JP2001039777A - Heat radiating plate - Google Patents
Heat radiating plateInfo
- Publication number
- JP2001039777A JP2001039777A JP11230357A JP23035799A JP2001039777A JP 2001039777 A JP2001039777 A JP 2001039777A JP 11230357 A JP11230357 A JP 11230357A JP 23035799 A JP23035799 A JP 23035799A JP 2001039777 A JP2001039777 A JP 2001039777A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- heat
- densification
- heat treatment
- composite material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は放熱板に関するもの
であり、詳しくは電子機器に用いられる軽量で薄く、且
つ熱伝導率の高い放熱板に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat radiating plate, and more particularly, to a lightweight, thin, and high heat conductive radiating plate used for electronic equipment.
【０００２】[0002]
【従来の技術】近年、パソコン・ビデオ等のＯＡ機器や
電化製品等に使用される電子部品の高性能化に伴い、電
子部品等から発生する熱も増加し、この熱をどのように
処理するかが問題となっている。通常、このＯＡ機器や
電化製品の内部で発生する熱は、発熱部の固定板等に放
熱性が良く、熱伝導率が高い放熱板を使用して、効率よ
く外部へ放熱している。2. Description of the Related Art In recent years, as electronic components used in OA equipment such as personal computers and video, electric appliances and the like have become more sophisticated, heat generated from the electronic components and the like has increased, and how this heat is processed. Is a problem. Normally, heat generated inside the OA equipment or the electric appliance is efficiently radiated to the outside by using a heat radiating plate having a high heat conductivity and a high heat conductivity to a fixing plate of a heat generating portion.
【０００３】しかしながら、近年、電子部品等からの発
熱量は増加しつつあるのに対し、電化製品の軽量小型
化、軽薄化に伴う電子部品の収納スペースの縮小により
放熱のためのスペースも小さくなっている。従って、電
子部品等から発生した熱をできるだけ効率よく放熱する
ためには、放熱板の熱伝導率を高くする必要がある。そ
こで、例えば、パソコンのＩＣチップを固定するＣＳＰ
（Chip Sized Package）等の放熱板には、主に熱伝導率
を高くするためには銅が使用され、また、主に軽量化の
ためにはアルミが使用されている。However, in recent years, while the amount of heat generated from electronic components and the like has been increasing, the space for dissipating heat has also become smaller due to the reduction in the storage space for electronic components due to the reduction in the size and weight of electronic products and the reduction in weight. ing. Therefore, in order to radiate the heat generated from the electronic components and the like as efficiently as possible, it is necessary to increase the thermal conductivity of the radiator plate. Therefore, for example, a CSP for fixing an IC chip of a personal computer
For a heat radiating plate such as a (Chip Sized Package) or the like, copper is mainly used to increase the thermal conductivity, and aluminum is mainly used to reduce the weight.
【０００４】[0004]
【発明が解決しようとする課題】上記のＣＳＰは薄い方
が望ましく、銅、アルミをできるだけ薄く加工している
が、あまり薄すぎるとＣＳＰの板の強度が低下し、変形
しやすいものとなる。その結果、生産時の歩留まりが低
下し、また、検査する人件費等にも大きなコストが生じ
る。The above-mentioned CSP is desirably thin, and copper and aluminum are processed as thin as possible. However, if the CSP is too thin, the strength of the CSP plate is reduced and the CSP is easily deformed. As a result, the yield at the time of production is reduced, and labor costs for inspection are also high.
【０００５】[0005]
【課題を解決するための手段】そこで、本発明者等は電
化製品の軽量小型化、軽薄化が可能となる、特にノート
型パソコンをより軽薄化することが可能となる放熱板を
提供すべく鋭意検討した結果、放熱板として特定の炭素
繊維強化炭素複合材を用いることにより、上記課題が解
決できることを見出し、本発明に到達した。即ち、本発
明は、炭素短繊維強化炭素複合材からなり、厚さが１ｍ
ｍ以下であって、該厚さ方向をｚ軸とし、ｚ軸に垂直な
平面内で最も熱伝導率が高い方向をｘ軸、ｘ軸と同一平
面内で且つ垂直な方向をｙ軸としたとき、ｘ軸、ｙ軸及
びｚ軸の各方向の熱伝導率が１０Ｗ／ｍＫ以上であり、
且つ引張強度が８Ｋｇ／ｍｍ2以上であることを特徴と
する放熱板に存する。SUMMARY OF THE INVENTION Accordingly, the present inventors have aimed to provide a radiator plate which can reduce the weight and size and weight of electric appliances, and in particular, can further reduce the weight of notebook type personal computers. As a result of intensive studies, they have found that the above problems can be solved by using a specific carbon fiber reinforced carbon composite material as a heat sink, and have reached the present invention. That is, the present invention is made of a short carbon fiber reinforced carbon composite material and has a thickness of 1 m.
m or less, the thickness direction is the z-axis, the direction having the highest thermal conductivity in the plane perpendicular to the z-axis is the x-axis, and the direction perpendicular to the x-axis and the direction perpendicular to the x-axis is the y-axis. When the thermal conductivity in each direction of the x-axis, y-axis and z-axis is 10 W / mK or more,
And a heat sink having a tensile strength of 8 kg / mm 2 or more.
【０００６】[0006]
【発明の実施の形態】以下、本発明を更に詳細に説明す
る。本発明の放熱板は、特定の炭素短繊維強化炭素複合
材（以下「Ｃ／Ｃ複合材」という）からなることを特徴
とする。該Ｃ／Ｃ複合材に用いる炭素繊維としては、ピ
ッチ系、ＰＡＮ系、レーヨン系等の公知のものが使用で
きるが、特に高熱容量且つ高熱伝導であるピッチ系炭素
繊維が好ましい。また、該Ｃ／Ｃ複合材には、炭素繊維
ともに、必要に応じてＳｉＣ、Ａｌ２Ｏ３、カーボンブ
ラック等の無機繊維、無機物等を添加してもよい。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail. The heat radiating plate of the present invention is characterized by being made of a specific short carbon fiber reinforced carbon composite material (hereinafter referred to as “C / C composite material”). Known carbon fibers such as pitch-based, PAN-based, and rayon-based carbon fibers can be used as the carbon fiber for the C / C composite material, and pitch-based carbon fibers having high heat capacity and high heat conductivity are particularly preferable. Further, to the C / C composite material, together with carbon fibers, inorganic fibers such as SiC, Al2O3, carbon black, inorganic substances, and the like may be added as necessary.
【０００７】炭素繊維の形態としては、複数の短繊維か
らなるトウ、ストランド、ロービング、ヤーン等の形態
であり、これらをカッティングすることにより得られる
短繊維を用いるのが好ましい。これらの短繊維は複数の
短繊維の束が、通常１０００〜１２０００本、好ましく
は２０００〜６０００本から形成され、また、通常０．
３〜１００ｍｍ、好ましくは５〜５０ｍｍ程度の短繊維
束を使用する。炭素繊維自体の径や弾性率は、一般に複
合材として用いられる範囲であれば特に限定はない。The form of the carbon fiber is a form of a tow, a strand, a roving, a yarn or the like comprising a plurality of short fibers, and it is preferable to use a short fiber obtained by cutting these. These staple fibers are usually formed of a bundle of a plurality of staple fibers of 1,000 to 12,000, preferably 2,000 to 6,000.
A short fiber bundle of 3 to 100 mm, preferably about 5 to 50 mm is used. The diameter and elastic modulus of the carbon fiber itself are not particularly limited as long as they are in a range generally used as a composite material.
【０００８】以上の炭素繊維を、Ｃ／Ｃ複合材とする際
には、該短繊維束を解繊、分散し、二次元ランダムのシ
ートを作製し、マトリックス物質をその間に充てんする
ことが特性向上のために重要である。このため、上記短
繊維束を乾式または湿式解繊し、二次元ランダムのシー
トを作製する。乾式解繊して二次元ランダムに配向した
シートの製造する方法としては、例えば、紡績において
一般的な機械的に炭素繊維をモノフィラメント化し、シ
ートを作製するランダムウェバーを使用して製造した
り、またはエアーにより解繊し、シートを製造する方法
等が挙げられる。また、湿式解繊し、二次元ランダムに
配向したシートを製造する方法としては、例えばパルプ
等の叩解処理に通常使用されているビーターや解繊処理
に用いられるパルパーを使用し、溶媒中で短繊維状炭素
繊維を解繊後、例えば底部にスクリーンを有す型枠等に
少量ずつ供給したり、解繊後撹拌等の手段で均一に分散
させ、金網等で抄紙後、乾燥させて作製する方法があ
る。短繊維状の炭素繊維を均一に分散させる溶媒として
は、好ましくは水、或いはアセトン、炭素数１〜５のア
ルコール、アントラセン油等を用いるが、その他の有機
溶剤を用いてもよい。また、該溶媒中にフェノール樹
脂、フラン樹脂或いはピッチ等を分散もしくは溶解させ
ておくと、炭素繊維同士が接着させた状態となり、次工
程での取り扱いをより容易にするので好ましい。更に、
繊維素グリコール酸ナトリウム、ポリビニルアルコー
ル、ヒドロキシセルロース等の増粘剤を溶媒中に加えて
おくと、その効果が更に増大するので特に好ましい。When the above carbon fibers are used as a C / C composite material, the short fiber bundle is defibrated and dispersed, a two-dimensional random sheet is prepared, and a matrix material is filled therebetween. It is important for improvement. For this reason, the short fiber bundle is dry or wet defibrated to produce a two-dimensional random sheet. Examples of a method of producing a two-dimensionally randomly oriented sheet by dry defibration include, for example, mechanically forming carbon fibers into monofilaments commonly used in spinning, or using a random webber to produce a sheet, or A method of defibrating with air to produce a sheet, and the like. Further, as a method of producing a sheet which is wet-fibrillated and two-dimensionally randomly oriented, for example, a beater usually used for beating processing of pulp or the like or a pulper used for fibrillation processing is used, and a short time is used in a solvent. After fibrillating the fibrous carbon fiber, for example, it is supplied little by little to a mold having a screen at the bottom or the like, or is uniformly dispersed by means of stirring or the like after fibrillation, paper-made with a wire mesh or the like, and dried. There is a way. As a solvent for uniformly dispersing the short fibrous carbon fibers, water, acetone, an alcohol having 1 to 5 carbon atoms, anthracene oil, or the like is preferably used, but other organic solvents may be used. Further, it is preferable to disperse or dissolve a phenol resin, a furan resin, a pitch, or the like in the solvent, since the carbon fibers are in a state of being adhered to each other and the handling in the next step is more facilitated. Furthermore,
It is particularly preferable to add a thickener such as sodium cellulose glycolate, polyvinyl alcohol, or hydroxycellulose to the solvent because the effect is further increased.
【０００９】以上の炭素繊維が二次元ランダムに配向し
たシートの目付（１ｍ２あたりの重量）としては特に制
限はないが、取り扱い性、含浸性、均一性を考えると通
常１０〜５００ｇ／ｍ２が好ましい。かかるシートは、
通常、フェノール樹脂、フラン樹脂、或いは石油系、石
炭系ピッチのマトリックスを含浸させた後、乾燥する。
その際、マトリックスはアルコール、アセトン、アント
ラセン油等の溶媒に溶解して適正な粘度に調整したもの
を使用するのが好ましい。そして、次いで、この乾燥し
たシートを積層して金型へ充てんし、通常１００〜５０
０℃の温度で加圧成形してＶｆ（繊維体積含有量）が通
常５〜６５％、好ましくは１０〜５５％程度の成形体を
得る。その後、窒素ガス等の不活性ガス雰囲気中で通常
１〜２００℃／ｈの昇温速度で１６００℃以上３５００
℃以下、好ましくは１８００℃以上、３２００℃以下、
特に好ましくは２０００℃以上２８００℃以下の温度ま
で焼成し、初期黒鉛化する。The basis weight (weight per 1 m 2) of the sheet in which the carbon fibers are two-dimensionally randomly oriented is not particularly limited, but is usually preferably 10 to 500 g / m 2 in consideration of handleability, impregnation and uniformity. . Such a sheet
Usually, a phenol resin, a furan resin, or a petroleum-based or coal-based pitch matrix is impregnated and then dried.
At this time, it is preferable to use a matrix which is dissolved in a solvent such as alcohol, acetone, anthracene oil or the like and adjusted to an appropriate viscosity. Then, the dried sheets are laminated and filled in a mold, usually 100 to 50.
Press molding at a temperature of 0 ° C. gives a molded product having a Vf (fiber volume content) of usually 5 to 65%, preferably about 10 to 55%. Thereafter, in an atmosphere of an inert gas such as nitrogen gas, the temperature is usually 1600 ° C.
° C or less, preferably 1800 ° C or more and 3200 ° C or less,
Particularly preferably, it is fired to a temperature of 2,000 ° C. or more and 2800 ° C. or less, and is initially graphitized.
【００１０】更に、上記初期黒鉛化した焼成物を緻密化
する。その方法としては、緻密化マトリックスとしてピ
ッチを含浸する方法、樹脂を含浸する方法あるいはＣＶ
Ｉ（Chemical Vapor Infiltration)を用いる方法が挙げ
られるが、高熱容量且つ高熱伝導性が得られるピッチを
含浸する方法が特に好ましい。このとき使用するピッチ
としては、種々のピッチを用いることができるが、軟化
点が通常７０〜１５０℃、好ましくは８０〜９０℃であ
り、トルエン不溶分が通常１０〜３０％、好ましくは１
３〜２０％であり実質上キノリン不溶分を含まず、固定
炭素が通常４０％以上、好ましくは５０％以上のものを
用いる。そして、含浸後は、通常６００℃以上、好まし
くは７００℃以上で焼成する緻密化処理を複数回繰り返
すことにより、嵩密度が通常１．８０ｇ／ｃｍ3以上、
好ましくは１．９０ｇ／ｃｍ３以上であって、気孔率が
通常１０％以下のものを得る。また、緻密化熱処理の後
には、更に別途熱処理を行ってもよい。そして、この緻
密化熱処理と緻密化後の熱処理での最高温度を好ましく
は１８００℃以上、特に好ましくは２０００℃以上とす
る。この最高温度にするのは、特に制限はないが、通常
は、緻密化熱処理と緻密化後の熱処理の中でも最終の熱
処理工程である。なお、特に初期黒鉛化温度が２０００
℃未満の場合は、最高熱処理温度は２０００℃以上が好
ましい。なお、最高熱処理温度の上限は通常、３５００
℃以下、好ましくは３２００℃以下、より好ましくは２
８００℃以下である。[0010] Further, the fired product which has been initially graphitized is densified. As the method, a method of impregnating pitch as a densification matrix, a method of impregnating resin, or a method of impregnating CV
A method using I (Chemical Vapor Infiltration) may be mentioned, but a method of impregnating a pitch with high heat capacity and high heat conductivity is particularly preferable. As the pitch used at this time, various pitches can be used, but the softening point is usually 70 to 150 ° C, preferably 80 to 90 ° C, and the toluene insoluble content is usually 10 to 30%, preferably 1 to 30%.
It is 3 to 20%, contains substantially no quinoline-insoluble matter, and usually has a fixed carbon of 40% or more, preferably 50% or more. Then, after the impregnation, the bulk density is usually 1.80 g / cm 3 or more by repeating the densification treatment of baking at usually 600 ° C. or more, preferably 700 ° C. or more a plurality of times.
It is preferably at least 1.90 g / cm3 and usually has a porosity of 10% or less. After the densification heat treatment, a separate heat treatment may be performed. The maximum temperature in the densification heat treatment and the heat treatment after the densification is preferably 1800 ° C. or more, particularly preferably 2000 ° C. or more. The maximum temperature is not particularly limited, but is usually a final heat treatment step among densification heat treatment and heat treatment after densification. In particular, the initial graphitization temperature is 2000
When the temperature is lower than ℃, the maximum heat treatment temperature is preferably at least 2,000 ℃. The upper limit of the maximum heat treatment temperature is usually 3500
° C or lower, preferably 3200 ° C or lower, more preferably 2 ° C or lower.
800 ° C. or less.
【００１１】このようにして得られたＣ／Ｃ複合材は、
緻密化されており、通常、嵩密度１．８ｇ／ｃｍ3以上
であり、引張強度が８ｋｇ／ｍｍ2以上、好ましくは９
ｋｇ／ｍｍ2以上である。二次元ランダムに炭素繊維が
配向したシートの積層面と平行方向の熱伝導率が５０Ｗ
／ｍＫ以上、垂直方向の熱伝導率が１０Ｗ／ｍＫ以上と
なる。このＣ／Ｃ複合材を二次元ランダムに炭素繊維が
配向した積層シートの積層面とほぼ平行に切断し、切削
加工することにより、厚み１ｍｍ以下、好ましくは０．
５ｍｍ以下、より好ましくは０．１ｍｍ以下であり、且
つ面方向（ｘ軸方向及びｙ軸方向）の熱伝導率が５０Ｗ
／ｍＫ以上、好ましくは６０Ｗ／ｍＫ以上、垂直方向
（ｚ軸方向）の熱伝導率が１０Ｗ／ｍＫ以上、好ましく
は１５Ｗ／ｍＫ以上の放熱板を得られる。[0011] The C / C composite material thus obtained is
It is dense, usually has a bulk density of 1.8 g / cm 3 or more, and has a tensile strength of 8 kg / mm 2 or more, preferably 9 kg / mm 2 or more.
kg / mm 2 or more. Thermal conductivity in the direction parallel to the laminated surface of the sheet in which carbon fibers are oriented two-dimensionally randomly is 50 W
/ MK or more, and the thermal conductivity in the vertical direction is 10 W / mK or more. The C / C composite material is cut two-dimensionally in a direction substantially parallel to the laminating surface of the laminated sheet in which the carbon fibers are oriented, and is cut to a thickness of 1 mm or less, preferably 0.1 mm or less.
5 mm or less, more preferably 0.1 mm or less, and a thermal conductivity of 50 W in the plane direction (x-axis direction and y-axis direction)
/ MK or more, preferably 60 W / mK or more, and a heat sink having a thermal conductivity in the vertical direction (z-axis direction) of 10 W / mK or more, preferably 15 W / mK or more.
【００１２】また、このＣ／Ｃ複合材を二次元ランダム
に炭素繊維が配向した積層シートの積層面とほぼ垂直に
切断し、切削加工することにより、厚み１ｍｍ以下、好
ましくは０．５ｍｍ以下、より好ましくは０．１ｍｍ以
下であり、且つｘ軸方向とｚ軸方向の熱伝導率が５０Ｗ
／ｍＫ以上、好ましくは６０Ｗ／ｍＫ以上、ｚ軸方向の
熱伝導率が１０Ｗ／ｍＫ以上、好ましくは１５Ｗ／ｍＫ
以上の放熱板を得られる。以上のような本発明の薄いＣ
／Ｃ複合材よりなる放熱板は、同じ大きさのアルミ板よ
りも軽く、また、多少の応力では変形することがないた
めハンドリング性に優れている。Further, the C / C composite material is cut almost perpendicularly to the laminating surface of the laminated sheet in which carbon fibers are oriented two-dimensionally at random, and cut to obtain a thickness of 1 mm or less, preferably 0.5 mm or less. More preferably 0.1 mm or less, and the thermal conductivity in the x-axis direction and z-axis direction is 50 W
/ MK or more, preferably 60 W / mK or more, and the thermal conductivity in the z-axis direction is 10 W / mK or more, preferably 15 W / mK.
The above-mentioned heat sink can be obtained. The thin C of the present invention as described above
The heat radiating plate made of the / C composite material is lighter than the aluminum plate of the same size, and is excellent in handling properties because it is not deformed by a slight stress.
【００１３】[0013]
【実施例】以下、本発明を実施例により具体的に説明す
るが、本発明はその要旨を越えない限り、下記実施例に
限定されるものではない。なお、実施例での各物性値の
測定にあたっては、放熱板の厚みはマイクロメーターを
用い、気孔率は水銀ポロシメーターを用い、熱伝導率は
レーザーフラッシュ法を用い、更に、引張強度はＪＩＳ
Ｋ−６９１１に準拠して測定した。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist. In the measurement of each physical property value in the examples, the thickness of the heat sink was measured using a micrometer, the porosity was measured using a mercury porosimeter, the thermal conductivity was measured using a laser flash method, and the tensile strength was measured according to JIS.
It measured according to K-6911.
【００１４】実施例１ フィラメント数５０００のピッチ系炭素繊維を３０ｍｍ
長に切断したものをランダムウェバーにて解繊し、二次
元ランダムに配向した目付２００ｇ／ｍ2のシートを得
た。このシートへエタノールで希釈したフェノール樹脂
を含浸させた後乾燥し、２００ｇ／ｍ2の炭素繊維に対
し１３０ｇ／ｍ2のフェノール樹脂を含浸したシートを
作製した。このシートを金型内へ積層し、２５０℃にて
加圧成形し、Ｖｆが約５０％の成形体を得た。この成形
体を２４００℃で１時間焼成し、初期黒鉛化を行った。
更に、焼成した成形体にピッチを含浸し９００℃で１時
間焼成し、かかる含浸−焼成の操作を７回繰り返した。
その後、最終熱処理として、２０００℃の熱処理を１時
間行い、Ｃ／Ｃ複合材を得た。更に、このＣ／Ｃ複合材
を二次元ランダムに炭素繊維が配向したシートの積層面
とほぼ平行に厚さ２ｍｍに切断後、研削加工により、大
きさ３０ｍｍ×３０ｍｍ、厚さ０．１０ｍｍのＣ／Ｃ複
合材板を得た。このＣ／Ｃ複合材板は多少の応力では変
形することなく、ハンドリング性に優れていた。このＣ
／Ｃ複合材の特性を表−１に示す。Example 1 A pitch-based carbon fiber having 5,000 filaments was sized at 30 mm.
The sheet cut into lengths was defibrated with a random webber to obtain a two-dimensionally randomly oriented sheet having a basis weight of 200 g / m 2 . The sheet was impregnated with a phenol resin diluted with ethanol and then dried to prepare a sheet in which 200 g / m 2 of carbon fiber was impregnated with 130 g / m 2 of a phenol resin. This sheet was laminated in a mold and pressed at 250 ° C. to obtain a molded product having a Vf of about 50%. This molded body was fired at 2400 ° C. for 1 hour to perform initial graphitization.
The pitch was impregnated in the fired molded body, fired at 900 ° C. for 1 hour, and the operation of impregnation and firing was repeated seven times.
Thereafter, as a final heat treatment, heat treatment at 2000 ° C. was performed for 1 hour to obtain a C / C composite material. Further, this C / C composite material is cut into a thickness of 2 mm almost in parallel with the lamination surface of the sheet in which carbon fibers are oriented two-dimensionally at random, and then ground by grinding to obtain a 30 mm × 30 mm, 0.10 mm thick C / C composite plate was obtained. This C / C composite material plate was excellent in handleability without being deformed by some stress. This C
Table 1 shows the properties of the / C composite material.
【００１５】実施例２ 実施例１と同様な方法で成形して、Ｖｆが約５０％の成
形体を得た。この成形体を２０００℃で焼成する初期黒
鉛化を行った後に、実施例１と同様の緻密化処理を行
い、Ｃ／Ｃ複合材を得た。更に、このＣ／Ｃ複合材を実
施例１と同様に加工して大きさ３０ｍｍ×３０ｍｍ、厚
さ０．１０ｍｍのＣ／Ｃ複合材板を得た。このＣ／Ｃ複
合材板は多少の応力では変形することなく、ハンドリン
グ性に優れていた。このＣ／Ｃ複合材の特性を表−１に
示す。Example 2 A molded product having a Vf of about 50% was obtained by molding in the same manner as in Example 1. After performing initial graphitization by firing the molded body at 2000 ° C., the same densification treatment as in Example 1 was performed to obtain a C / C composite material. Further, this C / C composite material was processed in the same manner as in Example 1 to obtain a C / C composite plate having a size of 30 mm × 30 mm and a thickness of 0.10 mm. This C / C composite material plate was excellent in handleability without being deformed by some stress. Table 1 shows the characteristics of the C / C composite material.
【００１６】比較例１ 実施例１と同様な方法で成形して、Ｖｆが約５０％の成
形体を得た。この成形体を２０００℃で焼成する初期黒
鉛化を行った後に、ＣＶＩ及び、ピッチを含浸し９００
℃で１時間焼成するピッチ含浸−焼成の操作を７回繰り
返し、その後、最終熱処理として１６００℃で１時間の
熱処理を行った。更に、このＣ／Ｃ複合材を実施例１と
同様に加工して大きさ３０ｍｍ×３０ｍｍ、厚さ０．１
０ｍｍのＣ／Ｃ複合材板を得た。このＣ／Ｃ複合材の特
性を表−１に示す。Comparative Example 1 A compact having a Vf of about 50% was obtained in the same manner as in Example 1. After performing initial graphitization in which the molded body is fired at 2000 ° C., it is impregnated with CVI and pitch to obtain
The operation of pitch impregnation and firing at 1 ° C. for 1 hour was repeated seven times, and then a heat treatment at 1600 ° C. for 1 hour was performed as a final heat treatment. Further, this C / C composite was processed in the same manner as in Example 1 to have a size of 30 mm × 30 mm and a thickness of 0.1 mm.
A 0 mm C / C composite plate was obtained. Table 1 shows the characteristics of the C / C composite material.
【００１７】比較例２ フィラメント数４０００のピッチ系炭素繊維１００重量
部にフェノール樹脂６５重量含浸し、乾燥した後３０ｍ
ｍ長に切断した、いわゆるトウプリプレグを作製した。
このものを金型内へ充てんし、２５０℃にて加圧成形
し、Ｖｆが約５０％の成形体を得た。このものを、実施
例１と同様な方法で初期黒鉛化、及び緻密化処理を行っ
た。このＣ／Ｃ複合材の特性を表−１に示す。更に、こ
のＣ／Ｃ複合材を実施例１と同様に加工して大きさ３０
ｍｍ×３０ｍｍ、厚さ０．１０ｍｍのＣ／Ｃ複合材板が
得た。このＣ／Ｃ複合材板は多少の応力では変形が顕著
であった。Comparative Example 2 100 parts by weight of pitch-based carbon fibers having 4000 filaments were impregnated with 65 parts by weight of a phenol resin, dried, and then dried to 30 m.
A so-called tow prepreg cut to m length was produced.
This was filled in a mold and pressed at 250 ° C. to obtain a molded product having a Vf of about 50%. This was subjected to initial graphitization and densification in the same manner as in Example 1. Table 1 shows the characteristics of the C / C composite material. Further, this C / C composite material was processed in the same manner as in Example 1 to have a size of 30%.
A C / C composite plate having a size of 30 mm and a thickness of 0.10 mm was obtained. This C / C composite plate was significantly deformed by some stress.
【００１８】[0018]
【表１】 [Table 1]
【００１９】実施例３ 実施例１と同様な方法で得たＣ／Ｃ複合材のシートの積
層面とほぼ垂直に厚さ２ｍｍに切断後、研削加工によ
り、大きさ３０ｍｍ×３０ｍｍ、厚さ０．１０ｍｍで表
−２のような熱伝導率の物性を示すのＣ／Ｃ複合材板を
得た。このＣ／Ｃ複合材板は多少の応力では変形するこ
となく、ハンドリング性に優れていた。Example 3 A C / C composite sheet obtained in the same manner as in Example 1 was cut to a thickness of 2 mm almost perpendicular to the lamination surface, and then ground by grinding to a size of 30 mm × 30 mm and a thickness of 0 mm. A C / C composite plate having physical properties of thermal conductivity as shown in Table 2 at .10 mm was obtained. This C / C composite material plate was excellent in handleability without being deformed by some stress.
【００２０】実施例４ 実施例２と同様な方法で得たＣ／Ｃ複合材のシートの積
層面とほぼ垂直に厚さ２ｍｍに切断後、研削加工によ
り、大きさ３０ｍｍ×３０ｍｍ、厚さ０．１０ｍｍで表
−２のような熱伝導率の物性を示すのＣ／Ｃ複合材板を
得た。このＣ／Ｃ複合材板は多少の応力では変形するこ
となく、ハンドリング性に優れていた。Example 4 A sheet of the C / C composite material obtained in the same manner as in Example 2 was cut into a thickness of 2 mm almost perpendicular to the lamination surface, and then ground by grinding to a size of 30 mm × 30 mm and a thickness of 0 mm. A C / C composite plate having physical properties of thermal conductivity as shown in Table 2 at .10 mm was obtained. This C / C composite material plate was excellent in handleability without being deformed by some stress.
【００２１】比較例３ 比較例１と同様な方法で得たＣ／Ｃ複合材のシートの積
層面とほぼ垂直に厚さ２ｍｍに切断後、研削加工によ
り、大きさ３０ｍｍ×３０ｍｍ、厚さ０．１０ｍｍで表
−２のような熱伝導率の物性を示すのＣ／Ｃ複合材板を
得た。Comparative Example 3 A sheet of the C / C composite material obtained in the same manner as in Comparative Example 1 was cut into a thickness of 2 mm almost perpendicular to the lamination surface, and then ground by grinding to a size of 30 mm × 30 mm and a thickness of 0 mm. A C / C composite plate having physical properties of thermal conductivity as shown in Table 2 at .10 mm was obtained.
【００２２】比較例４ 比較例２と同様な方法で得たＣ／Ｃ複合材のシートの積
層面とほぼ垂直に厚さ２ｍｍに切断後、研削加工によ
り、大きさ３０ｍｍ×３０ｍｍ、厚さ０．１０ｍｍで表
−２のような熱伝導率の物性を示すのＣ／Ｃ複合材板を
得た。このＣ／Ｃ複合材板は強度が低く、０．１ｍｍに
加工する途中で割れてしまった。Comparative Example 4 A sheet of the C / C composite material obtained in the same manner as in Comparative Example 2 was cut into a thickness of 2 mm almost perpendicularly to the lamination surface, and then ground to a size of 30 mm × 30 mm and a thickness of 0 mm. A C / C composite plate having physical properties of thermal conductivity as shown in Table 2 at .10 mm was obtained. This C / C composite plate had low strength and broke during processing to 0.1 mm.
【００２３】[0023]
【表２】 [Table 2]
【００２４】[0024]
【発明の効果】本発明によれば、軽量で薄く、熱伝導率
の高いＣ／Ｃ複合材よりなる放熱板が提供されるので、
工業的に非常に有用である。According to the present invention, there is provided a heat sink made of a C / C composite material which is lightweight, thin and has high thermal conductivity.
Very useful industrially.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 室井 美香 香川県坂出市番の州町１番地 三菱化学株 式会社坂出事業所内 Ｆターム(参考） 4F072 AA02 AA07 AB10 AD11 AD13 AH02 AJ11 AK05 AL09 AL17 4G032 AA09 AA52 BA04 GA06 GA11 GA20 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Mika Muroi Inventor Mika 1 Sakaide-shi, Kagawa Pref. Sakaide Works Mitsubishi Chemical Corporation F-term (reference) 4F072 AA02 AA07 AB10 AD11 AD13 AH02 AJ11 AK05 AL09 AL17 4G032 AA09 AA52 BA04 GA06 GA11 GA20
Claims (7)
さが１ｍｍ以下であって、該厚さ方向をｚ軸とし、ｚ軸
に垂直な平面内で最も熱伝導率が高い方向をｘ軸、ｘ軸
と同一平面内で且つ垂直な方向をｙ軸としたとき、ｘ
軸、ｙ軸及びｚ軸の各方向の熱伝導率が１０Ｗ／ｍＫ以
上であり、且つ引張強度が８Ｋｇ／ｍｍ2以上であるこ
とを特徴とする放熱板。1. A short carbon fiber reinforced carbon composite material having a thickness of 1 mm or less, the thickness direction being the z-axis, and the direction having the highest thermal conductivity in a plane perpendicular to the z-axis being x. When the direction perpendicular to the same plane as the x-axis and the x-axis is taken as the y-axis, x
A heat radiating plate having a thermal conductivity of 10 W / mK or more in each of the axis, the y-axis, and the z-axis and a tensile strength of 8 kg / mm 2 or more.
上、ｙ軸方向の熱伝導率が５０Ｗ／ｍＫ以上、ｚ軸方向
の熱伝導率が１０Ｗ／ｍＫ以上である請求項１の放熱
板。2. The heat radiation according to claim 1, wherein the heat conductivity in the x-axis direction is 50 W / mK or more, the heat conductivity in the y-axis direction is 50 W / mK or more, and the heat conductivity in the z-axis direction is 10 W / mK or more. Board.
上、ｙ軸方向の熱伝導率が１０Ｗ／ｍＫ以上、ｚ軸方向
の熱伝導率が５０Ｗ／ｍＫ以上である請求項１の放熱
板。3. The heat radiation according to claim 1, wherein the heat conductivity in the x-axis direction is 50 W / mK or more, the heat conductivity in the y-axis direction is 10 W / mK or more, and the heat conductivity in the z-axis direction is 50 W / mK or more. Board.
請求項１〜３のいずれかの放熱板。4. The heat sink according to claim 1, which has a bulk density of 1.80 g / cm 3 or more.
のいずれかの放熱板。5. The method according to claim 1, wherein the porosity is 10% or less.
Any of the heat sinks.
シートを作成し、該二次元ランダムシートを積層、成形
後、１６００℃以上で焼成し、得られた焼成物に緻密化
マトリックスとしてピッチを含浸し、これを６００℃以
上で緻密化熱処理を複数回繰り返し、更に、必要に応じ
て緻密化後の熱処理を行い、且つ、前記緻密化熱処理及
び緻密化後の熱処理での最高温度を１８００℃以上とし
て得られた炭素短繊維強化炭素複合材からなる積層シー
トを、該積層シートに対してほぼ平行に切断し、切削加
工することを特徴とする請求項２の放熱板の製造方法。6. A two-dimensional random sheet is prepared from the defibrated carbon short fibers, and the two-dimensional random sheet is laminated and molded, and then fired at 1600 ° C. or higher. Impregnation, and repeating the densification heat treatment at 600 ° C. or more a plurality of times, further performing heat treatment after densification as necessary, and setting the maximum temperature in the densification heat treatment and the heat treatment after densification to 1800 ° C. 3. The method for manufacturing a radiator plate according to claim 2, wherein the laminated sheet made of the short carbon fiber reinforced carbon composite material obtained as described above is cut substantially parallel to the laminated sheet and cut.
シートを作成し、該二次元ランダムシートを積層、成形
後、１６００℃以上で焼成し、得られた焼成物に緻密化
マトリックスとしてピッチを含浸し、これを６００℃以
上で緻密化熱処理を複数回繰り返し、更に、必要に応じ
て緻密化後の熱処理を行い、且つ、前記緻密化熱処理及
び緻密化後の熱処理での最高温度を１８００℃以上とし
て得られた炭素短繊維強化炭素複合材からなる積層シー
トを、該積層シートに対してほぼ垂直に切断し、切削加
工することを特徴とする請求項３の放熱板の製造方法。7. A two-dimensional random sheet is prepared from the defibrated carbon short fibers, and the two-dimensional random sheet is laminated and molded, and then fired at 1600 ° C. or more. Impregnation, and repeating the densification heat treatment at 600 ° C. or more a plurality of times, further performing heat treatment after densification as necessary, and setting the maximum temperature in the densification heat treatment and the heat treatment after densification to 1800 ° C. 4. The method for manufacturing a heat sink according to claim 3, wherein the laminated sheet made of the short carbon fiber reinforced carbon composite material obtained as described above is cut substantially perpendicularly to the laminated sheet and cut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11230357A JP2001039777A (en) | 1999-05-26 | 1999-08-17 | Heat radiating plate |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-146441 | 1999-05-26 | ||
| JP14644199 | 1999-05-26 | ||
| JP11230357A JP2001039777A (en) | 1999-05-26 | 1999-08-17 | Heat radiating plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001039777A true JP2001039777A (en) | 2001-02-13 |
Family
ID=26477281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11230357A Pending JP2001039777A (en) | 1999-05-26 | 1999-08-17 | Heat radiating plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001039777A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038313B2 (en) | 2003-05-06 | 2006-05-02 | Fuji Electric Device Technology Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP2009256117A (en) * | 2008-04-14 | 2009-11-05 | Toyo Tanso Kk | Carbon fiber carbon composite molded body, carbon fiber-reinforced carbon composite material and its manufacturing method |
-
1999
- 1999-08-17 JP JP11230357A patent/JP2001039777A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038313B2 (en) | 2003-05-06 | 2006-05-02 | Fuji Electric Device Technology Co., Ltd. | Semiconductor device and method of manufacturing the same |
| DE102004021075B4 (en) * | 2003-05-06 | 2011-05-05 | Fuji Electric Systems Co., Ltd. | Semiconductor device with anisotropically thermally conductive radiator base and method for its production |
| JP2009256117A (en) * | 2008-04-14 | 2009-11-05 | Toyo Tanso Kk | Carbon fiber carbon composite molded body, carbon fiber-reinforced carbon composite material and its manufacturing method |
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