JP2000176705A - Tool member with hard quality carbon coating - Google Patents
Tool member with hard quality carbon coatingInfo
- Publication number
- JP2000176705A JP2000176705A JP10349890A JP34989098A JP2000176705A JP 2000176705 A JP2000176705 A JP 2000176705A JP 10349890 A JP10349890 A JP 10349890A JP 34989098 A JP34989098 A JP 34989098A JP 2000176705 A JP2000176705 A JP 2000176705A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- tool
- film
- hard carbon
- hard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はドリル、エンドミル又は
タップを含む工具に使用される高速度工具鋼又は超硬合
金を母材とする工具上に直接に、又は、前記工具上に T
iN,TiCN,TiAlN,A2O3もしくはこれらの組合せを含む硬質
物質をコーティングしたコーティング工具上に、硬質炭
素系潤滑膜を被覆した、安定した耐久性を有する硬質炭
素系被膜を有する工具部材に関する。BACKGROUND OF THE INVENTION The present invention relates to a high speed tool steel or cemented carbide based tool used for tools including drills, end mills or taps, either directly on a tool or on a tool.
A tool member having a hard carbon-based coating with stable durability, coated with a hard carbon-based lubricating film on a coated tool coated with a hard material containing iN, TiCN, TiAlN, A 2 O 3 or a combination thereof .
【０００２】[0002]
【従来の技術】従来、ダイヤモンドライクカーボン（Ｄ
ＬＣ）と呼ばれる炭素系硬質被膜については、物質特性
として潤滑性や離型性が優れていることが報告されてい
る。またＤＬＣには、硬質でHV5000といわれる硬質系製
法のものと、HV1000程度の C:Hと記載されるもの、又は
メタリックカーボンとよばれるものに大別されている。
これらはプラズマＣＶＤ、カーボンターゲットのスパッ
タ又はアークイオンプレーティングが用いられていた。2. Description of the Related Art Conventionally, diamond-like carbon (D
It has been reported that a carbon-based hard coating called LC) has excellent lubricating properties and releasability as material properties. DLC is roughly classified into a hard material having a hard manufacturing method called HV5000, a material having a C: H of about HV1000, or a material called metallic carbon.
These have used plasma CVD, sputtering of a carbon target, or arc ion plating.
【０００３】[0003]
【発明が解決しようとする課題】一方これらの従来の炭
素系硬質被膜は、いずれのものも工具特に金属を切削す
る工具としては、アルミニウムを切断するまでにとどま
り、それ以上の強度を有する金属の切削に耐えるもので
はなく、かかる炭素系硬質被膜被覆工具の切削性能は無
処理工具のそれ以下となっていた。この原因は刃部先端
における応力集中により、膜の持つ内部応力もしくは微
細結晶・非晶体が持つ破断強度が弱い理由により、フレ
ーキングを生じて非削材の溶着が進むことにあると考え
られる。他方従来のこれらの膜の製造上の問題として
は、プラズマＣＶＤではコーティング工具の場合には処
理が複数回となり成膜速度も遅いためコストアップとな
た。カーボンターゲットのスパッタ又はアークイオンプ
レーティングの場合にはカーボンのイオン化のためのプ
ラズマの形成範囲が狭く、量産には不向きである欠点が
あった。本発明の課題は、ドリル、エンドミル又はタッ
プを含む工具に使用される高速度工具鋼又は超硬合金を
母材とする工具上に直接に、又は、前記工具上に TiN,T
iCN,TiAlN,A2O3もしくはこれらの組合せを含む硬質物質
をコーティングしたコーティング工具上に、安定した耐
久性を有し、かつ量産に適した安価な、硬質炭素系潤滑
膜を被覆した、硬質炭素系被膜を有する工具部材を提供
することにある。On the other hand, any of these conventional carbon-based hard coatings can be used as a tool for cutting a metal, especially a tool for cutting a metal, until the aluminum is cut. The cutting tool does not withstand cutting, and the cutting performance of such a tool coated with a carbon-based hard coating is lower than that of an untreated tool. It is considered that the cause of this is that due to the concentration of stress at the tip of the blade portion, the internal stress of the film or the rupture strength of the fine crystal / amorphous material is weak, so that flaking occurs and welding of the non-cutting material proceeds. On the other hand, as a problem in the production of these conventional films, in the case of a plasma CVD method, a coating tool requires a plurality of treatments and the film forming speed is low, resulting in an increase in cost. In the case of sputtering or arc ion plating of a carbon target, there is a drawback that a plasma formation range for ionizing carbon is narrow and is not suitable for mass production. It is an object of the present invention to provide a high-speed tool steel or cemented carbide-based tool used for a tool including a drill, an end mill or a tap, directly on a tool, or on a TiN, T
On a coated tool coated with a hard substance containing iCN, TiAlN, A 2 O 3 or a combination thereof, a hard carbon-based lubricating film coated with an inexpensive hard carbon-based lubricating film that has stable durability and is suitable for mass production An object of the present invention is to provide a tool member having a carbon-based coating.
【０００４】[0004]
【課題を解決するための手段】このため本発明は、ドリ
ル、エンドミル及びタップを含む工具に使用される高速
度工具鋼又は超硬合金を母材とする工具上に直接に、又
は、前記工具上に TiN,TiCN,TiAlN,A2O3もしくはこれら
の組合せを含む硬質物質をコーティングしたコーティン
グ工具上に、硬質炭素被膜即ち所謂ダイヤモンドライク
カーボン（ＤＬＣ）を含む硬質炭素系潤滑膜であって、
(a).膜全体の膜厚が 2.0μｍ以下のものであり、最上層
に膜厚が 0.2μｍ以上 1,0μｍ以下の硬質炭素系潤滑膜
があり、(b).シリコンと炭素もしくはシリコン、炭素及
び窒素を含む成分からなる中間層を有し、中間層の下に
界面と接する厚さ0.02μｍ以上 0.5μｍ以下のシリコン
単体の層があり、(c).前記硬質炭素系潤滑膜は、Ａスケ
−ルロックウエル硬度計を用いて押圧した場合に生ずる
圧痕を１００倍の倍率で観察した結果が、前記圧痕の外
周１ｍｍ以上の範囲で膜と工具母材との間で剥離、亀裂
が認められない、高潤滑膜を被覆させたことを特徴とす
る硬質炭素系被膜を有する工具部材を提供することによ
って上述した従来技術の課題を解決した。SUMMARY OF THE INVENTION To this end, the present invention is directed to a tool for high speed tool steel or cemented carbide used in tools, including drills, end mills and taps, either directly or on said tool. A hard carbon-based lubricating film containing a hard carbon film, that is, a so-called diamond-like carbon (DLC), on a coating tool coated with a hard material containing TiN, TiCN, TiAlN, A 2 O 3 or a combination thereof,
(a) .The thickness of the entire film is 2.0 μm or less, and a hard carbon-based lubricating film having a thickness of 0.2 μm or more and 1.0 μm or less is provided on the uppermost layer. (b) Silicon and carbon or silicon, There is an intermediate layer composed of a component containing carbon and nitrogen, there is a layer of silicon alone having a thickness of 0.02 μm or more and 0.5 μm or less in contact with the interface under the intermediate layer, (c). The results of observing the indentation generated when pressed using an A-scale Rockwell hardness tester at a magnification of 100 times showed that peeling and cracking were observed between the film and the tool base material in the range of 1 mm or more around the indentation. The above-mentioned problem of the prior art has been solved by providing a tool member having a hard carbon-based coating characterized by being covered with a high lubrication film that cannot be obtained.
【０００５】かかる構成の硬質炭素系潤滑膜を有する工
具部材の製造法として、出願人はプラズマ密度の高いイ
オンプレーティング装置と同構造のPCVD（プラズマＣＶ
Ｄ）装置を用い、ＤＣＬを形成させる。一般にPCVD装置
はプラズマ発生源を持ち、プラズマ内で反応ガスを分解
して成膜する点においてはイオンプレーティング装置と
大差はない。なお、イオンプレーティング装置により、
炭素（カーボン）蒸発源を設置し、成膜初期の核発生を
有利にし、PCVDと同等のＤＬＣ系の成膜は、アセチレン
又はベンゼン等の炭化水素の膜としてを形成すること
は、理論上可能であり得られた膜自身はPCVDで得られる
膜より上質の場合が多いが、切削工具用途としては不十
分である。そこで出願人は各種の中間層及び成膜条件を
調査し検討した結果、半金属即ち Si,Al及び Bが強度的
にも密着性にも優れることが判明したが、AlC の形成で
は反応が不十分であり、BCの形成ではそれ自体が破断強
度が弱い理由から、出願人はSi（シリコン）を選択し
た。破断強度と密着性は表裏の関係があり、図１(2) に
示すように、ロックウエル硬度計の圧痕試験により、破
断強度が弱い場合もしくは密着性が不十分である場合に
は剥離を生じる。又経験的に工具に使用する被覆膜はこ
の圧痕試験により剥離を生じないことが必要条件とされ
ている。さらに図２に示すように、ロックウエル硬度計
の圧痕試験により、亀裂を生じる場合には、膜の延性が
強いことが知られ、耐摩耗用途には適さないとされてい
る。一方、潤滑膜の一つとして、WC膜の上に C膜を成膜
したWC/Cなどの金属炭化物を組み合わせた複合体も提案
されているが、この方法においても同様な効果は期待で
きるかもしれないが、スパッタ法特に複数系の蒸発源を
使用することと、炭化物の蒸発源が高価であるという欠
点を有する。Siについては、ＣＶＤによりSi＋SiC+DLC
の製法が知られているが、反応ガスの毒性が強く（通常
シラン）高価でもあり、機械工業には適さない。As a method of manufacturing a tool member having a hard carbon-based lubricating film having such a structure, the applicant has proposed a PCVD (plasma CV) having the same structure as an ion plating apparatus having a high plasma density.
D) DCL is formed using an apparatus. In general, a PCVD apparatus has a plasma generation source, and is not much different from an ion plating apparatus in that a reaction gas is decomposed in plasma to form a film. In addition, by the ion plating device,
It is theoretically possible to install a carbon (carbon) evaporation source to make it easier to generate nuclei at the beginning of film formation, and to form a DLC film equivalent to PCVD as a film of hydrocarbon such as acetylene or benzene. Although the resulting film itself is often higher quality than the film obtained by PCVD, it is insufficient for cutting tool applications. The applicant has investigated and studied various intermediate layers and film forming conditions, and as a result, it has been found that the metalloids, ie, Si, Al and B, are excellent in both strength and adhesion, but no reaction is observed in the formation of AlC. Applicants have chosen Si (silicon) because it is sufficient and the formation of BC is itself weak in breaking strength. There is a front-to-back relationship between the breaking strength and the adhesion, and as shown in FIG. 1 (2), peeling occurs when the breaking strength is weak or the adhesion is insufficient by an indentation test using a Rockwell hardness tester. Empirically, it is a necessary condition that the coating film used for the tool does not peel off in the indentation test. Further, as shown in FIG. 2, it is known that when a crack is formed by an indentation test using a Rockwell hardness tester, the film is known to have high ductility, and is not suitable for wear-resistant use. On the other hand, as one of the lubricating films, a composite that combines a metal carbide such as WC / C with a C film formed on a WC film has also been proposed, but a similar effect may be expected with this method. However, there are disadvantages in that the sputtering method, particularly using a plurality of evaporation sources, and the carbide evaporation source are expensive. For Si, Si + SiC + DLC by CVD
Is known, but the reaction gas has high toxicity (usually silane) and is expensive, and is not suitable for the machine industry.
【０００６】本発明は、連続的なイオンプレーティング
とPCVDの手法を用い、簡便に硬質炭素系潤滑膜を基本的
には請求項１において規定する条件で成膜することがで
きる。硬質炭素系潤滑膜は膜厚が 2.0μｍを越えると強
度問題から切削時の切り屑の排出時に膜も除去されるこ
とになる。最上層の炭素被膜は膜厚が 0.2μｍ以上でな
いと効果がないし、 1.0μｍ以上では膜全体の強度が不
足する。またSiを界面に成膜することによって図１(1)
に示すような破断強度の強い被膜となった。界面と接す
るシリコン単体の層は厚さが0.02μｍ以上でないと効果
がないし、 0.5μｍを越えると膜全体の強度が不足す
る。以上が請求項１の限定理由である。According to the present invention, a hard carbon-based lubricating film can be easily and basically formed under the conditions defined in claim 1 by using a technique of continuous ion plating and PCVD. When the thickness of the hard carbon-based lubricating film exceeds 2.0 μm, the film is also removed when chips are discharged during cutting due to strength problems. The uppermost carbon film has no effect unless the film thickness is 0.2 μm or more, and the strength of the entire film is insufficient if the film thickness is 1.0 μm or more. Fig. 1 (1)
As a result, a coating film having high breaking strength was obtained. If the thickness of the layer of silicon alone in contact with the interface is not more than 0.02 μm, there is no effect, and if it exceeds 0.5 μm, the strength of the whole film becomes insufficient. The above is the limitation reason of claim 1.
【０００７】一般に耐摩耗用途に使用される膜は高硬度
であるのが普通であるが、従来の硬質炭素被膜の場合
は、母材との曲げ強度の追従性から余り硬度が高い場合
は図１(2) に示すような剥離を生ずる。請求項２におい
て規定するように、実用上の硬度は母材硬度と同等もし
くはそれより以上であって、母材硬度よりやや高い母材
硬度＋HV500 以内で通常のＸ線回析において SiC以外の
明瞭な結晶面が確認されないことが望ましい。さらに請
求項３において規定するように、中間層の膜は、最上層
に向けてシリコン濃度が減少しており、最上層の炭素被
膜との間の密着性を高めており、かつ中間層の膜の窒素
濃度は炭素濃度に対して10％以下の範囲として、母材強
度との追従性を高めた。図３は本発明の硬質炭素系潤滑
膜のSi＋SiC+DLC のＸ線回析プロフール(Cu-ka : 40KV
100mA)を示す。Ｘ線回析結果から SiC以外の際立った結
晶面は観察されなかった。In general, a film used for abrasion resistance generally has a high hardness. However, in the case of a conventional hard carbon coating, if the hardness is too high due to the ability to follow the bending strength with the base metal, the hardness is too low. Peeling occurs as shown in 1 (2). As defined in claim 2, the practical hardness is equal to or higher than the base metal hardness, and within a base metal hardness + HV500 slightly higher than the base material hardness, other than SiC in ordinary X-ray diffraction. Desirably, no crystal plane is confirmed. Further, as defined in claim 3, the film of the intermediate layer has a silicon concentration decreasing toward the uppermost layer, has improved adhesion with the carbon coating of the uppermost layer, and has a film of the intermediate layer. The nitrogen concentration was set to be in a range of 10% or less with respect to the carbon concentration to improve the followability with the base metal strength. FIG. 3 shows an X-ray diffraction profile (Cu-ka: 40 KV) of Si + SiC + DLC of the hard carbon-based lubricating film of the present invention.
100mA). From the results of X-ray diffraction, no distinct crystal plane other than SiC was observed.
【０００８】[0008]
【実施例】〔実施例１〕２０枚の、高速度鋼 HV840 SKH
57相当の10×10mmの角材を 0.2μｍの面粗さに仕上げ、
図４に示すイオンプレ−ティング装置でそれそれぞれ下
記の処理を行い、それぞれ、図８で示すボールオンディ
スク装置を用いた摩擦係数を測定し、さらにＡスケ−ル
ロックウエル硬度計を用いて硬質炭素系潤滑膜を押圧し
た場合に生ずる圧痕を１００倍の倍率で観察した、ロッ
クウエル圧痕による酸化物膜の判定を行った。図１(1),
(2) 及び図２は判定Ａ、Ｂ、Ｃの判定基準を示す。これ
らの結果を表１に示す。実施例１のイオンプレ−ティン
グ装置の処理条件は、図４のイオンプレ−ティング装置
を、2 ×10-5 Torr 以上に排気した上、加熱及びボンバ
ード（プラズマ洗浄）を行うが、加熱は処理の全工程に
おいて 300°C 以下に制御し、ボンバード処理は通常よ
り弱く制御した。使用するルツボは炭素製ルツボを使用
しSiを挿入し、その後コーティングを開始すると、Siが
蒸発し、適宜にアセチレンを導入すると、基板電圧を 2
0V〜200V，制御圧力を10×10-3 Torr 以下1 ×10-4 Tor
r以上の圧力で制御することにより、それぞれ硬質炭素
系潤滑膜を得た。このとき炭素製ルツボにSiを少量添加
すると、まずSiのみが蒸発し、その後 SiCX (0≦ X≦
1) と SiCX ＋ C へ変化するが、Siが減少するため、
最終的にＤＬＣが形成される。[Example 1] 20 high-speed steel HV840 SKH
Finishing 10 × 10mm square lumber equivalent to 57 with 0.2μm surface roughness,
The following processes were respectively performed by the ion plating apparatus shown in FIG. 4, the friction coefficient was measured using the ball-on-disk apparatus shown in FIG. 8, and the hard carbon-based material was measured using an A-scale Rockwell hardness tester. The oxide film was determined by the Rockwell indentation by observing the indentation generated when the lubricating film was pressed at a magnification of 100 times. Fig. 1 (1),
(2) and FIG. 2 show criteria for determinations A, B and C. Table 1 shows the results. The processing conditions of the ion plating apparatus of the first embodiment are as follows. The ion plating apparatus of FIG. 4 is evacuated to 2 × 10 −5 Torr or more, and heating and bombardment (plasma cleaning) are performed. In the process, the temperature was controlled at 300 ° C or less, and the bombarding process was controlled weaker than usual. The crucible to be used is a carbon crucible, and Si is inserted. Then, when coating is started, Si evaporates, and when acetylene is appropriately introduced, the substrate voltage is reduced.
0V to 200V, control pressure below 10 × 10 -3 Torr 1 × 10 -4 Tor
By controlling at a pressure of r or more, a hard carbon-based lubricating film was obtained. At this time, if a small amount of Si is added to the carbon crucible, only Si is evaporated first, and then SiC X (0 ≦ X ≦
1) and changes to SiC X + C, but since Si decreases,
Finally, DLC is formed.
【０００９】[0009]
【表１】 [Table 1]
【００１０】〔実施例２〕２本の高速度工具鋼製無処理
ドリルφ６(DIN338)、各２本の計４組の高速度工具鋼製
ドリルφ６(DIN338)にそれぞれ実施例１の表１の各サン
プルのうちのNo.2, No.10, No.18, No.9のサンプルの10
×10mmの角材のそれぞれ処理のときそれと同一条件で実
施例１のイオンプレ−ティング装置に挿入し、当該サン
プルと同一条件でイオンプレ−ティングにより硬質炭素
系潤滑膜を被覆したドリルを、以下に示す切削条件で切
削試験を行った結果を図５に示す。 No.2, No.10 のドリルはそれぞれ約40％,45 ％の成績で
あるが、本発明品の No.18, No.9はそれぞれ 175％,182
％の優秀な成績を示した。[Example 2] Two high-speed tool steel unprocessed drills φ6 (DIN338) and two sets of four high-speed tool steel drills φ6 (DIN338) were used, respectively. No.2, No.10, No.18, No.9 sample of each sample
At the time of processing each of the square bars of × 10 mm, the drill was inserted into the ion plating apparatus of Example 1 under the same conditions as those of the sample, and the hard carbon-based lubricating film was coated by ion plating under the same conditions as the sample. FIG. 5 shows the results of the cutting test performed under the conditions. The drills of No.2 and No.10 are about 40% and 45%, respectively, but the No.18 and No.9 of the present invention are 175% and 182% respectively.
% Showed excellent results.
【００１１】〔実施例３〕各２本の、無処理TiN コーテ
ィング高速度工具鋼製ドリルφ６(DIN338)、各２本の計
４組のTiN コーティング高速度工具鋼製φ６ドリルにそ
れぞれ実施例１の表１の各サンプルのうちのNo.19, No.
8, No.13, No.16 のサンプルの10×10mmの角材のそれぞ
れ処理のときそれと同一条件で実施例１のイオンプレ−
ティング装置に挿入し、当該サンプルと同一条件でイオ
ンプレ−ティングにより硬質炭素系潤滑膜を被覆したド
リルを、以下に示す切削条件で切削試験を行った結果を
図６に示す。 製無処理φ６ドリル (100 ％）に較べて、No.19, No.8
のドリルはそれぞれ約67％,96 ％の成績であるが、本発
明品のNo.13, No.16はそれぞれ 154％,193％の優秀な成
績を示した。Example 3 Two untreated TiN-coated high-speed tool steel drills φ6 (DIN338) and two each of four sets of TiN-coated high-speed tool steel φ6 drills were used in Example 1. No. 19, No. of each sample in Table 1
8, 10 and 10 samples were treated with the same conditions as in the ion pre-treatment of Example 1 under the same conditions.
FIG. 6 shows the results of a cutting test performed on a drill, which was inserted into a cutting device and coated with a hard carbon-based lubricating film by ion plating under the same conditions as the sample, under the following cutting conditions. No.19, No.8 compared with unprocessed φ6 drill (100%)
Nos. 13 and 16 of the present invention showed excellent results of 154% and 193%, respectively.
【００１２】〔実施例４〕各２本の WC-Co超硬合金製ド
リルφ６、各２本の計４組の WC-Co超硬合金製ドリルφ
６にそれぞれ実施例１の表１の各サンプルのうちのNo.1
5, No.4, No.17, No.6 のサンプルの10×10mmの角材の
それぞれ処理のときそれと同一条件で実施例１のイオン
プレ−ティング装置に挿入し、当該サンプルと同一条件
でイオンプレ−ティングにより硬質炭素系潤滑膜を被覆
したドリルを、以下に示す切削条件で切削試験を行った
結果を図７に示す。 製無処理φ６ドリル (100 ％）に較べて、No.15, No.4
のドリルはそれぞれ約91％,78 ％の成績であるが、本発
明品のNo.17, No.6 はそれぞれ 207％,174％の優秀な成
績を示した。[Example 4] Two WC-Co cemented carbide drills φ6 each, and a total of four sets of WC-Co cemented carbide drills φ2 each
No. 1 of each sample in Table 1 of Example 1 is shown in FIG.
5, 10 and 10 were inserted into the ion plating apparatus of Example 1 under the same conditions as in the processing of the 10 × 10 mm square bars, and the ion plating was performed under the same conditions as the samples. FIG. 7 shows the results of a cutting test performed on a drill coated with a hard carbon-based lubricating film by cutting under the following cutting conditions. No.15, No.4 compared with unprocessed φ6 drill (100%)
No. 17 and No. 6 of the present invention showed excellent results of 207% and 174%, respectively.
【００１３】[0013]
【発明の効果】以上説明したように、本発明は高速度工
具鋼又は超硬合金を母材とする工具上に直接に、又は、
前記工具上に硬質物質をコーティングしたコーティング
工具上に、硬質炭素被膜即ち所謂ダイヤモンドライクカ
ーボン（ＤＬＣ）を含む硬質炭素系潤滑膜を被覆させた
ので、かかる潤滑膜の成膜のない高速度工具鋼等を母材
とする工具、コーティング工具に比べて、性能を約54％
〜 93 ％改善する効果を奏する、安定した耐久性を有
し、かつ量産に適した安価な、硬質炭素系潤滑膜を提供
するものとなった。またかかる機能は、母材が工具鋼を
含めた一般鋼あるいわサーメットやセラミックにおいて
も発揮され、又工具以外の用途においても効果を示すこ
とが示唆されるものである。As explained above, the present invention can be applied directly to a tool based on a high speed tool steel or a cemented carbide, or
Since a hard carbon coating, that is, a hard carbon-based lubricating film containing so-called diamond-like carbon (DLC) is coated on the coated tool obtained by coating the tool with a hard substance, a high-speed tool steel without such a lubricating film is formed. Approximately 54% of performance compared to tools with base material and coating tools
The present invention provides an inexpensive hard carbon-based lubricating film having a stable durability and an effect of improving by 93%, which is suitable for mass production. Further, it is suggested that such a function is also exerted on general steels including tool steel such as cermets and ceramics including tool steels, and also shows an effect in uses other than tools.
【図１】Ａスケ−ルロックウエル硬度計を用いて押圧し
た場合に生ずる圧痕の状態を１００倍の倍率で観察した
結果、ロックウエル圧痕法によるコーティング被膜の判
定を行う判定Ａ、Ｂの判定基準を示す説明図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows the results of observing the state of indentation generated when pressed using a scale A rockwell hardness tester at a magnification of 100 times. FIG.
【図２】Ａスケ−ルロックウエル硬度計を用いて押圧し
た場合に生ずる圧痕の状態を１００倍の倍率で観察した
結果、ロックウエル圧痕法によるコーティング被膜の判
定を行う判定Ｃの判定基準を示す説明図。FIG. 2 is a diagram showing the criteria of judgment C for judging the coating film by the Rockwell indentation method as a result of observing the state of the indentation generated when pressed using an A-scale Rockwell hardness tester at a magnification of 100 times. FIG.
【図３】本発明の硬質炭素系潤滑膜のSi＋SiC+DLC のＸ
線回析プロフール(Cu-ka : 40KV100mA)を示す。FIG. 3 shows the X of Si + SiC + DLC of the hard carbon-based lubricating film of the present invention.
Fig. 2 shows a line diffraction profile (Cu-ka: 40KV100mA).
【図４】本発明の硬質炭素系潤滑膜を成膜するイオンプ
レ−ティング装置のブロック図。FIG. 4 is a block diagram of an ion plating apparatus for forming a hard carbon-based lubricating film according to the present invention.
【図５】実施例２の、２本の高速度工具鋼製無処理ドリ
ルφ６(DIN338)、各２本の計４組の高速度工具鋼製ドリ
ルφ６(DIN338)にそれぞれ表１〔実施例１〕の各サンプ
ルのうちのNo.2, No.10, No.18, No.9のサンプルをそれ
ぞれ処理したときと同一条件で実施例１のイオンプレ−
ティング装置に挿入し、当該サンプルと同一条件でイオ
ンプレ−ティングにより硬質炭素系潤滑膜を被覆したド
リルを、実施例２に示す切削条件で切削試験を行った結
果を示すグラフ。FIG. 5 shows two unprocessed high-speed tool steel drills φ6 (DIN338) and two sets of two high-speed tool steel drills φ6 (DIN338) of Example 2 in Table 1 respectively. No. 2, No. 10, No. 18, and No. 9 of each sample of [1] were processed under the same conditions as when the samples were processed.
7 is a graph showing the results of a cutting test performed on a drill, which was inserted into a cutting device and coated with a hard carbon-based lubricating film by ion plating under the same conditions as the sample, under the cutting conditions shown in Example 2.
【図６】実施例３の、各２本の、無処理TiN コーティン
グ高速度工具鋼製ドリルφ６(DIN338)、各２本の計４組
のTiN コーティング高速度工具鋼製φ６ドリルにそれぞ
れ表１〔実施例１〕の各サンプルのうちのNo.19, No.8,
No.13, No 16 のサンプルをそれぞれ処理したときと同
一条件で実施例１のイオンプレ−ティング装置に挿入
し、当該サンプルと同一条件でイオンプレ−ティングに
より硬質炭素系潤滑膜を被覆したドリルを、実施例３に
示す切削条件で切削試験を行った結果を示すグラフ。FIG. 6 shows two sets of untreated TiN-coated high-speed tool steel drills φ6 (DIN338) and two sets of four sets of TiN-coated high-speed tool steel φ6 drills of Example 3, respectively. No. 19, No. 8,
Under the same conditions as when the samples No. 13 and No. 16 were respectively processed, they were inserted into the ion plating apparatus of Example 1, and a drill coated with a hard carbon-based lubricating film by ion plating under the same conditions as the samples was used. 9 is a graph showing the results of a cutting test performed under the cutting conditions shown in Example 3.
【図７】実施例４の、各２本の WC-Co超硬合金製ドリル
φ６、各２本の計４組の WC-Co超硬合金製ドリルφ６に
それぞれ表１〔実施例１〕の各サンプルのうちのNo.15,
No.4, No.17, No.6 のサンプルをそれぞれ処理したと
きと同一条件で実施例１のイオンプレ−ティング装置に
挿入し、当該サンプルと同一条件でイオンプレ−ティン
グにより硬質炭素系潤滑膜を被覆したドリルを、実施例
４に示す切削条件で切削試験を行った結果を示すグラ
フ。FIG. 7 shows two sets of WC-Co cemented carbide drills φ6 of Example 4 and two sets of WC-Co cemented carbide drills φ2 of two each, respectively, as shown in Table 1 [Example 1]. No.15 of each sample,
The samples No. 4, No. 17 and No. 6 were inserted into the ion plating apparatus of Example 1 under the same conditions as when they were processed, and a hard carbon-based lubricating film was formed by ion plating under the same conditions as the samples. 9 is a graph showing the results of a cutting test performed on the coated drill under the cutting conditions shown in Example 4.
【図８】ボールオンディスク装置を用いた摩擦係数測定
装置のブロック図。FIG. 8 is a block diagram of a friction coefficient measuring device using a ball-on-disk device.
フロントページの続き Ｆターム(参考） 3C046 FF03 FF04 FF05 FF09 FF10 FF17 FF25 FF32 FF33 FF34 FF40 FF42 FF55 4K029 AA02 AA04 BA34 BA35 BA44 BA54 BA56 BA58 BA60 BB02 BB07 BC02 BD05 EA01 4K030 BA28 BA29 BA37 BA38 BA41 BA43 BB01 BB12 CA02 CA03 LA22 4K044 AA02 AB05 BA13 BA18 BA19 BB02 BC01 CA13 CA14 Continued on front page F-term (reference) 4K044 AA02 AB05 BA13 BA18 BA19 BB02 BC01 CA13 CA14
Claims (3)
具に使用される高速度工具鋼又は超硬合金を母材とする
工具上に直接に、又は、前記工具上に TiN,TiCN,TiAlN,
A2O3もしくはこれらの組合せを含む硬質物質をコーティ
ングしたコーティング工具上に、以下の条件を満たす硬
質炭素被膜即ち所謂ダイヤモンドライクカーボン（ＤＬ
Ｃ）を含む硬質炭素系潤滑膜を被覆させたことを特徴と
する硬質炭素被膜を有する工具部材。 (a).膜全体の膜厚が 2.0μｍ以下のものであり、最上層
に膜厚が 0.2μｍ以上 1,0μｍ以下の硬質炭素系潤滑膜
がある。 (b).シリコンと炭素もしくはシリコン、炭素及び窒素を
含む成分からなる中間層を有し、中間層の下に界面と接
する厚さ0.02μｍ以上 0.5μｍ以下のシリコン単体の層
がある。 (c).前記硬質炭素系潤滑膜は、Ａスケ−ルロックウエル
硬度計を用いて押圧した場合に生ずる圧痕を１００倍の
倍率で観察した結果が、前記圧痕の外周１ｍｍ以上の範
囲で膜と工具母材との間で剥離、亀裂が認められない。1. Directly on a high speed tool steel or cemented carbide tool used for tools including drills, end mills and taps, or on said tools TiN, TiCN, TiAlN,
On a coating tool coated with a hard material containing A 2 O 3 or a combination thereof, a hard carbon coating satisfying the following conditions, that is, so-called diamond-like carbon (DL)
A tool member having a hard carbon film coated with a hard carbon-based lubricating film containing C). (a). The entire film has a thickness of 2.0 μm or less, and a hard carbon-based lubricating film having a thickness of 0.2 μm or more and 1.0 μm or less is provided as the uppermost layer. (b). There is an intermediate layer made of silicon and a component containing carbon or silicon, carbon and nitrogen, and below the intermediate layer, there is a layer of silicon alone having a thickness of 0.02 μm or more and 0.5 μm or less in contact with the interface. (c). The hard carbon-based lubricating film was obtained by observing the indentation generated when pressed using an A-scale Rockwell hardness tester at a magnification of 100 times. No peeling or cracking is observed between the tool base material.
もしくは超硬合金上に成膜される請求項１を満足する硬
質炭素系潤滑膜において、少なくとも 50gのビッカース
硬度計で計測される硬度が母材硬度と同等もしくはそれ
以上であって、母材硬度＋HV500 以内にあり、通常のＸ
線回析において SiC以外の明瞭な結晶面が確認されない
ことを特徴とする硬質炭素被膜を有する工具部材。2. A hard carbon lubricating film satisfying claim 1, which is formed on a high speed tool steel or a cemented carbide having a hardness of HV800 or more, has a hardness measured by a Vickers hardness tester of at least 50 g. It is equal to or higher than the base material hardness and within the base material hardness + HV500.
A tool member having a hard carbon coating, wherein a clear crystal plane other than SiC is not observed in a line diffraction.
シリコン濃度が減少しており、かつ前記中間層の膜の窒
素濃度は炭素濃度に対して10％以下の範囲にあることを
特徴とする請求項１又は請求項２記載の硬質炭素被膜を
有する工具部材。3. The method according to claim 1, wherein the film of the intermediate layer has a silicon concentration decreasing toward the uppermost layer, and the nitrogen concentration of the film of the intermediate layer is within 10% of the carbon concentration. A tool member having the hard carbon coating according to claim 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34989098A JP3372493B2 (en) | 1998-12-09 | 1998-12-09 | Tool member having hard carbon-based coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34989098A JP3372493B2 (en) | 1998-12-09 | 1998-12-09 | Tool member having hard carbon-based coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000176705A true JP2000176705A (en) | 2000-06-27 |
| JP3372493B2 JP3372493B2 (en) | 2003-02-04 |
Family
ID=18406809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34989098A Expired - Fee Related JP3372493B2 (en) | 1998-12-09 | 1998-12-09 | Tool member having hard carbon-based coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3372493B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002113604A (en) * | 2000-08-03 | 2002-04-16 | Sumitomo Electric Ind Ltd | Cutting tool |
| JP2005088130A (en) * | 2003-09-18 | 2005-04-07 | Nachi Fujikoshi Corp | Hard film coated tool and target for hard film formation |
| US6881475B2 (en) | 2001-06-13 | 2005-04-19 | Sumitomo Electric Industries, Ltd | Amorphous carbon coated tool and fabrication method thereof |
| US6962751B2 (en) | 2001-06-13 | 2005-11-08 | Sumitomo Electric Industries, Ltd. | Amorphous carbon coated tools and method of producing the same |
| JP2007083382A (en) * | 2005-08-26 | 2007-04-05 | Sumitomo Electric Hardmetal Corp | Hard carbon coating tool |
| KR100706583B1 (en) * | 2000-12-11 | 2007-04-11 | 오에스지 가부시키가이샤 | Diamond-coated body including interface layer interposed between substrate and diamond coating, and method of manufacturing the same |
| WO2007132570A1 (en) * | 2006-05-17 | 2007-11-22 | Toyo Advanced Technologies Co., Ltd. | Medical device having diamond-like thin film and method for manufacture thereof |
| CN103108716A (en) * | 2010-09-07 | 2013-05-15 | 住友电工硬质合金株式会社 | Surface-coated cutting tool |
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| JP5287395B2 (en) * | 2009-03-18 | 2013-09-11 | 三菱マテリアル株式会社 | Wear-resistant tool material with excellent heat resistance and durability |
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1998
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002113604A (en) * | 2000-08-03 | 2002-04-16 | Sumitomo Electric Ind Ltd | Cutting tool |
| KR100706583B1 (en) * | 2000-12-11 | 2007-04-11 | 오에스지 가부시키가이샤 | Diamond-coated body including interface layer interposed between substrate and diamond coating, and method of manufacturing the same |
| US6881475B2 (en) | 2001-06-13 | 2005-04-19 | Sumitomo Electric Industries, Ltd | Amorphous carbon coated tool and fabrication method thereof |
| US6962751B2 (en) | 2001-06-13 | 2005-11-08 | Sumitomo Electric Industries, Ltd. | Amorphous carbon coated tools and method of producing the same |
| JP2005088130A (en) * | 2003-09-18 | 2005-04-07 | Nachi Fujikoshi Corp | Hard film coated tool and target for hard film formation |
| JP2007083382A (en) * | 2005-08-26 | 2007-04-05 | Sumitomo Electric Hardmetal Corp | Hard carbon coating tool |
| WO2007132570A1 (en) * | 2006-05-17 | 2007-11-22 | Toyo Advanced Technologies Co., Ltd. | Medical device having diamond-like thin film and method for manufacture thereof |
| US7931934B2 (en) | 2006-05-17 | 2011-04-26 | Toyo Advanced Technologies Co., Ltd. | Medical device having diamond-like thin film and method for manufacturing thereof |
| CN103108716A (en) * | 2010-09-07 | 2013-05-15 | 住友电工硬质合金株式会社 | Surface-coated cutting tool |
| US9044811B2 (en) | 2010-09-07 | 2015-06-02 | Sumitomo Electric Hardmetal Corp. | Surface coated cutting tool |
| CN103108716B (en) * | 2010-09-07 | 2015-07-01 | 住友电工硬质合金株式会社 | Surface-coated cutting tool |
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