JP2000188316A5 - Transport method and equipment - Google Patents
Transport method and equipment Download PDFInfo
- Publication number
- JP2000188316A5 JP2000188316A5 JP1998366243A JP36624398A JP2000188316A5 JP 2000188316 A5 JP2000188316 A5 JP 2000188316A5 JP 1998366243 A JP1998366243 A JP 1998366243A JP 36624398 A JP36624398 A JP 36624398A JP 2000188316 A5 JP2000188316 A5 JP 2000188316A5
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- transfer
- transport
- equipment
- transport method
- processed
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- 239000004065 semiconductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 1
- 238000004642 transportation engineering Methods 0.000 description 1
Description
【特許請求の範囲】
【請求項1】 保管部に保管された搬送容器を移し替え部に移動して前記移し替え部に設けられたローダに自動で前記搬送容器を配置する工程と、
前記搬送容器間で移し替え手段によって被処理物を移し替える工程と、
前記被処理物の移し替え後、前記ローダから前記保管部に自動で前記搬送容器を移動する工程とを有することを特徴とする搬送方法。
【請求項2】 請求項1記載の搬送方法であって、前記被処理物として半導体ウェハを用い、前記移し替え手段である移載ロボットによって前記半導体ウェハを前記搬送容器間で移し替えることを特徴とする搬送方法。
【請求項3】 被処理物を収容可能な搬送容器間における前記被処理物の移し替えが行われる移し替え部と、
複数の前記搬送容器を保管可能な保管部と、
前記移し替え部と前記保管部との間で前記搬送容器を移動させる搬送容器移動手段とを有し、
前記被処理物の移し替え時の前記搬送容器の配置および移し替え後の前記搬送容器の移動を自動で行うことを特徴とする搬送装置。
【請求項4】 請求項3記載の搬送装置であって、前記被処理物が半導体ウェハであり、前記移し替え部に、前記半導体ウェハを前記搬送容器間で移し替える移載ロボットが設けられていることを特徴とする搬送装置。
【請求項5】 請求項4記載の搬送装置であって、前記半導体ウェハまたは前記搬送容器もしくはその両者の識別情報を認識する識別情報認識手段が設けられていることを特徴とする搬送装置。
[Claims]
1. A step of moving a transport container stored in a storage unit to a transfer unit and automatically arranging the transport container on a loader provided in the transfer unit.
The process of transferring the object to be processed by the transfer means between the transport containers, and
A transport method comprising a step of automatically moving the transport container from the loader to the storage unit after the transfer of the object to be processed.
2. The transfer method according to claim 1, wherein a semiconductor wafer is used as the object to be processed, and the semiconductor wafer is transferred between the transfer containers by a transfer robot which is the transfer means. Transport method.
3. A transfer unit in which the object to be processed is transferred between transport containers capable of accommodating the object to be processed.
A storage unit that can store a plurality of the transport containers,
It has a transport container moving means for moving the transport container between the transfer unit and the storage unit.
A transport device characterized in that the transport container is arranged at the time of transfer of the object to be processed and the transport container is automatically moved after the transfer.
4. The transfer device according to claim 3, wherein the object to be processed is a semiconductor wafer, and a transfer robot for transferring the semiconductor wafer between the transfer containers is provided in the transfer unit. A transport device characterized by being
5. The transport device according to claim 4, further comprising an identification information recognizing means for recognizing identification information of the semiconductor wafer, the transport container, or both of them.
本発明の目的は、搬送容器の入れ替えおよび搬送を自動化して工場全体の自動化を図る搬送方法および装置を提供することにある。 An object of the present invention is to provide a conveyance method and equipment improve the automation of entire plants to automate the replacement and transportation of the transport container.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36624398A JP2000188316A (en) | 1998-12-24 | 1998-12-24 | Method and device for conveyance and manufacture of semiconductor device using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36624398A JP2000188316A (en) | 1998-12-24 | 1998-12-24 | Method and device for conveyance and manufacture of semiconductor device using the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007064626A Division JP2007150369A (en) | 2007-03-14 | 2007-03-14 | Method of manufacturing semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000188316A JP2000188316A (en) | 2000-07-04 |
JP2000188316A5 true JP2000188316A5 (en) | 2007-05-10 |
Family
ID=18486292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36624398A Pending JP2000188316A (en) | 1998-12-24 | 1998-12-24 | Method and device for conveyance and manufacture of semiconductor device using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000188316A (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002280445A (en) * | 2001-03-16 | 2002-09-27 | Dan Takuma:Kk | Opener for fosb and clean unit device |
KR100407568B1 (en) * | 2001-06-01 | 2003-12-01 | 삼성전자주식회사 | Apparatus for processing semiconductor having foup index inside apparatus establishing area |
JP4831521B2 (en) | 2002-06-19 | 2011-12-07 | 村田機械株式会社 | Automated material processing system for semiconductor manufacturing based on vertical annular conveyor and overhead hoist |
KR101510614B1 (en) | 2002-10-11 | 2015-04-10 | 무라다기카이가부시끼가이샤 | Overhead hoist transport vehicle with overhead hoist |
JP5183861B2 (en) * | 2004-06-10 | 2013-04-17 | アプライド マテリアルズ インコーポレイテッド | Method of using a small lot size substrate carrier and semiconductor device manufacturing facility |
JP4858673B2 (en) * | 2005-05-13 | 2012-01-18 | ムラテックオートメーション株式会社 | Carrying system for suspended lift carriage |
KR101841753B1 (en) | 2006-08-18 | 2018-03-23 | 브룩스 오토메이션 인코퍼레이티드 | Reduced capacity carrier, transport, load port, buffer system |
JP6025250B2 (en) * | 2012-09-20 | 2016-11-16 | ヒューグルエレクトロニクス株式会社 | Substrate case cleaning device |
JP7093318B2 (en) * | 2019-02-18 | 2022-06-29 | 台湾大福高科技設備股▲分▼有限公司 | Goods storage equipment |
CN113957542B (en) * | 2021-11-16 | 2023-03-31 | 湖南科鑫泰电子有限公司 | Corrosion machine with automatic cup pouring function |
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1998
- 1998-12-24 JP JP36624398A patent/JP2000188316A/en active Pending
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