JP2000326188A - Both-side cutting method and device for drilled thin disk- like work - Google Patents
Both-side cutting method and device for drilled thin disk- like workInfo
- Publication number
- JP2000326188A JP2000326188A JP14155299A JP14155299A JP2000326188A JP 2000326188 A JP2000326188 A JP 2000326188A JP 14155299 A JP14155299 A JP 14155299A JP 14155299 A JP14155299 A JP 14155299A JP 2000326188 A JP2000326188 A JP 2000326188A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- rollers
- static pressure
- work
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ガラス板、アルミ
ニウム板、その他の穴あき薄円板状工作物の両端面を平
行に研削する両面研削方法及び両面研削装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-side grinding method and a double-side grinding apparatus for grinding both end surfaces of a glass plate, an aluminum plate and other perforated thin disk-shaped workpieces in parallel.
【0002】[0002]
【従来の技術】電子機器の記録媒体として使用されるガ
ラス板やアルミニウム板等の穴あき薄円板状工作物の両
端面を平行に研削する両面研削装置において、工作物の
駆動・保持方式には、従来、端面駆動・外径直径ガイド
方式と外径直径駆動・端面ガイド方式とがある。2. Description of the Related Art In a double-sided grinding apparatus for grinding both end surfaces of a perforated thin disk-shaped work such as a glass plate or an aluminum plate used as a recording medium of electronic equipment in parallel, a method for driving and holding the work is used. Conventionally, there are an end face drive / outside diameter guide method and an outside diameter drive / end face guide method.
【0003】端面駆動・外径直径ガイド方式は、特開平
4−41167号公報に記載されるように、駆動ローラ
を工作物の両端面に、周方向に少なくとも3個のガイド
ローラを工作物の外周に夫々転接させて配置し、各ガイ
ドローラにより工作物を外周側で保持し案内しながら、
駆動ローラにより工作物を端面側から駆動するようにな
っている。As described in Japanese Patent Application Laid-Open No. 4-41167, an end face driving / outside diameter guide method is such that a driving roller is provided on both end faces of a workpiece and at least three guide rollers are provided circumferentially on the workpiece. Rolled and placed on the outer circumference respectively, while holding and guiding the workpiece on the outer circumference side by each guide roller,
The workpiece is driven from the end face side by a driving roller.
【0004】また外径直径駆動・端面ガイド方式は、特
開昭59−76764号公報に記載されるように、周方
向に少なくとも3個の駆動ローラを工作物の外周に、ガ
イドローラを工作物の両端面に夫々転接させて配置し、
各ガイドローラにより工作物を両端面側で保持し案内し
ながら、各駆動ローラにより工作物を外周側で駆動する
ようになっている。As described in JP-A-59-76764, at least three drive rollers are provided in the circumferential direction on the outer periphery of the workpiece, and the guide rollers are connected to the workpiece. Rolled and placed on both end faces of
While the workpiece is held and guided on both end faces by each guide roller, the workpiece is driven on the outer peripheral side by each drive roller.
【0005】[0005]
【発明が解決しようとする課題】従来の端面駆動・外径
直径ガイド方式は、各ガイドローラにより工作物を直径
方向に挟んで保持し、端面側の駆動ローラで工作物を駆
動するため、駆動ローラの振れ精度が工作物の加工精
度、特に平坦度、面粗度に大きく影響する問題がある。In the conventional end face driving / outside diameter guide method, a work is diametrically held between guide rollers, and the work is driven by a driving roller on the end face. There is a problem that the run-out accuracy of the roller greatly affects the work accuracy of the workpiece, particularly the flatness and surface roughness.
【0006】一方、外径直径駆動・端面ガイド方式は、
端面側の各ガイドローラにより工作物を両側から挟んで
保持し、外周側の駆動ローラで工作物を駆動するため、
工作物が撓み易く工作物の加工精度に大きく影響する問
題がある。On the other hand, the outer diameter / diameter drive / end guide method is
In order to hold the work by sandwiching it from both sides with each guide roller on the end face side and drive the work piece with the drive roller on the outer circumference side,
There is a problem that the workpiece is easily bent and greatly affects the processing accuracy of the workpiece.
【0007】また従来の方式では、工作物の撓みを少な
くするため、駆動ローラの押し付け力を大きくすること
ができず、工作物の駆動力が小さくなる。従って、工作
物の回転数を上げることができず、切り込み速度を速く
することが困難であり、サイクルタイムが長くなる問題
がある。In the conventional method, the pressing force of the drive roller cannot be increased in order to reduce the bending of the workpiece, and the driving force of the workpiece decreases. Therefore, it is impossible to increase the number of revolutions of the workpiece, it is difficult to increase the cutting speed, and there is a problem that the cycle time becomes longer.
【0008】本発明は、このような従来の問題点に鑑
み、工作物の剛性が増し高精度に加工できると共に、工
作物の高速回転によりサイクルタイムを大幅に短縮で
き、しかも工作物を高精度に案内でき、拘束力による工
作物の撓みを少なくできる穴あき薄円板状工作物の両面
研削方法及び両面研削装置を提供することを目的とす
る。In view of the above problems, the present invention increases the rigidity of a workpiece and enables high-precision machining. In addition, the high-speed rotation of the workpiece can greatly reduce the cycle time, and furthermore, the workpiece can be highly accurate. It is an object of the present invention to provide a double-sided grinding method and a double-sided grinding apparatus for a thin disk-shaped workpiece with holes, which can guide the workpiece to a small extent and reduce the deflection of the workpiece due to the restraining force.
【0009】[0009]
【課題を解決するための手段】本発明に係る両面研削方
法は、穴あき薄円板状工作物を回転させながら、該工作
物の両端面を一対の研削砥石により研削するに際し、前
記工作物の穴内径に転接するローラと、前記工作物の外
周に転接するローラとで構成される少なくとも3個のロ
ーラにより、前記工作物の半径部分を半径方向に挟んで
該工作物を回転支持しながら、前記研削砥石により前記
工作物の両端面を研削するものである。SUMMARY OF THE INVENTION A double-sided grinding method according to the present invention is directed to a method for grinding both end faces of a perforated thin disk-shaped workpiece with a pair of grinding wheels while rotating the workpiece. By at least three rollers composed of a roller rolling in contact with the inner diameter of the hole and a roller rolling in contact with the outer periphery of the workpiece, the workpiece is rotatably supported while radially sandwiching a radial portion of the workpiece. And grinding both end faces of the workpiece with the grinding wheel.
【0010】また本発明に係る両面研削装置は、穴あき
薄円板状工作物を回転させながら、該工作物の両端面を
一対の研削砥石により研削するようにした穴あき薄円板
状工作物の両面研削装置において、前記工作物の外周に
転接する少なくとも2個のローラと、前記工作物の穴内
径に転接し且つ前記少なくとも2個のローラとの間で前
記工作物の半径部分を半径方向に挟んで回転自在に支持
するローラとを備えたものである。[0010] A double-sided grinding apparatus according to the present invention is characterized in that, while rotating a thin disk-shaped workpiece with holes, both end faces of the workpiece are ground with a pair of grinding wheels. In an apparatus for grinding both sides of a workpiece, at least two rollers rolling in contact with the outer periphery of the workpiece, and a radius portion of the workpiece rolling between the at least two rollers rolling in contact with the bore diameter of the workpiece. And a roller rotatably supported by being sandwiched in the direction.
【0011】[0011]
【発明の実施の形態】以下、本発明の一実施形態を図面
に基づいて詳細に説明する。図1〜図3において、W は
ガラス板、アルミニウム板、その他の穴あき薄円板状工
作物である。1 は縦形の両面研削装置で、工作物W の上
下両端面を研削する上下一対の研削砥石2,3 と、工作物
W の外周(外周面)に転接する一対の駆動ローラ4,5
と、工作物W の穴内径(内周面)に転接して駆動ローラ
4,5 との間で工作物W を半径方向に挟むガイドローラ6
と、ガイドローラ6 を駆動ローラ4,5 に対して遠近方向
に移動させる転接用移動手段7 と、工作物W の上下両端
面を支持する上下一対の静圧支持手段8,9 と、上側の静
圧支持手段8 を工作物W の被支持面に対して接離自在に
退避させる退避手段10と、これらを研削砥石2,3 の直径
方向に移動可能に支持する摺動ベース11と、この摺動ベ
ース11を摺動可能に支持する固定ベース12とを備えてい
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. In FIG. 1 to FIG. 3, W is a glass plate, an aluminum plate, and other perforated thin disk-shaped workpieces. Reference numeral 1 denotes a vertical double-sided grinding device, which comprises a pair of upper and lower grinding wheels 2, 3 for grinding both upper and lower end surfaces of a workpiece W;
A pair of drive rollers 4 and 5 that roll on the outer periphery (outer peripheral surface) of W
To the inner diameter of the hole in the workpiece W
Guide rollers 6 that sandwich the workpiece W in the radial direction between
A rolling contact moving means 7 for moving the guide roller 6 in the distance direction with respect to the drive rollers 4 and 5; a pair of upper and lower static pressure supporting means 8 and 9 for supporting upper and lower end surfaces of the workpiece W; A retracting means 10 for retracting the static pressure supporting means 8 so as to be able to approach and separate from the supported surface of the workpiece W, and a sliding base 11 for supporting these movably in the diameter direction of the grinding wheels 2, 3. A fixed base 12 that slidably supports the sliding base 11;
【0012】摺動ベース11は、固定ベース12上に研削砥
石2,3 の直径方向に移動可能に載置され、図外の駆動手
段により研削砥石2,3 の直径方向に往復移動可能になっ
ている。各研削砥石2,3 はカップ式等であって、同一軸
心上に配置された縦方向の砥石軸(図示省略)に装着さ
れ、回転用駆動手段(図示省略)により砥石軸廻りにa
矢示方向へと同一方向に回転駆動されている。なお、研
削砥石2,3 は、駆動ローラ4,5 の回転方向と同一方向、
即ち駆動ローラ4,5 により回転駆動される工作物W の回
転に対して連れ廻り方向へと回転する。The sliding base 11 is mounted on the fixed base 12 so as to be movable in the diameter direction of the grinding wheels 2 and 3, and can be reciprocated in the diameter direction of the grinding wheels 2 and 3 by driving means (not shown). ing. Each of the grinding wheels 2 and 3 is of a cup type or the like, is mounted on a vertical grinding wheel shaft (not shown) arranged on the same axis, and is rotated around the grinding wheel shaft by a rotation driving means (not shown).
It is rotationally driven in the same direction as the arrow. In addition, the grinding wheels 2 and 3 are in the same direction as the rotation direction of the drive rollers 4 and 5,
That is, the workpiece W rotates in the rotation direction with respect to the rotation of the workpiece W that is rotationally driven by the driving rollers 4 and 5.
【0013】各駆動ローラ4,5 は工作物W をb矢示方向
に駆動するもので、工作物W に対して研削砥石2,3 と反
対側に配置されており、摺動ベース11上の軸受け箱13,1
4 により回転自在に支持された縦軸15,16 に固定され、
巻き掛け伝動手段17を介して回転用駆動手段18によりc
矢示方向に回転駆動されている。回転用駆動手段18は駆
動モータ19等により構成され、摺動ベース11の取り付け
台20に下向きに装着されている。なお、駆動ローラ4,5
は工作物W の周方向に3個以上設けても良いが、少なく
とも2個あれば十分である。Each of the drive rollers 4 and 5 drives the workpiece W in the direction of the arrow b, and is arranged on the opposite side of the grinding wheels 2 and 3 with respect to the workpiece W. Bearing box 13,1
4 fixed to the longitudinal axes 15, 16 rotatably supported by
The driving means 18 for rotation via the winding transmission means 17
It is driven to rotate in the direction indicated by the arrow. The rotation driving means 18 is constituted by a driving motor 19 and the like, and is mounted on the mounting base 20 of the sliding base 11 downward. The drive rollers 4 and 5
May be provided three or more in the circumferential direction of the workpiece W, but at least two are sufficient.
【0014】巻き掛け伝動手段17は、駆動モータ19の回
転軸に固定された駆動プーリ21と、各駆動ローラ4,5 に
固定された従動プーリ22,23 と、従動プーリ22,23 間に
配置された案内プーリ24と、これら駆動プーリ21、従動
プーリ22,23 及び案内プーリ24に跨がって巻き掛けられ
たベルト25等により構成されている。案内プーリ24は支
持台26から突出する支持部材27の先端部に支軸を介して
回転自在に支持されている。The wrapping transmission means 17 is arranged between a driving pulley 21 fixed to the rotating shaft of the driving motor 19, driven pulleys 22 and 23 fixed to the driving rollers 4 and 5, and between the driven pulleys 22 and 23. And a belt 25 wound around the drive pulley 21, the driven pulleys 22, 23, and the guide pulley 24. The guide pulley 24 is rotatably supported by a front end of a support member 27 protruding from the support base 26 via a support shaft.
【0015】ガイドローラ6 は、工作物W の穴内径に下
側から嵌脱し得るようにその穴内径よりも小径であっ
て、図4に示すように、転接用移動手段7 の揺動アーム
28の先端側に縦軸29により回転自在に支持されている。
転接用移動手段7 は、中間で縦方向の枢軸30により摺動
ベース11上に揺動自在に枢支された揺動アーム28と、こ
の揺動アーム28の他端側に連結された揺動用駆動手段31
が連結されている。揺動用駆動手段31はシリンダ等によ
り構成され、ガイドローラ6 が工作物W の穴内径に接離
するように揺動アーム28を駆動すると共に、ガイドロー
ラ6 が駆動ローラ4,5 との間で工作物W を挟むように所
定の圧力で付勢している。The guide roller 6 has a smaller diameter than the inner diameter of the hole of the workpiece W so that it can be fitted into and removed from the lower side of the hole, and as shown in FIG.
It is rotatably supported by the longitudinal axis 29 on the tip side of 28.
The rolling movement means 7 includes a swing arm 28 pivotally supported on the slide base 11 by a middle pivot shaft 30 in the middle, and a swing arm connected to the other end of the swing arm 28. Operating drive means 31
Are connected. The oscillating drive means 31 is constituted by a cylinder or the like, and drives the oscillating arm 28 so that the guide roller 6 comes into contact with and separates from the inner diameter of the hole of the workpiece W. The workpiece W is urged with a predetermined pressure so as to sandwich the workpiece.
【0016】各静圧支持手段8,9 は、図4及び図5に示
すように、研削砥石2,3 が工作物Wの上下両端面を研削
する被研削面と反対側で一対の駆動ローラ4,5 とガイド
ローラ6 との間に配置され、工作物W の上下両端面の被
支持面を静圧的に支持し案内するようになっている。各
静圧支持手段8,9 は、静圧支持部材32,33 と、この静圧
支持部材32,33 に工作物W の被支持面に対向して装着さ
れた静圧パット34,35とを備え、その静圧パット34,35
は静圧支持部材32,33 側からの静圧流体を工作物W の被
支持面側に噴出するように多孔質材により構成されてい
る。As shown in FIGS. 4 and 5, each of the static pressure supporting means 8 and 9 has a pair of drive rollers on opposite sides of the ground surfaces on which the grinding wheels 2 and 3 grind the upper and lower end surfaces of the workpiece W. The workpiece W is arranged between the guide rollers 4 and 5 and the guide rollers 6 to statically support and guide the supported surfaces on both upper and lower end surfaces of the workpiece W. Each of the static pressure support means 8, 9 comprises a static pressure support member 32, 33 and a static pressure pad 34, 35 mounted on the static pressure support member 32, 33 so as to face the supported surface of the workpiece W. Equipped with its hydrostatic pat 34,35
Is made of a porous material so that the static pressure fluid from the static pressure supporting members 32 and 33 is ejected to the supported surface side of the workpiece W.
【0017】静圧支持部材32,33 には、静圧パット34,3
5 側に静圧流体を案内する案内通路36,37 が形成され、
その案内通路36,37 はホース等を介して静圧流体供給源
(図示省略)に接続されている。なお、静圧流体には、
エアー、その他の静圧ガス、又は冷却液、研削液、その
他の静圧液体が使用されている。The static pressure supporting members 32, 33 have static pressure pads 34, 3
Guide passages 36 and 37 for guiding the static pressure fluid are formed on the 5 side,
The guide passages 36 and 37 are connected to a static pressure fluid supply source (not shown) via a hose or the like. In addition, the static pressure fluid includes
Air, other static pressure gases, or coolants, grinding fluids, and other static pressure liquids have been used.
【0018】なお、静圧支持部材32,33 には、多孔質材
の静圧パット34,35 に代替して、工作物W の被支持面側
に静圧流体を噴出する噴出孔を設けても良い。噴出孔は
大きいものを1個設けても良いし、小さいものを複数個
分散させて設けても良い。The static pressure supporting members 32, 33 are provided with ejection holes for ejecting a static pressure fluid on the supported surface side of the workpiece W instead of the static pressure pads 34, 35 made of a porous material. Is also good. The ejection hole may be provided with one large one or a plurality of small ones dispersedly provided.
【0019】下側の静圧支持手段9 は摺動ベース11上の
支持台38上に着脱自在に固定されている。上側の静圧支
持手段8 は、退避手段10により工作物W の被支持面に対
して退避可能に支持されている。The lower static pressure support means 9 is detachably fixed on a support base 38 on the slide base 11. The upper static pressure supporting means 8 is supported by the retracting means 10 so as to be retractable with respect to the supported surface of the workpiece W.
【0020】退避手段10は、静圧支持手段8 を昇降させ
る昇降手段39と、上昇位置で静圧支持手段8 を水平方向
に旋回させる旋回手段40とにより構成されている。昇降
手段39は、上下方向の昇降部材41と、この昇降部材41を
上下に昇降させる昇降用駆動手段42とを備え、その昇降
部材41の下端部に静圧支持手段8 の静圧支持部材32が装
着されている。なお、昇降用駆動手段42は、シリンダ駆
動式、モータ駆動式、その他の適宜手段により構成され
ている。The retracting means 10 is constituted by elevating means 39 for elevating and lowering the static pressure supporting means 8 and turning means 40 for turning the static pressure supporting means 8 horizontally at the ascending position. The lifting / lowering means 39 includes a vertical lifting / lowering member 41 and a lifting / lowering driving means 42 for lifting / lowering the lifting / lowering member 41, and the lower end of the lifting / lowering member 41 has a static pressure supporting member 32 of the static pressure supporting means 8 Is installed. The lifting drive means 42 is constituted by a cylinder drive type, a motor drive type, or other appropriate means.
【0021】旋回手段40は、図6にも示すように、支持
台26上に縦方向の旋回軸43廻りに旋回自在に支持された
旋回アーム44と、この旋回アーム44を駆動する旋回用駆
動手段45とを備え、その旋回アーム44の先端側に昇降手
段39が装着されている。旋回用駆動手段45は、旋回シリ
ンダ、その他の適宜手段により構成されている。なお、
支持台26上には、静圧支持手段8 が工作物W の被支持面
の上方に対応する位置で旋回アーム44を位置決めする旋
回ストッパー46が設けられている。支持台26は駆動モー
タ19の取り付け台20の近傍で摺動ベース11上に固定され
ている。As shown in FIG. 6, the turning means 40 includes a turning arm 44 supported on a support base 26 so as to be turnable around a vertical turning axis 43, and a turning drive for driving the turning arm 44. Means 45, and the elevating means 39 is mounted on the tip side of the turning arm 44. The turning drive means 45 is constituted by a turning cylinder and other appropriate means. In addition,
A turning stopper 46 for positioning the turning arm 44 at a position where the static pressure supporting means 8 is located above the supported surface of the workpiece W is provided on the support base 26. The support 26 is fixed on the slide base 11 near the mount 20 for the drive motor 19.
【0022】次に上記構成の両面研削装置における研削
方法を説明する。先ず摺動ベース11が研削砥石2,3 から
後退した後退位置において、揺動用駆動手段31により揺
動アーム28を揺動させて、ガイドローラ6 と駆動ローラ
4,5 との間隔を広げた後、穴内径にガイドローラ6 が嵌
合するように工作物W を投入し、工作物W を下側の静圧
支持手段9 上にセットする。従って、静圧支持手段9 上
に工作物W を容易に投入しセットできる。Next, a description will be given of a grinding method in the double-sided grinding apparatus having the above-described configuration. First, in a retracted position in which the sliding base 11 is retracted from the grinding wheels 2 and 3, the swing arm 28 is swung by the swing driving means 31 so that the guide roller 6 and the drive roller
After widening the distance between the workpiece W and the workpiece W, the workpiece W is loaded so that the guide roller 6 is fitted to the inner diameter of the hole, and the workpiece W is set on the lower static pressure support means 9. Therefore, the workpiece W can be easily put on the static pressure support means 9 and set.
【0023】次に退避手段10の旋回手段40を作動させ
て、上側の静圧支持手段8 を工作物Wの上方へと旋回さ
せた後、昇降手段39を作動させて上側の静圧支持手段8
を降ろし、各静圧支持手段8,9 の静圧パット34,35 から
噴出する静圧流体を介して工作物W の被支持面側を上下
両側から静圧的に支持する。このとき静圧支持手段8,9
の静圧パット34,35 から噴出する静圧流体が、静圧パッ
ト34,35 と工作物W の被支持面との間を流れるので、そ
の静圧流体を介して上下の静圧支持手段8,9 により工作
物W を位置決めすることができる。Next, the turning means 40 of the retreating means 10 is operated to turn the upper static pressure supporting means 8 above the workpiece W, and then the elevating means 39 is operated to operate the upper static pressure supporting means. 8
Then, the supported surface side of the workpiece W is statically supported from both the upper and lower sides via the static pressure fluid ejected from the static pressure pads 34, 35 of the respective static pressure support means 8, 9. At this time, static pressure support means 8, 9
The static pressure fluid ejected from the static pressure pads 34, 35 flows between the static pressure pads 34, 35 and the supported surface of the workpiece W. , 9 allows the workpiece W to be positioned.
【0024】そして、この静圧支持手段8,9 による工作
物W の位置決めが完了すると、揺動用駆動手段31により
揺動アーム28を揺動させて、ガイドローラ6 を工作物W
の穴内径に転接させ、揺動用駆動手段31の付勢力により
ガイドローラ6 を工作物W 側に押し付ける。When the positioning of the workpiece W by the static pressure support means 8 and 9 is completed, the swing arm 28 is swung by the swing driving means 31 to move the guide roller 6 to the work W.
The guide roller 6 is pressed against the workpiece W by the urging force of the swing drive means 31.
【0025】すると各駆動ローラ4,5 が工作物W の外周
に転接し、この駆動ローラ4,5 とガイドローラ6 とによ
って、工作物W の被研削面と反対側の半径部分を半径方
向に挟み込むので、駆動ローラ4,5 の駆動力により工作
物W がa矢示方向へと回転する。このため工作物W の穴
内径内にガイドローラ6 を容易に転接でき、またガイド
ローラ6 と駆動ローラ4,5 とにより工作物W を確実に挟
み込むことができる。Then, each of the drive rollers 4 and 5 rolls on the outer periphery of the workpiece W, and the drive rollers 4 and 5 and the guide roller 6 radially move the radius of the workpiece W opposite to the surface to be ground in the radial direction. The work W is rotated in the direction indicated by the arrow a by the driving force of the drive rollers 4 and 5 because the work W is sandwiched. Therefore, the guide roller 6 can be easily rolled into the bore of the workpiece W, and the workpiece W can be reliably sandwiched between the guide roller 6 and the driving rollers 4 and 5.
【0026】次に摺動ベース11を研削砥石2,3 側へと前
進させて、工作物W の被研削面側を上下の研削砥石2,3
間に入れた後、研削サイクルに移行して、a矢示方向に
回転する上下の研削砥石2,3 により工作物W の上下両端
面の被研削面を研削する。Next, the sliding base 11 is advanced to the side of the grinding wheels 2 and 3 so that the surface to be ground of the workpiece W is moved to the upper and lower grinding wheels 2 and 3.
After that, the process proceeds to the grinding cycle, in which the upper and lower grinding surfaces of the workpiece W are ground by the upper and lower grinding wheels 2, 3 rotating in the direction of arrow a.
【0027】従って、上下の静圧支持手段8,9 により工
作物W の上下両端面の被支持面側を静圧的に支持し、各
駆動ローラ4,5 とガイドローラ6 とにより工作物W を半
径方向に挟んだ状態で、その駆動ローラ4,5 により工作
物W をb矢示方向に回転させながら、工作物W の回転に
対して連れ廻り方向に回転する上下一対の研削砥石2,3
により、工作物W の上下両端面を研削する。Therefore, the upper and lower static pressure supporting means 8 and 9 statically support the upper and lower end surfaces of the workpiece W on the supported surfaces side, and the driving rollers 4 and 5 and the guide roller 6 support the workpiece W. While the workpiece W is rotated in the direction of the arrow b by the drive rollers 4 and 5 while the workpiece W is sandwiched in the radial direction, a pair of upper and lower grinding wheels 2, Three
Thereby, the upper and lower end surfaces of the workpiece W are ground.
【0028】研削砥石2,3 による研削が終了すると、摺
動ベース11を研削砥石2,3 から後退させた後に、退避手
段10の昇降手段39を作動させて静圧支持手段8 を上昇さ
せると共に、旋回手段40を作動させて上昇状態の静圧支
持手段8 を図6に二点鎖線で示す退避位置へと退避させ
る。When the grinding by the grinding wheels 2 and 3 is completed, the sliding base 11 is retracted from the grinding wheels 2 and 3, and then the elevating means 39 of the retracting means 10 is operated to raise the static pressure supporting means 8 and Then, the turning means 40 is operated to retreat the static pressure supporting means 8 in the ascending state to the retreat position shown by the two-dot chain line in FIG.
【0029】一方、ガイドローラ6 を工作物W の穴内径
から離し、駆動ローラ4,5 とガイドローラ6 とによる工
作物W の挟持を解除する。従って、研削済みの工作物W
を下側の静圧支持手段9 上から容易に取り出すことがで
き、これによって工作物W の研削が完了する。On the other hand, the guide roller 6 is separated from the inner diameter of the hole of the workpiece W, and the clamping of the workpiece W by the drive rollers 4, 5 and the guide roller 6 is released. Therefore, the ground workpiece W
Can be easily taken out from the lower static pressure support means 9, whereby the grinding of the workpiece W is completed.
【0030】この実施形態では、工作物W を外周側の駆
動ローラ4,5 と内周側のガイドローラ6 とによって挟み
込んだ状態で、工作物W の上下両端面の被支持面を一対
の静圧支持手段8,9 により静圧的に支持しながら、外周
側の駆動ローラ4,5 によって工作物W を駆動する半径駆
動・端面ガイド方式を採用しているので、工作物W の平
面度、面粗度を高精度に加工できる等、次のような利点
かある。In this embodiment, with the workpiece W sandwiched between the outer peripheral drive rollers 4 and 5 and the inner peripheral guide roller 6, the supported surfaces of the upper and lower ends of the workpiece W are paired with a pair of static rollers. The radial drive / end guide method of driving the workpiece W by the outer peripheral drive rollers 4 and 5 while statically supporting the workpiece W by the pressure support means 8 and 9 adopts the flatness of the workpiece W, There are the following advantages, for example, the surface roughness can be processed with high accuracy.
【0031】即ち、外周側の駆動ローラ4,5 と内周側の
ガイドローラ6 とによって工作物Wの半径部分を挟み込
んだ状態で、その外周側の駆動ローラ4,5 により工作物
W を駆動しており、工作物W をその半径部分の外周側か
ら駆動できるため、工作物Wの剛性が従来に較べて増
し、工作物W の歪みが少なく高精度で研削できる。また
工作物W の剛性が増すため、駆動ローラ4,5 による駆動
力を大きくすることが可能であり、工作物W を高速回転
させて研削作業のサイクルタイムを大幅に短縮すること
ができる。That is, in a state where the radial portion of the workpiece W is sandwiched between the outer peripheral drive rollers 4, 5 and the inner peripheral guide roller 6, the outer peripheral drive rollers 4, 5 are interposed between the outer peripheral drive rollers 4, 5 and the inner peripheral guide rollers 6.
Since the workpiece W is driven and the workpiece W can be driven from the outer peripheral side of the radial portion, the rigidity of the workpiece W is increased as compared with the conventional art, and the workpiece W can be ground with less distortion and high precision. In addition, since the rigidity of the workpiece W is increased, the driving force by the drive rollers 4 and 5 can be increased, and the workpiece W can be rotated at a high speed to greatly reduce the cycle time of the grinding operation.
【0032】特に工作物W の穴内径に転接するガイドロ
ーラ6 があり、このガイドローラ6と、研削砥石2,3 と
反対側の駆動ローラ4,5 とによって、工作物W の半径部
分を半径方向に挟み込んだ状態で研削砥石2,3 により研
削するので、研削時に工作物W に加わる応力が引っ張り
方向となり、工作物W を撓み難くすることができる。In particular, there is a guide roller 6 which comes into contact with the inner diameter of the hole of the workpiece W, and the guide roller 6 and the driving rollers 4, 5 opposite to the grinding wheels 2, 3 divide the radius of the workpiece W into a radius. Since the grinding is performed by the grinding wheels 2 and 3 while being sandwiched in the directions, the stress applied to the workpiece W during the grinding is in the tensile direction, and the workpiece W can be hardly bent.
【0033】しかも研削力を保持する駆動ローラ4,5 を
ガイドローラ6 と一緒に研削砥石2,3 から離すことによ
り、駆動ローラ4,5 とガイドローラ6 との間で工作物W
の半径部分に撓みが発生しても、その撓みの被研削面へ
の影響を小さくすることができる。Further, by separating the driving rollers 4, 5 holding the grinding force from the grinding wheels 2, 3 together with the guide rollers 6, the workpiece W can be moved between the driving rollers 4, 5 and the guide rollers 6.
Even if a bend occurs in the radius portion, the influence of the bend on the ground surface can be reduced.
【0034】また研削砥石2,3 の砥石外径が工作物W の
中心からずれており、この研削砥石2,3 の研削力により
工作物W が連れ廻り回転する方向に、駆動ローラ4,5 に
よって工作物W を回転駆動するため、回転用駆動手段18
による工作物W の駆動力を小さくできる。従って、工作
物W を駆動のために駆動ローラ4,5 を工作物W に対して
加圧する加圧力が小さくなり、工作物W の撓みを少なく
することがきる。The outer diameters of the grinding wheels 2 and 3 are shifted from the center of the workpiece W, and the driving rollers 4 and 5 move in a direction in which the workpiece W rotates with the grinding force of the grinding wheels 2 and 3. The rotation driving means 18
, The driving force of the workpiece W can be reduced. Accordingly, the pressing force for pressing the drive rollers 4 and 5 against the workpiece W for driving the workpiece W is reduced, and the deflection of the workpiece W can be reduced.
【0035】更に工作物W の両端面を静圧支持手段8,9
で静圧的に支持しながら工作物W を回転方向にガイドし
ているので、この静圧支持手段8,9 により工作物W の両
端面を高精度にガイドすることができる。Further, both ends of the workpiece W are held by static pressure support means 8, 9
Since the workpiece W is guided in the rotational direction while supporting the workpiece W statically, the end faces of the workpiece W can be guided with high precision by the static pressure supporting means 8 and 9.
【0036】しかも静圧支持手段8,9 による静圧的な支
持方式であるため、静圧支持手段8,9 の拘束力による工
作物W の撓みを少なくできると共に、静圧流体によるバ
ネ効果により、研削砥石2,3 と静圧支持手段8,9 の支持
面との位置決め精度の影響をラフにでき、位置決め調整
を簡単にできる利点がある。In addition, since the static pressure supporting means is used by the static pressure supporting means 8 and 9, the bending of the workpiece W due to the restraining force of the static pressure supporting means 8 and 9 can be reduced, and the spring effect by the static pressure fluid can be used. In addition, there is an advantage that the influence of the positioning accuracy between the grinding wheels 2 and 3 and the supporting surfaces of the static pressure supporting means 8 and 9 can be roughened, and the positioning adjustment can be simplified.
【0037】以上、本発明の実施形態について説明した
が、本発明はこれに限定されるものではない。例えば、
両面研削装置は縦型の他、横型、その他の型式でも良
い。駆動ローラ4,5 及びガイドローラ6 の配置形態は、
実施形態のように工作物W の外周側に2個の駆動ローラ
4,5 を、穴内径側に1個のガイドローラ6 を夫々配置す
る他、工作物W の外側に少なくとも2個のローラを配置
し、工作物W の穴内径側に1個のローラを配置し、これ
らの各ローラの内、少なくともその1個を駆動ローラに
すれば良い。Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments. For example,
The double-sided grinding device may be a vertical type, a horizontal type, or another type. The arrangement of the drive rollers 4 and 5 and the guide roller 6 is as follows.
Two drive rollers are provided on the outer peripheral side of the workpiece W as in the embodiment.
4 and 5, one guide roller 6 is arranged on the inner diameter side of the hole, and at least two rollers are arranged outside the workpiece W, and one roller is arranged on the inner diameter side of the work W. Then, at least one of these rollers may be used as a driving roller.
【0038】従って、工作物W の外周側の少なくとも2
個の内、その1個を駆動ローラとし、他のローラをガイ
ドローラとしても良いし、穴内径側の1個のローラのみ
を駆動ローラとしても良い。また工作物W の内外に駆動
ローラを夫々少なくとも1個配置しても良いし、全てを
駆動ローラとしても良い。Therefore, at least two of the outer peripheral sides of the workpiece W
One of the rollers may be used as a driving roller, the other roller may be used as a guide roller, or only one roller on the inner diameter side may be used as a driving roller. At least one drive roller may be disposed inside or outside the workpiece W, or all may be drive rollers.
【0039】その他、工作物W の外周側に1個のローラ
を、工作物W の穴内径側に2個のローラを配置する等、
工作物W の内外合わせて少なくとも3個のローラを配置
しても良い。この場合、外周側に1個のローラを大径の
駆動ローラとし、穴内径側に2個のローラを小径のガイ
ドローラとすることも可能である。In addition, one roller is arranged on the outer peripheral side of the workpiece W, and two rollers are arranged on the inner diameter side of the hole of the workpiece W.
At least three rollers may be arranged inside and outside the workpiece W. In this case, one roller may be used as a large-diameter drive roller on the outer peripheral side, and two rollers may be used as small-diameter guide rollers on the inner diameter side of the hole.
【0040】一対の静圧支持手段8,9 の内、実施形態で
は上側の静圧支持手段8 を退避手段10により退避させる
ようにしているが、下側の静圧支持手段9 を退避させる
ようにしても良い。横型の場合も同様である。勿論、工
作物W の保持が可能であるならば、両方の静圧支持手段
8,9 を退避させるようにしても良い。In the embodiment, the upper static pressure supporting means 8 of the pair of static pressure supporting means 8 and 9 is retracted by the retracting means 10 in the embodiment, but the lower static pressure supporting means 9 is retracted by the retracting means 10. You may do it. The same applies to the horizontal type. Of course, if holding of the workpiece W is possible, both static pressure support means
8,9 may be evacuated.
【0041】ガイドローラ6 を工作物W の穴内径に接離
させる転接用移動手段7 としては、揺動アーム28、揺動
用駆動手段31による揺動方式が最も構造的に簡単になる
が、ガイドローラ6 を接離方向に直線的に移動させるよ
うにしても良い。また穴内径側のガイドローラ6 により
工作物W を複数個の駆動ローラ4,5 に押し付ける場合、
複数個の駆動ローラ4,5 間の略中央に向かって押し付け
ることが望ましい。As the transfer moving means 7 for bringing the guide roller 6 into and out of contact with the inner diameter of the hole of the workpiece W, the swinging method using the swinging arm 28 and the swinging driving means 31 is the most structurally simple. The guide roller 6 may be moved linearly in the contact / separation direction. When the workpiece W is pressed against the plurality of drive rollers 4 and 5 by the guide roller 6 on the inner diameter side of the hole,
It is desirable to press toward the substantially center between the plurality of drive rollers 4 and 5.
【0042】退避手段10は、工作物W の脱着に支承がな
いように静圧支持手段8,9 の一方を退避させれば十分で
あり、その具体的手段としては、昇降手段39及び旋回手
段40による昇降・旋回方式以外の退避方式を採用するこ
とも可能である。例えば、旋回手段40に代替して、上昇
状態の静圧支持手段8 を直線的に側方へと移動させるよ
うにしても良いし、また昇降手段39のみで構成しても良
い。It is sufficient for the retreating means 10 to retreat one of the static pressure supporting means 8 and 9 so that there is no support for attaching and detaching the workpiece W. As specific means, the elevating means 39 and the turning means It is also possible to adopt an evacuation method other than the lifting / turning method by 40. For example, instead of the turning means 40, the static pressure support means 8 in the ascending state may be linearly moved laterally, or may be constituted only by the elevating means 39.
【0043】勿論、横型の場合には、それに応じた退避
手段10を採用すれば良い。例えば、静圧支持手段8,9 の
一方又は両方を工作物W に対して遠近方向(横方向)に
移動させる横移動手段と昇降手段又は旋回手段とを併用
する等によって、退避手段10を容易に構成できる。Of course, in the case of the horizontal type, the retracting means 10 corresponding to the horizontal type may be employed. For example, the retreating means 10 can be easily provided by using a horizontal moving means for moving one or both of the static pressure supporting means 8 and 9 in the direction of perspective (lateral direction) with respect to the workpiece W and an elevating means or a turning means. Can be configured.
【0044】[0044]
【発明の効果】 本発明に係る研削方法に
よれば、穴あき薄円板状工作物を回転させながら、該工
作物の両端面を一対の研削砥石により研削するに際し、
工作物の穴内径に転接するローラと、工作物の外周に転
接するローラとで構成される少なくとも3個のローラに
より、工作物の半径部分を半径方向に挟んで該工作物を
回転支持しながら、研削砥石により工作物の両端面を研
削するので、工作物の剛性が増し高精度に加工できると
共に、工作物の高速回転によりサイクルタイムを大幅に
短縮できる。According to the grinding method of the present invention, while rotating a thin disk-shaped workpiece with holes, when grinding both end surfaces of the workpiece with a pair of grinding wheels,
At least three rollers, each of which includes a roller that rolls on the inner diameter of the hole of the workpiece and a roller that rolls on the outer circumference of the workpiece, while rotatably supporting the workpiece while sandwiching the radial portion of the workpiece in the radial direction. Since both ends of the workpiece are ground by the grinding wheel, the rigidity of the workpiece is increased and the workpiece can be processed with high precision, and the cycle time can be greatly reduced by high-speed rotation of the workpiece.
【0045】また工作物の両端面を静圧支持手段により
支持するので、工作物を高精度に案内でき、拘束力によ
る工作物の撓みを少なくできる。Further, since the both end surfaces of the work are supported by the static pressure support means, the work can be guided with high precision and the bending of the work due to the restraining force can be reduced.
【0046】しかも、研削砥石を工作物に対して連れ廻
り方向に回転させるので、工作物の駆動力が小さくて済
み、工作物を駆動するための加圧力を小さくでき、工作
物の撓みを少なくできる。In addition, since the grinding wheel is rotated in the direction of rotation with respect to the workpiece, the driving force of the workpiece can be reduced, the pressing force for driving the workpiece can be reduced, and the deflection of the workpiece can be reduced. it can.
【0047】本発明に係る研削装置によれば、穴あき薄
円板状工作物を回転させながら、該工作物の両端面を一
対の研削砥石により研削するようにした穴あき薄円板状
工作物の両面研削装置において、工作物の外周に転接す
る少なくとも2個のローラと、工作物の穴内径に転接し
且つ少なくとも2個のローラとの間で工作物の半径部分
を半径方向に挟んで回転自在に支持するローラとを備え
ているので、工作物の剛性が増し高精度に加工できると
共に、工作物の高速回転によりサイクルタイムを大幅に
短縮できる。According to the grinding apparatus of the present invention, while rotating a perforated thin disc-shaped workpiece, both end faces of the perforated thin disc-shaped workpiece are ground by a pair of grinding wheels. In a double-sided object grinding apparatus, at least two rollers rolling in contact with the outer periphery of a workpiece, and rolling contact with the inner diameter of a hole in the workpiece and radially sandwiching a radial portion of the workpiece between the at least two rollers. The provision of the rotatably supported rollers increases the rigidity of the workpiece and enables high-precision machining, and the high-speed rotation of the workpiece greatly reduces the cycle time.
【0048】また各ローラの内、少なくとも1個が工作
物を回転駆動する駆動ローラであり、駆動ローラにより
半径部分で工作物を駆動でき、工作物の剛性が増し高精
度に加工できると共に、工作物の高速回転によりサイク
ルタイムを大幅に短縮できる。At least one of the rollers is a driving roller for rotationally driving the workpiece. The driving roller can drive the workpiece in a radius portion, thereby increasing the rigidity of the workpiece and enabling high precision machining. Cycle time can be greatly reduced by high-speed rotation of objects.
【0049】しかも工作物の外周に転接する2個の駆動
ローラと、工作物の穴内径に転接し且つ両駆動ローラと
の間で工作物の半径部分を半径方向に挟み込んで回転自
在に支持するガイドローラと、該ガイドローラを両駆動
ローラに対して遠近方向に移動させる転接用移動手段と
を備えているので、工作物の脱着、駆動ローラとガイド
ローラとによる工作物の挟み込みを容易且つ確実にで
き、装置全体を簡単に構成できる。Moreover, two drive rollers which are in rolling contact with the outer periphery of the workpiece, and which are in rolling contact with the inner diameter of the hole of the workpiece and which are rotatably supported by sandwiching the radial portion of the workpiece in a radial direction between the two drive rollers. Since the guide roller and the transfer means for moving the guide roller in the distance direction with respect to both drive rollers are provided, the work can be easily attached and detached, and the work can be easily sandwiched between the drive roller and the guide roller. Assuredly, the entire apparatus can be easily configured.
【0050】更に工作物の両端面を支持する一対の静圧
支持手段を備えているので、工作物を高精度に案内で
き、拘束力による工作物の撓みを少なくできると共に、
研削砥石と静圧支持手段との位置決め調整を容易にでき
る。また一対の静圧支持手段の内、少なくとも一方を工
作物の被支持面から退避させる退避手段を備えているの
で、工作物の脱着を容易にできる。Further, since a pair of static pressure supporting means for supporting both end surfaces of the workpiece are provided, the workpiece can be guided with high precision, and the bending of the workpiece due to the restraining force can be reduced.
Positioning adjustment between the grinding wheel and the static pressure supporting means can be easily performed. In addition, since there is provided a retracting means for retracting at least one of the pair of static pressure supporting means from the supported surface of the workpiece, the workpiece can be easily attached and detached.
【0051】また2個の駆動ローラとガイドローラとを
研削砥石と反対側に配置し、2個の駆動ローラとガイド
ローラとの間に静圧支持手段を配置しているので、工作
物を高精度に案内できると共に、駆動ローラとガイドロ
ーラとの間での工作物の撓みが少なく、しかも仮に多少
の撓みがあっても、工作物の被研削面への影響を少なく
できる。Further, since the two drive rollers and the guide roller are arranged on the opposite side of the grinding wheel, and the static pressure support means is arranged between the two drive rollers and the guide roller, the workpiece can be kept high. It is possible to guide the workpiece with high precision, and to reduce the bending of the workpiece between the driving roller and the guide roller. Even if there is some bending, the influence on the ground surface of the workpiece can be reduced.
【0052】しかも各ローラ及び静圧支持手段を研削砥
石の直径方向に移動可能な一体の摺動ベース上に備えて
いるので、摺動ベース上の各ローラ、静圧支持手段を研
削砥石に対して一体に容易に進退させることができる。Further, since each roller and the static pressure supporting means are provided on an integral sliding base movable in the diameter direction of the grinding wheel, each roller and the static pressure supporting means on the sliding base are provided with respect to the grinding wheel. Can be easily moved forward and backward together.
【図1】本発明の一実施形態を示す両面研削装置の側面
図である。FIG. 1 is a side view of a double-side grinding device showing an embodiment of the present invention.
【図2】本発明の一実施形態を示す両面研削装置の正面
図である。FIG. 2 is a front view of a double-sided grinding apparatus showing one embodiment of the present invention.
【図3】本発明の一実施形態を示す両面研削装置の平面
図である。FIG. 3 is a plan view of a double-sided grinding apparatus showing one embodiment of the present invention.
【図4】本発明の一実施形態を示す要部の断面側面図で
ある。FIG. 4 is a sectional side view of a main part showing one embodiment of the present invention.
【図5】本発明の一実施形態を示す要部の断面正面図で
ある。FIG. 5 is a sectional front view of a main part showing one embodiment of the present invention.
【図6】本発明の一実施形態を示す要部の平面図であ
る。FIG. 6 is a plan view of a main part showing an embodiment of the present invention.
W 穴あき薄円板状工作物 2,3 研削砥石 4,5 駆動ローラ 6 ガイドローラ 7 転接用移動手段 8,9 静圧支持手段 10 退避手段 11 摺動ベース W Thin disk-shaped workpiece with holes 2,3 Grinding wheel 4,5 Drive roller 6 Guide roller 7 Moving means for rolling contact 8,9 Static pressure support means 10 Retraction means 11 Sliding base
Claims (10)
ら、該工作物の両端面を一対の研削砥石により研削する
に際し、前記工作物の穴内径に転接するローラと、前記
工作物の外周に転接するローラとで構成される少なくと
も3個のローラにより、前記工作物の半径部分を半径方
向に挟んで該工作物を回転支持しながら、前記研削砥石
により前記工作物の両端面を研削することを特徴とする
穴あき薄円板状工作物の両面研削方法。1. A roller which rolls into contact with an inner diameter of a hole of a workpiece when rotating both ends of the workpiece with a pair of grinding wheels while rotating the thin disk-shaped workpiece having a hole. The grinding wheel grinds both end surfaces of the workpiece while rotatingly supporting the workpiece with a radial portion of the workpiece being sandwiched in a radial direction by at least three rollers constituted by rollers that are in contact with the outer periphery. A method for grinding both sides of a thin disk-shaped workpiece with holes.
り支持することを特徴とする請求項1に記載の穴あき薄
円板状工作物の両面研削方法。2. The method of claim 1, wherein both ends of the workpiece are supported by static pressure support means.
廻り方向に回転させることを特徴とする請求項1又は2
に記載の穴あき薄円板状工作物の両面研削方法。3. The grinding wheel according to claim 1, wherein the grinding wheel is rotated in a rotating direction with respect to the workpiece.
2. A double-sided grinding method for a thin disk-shaped workpiece having a hole according to the above.
ら、該工作物の両端面を一対の研削砥石により研削する
ようにした穴あき薄円板状工作物の両面研削装置におい
て、前記工作物の外周に転接する少なくとも2個のロー
ラと、前記工作物の穴内径に転接し且つ前記少なくとも
2個のローラとの間で前記工作物の半径部分を半径方向
に挟んで回転自在に支持するローラとを備えたことを特
徴とする穴あき薄円板状工作物の両面研削装置。4. A double-sided grinding machine for a perforated thin disc-shaped workpiece, wherein both end faces of the perforated thin disc-shaped workpiece are ground by a pair of grinding wheels while rotating the perforated thin disc-shaped workpiece. At least two rollers rolling on the outer circumference of the workpiece, and rotatably supporting the inner diameter of the workpiece and rotatably sandwiching a radial portion of the workpiece between the at least two rollers in a radial direction; A double-sided grinding machine for a thin disk-shaped workpiece having holes.
記工作物を回転駆動する駆動ローラであることを特徴と
する請求項4に記載の穴あき薄円板状工作物の両面研削
装置。5. The apparatus according to claim 4, wherein at least one of the rollers is a drive roller for rotating the workpiece.
ローラと、前記工作物の穴内径に転接し且つ前記両駆動
ローラとの間で前記工作物の半径部分を半径方向に挟み
込んで回転自在に支持するガイドローラと、該ガイドロ
ーラを前記両駆動ローラに対して遠近方向に移動させる
転接用移動手段とを備えたことを特徴とする請求項4又
は5に記載の穴あき薄円板状工作物の両面研削装置。6. Two drive rollers rolling in contact with the outer circumference of the workpiece, and a radial portion of the workpiece being radially sandwiched between the two drive rollers in rolling contact with the inner diameter of the hole of the workpiece. The perforated thin plate according to claim 4 or 5, further comprising: a guide roller rotatably supported; and a rolling contact moving means for moving the guide roller in a near-far direction with respect to the two drive rollers. Double-sided grinding machine for disk-shaped workpieces.
圧支持手段を備えたことを特徴とする請求項4〜6の何
れかに記載の穴あき薄円板状工作物の両面研削装置。7. A double-sided grinding of a perforated thin disk-shaped workpiece according to claim 4, further comprising a pair of static pressure supporting means for supporting both end faces of said workpiece. apparatus.
も一方を前記工作物の被支持面から退避させる退避手段
を備えたことを特徴とする請求項4〜7の何れかに記載
の穴あき薄円板状工作物の両面研削装置。8. A hole according to claim 4, further comprising a retracting means for retracting at least one of said pair of static pressure supporting means from a supported surface of said workpiece. Double-sided grinding machine for thin disk-shaped workpieces.
ラとを前記研削砥石と反対側に配置し、前記2個の駆動
ローラと前記ガイドローラとの間に前記静圧支持手段を
配置したことを特徴とする請求項6〜8の何れかに記載
の穴あき薄円板状工作物の両面研削装置。9. The method according to claim 9, wherein the two driving rollers and the guide roller are arranged on the opposite side of the grinding wheel, and the static pressure supporting means is arranged between the two driving rollers and the guide roller. The double-sided grinding machine for a thin disk-shaped workpiece with holes according to any one of claims 6 to 8, characterized in that:
前記研削砥石の直径方向に移動可能な一体の摺動ベース
上に備えたことを特徴とする請求項4〜8の何れかに記
載の穴あき薄円板状工作物の両面研削装置。10. The grinding wheel according to claim 4, wherein said rollers and said static pressure supporting means are provided on an integral sliding base movable in a diameter direction of said grinding wheel. A double-sided grinding machine for thin disk-shaped workpieces with holes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14155299A JP2000326188A (en) | 1999-05-21 | 1999-05-21 | Both-side cutting method and device for drilled thin disk- like work |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14155299A JP2000326188A (en) | 1999-05-21 | 1999-05-21 | Both-side cutting method and device for drilled thin disk- like work |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000326188A true JP2000326188A (en) | 2000-11-28 |
Family
ID=15294630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14155299A Pending JP2000326188A (en) | 1999-05-21 | 1999-05-21 | Both-side cutting method and device for drilled thin disk- like work |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000326188A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194471A (en) * | 2006-01-20 | 2007-08-02 | Disco Abrasive Syst Ltd | Method for polishing wafer |
CN103846754A (en) * | 2014-01-20 | 2014-06-11 | 南通国盛机电集团有限公司 | Dust-removing double-side polishing device |
CN104259983A (en) * | 2014-09-18 | 2015-01-07 | 洛阳巨优机床有限公司 | Electric box bracket of parallel surface grinding machine |
CN105538084A (en) * | 2016-02-01 | 2016-05-04 | 浙江荣华家具有限公司 | Deburring and polishing device for timber |
-
1999
- 1999-05-21 JP JP14155299A patent/JP2000326188A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194471A (en) * | 2006-01-20 | 2007-08-02 | Disco Abrasive Syst Ltd | Method for polishing wafer |
CN103846754A (en) * | 2014-01-20 | 2014-06-11 | 南通国盛机电集团有限公司 | Dust-removing double-side polishing device |
CN104259983A (en) * | 2014-09-18 | 2015-01-07 | 洛阳巨优机床有限公司 | Electric box bracket of parallel surface grinding machine |
CN105538084A (en) * | 2016-02-01 | 2016-05-04 | 浙江荣华家具有限公司 | Deburring and polishing device for timber |
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