JP2001091265A5 - - Google Patents
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- Publication number
- JP2001091265A5 JP2001091265A5 JP2000220922A JP2000220922A JP2001091265A5 JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5 JP 2000220922 A JP2000220922 A JP 2000220922A JP 2000220922 A JP2000220922 A JP 2000220922A JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000220922A JP4427876B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体角速度センサ |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-207715 | 1999-07-22 | ||
JP20771599 | 1999-07-22 | ||
JP2000220922A JP4427876B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体角速度センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001091265A JP2001091265A (ja) | 2001-04-06 |
JP2001091265A5 true JP2001091265A5 (fr) | 2008-09-04 |
JP4427876B2 JP4427876B2 (ja) | 2010-03-10 |
Family
ID=26516424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000220922A Expired - Fee Related JP4427876B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体角速度センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4427876B2 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7302847B2 (en) * | 2004-08-17 | 2007-12-04 | Nippon Soken, Inc. | Physical quantity sensor having movable portion |
JP4528720B2 (ja) * | 2005-12-28 | 2010-08-18 | 株式会社東芝 | 赤外線検出素子およびその製造方法と赤外線カメラ |
JP2007218608A (ja) * | 2006-02-14 | 2007-08-30 | Denso Corp | 半導体力学量センサ |
JP5206709B2 (ja) | 2009-03-18 | 2013-06-12 | 株式会社豊田中央研究所 | 可動体を備えている装置 |
JP4905574B2 (ja) | 2010-03-25 | 2012-03-28 | 株式会社豊田中央研究所 | 可動部分を備えている積層構造体 |
JP7135291B2 (ja) * | 2017-10-24 | 2022-09-13 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体 |
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2000
- 2000-07-21 JP JP2000220922A patent/JP4427876B2/ja not_active Expired - Fee Related