JP2001125649A - Fluid flow rate control equipment - Google Patents
Fluid flow rate control equipmentInfo
- Publication number
- JP2001125649A JP2001125649A JP30572299A JP30572299A JP2001125649A JP 2001125649 A JP2001125649 A JP 2001125649A JP 30572299 A JP30572299 A JP 30572299A JP 30572299 A JP30572299 A JP 30572299A JP 2001125649 A JP2001125649 A JP 2001125649A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- solenoid valve
- flow rate
- liquid flow
- pneumatic valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、例えば半導体プ
ロセスで使われるフッ化水素酸（ＨＦ）などの薬液を含
む液体の流量を制御する液体流量制御機器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid flow control device for controlling a flow rate of a liquid containing a chemical such as hydrofluoric acid (HF) used in a semiconductor process.
【０００２】[0002]
【先行の技術】この種の液体流量制御機器として、本出
願人は、図４に示すものを試作した。図４において、例
えばテフロンなどの樹脂製の本体ブロック４１内に、例
えばフッ化水素酸などの液体が流れる液体流路４２と圧
力センサ４３，４３が設けられている。４４は、本体ブ
ロック４１の上面側を覆う箱状のケースで、例えばテフ
ロンなどの樹脂よりなる。そして、このケース４４の内
面には、ソレノイドバルブ４５と空圧バルブ４６とが液
体流路４２に対して並列的に配置されており、かつ、圧
力センサ４３，４３の下流側に空圧バルブ４６が位置し
ている。なお、ソレノイドバルブ４５は圧力センサ４
３，４３の直上に縦置きされている。また、４７は、液
体入口側の接続部材で、上流には加圧用ガスで圧送され
る薬液（例えばＨＦ）Ｅのタンクが設けられている。４
８は、液体出口側の接続部材で、流量調整されたフッ化
水素酸が接続部材４８の下流において例えば純水で希釈
され、ＨＦ溶液としてウエハ洗浄やエッチング工程で広
く使われる。なお、５０は、空圧バルブ４６を駆動する
駆動用ガス（例えば空気）Ａが外部からソレノイドバル
ブ４５へ導入される駆動用ガス導入路である。また、５
１は、ソレノイドバルブ４５を通った駆動用ガスの導出
路である。なお、本体ブロック４１は、センサブロック
４１ａ、弁ブロック４１ｂおよび空圧バルブブロック４
１ｃより構成される。2. Description of the Related Art As a liquid flow control device of this type, the present applicant has made a prototype shown in FIG. In FIG. 4, a liquid flow path 42 through which a liquid such as hydrofluoric acid flows and pressure sensors 43 and 43 are provided in a main body block 41 made of a resin such as Teflon. A box-shaped case 44 covers the upper surface side of the main body block 41 and is made of, for example, a resin such as Teflon. On the inner surface of the case 44, a solenoid valve 45 and a pneumatic valve 46 are arranged in parallel with the liquid flow path 42, and a pneumatic valve 46 is provided downstream of the pressure sensors 43, 43. Is located. The solenoid valve 45 is connected to the pressure sensor 4
It is placed vertically just above 3,43. Reference numeral 47 denotes a connection member on the liquid inlet side, and a tank for a chemical (for example, HF) E which is pumped by a pressurizing gas is provided upstream. 4
Reference numeral 8 denotes a connection member on the liquid outlet side. Hydrofluoric acid whose flow rate has been adjusted is diluted, for example, with pure water downstream of the connection member 48, and is widely used as a HF solution in wafer cleaning and etching processes. Reference numeral 50 denotes a drive gas introduction passage through which a drive gas (for example, air) A for driving the pneumatic valve 46 is introduced from the outside to the solenoid valve 45. Also, 5
Reference numeral 1 denotes an outgoing path of the driving gas passing through the solenoid valve 45. The main body block 41 includes a sensor block 41a, a valve block 41b, and a pneumatic valve block 4.
1c.
【０００３】動作は以下の通りである。すなわち、駆動
用ガスＡを導入路５０、ソレノイドバルブ４５、導出路
５１を介して空圧バルブ４６へ流し込む。そして、圧力
センサ４３，４３からの液体流量測定信号（センサ出
力）と液体流量設定信号とを比較し、この比較結果に基
づいて空圧バルブ４６の開度を制御する。この場合、空
圧バルブ４６を開く際はソレノイドバルブ４５が開き、
駆動用ガスＡが空圧バルブ４６に流れる一方、ソレノイ
ドバルブ４５が閉じ、空圧バルブ４６内の駆動用ガスＡ
が、ソレノイドバルブ４５および空圧バルブ４６間に設
けた逃がし弁４９からケース４４内の空間Ｓに流れ出る
ことで空圧バルブ４６が閉じたり、空圧バルブ４６が閉
じた状態でもソレノイドバルブ４５に電圧をかけてわず
かに開いた状態に保ちながら、逃がし弁４９からケース
４４内に流れ出る駆動用ガスＡによってケース４４内部
をバージしている。つまり、ケース４４と本体ブロック
４１との隙間などからケース４４内にＨＦガスなどが侵
入するのを防止している。The operation is as follows. That is, the driving gas A flows into the pneumatic valve 46 via the introduction path 50, the solenoid valve 45, and the derivation path 51. Then, the liquid flow rate measurement signal (sensor output) from the pressure sensors 43, 43 is compared with the liquid flow rate setting signal, and the opening of the pneumatic valve 46 is controlled based on the comparison result. In this case, when opening the pneumatic valve 46, the solenoid valve 45 opens,
While the driving gas A flows through the pneumatic valve 46, the solenoid valve 45 closes, and the driving gas A in the pneumatic valve 46 is closed.
Flows out of the relief valve 49 provided between the solenoid valve 45 and the pneumatic valve 46 into the space S in the case 44, thereby closing the pneumatic valve 46 or applying a voltage to the solenoid valve 45 even when the pneumatic valve 46 is closed. The inside of the case 44 is barged by the driving gas A flowing out of the relief valve 49 into the case 44 while keeping it slightly open. That is, HF gas or the like is prevented from entering the case 44 from the gap between the case 44 and the main body block 41.
【０００４】[0004]
【発明が解決しようとする課題】前記液体流路４２は樹
脂製の本体ブロック４１内に形成されているので、ステ
ンレス製ブロック内に形成した液体流路に比して、液体
として有機溶剤以外にステンレスを腐食するフッ化水素
酸や硫酸といった薬液も流すことができるけれども、ケ
ース内部バージを行うため、ソレノイドバルブ４５は常
時発熱しており、それが直下に位置する圧力センサ４
３，４３に熱影響を与え、前記センサ出力に異常が生
じ、正確な液体流量が測れないという問題がある。Since the liquid flow path 42 is formed in the main body block 41 made of resin, a liquid other than the organic solvent is used as the liquid as compared with the liquid flow path formed in the stainless steel block. Although a chemical solution such as hydrofluoric acid or sulfuric acid that corrodes stainless steel can be flowed, the solenoid valve 45 always generates heat to perform a barge inside the case, and the pressure sensor 4 located immediately below the solenoid valve 45 is heated.
There is a problem that a thermal influence is exerted on the sensors 3 and 43, an abnormality occurs in the sensor output, and an accurate liquid flow rate cannot be measured.
【０００５】また、所定の設定流量および温度下で液体
流量を測定しても、液体が流れだすと圧力センサ４３，
４３の温度分布が変化し、前記センサ出力がドリフトす
るという問題がある。[0005] Even if the liquid flow rate is measured at a predetermined set flow rate and temperature, when the liquid starts flowing, the pressure sensor 43,
There is a problem that the temperature distribution of the sensor 43 changes and the sensor output drifts.
【０００６】更に、空圧バルブ４６の２次側において
は、細径の液体流路５４から大径の液体流路５３が急激
に広がり、しかも広がった部分は同一断面積を有するの
で、急激な圧力降下によって液体内に気泡が発生する現
象が起こっていた（キャビテーションの発生）。Further, on the secondary side of the pneumatic valve 46, the large-diameter liquid flow path 53 rapidly expands from the small-diameter liquid flow path 54, and the widened portion has the same sectional area. A phenomenon in which bubbles were generated in the liquid due to the pressure drop occurred (cavitation occurred).
【０００７】この発明は、上述の事柄に留意してなされ
たもので、その目的は、ソレノイドバルブからの発熱に
よるセンサ温度影響を回避するとともに、キャビテーシ
ョンを軽減できる液体流量制御機器を提供することであ
る。SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-mentioned matters, and an object of the present invention is to provide a liquid flow control device capable of avoiding the influence of sensor temperature due to heat generated from a solenoid valve and reducing cavitation. is there.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するた
め、この発明は、内部に液体流路および液体の流量測定
を行うセンサを有する樹脂製の本体ブロックと、この本
体ブロックの上面側を覆う樹脂製で箱状のケースとを備
え、このケースの内面に、駆動用ガスで液体の流量調整
のための開度が制御される空圧バルブと、前記センサか
らの液体流量測定信号と液体流量設定信号との比較結果
に基づいて前記空圧バルブへの駆動用ガス流入量を制御
するソレノイドバルブとを設け、更に、前記ソレノイド
バルブから前記空圧バルブに至る駆動用ガス用パイプに
前記駆動用ガスを前記ケース内に流し込む逃がし弁を設
けた液体流量制御機器において、前記ソレノイドバルブ
を前記空圧バルブよりも上位に設けるとともに、前記セ
ンサへの前記ソレノイドバルブからの熱影響を回避すべ
く前記ソレノイドバルブを隔離・収容するための断熱室
を設け、更に、前記逃がし弁から分岐して前記断熱室に
至る冷却用パイプを設け、しかも、前記空圧バルブの２
次側における前記液体流路を末広がり状に構成してい
る。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a resin main body block having therein a liquid flow path and a sensor for measuring a flow rate of a liquid, and covers an upper surface side of the main body block. A resin-made box-shaped case, a pneumatic valve whose opening is controlled by a driving gas for adjusting the flow rate of the liquid, a liquid flow rate measurement signal from the sensor, and a liquid flow rate on the inner surface of the case. A solenoid valve for controlling the amount of driving gas flowing into the pneumatic valve based on the result of comparison with the setting signal; and a driving gas pipe extending from the solenoid valve to the pneumatic valve. In a liquid flow control device provided with a relief valve for flowing gas into the case, the solenoid valve is provided above the pneumatic valve, and the solenoid is connected to the sensor. A heat insulating chamber for isolating and housing the solenoid valve to avoid thermal influence from the drain valve; and further providing a cooling pipe branched from the relief valve to the heat insulating chamber. 2
The liquid flow path on the next side is formed in a divergent shape.
【０００９】[0009]
【発明の実施の形態】以下、この発明の好ましい実施形
態を、図を参照しながら説明する。Preferred embodiments of the present invention will be described below with reference to the drawings.
【００１０】図１は、この発明の一つの実施形態を示
す。図１において、１は、例えばテフロンなどの樹脂製
の本体ブロックで、内部に、例えばフッ化水素酸（Ｈ
Ｆ）などの液体Ｅが流れる液体流路２と圧力センサ３，
３が設けられている。４は、本体ブロック１の上面側を
覆う箱状のケースで、例えばテフロンなどの樹脂よりな
る。樹脂製本体ブロック１は、センサブロック１ａ、弁
ブロック１ｂおよび空圧バルブブロック１ｃよりなる。
なお、樹脂製ケース４の大きさは図４に示した前記先行
例のものと変わりはない。また、弁ブロック１ｂおよび
空圧バルブブロック１ｃの大きさも図４に示した前記先
行例のものと変わりはない。FIG. 1 shows one embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a main body block made of a resin such as Teflon, for example.
F) and the liquid flow path 2 through which the liquid E flows, the pressure sensor 3,
3 are provided. Reference numeral 4 denotes a box-shaped case that covers the upper surface side of the main body block 1 and is made of, for example, a resin such as Teflon. The resin body block 1 includes a sensor block 1a, a valve block 1b, and a pneumatic valve block 1c.
The size of the resin case 4 is the same as that of the prior example shown in FIG. Further, the sizes of the valve block 1b and the pneumatic valve block 1c are not different from those of the prior art shown in FIG.
【００１１】そして、このケース４の内面には、ソレノ
イドバルブ５と空圧バルブ６とが配置されている。この
ソレノイドバルブ５は、電磁力とばね力との平衡により
弁体が図示しない制御手段で位置制御されるもので、ソ
レノイドバルブ５は空圧バルブ６の制御を行っている。
すなわち、空圧バルブ駆動用ガス（例えば空気）Ｂがソ
レノイドバルブ５を介して空圧バルブ６に流し込まれ
る。一方、液体の流量制御を空圧バルブ６で行ってい
る。この流量制御の手法も前記先行例のものと変わりは
ない。１０ａは、駆動用ガスＢが外部からソレノイドバ
ルブ５に導入される駆動用ガス導入路、１０ｂは、駆動
用ガスＢをソレノイドバルブ５から空圧バルブ６に流し
込むための駆動用ガス導出路である。なお、ソレノイド
バルブ５と空圧バルブ６の大きさおよび機能は前記先行
例のものと変わりはないが、後述するように、ソレノイ
ドバルブ５の樹脂製ケース４への取り付け位置を空圧バ
ルブ６の上方にするため、ソレノイドバルブ５を前記先
行例の縦置きから横置きに変更している。On the inner surface of the case 4, a solenoid valve 5 and a pneumatic valve 6 are arranged. The position of the solenoid valve 5 is controlled by a control unit (not shown) based on the balance between the electromagnetic force and the spring force. The solenoid valve 5 controls the pneumatic valve 6.
That is, the pneumatic valve driving gas (for example, air) B flows into the pneumatic valve 6 via the solenoid valve 5. On the other hand, the flow rate of the liquid is controlled by the pneumatic valve 6. The flow control method is not different from that of the preceding example. Reference numeral 10a denotes a drive gas introduction path through which the drive gas B is introduced from the outside into the solenoid valve 5, and 10b denotes a drive gas lead-out path through which the drive gas B flows from the solenoid valve 5 to the pneumatic valve 6. . The size and function of the solenoid valve 5 and the pneumatic valve 6 are the same as those of the preceding example, but the mounting position of the solenoid valve 5 to the resin case 4 is changed as described later. In order to move the solenoid valve 5 upward, the solenoid valve 5 is changed from the vertical arrangement in the preceding example to the horizontal arrangement.
【００１２】また、空圧バルブ６は、液体流路２におけ
る圧力センサ３，３の下流側に位置している。前記液体
流路２は、空圧バルブ６の上流側（１次側）における液
体流路２ａと空圧バルブ４６の下流側（２次側）におけ
る液体流路２ｂとより構成されている。２ｃは液体流路
２ａにおける絞り部分、２ｄは細径部分で、これら絞り
部分２ｃ、細径部分２ｄ以外の液体流路２ａを構成する
パイプの内径は同一である。一方、液体流路２ｂは、細
径のＬ型液体流路３７とこれより大径の液体流路３６で
構成されている。The pneumatic valve 6 is located downstream of the pressure sensors 3 in the liquid flow path 2. The liquid flow path 2 includes a liquid flow path 2a on the upstream side (primary side) of the pneumatic valve 6 and a liquid flow path 2b on the downstream side (secondary side) of the pneumatic valve 46. Reference numeral 2c denotes a constricted portion of the liquid flow path 2a, and 2d denotes a small-diameter portion. On the other hand, the liquid flow path 2b is composed of an L-shaped liquid flow path 37 having a small diameter and a liquid flow path 36 having a larger diameter.
【００１３】更に、ソレノイドバルブ５は空圧バルブ６
の直上に横置き状態で位置している。すなわち、ソレノ
イドバルブ５と圧力センサ３，３との距離を前記先行例
のものに比してあけている。しかも、圧力センサ３，３
へのソレノイドバルブ５からの熱影響を回避すべく例え
ばテフロンなどの樹脂よりなる隔壁７ａ，７ｂで隔離さ
れた断熱室８内に収容されている。Further, the solenoid valve 5 is a pneumatic valve 6
It is located in the horizontal position directly above. That is, the distance between the solenoid valve 5 and the pressure sensors 3 is larger than that of the preceding example. Moreover, the pressure sensors 3, 3
In order to avoid the influence of heat from the solenoid valve 5 on the inside of the housing, it is housed in a heat insulating chamber 8 separated by partitions 7a and 7b made of a resin such as Teflon.
【００１４】この断熱室８の隔壁７ｂには、駆動用ガス
Ｂでソレノイドバルブ５を冷却するための駆動用ガス入
口９が設けられている。また、隔壁７ｂに対向する位置
にある壁部分７ｃには断熱室８に流し込まれた逃がしガ
スを放出するための放出口２２が形成されている。A driving gas inlet 9 for cooling the solenoid valve 5 with the driving gas B is provided in the partition wall 7b of the heat insulating chamber 8. Further, a discharge port 22 for discharging the escape gas flowing into the heat insulating chamber 8 is formed in the wall portion 7c located at a position facing the partition wall 7b.
【００１５】１１は逃がし弁で、前記先行例のものと同
様、ガス雰囲気の外部からケース４内にＨＦガスなどが
侵入するのを防止すべく駆動用ガスＢをケース４内に逃
がすためのものである。すなわち、空圧バルブ６が閉じ
るときに空圧バルブ６内の駆動用ガスＢを逃がし弁本体
１１ｂに設けた出口１２から逃がしたり、空圧バルブ６
が閉じた状態でもソレノイドバルブ５に電圧をかけてわ
ずかに開いた状態に保ちながら、駆動用ガスＢを出口１
２からケース４内に逃がしたりする。３３は、駆動用ガ
スＢが空圧バルブ６内へ出入りするための出入口であ
る。Reference numeral 11 denotes a relief valve for releasing the driving gas B into the case 4 in order to prevent HF gas or the like from entering the case 4 from outside the gas atmosphere, similarly to the above-mentioned prior art. It is. That is, when the pneumatic valve 6 closes, the driving gas B in the pneumatic valve 6 is released from the outlet 12 provided in the valve body 11b, or the pneumatic valve 6
When the valve is closed, the driving gas B is supplied to the outlet 1 while applying a voltage to the solenoid valve 5 and keeping the valve slightly open.
It escapes from case 2 to case 4. Reference numeral 33 denotes an entrance for the driving gas B to enter and exit the pneumatic valve 6.
【００１６】また、逃がし弁１１のノズル部分１１ｃに
は、断熱室８の隔壁７ｂに設けた駆動用ガス入口９に駆
動用ガスＢを供給する供給口１３が設けられている。２
０は、この供給口１３および駆動用ガス入口９を接続す
るソレノイドバルブ冷却用パイプ、２１は、駆動用ガス
導出路１０ｂと逃がし弁１１の導入口１１ａを繋ぐパイ
プである。なお、前記出口１２の位置を二点鎖線で示す
ように逃がし弁本体１１ｂからノズル部分１１ｃに変更
してもよい。A supply port 13 for supplying a drive gas B to a drive gas inlet 9 provided in the partition wall 7b of the heat insulating chamber 8 is provided in the nozzle portion 11c of the relief valve 11. 2
Reference numeral 0 denotes a solenoid valve cooling pipe connecting the supply port 13 and the driving gas inlet 9, and reference numeral 21 denotes a pipe connecting the driving gas outlet path 10 b and the introduction port 11 a of the relief valve 11. The position of the outlet 12 may be changed from the relief valve main body 11b to the nozzle portion 11c as shown by a two-dot chain line.
【００１７】一方、前記液体流路３６は下流へ行くほど
断面積が大となる構造を有している。この実施形態では
液体流路３６を上流側から、細径のＬ型液体流路３７
と、これよりごくわずか大径の流路部分３６ａ、この流
路部分３６ａよりごくわずか大径の流路部分３６ｂおよ
びこの流路部分３６ｂよりごくわずか大径の流路部分３
６ｃを有する形で構成している。すなわち、液体流路３
６を、下流へ行くほど階段状に太くしている。前記流路
部分３６ｃを構成するパイプの内径と液体流路２ａを構
成するパイプの内径とは同一である。なお、細径のＬ型
液体流路３７に続く流路を形成するパイプの内面を末広
がり状のテーパ面に形成してもよい。On the other hand, the liquid flow path 36 has a structure in which the cross-sectional area increases toward the downstream. In this embodiment, the liquid flow path 36 is formed from the upstream side into an L-shaped liquid flow path 37 having a small diameter.
And a flow path portion 36a having a slightly larger diameter than this, a flow path portion 36b having a slightly larger diameter than the flow path portion 36a, and a flow path portion 3 having a slightly larger diameter than the flow path portion 36b.
6c. That is, the liquid flow path 3
6 is made stepwise thicker toward the downstream. The inner diameter of the pipe forming the flow path portion 36c is the same as the inner diameter of the pipe forming the liquid flow path 2a. The inner surface of the pipe forming the flow path following the small diameter L-shaped liquid flow path 37 may be formed as a divergent tapered surface.
【００１８】而して、ケース４の上部に設けた駆動用ガ
ス導入路１０ａよりソレノイドバルブ５を介して空圧バ
ルブ６に空圧バルブ駆動用ガスＢを流し込む。そして、
２つの圧力センサ３，３の差圧に基づく液体流量測定信
号からのフィードバックにより、ソレノイドバルブ５で
空圧バルブ６へのガス流入量がコントロールされる。The pneumatic valve driving gas B flows into the pneumatic valve 6 via the solenoid valve 5 from the driving gas introduction passage 10a provided in the upper part of the case 4. And
The amount of gas flowing into the pneumatic valve 6 is controlled by the solenoid valve 5 by feedback from a liquid flow measurement signal based on the differential pressure between the two pressure sensors 3.
【００１９】この場合、駆動用ガスは、出入口３３を介
して空圧バルブ６を出入りする一方、その逃がしガス
は、ケース４内への出口１２を介してケース４内へ流れ
出ることによって、ガス雰囲気の外部からケース４内に
ＨＦガスなどが侵入するのを防止するとともに、駆動用
ガス入口９から断熱室８に流れ込み、ソレノイドバルブ
５を冷却できる。断熱室８に流れ込んだ逃がしガスは、
その後、外部へ放出される。また、ソレノイドバルブ５
は空圧バルブ６が流量を制御していない状態であって
も、空圧バルブ６が開かない程度の駆動用ガスを流すだ
けの開度をとることができるので、常時ソレノイドバル
ブ５の冷却およびケース内部パージを行える。In this case, the driving gas enters and exits the pneumatic valve 6 through the inlet / outlet 33, and the escape gas flows out of the case 4 through the outlet 12 into the case 4. The HF gas and the like can be prevented from entering the case 4 from the outside, and the solenoid valve 5 can be cooled by flowing into the heat insulating chamber 8 from the driving gas inlet 9. The escape gas flowing into the heat insulation chamber 8 is
After that, it is released to the outside. Also, the solenoid valve 5
Even if the pneumatic valve 6 does not control the flow rate, the opening degree can be set to allow the driving gas to flow so that the pneumatic valve 6 does not open. Purge inside the case.
【００２０】また、前記先行例のものでは、空圧バルブ
４６の２次側における液体流路が急激に広がっている箇
所でキャビテーションが発生していたのを、この発明で
は、空圧バルブ６の２次側の液体流路３６を階段状に太
くして最終的に大径の流路部分３６ｃになるよう構成し
たので、空圧バルブ６の２次側の液体流路３６において
キャビテーションが発生するのを防止できる。Further, in the above-mentioned prior art, cavitation occurs at a place where the liquid flow path on the secondary side of the pneumatic valve 46 is rapidly expanded. Since the secondary-side liquid flow path 36 is thickened in a stepwise manner so as to finally have a large-diameter flow path portion 36 c, cavitation occurs in the secondary-side liquid flow path 36 of the pneumatic valve 6. Can be prevented.
【００２１】図２は、この発明と前記先行例のものにお
ける流量変化を示し、図３は、この発明と前記先行例の
ものにおけるセンサ周辺温度の変化を示す。なお、この
データは設定流量を１００ＣＣＭとし、２５℃の条件下
で流量測定して得たものである。FIG. 2 shows a change in the flow rate in the present invention and the preceding example, and FIG. 3 shows a change in the sensor ambient temperature in the present invention and the preceding example. This data was obtained by measuring the flow rate at 25 ° C. with the set flow rate being 100 CCM.
【００２２】図２に示す前記先行例のデータａおよび図
３に示す前記先行例のデータｂとから、それぞれ流量の
ドリフトおよびセンサ周辺温度のドリフトがあることが
分かる。これは、ソレノイドバルブ４５の熱が圧力セン
サ４３，４３に影響を与えているからである。From the data a of the preceding example shown in FIG. 2 and the data b of the preceding example shown in FIG. 3, it can be seen that there is a drift in the flow rate and a drift in the temperature around the sensor, respectively. This is because the heat of the solenoid valve 45 affects the pressure sensors 43, 43.
【００２３】一方、図２に示すこの発明のデータｃか
ら、流量に関してはドリフトもなく安定していることが
分かり、また、図３に示すこの発明のデータｄから、セ
ンサ周辺温度のドリフトが前記先行例のものに比して軽
減していることが分かる。これは、ソレノイドバルブ５
の位置を圧力センサ３，３から遠ざけるとともに、ソレ
ノイドバルブ５を断熱室８内に隔離・収容したからであ
る。On the other hand, the data c of the present invention shown in FIG. 2 shows that the flow rate is stable without drift, and the data d of the present invention shown in FIG. It can be seen that it is reduced as compared with the preceding example. This is the solenoid valve 5
Is moved away from the pressure sensors 3 and 3 and the solenoid valve 5 is isolated and accommodated in the heat insulating chamber 8.
【００２４】なお、図３において、時間の経過とともに
前記先行例のデータｂおよびこの発明のデータｄにおけ
る温度が下降しているのは、それぞれ液体流路４２およ
び液体流路２を流れる液体によって圧力センサ４３，４
３および圧力センサ３，３周辺が冷やされるからであ
り、前記先行例ではセンサ周辺温度のドリフトが大であ
ることから、温度の下降変化がこの発明のデータｄより
も顕著に現れている。In FIG. 3, the temperature in the data b of the preceding example and the temperature in the data d of the present invention decrease with the passage of time because the liquid flowing through the liquid flow channel 42 and the liquid Sensor 43, 4
3 and the surroundings of the pressure sensors 3 and 3 are cooled. In the above-mentioned prior art, the drift of the temperature around the sensor is large, so that the change in the temperature decreases more remarkably than the data d of the present invention.
【００２５】[0025]
【発明の効果】以上説明したようにこの発明は、内部に
液体流路および液体の流量測定を行うセンサを有する樹
脂製の本体ブロックの上面側を覆う樹脂製で箱状のケー
ス内部にソレノイドバルブを隔離する断熱室を設け、ソ
レノイドバルブ下位に設けた空圧バルブからの逃げガス
をソレノイドバルブの冷却に用いたので、ソレノイドバ
ルブからの発熱によるセンサ温度影響を回避できる。As described above, the present invention provides a solenoid valve inside a resin-made box-shaped case which covers the upper surface of a resin body block having a liquid flow path and a sensor for measuring the flow rate of the liquid. Is provided, and the escape gas from the pneumatic valve provided below the solenoid valve is used for cooling the solenoid valve. Therefore, it is possible to avoid the influence of the sensor temperature due to the heat generated from the solenoid valve.
【００２６】また、空圧バルブの２次側における前記液
体流路を末広がり状に構成したので、急激な圧力降下に
よって液体内に気泡が発生する現象を軽減できる。Further, since the liquid flow path on the secondary side of the pneumatic valve is formed to have a divergent shape, it is possible to reduce a phenomenon that bubbles are generated in the liquid due to a rapid pressure drop.
【図１】この発明の一実施形態を示す全体構成説明図で
ある。FIG. 1 is an explanatory diagram of an overall configuration showing an embodiment of the present invention.
【図２】この発明と先行例における流量変化を示す図で
ある。FIG. 2 is a diagram showing a flow rate change in the present invention and a prior art.
【図３】この発明と先行例におけるセンサ周辺温度の変
化を示す図である。FIG. 3 is a diagram showing a change in a sensor ambient temperature according to the present invention and a prior art.
【図４】先行例を示す全体構成説明図である。FIG. 4 is an explanatory diagram of the entire configuration showing a prior example.
１…樹脂製本体ブロック、２…液体流路、３，３…圧力
センサ、４…樹脂製ケース、５…ソレノイドバルブ、６
…空圧バルブ、７ａ，７ｂ…隔壁、８…断熱室、９…駆
動用ガス入口、１１…逃がし弁、１２…駆動用ガス出
口、１３…駆動用ガス供給口、２０…冷却用パイプ、３
６…階段状の液体流路、３７…細径のＬ型液体流路、Ｂ
…駆動用ガス。DESCRIPTION OF SYMBOLS 1 ... Resin body block, 2 ... Liquid flow path, 3, 3 ... Pressure sensor, 4 ... Resin case, 5 ... Solenoid valve, 6
... pneumatic valves, 7a, 7b ... partition walls, 8 ... heat insulation chamber, 9 ... drive gas inlet, 11 ... relief valve, 12 ... drive gas outlet, 13 ... drive gas supply port, 20 ... cooling pipe, 3
6 Step-like liquid flow path, 37 L-shaped liquid flow path with small diameter, B
... Driving gas.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥井 正彦 京都府京都市南区上鳥羽鉾立町11番５ 株 式会社エステック内 (72)発明者 溝口 友博 京都府京都市南区上鳥羽鉾立町11番５ 株 式会社エステック内 (72)発明者 堀 剛禎 京都府京都市南区上鳥羽鉾立町11番５ 株 式会社エステック内 Ｆターム(参考） 3H056 AA02 BB34 BB47 BB50 CA02 CB03 CC12 CD04 DD03 DD10 EE10 GG01 GG04 GG11 3H106 DA07 EE27 GC29 KK01 KK31 5H307 AA20 BB05 DD06 DD08 EE02 EE08 EE12 FF03 GG01 HH04 HH11 JJ03 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masahiko Okui 11-5, Kamitobakotachimachi, Minami-ku, Kyoto, Kyoto Prefecture Within STEC Co., Ltd. (72) Inventor Tomohiro Mizoguchi 11, Kamitobakotachicho, Minami-ku, Kyoto, Kyoto No. 5 Inside S-Tech Co., Ltd. (72) Inventor Takeyoshi Hori 11-5 Kamitobakotatemachi, Minami-ku, Kyoto, Kyoto Prefecture F-term (reference) 3H056 AA02 BB34 BB47 BB50 CA02 CB03 CC12 CD04 DD03 DD10 EE10 GG01 GG04 GG11 3H106 DA07 EE27 GC29 KK01 KK31 5H307 AA20 BB05 DD06 DD08 EE02 EE08 EE12 FF03 GG01 HH04 HH11 JJ03
Claims (1)
行うセンサを有する樹脂製の本体ブロックと、この本体
ブロックの上面側を覆う樹脂製で箱状のケースとを備
え、このケースの内面に、駆動用ガスで液体の流量調整
のための開度が制御される空圧バルブと、前記センサか
らの液体流量測定信号と液体流量設定信号との比較結果
に基づいて前記空圧バルブへの駆動用ガス流入量を制御
するソレノイドバルブとを設け、更に、前記ソレノイド
バルブから前記空圧バルブに至る駆動用ガス用パイプに
前記駆動用ガスを前記ケース内に流し込む逃がし弁を設
けた液体流量制御機器において、前記ソレノイドバルブ
を前記空圧バルブよりも上位に設けるとともに、前記セ
ンサへの前記ソレノイドバルブからの熱影響を回避すべ
く前記ソレノイドバルブを隔離・収容するための断熱室
を設け、更に、前記逃がし弁から分岐して前記断熱室に
至る冷却用パイプを設け、しかも、前記空圧バルブの２
次側における前記液体流路を末広がり状に構成したこと
を特徴とするとする液体流量制御機器。1. A resin-made main body block having a liquid flow path and a sensor for measuring a flow rate of a liquid therein, and a resin-made box-shaped case that covers an upper surface side of the main body block. A pneumatic valve whose opening degree for controlling the flow rate of the liquid is controlled by the driving gas, and a pneumatic valve to the pneumatic valve based on a comparison result of a liquid flow measurement signal and a liquid flow setting signal from the sensor A solenoid valve for controlling the inflow amount of the driving gas, and a relief valve for introducing the driving gas into the case in a pipe for the driving gas from the solenoid valve to the pneumatic valve; In the device, the solenoid valve is provided above the pneumatic valve, and the solenoid valve is disposed in order to avoid a thermal influence from the solenoid valve on the sensor. A heat insulating chamber for isolating and housing the cooling valve, and a cooling pipe branched from the relief valve to the heat insulating chamber.
A liquid flow control device, wherein the liquid flow path on the next side is formed in a divergent shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30572299A JP4256999B2 (en) | 1999-10-27 | 1999-10-27 | Liquid flow control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30572299A JP4256999B2 (en) | 1999-10-27 | 1999-10-27 | Liquid flow control equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001125649A true JP2001125649A (en) | 2001-05-11 |
| JP4256999B2 JP4256999B2 (en) | 2009-04-22 |
Family
ID=17948571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30572299A Expired - Fee Related JP4256999B2 (en) | 1999-10-27 | 1999-10-27 | Liquid flow control equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4256999B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7650903B2 (en) | 2004-08-31 | 2010-01-26 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid controller |
| KR101107503B1 (en) | 2007-12-27 | 2012-01-31 | (주)에이디에스 | Solenoid valve which can be used in high temperature, and source providing system comprising the same |
| US8393227B2 (en) | 2010-02-26 | 2013-03-12 | Tokyo Electron Limited | Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeter |
| KR101397900B1 (en) | 2012-12-14 | 2014-05-20 | 오스템임플란트 주식회사 | Apparatus of controlling fluid for dental unit chair |
| JP2014137724A (en) * | 2013-01-17 | 2014-07-28 | Asahi Organic Chemicals Industry Co Ltd | Fluid control device |
| CN104619925A (en) * | 2012-11-14 | 2015-05-13 | 株式会社小松制作所 | Excavating equipment display system and excavating equipment |
| JP2017025935A (en) * | 2015-07-15 | 2017-02-02 | 日産自動車株式会社 | Valve device |
| EP3150975A1 (en) * | 2015-10-02 | 2017-04-05 | Surpass Industry Co., Ltd. | Flow rate adjustment apparatus |
-
1999
- 1999-10-27 JP JP30572299A patent/JP4256999B2/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7650903B2 (en) | 2004-08-31 | 2010-01-26 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid controller |
| KR101107503B1 (en) | 2007-12-27 | 2012-01-31 | (주)에이디에스 | Solenoid valve which can be used in high temperature, and source providing system comprising the same |
| US8393227B2 (en) | 2010-02-26 | 2013-03-12 | Tokyo Electron Limited | Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeter |
| US9556593B2 (en) | 2012-11-14 | 2017-01-31 | Komatsu Ltd. | Display system of excavating machine and excavating machine |
| CN104619925B (en) * | 2012-11-14 | 2017-07-04 | 株式会社小松制作所 | The display system and excavating machinery of excavating machinery |
| CN104619925A (en) * | 2012-11-14 | 2015-05-13 | 株式会社小松制作所 | Excavating equipment display system and excavating equipment |
| KR101397900B1 (en) | 2012-12-14 | 2014-05-20 | 오스템임플란트 주식회사 | Apparatus of controlling fluid for dental unit chair |
| JP2014137724A (en) * | 2013-01-17 | 2014-07-28 | Asahi Organic Chemicals Industry Co Ltd | Fluid control device |
| JP2017025935A (en) * | 2015-07-15 | 2017-02-02 | 日産自動車株式会社 | Valve device |
| EP3150975A1 (en) * | 2015-10-02 | 2017-04-05 | Surpass Industry Co., Ltd. | Flow rate adjustment apparatus |
| KR20170040092A (en) * | 2015-10-02 | 2017-04-12 | 사파스고교 가부시키가이샤 | Flow rate adjustment apparatus |
| US9977436B2 (en) | 2015-10-02 | 2018-05-22 | Surpass Industry Co., Ltd. | Flow rate adjustment apparatus |
| KR102493650B1 (en) | 2015-10-02 | 2023-01-30 | 사파스고교 가부시키가이샤 | Flow rate adjustment apparatus |
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| Publication number | Publication date |
|---|---|
| JP4256999B2 (en) | 2009-04-22 |
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