応して塩化、硫化、酸化していることが確認され
た。又、ＡｇＰｄ合金反射膜及びＡｇＡｕ合金反射膜が
基板から部分的に浮いている膜剥がれが確認された。こ
れは、ＡｇＰｄ合金反射膜及びＡｇＡｕ合金反射膜と基
板との密着力が弱いことと、当該反射膜が部分的に腐蝕
されて白濁化する酸化現象に起因しているものと考察さ
れる。In the conventional product, occurrence of black spots was confirmed.
Observation with a microscope confirmed that the occurrence of the black spots was chlorinated, sulfurized, and oxidized in response to each chemical. Further, it was confirmed that the AgPd alloy reflective film and the AgAu alloy reflective film were partially separated from the substrate and peeled off. This is considered to be due to the weak adhesion between the AgPd alloy reflective film and the AgAu alloy reflective film and the substrate, and the oxidation phenomenon in which the reflective films are partially corroded and become cloudy.
【００３０】対照的に、本発明品ではこの様な厳しい高
温高湿の環境下においても、何ら変化は観測されなかっ
た。又、これらの試験に加えて温度７５０℃で、湿度が
１００％の更に厳しい酸素雰囲気中に２４時間放置した
試験を更に行ったところ、この厳しい条件下においても
何ら変化がなく、耐候性が格段に改善されていることが
分かった。又、基板からの膜剥がれも全く観察されなか
った。この様に、ＡｇＰｄ、或いはＡｇＡｕ若しくはＡ
ｇＰｄＡｕの内のいずれかの合金に、更にＣｕ又はＴｉ
を添加することにより、耐候性が格段に改善され、且つ
基盤との接合性が効果的に強化されることが分かった。In contrast, no change was observed in the product of the present invention even under such a severe high temperature and high humidity environment. Further, in addition to these tests, when a test was further performed in which the sample was left for 24 hours in a more severe oxygen atmosphere at a temperature of 750 ° C. and a humidity of 100%, there was no change even under these severe conditions, and the weather resistance was remarkably improved. Has been improved. Also, no peeling of the film from the substrate was observed. Thus, AgPd, or AgAu or A
gPdAu may be further alloyed with Cu or Ti
It has been found that the addition of C significantly improves the weather resistance and effectively enhances the bondability with the substrate.
【００３１】以上の試験結果から明らかなように、Ａｇ
を主成分として、ＰｄかＡｕの内のいずれか、或いは両
方を０．１〜３．０ｗｔ％の範囲で、更にＣｕ又はＴｉ
を０．１〜３．０ｗｔ％の範囲で添加させたＡｇＰｄ
Ｘ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）合金からなる反射膜
３を基板２上に成膜してなることにより、高い反射率を
維持しながら、尚且つ、温度６００℃で湿度１００％と
いう高温高湿の厳しい環境下においても、塩素、硫黄と
反応する虞れがない安定した耐候性が確認され、これに
より、厳しい環境下で使用される車両用灯具４に適用し
ても長期に亘り高い信頼性が得られることが分かる。As is clear from the above test results, Ag
With Pd or Au as the main component, or both in the range of 0.1 to 3.0 wt%, and further Cu or Ti
AgPd added in the range of 0.1 to 3.0 wt%
By forming a reflective film 3 made of an X, AgAuX (X = Cu, Ti) alloy on the substrate 2, high reflectivity is maintained, and a high temperature of 600 ° C. and a humidity of 100% is maintained. Stable weather resistance has been confirmed that does not have a risk of reacting with chlorine and sulfur even in a severe humid environment. Therefore, even when the present invention is applied to a vehicular lamp 4 used in a severe environment, high reliability is maintained for a long time. It can be seen that the property can be obtained.
【００３２】図２は、車両用灯具４用として使用した場
合の本発明反射体１の他の実施例を示し、斯かる実施例
では支持体となる基板２と、反射膜３との接合性を強化
するために、基板２上に、前処理として有機下地膜８を
形成し、その上に前述した実施例詳述の０．５〜３．０
ｗｔ％のＰｄかＡｕの内のいずれか、或いは両方、及び
０．１〜３．０ｗｔ％のＣｕ又はＴｉを添加するＡｇを
主成分とするＡｇＰｄＸ、ＡｇＡｕＸ（Ｘ＝Ｃｕ、Ｔ
ｉ）合金からなる反射膜３を成膜して形成した反射体１
の実施形態の一例を示す。尚、斯かる実施例では基板２
上に有機下地膜８を形成し、この上にＡｇＰｄＸ、Ａｇ
ＡｕＸ（Ｘ＝Ｃｕ、Ｔｉ）合金からなる反射膜３を成膜
した以外の構成、即ち、Ａｇを主成分とし、Ｐｄ及び／
又はＡｕを０．５〜３．０ｗｔ％の範囲内で添加し、更
に第３元素としてＡｌ、Ｐｔ、Ｔａ、Ｃｒ、Ｎｉ、Ｃ
ｏ、Ｓｉの内のいずれか一種以上を０．１〜３．０ｗｔ
％の範囲内で添加してなる場合にも適用する。FIG. 2 shows another embodiment of the reflector 1 of the present invention when used for a vehicle lamp 4. In this embodiment, the bonding property between the substrate 2 serving as a support and the reflection film 3 is shown. In order to reinforce, an organic base film 8 is formed on the substrate 2 as a pretreatment, and the organic base film 8 is formed thereon.
AgPdX, AgAuX (X = Cu, T) containing Ag as a main component to which either or both of Pd and Au of wt% or both and 0.1 to 3.0 wt% of Cu or Ti are added.
i) Reflector 1 formed by forming reflective film 3 made of an alloy
1 shows an example of the embodiment. In this embodiment, the substrate 2
An organic base film 8 is formed thereon, and AgPdX, Ag
A configuration other than the formation of the reflective film 3 made of an AuX (X = Cu, Ti) alloy, that is, Pd and / or
Alternatively, Au is added within a range of 0.5 to 3.0 wt%, and Al, Pt, Ta, Cr, Ni, and C are further added as a third element.
0.1 to 3.0 wt% of at least one of o and Si
The same applies to the case where it is added within the range of%.
【００３３】尚、前述した実施例詳述においては車両用
灯具のリフレクターについて説明したが、本発明は屋
外、屋内照明機器類、レーザー機器を含む光学機器の平
面鏡や曲面鏡等に使用される反射体、そして多種多様の
分野に使用されている各種の反射体をも対称としている
ことは言うまでもないであろう。Although the reflector of the vehicular lamp has been described in the above embodiment, the present invention is applied to a reflector used for a plane mirror or a curved mirror of an optical device including an outdoor device, an indoor lighting device, and a laser device. It goes without saying that the body, and also the various reflectors used in a wide variety of fields, are symmetrical.
【００３４】[0034]
【発明の効果】本発明の反射体は叙上の如く構成してな
ることから下記の作用効果を奏する。反射膜を、耐候性
の向上を目的としてＰｄかＡｕの内のいずれか、或いは
両方を０．５〜３．０ｗｔ％の範囲内で添加し、更にＡ
ｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉ
これらいずれか一種若しくは複数の選択された元素を
０．１〜３．０ｗｔ％の範囲内で添加してなるＡｇを主
成分とする三元素以上にて構成される合金を用いて、ス
パッタリング法又は蒸着法により基板上に形成してなる
ことで、従来品と変わらぬ高い反射率を維持しながら、
温度６００℃で湿度１００％の高温高湿と言う厳しい環
境下において長時間暴露されても硫化、塩化、酸化する
虞れがない耐候性が改善され、且つ基板との接合性がよ
り一層効果的に強化された高い信頼性が得られる。Since the reflector of the present invention is constituted as described above, the following effects can be obtained. For the purpose of improving the weather resistance, one or both of Pd and Au, or both, are added within a range of 0.5 to 3.0 wt% to improve the weather resistance.
1, Pt, Cu, Ta, Cr, Ti, Ni, Co, Si
A sputtering method or an alloy comprising three or more elements containing Ag as a main component obtained by adding any one or a plurality of selected elements in a range of 0.1 to 3.0 wt%. By forming on the substrate by vapor deposition method, while maintaining a high reflectance similar to conventional products,
Even if exposed for a long time in a severe environment of a high temperature and a high humidity of 100% humidity at a temperature of 600 ° C., the weather resistance is improved without fear of sulfurization, salification, or oxidation, and the bondability with the substrate is more effective. High reliability is obtained.
【００３５】従って、本発明によれば、低電力コストで
高照度が望まれている屋外、屋内照明機器類や車両用灯
具、特に、厳しい環境下で使用される車両用灯具として
適用しても長期に亘り高い信頼性が得られ、実用化上の
効果が大きい反射体を提供することができる。Therefore, according to the present invention, the present invention can be applied to outdoor and indoor lighting equipment and vehicle lamps for which low power cost and high illuminance are desired, particularly to vehicle lamps used in severe environments. It is possible to provide a reflector which has high reliability over a long period of time and has a large effect in practical use.
【図１】 本発明反射体の実施形態の一例を示した断面
図で、車両用灯具に使用した例を示すFIG. 1 is a cross-sectional view showing an example of an embodiment of a reflector of the present invention, showing an example of use in a vehicle lamp.
【図２】 同反射体の他の実施形態を示した部分拡大図FIG. 2 is a partially enlarged view showing another embodiment of the reflector.
１：反射体 ２：基板 ３：反射膜 ４：車両用灯具 ８：有機下地膜 1: Reflector 2: Substrate 3: Reflective film 4: Vehicle lamp 8: Organic base film
Claims (9)
れか、或いは両方を添加し、更にＡｌ、Ｐｔ、Ｃｕ、Ｔ
ａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃｏ、Ｓｉこれらいずれか一種
若しくは複数の選択された元素を添加してなる合金反射
膜を、基板上に形成してなることを特徴とする反射体。1. A method according to claim 1, wherein one or both of Au and Pd are added to Ag as a main component, and further, Al, Pt, Cu, and T are added.
a, Cr, Ti, Ni, Co, Si A reflector comprising an alloy reflecting film formed by adding one or more of these selected elements on a substrate.
或いは両方を０．５〜３．０ｗｔ％の範囲内で添加し、
更にＡｌ、Ｐｔ、Ｃｕ、Ｔａ、Ｃｒ、Ｔｉ、Ｎｉ、Ｃ
ｏ、Ｓｉこれらいずれか一種若しくは複数の選択された
元素を０．１〜３．０ｗｔ％の範囲内で添加してなるこ
とを特徴とする反射体。2. Any of Au and Pd according to claim 1,
Alternatively, both are added within the range of 0.5 to 3.0 wt%,
Further, Al, Pt, Cu, Ta, Cr, Ti, Ni, C
o, Si A reflector characterized by adding one or more of these selected elements in a range of 0.1 to 3.0 wt%.
で、第三元素がＣｕであり、ＡｇＰｄＣｕ合金反射膜
を、基板上に形成してなることを特徴とする反射体。3. The method according to claim 1, wherein the second element is Pd.
Wherein the third element is Cu, and an AgPdCu alloy reflective film is formed on the substrate.
で、第三元素がＴｉであり、ＡｇＰｄＴｉ合金反射膜
を、基板上に形成してなることを特徴とする反射体。4. The method according to claim 1, wherein the second element is Pd.
A reflector wherein the third element is Ti and an AgPdTi alloy reflection film is formed on a substrate.
で、第三元素がＣｕであり、ＡｇＡｕＣｕ合金反射膜
を、基板上に形成してなることを特徴とする反射体。5. The method according to claim 1, wherein the second element is Au.
Wherein the third element is Cu, and an AgAuCu alloy reflective film is formed on the substrate.
で、第三元素がＴｉであり、ＡｇＡｕＴｉ合金反射膜
を、基板上に形成してなることを特徴とする反射体。6. The method according to claim 1, wherein the second element is Au.
Wherein the third element is Ti, and an AgAuTi alloy reflective film is formed on the substrate.
上に、反射膜の接合性を強化する前処理として下地にＴ
ｉＯ2、ＳｉＯ2、Ａｌ2Ｏ3、ＳｉＮ、ＴｉＮ、及びＩｎ
2Ｏ3を主成分とする複合酸化物を主成分とする複合酸化
物を施してなることを特徴とする反射体。7. A substrate as claimed in claim 1, wherein a pre-treatment for strengthening the bonding property of the reflection film is performed on the substrate as a base.
iO 2 , SiO 2 , Al 2 O 3 , SiN, TiN, and In
A reflector characterized by applying a composite oxide mainly composed of 2 O 3 .
金、ＡｇＰｄＴｉ合金、ＡｇＡｕＣｕ合金、ＡｇＡｕＴ
ｉ合金がスパッタリングターゲット材料であり、スパッ
タリング法により反射膜を基板上に形成してなることを
特徴とする反射体。8. The AgPdCu alloy, AgPdTi alloy, AgAuCu alloy, AgAuT according to claim 3
A reflector, wherein the i-alloy is a sputtering target material, and a reflection film is formed on a substrate by a sputtering method.
金、ＡｇＰｄＴｉ合金、ＡｇＡｕＣｕ合金、ＡｇＡｕＴ
ｉ合金が蒸着材料であり、蒸着法により反射膜を基板上
に形成してなることを特徴とする反射体。9. The AgPdCu alloy, AgPdTi alloy, AgAuCu alloy, AgAuT according to claim 3.
A reflector, wherein the i-alloy is an evaporation material, and a reflection film is formed on a substrate by an evaporation method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000359770A JP4632519B2 (en) | 1999-11-26 | 2000-11-27 | Reflector |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33645299 | 1999-11-26 | ||
| JP11-336452 | 1999-11-26 | ||
| JP2000359770A JP4632519B2 (en) | 1999-11-26 | 2000-11-27 | Reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001221908A true JP2001221908A (en) | 2001-08-17 |
| JP4632519B2 JP4632519B2 (en) | 2011-02-16 |
Family
ID=26575476
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000359770A Expired - Lifetime JP4632519B2 (en) | 1999-11-26 | 2000-11-27 | Reflector |
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| Country | Link |
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Cited By (4)
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| WO2005056851A1 (en) * | 2003-12-10 | 2005-06-23 | Tanaka Kikinzoku Kogyo K.K. | Silver alloy excelling in performance of reflectance maintenance |
| US7014979B2 (en) | 2002-07-03 | 2006-03-21 | Samsung Electronics Co., Ltd. | Organometallic precursor mixture for forming metal alloy pattern and method of forming metal alloy pattern using the same |
| US7883838B2 (en) | 2002-11-25 | 2011-02-08 | Samsung Electronics Co., Ltd. | Organometallic composition for forming a metal alloy pattern and a method of forming such a pattern using the composition |
| JP5975186B1 (en) * | 2015-02-27 | 2016-08-23 | 三菱マテリアル株式会社 | Ag alloy sputtering target and method for producing Ag alloy film |
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| JP4632519B2 (en) | 2011-02-16 |
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