JP2001119962A - Actuator using piezoelectric crystal element and drive method therefor - Google Patents
Actuator using piezoelectric crystal element and drive method thereforInfo
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- JP2001119962A JP2001119962A JP29788599A JP29788599A JP2001119962A JP 2001119962 A JP2001119962 A JP 2001119962A JP 29788599 A JP29788599 A JP 29788599A JP 29788599 A JP29788599 A JP 29788599A JP 2001119962 A JP2001119962 A JP 2001119962A
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- Prior art keywords
- piezoelectric
- conversion element
- frequency
- piezoelectric conversion
- actuator
- Prior art date
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は圧電変換素子を使
用したアクチエータ及びそのようなアクチエータの駆動
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator using a piezoelectric transducer and a method for driving such an actuator.
【０００２】[0002]
【従来の技術】圧電変換素子を使用したアクチエータ
は、供給される電気エネルギを駆動力に変換する変換効
率が高く、小型軽量でありながら発生する駆動力が大き
く、また、駆動力を容易に制御できるため、カメラ、計
測機器、その他の精密機械の被駆動部材の駆動や位置決
めに利用されるようになつてきた。2. Description of the Related Art An actuator using a piezoelectric conversion element has a high conversion efficiency for converting supplied electric energy into driving force, is small in size and light in weight, generates a large driving force, and easily controls the driving force. As a result, it has been used for driving and positioning of driven members of cameras, measuring instruments, and other precision machines.
【０００３】このようなアクチエータは、単位の圧電素
子を複数枚積層して構成した積層型の圧電変換素子に駆
動軸を接合し、駆動軸に移動部材を摩擦結合させた構成
を備えているものがある。[0003] Such an actuator has a structure in which a drive shaft is joined to a laminated piezoelectric conversion element formed by laminating a plurality of unit piezoelectric elements, and a moving member is frictionally coupled to the drive shaft. There is.
【０００４】そして、圧電変換素子に緩やかな立ち上り
部と急速な立ち下り部、或いは急速な立ち上り部と緩や
かな立ち下り部を持つ鋸歯状波の駆動パルスを印加して
異なる速度で充放電を繰り返して圧電変換素子に速度の
異なる厚み方向の伸縮変位を発生させ、これに接合され
た駆動軸に速度の異なる往復振動を発生させると、駆動
軸に摩擦結合された移動部材を所定方向に移動させるこ
とができる。[0004] A drive pulse of a sawtooth wave having a gentle rising portion and a rapid falling portion or a rapid rising portion and a gentle falling portion is applied to the piezoelectric transducer, and charging and discharging are repeated at different speeds. When the piezoelectric transducers generate expansion and contraction displacements in the thickness direction at different speeds, and the driving shafts connected thereto generate reciprocating vibrations at different speeds, the moving member frictionally coupled to the driving shafts is moved in a predetermined direction. be able to.
【０００５】[0005]
【発明が解決しようとする課題】上記したアクチエータ
では、駆動軸の往復の振動速度を異ならせるためには、
圧電変換素子の共振周波数よりも十分に低い周波数の駆
動パルスで圧電変換素子を駆動する必要があり、移動部
材の移動速度を高め、高い駆動効率を得ることが困難で
あつた。また、駆動のための電源電圧も比較的高い電圧
を必要とした。この発明は上記課題を解決することを目
的とするものである。In the above-described actuator, in order to make the reciprocating vibration speed of the drive shaft different,
It was necessary to drive the piezoelectric conversion element with a drive pulse having a frequency sufficiently lower than the resonance frequency of the piezoelectric conversion element, and it was difficult to increase the moving speed of the moving member and obtain high driving efficiency. Also, a relatively high power supply voltage was required for driving. An object of the present invention is to solve the above problems.
【０００６】[0006]
【課題を解決するための手段】この発明は上記課題を解
決するもので、共振周波数の異なる第１及び第２の圧電
変換素子を直列に接続し、これ等２つの圧電変換素子を
共振状態で駆動して、移動部材の移動速度を高め、高い
駆動効率を得ると共に、また、比較的低電圧で駆動可能
にしたものである。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems. First and second piezoelectric conversion elements having different resonance frequencies are connected in series, and these two piezoelectric conversion elements are connected in a resonance state. When driven, the moving speed of the moving member is increased, high driving efficiency is obtained, and driving can be performed at a relatively low voltage.
【０００７】請求項１の発明は、第１の駆動信号により
伸縮変位を発生する第１の圧電変換素子と、第２の駆動
信号により伸縮変位を発生する第２の圧電変換素子と、
前記第１の圧電変換素子の第１の端部に接合された駆動
軸と、前記駆動軸に摩擦結合した移動部材と、固定部材
とを備え、前記第２の圧電変換素子の第１の端部は前記
第１の圧電変換素子の駆動軸側端部と反対側の第２の端
部に接合され、第２の圧電変換素子の第２の端部は前記
固定部材に接合されており、前記第１の圧電変換素子の
共振周波数が前記第２の圧電変換素子の共振周波数の約
２倍になるように設定されたことを特徴とする圧電変換
素子を使用したアクチエータである。According to a first aspect of the present invention, there is provided a first piezoelectric conversion element that generates expansion and contraction displacement by a first drive signal, a second piezoelectric conversion element that generates expansion and contraction displacement by a second drive signal,
A driving shaft joined to a first end of the first piezoelectric conversion element, a moving member frictionally coupled to the driving shaft, and a fixed member; a first end of the second piezoelectric conversion element; A portion is joined to a second end of the first piezoelectric conversion element opposite to the drive shaft end, and a second end of the second piezoelectric conversion element is joined to the fixing member; An actuator using a piezoelectric conversion element, wherein the resonance frequency of the first piezoelectric conversion element is set to be about twice the resonance frequency of the second piezoelectric conversion element.
【０００８】そして、前記第１及び第２の圧電変換素子
は単体の圧電素子を積層した積層型圧電変換素子であ
る。The first and second piezoelectric transducers are laminated piezoelectric transducers in which a single piezoelectric element is laminated.
【０００９】また、前記第１及び第２の圧電変換素子は
それぞれ圧電素子と弾性体とを接合した圧電変換素子か
ら構成してもよい。The first and second piezoelectric transducers may each be constituted by a piezoelectric transducer in which a piezoelectric element and an elastic body are joined.
【００１０】請求項４の発明は、請求項１乃至請求項３
のいずれかに記載の圧電変換素子を使用したアクチエー
タを駆動するアクチエータの駆動方法であつて、前記第
１及び前記第２の圧電変換素子を、それぞれの圧電変換
素子の共振周波数又は互いに他の圧電変換素子の共振周
波数に略一致した周波数の第１及び第２の駆動信号で駆
動することを特徴とする圧電変換素子を使用したアクチ
エータの駆動方法である。[0010] The invention of claim 4 is the invention of claims 1 to 3.
5. An actuator driving method for driving an actuator using a piezoelectric conversion element according to any one of claims 1 to 3, wherein the first and second piezoelectric conversion elements are controlled by a resonance frequency of each piezoelectric conversion element or another piezoelectric conversion element. A method of driving an actuator using a piezoelectric transducer, wherein the actuator is driven by first and second drive signals having frequencies substantially corresponding to a resonance frequency of the transducer.
【００１１】請求項５の発明は、請求項１乃至請求項３
のいずれかに記載の圧電変換素子を使用したアクチエー
タを駆動するアクチエータの駆動方法であつて、前記第
２の圧電変換素子をその圧電変換素子の共振周波数に略
一致した周波数の第２の駆動信号で駆動し、前記第１の
圧電変換素子を前記第２の駆動信号の周波数の２倍の周
波数の第１の駆動信号で駆動することを特徴とする圧電
変換素子を使用したアクチエータの駆動方法である。[0011] The invention of claim 5 is the invention of claims 1 to 3.
5. A method of driving an actuator using a piezoelectric transducer according to any one of claims 1 to 3, wherein the second piezoelectric transducer is driven by a second drive signal having a frequency substantially equal to a resonance frequency of the piezoelectric transducer. And driving the first piezoelectric conversion element with a first drive signal having a frequency twice as high as the frequency of the second drive signal. is there.
【００１２】請求項６の発明は、請求項１乃至請求項３
のいずれかに記載の圧電変換素子を使用したアクチエー
タを駆動するアクチエータの駆動方法であつて、前記第
１の圧電変換素子を前記第２の圧電変換素子の共振周波
数に略一致した周波数の第１の駆動信号で駆動し、前記
第２の圧電変換素子を前記第１の駆動信号の周波数の２
倍の周波数の第２の駆動信号で駆動することを特徴とす
る圧電変換素子を使用したアクチエータの駆動方法であ
る。[0012] The invention of claim 6 is the first to third aspects of the present invention.
5. An actuator driving method for driving an actuator using a piezoelectric transducer according to any one of claims 1 to 3, wherein the first piezoelectric transducer has a first frequency substantially equal to a resonance frequency of the second piezoelectric transducer. And the second piezoelectric conversion element is driven at a frequency of 2 of the first drive signal.
A method for driving an actuator using a piezoelectric transducer, wherein the actuator is driven by a second drive signal having a double frequency.
【００１３】請求項７の発明は、請求項１乃至請求項３
のいずれかに記載の圧電変換素子を使用したアクチエー
タを駆動するアクチエータの駆動方法であつて、前記第
１の圧電変換素子をその圧電変換素子の共振周波数に略
一致した周波数の第１の駆動信号で駆動し、前記第２の
圧電変換素子を前記第１の駆動信号の周波数の１／２の
周波数の第２の駆動信号で駆動することを特徴とする圧
電変換素子を使用したアクチエータの駆動方法である。The invention of claim 7 is the first to third aspects of the present invention.
5. A method of driving an actuator using a piezoelectric transducer according to any one of claims 1 to 3, wherein the first piezoelectric transducer is driven by a first drive signal having a frequency substantially equal to a resonance frequency of the piezoelectric transducer. And driving the second piezoelectric conversion element with a second drive signal having a frequency half the frequency of the first drive signal. 2. A method for driving an actuator using a piezoelectric conversion element, comprising: It is.
【００１４】請求項８の発明は、請求項１乃至請求項３
のいずれかに記載の圧電変換素子を使用したアクチエー
タを駆動するアクチエータの駆動方法であつて、前記第
２の圧電変換素子を前記第１の圧電変換素子の共振周波
数に略一致した周波数の第２の駆動信号で駆動し、前記
第１の圧電変換素子を前記第２の駆動信号の周波数の１
／２の周波数の第１の駆動信号で駆動することを特徴と
する圧電変換素子を使用したアクチエータの駆動方法で
ある。[0014] The invention of claim 8 is the first to third aspects of the present invention.
5. An actuator driving method for driving an actuator using the piezoelectric conversion element according to any one of the above, wherein the second piezoelectric conversion element has a second frequency substantially equal to a resonance frequency of the first piezoelectric conversion element. And the first piezoelectric conversion element is driven at a frequency of 1 of the second drive signal.
A method of driving an actuator using a piezoelectric conversion element, wherein the actuator is driven by a first drive signal having a frequency of / 2.
【００１５】[0015]
【発明の実施の形態】以下、この発明の実施の形態を説
明する。Embodiments of the present invention will be described below.
【００１６】図１はこの発明の第１の実施の形態のイン
パクト型のアクチエータ１０の構成の概略を示す正面図
である。以下、図１を参照してその構成を説明する。１
１は十分に重い重量をもつベース（固定部材）で、ベー
ス１１はアクチエータ１０を取り付ける図示しない装置
などに固定されている。FIG. 1 is a front view schematically showing the structure of an impact type actuator 10 according to a first embodiment of the present invention. Hereinafter, the configuration will be described with reference to FIG. 1
Reference numeral 1 denotes a base (fixing member) having a sufficiently heavy weight, and the base 11 is fixed to a device (not shown) to which the actuator 10 is attached.
【００１７】１２は積層型の第１の圧電変換素子、１４
は積層型の第２の圧電変換素子、１３は第１の圧電変換
素子１２及び第２の圧電変換素子１４に対して十分に弾
性率の高いステンレス鋼（ＳＵＳ）などの剛体からなる
中間部材である。Reference numeral 12 denotes a laminated first piezoelectric transducer, 14
Is an intermediate member made of a rigid body such as stainless steel (SUS) having a sufficiently high elastic modulus with respect to the first piezoelectric conversion element 12 and the second piezoelectric conversion element 14. is there.
【００１８】第１の圧電変換素子１２と第２の圧電変換
素子１４とは中間部材１３を介して直列に一体的に接合
されている。第１の圧電変換素子１２の端部には駆動軸
１５が接着固定されており、第２の圧電変換素子１４の
端部はベース１１に接着などの手段で固定されている。The first piezoelectric conversion element 12 and the second piezoelectric conversion element 14 are integrally joined in series via an intermediate member 13. A drive shaft 15 is bonded and fixed to an end of the first piezoelectric conversion element 12, and an end of the second piezoelectric conversion element 14 is fixed to the base 11 by bonding or the like.
【００１９】駆動軸１５には移動部材１６が適当な摩擦
力で摩擦結合されている。移動部材１６はアクチエータ
１０を取り付ける図示しない装置側の被駆動部材に固定
されている。A moving member 16 is frictionally connected to the drive shaft 15 with an appropriate frictional force. The moving member 16 is fixed to a driven member (not shown) on which the actuator 10 is mounted.
【００２０】第１の圧電変換素子１２と第２の圧電変換
素子１４とを剛体の中間部材１３を介在させて接合した
のは、第１及び第２の圧電変換素子とを直接接合すると
１つの圧電変換素子のように振る舞つてしまうことを防
止するためである。The reason why the first piezoelectric conversion element 12 and the second piezoelectric conversion element 14 are joined with the rigid intermediate member 13 interposed therebetween is that if the first and second piezoelectric conversion elements are directly joined, This is to prevent the device from behaving like a piezoelectric conversion element.
【００２１】また、第１の圧電変換素子１２の共振周波
数Ｒf1を、第２の圧電変換素子１４の共振周波数Ｒf2の
２倍（Ｒf1＝２×Ｒf2）になるように設定する。共振周
波数の調整は、圧電素子の積層数や剛体の中間部材１３
の大きさを変更して行う。The resonance frequency Rf1 of the first piezoelectric conversion element 12 is set to be twice (Rf1 = 2 × Rf2) the resonance frequency Rf2 of the second piezoelectric conversion element 14. Adjustment of the resonance frequency depends on the number of laminated piezoelectric elements and the rigid intermediate member 13.
Do this by changing the size.
【００２２】１７は第１の駆動回路、１８は第２の駆動
回路で、共に正弦波の駆動信号を発生する駆動回路であ
る。第１の駆動回路１７から出力される第１の駆動信号
Ｄ1は第１の圧電変換素子１２を駆動し、第２の駆動回
路１８から出力される第２の駆動信号Ｄ2 は第２の圧電
変換素子１４を駆動するように接続されている。Reference numeral 17 denotes a first drive circuit, and reference numeral 18 denotes a second drive circuit, both of which generate a sine-wave drive signal. The first drive signal D1 output from the first drive circuit 17 drives the first piezoelectric conversion element 12, and the second drive signal D2 output from the second drive circuit 18 is used for the second piezoelectric conversion element. It is connected to drive the element 14.
【００２３】ここで、第１及び第２の駆動回路から出力
される第１及び第２の駆動信号の周波数について説明す
る。Here, the frequencies of the first and second drive signals output from the first and second drive circuits will be described.
【００２４】第１の駆動回路１７からは周波数ｆD1の第
１の駆動信号Ｄ1 が出力され、第２の駆動回路１８から
は周波数ｆD2の第２の駆動信号Ｄ2 が出力される。そし
て、第１の駆動信号Ｄ1 の周波数ｆD1、及び第２の駆動
信号Ｄ2 の周波数ｆD2は、１対２（ｆD1＝２×ｆD2）の
比率に設定されている。The first drive circuit 17 outputs a first drive signal D1 having a frequency fD1, and the second drive circuit 18 outputs a second drive signal D2 having a frequency fD2. The frequency fD1 of the first drive signal D1 and the frequency fD2 of the second drive signal D2 are set at a ratio of 1: 2 (fD1 = 2 × fD2).
【００２５】なお、この比率はこの値に固定的に決定さ
れているものではなく、幾つかの変形が考えられる。こ
れについては後で説明する。Note that this ratio is not fixedly determined to this value, and some variations can be considered. This will be described later.
【００２６】次に、以上の構成の動作を説明する。前記
したように、第１の圧電変換素子１２は周波数ｆD1の第
１の駆動信号Ｄ1 で駆動され、第２の圧電変換素子１４
は周波数ｆD2（ｆD2＝ｆD1×１／２）の第２の駆動信号
Ｄ2 で駆動される。Next, the operation of the above configuration will be described. As described above, the first piezoelectric transducer 12 is driven by the first drive signal D1 having the frequency fD1 and the second piezoelectric transducer 14 is driven.
Are driven by a second drive signal D2 having a frequency fD2 (fD2 = fD1 × 1/2).
【００２７】第２の圧電変換素子１４の一端は殆ど移動
しないベース１１に固定されているから、第１の圧電変
換素子１２及び第２の圧電変換素子１４に発生する伸縮
変位は加算されて駆動軸１５に伝達される。Since one end of the second piezoelectric conversion element 14 is fixed to the base 11 which hardly moves, the expansion and contraction displacement generated in the first piezoelectric conversion element 12 and the second piezoelectric conversion element 14 are added to drive. It is transmitted to the shaft 15.
【００２８】即ち、駆動軸１５は、周波数ｆD1の第１の
駆動信号Ｄ1 で駆動される第１の圧電変換素子１２の伸
縮変位と、周波数ｆD2（ｆD2＝ｆD1×１／２）の第２の
駆動信号Ｄ2 で駆動される第２の圧電変換素子１４の伸
縮変位との加算された変位が伝達されるから、駆動軸１
５には、圧電変換素子の伸長時と収縮時とでの変化率に
差のある往復振動が発生する。That is, the drive shaft 15 is driven by the first drive signal D1 having the frequency fD1 to expand and contract the first piezoelectric conversion element 12 and the second shaft having the frequency fD2 (fD2 = fD1 × 1/2). Since the displacement added to the expansion and contraction displacement of the second piezoelectric transducer 14 driven by the drive signal D2 is transmitted, the drive shaft 1
In FIG. 5, a reciprocating vibration having a difference in the rate of change between when the piezoelectric transducer expands and when it contracts occurs.
【００２９】駆動軸１５に変化率に差のある往復振動が
発生することは、言い換えれば図１において矢印ａ方向
と、これと反対方向とで速度の異なる往復振動が発生す
ることを意味する。このような駆動軸１５に発生する速
度の異なる往復振動は、駆動軸１５上に摩擦結合した移
動部材１６を所定方向に移動させる。The occurrence of the reciprocating vibration having a difference in the rate of change on the drive shaft 15 means that the reciprocating vibration having a different speed occurs in the direction of arrow a in FIG. 1 and in the direction opposite thereto. Such reciprocating vibrations generated at different speeds on the drive shaft 15 move the moving member 16 frictionally coupled to the drive shaft 15 in a predetermined direction.
【００３０】即ち、例えば駆動軸１５が緩やかな速度で
矢印ａ方向に移動するときは、駆動軸１５上に摩擦結合
した移動部材１６も駆動軸１５と共に矢印ａ方向に移動
する。また、駆動軸１５が急速度で矢印ａと反対方向に
移動するときは、移動部材１６は駆動軸１５との摩擦結
合力に打ち勝つて実質的にその位置に留まり移動しな
い。このような動きを繰り返すことで、移動部材１６は
全体として矢印ａ方向に移動する。That is, for example, when the drive shaft 15 moves in the direction of arrow a at a slow speed, the moving member 16 frictionally coupled to the drive shaft 15 also moves in the direction of arrow a together with the drive shaft 15. Further, when the drive shaft 15 moves at a rapid speed in the direction opposite to the arrow a, the moving member 16 overcomes the frictional coupling force with the drive shaft 15 and substantially stays at that position and does not move. By repeating such a movement, the moving member 16 moves in the direction of the arrow a as a whole.
【００３１】第１及び第２の圧電変換素子を共振状態で
駆動するには、まず、第１の圧電変換素子１２の共振周
波数Ｒf1を、第２の圧電変換素子１４の共振周波数Ｒf2
の２倍（Ｒf1＝２×Ｒf2）になるように素子の積層数や
剛体の中間部材１３の大きさを調整する。To drive the first and second piezoelectric conversion elements in a resonance state, first, the resonance frequency Rf1 of the first piezoelectric conversion element 12 is changed to the resonance frequency Rf2 of the second piezoelectric conversion element 14.
(Rf1 = 2 × Rf2), the number of stacked elements and the size of the rigid intermediate member 13 are adjusted.
【００３２】そして、第１の圧電変換素子１２を駆動す
る駆動信号Ｄ1 の周波数ｆD1を、第１の圧電変換素子１
２の共振周波数Ｒf1に略一致した周波数ｆ1 に設定し
（駆動信号周波数ｆD1＝ｆ1 ）、第２の圧電変換素子１
４を駆動する駆動信号Ｄ2 の周波数ｆD2を、第２の圧電
変換素子１４の共振周波数Ｒf2に略一致した周波数ｆ2
に設定（駆動信号周波数ｆD2＝ｆ2 、ここで、ｆ2 ＝ｆ
1 ×１／２）して駆動することにより、第１及び第２の
圧電変換素子を共振状態で駆動することが可能になる。Then, the frequency fD1 of the drive signal D1 for driving the first piezoelectric conversion element 12 is changed to the first piezoelectric conversion element 1
The second piezoelectric conversion element 1 is set to a frequency f1 substantially equal to the resonance frequency Rf1 (drive signal frequency fD1 = f1).
The frequency fD2 of the drive signal D2 for driving the second piezoelectric transducer 4 is changed to the frequency f2 substantially matching the resonance frequency Rf2 of the second piezoelectric transducer 14.
(Drive signal frequency fD2 = f2, where f2 = f
1 × １ ／), the first and second piezoelectric conversion elements can be driven in a resonance state.
【００３３】これにより、圧電変換素子に印加する電力
に比較して大きな変位を発生させることができ、また、
駆動周波数を高く設定できるので駆動効率を高めること
ができる。Thus, a large displacement can be generated as compared with the electric power applied to the piezoelectric transducer.
Since the driving frequency can be set high, the driving efficiency can be increased.
【００３４】図２は、第１及び第２の圧電変換素子の駆
動波形と、第２の圧電変換素子１４の変位、駆動軸１５
の変位を説明する図である。FIG. 2 shows the driving waveforms of the first and second piezoelectric conversion elements, the displacement of the second piezoelectric conversion element 14 and the driving shaft 15.
FIG. 4 is a diagram for explaining displacement of the.
【００３５】図２において線（ａ）は第１の圧電変換素
子１２の駆動波形を示し、線（ｂ）は第２の圧電変換素
子１４の駆動波形を示す。また、線（ｃ）は駆動軸１５
の変位を示し、線（ｄ）は第２の圧電変換素子１４の変
位、線（ｅ）は中間部材１３の変位を示す。図２の線
（ｃ）から明らかなように、駆動軸１５には速度の異な
る往復振動が発生していることがわかる。In FIG. 2, line (a) shows the driving waveform of the first piezoelectric conversion element 12, and line (b) shows the driving waveform of the second piezoelectric conversion element 14. The line (c) represents the drive shaft 15.
The line (d) shows the displacement of the second piezoelectric conversion element 14, and the line (e) shows the displacement of the intermediate member 13. As is clear from the line (c) in FIG. 2, it can be seen that reciprocating vibrations having different speeds are generated on the drive shaft 15.
【００３６】また、図２の線（ａ）及び線（ｂ）に示す
ように、第２の圧電変換素子１４の駆動信号周波数ｆD2
＝ｆ2 は第１の圧電変換素子１２の駆動信号周波数ｆD1
の１／２倍（ｆ2 ＝ｆ1 ×１／２）であるが、第１の圧
電変換素子１２の変位量と第２の圧電変換素子１４の変
位量とのバランスをとるため、第２の圧電変換素子１４
の駆動信号の振幅は第１の圧電変換素子１２の駆動信号
の振幅の１／７程度に設定してある。Further, as shown by the lines (a) and (b) in FIG. 2, the drive signal frequency fD2 of the second piezoelectric transducer 14
= F2 is the drive signal frequency fD1 of the first piezoelectric transducer 12.
(F2 = f1 × 1/2), but the second piezoelectric element is used to balance the displacement of the first piezoelectric transducer 12 and the displacement of the second piezoelectric transducer 14. Conversion element 14
Is set to be about 1/7 of the amplitude of the drive signal of the first piezoelectric conversion element 12.
【００３７】第１の圧電変換素子１２及び第２の圧電変
換素子１４を、それぞれの素子の共振周波数に近い周波
数で駆動、即ち、共振状態で駆動しているため、駆動波
形に対して発生変位に遅れが生じるから、第１の圧電変
換素子１２の駆動信号と第２の圧電変換素子１４の駆動
信号との位相差を調整する必要がある。Since the first piezoelectric conversion element 12 and the second piezoelectric conversion element 14 are driven at a frequency close to the resonance frequency of each element, that is, driven in a resonance state, a displacement generated with respect to the drive waveform is generated. Therefore, it is necessary to adjust the phase difference between the drive signal of the first piezoelectric conversion element 12 and the drive signal of the second piezoelectric conversion element 14.
【００３８】また、第１及び第２の圧電変換素子の変位
が互いに影響し合うことによつて、前記した発生変位の
遅れの大きさ、及び変位の変化を示す波形も変化する。
さらに、駆動軸の変位特性が２倍の周波数比の正弦波を
加算することにより得られる波形と一致するのが最適で
あるとも限らない。Further, when the displacements of the first and second piezoelectric transducers affect each other, the magnitude of the delay of the generated displacement and the waveform indicating the change of the displacement also change.
Further, it is not always optimal that the displacement characteristic of the drive shaft coincides with a waveform obtained by adding a sine wave having a double frequency ratio.
【００３９】従つて、第１及び第２の圧電変換素子の駆
動信号の電圧比、位相等は実際にアクチエータを駆動し
てその駆動特性を測定することにより、最適な値を探す
のがよい。ここでは、第２の圧電変換素子の駆動信号の
位相を第１の圧電変換素子の駆動信号の位相に対して７
０度進めている。Therefore, it is preferable to find the optimum value of the voltage ratio, phase, and the like of the drive signals of the first and second piezoelectric transducers by actually driving the actuator and measuring its drive characteristics. Here, the phase of the drive signal of the second piezoelectric conversion element is set to 7 with respect to the phase of the drive signal of the first piezoelectric conversion element.
Advances 0 degrees.
【００４０】逆方向への駆動は、第１の圧電変換素子１
２の駆動信号の位相を反転することにより行なうことが
できる。この場合は、第１の圧電変換素子１２の駆動信
号の位相を第２の圧電変換素子１４の駆動信号の位相に
対して２５０度進めるか、１１０度遅らせればよい。The driving in the reverse direction is performed by the first piezoelectric conversion element 1.
2 can be performed by inverting the phase of the drive signal. In this case, the phase of the drive signal of the first piezoelectric conversion element 12 may be advanced by 250 degrees or delayed by 110 degrees with respect to the phase of the drive signal of the second piezoelectric conversion element 14.
【００４１】図３は、第１の圧電変換素子１２に供給さ
れる駆動信号の周波数と駆動軸１５の変位量との関係を
示す図である。第１の圧電変換素子に供給される駆動信
号の周波数ｆ1 を変えていくと、駆動信号の周波数ｆ1
が第１の圧電変換素子の共振周波数Ｒｆ1 及び第２の圧
電変換素子の共振周波数Ｒｆ2 に近付くと、第１及び第
２の圧電変換素子の共振により、駆動軸の変位量が大き
くなることが示されている。FIG. 3 is a diagram showing the relationship between the frequency of the drive signal supplied to the first piezoelectric transducer 12 and the amount of displacement of the drive shaft 15. When the frequency f1 of the drive signal supplied to the first piezoelectric transducer is changed, the frequency f1 of the drive signal is changed.
Approaching the resonance frequency Rf1 of the first piezoelectric conversion element and the resonance frequency Rf2 of the second piezoelectric conversion element, the displacement of the drive shaft increases due to the resonance of the first and second piezoelectric conversion elements. Have been.
【００４２】以上説明した実施の形態では、第１の圧電
変換素子１２を駆動する駆動信号Ｄ1 の周波数ｆD1を、
第１の圧電変換素子１２の共振周波数Ｒf1に略一致した
周波数ｆ1 に設定し（駆動信号周波数ｆD1＝ｆ1 ）、第
２の圧電変換素子１４を駆動する駆動信号Ｄ2 の周波数
ｆD2を、第２の圧電変換素子１４の共振周波数Ｒf2に略
一致した周波数ｆ2 に設定（駆動信号周波数ｆD2＝ｆ2
、ここで、ｆ2 ＝ｆ1×１／２）して駆動することによ
り、第１及び第２の圧電変換素子を共振状態で駆動して
いる。In the above-described embodiment, the frequency fD1 of the drive signal D1 for driving the first piezoelectric transducer 12 is
The frequency f1 is set substantially equal to the resonance frequency Rf1 of the first piezoelectric conversion element 12 (drive signal frequency fD1 = f1), and the frequency fD2 of the drive signal D2 for driving the second piezoelectric conversion element 14 is set to the second frequency. The frequency f2 is set to be substantially equal to the resonance frequency Rf2 of the piezoelectric transducer 14 (drive signal frequency fD2 = f2
Here, the first and second piezoelectric conversion elements are driven in a resonance state by driving with f2 = f1 × 1/2).
【００４３】しかし、この駆動信号の周波数と圧電変換
素子の共振周波数を逆に設定、即ち、第１の圧電変換素
子１２を駆動する駆動信号Ｄ1 の周波数ｆD1を第２の圧
電変換素子１４の共振周波数Ｒf2に略一致した周波数ｆ
2 に設定し、第２の圧電変換素子１４を駆動する駆動信
号Ｄ2 の周波数ｆD2を第１の圧電変換素子１２の共振周
波数Ｒf1に略一致した周波数ｆ1 に設定して駆動して
も、相互に振動が伝わり、それぞれの圧電変換素子が共
振状態になるので、上記した実施の形態と同様の効果を
得ることができる。However, the frequency of the drive signal and the resonance frequency of the piezoelectric transducer are set oppositely, that is, the frequency fD1 of the drive signal D1 for driving the first piezoelectric transducer 12 is set to the resonance frequency of the second piezoelectric transducer 14. Frequency f approximately equal to frequency Rf2
2 and the frequency fD2 of the drive signal D2 for driving the second piezoelectric conversion element 14 is set to a frequency f1 substantially matching the resonance frequency Rf1 of the first piezoelectric conversion element 12, Vibration is transmitted, and each piezoelectric conversion element is brought into a resonance state, so that the same effect as in the above-described embodiment can be obtained.
【００４４】例えば、前記した構成では第１、第２の圧
電変換素子を駆動する駆動信号Ｄ1の周波数ｆD1、及び
駆動信号Ｄ2 の周波数ｆD2を、それぞれの圧電変換素子
の共振周波数に略一致した周波数に設定（ｆD1＝ｆ1 、
ｆD2＝ｆ2 ）し、或いは駆動信号の周波数と圧電変換素
子の共振周波数を逆に設定（ｆD1＝ｆ2 、ｆD2＝ｆ1）
している（請求項４に対応）。For example, in the above-described configuration, the frequency fD1 of the drive signal D1 for driving the first and second piezoelectric conversion elements and the frequency fD2 of the drive signal D2 are set to frequencies substantially matching the resonance frequencies of the respective piezoelectric conversion elements. (FD1 = f1,
fD2 = f2), or the driving signal frequency and the resonance frequency of the piezoelectric transducer are set oppositely (fD1 = f2, fD2 = f1).
(Corresponding to claim 4).
【００４５】また、以上説明した実施の形態では、第２
の圧電変換素子の共振周波数Ｒｆ2が第１の圧電変換素
子の共振周波数Ｒｆ1 の略１／２倍になるように構成さ
れているが、第１及び第２の圧電変換素子の変位が十分
に得られる範囲内であれば、第２の圧電変換素子の共振
周波数Ｒｆ2 と第１の圧電変換素子の共振周波数Ｒｆ1
との関係は１／２倍から多少ずれてもよい。In the embodiment described above, the second
Is configured so that the resonance frequency Rf2 of the first piezoelectric conversion element is substantially half the resonance frequency Rf1 of the first piezoelectric conversion element, but sufficient displacement of the first and second piezoelectric conversion elements can be obtained. Within the range, the resonance frequency Rf2 of the second piezoelectric conversion element and the resonance frequency Rf1 of the first piezoelectric conversion element
May slightly deviate from 1/2 times.
【００４６】この場合、少なくとも一方の圧電変換素子
は共振状態から少々外れることになるが、両方の圧電変
換素子を非共振状態で駆動する場合に比較すれば、高い
駆動効率を得ることができると共に、低電圧での駆動が
可能となる。In this case, at least one of the piezoelectric conversion elements slightly deviates from the resonance state. However, as compared with the case where both the piezoelectric conversion elements are driven in the non-resonance state, a higher driving efficiency can be obtained and , And can be driven at a low voltage.
【００４７】また、第２の圧電変換素子１４を駆動する
駆動信号Ｄ2 の周波数ｆD2をその圧電変換素子１４の共
振周波数Ｒf2に略一致した周波数ｆ2 に設定（ｆD2＝ｆ
2 ）し、第１の圧電変換素子１２を駆動する駆動信号Ｄ
1 の周波数ｆD1をｆ2 の２倍に設定（ｆD1＝ｆ2 ×２）
してもよい（請求項５に対応）。Further, the frequency fD2 of the drive signal D2 for driving the second piezoelectric conversion element 14 is set to a frequency f2 substantially matching the resonance frequency Rf2 of the piezoelectric conversion element 14 (fD2 = f
2) The driving signal D for driving the first piezoelectric transducer 12
Set the frequency fD1 of 1 to twice that of f2 (fD1 = f2 × 2)
(May correspond to claim 5).
【００４８】この場合、駆動信号Ｄ1 の周波数ｆD1は第
１の圧電変換素子１２の共振周波数Ｒf1からずれるが、
前述のような効果が得られる。In this case, the frequency fD1 of the drive signal D1 is shifted from the resonance frequency Rf1 of the first piezoelectric transducer 12,
The effects described above can be obtained.
【００４９】また、第１の圧電変換素子１２を駆動する
駆動信号Ｄ1 の周波数ｆD1を第２の圧電変換素子１４の
共振周波数Ｒf2に略一致した周波数ｆ2 に設定（ｆD1＝
ｆ2）し、第２の圧電変換素子１４を駆動する駆動信号
Ｄ2 の周波数ｆD2をｆ2 の２倍に設定（ｆD2＝ｆ2 ×
２）してもよい（請求項６に対応）。Further, the frequency fD1 of the drive signal D1 for driving the first piezoelectric transducer 12 is set to a frequency f2 which substantially matches the resonance frequency Rf2 of the second piezoelectric transducer 14 (fD1 =
f2), and set the frequency fD2 of the drive signal D2 for driving the second piezoelectric transducer 14 to twice the frequency f2 (fD2 = f2 ×
2) may be applied (corresponding to claim 6).
【００５０】この場合、駆動信号Ｄ2 の周波数ｆD2は第
１の圧電変換素子１２の共振周波数Ｒf1からずれるが、
前述のような効果が得られる。In this case, the frequency fD2 of the drive signal D2 deviates from the resonance frequency Rf1 of the first piezoelectric transducer 12,
The effects described above can be obtained.
【００５１】さらに第１の圧電変換素子１２を駆動する
駆動信号Ｄ1 の周波数ｆD1を第１の圧電変換素子１２の
共振周波数Ｒf1に略一致した周波数ｆ1 に設定（ｆD1＝
ｆ1）し、第２の圧電変換素子１４を駆動する駆動信号
Ｄ2 の周波数ｆD2をｆ1 の１／２倍に設定（ｆD2＝ｆ1
×１／２）してもよい（請求項７に対応）。Further, the frequency fD1 of the driving signal D1 for driving the first piezoelectric conversion element 12 is set to a frequency f1 substantially matching the resonance frequency Rf1 of the first piezoelectric conversion element 12 (fD1 =
f1), and the frequency fD2 of the drive signal D2 for driving the second piezoelectric transducer 14 is set to 1/2 of f1 (fD2 = f1).
× 1/2) (corresponding to claim 7).
【００５２】この場合、駆動信号Ｄ2 の周波数ｆD2は第
２の圧電変換素子１４の共振周波数Ｒf2からずれるが、
前述のような効果が得られる。In this case, the frequency fD2 of the drive signal D2 deviates from the resonance frequency Rf2 of the second piezoelectric transducer 14,
The effects described above can be obtained.
【００５３】また、第２の圧電変換素子１４を駆動する
駆動信号Ｄ2 の周波数ｆD2を第１の圧電変換素子１２の
共振周波数Ｒf1に略一致した周波数ｆ1 に設定（ｆD2＝
ｆ1）し、第２の圧電変換素子１４を駆動する駆動信号
Ｄ2 の周波数ｆD2をｆ1 の１／２倍に設定（ｆD2＝ｆ1
×１／２）してもよい（請求項８に対応）。Further, the frequency fD2 of the drive signal D2 for driving the second piezoelectric conversion element 14 is set to a frequency f1 substantially matching the resonance frequency Rf1 of the first piezoelectric conversion element 12 (fD2 =
f1), and the frequency fD2 of the drive signal D2 for driving the second piezoelectric transducer 14 is set to 1/2 of f1 (fD2 = f1).
× 1/2) (corresponding to claim 8).
【００５４】この場合、駆動信号Ｄ2 の周波数ｆD2は第
１の圧電変換素子１２の共振周波数Ｒf1からずれるが、
前述のような効果が得られる。In this case, the frequency fD2 of the drive signal D2 deviates from the resonance frequency Rf1 of the first piezoelectric transducer 12,
The effects described above can be obtained.
【００５５】さらに、第１の圧電変換素子１２を駆動す
る駆動信号Ｄ1 の周波数ｆD1が第１の圧電変換素子１２
の共振周波数Ｒf1からずれると共に、第２の圧電変換素
子１４を駆動する駆動信号Ｄ2 の周波数ｆD2が第２の圧
電変換素子１４の共振周波数Ｒf2からずれてもよい。但
し、駆動信号Ｄ1 の周波数ｆD1と駆動信号Ｄ2 の周波数
ｆD2とは、２倍又は１／２倍の関係を維持する必要があ
る。何故ならば、この関係が維持されないと駆動信号相
互の位相がずれてしまうからである。Further, the frequency fD1 of the drive signal D1 for driving the first piezoelectric conversion element 12 is
And the frequency fD2 of the drive signal D2 for driving the second piezoelectric conversion element 14 may deviate from the resonance frequency Rf2 of the second piezoelectric conversion element 14. However, the frequency fD1 of the drive signal D1 and the frequency fD2 of the drive signal D2 need to maintain a double or 1/2 relationship. This is because if this relationship is not maintained, the phases of the drive signals will be shifted.
【００５６】［第２の実施の形態］図４は、この発明の
第２の実施の形態のインパクト型アクチエータ２０の構
成の概略を示す正面図である。第１の実施の形態のイン
パクト型アクチエータ１０との相違点は、第１及び第２
の圧電変換素子の構成が異なる点にある。即ち、第１の
圧電変換素子２２を単層の圧電変換素子２２ａとアルミ
ニウムなどの弾性体２２ｂとを接合したもので構成し、
また第２の圧電変換素子２４を単層の圧電変換素子２４
ａとアルミニウムなどの弾性体２４ｂとを接合したもの
で構成する。その他の構成部分は、第１の実施の形態の
インパクト型アクチエータと同じであるので、同一部分
には同一符号を付して説明を省略する。[Second Embodiment] FIG. 4 is a front view schematically showing the structure of an impact type actuator 20 according to a second embodiment of the present invention. The difference from the impact type actuator 10 of the first embodiment is that the first and second embodiments are different.
Is different in the configuration of the piezoelectric conversion element. That is, the first piezoelectric conversion element 22 is formed by joining a single-layer piezoelectric conversion element 22a and an elastic body 22b such as aluminum,
Further, the second piezoelectric conversion element 24 is replaced with a single-layer piezoelectric conversion element 24.
a and an elastic body 24b such as aluminum. Other components are the same as those of the impact-type actuator of the first embodiment, and therefore, the same components are denoted by the same reference numerals and description thereof will be omitted.
【００５７】第２の実施の形態のインパクト型アクチエ
ータ２０の動作は、先に説明した第１の実施の形態のも
のと同様であるので説明を省略する。The operation of the impact type actuator 20 according to the second embodiment is the same as that of the first embodiment described above, and the description is omitted.
【００５８】この構成においては、第１の圧電変換素子
２２（単層の圧電変換素子２２ａとアルミニウムなどの
弾性体２２ｂとを接合したもの）、及び第２の圧電変換
素子２４（単層の圧電変換素子２４ａとアルミニウムな
どの弾性体２４ｂとを接合したもの）の共振周波数の調
整は、それぞれの素子を構成する弾性体２２ｂと２４ｂ
の軸方向の長さなど大きさを変更して調整することがで
きる。In this configuration, a first piezoelectric conversion element 22 (a single-layer piezoelectric conversion element 22a and an elastic body 22b such as aluminum) are joined, and a second piezoelectric conversion element 24 (a single-layer piezoelectric conversion element 22). Adjustment of the resonance frequency of the conversion element 24a and the elastic body 24b such as aluminum) is performed by adjusting the elastic bodies 22b and 24b constituting the respective elements.
Can be adjusted by changing the size such as the length in the axial direction.
【００５９】この構成によれば、圧電変換素子での消費
電流が減少し、効率が向上するほか、製造コストを低減
させることができる。また、ベース１１と剛体の中間部
材１３を導電性の金属で構成することにより、ベース１
１と剛体の中間部材１３を圧電変換素子の接続端子とし
て利用することができ、構成を簡潔に纏めることができ
る。According to this configuration, the current consumption of the piezoelectric transducer is reduced, the efficiency is improved, and the manufacturing cost can be reduced. Further, by forming the base 11 and the rigid intermediate member 13 with conductive metal, the base 1
1 and the rigid intermediate member 13 can be used as connection terminals of the piezoelectric conversion element, and the configuration can be summarized simply.
【００６０】[0060]
【発明の効果】以上説明したとおり、この発明のアクチ
エータは、第１の駆動信号により伸縮変位を発生する第
１の圧電変換素子と、第２の駆動信号により伸縮変位を
発生する第２の圧電変換素子と、前記第１の圧電変換素
子の第１の端部に接合された駆動軸と、前記駆動軸に摩
擦結合した移動部材と、固定部材とを備え、前記第２の
圧電変換素子の第１の端部は前記第１の圧電変換素子の
駆動軸側の第１の端部とは反対側の第２の端部に接合さ
れ、第２の圧電変換素子の第２の端部は前記固定部材に
接合されており、前記第１の圧電変換素子の共振周波数
が前記第２の圧電変換素子の共振周波数の約２倍になる
ように設定されている。As described above, the actuator of the present invention comprises a first piezoelectric conversion element for generating an expansion and contraction displacement by a first drive signal and a second piezoelectric element for generating an expansion and contraction displacement by a second drive signal. A conversion element, a drive shaft joined to a first end of the first piezoelectric conversion element, a moving member frictionally coupled to the drive shaft, and a fixed member. The first end is joined to a second end of the first piezoelectric conversion element opposite to the first end on the drive shaft side, and the second end of the second piezoelectric conversion element is The first piezoelectric conversion element is joined to the fixing member, and is set so that the resonance frequency of the first piezoelectric conversion element is about twice the resonance frequency of the second piezoelectric conversion element.
【００６１】そして、このアクチエータを駆動するとき
は、前記第１及び前記第２の圧電変換素子を、それぞれ
の圧電変換素子の共振周波数、又は互いに他の圧電変換
素子の共振周波数に略一致した周波数の駆動信号で駆動
するか、或いは、一方の圧電変換素子をその圧電変換素
子の共振周波数又はもう一方の圧電変換素子の共振周波
数に略一致した周波数の第１の駆動信号で駆動し、もう
一方の圧電変換素子を前記第１の駆動信号の周波数の１
／２又は２倍の周波数の第２の駆動信号で駆動する。When the actuator is driven, the first and second piezoelectric conversion elements are set to a frequency substantially equal to the resonance frequency of each piezoelectric conversion element or to the resonance frequency of another piezoelectric conversion element. Or one of the piezoelectric transducers is driven by a first drive signal having a frequency substantially equal to the resonance frequency of the piezoelectric transducer or the resonance frequency of the other piezoelectric transducer, and the other is driven by the other drive signal. Of the first drive signal at the frequency of 1 of the first drive signal.
It is driven by a second drive signal of / 2 or twice the frequency.
【００６２】これによりこれ等の２つの圧電変換素子は
共振状態又は共振状態に近い状態で駆動されて大きな振
幅が得られるので、移動部材の移動速度を高めることが
できて高い駆動効率を得ることができると共に、駆動の
ための電源電圧を比較的低電圧とすることが可能とな
る。As a result, these two piezoelectric transducers are driven in a resonance state or a state close to the resonance state to obtain a large amplitude, so that the moving speed of the moving member can be increased and high driving efficiency can be obtained. And the power supply voltage for driving can be made relatively low.
【図１】第１の実施の形態のインパクト型アクチエータ
の構成の概略を示す正面図。FIG. 1 is a front view schematically showing the configuration of an impact type actuator according to a first embodiment.
【図２】第１及び第２の圧電変換素子の駆動波形と、第
２の圧電変換素子の変位、及び駆動軸の変位を説明する
図。FIG. 2 is a view for explaining drive waveforms of first and second piezoelectric transducers, displacement of a second piezoelectric transducer, and displacement of a drive shaft.
【図３】第１の圧電変換素子の駆動信号周波数と駆動軸
変位量との関係を示す図。FIG. 3 is a diagram illustrating a relationship between a drive signal frequency of a first piezoelectric conversion element and a drive shaft displacement amount.
【図４】第２の実施の形態のアクチエータの構成の概略
を示す正面図。FIG. 4 is a front view schematically showing the configuration of an actuator according to a second embodiment.
１０ 第１の実施の形態のアクチエータ １１ ベース（固定部材） １２ 第１の圧電変換素子（積層型圧電変換素子） １３ 中間部材（剛体） １４ 第２の圧電変換素子（積層型圧電変換素子） １５ 駆動軸 １６ 移動部材 １７ 第１の駆動回路 １８ 第２の駆動回路 ２０ 第２の実施の形態のアクチエータ ２２ 第１の圧電変換素子（単層圧電変換素子と弾性
体） ２２ａ 単層圧電変換素子 ２２ｂ 弾性体 ２４ 第２の圧電変換素子（単層圧電変換素子と弾性
体） ２４ａ 単層圧電変換素子 ２４ｂ 弾性体Reference Signs List 10 Actuator of first embodiment 11 Base (fixing member) 12 First piezoelectric conversion element (multilayer piezoelectric conversion element) 13 Intermediate member (rigid body) 14 Second piezoelectric conversion element (multilayer piezoelectric conversion element) 15 Drive shaft 16 Moving member 17 First drive circuit 18 Second drive circuit 20 Actuator of second embodiment 22 First piezoelectric conversion element (single-layer piezoelectric conversion element and elastic body) 22a Single-layer piezoelectric conversion element 22b Elastic body 24 Second piezoelectric conversion element (single-layer piezoelectric conversion element and elastic body) 24a Single-layer piezoelectric conversion element 24b Elastic body
Claims (8)
る第１の圧電変換素子と、 第２の駆動信号により伸縮変位を発生する第２の圧電変
換素子と、 前記第１の圧電変換素子の第１の端部に接合された駆動
軸と、 前記駆動軸に摩擦結合した移動部材と、 固定部材とを備え、 前記第２の圧電変換素子の第１の端部は前記第１の圧電
変換素子の駆動軸側端部と反対側の第２の端部に接合さ
れ、第２の圧電変換素子の第２の端部は前記固定部材に
接合されており、前記第１の圧電変換素子の共振周波数
が前記第２の圧電変換素子の共振周波数の約２倍になる
ように設定されていることを特徴とする圧電変換素子を
使用したアクチエータ。1. A first piezoelectric conversion element that generates expansion and contraction displacement by a first drive signal, a second piezoelectric conversion element that generates expansion and contraction displacement by a second drive signal, and the first piezoelectric conversion element A drive shaft joined to a first end of the first piezoelectric transducer, a moving member frictionally coupled to the drive shaft, and a fixed member, wherein a first end of the second piezoelectric transducer is the first piezoelectric transducer. The second piezoelectric conversion element is joined to a second end opposite to the drive shaft end of the conversion element, and a second end of the second piezoelectric conversion element is joined to the fixing member, and the first piezoelectric conversion element Wherein the resonance frequency is set to be about twice the resonance frequency of the second piezoelectric conversion element.
の圧電素子を積層した積層型圧電変換素子であることを
特徴とする請求項１記載の圧電変換素子を使用したアク
チエータ。2. An actuator using a piezoelectric transducer according to claim 1, wherein said first and second piezoelectric transducers are laminated piezoelectric transducers in which a single piezoelectric transducer is laminated.
ぞれ圧電素子と弾性体とを接合した圧電変換素子から構
成されることを特徴とする請求項１記載の圧電変換素子
を使用したアクチエータ。3. The actuator according to claim 1, wherein each of the first and second piezoelectric conversion elements comprises a piezoelectric conversion element in which a piezoelectric element and an elastic body are joined. .
の圧電変換素子を使用したアクチエータを駆動するアク
チエータの駆動方法であつて、 前記第１及び前記第２の圧電変換素子を、それぞれの圧
電変換素子の共振周波数又は互いに他の圧電変換素子の
共振周波数に略一致した周波数の第１及び第２の駆動信
号で駆動することを特徴とする圧電変換素子を使用した
アクチエータの駆動方法。4. A method of driving an actuator that drives an actuator using the piezoelectric conversion element according to claim 1, wherein the first and second piezoelectric conversion elements are respectively provided. A method of driving an actuator using a piezoelectric transducer, wherein the actuator is driven by first and second drive signals having frequencies substantially equal to the resonance frequency of the piezoelectric transducer or the resonance frequency of another piezoelectric transducer.
の圧電変換素子を使用したアクチエータを駆動するアク
チエータの駆動方法であつて、 前記第２の圧電変換素子をその圧電変換素子の共振周波
数に略一致した周波数の第２の駆動信号で駆動し、前記
第１の圧電変換素子を前記第２の駆動信号の周波数の２
倍の周波数の第１の駆動信号で駆動することを特徴とす
る圧電変換素子を使用したアクチエータの駆動方法。5. An actuator driving method for driving an actuator using the piezoelectric conversion element according to claim 1, wherein the second piezoelectric conversion element is connected to a resonance of the piezoelectric conversion element. The first piezoelectric transducer is driven by a second drive signal having a frequency substantially equal to the frequency, and the first piezoelectric conversion element is driven by a second drive signal having a frequency equal to the frequency of the second drive signal.
A method of driving an actuator using a piezoelectric transducer, wherein the method is driven by a first drive signal having a double frequency.
の圧電変換素子を使用したアクチエータを駆動するアク
チエータの駆動方法であつて、 前記第１の圧電変換素子を前記第２の圧電変換素子の共
振周波数に略一致した周波数の第１の駆動信号で駆動
し、前記第２の圧電変換素子を前記第１の駆動信号の周
波数の２倍の周波数の第２の駆動信号で駆動することを
特徴とする圧電変換素子を使用したアクチエータの駆動
方法。6. An actuator driving method for driving an actuator using the piezoelectric conversion element according to claim 1, wherein the first piezoelectric conversion element is connected to the second piezoelectric conversion element. Driving with a first drive signal having a frequency substantially equal to the resonance frequency of the element, and driving the second piezoelectric transducer with a second drive signal having a frequency twice as high as the frequency of the first drive signal. A method of driving an actuator using a piezoelectric conversion element, characterized by comprising:
の圧電変換素子を使用したアクチエータを駆動するアク
チエータの駆動方法であつて、 前記第１の圧電変換素子をその圧電変換素子の共振周波
数に略一致した周波数の第１の駆動信号で駆動し、前記
第２の圧電変換素子を前記第１の駆動信号の周波数の１
／２の周波数の第２の駆動信号で駆動することを特徴と
する圧電変換素子を使用したアクチエータの駆動方法。7. An actuator driving method for driving an actuator using the piezoelectric conversion element according to claim 1, wherein the first piezoelectric conversion element is connected to a resonance of the piezoelectric conversion element. The first piezoelectric transducer is driven by a first drive signal having a frequency substantially equal to the frequency, and the second piezoelectric conversion element is driven at a frequency of 1 of the first drive signal.
A method for driving an actuator using a piezoelectric transducer, wherein the actuator is driven by a second drive signal having a frequency of / 2.
の圧電変換素子を使用したアクチエータを駆動するアク
チエータの駆動方法であつて、 前記第２の圧電変換素子を前記第１の圧電変換素子の共
振周波数に略一致した周波数の第２の駆動信号で駆動
し、前記第１の圧電変換素子を前記第２の駆動信号の周
波数の１／２の周波数の第１の駆動信号で駆動すること
を特徴とする圧電変換素子を使用したアクチエータの駆
動方法。8. An actuator driving method for driving an actuator using the piezoelectric conversion element according to claim 1, wherein said second piezoelectric conversion element is connected to said first piezoelectric conversion element. The first piezoelectric conversion element is driven by a second drive signal having a frequency substantially equal to the resonance frequency of the element, and the first piezoelectric conversion element is driven by a first drive signal having a frequency half of the frequency of the second drive signal. A method of driving an actuator using a piezoelectric transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29788599A JP2001119962A (en) | 1999-10-20 | 1999-10-20 | Actuator using piezoelectric crystal element and drive method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29788599A JP2001119962A (en) | 1999-10-20 | 1999-10-20 | Actuator using piezoelectric crystal element and drive method therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001119962A true JP2001119962A (en) | 2001-04-27 |
Family
ID=17852379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29788599A Pending JP2001119962A (en) | 1999-10-20 | 1999-10-20 | Actuator using piezoelectric crystal element and drive method therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001119962A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006081290A (en) * | 2004-09-09 | 2006-03-23 | Konica Minolta Opto Inc | Self-oscillation circuit and driving device using the same |
| US7432636B2 (en) * | 2004-09-22 | 2008-10-07 | Fujinon Corporation | Driving device and optical instrument |
| WO2011096199A1 (en) * | 2010-02-04 | 2011-08-11 | コニカミノルタオプト株式会社 | Drive apparatus |
-
1999
- 1999-10-20 JP JP29788599A patent/JP2001119962A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006081290A (en) * | 2004-09-09 | 2006-03-23 | Konica Minolta Opto Inc | Self-oscillation circuit and driving device using the same |
| US7432636B2 (en) * | 2004-09-22 | 2008-10-07 | Fujinon Corporation | Driving device and optical instrument |
| WO2011096199A1 (en) * | 2010-02-04 | 2011-08-11 | コニカミノルタオプト株式会社 | Drive apparatus |
| JP5767120B2 (en) * | 2010-02-04 | 2015-08-19 | 森田 剛 | Drive device |
| US9154055B2 (en) | 2010-02-04 | 2015-10-06 | Konica Minolta, Inc. | Drive device |
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