JP2000241402A - Measuring device for trace organic matter in water - Google Patents
Measuring device for trace organic matter in waterInfo
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- JP2000241402A JP2000241402A JP11040257A JP4025799A JP2000241402A JP 2000241402 A JP2000241402 A JP 2000241402A JP 11040257 A JP11040257 A JP 11040257A JP 4025799 A JP4025799 A JP 4025799A JP 2000241402 A JP2000241402 A JP 2000241402A
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- water
- concentration
- measuring
- organic matter
- ions
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、水中に存在する微
量の有機物を測定する装置に係り、特に、半導体製造分
野で使用される超純水中の極微量の有機物をも測定可能
な微量有機物測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring a trace amount of organic matter present in water, and more particularly, to a trace amount of organic matter capable of measuring a trace amount of organic matter in ultrapure water used in the semiconductor manufacturing field. It relates to a measuring device.
【０００２】[0002]
【従来の技術】半導体製造工程において使用される超純
水にあっては、その水中に存在する微量の有機物が製造
工程に影響を及ぼすことから、その濃度（含有量）を正
確に把握すること、或いは極めて微量な有機物であって
も、その存在を確実に把握することが必要となる。特
に、近年の著しい半導体の高集積化に伴い、より高感度
に超純水中の微量有機物を測定し、その存在や濃度を把
握することが求められている。2. Description of the Related Art In ultrapure water used in a semiconductor manufacturing process, since a trace amount of organic matter present in the water affects the manufacturing process, it is necessary to accurately determine the concentration (content) thereof. Or, even if it is an extremely small amount of organic substance, it is necessary to surely grasp its existence. In particular, with the remarkable high integration of semiconductors in recent years, it has been required to measure trace organic substances in ultrapure water with higher sensitivity to grasp the existence and concentration thereof.
【０００３】従来、超純水中の有機物の測定には、超純
水中の有機物を紫外線照射装置や加熱処理装置等の酸化
分解装置で分解して有機物の炭素を重炭酸イオンに転換
し、その電気伝導度を測定するか、或いは水中から炭酸
ガスを分離し赤外線で測定することにより、有機物を炭
素濃度として測定する方法が採用されている。[0003] Conventionally, to measure organic substances in ultrapure water, organic substances in ultrapure water are decomposed by an oxidative decomposition device such as an ultraviolet irradiation device or a heat treatment device to convert organic carbon into bicarbonate ions. A method of measuring an organic substance as a carbon concentration by measuring its electric conductivity or by separating carbon dioxide from water and measuring it with infrared rays has been adopted.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、有機物
を炭素濃度としてとらえる従来の測定方法では、μｇ／
Ｌのレベルまでの定量しかできず、超純水中に存在する
極微量の有機物の存在を確認したり、その濃度を正確に
測定することはできなかった。However, in a conventional measuring method which takes an organic substance as a carbon concentration, the conventional method uses μg /
It was only possible to quantify up to the level of L, and it was not possible to confirm the presence of a trace amount of organic substances present in ultrapure water or to measure its concentration accurately.
【０００５】また、超純水中に存在する有機物として、
クロロホルム（ＣＨＣｌ3）、ポリ塩化ビニル（−（Ｃ
Ｈ2ＣＨＣｌ）n−）等の有機塩素化合物、ポリスチレン
スルホン酸（ＰＳＡ：−（ＣＨ（Ｃ6Ｈ5ＳＯ3Ｈ）Ｃ
Ｈ2）−）等の有機硫黄化合物、尿素（ＣＯ（Ｎ
Ｈ2）2）等の有機窒素化合物が知られている。これらの
有機物は、塩素、硫黄、窒素などの元素が結合してお
り、分解すると重炭酸イオンだけではなく、塩化物イオ
ン、硫酸イオン、硝酸イオンなどの無機物イオンを生成
する。このため、電気伝導度計で測定した場合には、分
解によって生成した無機物イオンまでも測定されてしま
い、重炭酸イオン、即ち炭素濃度としての正確な測定が
できないという不具合もあった。[0005] Further, as organic matter existing in ultrapure water,
Chloroform (CHCl 3 ), polyvinyl chloride (-(C
H 2 CHCl) n -) organochlorine compounds such as polystyrene sulfonic acid (PSA :-( CH (C 6 H 5 SO 3 H) C
H 2) -) organic sulfur compounds such as urea (CO (N
H 2) 2) an organic nitrogen compound, such as are known. These organic substances have elements such as chlorine, sulfur, and nitrogen bonded thereto, and when decomposed, generate not only bicarbonate ions but also inorganic ions such as chloride ions, sulfate ions, and nitrate ions. Therefore, when measured with an electric conductivity meter, even inorganic ions generated by decomposition are measured, and there has been a problem that accurate measurement of bicarbonate ions, that is, carbon concentration cannot be performed.
【０００６】本発明は、上記従来の問題点を解決し、水
中に含まれる微量有機物を酸化分解した際に生成する無
機物イオンの影響を排除して、水中の微量有機物の存在
と、そのおおよその種類及び濃度を把握することができ
る水中の微量有機物測定装置を提供することを目的とす
る。The present invention solves the above-mentioned conventional problems, eliminates the influence of inorganic ions generated when oxidizing and decomposing trace organic substances contained in water, and examines the existence of trace organic substances in water and the approximate It is an object of the present invention to provide an apparatus for measuring a trace amount of organic matter in water that can grasp the type and concentration.
【０００７】[0007]
【課題を解決するための手段】本発明の水中の微量有機
物測定装置は、試料水中の有機物を酸化分解する酸化分
解手段と、酸化分解した処理水中のイオンを測定するイ
オンクロマトグラフを備えた測定手段とを有することを
特徴とする。An apparatus for measuring a trace amount of organic matter in water according to the present invention comprises an oxidative decomposition means for oxidatively decomposing organic substances in a sample water and an ion chromatograph for measuring ions in the oxidatively decomposed treated water. Means.
【０００８】本発明の微量有機物測定装置であれば、有
機物の酸化分解で生成した重炭酸イオン、塩化物イオ
ン、硫酸イオン、硝酸イオン等の無機物イオンの存在の
有無ないしはその存在量をそれぞれイオンクロマトグラ
フで測定することにより、無機物イオンの影響を受ける
ことなく、高感度に有機物の定性ないし定量を行なうこ
とができる。また、本発明の微量有機物測定装置では、
有機物の酸化分解により生成する無機物イオンの測定結
果のみからも有機物の存在を把握することができると共
に、当該有機物のおおよその種類と濃度を推定すること
も可能である。In the trace organic substance measuring apparatus of the present invention, the presence or absence of inorganic ions such as bicarbonate ion, chloride ion, sulfate ion and nitrate ion generated by oxidative decomposition of organic material, and their abundance are determined by ion chromatography. By measuring with a graph, qualitative or quantitative determination of an organic substance can be performed with high sensitivity without being affected by inorganic ions. Further, in the trace organic matter measuring device of the present invention,
The presence of the organic substance can be grasped only from the measurement result of the inorganic ion generated by the oxidative decomposition of the organic substance, and the approximate type and concentration of the organic substance can be estimated.
【０００９】このように、本発明の装置により、酸化分
解で生成する無機物イオンのみから求めた有機物濃度
は、従来にない新しい水質指標として期待できる。As described above, the concentration of organic matter obtained from only the inorganic ions generated by oxidative decomposition using the apparatus of the present invention can be expected as a new water quality index that has not been available before.
【００１０】[0010]
【発明の実施の形態】以下に、図面を参照して本発明の
実施の形態を詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００１１】図１は本発明の水中の微量有機物測定装置
の実施の形態を示す構成図である。FIG. 1 is a block diagram showing an embodiment of an apparatus for measuring trace organic substances in water according to the present invention.
【００１２】図１に示す水中の微量有機物測定装置は、
超純水等の試料水中の有機物を分解する酸化分解部と、
分解した処理水中のイオン成分を測定する測定部とから
構成される。The apparatus for measuring trace organic substances in water shown in FIG.
An oxidative decomposition section that decomposes organic matter in sample water such as ultrapure water;
And a measuring unit for measuring an ion component in the decomposed treated water.
【００１３】酸化分解部は、バルブＶ1，Ｖ2を開き、試
料水ボトル１中の試料水を、ポンプ２で紫外線酸化装置
３に送給して試料水中の有機物を紫外線の照射により酸
化分解し、処理水を処理水ボトル４に受ける構成とされ
ている。The oxidative decomposition section opens the valves V 1 and V 2 , sends the sample water in the sample water bottle 1 to the ultraviolet oxidizing device 3 by the pump 2, and oxidizes and decomposes organic matter in the sample water by irradiating ultraviolet rays. Then, the treated water is received by the treated water bottle 4.
【００１４】図示の装置では、酸化分解部の酸化分解手
段として、構成が単純で操作が容易な紫外線酸化装置３
が用いられているが、本発明において、酸化分解手段と
しては、これに限らず、加熱分解装置でも良く、水中の
有機物を酸化分解可能なものであればその他のものも採
用することができる。In the illustrated apparatus, as an oxidative decomposition means of the oxidative decomposition section, an ultraviolet oxidizing apparatus 3 having a simple structure and easy operation.
However, in the present invention, the oxidative decomposition means is not limited to this, and a heat decomposition apparatus may be used, and any other means that can oxidatively decompose organic substances in water can be used.
【００１５】紫外線酸化装置３は、高純度石英製の配管
に試料水を通し、この通水部の近傍に設置した紫外線照
射ランプを点灯させることにより、紫外線を試料水に照
射するものである。紫外線の照射により、有機物が効率
的に分解され、重炭酸イオンと、有機物に結合していた
塩化物イオン、硫酸イオン、硝酸イオン等の無機物イオ
ンが生成する。The ultraviolet oxidizing apparatus 3 irradiates sample water with ultraviolet light by passing sample water through a pipe made of high-purity quartz and turning on an ultraviolet irradiation lamp installed near the water passage. Irradiation of ultraviolet rays efficiently decomposes organic substances, and generates bicarbonate ions and inorganic ions, such as chloride ions, sulfate ions, and nitrate ions, bonded to the organic substances.
【００１６】この紫外線酸化装置３による紫外線照射エ
ネルギーは、２Ｗ・ｈｒ以上とするのが好ましい。即
ち、本発明者らが、一般的な紫外線酸化装置の最大照射
エネルギーである８Ｗ・ｈｒ（６０分照射）の時の分解
効率を１００％とした際のイオン濃度増加率（分解効
率）と照射エネルギーとの関係を求めた結果、図２に示
す如く、２Ｗ・ｈｒ以上の照射エネルギーに設定するこ
とで水中の微量有機物の８０％以上を酸化分解できるこ
とが判明した。なお、この照射エネルギーは、超純水製
造装置に通常使用されている紫外線酸化装置の照射エネ
ルギー（１Ｗ・ｈｒ以下）を上回るものである。The ultraviolet irradiation energy of the ultraviolet oxidizing apparatus 3 is preferably 2 W · hr or more. That is, the present inventors consider the ion concentration increase rate (decomposition efficiency) and the irradiation when the decomposition efficiency at 8 W · hr (60 minutes irradiation), which is the maximum irradiation energy of a general ultraviolet oxidation apparatus, is 100%. As a result of obtaining a relationship with energy, as shown in FIG. 2, it was found that by setting the irradiation energy to 2 W · hr or more, 80% or more of trace organic matter in water can be oxidized and decomposed. Note that the irradiation energy exceeds the irradiation energy (1 W · hr or less) of an ultraviolet oxidation device usually used in an ultrapure water production device.
【００１７】紫外線照射エネルギーは、紫外線酸化装置
の紫外線ランプの出力（Ｗ）と照射時間（ｈｒ）との積
で表される。従って、ランプ出力を一定とし、紫外線酸
化装置内の水の滞留時間を変えることで照射エネルギー
を制御することができる。即ち、通常の紫外線酸化装置
において、６０分の照射で８Ｗ・ｈｒであるから、１Ｗ
・ｈｒあたり７．５分となり、従って、２Ｗ・ｈｒ以上
の照射エネルギーをかけるためには、照射時間を１５分
以上にすれば良く、これにより、水中の有機物を十分に
酸化分解することができる。The ultraviolet irradiation energy is represented by the product of the output (W) of the ultraviolet lamp of the ultraviolet oxidation device and the irradiation time (hr). Therefore, the irradiation energy can be controlled by keeping the lamp output constant and changing the residence time of water in the ultraviolet oxidation device. That is, in a normal ultraviolet oxidation apparatus, the irradiation is 60 W for 8 minutes, and therefore, 1 W
-7.5 minutes per hr. Therefore, in order to apply irradiation energy of 2 W · hr or more, the irradiation time may be set to 15 minutes or more, whereby organic substances in water can be sufficiently oxidized and decomposed. .
【００１８】一方、酸化分解により生成したイオンを含
む処理水中のイオン成分を測定して有機物濃度を算出す
る測定部は、酸化分解部から送給される処理水中のイオ
ン成分を濃縮する濃縮カラム５が組み込まれると共に、
検出器６の直前にサプレッサー７を組み込んだ、イオン
を数十ｎｇ／Ｌのオーダーまで検出可能な濃縮型イオン
クロマトグラフを採用しており、高感度にイオン成分を
検出できる構成とされている。On the other hand, the measuring section for measuring the ionic components in the treated water containing the ions generated by the oxidative decomposition and calculating the organic matter concentration comprises a concentration column 5 for concentrating the ionic components in the treated water supplied from the oxidative decomposition section. Is incorporated,
A concentrated ion chromatograph, which incorporates a suppressor 7 immediately before the detector 6 and can detect ions to the order of several tens of ng / L, is employed, and is configured to be able to detect ion components with high sensitivity.
【００１９】即ち、この測定部では、酸化分解部の処理
水ボトル４から送給された処理水を、バルブＶ3の操作
により濃縮カラム５に送給して濃縮し、分離水は系外へ
排水する。そして、濃縮カラム５で濃縮された濃縮水を
分離カラム８に注入する。次いで、溶離液ボトル９から
溶離液を注入し、分離カラム８に吸着されたイオン成分
を展開及び溶離させる。溶離液とサプレッサー７を経て
検出器６に送給し、イオン成分を検出する。１０は、分
離カラム８の再生液ボトルである。That is, in this measuring section, the treated water fed from the treated water bottle 4 in the oxidative decomposition section is sent to the concentration column 5 by operating the valve V 3 to be concentrated, and the separated water is sent out of the system. Drain. Then, the concentrated water concentrated in the concentration column 5 is injected into the separation column 8. Next, an eluent is injected from the eluent bottle 9 to develop and elute the ionic components adsorbed on the separation column 8. It is sent to the detector 6 via the eluent and the suppressor 7, and the ion component is detected. Reference numeral 10 denotes a regenerating liquid bottle of the separation column 8.
【００２０】このような微量有機物測定装置による、水
中の微量有機物の測定は次のように実施される。The measurement of a trace organic substance in water by such a trace organic substance measuring apparatus is performed as follows.
【００２１】まず、酸化分解部において、試料水を紫外
線酸化装置３に通水して水中の有機物を分解し、得られ
た処理水を測定部に送給してイオン成分を測定する。First, in the oxidizing / decomposing section, the sample water is passed through the ultraviolet oxidizing apparatus 3 to decompose organic matter in the water, and the obtained treated water is fed to the measuring section to measure the ionic components.
【００２２】このイオン成分の測定に当っては、各イオ
ン成分毎に測定を行えることから、他の無機物イオンを
除外した重炭酸イオンのみのピークを検出し、その面積
から炭素濃度としての正確な有機物濃度をｐｐｂオーダ
ーまで測定することができる。In the measurement of the ionic components, since the measurement can be performed for each ionic component, the peak of only the bicarbonate ion excluding other inorganic ions is detected, and the accurate area as the carbon concentration is detected from the area thereof. The organic matter concentration can be measured to the ppb order.
【００２３】また、より一層高感度の測定を行なう場合
には、試料水をまず測定部に通水し、予め試料水中のイ
オン成分の濃度（Ｃｉ）を測定する。次に、試料水を酸
化分解して得られた処理水を、測定部で測定して、酸化
分解後の処理水中のイオン濃度（Ｃｏ）を測定する。次
いで、この処理水中のイオン濃度Ｃｏから酸化分解前の
試料水中のイオン濃度Ｃｉを差し引くことにより、試料
水中の有機物の酸化分解で生成した塩化物イオン、硫酸
イオン、硝酸イオン等の無機物イオン濃度、即ち有機物
に起因するイオン成分の各々の濃度を求める。In order to perform a measurement with even higher sensitivity, the sample water is first passed through the measuring section, and the concentration (Ci) of the ionic component in the sample water is measured in advance. Next, the treated water obtained by oxidative decomposition of the sample water is measured by the measuring unit, and the ion concentration (Co) in the treated water after the oxidative decomposition is measured. Next, by subtracting the ion concentration Ci in the sample water before the oxidative decomposition from the ion concentration Co in the treated water, the concentration of inorganic ions such as chloride ions, sulfate ions, and nitrate ions generated by the oxidative decomposition of organic substances in the sample water, That is, the concentration of each of the ionic components caused by the organic matter is determined.
【００２４】このように、高感度に検出される無機物イ
オンで有機物の存在を把握することができ、また、各成
分の測定濃度に基いてｐｐｔオーダーまでの微量分析を
行なうことができる。As described above, the presence of an organic substance can be grasped by inorganic ions detected with high sensitivity, and a trace analysis down to the order of ppt can be performed based on the measured concentration of each component.
【００２５】[0025]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【００２６】なお、以下の実施例では、紫外線酸化装置
として栗田工業（株）製「紫外線酸化装置」を用い、濃
縮型イオンクロマトグラフとしては横河電機（株）製
「ＩＣ−７０００」を用いた。In the following examples, "UV oxidizer" manufactured by Kurita Kogyo Co., Ltd. was used as the ultraviolet oxidizer, and "IC-7000" manufactured by Yokogawa Electric Corporation was used as the concentrated ion chromatograph. Was.
【００２７】実施例１ 図１の装置を用いて、超純水製造装置Ａ〜Ｄで製造され
た各超純水中の微量有機物の測定を行なった。紫外線酸
化装置における照射エネルギーは２Ｗ・ｈｒとした。Example 1 Using the apparatus shown in FIG. 1, trace organic substances in each of the ultrapure water produced by the ultrapure water producing apparatuses A to D were measured. The irradiation energy in the ultraviolet oxidation apparatus was 2 W · hr.
【００２８】まず、酸化分解処理水について、重炭酸イ
オン濃度のみの測定を行ない、その結果から、全有機炭
素濃度（ＴＯＣ，Ｃ換算）を求めた。その後、上記の如
く、酸化分解前後の各無機物イオン濃度の差から酸化分
解により生成した塩化物イオン、硫酸イオン及び硝酸イ
オンの濃度を求め、この結果から塩素濃度、硫黄濃度、
窒素濃度を算出し、結果を表１に示した。First, only the bicarbonate ion concentration was measured for the oxidatively decomposed water, and the total organic carbon concentration (in terms of TOC and C) was determined from the results. Thereafter, as described above, the concentration of chloride ion, sulfate ion, and nitrate ion generated by oxidative decomposition was determined from the difference between the respective inorganic ion concentrations before and after oxidative decomposition, and the chlorine concentration, sulfur concentration,
The nitrogen concentration was calculated, and the results are shown in Table 1.
【００２９】比較例１ 比較のため、実施例１で試料水とした各超純水につい
て、紫外線酸化装置で分解した後、生成した重炭酸イオ
ン濃度を電気伝導度計で測定する従来法により全有機炭
素濃度（ＴＯＣ，Ｃ換算）を求め、結果を表１に示し
た。Comparative Example 1 For comparison, each ultrapure water used as the sample water in Example 1 was decomposed by an ultraviolet oxidizer, and the concentration of the generated bicarbonate ion was measured by a conventional method in which the concentration was measured by an electric conductivity meter. The organic carbon concentration (TOC, C conversion) was determined, and the results are shown in Table 1.
【００３０】[0030]
【表１】 [Table 1]
【００３１】表１より明らかなように、本発明の装置に
よれば、従来法よりも一桁小さいオーダーまで微量有機
物を測定することができ、しかも、無機物イオンの種類
と濃度が正確に測定できることから、おおよその有機物
の種類と濃度を推定することができる。As is evident from Table 1, the apparatus of the present invention can measure trace organic substances to an order of magnitude smaller than the conventional method, and can accurately measure the type and concentration of inorganic ions. From this, it is possible to estimate the approximate type and concentration of the organic matter.
【００３２】[0032]
【発明の効果】以上詳述した通り、本発明の水中の微量
有機物測定装置によれば、超純水等の水中の微量有機物
を正確に測定することができる。また、有機物の酸化分
解により生成する無機物イオンのみからも有機物の存在
を把握することができると共に、おおよその有機物の種
類と濃度を推定することも可能となる。As described above, according to the apparatus for measuring trace organic substances in water of the present invention, trace organic substances in water such as ultrapure water can be accurately measured. In addition, the presence of the organic substance can be grasped only from the inorganic ions generated by the oxidative decomposition of the organic substance, and the type and concentration of the organic substance can be roughly estimated.
【００３３】本発明の装置を実際の超純水プロセスに適
用してイオン交換塔、膜分離装置等の各装置間の水質を
測定することで、有機物の発生源の特定、除去法の開発
が可能になり、これにより、超純水の更なる高純度化を
達成することができる。By applying the apparatus of the present invention to an actual ultrapure water process and measuring the water quality between each apparatus such as an ion exchange tower and a membrane separation apparatus, it is possible to identify a source of organic matter and to develop a method of removing the same. This makes it possible to achieve even higher purification of ultrapure water.
【図１】本発明の水中の微量有機物測定装置の実施の形
態を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of an apparatus for measuring trace organic substances in water according to the present invention.
【図２】紫外線照射エネルギーとイオン濃度増加率との
関係を示すグラフである。FIG. 2 is a graph showing a relationship between ultraviolet irradiation energy and an ion concentration increase rate.
３ 紫外線酸化装置 ５ 濃縮カラム ６ 検出器 ７ サプレッサー ８ 分離カラム 3 UV oxidation device 5 Concentration column 6 Detector 7 Suppressor 8 Separation column
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｇ０１Ｎ 33/18 Ｇ０１Ｎ 33/18 Ｃ Ｄ ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) G01N 33/18 G01N 33/18 CD
Claims (3)
解手段と、酸化分解した処理水中のイオンを測定するイ
オンクロマトグラフを備えた測定手段とを有することを
特徴とする水中の微量有機物測定装置。1. An apparatus for measuring a trace amount of organic matter in water, comprising: an oxidative decomposition means for oxidatively decomposing organic substances in a sample water; and a measuring means having an ion chromatograph for measuring ions in the oxidatively decomposed treated water. .
ンを測定する請求項１に記載の水中の微量有機物測定装
置。2. The apparatus according to claim 1, wherein the inorganic ions are measured by ion chromatography.
記載の水中の微量有機物測定装置。3. The apparatus according to claim 1, wherein the sample water is ultrapure water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11040257A JP2000241402A (en) | 1999-02-18 | 1999-02-18 | Measuring device for trace organic matter in water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11040257A JP2000241402A (en) | 1999-02-18 | 1999-02-18 | Measuring device for trace organic matter in water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000241402A true JP2000241402A (en) | 2000-09-08 |
Family
ID=12575634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11040257A Pending JP2000241402A (en) | 1999-02-18 | 1999-02-18 | Measuring device for trace organic matter in water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000241402A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009257773A (en) * | 2008-04-11 | 2009-11-05 | Japan Organo Co Ltd | Device and method for measuring hydrophilic nonionic material content |
| JP2014122915A (en) * | 2008-09-16 | 2014-07-03 | Kimoto Denshi Kogyo Kk | Suspended particulate matter measuring device and suspended particulate matter measuring method using the same |
| CN103995060A (en) * | 2014-05-20 | 2014-08-20 | 西安热工研究院有限公司 | Method and device for measuring trace organic components in power plant water vapor |
-
1999
- 1999-02-18 JP JP11040257A patent/JP2000241402A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009257773A (en) * | 2008-04-11 | 2009-11-05 | Japan Organo Co Ltd | Device and method for measuring hydrophilic nonionic material content |
| JP2014122915A (en) * | 2008-09-16 | 2014-07-03 | Kimoto Denshi Kogyo Kk | Suspended particulate matter measuring device and suspended particulate matter measuring method using the same |
| CN103995060A (en) * | 2014-05-20 | 2014-08-20 | 西安热工研究院有限公司 | Method and device for measuring trace organic components in power plant water vapor |
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