JP2000283163A - Static pressure gas bearing structure - Google Patents

Static pressure gas bearing structure

Info

Publication number
JP2000283163A
JP2000283163A JP11306084A JP30608499A JP2000283163A JP 2000283163 A JP2000283163 A JP 2000283163A JP 11306084 A JP11306084 A JP 11306084A JP 30608499 A JP30608499 A JP 30608499A JP 2000283163 A JP2000283163 A JP 2000283163A
Authority
JP
Japan
Prior art keywords
exhausted
labyrinth
air pad
gas
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11306084A
Other languages
Japanese (ja)
Inventor
Takuma Tsuda
拓真 津田
Shinji Shinohara
慎二 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP11306084A priority Critical patent/JP2000283163A/en
Publication of JP2000283163A publication Critical patent/JP2000283163A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings
    • F16C33/741—Sealings of sliding-contact bearings by means of a fluid
    • F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To suppress gas to flow out to an outside, and hold a suitable bearing performance by forming a labyrinth bulk head part clearance smaller than an air pad part clearance, in a bearing clearance between a moving body and a fixing body. SOLUTION: Gas supplied to an air pad 9 by passing a supplying path 10 is exhausted to an atmosphere opening groove 7 after passing, and nearly all of it is exhausted to the atmosphere through an atmosphere opening piping 12. Few gas which is not exhausted, is exhausted from a vacuum seal groove 8 to a vacuum pump 13 through an exhaust piping 11 by passing an inside labyrinth bulk head part clearance 3. The rest of gas which is not exhausted therein is exhausted into a vacuum chamber by passing an outside labyrinth bulk head part clearance 4. A thin film 6 is formed on each labyrinth bulk head part, and the clearances 3, 4 are smaller than an air pad part clearance 5. A suitable bearing performance is held without changing the air pad part clearance 5 more than a conventional size, and a quantity of gas flow to the vacuum chamber is suppressed few.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、真空中において使
用される静圧気体軸受構造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrostatic gas bearing structure used in a vacuum.

【０００２】[0002]

【従来の技術】排気機構付き静圧気体軸受の軸受隙間
は、エアパッド部隙間と、ラビリンス隔壁部隙間とに分
けられるが、従来、両者は同じ大きさで設計されてい
た。2. Description of the Related Art A bearing gap of a static pressure gas bearing with an exhaust mechanism is divided into an air pad section gap and a labyrinth partition section gap. Conventionally, both are designed to have the same size.

【０００３】[0003]

【発明が解決しようとする課題】真空用静圧気体軸受の
設計において軸受隙間を決定する際に、ラビリンス隔壁
部隙間は外部への気体流出量を押さえるためできる限り
小さくすることが求められるが、その場合エアパッド部
隙間も小さくなってしまうため適切な軸受性能が得られ
なくなってしまう。When the bearing clearance is determined in the design of a hydrostatic gas bearing for vacuum, it is required that the clearance of the labyrinth partition be as small as possible to suppress the outflow of gas. In such a case, the clearance of the air pad portion also becomes small, so that appropriate bearing performance cannot be obtained.

【０００４】本発明は、上記課題を解決するためになさ
れたもので、本発明の目的は、ラビリンス隔壁部隙間か
ら外部への気体流出を抑えながら、かつ、適切な軸受性
能を有する静圧気体軸受の設計を可能とするものであ
る。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a hydrostatic gas having an appropriate bearing performance while suppressing outflow of gas from the labyrinth partition wall gap to the outside. This enables the design of the bearing.

【０００５】[0005]

【課題を解決するための手段】上記課題を解決するため
になされた本発明は、移動体と固定体とからなり、エア
パッドの周辺にラビリンス機構を備え真空中で使用され
る静圧気体軸受において、移動体と固定体のなす軸受隙
間の内、ラビリンス隔壁部隙間を、エアパッド部隙間よ
りも小さくすることを特徴とする。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a hydrostatic gas bearing which comprises a moving body and a fixed body, has a labyrinth mechanism around an air pad, and is used in a vacuum. The labyrinth partition gap in the bearing gap between the moving body and the fixed body is smaller than the air pad gap.

【０００６】上記構成により、外部への気体流出を抑え
ながら、かつエアパッド部隙間を一定の大きさに保つこ
とができる。[0006] With the above structure, it is possible to keep the air pad gap at a constant size while suppressing outflow of gas to the outside.

【０００７】本発明の好ましい形態として、エアパッド
周辺に設けられたラビリンス隔壁上に薄膜を形成する。In a preferred embodiment of the present invention, a thin film is formed on a labyrinth partition provided around the air pad.

【０００８】薄膜形成方法は、特に限定されないが、物
理蒸着・化学蒸着などが好ましい。The method for forming the thin film is not particularly limited, but physical vapor deposition, chemical vapor deposition and the like are preferable.

【０００９】薄膜は、耐久性が求められることからセラ
ミックが好ましく、静圧気体軸受の材質が主にアルミナ
であることから、ＴｉＮが好ましい。The thin film is preferably made of ceramic because durability is required, and TiN is preferably used because the material of the hydrostatic gas bearing is mainly alumina.

【００１０】本発明の好ましい形態として、ラビリンス
隔壁部隙間は、エアパッド部隙間よりも１〜３μｍ小さ
くすることである。In a preferred embodiment of the present invention, the clearance between the labyrinth partition portions is smaller than the clearance between the air pad portions by 1 to 3 μm.

【００１１】エアパッド部隙間は約５μｍに保たれてお
り、薄膜厚みが１μｍより小さいとラビリンス隔壁の真
空シール性能向上が期待できず、３μｍ以上だとラビリ
ンス隔壁部において移動体と固定体が接触する確率が高
くなる点から上記範囲が好ましい。The gap between the air pads is maintained at about 5 μm. If the thickness of the thin film is smaller than 1 μm, the vacuum sealing performance of the labyrinth partition cannot be expected. If the thickness is 3 μm or more, the moving body and the fixed body come into contact with each other in the labyrinth partition. The above range is preferable because the probability increases.

【００１２】[0012]

【発明の実施の形態】以上説明した本発明の構成・作用
を一層明らかにするために、以下本発明の好適な実施例
について説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to further clarify the configuration and operation of the present invention described above, a preferred embodiment of the present invention will be described below.

【００１３】図１は、本発明の一実施例に係る真空用静
圧気体軸受の断面図である。同図において、供給用の気
道１０を通ってエアーパッド９に給気された気体は、エ
アーパッド９を通過した後、大気開放溝７へと排気さ
れ、そのほとんどが大気開放配管１２を通じて大気中へ
排気される。FIG. 1 is a sectional view of a vacuum static pressure gas bearing according to one embodiment of the present invention. In FIG. 1, the gas supplied to the air pad 9 through the supply airway 10 passes through the air pad 9 and is then exhausted to the open-to-atmosphere groove 7, and most of the gas is supplied to the atmosphere through the open-to-atmosphere pipe 12. Exhausted to

【００１４】ここで排気されなかった微量の気体は、内
側ラビリンス隔壁部隙間３を通じて真空シール溝８へと
排気され、そのほとんどが排気配管１１を通じてポンプ
にて排気される。A small amount of gas not exhausted here is exhausted to the vacuum seal groove 8 through the inner labyrinth partition gap 3, and most of the gas is exhausted by the pump through the exhaust pipe 11.

【００１５】さらにここでも排気されなかった残りの気
体は、外側ラビリンス隔壁部隙間４を通じて真空チャン
バー内へと排気される。Further, the remaining gas not exhausted here is exhausted into the vacuum chamber through the outer labyrinth partition wall gap 4.

【００１６】ここで、各ラビリンス隔壁部には薄膜６が
形成されており、各ラビリンス隔壁部隙間はエアパッド
部隙間５よりも小さくなっているため、従来の真空用静
圧気体軸受と比較すると真空チャンバーへの気体流出量
を少量に押さえることができる。図１ではエアパッド９
回りにラビリンス隔壁部が内側と外側の２つとしたが、
真空チャンバーへの気体流出量をほぼ無くなるようにす
るために、また、移動体１が大きくなっても良い場合は
ラビリンス隔壁部を３つ以上とすることも可能である。
また、移動体１を小さくしたい場合は、ラビリンス隔壁
部を１つとし固定体２との隙間を極力小さくすることに
よって、真空チャンバーへの気体流出量を少なくするこ
とができる。Here, a thin film 6 is formed on each labyrinth partition, and each labyrinth partition gap is smaller than the air pad gap 5, so that the vacuum is smaller than that of a conventional static pressure gas bearing for vacuum. The amount of gas flowing out to the chamber can be suppressed to a small amount. In FIG. 1, the air pad 9 is shown.
There are two labyrinth bulkheads inside and outside,
In order to make the amount of gas flowing out to the vacuum chamber almost disappear, or when the moving body 1 may be large, it is possible to provide three or more labyrinth partitions.
When it is desired to reduce the size of the moving body 1, the amount of gas flowing out to the vacuum chamber can be reduced by reducing the gap between the moving body 1 and the fixed body 2 to one labyrinth partition.

【００１７】ラビリンス隔壁部をエアパッド部の回りに
１週設け、移動体と固定体との隙間が５μｍとなる静圧
気体軸受けに、ＴｉＮの化学蒸着により厚さ１μｍ、２
μｍ、３μｍ、４μｍとなるようにラビリンス隔壁部上
に薄膜を形成したものを製作し、エアーの漏れ量（コン
ダクタンス）を測定した。また、薄膜を形成させず隙間
が５μｍ、６μｍ、７μｍ、８μｍの静圧気体軸受けに
ついてもコンダクタンスの測定を行った。その際の隙間
とコンダクタンスとの関係を図２に示した。A labyrinth partition is provided around the air pad for one week, and a 1 μm thick, 2 μm thick TiN chemical vapor deposited on a static pressure gas bearing having a gap of 5 μm between the moving body and the fixed body.
A thin film was formed on the labyrinth partition so as to have a thickness of 3 μm, 3 μm, and 4 μm, and the amount of air leakage (conductance) was measured. The conductance was also measured for static pressure gas bearings having gaps of 5 μm, 6 μm, 7 μm, and 8 μm without forming a thin film. FIG. 2 shows the relationship between the gap and the conductance at that time.

【００１８】本実施例では、ラビリンス隔壁部の隙間が
エアパッド部隙間と同じ５μｍの場合コンダクタンスが
４Ｅ-7であったのに対して、薄膜を４μｍ形成させた
（隙間が１μｍ）場合コンダクタンスが極めて小さくな
っている。In this embodiment, the conductance is 4E- 7 when the gap of the labyrinth partition is 5 μm, which is the same as the gap of the air pad. On the other hand, when the thin film is formed 4 μm (the gap is 1 μm), the conductance is extremely large. It is getting smaller.

【００１９】[0019]

【発明の効果】以上に説明した如く本発明によれば、エ
アパッド部隙間を従来の大きさより変化させることなく
ラビリンス隔壁部隙間を小さくできるので、適切な軸受
性能を保ちながら真空チャンバへの気体流出量を少量に
抑さえることができる。また、従来はラビリンス隔壁部
隙間を小さくできない代わりにラビリンス隔壁の幅を大
きくすることで気体流出を抑えていたが、本発明により
ラビリンス隔壁の幅を縮小し、軸受寸法を小さくするこ
とが可能となる。As described above, according to the present invention, the clearance of the labyrinth partition can be reduced without changing the clearance of the air pad from the conventional size, so that the gas flows into the vacuum chamber while maintaining appropriate bearing performance. The amount can be suppressed to a small amount. In the past, gas outflow was suppressed by increasing the width of the labyrinth partition instead of making the labyrinth partition gap smaller, but the present invention makes it possible to reduce the width of the labyrinth partition and reduce the bearing dimensions. Become.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の一実施例に係る真空用静圧気体軸受の
断面図。FIG. 1 is a sectional view of a hydrostatic gas bearing for vacuum according to an embodiment of the present invention.

【図２】隙間とコンダクタンスの関係を示すグラフ。FIG. 2 is a graph showing a relationship between a gap and conductance.

【符号の説明】[Explanation of symbols]

１…移動体 ２…固定体 ３…内側ラビリンス隔壁部隙間 ４…外側ラビリンス隔壁部隙間 ５…エアパッド部隙間 ６…薄膜 ７…大気開放溝 ８…真空シール溝 ９…エアパッド １０…気道 １１…排気配管 １２…大気開放配管 １３…真空ポンプ DESCRIPTION OF SYMBOLS 1 ... Moving body 2 ... Fixed body 3 ... Inner labyrinth partition gap 4 ... Outer labyrinth partition gap 5 ... Air pad gap 6 ... Thin film 7 ... Atmospheric release groove 8 ... Vacuum seal groove 9 ... Air pad 10 ... Airway 11 ... Exhaust piping 12 ... Open air piping 13 ... Vacuum pump

Claims (4)

【特許請求の範囲】[Claims] 【請求項１】 移動体と固定体とからなり、エアパッド
の周辺にラビリンス機構を備え真空中で使用される静圧
気体軸受において、移動体と固定体のなす軸受隙間の
内、ラビリンス隔壁部隙間を、エアパッド部隙間よりも
小さくすることを特徴とする静圧気体軸受構造。In a hydrostatic gas bearing comprising a moving body and a fixed body and having a labyrinth mechanism around an air pad and used in a vacuum, a labyrinth partition gap of a bearing gap formed by the moving body and the fixed body. Is smaller than the gap of the air pad portion. 【請求項２】 エアパッド周辺に設けられたラビリンス
隔壁上に薄膜を形成したことを特徴とする請求項１記載
の静圧気体軸受構造。2. The hydrostatic gas bearing structure according to claim 1, wherein a thin film is formed on a labyrinth partition provided around the air pad. 【請求項３】 ラビリンス隔壁部隙間が、エアパッド部
隙間よりも１〜３μｍ小さいことを特徴とする請求項
１、２いずれか記載の静圧気体軸受構造。3. The hydrostatic gas bearing structure according to claim 1, wherein the labyrinth partition gap is smaller than the air pad gap by 1 to 3 μm. 【請求項４】 ラビリンス隔壁上の薄膜は、セラミック
であることを特徴とする請求項２記載の静圧気体軸受構
造。4. The hydrostatic gas bearing structure according to claim 2, wherein the thin film on the labyrinth partition is made of ceramic.
JP11306084A 1999-01-28 1999-10-27 Static pressure gas bearing structure Pending JP2000283163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11306084A JP2000283163A (en) 1999-01-28 1999-10-27 Static pressure gas bearing structure

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-20758 1999-01-28
JP2075899 1999-01-28
JP11306084A JP2000283163A (en) 1999-01-28 1999-10-27 Static pressure gas bearing structure

Publications (1)

Publication Number Publication Date
JP2000283163A true JP2000283163A (en) 2000-10-13

Family

ID=26357741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11306084A Pending JP2000283163A (en) 1999-01-28 1999-10-27 Static pressure gas bearing structure

Country Status (1)

Country Link
JP (1) JP2000283163A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002151578A (en) * 2000-08-18 2002-05-24 Nikon Corp Air bearing linear guide used in vacuum
JP2002276660A (en) * 2001-01-09 2002-09-25 Toto Ltd Static pressure air bearing
JP2002349569A (en) * 2001-05-25 2002-12-04 Canon Inc Static pressure bearing device and stage device using it

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002151578A (en) * 2000-08-18 2002-05-24 Nikon Corp Air bearing linear guide used in vacuum
JP2002276660A (en) * 2001-01-09 2002-09-25 Toto Ltd Static pressure air bearing
JP4534390B2 (en) * 2001-01-09 2010-09-01 Ｔｏｔｏ株式会社 Static pressure gas bearing
JP2002349569A (en) * 2001-05-25 2002-12-04 Canon Inc Static pressure bearing device and stage device using it

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