JP2001095224A - Linear motor - Google Patents
Linear motorInfo
- Publication number
- JP2001095224A JP2001095224A JP26505799A JP26505799A JP2001095224A JP 2001095224 A JP2001095224 A JP 2001095224A JP 26505799 A JP26505799 A JP 26505799A JP 26505799 A JP26505799 A JP 26505799A JP 2001095224 A JP2001095224 A JP 2001095224A
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- permanent magnet
- linear motor
- permanent magnets
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Landscapes
- Linear Motors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造装置や
工作機械に用いられ、精度や速度、応答性で高い性能が
要求される永久磁石形のリニアモータに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a permanent magnet type linear motor used for semiconductor manufacturing equipment and machine tools and requiring high performance in accuracy, speed and responsiveness.
【０００２】[0002]
【従来の技術】従来、界磁部と電機子巻線部とからなる
リニアモータの構造は、図３に示すようになっている。
図３において、１はリニアモータで、界磁部２と電機子
巻線部３とからなっている。前記界磁部２は、ヨーク支
持部４で支持された対向する２つのヨーク５Ａの内側に
複数個の永久磁石６が等ピッチで固着されて構成され、
前記電機子巻線部３は、前記永久磁石６間の磁気空隙内
に配置されている。永久磁石６は、対向するもの同士が
異極となるよう着磁されており、電機子巻線部３に電流
を流すと永久磁石６と電機子巻線部３間に力が発生し、
移動子である電機子巻線部３が動く。ヨーク５Ａの永久
磁石６が固着される部分には、図４に示すように、永久
磁石位置決め用の凹部７を形成し、接着剤により位置決
め固定している。2. Description of the Related Art Conventionally, the structure of a linear motor comprising a field portion and an armature winding portion is as shown in FIG.
In FIG. 3, reference numeral 1 denotes a linear motor, which comprises a field part 2 and an armature winding part 3. The field part 2 is configured such that a plurality of permanent magnets 6 are fixed at equal pitches inside two opposing yokes 5A supported by a yoke support part 4,
The armature winding part 3 is arranged in a magnetic gap between the permanent magnets 6. The permanent magnet 6 is magnetized so that opposing magnets have different polarities. When a current flows through the armature winding 3, a force is generated between the permanent magnet 6 and the armature winding 3,
The armature winding unit 3 as a mover moves. As shown in FIG. 4, a concave portion 7 for positioning the permanent magnet is formed in a portion of the yoke 5A where the permanent magnet 6 is fixed, and is fixed by an adhesive.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな従来のリニアモータにおいては、ヨーク５Ａに永久
磁石固定用の凹部７を形成しているため、ヨークの形状
が複雑になり製作に時間がかかるとともに、高コストに
なるという問題があった。本発明は、このような問題を
解消するためになされたもので、ヨークの形状を簡素化
し、界磁部の製作時間を短縮するとともに、コストを低
減することができるリニアモータを提供することを目的
とするものである。However, in such a conventional linear motor, since the recess 7 for fixing the permanent magnet is formed in the yoke 5A, the shape of the yoke becomes complicated, and it takes time to manufacture. In addition, there was a problem that the cost was high. The present invention has been made in order to solve such a problem, and it is an object of the present invention to provide a linear motor capable of simplifying a shape of a yoke, shortening a time required for manufacturing a field portion, and reducing costs. It is the purpose.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は、対向する２つのヨークの内側に複数個の
永久磁石が等ピッチで固着された構造の界磁部と、前記
永久磁石間の磁気空隙内に配置された電機子巻線部とか
らなり、前記電機子巻線部に電流励磁して推力を発生さ
せ直線運動をするリニアモータにおいて、前記ヨーク
に、等ピッチの溝を形成した永久磁石固定用ガイドを接
着固定するとともに、複数の永久磁石を、前記永久磁石
固定用ガイドの溝内に挿入して位置決めし、かつ接着固
定するようにしたものである。上記手段により、ヨーク
の形状を簡素化することができ、かつ、ガイドと永久磁
石を同時にヨークに接着することにより界磁側の製作時
間が短縮される。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a field portion having a structure in which a plurality of permanent magnets are fixed at equal pitches inside two opposing yokes; An armature winding portion disposed in a magnetic gap between the armature winding portion, and a linear motor that generates a thrust by performing a current excitation on the armature winding portion and performs a linear motion. The formed permanent magnet fixing guide is bonded and fixed, and a plurality of permanent magnets are inserted and positioned in the groove of the permanent magnet fixing guide and bonded and fixed. By the above means, the shape of the yoke can be simplified, and the production time on the field side can be reduced by simultaneously bonding the guide and the permanent magnet to the yoke.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図１は本発明の実施例におけるリニアモ
ータの界磁部（片側）を示す斜視図でであり、図２は図
１における永久磁石固定用ガイドの斜視図である。本発
明のリニアモータの基本構成は、従来のリニアモータと
略同じであるが、図１に示すように、ヨーク５に、等ピ
ッチの溝８を形成した永久磁石固定用ガイド９を接着固
定し、同時に複数の永久磁石６を、前記永久磁石固定用
ガイド９の溝８内に挿入して位置決めし、かつ接着固定
するようにしており、この点が従来と大きく異なってい
る。なお、永久磁石固定用ガイド９は、ヨーク５に、端
面合わせで接着固定するので位置決め精度は十分維持す
ることができ、永久磁石６の位置精度に悪影響が生じる
ことはない。このようにすることにより、ヨーク５は、
単純な長方形形状にして形状を簡素化することができ、
界磁部の製作時間を大きく短縮し、コストを低減するこ
とができる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a field portion (one side) of a linear motor according to an embodiment of the present invention, and FIG. 2 is a perspective view of a permanent magnet fixing guide in FIG. The basic structure of the linear motor according to the present invention is substantially the same as that of the conventional linear motor. However, as shown in FIG. At the same time, a plurality of permanent magnets 6 are inserted into the grooves 8 of the permanent magnet fixing guide 9 to be positioned and bonded and fixed, which is significantly different from the related art. In addition, since the permanent magnet fixing guide 9 is bonded and fixed to the yoke 5 by end-to-end alignment, the positioning accuracy can be sufficiently maintained, and the position accuracy of the permanent magnet 6 is not adversely affected. By doing so, the yoke 5 is
The shape can be simplified by making it a simple rectangular shape,
The manufacturing time of the field part can be greatly reduced, and the cost can be reduced.
【０００６】[0006]
【発明の効果】以上述べたように、本発明によれば、従
来のヨークの形状を簡素化することができ、界磁部の製
作時間を大きく短縮し、コストを低減することができ
る。As described above, according to the present invention, the shape of the conventional yoke can be simplified, the time required for manufacturing the field portion can be greatly reduced, and the cost can be reduced.
【図１】 本発明の実施例におけるリニアモータの界磁
部（片側）を示す斜視図である。FIG. 1 is a perspective view showing a field portion (one side) of a linear motor according to an embodiment of the present invention.
【図２】 図１における永久磁石固定用ガイドの斜視図
である。FIG. 2 is a perspective view of a permanent magnet fixing guide in FIG. 1;
【図３】 従来技術におけるリニアモータを示す斜視図
である。FIG. 3 is a perspective view showing a linear motor according to the related art.
【図４】 図３におけるヨ−クの斜視図である。FIG. 4 is a perspective view of the yoke in FIG.
１ リニアモータ、 ２ 界磁部、 ３ 電機子巻線部、 ４ ヨーク支持部、 ５ ヨーク、 ６ 永久磁石、 ７ 凹部、 ８ 溝、 ９ 永久磁石固定用ガイド DESCRIPTION OF SYMBOLS 1 Linear motor, 2 Field part, 3 Armature winding part, 4 Yoke support part, 5 Yoke, 6 Permanent magnet, 7 Recess, 8 groove, 9 Guide for fixing permanent magnet
Claims (1)
永久磁石が等ピッチで固着された構造の界磁部と、前記
永久磁石間の磁気空隙内に配置された電機子巻線部とか
らなり、前記電機子巻線部に電流励磁して推力を発生さ
せ直線運動をするリニアモータにおいて、 前記ヨークに、等ピッチの溝を形成した永久磁石固定用
ガイドを接着固定するとともに、複数の永久磁石を、前
記永久磁石固定用ガイドの溝内に挿入して位置決めし、
かつ接着固定したことを特徴とするリニアモータ。1. A field section having a structure in which a plurality of permanent magnets are fixed at equal pitches inside two opposed yokes, and an armature winding section disposed in a magnetic gap between the permanent magnets. In the linear motor, which generates a thrust by exciting a current in the armature winding portion and performs a linear motion, a permanent magnet fixing guide having grooves formed at equal pitches is bonded and fixed to the yoke. Position the permanent magnet by inserting it into the groove of the permanent magnet fixing guide,
A linear motor characterized by being adhered and fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26505799A JP2001095224A (en) | 1999-09-20 | 1999-09-20 | Linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26505799A JP2001095224A (en) | 1999-09-20 | 1999-09-20 | Linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001095224A true JP2001095224A (en) | 2001-04-06 |
| JP2001095224A5 JP2001095224A5 (en) | 2006-06-15 |
Family
ID=17411994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26505799A Abandoned JP2001095224A (en) | 1999-09-20 | 1999-09-20 | Linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001095224A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002095898A1 (en) * | 2001-05-22 | 2002-11-28 | Soonhan Engineering Inc. | Magnet fixing method of a linear servo motor |
| JP2008035676A (en) * | 2006-07-31 | 2008-02-14 | Mitsubishi Electric Corp | Linear motor manufacturing method and magnet-inserting tool used by the method, and linear motor stator manufacturing method and linear motor |
| KR100987206B1 (en) * | 2008-08-06 | 2010-10-12 | 순환엔지니어링 주식회사 | Plate structure for magnet attachment and method for attaching magnet on the plate structure |
-
1999
- 1999-09-20 JP JP26505799A patent/JP2001095224A/en not_active Abandoned
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002095898A1 (en) * | 2001-05-22 | 2002-11-28 | Soonhan Engineering Inc. | Magnet fixing method of a linear servo motor |
| JP2008035676A (en) * | 2006-07-31 | 2008-02-14 | Mitsubishi Electric Corp | Linear motor manufacturing method and magnet-inserting tool used by the method, and linear motor stator manufacturing method and linear motor |
| KR100987206B1 (en) * | 2008-08-06 | 2010-10-12 | 순환엔지니어링 주식회사 | Plate structure for magnet attachment and method for attaching magnet on the plate structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060426 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060426 |
|
| A762 | Written abandonment of application |
Free format text: JAPANESE INTERMEDIATE CODE: A762 Effective date: 20090714 |