JP2001090849A - Opening/closing device for gate valve - Google Patents
Opening/closing device for gate valveInfo
- Publication number
- JP2001090849A JP2001090849A JP26831199A JP26831199A JP2001090849A JP 2001090849 A JP2001090849 A JP 2001090849A JP 26831199 A JP26831199 A JP 26831199A JP 26831199 A JP26831199 A JP 26831199A JP 2001090849 A JP2001090849 A JP 2001090849A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pressing plate
- groove
- concave surface
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sliding Valves (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はゲートバルブの開閉
装置、特に、滑りや摩擦を生じないゲートバルブの開閉
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an opening and closing device for a gate valve, and more particularly to an opening and closing device for a gate valve which does not cause sliding or friction.
【０００２】[0002]
【従来の技術】従来、コロを使って弁座に弁板を押圧し
てバルブ開口を閉じるようにしたゲートバルブは例え
ば、実開昭５１−１１５６３９号等に示されている。2. Description of the Related Art Conventionally, a gate valve which closes a valve opening by pressing a valve plate against a valve seat using a roller is disclosed in, for example, Japanese Utility Model Laid-Open No. 51-15639.
【０００３】[0003]
【発明が解決しようとする課題】然しながら、このよう
な従来のゲートバルブの開閉装置においては、滑りや摩
擦部分が多くパーテクルの発生が多くなるため、特に半
導体ウエハー等の処理装置に用いるゲートバルブの開閉
装置としては不適当であった。However, in such a conventional gate valve opening / closing apparatus, since there are many slips and frictional parts and the generation of particles increases, the gate valve used in a processing apparatus for processing semiconductor wafers and the like is particularly required. It was unsuitable as a switchgear.
【０００４】本発明はこのような欠点を除くようにした
ものである。The present invention has been made to eliminate such disadvantages.
【０００５】[0005]
【課題を解決するための手段】本発明のゲートバルブの
開閉装置は、弁板を弁座に対し押圧するための弁板押え
と、上記弁座に対向するバルブ本体の台座と上記弁板押
え間に介挿した、これらと相対的に互に対向する面に沿
って一方向に移動自在な押圧板と、この押圧板の移動手
段と、上記弁板押えと上記押圧板の対向面に互に円周方
向に離間した位置で形成した第１，第２の溝面と、この
溝面間に介挿した第１のボールとを有し、上記第１，第
２の溝面は、互に対向する位置に設けた上記第１のボー
ルの略半周面に合致する球状凹面を有し、上記第１の溝
面は上記球状凹面から上記押圧板のバルブ閉時の移動方
向と同一方向に延びる、上記球状凹面より浅い浅溝面を
有し、上記第２の溝面は上記球状凹面から上記押圧板の
バルブ開時の移動方向と同一方向に延びる、上記球状凹
面より浅い浅溝面を有することを特徴とする。According to the present invention, there is provided a gate valve opening / closing device, comprising: a valve plate retainer for pressing a valve plate against a valve seat; a base of a valve body opposed to the valve seat; and the valve plate retainer. A pressing plate interposed therebetween, which is movable in one direction along surfaces relatively opposed to each other, a moving means of the pressing plate, and a facing surface of the valve plate retainer and the pressing plate. And first and second groove surfaces formed at positions spaced apart in the circumferential direction and a first ball interposed between the groove surfaces. A spherical concave surface that matches a substantially half-peripheral surface of the first ball provided at a position opposed to the first ball, and the first groove surface extends from the spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed. A second groove surface extending from the spherical concave surface when the valve of the pressing plate is opened from the spherical concave surface; Extending toward the same direction, and having a shallow shallow groove surface from the spherical recess.
【０００６】また、本発明のゲートバルブの開閉装置
は、弁板を弁座に対し押圧するための弁板押えと、上記
弁座に対向するバルブ本体の台座と上記弁板押え間に介
挿した、これらと相対的に互に対向する面に沿って一方
向に移動自在な押圧板と、この押圧板の移動手段と、上
記弁板押えと上記押圧板の対向面に互に円周方向に離間
した位置で形成した第１，第２の溝面と、この溝面間に
介挿した第１のボールとを有し、上記第１，第２の溝面
は、互に対向する位置に設けた上記第１のボールの略半
周面に合致する球状凹面を有し、上記第１の溝面は上記
球状凹面から上記押圧板のバルブ閉時の移動方向と同一
方向に延びる、上記球状凹面より次第に浅くなる傾斜浅
溝面を有し、上記第２の溝面は上記球状凹面から上記押
圧板のバルブ開時の移動方向と同一方向に延びる、上記
球状凹面より次第に浅くなる傾斜浅溝面を有することを
特徴とする。The gate valve opening / closing device according to the present invention comprises a valve plate retainer for pressing a valve plate against a valve seat, and a valve plate presser interposed between the base of the valve body facing the valve seat and the valve plate retainer. In addition, a pressing plate that is movable in one direction along a surface relatively facing each other, a moving means of the pressing plate, and a circumferential direction that is opposite to the opposing surfaces of the valve plate retainer and the pressing plate. The first and second groove surfaces formed at positions spaced apart from each other, and a first ball interposed between the groove surfaces, the first and second groove surfaces are opposed to each other. The spherical surface has a spherical concave surface corresponding to a substantially half circumferential surface of the first ball provided in the spherical surface, and the first groove surface extends from the spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed. The second groove surface has an inclined shallow groove surface that becomes gradually shallower than the concave surface, and the second groove surface is formed when the valve of the pressing plate is opened from the spherical concave surface. Extending the dynamic direction in the same direction, and having an inclined shallow groove surface made gradually shallower from the spherical recess.
【０００７】また、本発明のゲートバルブの開閉装置
は、弁板を弁座に対し押圧するための弁板押えと、上記
弁座に対向するバルブ本体の台座と上記弁板押え間に介
挿した、これらと相対的に互に対向する面に沿って一方
向に移動自在な押圧板と、この押圧板の移動手段と、上
記弁板押えと上記押圧板の対向面に互に円周方向に離間
した位置で形成した第１，第２の溝面と、この溝面間に
介挿した第１のコロとを有し、上記第１，第２の溝面
は、互に対向する位置に設けた上記第１のコロの略半周
面に合致する半円筒状凹面を有し、上記第１の溝面は上
記半円筒状凹面から上記押圧板のバルブ閉時の移動方向
と同一方向に延びる、上記半円筒状凹面より浅い筒状面
を有し、上記第２の溝面は上記半円筒状凹面から上記押
圧板のバルブ開時の移動方向と同一方向に延びる、上記
半円筒状凹面より浅い浅溝面を有することを特徴とす
る。Further, the gate valve opening / closing device of the present invention comprises a valve plate retainer for pressing a valve plate against a valve seat, and a valve plate inserted between the base of the valve body facing the valve seat and the valve plate retainer. In addition, a pressing plate that is movable in one direction along a surface relatively facing each other, a moving means of the pressing plate, and a circumferential direction that is opposite to the opposing surfaces of the valve plate retainer and the pressing plate. The first and second groove surfaces are formed at positions spaced apart from each other, and the first roller inserted between the groove surfaces, and the first and second groove surfaces are opposed to each other. A semi-cylindrical concave surface corresponding to a substantially half circumferential surface of the first roller provided in the first roller, wherein the first groove surface is in the same direction as the moving direction of the pressing plate when the valve is closed from the semi-cylindrical concave surface. The semi-cylindrical concave surface extends and is shallower than the semi-cylindrical concave surface, and the second groove surface is shifted from the semi-cylindrical concave surface when the valve of the pressing plate is opened. Extending in the same direction, and having a shallow shallow groove surface than the semi-cylindrical concave surface.
【０００８】また、本発明のゲートバルブの開閉装置
は、弁板を弁座に対し押圧するための弁板押えと、上記
弁座に対向するバルブ本体の台座と上記弁板押え間に介
挿した、これらと相対的に互に対向する面に沿って一方
向に移動自在な押圧板と、この押圧板の移動手段と、上
記弁板押えと上記押圧板の対向面に互に円周方向に離間
した位置で形成した第１，第２の溝面と、この溝面間に
介挿した第１のコロとを有し、上記第１，第２の溝面
は、互に対向する位置に設けた上記第１のコロの略半周
面に合致する半円筒状凹面を有し、上記第１の溝面は上
記半円筒状凹面から上記押圧板のバルブ閉時の移動方向
と同一方向に延びる、上記半円筒状凹面より次第に浅く
なる傾斜浅溝面を有し、上記第２の溝面は上記半円筒状
凹面から上記押圧板のバルブ開時の移動方向と同一方向
に延びる、上記半円筒状凹面より次第に浅くなる傾斜浅
溝面を有することを特徴とする。Further, in the gate valve opening / closing device according to the present invention, a valve plate retainer for pressing a valve plate against a valve seat is provided between a base of a valve body opposed to the valve seat and the valve plate retainer. In addition, a pressing plate that is movable in one direction along a surface relatively facing each other, a moving means of the pressing plate, and a circumferential direction that is opposite to the opposing surfaces of the valve plate retainer and the pressing plate. The first and second groove surfaces are formed at positions spaced apart from each other, and the first roller inserted between the groove surfaces, and the first and second groove surfaces are opposed to each other. And a semi-cylindrical concave surface that matches a substantially half circumferential surface of the first roller provided in the first roller. The semi-cylindrical concave surface has an inclined shallow groove surface that gradually becomes shallower than the semi-cylindrical concave surface, and the second groove surface extends from the semi-cylindrical concave surface to the pressing plate. Extending in the moving direction and the same direction of Lube opened up, and having an inclined shallow groove surface gradually becomes shallower than the semi-cylindrical concave surface.
【０００９】また、本発明のゲートバルブの開閉装置は
更に、上記押圧板と上記台座の対向面に互に円周方向に
離間した位置で形成した第３，第４の溝面と、この溝面
間に介挿した第２のボールとを更に有し、上記第３，第
４の溝面は、互に対向する位置に設けた上記第２のボー
ルの略半周面に合致する第２の球状凹面を有し、上記第
３の溝面は上記第２の球状凹面から上記押圧板のバルブ
閉時の移動方向と同一方向に延びる、上記球状凹面と同
じ深さの深溝面を有し、上記第４の溝面は上記第２の球
状凹面から上記押圧板のバルブ開時の移動方向と同一方
向に延びる、上記第２の球状凹面と同じ深さの深溝面を
有することを特徴とする。Further, the gate valve opening / closing device of the present invention further comprises third and fourth groove surfaces formed at positions circumferentially spaced from each other on the opposing surface of the pressing plate and the pedestal. A second ball interposed between the surfaces, wherein the third and fourth grooved surfaces match a substantially half circumferential surface of the second ball provided at a position facing each other. Having a spherical concave surface, the third groove surface extends from the second spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed, and has a deep groove surface having the same depth as the spherical concave surface; The fourth groove surface has a deep groove surface extending from the second spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened, and having the same depth as the second spherical concave surface. .
【００１０】また、本発明のゲートバルブの開閉装置は
更に、上記押圧板と上記台座の対向面に互に円周方向に
離間した位置で形成した第３，第４の溝面と、この溝面
間に介挿した第２のコロとを更に有し、上記第３，第４
の溝面は、互に対向する位置に設けた上記第２のコロの
略半周面に合致する第２の半円筒状凹面を有し、上記第
３の溝面は上記第２の半円筒状凹面から上記押圧板のバ
ルブ閉時の移動方向と同一方向に延びる、上記半円筒状
凹面と同じ深さの半円筒状凹面を有し、上記第４の溝面
は上記第２の半円筒状凹面から上記押圧板のバルブ開時
の移動方向と同一方向に延びる、上記第２の半円筒状凹
面と同じ深さの半円筒状凹面を有することを特徴とす
る。Further, the gate valve opening / closing device of the present invention further comprises third and fourth groove surfaces formed at positions circumferentially spaced from each other on the opposing surface of the pressing plate and the pedestal. And a second roller interposed between the surfaces.
Has a second semi-cylindrical concave surface corresponding to a substantially semi-peripheral surface of the second roller provided at a position facing each other, and the third groove surface has a second semi-cylindrical shape. A semi-cylindrical concave surface having the same depth as the semi-cylindrical concave surface extending in the same direction as the moving direction of the pressing plate when the valve is closed from the concave surface, wherein the fourth groove surface is the second semi-cylindrical shape; A semi-cylindrical concave surface having the same depth as the second semi-cylindrical concave surface, extending from the concave surface in the same direction as the movement direction of the pressing plate when the valve is opened.
【００１１】[0011]
【発明の実施の形態】以下図面によって本発明の実施例
を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１２】本発明においては、図１〜図３に示すよう
に移動手段１によって弁板２をバルブ開口５の閉位置に
移動せしめ、上記弁板２の周縁部をリング状の弁板押え
６を介してリング状の押圧板７によって弁座４に対し押
圧せしめ、弁板２によりバルブ開口５を閉じるようにす
る。In the present invention, the valve plate 2 is moved to the closed position of the valve opening 5 by the moving means 1 as shown in FIGS. Is pressed against the valve seat 4 by a ring-shaped pressing plate 7, and the valve opening 5 is closed by the valve plate 2.
【００１３】上記押圧板７は、上記弁板押え６と上記弁
座４に対向するバルブ本体の台座８間でこれらに相対的
に互に対向する面に沿って、例えば上下方向にピストン
１４によって、移動自在ならしめ、上記弁板押え６と上
記押圧板７の対向面に、互に円周方向に離間した位置で
夫々第１，第２の溝面９，１０を形成し、この溝面９，
１０間に夫々ボール１１を介挿せしめる。The pressing plate 7 is, for example, vertically moved by a piston 14 along a surface relatively opposed to each other between the valve plate retainer 6 and the base 8 of the valve body facing the valve seat 4. First and second groove surfaces 9 and 10 are formed on the opposing surfaces of the valve plate retainer 6 and the pressing plate 7 at positions circumferentially separated from each other. 9,
The balls 11 are inserted between the respective 10.
【００１４】また、上記押圧板７と上記台座８間の対向
面間に、上記第１，第２の溝面９，１０に対向する位置
で第３，第４の溝面１２，１３を形成し、この溝面１
２，１３間に同じくボール１１を介挿せしめる。Further, third and fourth groove surfaces 12 and 13 are formed at positions opposing the first and second groove surfaces 9 and 10 between the opposing surfaces between the pressing plate 7 and the pedestal 8. And this groove surface 1
Similarly, the ball 11 is inserted between 2 and 13.
【００１５】上記第１の溝面９は図３及び図４に示すよ
うにボール１１の略半周面に合致する球状凹面９ａと、
この球状凹面９ａから上記押圧板７のバルブ閉時の移動
方向と同一方向に延びる、上記球状凹面９ａより浅い、
浅溝面９ｂとにより形成する。As shown in FIGS. 3 and 4, the first groove surface 9 has a spherical concave surface 9a corresponding to a substantially half circumferential surface of the ball 11,
Extending from the spherical concave surface 9a in the same direction as the moving direction of the pressing plate 7 when the valve is closed, shallower than the spherical concave surface 9a,
It is formed by the shallow groove surface 9b.
【００１６】また、上記第２の溝面１０は図３及び図５
に示すように上記球状凹面９ａに対向する位置の、ボー
ル１１の略半周面に合致する球状凹面１０ａと、この球
状凹面１０ａから上記押圧板７のバルブ開時の移動方向
と同一方向に延びる、上記球状凹面１０ａより浅い、浅
溝面１０ｂとにより形成する。Further, the second groove surface 10 corresponds to FIGS.
And a spherical concave surface 10a at a position facing the spherical concave surface 9a, which coincides with a substantially half circumferential surface of the ball 11, and extends from the spherical concave surface 10a in the same direction as the moving direction of the pressing plate 7 when the valve is opened. It is formed by a shallow groove surface 10b which is shallower than the spherical concave surface 10a.
【００１７】また、上記第３の溝面１２は図３及び図６
に示すようにボール１１の略半周面に合致する球状凹面
１２ａと、この球状凹面１２ａからこれと同じ深さで上
記押圧板７のバルブ閉時の移動方向と同一方向に延び
る、深溝面１２ｂとにより形成する。The third groove surface 12 corresponds to FIGS.
As shown in FIG. 5, a spherical concave surface 12a conforming to a substantially half circumferential surface of the ball 11, and a deep groove surface 12b extending from the spherical concave surface 12a at the same depth in the same direction as the moving direction of the pressing plate 7 when the valve is closed. Is formed.
【００１８】また、第４の溝面１３は図３及び図７に示
すように上記球状凹面１２ａと対向する位置の、ボール
１１の略半周面に合致する球状凹面１３ａと、この球状
凹面１３ａからこれと同じ深さで上記押圧板７のバルブ
開時の移動方向と同一方向に延びる、深溝面１３ｂとに
より形成する。As shown in FIGS. 3 and 7, the fourth groove surface 13 has a spherical concave surface 13a at a position facing the spherical concave surface 12a and substantially corresponding to a semi-peripheral surface of the ball 11, and the spherical concave surface 13a. It is formed by a deep groove surface 13b extending at the same depth in the same direction as the moving direction of the pressing plate 7 when the valve is opened.
【００１９】本発明のゲートバルブの開閉装置は、上記
のような構成であるから、図１及び図３に示す状態では
ボール１１は夫々球状凹面９ａ，１０ａ上、及び１２
ａ，１３ａ上に位置し、台座８と弁板押え６は、押圧板
７を介して最も接近しており、弁板２は弁座４から離間
しているが、図８及び図９に示すようにピストン１４を
操作して押圧板７をバルブ閉方向に移動せしめれば、ボ
ール１１は転動して球状凹面９ａ，１０ａから浅溝９
ｂ，１０ｂ上に移動するから弁板押え６が押圧板７から
離れ弁板２を弁座４に対し押圧し、バルブ開口５を弁板
２によって閉じるようになる。Since the gate valve opening / closing device of the present invention is constructed as described above, the balls 11 are located on the spherical concave surfaces 9a, 10a and 12a in the state shown in FIGS.
a, 13a, the pedestal 8 and the valve plate retainer 6 are closest to each other via the pressing plate 7, and the valve plate 2 is separated from the valve seat 4 as shown in FIGS. 8 and 9. When the piston 14 is operated to move the pressing plate 7 in the valve closing direction, the ball 11 rolls and moves from the spherical concave surfaces 9a, 10a to the shallow grooves 9a.
The valve plate holder 6 moves away from the pressure plate 7 and presses the valve plate 2 against the valve seat 4, so that the valve opening 5 is closed by the valve plate 2.
【００２０】なお、弁板押え６は押圧板７の移動により
共に移動することがないよう抑止ばね（図示せず）を設
けるのが好ましい。It is preferable that a valve spring (not shown) be provided so that the valve plate retainer 6 does not move together with the pressing plate 7.
【００２１】本発明の他の実施例においては、上記第１
の溝面９を図１０〜図１２に示すようにボール１１の略
半周面に合致する球状凹面９ａと、この球状凹面９ａか
ら上記押圧板７のバルブ閉時の移動方向と同一方向に延
びる、上記球状凹面９ａより次第に浅くなる傾斜浅溝面
９ｃとにより形成する。In another embodiment of the present invention, the first
As shown in FIGS. 10 to 12, the groove surface 9 of FIG. 10 matches a substantially half circumferential surface of the ball 11, and extends from the spherical concave surface 9 a in the same direction as the moving direction of the pressing plate 7 when the valve is closed. It is formed by an inclined shallow groove surface 9c which becomes gradually shallower than the spherical concave surface 9a.
【００２２】また、上記第２の溝面１０は図１１及び図
１３に示すように上記球状凹面９ａに対向する位置の、
ボール１１の略半周面に合致する球状凹面１０ａと、こ
の球状凹面１０ａから上記押圧板７のバルブ開時の移動
方向と同一方向に延びる、上記球状凹面１０ａより次第
に浅くなる傾斜浅溝面１０ｃとにより形成する。As shown in FIGS. 11 and 13, the second groove surface 10 is located at a position facing the spherical concave surface 9a.
A spherical concave surface 10a corresponding to a substantially semi-peripheral surface of the ball 11, and an inclined shallow groove surface 10c gradually extending from the spherical concave surface 10a and extending from the spherical concave surface 10a in the same direction as the moving direction of the pressing plate 7 when the valve is opened. Is formed.
【００２３】この実施例の作用効果は先の実施例と実質
的に同一である。The operation and effect of this embodiment are substantially the same as those of the previous embodiment.
【００２４】本発明の他の実施例においては、ボール１
１の代りに丸棒状のコロ１５を用い、上記第１の溝面９
を図１４〜図１６に示すようにボール１１の略半周面に
合致する半円筒状凹面１６ａと、この半円筒状凹面１６
ａから上記押圧板７のバルブ閉時の移動方向と同一方向
に延びる、上記半円筒状凹面１６ａより浅い、浅溝面１
６ｂとにより形成する。In another embodiment of the present invention, the ball 1
The first groove surface 9 is replaced with a round bar-shaped roller 15 in place of the first groove surface 9.
As shown in FIGS. 14 to 16, a semi-cylindrical concave surface 16a corresponding to a substantially semi-peripheral surface of the ball 11, and the semi-cylindrical concave surface 16
a, a shallow groove surface 1 extending in the same direction as the movement direction of the pressing plate 7 when the valve is closed, shallower than the semicylindrical concave surface 16a.
6b.
【００２５】また、上記第２の溝面１０は図１５及び図
１６に示すように上記半円筒状凹面１６ａに対向する位
置の、コロ１５の略半周面に合致する半円筒状凹面１７
ａと、この半円筒状凹面１７ａから上記押圧板７のバル
ブ開時の移動方向と同一方向に延びる、上記半円筒状凹
面１７ａより浅い、浅溝面１７ｂとにより形成する。As shown in FIGS. 15 and 16, the second groove surface 10 is located at a position opposed to the semi-cylindrical concave surface 16a and substantially coincides with the semi-circular concave surface 17 of the roller 15.
and a shallow groove surface 17b extending from the semi-cylindrical concave surface 17a in the same direction as the moving direction of the pressing plate 7 when the valve is opened, and shallower than the semi-cylindrical concave surface 17a.
【００２６】なお、上記第１，第２の溝面９，１０の軸
方向両端面は外方に広がる傾斜面１８とし、コロ１５の
端面に接しないようにする。The axial end surfaces of the first and second groove surfaces 9 and 10 are inclined surfaces 18 extending outward so as not to contact the end surfaces of the rollers 15.
【００２７】この実施例の作用効果は先の実施例と実質
的に同一である。The operation and effect of this embodiment are substantially the same as those of the previous embodiment.
【００２８】本発明の更に他の実施例においては、ボー
ル１１の代りに丸棒状のコロ１５を用い、上記第１の溝
面９を図１８及び図１９に示すようにコロ１５の略半周
面に合致する半円筒状凹面１６ａと、この半円筒状凹面
１６ａから上記押圧板７のバルブ閉時の移動方向と同一
方向に延びる、上記半円筒状凹面１６ａより次第に浅く
なる傾斜浅溝面１６ｃとにより形成する。In still another embodiment of the present invention, a round bar-shaped roller 15 is used in place of the ball 11, and the first groove surface 9 is substantially half-peripheral surface of the roller 15 as shown in FIGS. And a sloped shallow groove surface 16c extending from the semi-cylindrical concave surface 16a in the same direction as the moving direction of the pressing plate 7 when the valve is closed, and gradually becoming shallower than the semi-cylindrical concave surface 16a. Is formed.
【００２９】また、上記第２の溝面１０は図１８及び図
１９に示すように上記半円筒状凹面１６ａに対向する位
置の、コロ１５の略半周面に合致する半円筒状凹面１７
ａと、この半円筒状凹面１７ａから上記押圧板７のバル
ブ開時の移動方向と同一方向に延びる、上記半円筒状凹
面１７ａより次第に浅くなる傾斜浅溝面１７ｃとにより
形成する。As shown in FIGS. 18 and 19, the second groove surface 10 has a semi-cylindrical concave surface 17 at a position facing the semi-cylindrical concave surface 16a.
a and an inclined shallow groove surface 17c extending from the semi-cylindrical concave surface 17a in the same direction as the moving direction of the pressing plate 7 when the valve is opened, and gradually becoming shallower than the semi-cylindrical concave surface 17a.
【００３０】この実施例の作用効果は先の実施例と実質
的に同一である。The operation and effect of this embodiment are substantially the same as those of the previous embodiment.
【００３１】なお、上記第３，第４の溝面１２，１３に
係合するボール１１の代りにコロを用いても良い。Note that rollers may be used in place of the balls 11 engaged with the third and fourth groove surfaces 12 and 13.
【００３２】[0032]
【発明の効果】上記のように本発明のゲートバルブの開
閉装置によれば、その作動中ボール１１は転動するのみ
で滑りや摩擦を生ずることがなく、パーテクルの発生も
少なく、操作力も小さくて良い等大きな利益がある。As described above, according to the gate valve opening / closing apparatus of the present invention, during operation, the ball 11 only rolls and does not generate slip or friction, so that the generation of particles is small and the operating force is small. There are great benefits.
【図１】本発明のゲートバルブの開閉装置の縦断側面図
である。FIG. 1 is a vertical sectional side view of a gate valve opening / closing device according to the present invention.
【図２】本発明のゲートバルブの開閉装置における押圧
板に対向する弁板押えの面を示す正面図である。FIG. 2 is a front view showing a surface of a valve plate presser facing a pressing plate in the gate valve opening / closing device of the present invention.
【図３】図１の一部の拡大図である。FIG. 3 is an enlarged view of a part of FIG. 1;
【図４】本発明のゲートバルブの開閉装置における弁板
押えの第１の溝面の説明図である。FIG. 4 is an explanatory view of a first groove surface of a valve plate retainer in the gate valve opening / closing device of the present invention.
【図５】本発明のゲートバルブの開閉装置における弁板
押えの第２の溝面の説明図である。FIG. 5 is an explanatory view of a second groove surface of a valve plate retainer in the gate valve opening / closing device of the present invention.
【図６】本発明のゲートバルブの開閉装置における押圧
板の第３の溝面の説明図である。FIG. 6 is an explanatory view of a third groove surface of a pressing plate in the gate valve opening / closing device of the present invention.
【図７】本発明のゲートバルブの開閉装置における押圧
板の第４の溝面の説明図である。FIG. 7 is an explanatory view of a fourth groove surface of a pressing plate in the gate valve opening / closing device of the present invention.
【図８】本発明のゲートバルブの開閉装置の作動状態説
明用縦断側面図である。FIG. 8 is a vertical sectional side view for explaining an operation state of the gate valve opening / closing device of the present invention.
【図９】図８の一部の拡大図である。FIG. 9 is an enlarged view of a part of FIG. 8;
【図１０】本発明の他の実施例におけるゲートバルブの
開閉装置における押圧板に対向する弁板押えの面を示す
正面図である。FIG. 10 is a front view showing a surface of a valve plate presser facing a pressing plate in a gate valve opening / closing device according to another embodiment of the present invention.
【図１１】本発明の他の実施例におけるゲートバルブの
開閉装置の一部の拡大縦断側面図である。FIG. 11 is an enlarged vertical sectional side view of a part of a gate valve opening / closing device according to another embodiment of the present invention.
【図１２】本発明の他の実施例におけるゲートバルブの
開閉装置における弁板押えの第１の溝面の説明図であ
る。FIG. 12 is an explanatory view of a first groove surface of a valve plate retainer in a gate valve opening / closing device according to another embodiment of the present invention.
【図１３】本発明の他の実施例におけるゲートバルブの
開閉装置における弁板押えの第２の溝面の説明図であ
る。FIG. 13 is an explanatory view of a second groove surface of a valve plate retainer in a gate valve opening / closing device according to another embodiment of the present invention.
【図１４】本発明の更に他の実施例におけるゲートバル
ブの開閉装置における押圧板に対向する弁板押えの面を
示す正面図である。FIG. 14 is a front view showing a surface of a valve plate presser facing a pressing plate in a gate valve opening / closing device according to still another embodiment of the present invention.
【図１５】図１４の一部の拡大図である。FIG. 15 is a partially enlarged view of FIG. 14;
【図１６】図１４に示すゲートバルブの開閉装置におけ
る弁板押えの第１及び第２の溝面の側面図である。FIG. 16 is a side view of the first and second groove surfaces of the valve plate retainer in the gate valve opening / closing device shown in FIG. 14;
【図１７】図１５に示すゲートバルブの開閉装置の作動
状態説明用縦断側面図である。17 is a vertical sectional side view for explaining an operation state of the gate valve opening / closing device shown in FIG. 15;
【図１８】本発明の更に他の実施例におけるゲートバル
ブの開閉装置の一部の拡大図である。FIG. 18 is an enlarged view of a part of a gate valve opening / closing device according to still another embodiment of the present invention.
【図１９】図１８に示すゲートバルブの開閉装置の作動
状態説明用縦断側面図である。19 is a vertical sectional side view for explaining an operation state of the gate valve opening / closing device shown in FIG. 18;
１ 移動手段 ２ 弁板 ４ 弁座 ５ バルブ開口 ６ 弁板押え ７ 押圧板 ８ 台座 ９ 溝面 ９ａ 球状凹面 ９ｂ 浅溝面 ９ｃ 傾斜浅溝面 １０ 溝面 １０ａ 球状凹面 １０ｂ 浅溝面 １０ｃ 傾斜浅溝面 １１ ボール １２ 溝面 １２ａ 球状凹面 １２ｂ 深溝面 １３ 溝面 １３ａ 球状凹面 １３ｂ 深溝面 １４ ピストン １５ コロ １６ａ 半円筒状凹面 １６ｂ 浅溝面 １６ｃ 傾斜浅溝面 １７ａ 半円筒状凹面 １７ｂ 浅溝面 １７ｃ 傾斜浅溝面 １８ 傾斜面 Reference Signs List 1 moving means 2 valve plate 4 valve seat 5 valve opening 6 valve plate retainer 7 pressing plate 8 pedestal 9 groove surface 9a spherical concave surface 9b shallow groove surface 9c inclined shallow groove surface 10 groove surface 10a spherical concave surface 10b shallow groove surface 10c inclined shallow groove Surface 11 ball 12 groove surface 12a spherical concave surface 12b deep groove surface 13 groove surface 13a spherical concave surface 13b deep groove surface 14 piston 15 roller 16a semi-cylindrical concave surface 16b shallow groove surface 16c inclined shallow groove surface 17a semi-cylindrical concave surface 17b shallow groove surface 17c inclined Shallow groove surface 18 Inclined surface
Claims (6)
えと、上記弁座に対向するバルブ本体の台座と上記弁板
押え間に介挿した、これらと相対的に互に対向する面に
沿って一方向に移動自在な押圧板と、この押圧板の移動
手段と、上記弁板押えと上記押圧板の対向面に互に円周
方向に離間した位置で形成した第１，第２の溝面と、こ
の溝面間に介挿した第１のボールとを有し、上記第１，
第２の溝面は、互に対向する位置に設けた上記第１のボ
ールの略半周面に合致する球状凹面を有し、上記第１の
溝面は上記球状凹面から上記押圧板のバルブ閉時の移動
方向と同一方向に延びる、上記球状凹面より浅い浅溝面
を有し、上記第２の溝面は上記球状凹面から上記押圧板
のバルブ開時の移動方向と同一方向に延びる、上記球状
凹面より浅い浅溝面を有することを特徴とするゲートバ
ルブの開閉装置。1. A valve plate retainer for pressing a valve plate against a valve seat, and a valve body interposed between a pedestal of a valve body facing the valve seat and the valve plate retainer and relatively opposed to each other. A pressing plate movable in one direction along a surface to be moved, a moving means of the pressing plate, and a first and a first formed at positions opposed to each other on the opposing surfaces of the valve plate retainer and the pressing plate in the circumferential direction. A second ball surface and a first ball interposed between the groove surfaces;
The second groove surface has a spherical concave surface corresponding to a substantially semi-peripheral surface of the first ball provided at a position facing each other, and the first groove surface is closed from the spherical concave surface by the valve closing of the pressing plate. Extending in the same direction as the moving direction at the time, having a shallow groove surface shallower than the spherical concave surface, the second groove surface extends from the spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened, A gate valve opening / closing device having a shallow groove surface shallower than a spherical concave surface.
えと、上記弁座に対向するバルブ本体の台座と上記弁板
押え間に介挿した、これらと相対的に互に対向する面に
沿って一方向に移動自在な押圧板と、この押圧板の移動
手段と、上記弁板押えと上記押圧板の対向面に互に円周
方向に離間した位置で形成した第１，第２の溝面と、こ
の溝面間に介挿した第１のボールとを有し、上記第１，
第２の溝面は、互に対向する位置に設けた上記第１のボ
ールの略半周面に合致する球状凹面を有し、上記第１の
溝面は上記球状凹面から上記押圧板のバルブ閉時の移動
方向と同一方向に延びる、上記球状凹面より次第に浅く
なる傾斜浅溝面を有し、上記第２の溝面は上記球状凹面
から上記押圧板のバルブ開時の移動方向と同一方向に延
びる、上記球状凹面より次第に浅くなる傾斜浅溝面を有
することを特徴とするゲートバルブの開閉装置。2. A valve plate retainer for pressing a valve plate against a valve seat, and a valve body interposed between a pedestal of a valve body facing the valve seat and the valve plate retainer and relatively opposed to each other. A pressing plate movable in one direction along a surface to be moved, a moving means of the pressing plate, and a first and a first formed at positions opposed to each other on the opposing surfaces of the valve plate retainer and the pressing plate in the circumferential direction. A second ball surface and a first ball interposed between the groove surfaces;
The second groove surface has a spherical concave surface corresponding to a substantially semi-peripheral surface of the first ball provided at a position facing each other, and the first groove surface is closed from the spherical concave surface by the valve closing of the pressing plate. Extending in the same direction as the moving direction at the time, has an inclined shallow groove surface gradually becoming shallower than the spherical concave surface, and the second groove surface is in the same direction as the moving direction when the valve of the pressing plate is opened from the spherical concave surface. A gate valve opening / closing device having an inclined shallow groove surface extending gradually and shallower than the spherical concave surface.
えと、上記弁座に対向するバルブ本体の台座と上記弁板
押え間に介挿した、これらと相対的に互に対向する面に
沿って一方向に移動自在な押圧板と、この押圧板の移動
手段と、上記弁板押えと上記押圧板の対向面に互に円周
方向に離間した位置で形成した第１，第２の溝面と、こ
の溝面間に介挿した第１のコロとを有し、上記第１，第
２の溝面は、互に対向する位置に設けた上記第１のコロ
の略半周面に合致する半円筒状凹面を有し、上記第１の
溝面は上記半円筒状凹面から上記押圧板のバルブ閉時の
移動方向と同一方向に延びる、上記半円筒状凹面より浅
い筒状面を有し、上記第２の溝面は上記半円筒状凹面か
ら上記押圧板のバルブ開時の移動方向と同一方向に延び
る、上記半円筒状凹面より浅い浅溝面を有することを特
徴とするゲートバルブの開閉装置。3. A valve plate retainer for pressing a valve plate against a valve seat, and a valve body interposed between a pedestal of a valve body facing the valve seat and the valve plate retainer and relatively opposed to each other. A pressing plate movable in one direction along a surface to be moved, a moving means of the pressing plate, and a first and a first formed at a position circumferentially separated from each other by opposing surfaces of the valve plate retainer and the pressing plate. It has a second groove surface and a first roller inserted between the groove surfaces, and the first and second groove surfaces are substantially similar to the first roller provided at positions facing each other. A cylinder having a semi-cylindrical concave surface conforming to a semi-peripheral surface, wherein the first groove surface extends from the semi-cylindrical concave surface in the same direction as a moving direction of the pressing plate when the valve is closed, and is shallower than the semi-cylindrical concave surface. The second groove surface extends from the semi-cylindrical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened. A gate valve opening / closing device having a shallow groove surface shallower than a surface.
えと、上記弁座に対向するバルブ本体の台座と上記弁板
押え間に介挿した、これらと相対的に互に対向する面に
沿って一方向に移動自在な押圧板と、この押圧板の移動
手段と、上記弁板押えと上記押圧板の対向面に互に円周
方向に離間した位置で形成した第１，第２の溝面と、こ
の溝面間に介挿した第１のコロとを有し、上記第１，第
２の溝面は、互に対向する位置に設けた上記第１のコロ
の略半周面に合致する半円筒状凹面を有し、上記第１の
溝面は上記半円筒状凹面から上記押圧板のバルブ閉時の
移動方向と同一方向に延びる、上記半円筒状凹面より次
第に浅くなる傾斜浅溝面を有し、上記第２の溝面は上記
半円筒状凹面から上記押圧板のバルブ開時の移動方向と
同一方向に延びる、上記半円筒状凹面より次第に浅くな
る傾斜浅溝面を有することを特徴とするゲートバルブの
開閉装置。4. A valve plate retainer for pressing a valve plate against a valve seat, and interposed between a pedestal of a valve body facing the valve seat and the valve plate retainer and relatively opposed to each other. A pressing plate movable in one direction along a surface to be moved, a moving means of the pressing plate, and a first and a first formed at positions opposed to each other on the opposing surfaces of the valve plate retainer and the pressing plate in the circumferential direction. It has a second groove surface and a first roller inserted between the groove surfaces, and the first and second groove surfaces are substantially similar to the first roller provided at positions facing each other. A semicylindrical concave surface conforming to a semicircular surface, wherein the first groove surface extends from the semicylindrical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed, and is gradually shallower than the semicylindrical concave surface; The second groove surface extends from the semi-cylindrical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened, A gate valve opening / closing device having an inclined shallow groove surface that becomes gradually shallower than the semicylindrical concave surface.
周方向に離間した位置で形成した第３，第４の溝面と、
この溝面間に介挿した第２のボールとを更に有し、上記
第３，第４の溝面は、互に対向する位置に設けた上記第
２のボールの略半周面に合致する第２の球状凹面を有
し、上記第３の溝面は上記第２の球状凹面から上記押圧
板のバルブ閉時の移動方向と同一方向に延びる、上記球
状凹面と同じ深さの深溝面を有し、上記第４の溝面は上
記第２の球状凹面から上記押圧板のバルブ開時の移動方
向と同一方向に延びる、上記第２の球状凹面と同じ深さ
の深溝面を有することを特徴とする請求項１、２、３ま
たは４記載のゲートバルブの開閉装置。5. A third and fourth groove surface formed at positions circumferentially spaced from each other on the opposing surface of the pressing plate and the pedestal,
And a second ball interposed between the groove surfaces, and the third and fourth groove surfaces correspond to substantially half circumferential surfaces of the second balls provided at positions facing each other. And the third groove surface has a deep groove surface extending from the second spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed, and having the same depth as the spherical concave surface. The fourth groove surface has a deep groove surface extending from the second spherical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened, and having the same depth as the second spherical concave surface. The gate valve opening / closing device according to claim 1, 2, 3, or 4.
周方向に離間した位置で形成した第３，第４の溝面と、
この溝面間に介挿した第２のコロとを更に有し、上記第
３，第４の溝面は、互に対向する位置に設けた上記第２
のコロの略半周面に合致する第２の半円筒状凹面を有
し、上記第３の溝面は上記第２の半円筒状凹面から上記
押圧板のバルブ閉時の移動方向と同一方向に延びる、上
記半円筒状凹面と同じ深さの半円筒状凹面を有し、上記
第４の溝面は上記第２の半円筒状凹面から上記押圧板の
バルブ開時の移動方向と同一方向に延びる、上記第２の
半円筒状凹面と同じ深さの半円筒状凹面を有することを
特徴とする請求項３または４記載のゲートバルブの開閉
装置。6. A third and fourth groove surface formed at positions circumferentially separated from each other on the opposing surface of the pressing plate and the pedestal,
And a second roller interposed between the groove surfaces, wherein the third and fourth groove surfaces are provided at positions facing each other.
A second semi-cylindrical concave surface that conforms to a substantially semi-peripheral surface of the roller, and the third groove surface extends from the second semi-cylindrical concave surface in the same direction as the moving direction of the pressing plate when the valve is closed. A semi-cylindrical concave surface having the same depth as the semi-cylindrical concave surface extending from the second semi-cylindrical concave surface in the same direction as the moving direction of the pressing plate when the valve is opened. 5. The gate valve opening / closing device according to claim 3, further comprising a semi-cylindrical concave surface extending at the same depth as the second semi-cylindrical concave surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26831199A JP4266456B2 (en) | 1999-09-22 | 1999-09-22 | Gate valve opening and closing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26831199A JP4266456B2 (en) | 1999-09-22 | 1999-09-22 | Gate valve opening and closing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001090849A true JP2001090849A (en) | 2001-04-03 |
| JP4266456B2 JP4266456B2 (en) | 2009-05-20 |
Family
ID=17456782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26831199A Expired - Lifetime JP4266456B2 (en) | 1999-09-22 | 1999-09-22 | Gate valve opening and closing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4266456B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030050409A (en) * | 2001-12-18 | 2003-06-25 | 주식회사 엠지아이 | the rectangular gate valve in mounting formmation |
| EP1762759A2 (en) | 2005-09-12 | 2007-03-14 | Hubert Bösch | Control mechanism for a vacuum valve |
| US8215612B2 (en) | 2008-06-12 | 2012-07-10 | Vat Holding Ag | Sliding valve |
| KR101258486B1 (en) | 2010-03-05 | 2013-04-26 | 주식회사 에스알티 | A gate valve |
| WO2013073039A1 (en) * | 2011-11-17 | 2013-05-23 | プログレッシオ合同会社 | Gate valve for vacuum |
| CN103867741A (en) * | 2014-03-31 | 2014-06-18 | 江苏苏盐阀门机械有限公司 | Double disc capable of being unfolded through hinge shift |
| CN117386838A (en) * | 2023-12-13 | 2024-01-12 | 艾坦姆流体控制技术(山东)有限公司 | Friction-free double-flashboard gate valve |
-
1999
- 1999-09-22 JP JP26831199A patent/JP4266456B2/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030050409A (en) * | 2001-12-18 | 2003-06-25 | 주식회사 엠지아이 | the rectangular gate valve in mounting formmation |
| EP1762759A2 (en) | 2005-09-12 | 2007-03-14 | Hubert Bösch | Control mechanism for a vacuum valve |
| DE102005043595A1 (en) * | 2005-09-12 | 2007-04-19 | Bösch, Hubert | Valve mechanism for a vacuum valve |
| US7341237B2 (en) | 2005-09-12 | 2008-03-11 | Boesch Hubert | Valve mechanism for a vacuum valve |
| EP1762759A3 (en) * | 2005-09-12 | 2008-07-16 | Hubert Bösch | Control mechanism for a vacuum valve |
| US8215612B2 (en) | 2008-06-12 | 2012-07-10 | Vat Holding Ag | Sliding valve |
| KR101258486B1 (en) | 2010-03-05 | 2013-04-26 | 주식회사 에스알티 | A gate valve |
| WO2013073039A1 (en) * | 2011-11-17 | 2013-05-23 | プログレッシオ合同会社 | Gate valve for vacuum |
| JPWO2013073039A1 (en) * | 2011-11-17 | 2015-04-02 | プログレッシオ合同会社 | Vacuum gate valve |
| CN103867741A (en) * | 2014-03-31 | 2014-06-18 | 江苏苏盐阀门机械有限公司 | Double disc capable of being unfolded through hinge shift |
| CN117386838A (en) * | 2023-12-13 | 2024-01-12 | 艾坦姆流体控制技术(山东)有限公司 | Friction-free double-flashboard gate valve |
| CN117386838B (en) * | 2023-12-13 | 2024-04-02 | 艾坦姆流体控制技术(山东)有限公司 | Friction-free double-flashboard gate valve |
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|---|---|
| JP4266456B2 (en) | 2009-05-20 |
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